CN101833172B - Method for coupling and splitting polarized light and light coupling and splitting device - Google Patents
Method for coupling and splitting polarized light and light coupling and splitting device Download PDFInfo
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Abstract
The invention discloses a method for coupling and splitting polarized light and a light coupling and splitting device. The method is characterized in that: two optical waveguides which are parallel to each other are arranged between an optical fiber and a micro-nano optical waveguide, wherein one optical waveguide has a gradually changed width and is used for coupling and conducting a TE mode, and the other optical waveguide has a gradually changed equivalent thickness and is used for coupling and conducting a TM mode; and the two optical waveguides are respectively connected with the micro-nano optical waveguide through two bend optical waveguides which have opposite or bifarious turning directions, so that the coupling and splitting of the polarized light is realized. The optical waveguide with the gradually changed equivalent thickness can be realized by a sub-wavelength grating waveguide with a gradually increased duty cycle, so correspondingly the effective refractive index of the optical waveguide with the gradually changed equivalent thickness is gradually increased, and the TM mode can be effectively coupled. The method for coupling and splitting the polarized light and the light coupling and splitting device can realize the coupling and splitting of the polarized light in two mutually vertical polarization states.
Description
Technical field
The present invention relates to the method and the coupling light-splitting device of a kind of polarized light coupling and beam split.
Technical background
In recent years, along with the development of microelectric technique and photoelectron technology, the application of micro-nano photonics becomes realization hypervelocity of future generation and vast capacity communication and calculating, the important solutions of technology such as hypersensitivity sensing.Owing to adopted high-index material such as silicon, silicon nitride etc., the sectional dimension of monomode optical waveguide can narrow down to micron even nano-scale, thereby, compared to microelectronic chip, following micro-nano integrated photon chip (Photonic-Integrated-Circuit) can have higher integrated level, stronger function and lower power consumption.But, because the restriction of this body structure of silicon materials can also can't obtain at present with the silicon substrate laser of the integrated making of micro-nano integrated photon chip, therefore, generally the solution of Cai Yonging is to utilize the external laser instrument of optical fiber, provides light source by optical fiber-waveguide coupler for the micro-nano photonic device.But the spot size of single-mode fiber is generally greater than 12 μ m
2, and the sectional dimension of the silica-based passage of single mode (Channel) type optical waveguide is generally less than 0.1 μ m
2, both sizes differ huge, and because the refractive index of silicon materials is about 3.5, the refractive index of fiber cores is about 1.5, and the refractive index difference of the two is also very big, and this causes the mould field of optical fiber and waveguide not match.When optical fiber and waveguide directly are coupled, only can enter in the waveguide less than 1% light, its coupling efficiency is very low.On the other hand, because the light polarization direction when light transmits in optical fiber is unfixing, and the guided modes field of micro-nano size optical waveguide is stable, and has strong polarization selectivity, if the light polarization direction of conducting in polarisation of light direction and the optical waveguide in the optical fiber is orthogonal, then the light in the optical fiber can't be coupled into optical waveguide.Usually, the direct coupling of optical fiber and micro-nano waveguide can cause the unevenness of the polarized light coupling of different polarization direction.Generally can only conduct TE (promptly direction of an electric field is vertical with the waveguide conduction orientation for Transverse Electric, transverse electric field) or TM (promptly magnetic direction is vertical with the waveguide conduction orientation for Transverse Magnetic, transverse magnetic) mould in the micro-nano waveguide.When the TE of different amplitudes and TM mould transmitted in optical waveguide simultaneously, because the speed difference of both transmission can cause the relevant loss of serious polarization, effect of dispersion and late effect etc. caused the transmission signals distortion.In order to solve the problem of polarized light coupling and polarized light beam split, the researchist proposes to utilize two-dimensional grating
[1]TE and TM mould are coupled respectively, allow these two kinds of moulds conduct along light path separately respectively then, or wherein a kind of polarized light or mould field (TE or TM) revolve to turn 90 degrees and transform into another polarized light or mould field (TM or TE), the method that this then that polarization state is identical two-beam converges to adopt the polarization state spinner.This kind method utilizes optical fiber and optical grating construction to be approximately perpendicular angle coupling, and utilizes the grating diffration principle to realize that the mutually perpendicular polarized light of polarization state separates.But this kind method exists coupling efficiency low, to shortcomings such as incident light wave length sensitivities.People such as Shoji propose to utilize the waveguide of single width gradual change
[2]Realize optical fiber-waveguide-coupled efficiently, its coupling efficiency reaches 0.8dB, but this kind coupler structure does not have the function of polarization spectro.Similarly, people such as Cheben proposes utilizes single sub-wave length grating
[3]The method of carrying out optical fiber-waveguide-coupled does not have the polarization spectro function yet.People such as Lipson
[4]Reach people such as Tao
[5]Then proposed to utilize the waveguide of double joint width gradual change to realize the efficient coupling of optical fiber-waveguide respectively, but such coupling mechanism does not possess the function of polarization spectro equally.Therefore, can be efficiently from single-mode fiber the coupling mutually perpendicular two kinds of polarized lights of polarization state and the coupling mechanism that these two kinds of polarized lights can be separated have actual using value.
