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CN101823224A - Planetary wheel numerical control polishing removal function generator - Google Patents

Planetary wheel numerical control polishing removal function generator Download PDF

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Publication number
CN101823224A
CN101823224A CN 201010152031 CN201010152031A CN101823224A CN 101823224 A CN101823224 A CN 101823224A CN 201010152031 CN201010152031 CN 201010152031 CN 201010152031 A CN201010152031 A CN 201010152031A CN 101823224 A CN101823224 A CN 101823224A
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China
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rotation
rotation shaft
planetary wheel
polishing
removal function
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CN 201010152031
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Chinese (zh)
Inventor
郑子文
戴一帆
李圣怡
舒勇
解旭辉
王贵林
康念辉
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National University of Defense Technology
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National University of Defense Technology
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Abstract

The invention discloses a planetary wheel numerical control polishing removal function generator, which comprises a revolution shaft system, a rotation shaft system, a polishing disk, an eccentric adjusting mechanism and a slewing mechanism. The revolution shaft system is connected above the eccentric adjusting mechanism; the slewing mechanism is connected to the bottom end of the eccentric adjusting mechanism; the rotation shaft system is connected below the slewing mechanism; the polishing disk is arranged at the lower end of the rotation shaft system; the rotation shaft system comprises a rotation shaft, a rotation motor, a rotation transmission mechanism and a rotation shaft base; the rotation shaft base is connected to the slewing mechanism; the rotation shaft is arranged in the rotation shaft base; the rotation motor is fixed to the rotation shaft base; and the output end of the rotation motor is connected with the rotation shaft through the rotation transmission mechanism. The planetary wheel numerical control polishing removal function generator has the advantages of high rigidity for the transmission of the rotation shaft system, balanced rotation and capability of acquiring stable removal functions.

Description

Planetary wheel numerical control polishing removal function generator
Technical field
The present invention relates to the optical precision optical machinery technical field, relate in particular to planetary wheel numerical control polishing removal function generator.
Background technology
Since the seventies in 20th century, rush of demand along with centering heavy caliber, high accuracy aspheric surface optical accessory in fast development of computer technology and the world wide, with a collection of domestic and international research unit headed by the American I tek company ultraprecise that computer control optical surface forming technique (being CCOS) is incorporated into middle aperture aspherical optical element is processed, to improve the working (machining) efficiency and the machining accuracy of aspherical optical element.The CCOS technology, be meant with a polishing dish more much smaller than workpiece, under the control of computer, with specific path, speed at the optical element apparent motion, by controlling parameters such as the interior residence time in each zone, tonnage, accurately control the removal amount of part material, reach the purpose of round-off error, raising precision.The outstanding advantage of CCOS technology is that small tool can be followed the tracks of the variation of non-spherical surface each point radius of curvature effectively in the process, well coincide with aspheric shape, thereby effectively improves machining accuracy.At present, the CCOS technology has replaced traditional craft and has repaiied the throwing technology, becomes the main flow process technology of middle heavy caliber, high accuracy aspherical optical element.
The core of CCOS technology is accurately to control the material removal amount of each point on the part, thereby realize the progressively convergence of surface figure accuracy, therefore, obtain stable, the efficient and stronger polishing removal function of modification capability and be to improve the basis and key of working (machining) efficiency and machining accuracy, in CCOS processing, polishing removal function generator also just becomes the key mechanism of whole C COS lathe.At present, the primary structure form of this mechanism comprises flat turn actuation mechanism and planetary wheeling mechanism (claiming dual rotor mechanism again).Introduce the mechanism and the characteristics of existing polishing removal function generator below respectively.
