CN101849170B - Pressure sensor - Google Patents
Pressure sensor Download PDFInfo
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- CN101849170B CN101849170B CN200880114596.0A CN200880114596A CN101849170B CN 101849170 B CN101849170 B CN 101849170B CN 200880114596 A CN200880114596 A CN 200880114596A CN 101849170 B CN101849170 B CN 101849170B
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- Prior art keywords
- pressure
- coupled
- deflectable diaphragm
- capacitor plate
- variable condenser
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
- G01F1/383—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule with electrical or electro-mechanical indication
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
A pressure transmitter (10) is provided. The pressure transmitter (10) includes a pressure sensor (60) including a pair of process fluid pressure ports (14, 16) each having a deflectable diaphragm (70, 72). A first variable capacitor is disposed within the pressure sensor (60) and has a capacitance that varies with differential pressure between the process fluid ports (14, 16). A second variable capacitor is disposed within the pressure sensor (60) and has a capacitance that varies with line pressure.
Description
Background technology
A kind of equipment that has become very useful in industrial control condition is pressure unit.Pressure unit is the hydrodynamic pressure in detection process container the equipment that the electric signal of indicated pressure is provided to control system.Conventionally, pressure unit has the pressure transducer that can measure differential pressure or line pressure.Differential pressure is two pressure differentials between pressure port.Line pressure is the pressure in any in pressure port.In some cases, pressure transducer comprises in response to the deflectable diaphragm that applies the pressure deflection on it, and has on this dividing plate or be attached to the electric structure of this dividing plate, and this electricity structural response is in dividing plate deflection and pressure change device electrical characteristics.Use the pressure unit of capacitance pressure transducer, conventionally to fill full dielectric fill fluid, this dielectric fill fluid increases the electric capacity of pressure transducer to increase sensor resolution.Yet in the situation that revealing appears in such sensor, dielectric fill fluid (being silicone oil sometimes) will overflow in the system of entering, thus polluted product or process fluid itself.
Summary of the invention
A kind of pressure unit is provided.This pressure unit comprises: pressure transducer, comprises a pair of pressure process fluid port respectively with deflectable diaphragm.The first variable condenser is placed in pressure transducer, and has the electric capacity changing along with the pressure reduction between process fluid port.The second variable condenser is placed in pressure transducer and has the electric capacity changing along with line pressure.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the differential pressure transmitter of operation in process is installed.
Fig. 2 is according to the block diagram of the differential pressure transmitter of the embodiment of the present invention.
Fig. 3 is according to the sectional view of a part for the combination differential pressure of the embodiment of the present invention and line pressure sensor.
Fig. 4 is the schematic diagram that combines according to another embodiment of the present invention differential pressure and line pressure sensor.
Fig. 5 A-C shows the various reactions of the sensor shown in Fig. 4 to different system pressure.
Fig. 6 is the schematic diagram that combines according to another embodiment of the present invention differential pressure and line pressure sensor.
Fig. 7 A-C shows the various reactions of the sensor shown in Fig. 6 to different system pressure.
Fig. 8 is the schematic diagram of differential pressure and line pressure sensor according to another embodiment of the present invention.
Fig. 9 A-C shows the various reactions of the sensor shown in Fig. 8 to different system pressure.
Figure 10 is the schematic diagram of differential pressure and line pressure sensor according to another embodiment of the present invention.
Figure 11 A-C shows the various reactions of the sensor shown in Figure 10 to different system pressure.
Embodiment
Fig. 1 is the schematic diagram of the differential pressure transmitter of operation in cleaning course is installed.Differential pressure transmitter 10 is operationally coupled to process fluid container (being shown schematically as pipeline 12) via a pair of pressure process fluid conduit or tap 14,16.The both sides that tap 14 or 16 is placed in flow blocked thing 18, flow blocked thing 18 by the flow blockage of the process fluid by pipeline 12 to a certain extent, thereby on obturator 18, produce the differential pressure relevant with the flow velocity of process fluid.And process fluid container 12 (being shown schematically as pipeline) can be can store and/or any suitable process vessel of transport process fluid.In addition, process fluid as used herein is intended to represent any process gas or liquid.And shown in differential pressure transmitter 10 there is the differential pressure port of its offside that is coupled to fluid-blocking thing 18, also it is contemplated that various other uses for differential pressure transmitter.