The list of references that preamble is mentioned is as follows:
1. the antarafacial coupled mode grating coupler of efficient coupling between compact waveguide in plane and the single-mode fiber, world electronic apparatus IEEE proceedings: quantum electronics magazine, (D.Taillaert, W.Bogaerts, P.Bienstman, T.F.Krauss, P.V.Daele, I.Moerman, S.Verstuyft, K.D.Mesel, and R.Baets, " An out-of-plane grating coupler for efficientbutt-coupling between compact planar waveguides and single-mode fibers, " IEEE J.QuantumElectron.38,949-955 (2002)).
2.0.3 μ m
2The silicon waveguide is to the low-loss optically mode field size match device of single-mode fiber, electronics wall bulletin (T.Shoji, T.Tsuchizawa, T.Watanabe, K.Yamada, and H.Morita, " Low loss mode size converter from 0.3 μ msquare Si wire waveguides to single mode fibres; " Electron.Lett.38,1669-1670 (2002) .)
3. be used for the mode switch of integrated optics and the sub-wavelength waveguide optical grating of optically-coupled, optics express train (P.Cheben, D-X.Xu, S.Janz, and A.Densmore, " Subwavelength waveguide grating for mode conversion and lightcoupling in integrated optics, " Opt.Express 14,4695-4702 (2006)).
4. the distributed Bragg reflector of high index-contrast, world patent (M.Lipson, and D.Almedia, " High-IndexContrast Distributed Bragg Reflector, " PatentWO 03/062883A2 (2003) .)
5. utilize the pointed coupling mechanism of double joint to improve optical fiber-waveguide-coupled efficient, optics express train (S.H.Tao, Junfeng Song, QingFang, Mingbin Yu, Guoqiang Lo, and Dimlee Kwong, " Improving coupling efficiency offiber-waveguide coupling with a double-tip coupler, " Opt.Express 16,20803-20808 (2008)).
Summary of the invention
The object of the present invention is to provide the method and the coupling light-splitting device of a kind of polarized light coupling and beam split, the method for this polarized light coupling and beam split and coupling light-splitting device can be realized the polarized light coupling and the beam split of two kinds of orthogonal polarization states.
Technical solution of the present invention is as follows:
The method of a kind of polarized light coupling and beam split, it is characterized in that, between optical fiber and micro-nano optical waveguide, be provided with two one optical waveguides parallel to each other, wherein one is the optical waveguide of width gradual change, be used for coupling and conduction TE mould, another root is the optical waveguide of equivalent thickness gradual change, is used for coupling and conduction TM mould, this two one optical waveguide respectively by 2 turn direction in opposite directions or opposing waveguide bend be connected with the micro-nano optical waveguide, the realization polarized light close light or beam split.
The optical waveguide of equivalent thickness gradual change is made up of the sub-wave length grating of dutycycle gradual change.
A kind of polarized light coupling light-splitting device, it is characterized in that, this polarized light coupling light-splitting device is arranged between optical fiber and the micro-nano optical waveguide, comprise that 2 optical waveguides parallel to each other and 2 directions are in opposite directions or opposing waveguide bend, 2 one optical waveguides are connected with the micro-nano optical waveguide by 2 waveguide bends respectively, wherein an one optical waveguide is used to the optical waveguide that is coupled and conducts the width gradual change of TE mould, and another one optical waveguide is to be used to be coupled and to conduct the optical waveguide of the equivalent thickness gradual change of TM mould.Optical waveguide is also referred to as optical waveguide coupler.