Application number is 200710055351.2 application for a patent for invention, a kind of efficient numerically controlled glossing and equipment of middle aperture aspherical optical elements are disclosed, the polishing removal function generator of wherein mentioning belongs to the dynamic formula grinding and polishing mechanism of flatting turn, it drives the polishing dish by a revoluting motor and rotates around motor shaft with certain off-centre, makes the polishing dish be in the moving state of flatting turn with a quadric chain simultaneously.Under this kind motion mode, the movement velocity of each point is consistent on the polishing dish, and the line of any point-to-point transmission remains unanimity on the polishing dish, therefore helps making polishing disk to be in the uniform wear state, objectively helps guaranteeing to remove the stability of function.Its shortcoming is relatively poor to the regulating power of removing function shape, is difficult to realize the removal function of approximate pulse form, therefore has certain limitation aspect modification capability; In addition, because abrasive disk integral body rotates around the revoluting motor axle, so its eccentricity is unsuitable too high with rotating speed, otherwise unstability easily takes place, this just limited this kind mechanism obtainable material removing rate and operating efficiency.
The royal power of Zhejiang University discloses a kind of polishing removal function generator suddenly in its doctorate paper " research of high steepness optical aspherical surface automatic forming ", what it adopted is dual rotation type grinding and polishing mechanism, and by " motor+turbine-worm speed-down " driving revolution, rotation is then directly driven by the rotation drive motors, changes the service load that applies by the increase and decrease counterweight.This structure exists defectives such as revolution speed is low, operating pressure adjustment inconvenience; Because spinning motor participates in revolution together, so its power supply needs to realize by increasing a cover brush and slip ring, increased the complexity of mechanism; In addition, grind instrument directly by motor-driven owing to throw, so its driving moment is limited, grinds tool sizes when big, exist the risk of driving moment deficiency when throwing.
The patent No. is that the patent of invention of ZL03124759.8 discloses a kind of aspheric surface optical accessory Compound Machining, detected lathe, wherein mentioned planet gear type birotor polishing mechanism, spinning motor wherein is installed on the dual rotor mechanism pedestal, be provided with a flexible axle between the spinning motor and the axis of rotation, this flexible axle one end and spinning motor output shaft are affixed, the other end is connected with the axis of rotation after passing hollow shaft, dovetail groove slide unit, gyroaxis, transmits spinning motion by this flexible axle.Yet the flexible axle transmission is not steady, transmission stiffness is poor, causes the raising of machining accuracy to be restricted.
From the document of above-mentioned open report, present polishing removal function generator exists the not high or transmission of working (machining) efficiency defective stably inadequately, thereby has limited the efficient and stability of removing function.In view of this, be necessary existing polishing removal function generator is improved, thereby improve the efficient and stability of removing function.
Summary of the invention
The technical problem to be solved in the present invention is to overcome the deficiencies in the prior art, and it is that transmission stiffness height, rotation are steady that a kind of axis of rotation is provided, and can obtain the planetary wheel numerical control polishing removal function generator of steady removal function.
For solving the problems of the technologies described above, the present invention by the following technical solutions:
A kind of planetary wheel numerical control polishing removal function generator, comprise hollow shaft system, axis of rotation system, the polishing dish, eccentric adjustment and slew gear, described hollow shaft is to be connected in the eccentric adjustment top, described slew gear is connected in the eccentric adjustment bottom, the described axis of rotation is to be connected in the slew gear below, it is the lower end that described polishing dish is installed in the axis of rotation, the described axis of rotation is to comprise the axis of rotation, spinning motor, rotation transmission mechanism and axis of rotation pedestal, described axis of rotation pedestal is connected on the slew gear, the described axis of rotation is installed in the axis of rotation pedestal, described spinning motor is fixed on the axis of rotation pedestal, and the output of spinning motor is connected with the axis of rotation through the rotation transmission mechanism.
Described rotation transmission mechanism is synchronous belt drive mechanism or chain-drive mechanism or gear drive.
Described axis of rotation pedestal comprises the cylinder of pedestal, push pedal and adjustable pressure, described pedestal upper end is connected with slew gear, described cylinder is fixed on the pedestal, described push pedal is positioned at the pedestal below and is connected with the output of cylinder, described spinning motor is fixed in the push pedal, the described axis of rotation is supported in the push pedal through bearing, is provided with linear bearing between the described axis of rotation and the pedestal.
Described slew gear comprises gyroaxis and revolving bed, and described gyroaxis and eccentric adjustment bottom are affixed, and described revolving bed is supported on the gyroaxis through bearing, and the pedestal and the revolving bed of axis of rotation pedestal are affixed, are connected with the translation maintaining body on the revolving bed.