Transmitter 10 is electrically coupled to pulpit 20 via procedure communication loop 22.For simplicity, procedure communication loop 22 is shown has couple of conductor, but in reality, can have the wire of any applicable number.In addition, for simplicity, pulpit 20 is simply shown voltage source and resistance in series.In reality, controller 20 can be the complicated pulpit that has or be comprised of many controllers and power supply.
The potential less desirable impact of revealing in order to reduce fill fluid, differential pressure transmitter 10 (hereinafter will be described in more detail) does not comprise any fill fluid.Correspondingly, process fluid itself directly acts in differential pressure transmitter 10 or via pressure process fluid port one 4, is coupled to the differential pressure cell of this pressure difference transmitter 10.
Fig. 2 is according to the block diagram of the pressure unit 10 of the embodiment of the present invention.Transmitter 10 comprises power module 50 and loop communicator 52, and wherein each is suitable for being coupled to procedure communication loop 22.Power module 50 receives the energy of self-loop 22, and provides electric energy to all component of differential pressure transmitter.Loop communicator 52 is coupled to controller 56, makes loop communicator 52 provide indication to be received from the data of the procedure communication signal in loop 22 to controller 56.On the contrary, loop communicator 52 can receive the data of self-controller 56 and on loop 22, produce applicable procedure communication signal.
Loop communicator 52 can be to be suitable for producing on procedure communication loop 22 according to procedure communication industry-standard protocol any applicable equipment that is applicable to signal.The applicable example of this process industrial communication protocol comprises the remote transducer of highway addressable
agreement, FOUNDATION
tMfieldbus or any other applicable agreement.In addition,, due to the cooperation between power module 50 and loop communicator 52, the identical connection that transmitter 10 can therefrom receive power supply by it at least in certain embodiments communicates.According to application, it 52 can or comprise circuit communication and be suitable for the transceiver that communicates according to any applicable wireless communication protocol, these applicable wireless communication protocols include but not limited to: radio network technique (for example, by Linksys of Irvine, IEEE 802.11b WAP and Wireless Communication Equipment that California builds), honeycomb or digital network technology (for example, Aeris Communications Inc.ofSan Jose, California's
), ultra broadband, free optics, global system for mobile communications (GSM), General Packet Radio Service (GPRS), CDMA (CDMA), spread spectrum, infrared communication technique, SMS (Short Message Service/text messaging) or any other applicable wireless technology.In addition, or alternatively, loop communicator 52 is suitable for newly wireless according to what announced by Hart Communication Foundation
standard communicates.Wireless
the relevant portion of standard comprises: HCF_Spec 13,7.0 versions; HART standard 65-radio physical layer standard; HART standard 75-TDMA data link layer standard (TDMA refers to time division multiple access (TDMA)); HART standard 85-network management standard; HART standard 155-wireless command standard; And HART standard 290-wireless device standard.
In addition, can use known data collision technology, a plurality of transmitters can be coexisted within the scope of radio operation each other.Such collision prevents from comprising the many different radio frequency channels of use and/or spread spectrum.
Controller 56 is coupled to metering circuit 58, and metering circuit 58 is coupled to sensor 60.Metering circuit 58 comprises that applicable circuit is with the electrical characteristics of one or more variations of survey sensor 60, and the data of indication process fluid differential pressure and/or line pressure are provided to controller 56.Preferably, metering circuit 58 comprises at least one analog-to-digital converter that is suitable for the one or more capacitances in pressure transducer 60 to convert to the numerical data that is transferred to controller 56.Pressure transducer 60 is operationally coupled respectively to the first and second pressure process fluid port ones 4,16, and conventionally there are at least one electrical characteristics changing along with the differential pressure existing between port one 4,16, and there are the electrical characteristics along with the line pressure variation of one or two port one 4,16 interior existence.Preferably, differential pressure pick-up 60 has a plurality of capacitor boards that produce a pair of variable capacitance amount; The first electric capacity changes with differential pressure; The second electric capacity changes with line pressure.Typically, the line pressure that measure is P1, but can also be P2 according to application.