The optical waveguide of equivalent thickness gradual change is made up of the sub-wave length grating of dutycycle gradual change.Dutycycle is a grating ridge width and the ratio in grating cycle, and the dutycycle of sub-wave length grating increases in whole grating waveguide length.The dutycycle of sub-wave length grating is set to increase gradually to wave guide direction along optical fiber from small to large, can be to be the successive steps shape to increase, and for example from 0.1 to 0.9 increases by step-length 0.01, or segmentation progressively increases, and wherein every section length and dutycycle all keep identical.
The width of the optical waveguide of described width gradual change is increased to 300nm from the 100nm linearity, and the length of width gradual change section is 10-300 μ m; Described waveguide bend be the waveguide of channel-style single mode silicon, its radius of turn is 10～500 μ m, the length of the turnaround section of waveguide bend be the circle that constitutes with radius of turn girth 1/4th.
The bottom of described polarized light coupling light-splitting device is a silicon-based substrate, and isolation layer is the silicon dioxide material, and top layer is an overlayer, and overlayer adopts monox or silicon nitride material; Light waveguide-layer is arranged between overlayer and the isolation layer, and optical waveguide material is a monocrystalline silicon.Polarized light coupling light-splitting device also can be by other waveguide material system such as III-V family material, or polymkeric substance (Polymer) etc. is made.
Technical conceive of the present invention is as follows:
Polarized light coupling light-splitting device is a kind of mutually perpendicular polarized light coupling device of polarization state that can be coupled simultaneously between optical fiber and micro-nano waveguide.This installs based on the SOI material system, III-V family material system, or Polymer etc., be divided into substrate, isolation layer, ducting layer, and overlayer.Optically-coupled part is made up of two parallel coupling mechanisms, and one of them coupling mechanism TE light wave that is used to be coupled is the waveguide of width gradual change, and another coupling mechanism TM light wave that is used to be coupled is the waveguide of gradient thickness.But, make for convenience, can utilize the sub-wavelength grate structure of spatial modulation to realize the effect of gradient thickness, promptly allow the cycle of sub-wave length grating remain unchanged, splitting ratio (the wide ratio with the cycle of grating ridge) increases gradually.
Method of the present invention is to utilize waveguide bend to connect aforesaid two parallel coupling mechanism waveguides respectively, can make the TE and the TM mould that transmit respectively in the parallel coupling mechanism waveguide continue transmission along the waveguide bend that is connected separately, realizes separating of TE and TM light wave.Because the structure difference of two waveguide couplers parallel to each other, so they can tend to transmit respectively TE and TM mould.According to the light path principle of reversibility, when light wave from coupling mechanism when the optical fiber direction is exported, can be with the TE of conduction and TM mould simultaneously efficiently in the coupled into optical fibres respectively in the waveguide coupler.
Beneficial effect:
With respect to prior art, the present invention has the following advantages:
1. the device that proposes of the present invention i.e. two kinds of mutually perpendicular polarized lights of polarization state of TE and TM light wave that can be coupled simultaneously, its coupling efficiency is higher than the coupling efficiency of single width gradual change waveguide in theory, and the polarized light extinction ratio among T1 (optical waveguide of width gradual change) and the T2 (optical waveguide of equivalent thickness gradual change is seen Fig. 1) surpasses 40dB.TE and TM mould though the single waveguide coupler in the document 2 can be coupled simultaneously can not separate two kinds of mould fields.Though adopted sub-wavelength grate structure in the document 3, this structure is only at a kind of polarized light, and the mutually perpendicular polarized light of polarization state that still can't be coupled efficiently simultaneously more can't separate two kinds of polarized lights.Document 4,5 has adopted twi guide structure, but this kind double wave is led the light of a kind of polarization state that can only be coupled efficiently simultaneously.Document 1 has adopted the two-dimensional grating structure, the two kinds of mutually perpendicular polarized lights of polarization state that can be coupled simultaneously, but its coupling efficiency has only 19%, and responsive to the optical wavelength conversion of incident.Practice shows, adopts method of the present invention and device, and the coupling efficiency of TM mould and TE mould can reach about 80%.
2. this coupling mechanism mutually perpendicular polarized light of polarization state that can not only from optical fiber, be coupled simultaneously, and the polarized light after can also will being coupled by waveguide bend converges or separates.Conversely, TE that transmits in the waveguide and TM light wave also can utilize the coupling mechanism among the present invention to be coupled in the optical fiber easily simultaneously.
3. if T2 (see figure 1) wherein is a sub-wavelength grate structure, then this coupling mechanism can utilize existing micro production technology to make easily, and therefore, method of the present invention and device are convenient to industrial enforcement.