Described translation maintaining body comprises maintenance seat, the first parallel fork group, second parallel fork group and the transition disc, the described maintenance on the hollow shaft pedestal that is fixed in hollow shaft system, described first parallel fork group one end is articulated in and keeps on the seat, the other end is articulated on the transition disc, described second parallel fork group one end is articulated on the transition disc, and the other end is articulated on the revolving bed.
Described eccentric adjustment comprises dovetail groove slide unit, slide block and adjustment screw, dovetail groove on the described dovetail groove slide unit radially is provided with along the revolution circumference, described slide block is located in the dovetail groove, described adjustment screw and dovetail groove are arranged in parallel, adjustment screw one end is set on the slide block, and the other end is threaded with the dovetail groove slide unit.
Described polishing dish is connected by universal coupling with the axis of rotation.
Compared with prior art, the invention has the advantages that: axis of rotation system has cancelled the flexible axle transmission, but spinning motor is fixed on the axis of rotation pedestal, be connected with the axis of rotation by the output of rotation transmission mechanism spinning motor, adopt the structure of rotation transmission mechanism transmission, overcome the flexible axle transmission not steadily, the defective of transmission stiffness difference, improved transmission stiffness and rotation stationarity, the stability of removing function is significantly improved; Polishing dish operating pressure is provided by cylinder, adopt differential design, compensated the gravity effect of axis of rotation floating part, polishing pressure can be set arbitrarily in the maximum working pressure (MWP) scope from 0, simultaneously spinning motor is fixed on the push pedal that is used to regulate polishing dish operating pressure, make that the running part of the axis of rotation is made axial float with the axis of rotation itself, does not influence the spinning motion of the axis of rotation when regulating polishing dish operating pressure; The translation maintaining body is housed on the revolving bed of slew gear, and this translation maintaining body can guarantee that the axis of rotation ties up to strict translation in the revolution process, the rotary symmetry that helps improving the maximum speed of hollow shaft system and remove function; The polishing dish is connected by universal coupling with the axis of rotation, and the polishing dish can freely be tilted in 15 ° of scopes, guarantees that when surface of the work is not orthogonal to the axis of rotation polishing dish is tangent with surface of the work all the time, improves machining accuracy.
Description of drawings
Fig. 1 is a main TV structure schematic diagram of the present invention;
Fig. 2 is the A-A cutaway view of Fig. 1;
Fig. 3 is the structural representation of translation maintaining body of the present invention;
Fig. 4 is a left TV structure schematic diagram of the present invention;
Fig. 5 is the B-B cutaway view of Fig. 4;
Fig. 6 is the workpiece photo after fixed point is ground;
Fig. 7 is the theoretical function two dimension transversal figure that removes;
Fig. 8 is that function two dimension transversal figure is removed in actual measurement among the embodiment;
Fig. 9 is the theoretical model that function is removed in polishing;
Figure 10 is the Model Measured that function is removed in polishing among the embodiment.
Each label is represented among the figure:
1, hollow shaft system; 2, axis of rotation system; 3, polishing dish; 4, eccentric adjustment; 5, slew gear; 6, translation maintaining body; 7, universal coupling; 11, hollow shaft; 12, hollow shaft pedestal; 13, revoluting motor; 14, revolution is with synchronously; 21, the axis of rotation; 22, axis of rotation pedestal; 23, spinning motor; 24, rotation transmission mechanism; 41, dovetail groove slide unit; 42, slide block; 43, adjustment screw; 44, dovetail groove; 51, gyroaxis; 52, revolving bed; 61, keep seat; 62, the first parallel fork group; 63, the second parallel fork group; 64, transition disc; 221, cylinder; 222, push pedal; 223, pedestal; 224, linear bearing.
The specific embodiment
Extremely shown in Figure 5 as Fig. 1, planetary wheel numerical control polishing removal function generator of the present invention, comprise that hollow shaft is 1, the axis of rotation is 2, polishing dish 3, eccentric adjustment 4 and slew gear 5, hollow shaft is 1 to be connected in eccentric adjustment 4 tops, slew gear 5 is connected in eccentric adjustment 4 bottoms, the axis of rotation is 2 to be connected in slew gear 5 belows, and it is 2 lower ends that polishing dish 3 is installed in the axis of rotation.