Fig. 3 is according to the sectional view of a part for the pressure transducer 60 for cleaning ambient of the embodiment of the present invention.Although Fig. 3 is sectional view, preferably the 3D shape of sensor 60 is in fact circular.Yet, according to embodiments of the invention, can use other shapes, for example, rectangle or square.Pressure transducer 60 comprises the first and second process fluid port ones 4,16 that process fluid is directly exerted pressure to corresponding deflectable diaphragm 70,72.Preferably, deflectable diaphragm the 70, the 72nd, axle is to quasi-circular dividing plate, and coupled to each other via robust support bar 74.Support bar 74 is incoercible at least vertically, thereby and the movement of dividing plate 70,72 be closely connected together.Correspondingly, if the pressure in port one 4 (P1) surpasses the pressure (P2) in port one 6, dividing plate 70,72 is by deflection, and support bar 74 will move to right side slightly.On the contrary, if the pressure in port one 6 (P2) surpasses the pressure (P1) in port one 4, dividing plate 70 and 72 will move to left side together with support bar 74.Preferably, use welding that the end of support bar 74 75 and 77 is attached to respective diaphragms 70,72.For easily manufactured, at assembly process, bellmouth 79,81 is the end 75,77 of guide support bar respectively.
As shown in Figure 3, sensor 60 comprises a pair of variable capacitance.The first variable capacitance forms between capacitor plate 76 and 78, and has with respect to the movement (L-R) of support bar 74 and the electric capacity changing.Correspondingly, the electric capacity between pole plate 76,78 corresponds directly to the differential pressure existing between port one 4,16.Sensor 60 also comprises the capacitor plate 80,82 that forms the variable condenser with corresponding deflectable diaphragm 70,72.Utilize the combination of capacitor plate 80,82 and conduction deflectable diaphragm 70,72 that the indication of the respective clearance between pole plate 80,82 and their corresponding deflectable diaphragm can be provided.For example, the electric capacity at measure traverse line 84,86 two ends provides the indication in the gap 88 between capacitor plate 82 and deflectable diaphragm 72.This capacitance measurement can be for determining the pressure put on dividing plate 72, thereby and be provided for measuring the means of line pressure.Similarly, the electric capacity of measuring between wire 90,92 provides the indication in the gap 94 between capacitor plate 80 and deflectable diaphragm 70.Correspondingly, this capacitance measurement can be for determining the pressure put on dividing plate 70, thereby and provide line pressure to read.
For convenient, manufacture, preferably sensor 60 is formed by many different pieces.Particularly, sensor 60 comprises: the first pressure entrance part 96, the second pressure entrance part 98, the first pressure reduction unit half part 100 and the second pressure reduction unit half part 102.The first pressure entrance part 96 likes that interface 104 places are coupled to the first differential pressure cell half part 100.Similarly, the second pressure entrance 98 is coupled to the second differential pressure cell half part 102 at interface 106 places.Finally, differential pressure cell half part 100,102 is coupled at interface 108 places.Preferably, all parts 96,98,100,102 are formed by high tensile corrosion-resistant material, for example, can obtain from Uddeholm Tool Steels
the Custom455 that can obtain from Carpenter Technology Corpration and/or Custom 465 stainless steels, can obtain from Haynes International
or can obtain from Elgiloy Limited Partnership
these are the stainless steels with excellent resilient property.Correspondingly, also can use applicable pottery, include but not limited to, the Alumina that can obtain from General Electric Company, YTZP,
and/or the Alon that can obtain from Surmet Corporation
tM.Preferably, deflectable diaphragm 70,72 can be directly and part 96,98 be processed into one, and no matter whether exert pressure all to intrinsic deflection.
Differential pressure pick-up 60 also has and is configured to easily stop and the strong inner structure in response to over-voltage events.Particularly, support bar 74 comprises flange 110, if there is respectively displacement to the left or to the right too much, this flange 110 supports surface 112 or 114.For example, if pressure P 1 overpressure P2 very a large amount of (differential pressure overvoltage), dividing plate 70 and 72 and support bar 74 by deflection to the right, until flange 110 contacts the surface 114 of the second pressure half parts 102.Once there is such contact, utilize and do not have additional deflection to be simply blocked in any additonal pressure that port one 4 places apply.Due to the gap that the electric capacity from pole plate 80,82 can be measured deflectable diaphragm to a certain extent, therefore, the reading of electric capacity can be for checking or in addition for differential pressure measurement provides redundancy.