Optical fiber and coupling mechanism be coupled as the plane coupling scheme, easy and simple to handle.
5. because sub-wave length grating coupling polarized light is based on effective MEDIUM THEORY, rather than based on the diffraction of light principle, so this coupling mechanism is insensitive to the variation of input light wavelength, is applicable to wide spectrum light source.
Description of drawings
Fig. 1 is a principle of the invention synoptic diagram; (a) synoptic diagram of optical fiber and two coupled waveguide T1 and T2.T1 is the waveguide of a width gradual change, and T2 is a waveguide that is subjected to the sub-wave length grating modulation.The position of two coupled waveguides can exchange.(b) be to utilize two waveguide couplers to carry out the synoptic diagram of polarization spectro.When the mutually perpendicular polarized light of polarization state respectively after T1 and T2 coupled into waveguide, two bundle polarized lights can separate gradually along the waveguide bend that connects separately.The selection of waveguide bend radius-of-curvature is to make the size of the low waveguide bend simultaneously of the optical loss of waveguide at the turning as far as possible little as far as possible.For the single mode silicon waveguide of Channel type, its radius of turn generally is designed to greater than 10 μ m.(c) schematic cross-section of coupling mechanism.Up be respectively silicon-based substrate from the bottom, isolation layer, ducting layer (comprising coupled waveguide T1 and T2), and overlayer.Two blockages among the figure are respectively T1 and T2.(because T1 is the waveguide of width gradual change, so its tip is narrow, T2 is a sub-wave length grating, and its thickness and width all are the size of normal waveguide.)
T1 and the T2 synoptic diagram of light wave that is coupled the simultaneously during incident of Fig. 2 light wave; (a) T1 (left side light beam during incident of TE light wave, light intensity is stronger) and the situation of T2 (the right light beam, the light intensity weak) light wave that is coupled simultaneously, (b) T1 (left side light beam during incident of TM light wave, light intensity is weak) and be coupled the simultaneously situation of light wave of T2 (the right light beam, light intensity is stronger).
During the incident of Fig. 3 TE light, coupling efficiency curve and optically-coupled and conductive process synoptic diagram.(a) coupling efficiency (lower end curve) of the coupling efficiency of T1 (upper end curve) and T2 is with the curve of the distance between T1 and the T2 (Gap) variation; (b) optically-coupled and the conductive process synoptic diagram of T1 (left side light beam) and T2 (the right light beam) during Gap=4.4 μ m.
When Fig. 4 is the incident of TM light, coupling efficiency curve and optically-coupled and conductive process synoptic diagram.(a) coupling efficiency (upper end curve) of the coupling efficiency of T1 (lower end curve) and T2 is with the curve of the distance between T1 and the T2 (Gap) variation; (b) optically-coupled and the conductive process synoptic diagram of T1 (left side light beam) and T2 (the right light beam) during Gap=4.4 μ m.
Embodiment
The present invention is further illustrated below in conjunction with instantiation and accompanying drawing.
Embodiment 1:
The structure of optical waveguide coupled and optical splitter as shown in Figure 1, in Fig. 1 (a), two coupled waveguide T1 and T2 parallel arranged, the distance between them for the hundreds of nanometer between several microns.The position of T1 and T2 can exchange.T1 is a constant thickness, and width is from the narrow waveguide that increases to normal single mode waveguide width gradually.For example, the thickness and the width of normal single mode waveguide all are made as 300nm among the present invention.The thickness of T1 is 300nm, but width is increased to 300nm from the 100nm linearity.Because the TE mould field at T1 tip and the light field of single-mode fiber are mated on refractive index and spot size, so this waveguide coupler TE mould that can be coupled effectively; T2 is the sub-wave length grating of a width and constant thickness (being 300nm).The cycle of grating is less than the incident light wavelength, and wherein the direction of the dutycycle of grating (being defined as the wide ratio with the grating cycle of grating ridge) conduction along light beam from the optical fiber coupled into waveguide increases gradually.According to effective MEDIUM THEORY, its equivalent refractive index of the sub-wave length grating that dutycycle increases gradually can increase gradually.The waveguide that this refractive index increases can be equivalent to constant but the waveguide that thickness increases gradually of refractive index.According to mould field matching theory, and this kind waveguide (the simple waveguide that increases of thickness, or refractive index is along the simple waveguide that increases of light conduction orientation) TM mould effectively can be coupled.Therefore, T1 is