In the present embodiment, hollow shaft is 1 to comprise that hollow shaft 11, hollow shaft pedestal 12, revoluting motor 13 and revolution be with 14 synchronously, hollow shaft 11 is installed in the hollow shaft pedestal 12, revoluting motor 13 is installed on the hollow shaft pedestal 12, the output of revoluting motor 13 is with 14 to link to each other with hollow shaft 11 through revolution synchronously, and hollow shaft 11 rotates under the drive of revoluting motor 13 with 14 synchronously by revolving round the sun.The axis of rotation is 2 to comprise the axis of rotation 21, spinning motor 23, rotation transmission mechanism 24 and axis of rotation pedestal 22, axis of rotation pedestal 22 is connected on the slew gear 5, the axis of rotation 21 is installed in the axis of rotation pedestal 22, spinning motor 23 is fixed on the axis of rotation pedestal 22, and the output of spinning motor 23 is connected with the axis of rotation 21 through rotation transmission mechanism 24.The axis of rotation is 2 to have cancelled the flexible axle transmission, the axis of rotation 21 is rotated under the drive of spinning motor 23 by rotation transmission mechanism 24, adopt the structure of rotation transmission mechanism 24 transmissions, overcome the flexible axle transmission not steadily, the defective of transmission stiffness difference, improved transmission stiffness and rotation stationarity, made the stability of removing function obtain significantly to improve.Rotation transmission mechanism 24 can be synchronous belt drive mechanism or chain-drive mechanism or gear drive, and what select for use in the present embodiment is good, the simple in structure synchronous belt drive mechanism of synchronism.Polishing dish 3 is installed in the axis of rotation 21 bottoms, and adopts universal coupling 7 to connect, and polishing dish 3 can freely be tilted in 15 ° of scopes, can guarantee that when surface of the work is not orthogonal to the axis of rotation 21 polishing dish 3 all the time can be tangent with surface of the work, improves machining accuracy.Axis of rotation pedestal 22 comprises pedestal 223, push pedal 222 and can be by the cylinder 221 of proportional pressure valve automatic pressure regulation, pedestal 223 upper ends are connected with slew gear 5, cylinder 221 is fixed on the pedestal 223, push pedal 222 is positioned at pedestal 223 belows and is connected with the output of cylinder 221, spinning motor 23 is fixed in the push pedal 222, the axis of rotation 21 is supported in the push pedal 222 through bearing, is provided with linear bearing 224 between the axis of rotation 21 and the pedestal 223.Polishing dish 3 operating pressures are provided by cylinder 221, therefore the axis of rotation 21 both can be around axial rotation, the string that also can slide vertically is moving, the stroke that endwisely slips can reach 30mm, differential design is adopted in the adjusting of polishing dish 3 operating pressures, can compensate the axis of rotation is the gravity effect of 2 floating parts, polishing pressure can be set arbitrarily in the maximum working pressure (MWP) scope from 0, simultaneously spinning motor 23 is fixed on the push pedal 222 that is used to regulate polishing dish 3 operating pressures, make when regulating polishing dish 3 operating pressures, the running part of the axis of rotation 21 itself is made axial float with the axis of rotation 21, does not influence the axis of rotation 21 simultaneously again and keeps spinning motion.