Fig. 4 is according to the schematic diagram of a part for the differential pressure pick-up 260 of the embodiment of the present invention.Pressure transducer 260 is with the difference of sensor 60 (describing about Fig. 3 above), and pressure port 14,16 is present in same level in fact each other.Therefore, the embodiment shown in Fig. 4 is copline differential pressure pick-up.Pressure transducer 260 still comprises a pair of deflectable diaphragm 270,272 that couples directly to process fluid.And Fig. 4 does not illustrate the process fluid port one 4,16 being isolated from each other, when applicable manifold or other process pipelines are coupled to pressure transducer 260, port one 4,16 is isolated from each other.Deflectable diaphragm 270 is coupled to the first beam 274, and deflectable diaphragm 272 is coupled to the second beam 276.Correspondingly, crossbeam 278 is coupled to the first and second beams 274,276, and comprises that downward expansion or oar element 280, oar linear element 280 comprise a pair of capacitor plate 282,284.Each capacitor plate 282,284 and be arranged on the variable capacitance that capacitor plate in fixed L part 290 286,288 forms separately.Layout shown in Fig. 4 provides the movement of dissimilar parts 280 according to line pressure or differential pressure.Fig. 5 A-5C shows such movement.
The situation that when Fig. 5 A shows differential pressure and keeps constant, line pressure increases.Under these circumstances, beam 274,276 and 278 has experienced the relative displacement from the position shown in dotted line to the position shown in solid line.Therefore, oar element 280 vertically moves.This has changed the variable capacitance amount between pole plate 284,288, and that electric capacity between pole plate 282 and 286 keeps is constant in fact.Therefore, the variation that the first variable capacitance amount records line pressure, and the second variable capacitance amount indication differential pressure does not also change.In Fig. 5 B, the pressure (P1) at port one 4 places surpasses the pressure (P2) at port one 6 places, and beam 274 promotes with respect to beam 276.This rocking action causes that oar element 280 rotates at least to a certain degree in clockwise manner, thereby changes the gap between capacitor plate 282 and 286.Yet the gap between capacitor plate 284 and 288 does not change in fact.
Contrary situation has been shown in Fig. 5 C.Particularly, create differential pressure, a certain amount of thereby P2 surpasses P1, therefore, cause that beam 276 promotes than beam 274.This causes that oar element 280 rotates in clockwise manner, thereby increases the gap between electric capacity dull and stereotyped 282 and 286.Correspondingly, pressure transducer 260 is not only providing differential pressure that the indication of line pressure is also provided without utilize fill fluid in the situation that.
Fig. 6 is according to another embodiment of the present invention for the combination differential pressure of cleaning ambient and the schematic diagram of line pressure sensor.Sensor 360 has some similarity with sensor 260 (describing about Fig. 4), and similar assembly is similarly numbered.Sensor 360 is with the difference of sensor 260, and sensor changes in response to differential pressure and line pressure.Particularly, beam 374 is coupled to the first Half Beam 378-1, and the first Half Beam 378-1 is coupled to the first horn shape part 380-1, and the second beam 376 is coupled to the second Half Beam 378-2, and the second Half Beam 378-2 is coupled to the second horn shape part 380-2.Capacitor plate 386,382 is positioned on corresponding horn shape part 380-1,380-2, or is otherwise coupled to corresponding horn shape part 380-1,380-2.In addition, the surface of horn shape part 380-2 has the capacitor plate 384 being located thereon.Therefore,, along with line pressure in port one 6 increases, the relative gap between pole plate 384 and 388 is respective change also.Therefore,, along with the differential pressure between port one 4,16 changes, the gap between pole plate 382,386 also changes.Following Fig. 7 A-7C shows these variations.
In Fig. 7 A, it is constant that pressure reduction keeps, and line pressure will change.Obviously find out, beam 374,376 moves to the position shown in dotted line from the position shown in solid line.This situation keeps the identical gap between the first and second horn shape part 380-1,380-2, and gap between pole plate 384 and 388 changes, thus the variation of indication line pressure.