designed to the TE mould that only is coupled, and T2 is designed to the TM mould that only is coupled.T1 and T2 revert to normal waveguide gradually from the tip to the end.Because the distance between T1 and the T2 is shorter, when they are connected respectively to normal straight wave guide, can there be intercouple (directional coupling) between the light that conducts in the straight wave guide.Both distances are near more, and it is strong more to intercouple, and are big more to the influence of optical field distribution in the waveguide.In order to eliminate the influence that intercouples that waveguide also exists after coupling, two radius-of-curvature are used to connect the end of T1 and T2 greater than the waveguide bend of 10 μ m.Turn direction in opposite directions or opposing waveguide bend can make T1 converge or separate with light among the T2.Shown in Fig. 1 (b), two opposing waveguide bends separate TE and the TM mould that conducts among T1 and the T2.Consider the characteristics of current micro-nano manufacturing technology, we can produce the effect that sub-wave length grating realizes that the equivalent thickness of optical waveguide increases gradually.Because the width and the constant thickness of the sub-wave length grating among the present invention, so this light beam coupling and optical splitter can utilize existing C MOS (Complementary Metal-Oxide-Semiconductor) technology to make realization.The material of optical waveguide can be silicon crystal, polysilicon, and silicon nitride, Polymer, and III-V family etc. can be used for the material of optical waveguide.Isolation layer and tectal material can be identical or different, generally choose than materials such as low silicon dioxide of ducting layer material refractive index or silicon nitrides.In order to describe the structure of device in detail, the present invention illustrates with the optical waveguide structure that is based upon on Silicon-On-Insulator (SOI) material system.Waveguide material is a monocrystalline silicon in the structure.Isolation layer is a silicon dioxide, is used to prevent that light from leaking into the silicon-based substrate of bottom from waveguide.Tectal material is materials such as silicon dioxide or silicon nitride, and its thickness is 1 μ m-5 μ m, and width is 1-6 μ m or covers entire chip.The cross section of whole coupled apparatus is shown in Fig. 1 (c).For purposes of the present invention is described, below with a concrete structure of device be example as an illustration.The material of device and structural parameters can be different in practice.The thickness of used isolation layer is 2 μ m in the device, and material is a silicon dioxide; Tectal thickness is 2 μ m, and width is 4 μ m, and material is a silicon dioxide; The thickness of ducting layer is 300nm, and material is a silicon crystal, and wherein the sectional dimension of normal light waveguide is 300nm * 300nm; The thickness of T1 is 300nm, and length is 15 μ m, and width increases from 100nm to 300nm is linear; T2 is a sub-wavelength grate structure, and its thickness and width are 300nm, and the grating cycle is 300nm, and grating length also is 15 μ m.T1 and T2 are parallel to each other, and the spacing between them is elected 3.4 μ m as.The Three dimensional finite difference time domain (Finite-Difference Time-Domain, FDTD) find, the T1 TE mould that is coupled consumingly, and the T2 TM mould that is coupled consumingly by analog result.Analog result as shown in Figure 2.
TE and TM mould though the waveguide of Fig. 2 display width gradual change and the sub-wave length grating of dutycycle gradual change tend to respectively be coupled, but the efficient of light beam coupling is lower, and both polarization extinction ratios are very poor, promptly for a kind of polarized light incident, and T1 and T2 this polarized light that can both partly be coupled.In order to obtain coupling efficiency and polarization extinction ratio preferably, i.e. T1 and T2 a kind of polarized light that as far as possible only is coupled respectively, we need increase above-mentioned size of devices and carry out optimal design.But owing to be subjected to the restriction of computing power, we can't carry out three-dimensional FDTD sunykatuib analysis to the coupling mechanism of large-size, so we adopt optical transmission method (Beam Propagation Method) to come the equivalent structure of coupling mechanism is analyzed.As previously mentioned, the sub-wavelength structure grating of dutycycle gradual change can replace with the waveguide of gradient thickness, and therefore, used coupler structure is as follows in the following simulation: isolation layer thickness is 2 μ m, and material is a silicon dioxide; Cover thickness is 2 μ m, and width is 5 μ m, and material still is a silicon dioxide; Ducting layer thickness is 300nm, and material is a silicon crystal; The sectional dimension of normal light waveguide is 300nm * 300nm.The thickness of T1 is 300nm, and length is 200 μ m, and width increases from 100nm to 300nm is