In the present embodiment, slew gear 5 comprises gyroaxis 51 and revolving bed 52, and gyroaxis 51 is affixed with eccentric adjustment 4 bottoms, and revolving bed 52 is supported on the gyroaxis 51 through bearing, and the pedestal 223 of axis of rotation pedestal 22 is affixed with revolving bed 52.This translation maintaining body 6 comprises maintenance seat 61, first parallel fork group 62, second a parallel fork group 63 and a transition disc 64, keeping seat 61 to be fixed in hollow shaft is on 1 the hollow shaft pedestal 12, first parallel fork group 62 1 ends are articulated in and keep on the seat 61, the other end is articulated on the transition disc 64, second parallel fork group 63 1 ends are articulated on the transition disc 64, and the other end is articulated on the revolving bed 52.On the revolving bed 52 of slew gear 5 translation maintaining body 6 is housed, the axis of rotation is 2 to be subjected to the constraint of translation maintaining body 6 can guarantee strict translation in the revolution process, and helping improving hollow shaft is 1 maximum speed and the rotary symmetry of removing function.Eccentric adjustment 4 comprises dovetail groove slide unit 41, slide block 42 and adjustment screw 43, dovetail groove 44 on the dovetail groove slide unit 41 radially is provided with along the revolution circumference, slide block 42 is located in the dovetail groove 44, adjustment screw 43 is arranged in parallel with dovetail groove 44, adjustment screw 43 1 ends are set on the slide block 42, the other end is threaded with dovetail groove slide unit 41, hollow shaft 11 is affixed with dovetail groove slide unit 41, revolving bed 52 is affixed with slide block 42, rotation adjustment screw 43 can make slide block 42 slide in dovetail groove 44, driving the slew gear 5 and the axis of rotation simultaneously is that 1 edge revolution circumference moves radially, thereby reaches the effect of regulating the polishing dish 3 eccentric radius of gyration.
Be described in further detail below in conjunction with fixed point grinding test, fixed point polishing test and face shape error correction experiment superiority planetary wheel numerical control polishing removal function generator of the present invention.
By the fixed point grinding test, the shape of removal function is ground in reflection, function is removed in the theory grinding compared with actual measurement grinding removal function.Grinding test specimen selects for use diameter to be
Figure GDA0000020747200000051
K9 glass, abrasive disk 3 selects for use diameter to be
Figure GDA0000020747200000052
Duralumin, other grinding technics parameters are respectively: the W20 silicon carbide abrasive, the lapping liquid mass concentration is 5%, eccentric throw is 10mm, revolution speed is 50rpm, and the rotating ratio of rotation and revolution is-1, and grinding pressure is 16.2kPa, milling time is 3min, and the workpiece photo after fixed point is ground as shown in Figure 6.Theoretical removal function two dimension transversal as shown in Figure 7, actual measurement is removed function two dimension transversal as shown in Figure 8, as seen under the technological parameter condition of selecting, it is comparatively mild that function two dimension transversal is removed in the grinding of acquisition, is adapted to the big and less errors of form of face shape error gradient of round-off error amplitude.In addition, by comparing theoretical removal function and experiment removal function as can be known, because planetary wheel numerical control polishing removal function generator transmission of the present invention is comparatively steady, so theory is removed function and actual measurement removal function is comparatively approaching.
By fixed point polishing test, the shape of function is removed in the reflection polishing.Polished speciment selects for use diameter to be
Figure GDA0000020747200000053
K9 glass, other glossing parameters are respectively: polishing fluid is Japanese H-3 cerium oxide (CeO 2) aqueous solution; Solid-to-liquid ratio concentration is 1: 10; Polish pressure is 36.9kPa; Polishing disk is the polyurethane of diameter 25mm; Eccentric throw is 10mm (corresponding eccentricity is 0.8), revolution is respectively 50 with rotational velocity ,-150rpm (corresponding rotating ratio is-3); Polishing time is 1min.Polishing is removed the function theory model as shown in Figure 9, and polishing is removed the function Model Measured as shown in figure 10, and after polishing the theoretical model and Model Measured contrast of removing function, it is better identical equally to find that function model is removed in theoretical removal function model and experiment.
From above-mentioned example as can be seen, the grinding of adopting planetary wheel numerical control polishing removal function generator of the present invention to form is removed function with polishing, has the advantage that rotary symmetry is good, the change of shape scope is wide, and because the load adjustable range of this device is bigger, therefore its efficiency-adjusted scope is also bigger, can satisfy the high-precision optical part well for the requirement of removing function shape and efficient.