In Fig. 7 B, the pressure (P1) at port one 4 places has surpassed the pressure (P2) at port one 6 places.This variation causes that beam 374 and beam part 378-1 move to the position shown in dotted line from the position shown in solid line.This has changed the relative gap between capacitor plate 382 and 386, and that gap between pole plate 384 and 388 keeps is identical.
In Fig. 7 C, there is contrary situation, beam 376 and beam part 378-2 move to the position shown in dotted line from solid line position.This reacting condition gap between capacitor plate 382,386 increase, and the increase in the gap between pole plate 384 and 388.
Fig. 8 is according to the schematic diagram of the differential pressure/line pressure sensor for cleaning ambient of the embodiment of the present invention.Sensor 460 has some similarity with sensor described above, and similar assembly is carried out to similar numbering.Sensor 460 comprises and is coupled to the first deflectable diaphragm 470 and extends away from this first deflectable diaphragm 470.Semi-girder 402 is coupled to the end 404 of beam 400, and extends to beam 476.The opposite end 406 of beam 402 comprises a pair of capacitor plate 408,410 that forms variable condenser together with each capacitor plate 412,414.Capacitor plate 414 is attached to the region between deflectable diaphragm 470 and 472, and capacitor plate 412 is attached to the lower surface 416 of beam 418, and beam 418 is coupled to beam 476.If it is identical that differential pressure keeps, but line pressure increases, and the relative gap between pole plate 408 and 412 and associated variable capacitance amount will keep identical, and relative gap and electric capacity between pole plate 410 and 414 will change.
Fig. 9 A-9C shows the response of the variation of 460 pairs of line pressures of sensor and differential pressure.Particularly, in Fig. 9 A, line pressure increases, and differential pressure maintenance is identical.Correspondingly, each beam 402 and 418 moves between the position shown in solid line and dotted line.As mentioned above, this has kept the constant clearance between pole plate 408 and 412, and gap between pole plate 410 and 414 changes.In Fig. 9 B, due to the pressure variation at port one 4 places, differential pressure changes.This causes that beam 402 moves between solid line and the indicated position of dotted line.This has produced the variation in the gap of measuring between pole plate 412/408 and between pole plate 410/414.In Fig. 9 C, there is contrary situation, beam 418 and 476 moves between the position shown in solid line and dotted line.In this case, it is identical that relative gap between pole plate 410,414 keeps, and gap between pole plate 412 and 408 changes.An advantage about the configuration shown in Fig. 8 and 9A-9C is, for the reference gap of common mode line pressure from motion tracking.Correspondingly, in order to retain high line pressure, do not need larger gap.Therefore, little gap is for keeping relatively high differential pressure sensitivity.Shall also be noted that, because line pressure signal directly changes with P1 pressure, it is also process graded signal.
Although embodiments of the invention have all concentrated on the various forms about the capacitance sensing of pressure transducer, embodiments of the invention can comprise the displacement sensing of any applicable form.
Figure 10 shows according to the pressure transducer 570 of the employing strainometer displacement measuring technology of the embodiment of the present invention.As in the previous embodiment, pressure transducer 570 comprise can operational coupled to corresponding port 14,16 a pair of deflectable diaphragm 270,272.Each dividing plate 270,272 is coupled to respective beam 574,576.In addition, each beam 574,576 is coupled to corresponding semi-girder 500,502.The lower surface 504 of beam 500 comprises the capacitor plate 506 that forms variable condenser with pole plate 508, wherein pole plate 508 be fixedly mounted on can deflection arm 270,272 between.As shown in figure 10, sensor 570 comprises the straining and sensing element 510 across semi-girder 500,502.Element 510 is connected between beam 500,502 and the signal relevant with the strain of element 510 is provided, so this signal designation differential pressure.Pole plate 506 and 508 is still for providing the line pressure based on electric capacity to measure.As long as there is final pressure reduction between port one 4,16, element 510 bends to " s " of prolongation.The sensing of s shape depends on that pressure larger in two pressure.By the variation of strain, both of these case is differentiable.The strain regime of element 510 is only reacted common mode pressure reduction between P1 and P2, does not react absolute line pressure.Element 510 can be to produce any applicable element of indicating the output of strain on it.Correspondingly, element 510 can be resistance-type strainmeter, piezoelectric strain gauge, piezoresistive strain instrument, its applicable combination.