linear; T2 is the waveguide of constant width, and its width is 300nm, and thickness is increased to 300nm from the 100nm linearity, and its length also is 200 μ m.T1, the material of T2 is silicon crystal.For the result who is optimized, the distance between T1 and the T2 (Gap) is increased to 4.4 μ m gradually from 600nm, and T1 that calculates respectively thus and the coupling efficiency of T2 (coupling efficiency) are shown in Fig. 3 (a) and Fig. 4 (a).When input light was the TE light wave, the coupling efficiency (lower end curve) of the coupling efficiency of T1 (upper end curve) and T2 was shown in Fig. 3 (a), and wherein the coupling efficiency of T1 is the highest when Gap=4.2 μ m, is about 80%, and the ratio of light intensity surpasses 40dB among T1 and the T2 at this moment.Fig. 3 (b) shows the situation of T1 (left side light beam) and middle light beam coupling of T2 (the right light beam) and conduction when Gap=4.4 μ m, has proved that most TE light waves enter among the T1.Similarly, when TM light is imported, Fig. 4 (a) has shown the coupling efficiency (lower end curve) of T1 and the coupling efficiency (upper end curve) of T2, at this moment, T2 coupling efficiency when Gap=4.6 μ m is the highest, is about 80%, and the ratio of light intensity surpasses 47dB among T1 and the T2, Fig. 4 (b) shows the situation of T1 (left side light beam) and middle light beam coupling of T2 (the right light beam) and conduction when Gap=4.4 μ m, has proved that most TM light have entered among the T2.
Claims (4)
1. the method for polarized light coupling and beam split, it is characterized in that, between optical fiber and micro-nano optical waveguide, be provided with two one optical waveguides parallel to each other, wherein one is the optical waveguide of width gradual change, be used for coupling and conduction TE mould, another root is the optical waveguide of equivalent thickness gradual change, is used for coupling and conduction TM mould, this two one optical waveguide respectively by 2 turn direction in opposite directions or opposing waveguide bend be connected with the micro-nano optical waveguide, the realization polarized light close light or beam split;
The optical waveguide of equivalent thickness gradual change is made up of the sub-wave length grating of dutycycle gradual change.
2. polarized light coupling light-splitting device, it is characterized in that, this polarized light coupling light-splitting device is arranged between optical fiber and the micro-nano optical waveguide, comprise that 2 optical waveguides parallel to each other and 2 directions are in opposite directions or opposing waveguide bend, 2 optical waveguides parallel to each other are connected with the micro-nano optical waveguide by 2 waveguide bends respectively, wherein an one optical waveguide is to be used to the optical waveguide that is coupled and conducts the width gradual change of TE mould, and another one optical waveguide is to be used to be coupled and to conduct the optical waveguide of the equivalent thickness gradual change of TM mould;
The optical waveguide of equivalent thickness gradual change is made up of the sub-wave length grating of dutycycle gradual change.
3. polarized light coupling light-splitting device according to claim 2 is characterized in that the width of the optical waveguide of described width gradual change is increased to 300nm from the 100nm linearity, and the length of width gradual change section is 10-300 μ m; Described waveguide bend is the waveguide of channel-style single mode silicon, and its radius of turn is 10～500 μ m, and the length of the turnaround section of waveguide bend is with 1/4th of the girth of the circle of radius of turn formation.
4. polarized light coupling light-splitting device according to claim 3 is characterized in that the bottom of described polarized light coupling light-splitting device is a silicon-based substrate, and isolation layer is the silicon dioxide material, and top layer is an overlayer, and overlayer adopts monox or silicon nitride material; Light waveguide-layer is arranged between overlayer and the isolation layer, and optical waveguide material is a monocrystalline silicon.
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| CN108181722B (en) * | 2016-07-24 | 2020-03-06 | 哈尔滨理工大学 | Duty ratio continuous adjusting method |
| JP6694652B2 (en) * | 2016-09-02 | 2020-05-20 | 信越化学工業株式会社 | Optical module and optical path optical axis adjusting method |
| CN106959485B (en) * | 2017-04-28 | 2023-06-06 | 中国人民解放军国防科学技术大学 | Directional coupling type TM polarizer and beam splitter based on sub-wavelength grating |
| CN107894630B (en) * | 2017-12-19 | 2019-05-24 | 武汉邮电科学研究院 | The insensitive partial wave wave multiplexer of heat based on silicon waveguide and single-mode polymeric waveguides arm |
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| CN114296184B (en) * | 2022-02-14 | 2023-07-28 | 西北工业大学 | Integrated photonics device for realizing coupling of polarization splitting and waveguide |
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