By face shape error correction experiment, reflection error convergence rate.Face shape error correction test specimen is selected the plane mirror of bore 276mm (effective aperture 268mm) for use, and the initial face shape error PV value of speculum in effective aperture is that (λ=632.8nm), the RMS value is 0.176 λ to 0.678 λ; Adopt this device to carry out the face shape error correction, through four iteration (amounting to 227min), the face shape error PV value of speculum is reduced to 0.170 λ, and the RMS value reaches 0.024 λ.The convergency factor of above face shape error correction is apparently higher than domestic present CCOS mismachining tolerance convergency factor (by domestic main flow optics level of processing, realize same precision convergence, its iterations is more than 10 times).
Face shape error correction test specimen is selected the paraboloidal mirror (p=1000 of bore 500mm (effective aperture 462mm) for use, K9 glass), the initial face shape error PV value of paraboloidal mirror in effective aperture is 1.813 λ (λ=632.8nm), the RMS value is 0.241 λ, through 95 hours uniform polish and correction polishing, the face shape error PV value of speculum is reduced to 0.162 λ, and the RMS value reaches 0.015 λ.The working (machining) efficiency of above face shape error correction and precision all are higher than domestic existing report level.

Claims (8)

1.一种行星轮式数控研抛去除函数发生装置,包括公转轴系(1)、自转轴系(2)、研抛盘(3)、偏心调整机构(4)和回转机构(5),所述公转轴系(1)连接于偏心调整机构(4)上方,所述回转机构(5)连接于偏心调整机构(4)底端,所述自转轴系(2)连接于回转机构(5)下方,所述研抛盘(3)装设于自转轴系(2)下端,其特征在于:所述自转轴系(2)包括自转轴(21)、自转电机(23)、自转传动机构(24)和自转轴基座(22),所述自转轴基座(22)连接于回转机构(5)上,所述自转轴(21)装设于自转轴基座(22)内,所述自转电机(23)固定于自转轴基座(22)上,自转电机(23)的输出端经自转传动机构(24)与自转轴(21)连接。1. A planetary wheel type numerical control grinding and polishing removal function generating device, comprising a revolution shafting (1), a rotation shafting (2), a grinding and polishing disc (3), an eccentric adjustment mechanism (4) and a rotary mechanism (5), the The revolution shaft system (1) is connected above the eccentric adjustment mechanism (4), the slewing mechanism (5) is connected to the bottom end of the eccentric adjustment mechanism (4), and the autorotation shaft system (2) is connected to the slewing mechanism (5) Below, the grinding and polishing disc (3) is installed at the lower end of the rotation shaft system (2), and it is characterized in that: the rotation shaft system (2) includes a rotation shaft (21), a rotation motor (23), a rotation transmission mechanism (24 ) and the rotation axis base (22), the rotation axis base (22) is connected on the rotary mechanism (5), the rotation axis (21) is installed in the rotation axis base (22), the rotation The motor (23) is fixed on the rotation shaft base (22), and the output end of the rotation motor (23) is connected with the rotation shaft (21) through the rotation transmission mechanism (24). 2.根据权利要求1所述的行星轮式数控研抛去除函数发生装置,其特征在于:所述自转传动机构(24)为同步带传动机构或链传动机构或齿轮传动机构。2. The planetary wheel type numerically controlled lapping and removing function generating device according to claim 1, characterized in that: the rotation transmission mechanism (24) is a synchronous belt transmission mechanism, a chain transmission mechanism or a gear transmission mechanism. 3.根据权利要求2所述的行星轮式数控研抛去除函数发生装置,其特征在于:所述自转轴基座(22)包括座体(223)、推板(222)和可调节压力的气缸(221),所述座体(223)上端与回转机构(5)连接,所述气缸(221)固定于座体(223)上,所述推板(222)位于座体(223)下方并与气缸(221)的输出端连接,所述自转电机(23)固定于推板(222)上,所述自转轴(21)经轴承支承于推板(222)上,所述自转轴(21)与座体(223)之间设有线性轴承(224)。