Figure 11 A-11C shows the response of the variation of 560 pairs of line pressures of sensor and differential pressure.In Figure 11 A, line pressure increases, and differential pressure maintenance is identical.Correspondingly, each beam 500 and 502 moves between the position shown in solid line and dotted line.This does not cause the strain on element 510, and gap between pole plate 506 and 508 changes.In Fig. 9 B, because the pressure at port one 4 places changes, differential pressure changes.This causes that beam 500 moves between the position shown in solid line and dotted line.This has produced the strain of element 510, and the variation of electric capacity between pole plate 506,508.In Figure 11 C, there is contrary situation, beam 502 and 576 moves between the position shown in solid line and dotted line.In this case, element 510 records strain, identical but the electric capacity between pole plate 506,508 keeps.
Although the present invention has been described with reference to preferred embodiment, those skilled in the art will recognize that, under the prerequisite that does not deviate from the spirit and scope of the present invention, can change in the form and details.
Claims (11)
1. a pressure unit, comprising:
Pressure transducer, comprising:
A pair of pressure process fluid port, each port has the deflectable diaphragm that is suitable for being exposed to process fluid, and the first deflectable diaphragm is coupled to the first vertical beam, and the second deflectable diaphragm is coupled to the second vertical beam;
Crossbeam, across the first and second beams and have the oar element of suspension, oar element has a plurality of capacitor plates, and each capacitor plate forms the different piece of variable condenser;
The first variable condenser, is placed in pressure transducer, and has the electric capacity changing with the differential pressure between process fluid port, and the first variable condenser at least partly in a plurality of capacitor plates forms;
The second variable condenser, is placed in pressure transducer, and has the electric capacity changing with line pressure, and another in a plurality of capacitor boards of the second variable condenser forms;
Loop communicator, can be coupled to procedure communication loop and be configured to communicate by loop;
Controller, is coupled to loop communicator; And
Metering circuit, is coupled to controller and pressure transducer so that at least one in the indication of differential pressure and line pressure to be provided by procedure communication loop.
2. pressure unit according to claim 1, also comprises: power module, can be coupled to procedure communication loop, and be configured to wholely to pressure unit, provide the energy that is received from procedure communication loop.
3. pressure unit according to claim 1, wherein, loop communicator is configured to communicate according to process industrial agreement.
4. pressure unit according to claim 1, wherein, the first deflectable diaphragm and the second deflectable diaphragm are positioned at identical plane.
5. pressure unit according to claim 1, wherein, pressure process fluid port between differential pressure change the rotation that produces oar element.
6. pressure unit according to claim 1, wherein, line pressure represents the pressure from one of pressure process fluid port.
7. a pressure unit, comprises
Pressure transducer, comprising:
A pair of pressure process fluid port, each port has the deflectable diaphragm that is applicable to be exposed to process fluid;
Be coupled to the first beam of the first deflectable diaphragm, and be coupled to the second beam of the second deflectable diaphragm;
Straining and sensing element, can operational coupled to the first and second beam, and is configured to have the electrical quantity with strain variation;
The variable condenser forming between a pair of capacitor plate, the first capacitor plate is fixedly mounted near the first and second deflectable diaphragms, and the second capacitor plate one of can operational coupled to the first and second beam;
Loop communicator, can be coupled to procedure communication loop and be configured to communicate by loop;
Controller, is coupled to loop communicator; And
Metering circuit, is coupled to controller and pressure transducer so that at least one in the indication of differential pressure and line pressure to be provided by pressure communication loop.
8. a pressure transducer, comprising:
A pair of pressure process fluid port, each port has the deflectable diaphragm that is suitable for being exposed to process fluid;
The first variable condenser, is placed in pressure transducer, and has the electric capacity changing with differential pressure between process fluid port, and the first variable condenser is by can operational coupled forming at least one capacitor plate of at least one deflectable diaphragm;
The second variable condenser, is placed in pressure transducer, and has the electric capacity changing with line pressure, and the second variable condenser is by can operational coupled forming at least one capacitor plate of at least one deflectable diaphragm; And
Wherein, each deflectable diaphragm is coupled to corresponding vertical beam and semi-girder part, each semi-girder partial coupling is to corresponding horn shape part, corresponding horn shape partly has the capacitor plate being positioned in this horn shape part, capacitor plate in horn shape part forms the first variable condenser, at least one semi-girder partly has the additional capacitor pole plate being positioned on lower surface and cooperates with near the fixed capacity pole plate being positioned at deflectable diaphragm, to form the second variable condenser.
9. pressure transducer according to claim 8, wherein, the first deflectable diaphragm and the second deflectable diaphragm are to being positioned at identical plane.
10. a pressure transducer, comprising:
A pair of pressure process fluid port, each port has the deflectable diaphragm that is applicable to be exposed to process fluid;
Be coupled to the first beam of the first deflectable diaphragm, and be coupled to the second beam of the second deflectable diaphragm;
Straining and sensing element, can operational coupled to the first and second beam, and is configured to have the electrical quantity with strain variation;
The variable condenser forming between a pair of capacitor plate, the first capacitor plate is fixedly mounted near the first and second deflectable diaphragms, and the second capacitor plate one of can operational coupled to the first and second beam.
11. 1 kinds of pressure transducers, comprising:
A pair of pressure process fluid port, each port has the deflectable diaphragm that is suitable for being exposed to process fluid;
The first variable condenser, is placed in pressure transducer, and has the electric capacity changing with differential pressure between process fluid port, and the first variable condenser is by can operational coupled forming at least one capacitor plate of at least one deflectable diaphragm;
The second variable condenser, is placed in pressure transducer, and has the electric capacity changing with line pressure, and the second variable condenser is by can operational coupled forming at least one capacitor plate of at least one deflectable diaphragm; And
Wherein, each deflectable diaphragm is coupled to corresponding vertical beam and semi-girder part, each semi-girder part has capacitor plate on lower surface, wherein, a vertical beam is shorter than another vertical beam, thereby semi-girder partly overlaps each other, wherein, the semi-girder part that is coupled to shorter vertical beam has capacitor plate on surface thereon, to cooperate with the capacitor plate in another semi-girder part, form the first variable condenser, and capacitor plate is fixedly mounted near deflectable diaphragm, to cooperate with the capacitor plate being attached on the lower surface of semi-girder part of shorter vertical beam, to form the second variable condenser.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/983,414 US7779698B2 (en) | 2007-11-08 | 2007-11-08 | Pressure sensor |
| US11/983,414 | 2007-11-08 | ||
| PCT/US2008/082430 WO2009061782A2 (en) | 2007-11-08 | 2008-11-05 | Pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101849170A CN101849170A (en) | 2010-09-29 |
| CN101849170B true CN101849170B (en) | 2014-09-10 |
Family
ID=40419038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200880114596.0A Active CN101849170B (en) | 2007-11-08 | 2008-11-05 | Pressure sensor |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7779698B2 (en) |
| EP (1) | EP2208035B1 (en) |
| JP (1) | JP5231566B2 (en) |
| CN (1) | CN101849170B (en) |
| WO (1) | WO2009061782A2 (en) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2340428A1 (en) * | 2008-04-18 | 2011-07-06 | Socovar Societe En Commandite | System for sensing and displaying softness and force |
| US8429978B2 (en) | 2010-03-30 | 2013-04-30 | Rosemount Inc. | Resonant frequency based pressure sensor |
| US8234927B2 (en) * | 2010-06-08 | 2012-08-07 | Rosemount Inc. | Differential pressure sensor with line pressure measurement |
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Also Published As
| Publication number | Publication date |
|---|---|
| EP2208035B1 (en) | 2013-07-31 |
| JP2011503576A (en) | 2011-01-27 |
| US20090120195A1 (en) | 2009-05-14 |
| WO2009061782A2 (en) | 2009-05-14 |
| CN101849170A (en) | 2010-09-29 |
| EP2208035A2 (en) | 2010-07-21 |
| JP5231566B2 (en) | 2013-07-10 |
| US7779698B2 (en) | 2010-08-24 |
| WO2009061782A3 (en) | 2009-07-30 |
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