3. The planetary wheel type numerical control grinding and polishing removal function generating device according to claim 2, characterized in that: the rotation shaft base (22) comprises a seat body (223), a push plate (222) and an adjustable pressure Cylinder (221), the upper end of the seat body (223) is connected with the rotary mechanism (5), the cylinder (221) is fixed on the seat body (223), and the push plate (222) is located below the seat body (223) And be connected with the output end of cylinder (221), described autorotation motor (23) is fixed on the push pedal (222), and described autorotation shaft (21) is supported on the push pedal (222) through bearing, and described autorotation shaft ( 21) A linear bearing (224) is provided between the seat body (223). 4.根据权利要求3所述的行星轮式数控研抛去除函数发生装置,其特征在于:所述回转机构(5)包括回转轴(51)和回转座(52),所述回转轴(51)与偏心调整机构(4)底端固接,所述回转座(52)经轴承支承于回转轴(51)上,自转轴基座(22)的座体(223)与回转座(52)固接,回转座(52)上连有平动保持机构(6)。4. The planetary wheel type numerical control grinding and polishing removal function generator according to claim 3 is characterized in that: the rotary mechanism (5) comprises a rotary shaft (51) and a rotary seat (52), and the rotary shaft (51 ) is fixedly connected with the bottom end of the eccentric adjustment mechanism (4), and the revolving seat (52) is supported on the revolving shaft (51) through a bearing, and the seat body (223) of the rotation shaft base (22) and the revolving seat (52) Affixed, the rotary seat (52) is connected with a translation holding mechanism (6). 5.根据权利要求4所述的行星轮式数控研抛去除函数发生装置,其特征在于:所述平动保持机构(6)包括保持座(61)、第一平行摆杆组(62)、第二平行摆杆组(63)和过渡盘(64),所述保持座(61)固定于公转轴系(1)的公转轴基座(12)上,所述第一平行摆杆组(62)一端铰接于保持座(61)上,另一端铰接于过渡盘(64)上,所述第二平行摆杆组(63)一端铰接于过渡盘(64)上,另一端铰接于回转座(52)上。5. The planetary wheel type numerical control grinding and polishing removal function generating device according to claim 4, characterized in that: the translation holding mechanism (6) includes a holding seat (61), a first parallel swing bar group (62), The second parallel swing link group (63) and the transition plate (64), the holder (61) is fixed on the revolution shaft base (12) of the revolution shaft system (1), the first parallel swing link group ( 62) One end is hinged on the holding seat (61), the other end is hinged on the transition plate (64), one end of the second parallel swing link group (63) is hinged on the transition plate (64), and the other end is hinged on the rotary seat (52) up. 6.根据权利要求1至5中任一项所述的行星轮式数控研抛去除函数发生装置,其特征在于:所述偏心调整机构(4)包括燕尾槽滑台(41)、滑块(42)和调节螺钉(43),所述燕尾槽滑台(41)上的燕尾槽(44)沿公转圆周径向设置,所述滑块(42)设于燕尾槽(44)内,所述调节螺钉(43)与燕尾槽(44)平行布置,调节螺钉(43)一端套装于滑块(42)上,另一端与燕尾槽滑台(41)螺纹连接。6. The planetary wheel type numerical control grinding and polishing removal function generating device according to any one of claims 1 to 5, characterized in that: the eccentric adjustment mechanism (4) includes a dovetail slide table (41), a slide block ( 42) and adjusting screw (43), the dovetail groove (44) on the dovetail groove slide table (41) is arranged radially along the revolution circle, and the slider (42) is located in the dovetail groove (44), and the The adjusting screw (43) is arranged in parallel with the dovetail groove (44), and one end of the adjusting screw (43) is sleeved on the slide block (42), and the other end is threadedly connected with the dovetail groove sliding table (41). 7.根据权利要求1至5中任一项所述的行星轮式数控研抛去除函数发生装置,其特征在于:所述研抛盘(3)与自转轴(21)通过万向联轴节(7)连接。7. The planetary wheel type numerical control grinding and polishing removal function generator according to any one of claims 1 to 5, characterized in that: the grinding and polishing disc (3) and the rotation shaft (21) pass through a universal joint ( 7) Connect. 8.根据权利要求6所述的行星轮式数控研抛去除函数发生装置,其特征在于:所述研抛盘(3)与自转轴(21)通过万向联轴节(7)连接。8. The planetary wheel type numerically controlled lapping and removing function generating device according to claim 6, characterized in that: the lapping disc (3) is connected to the rotation shaft (21) through a universal joint (7).
CN 201010152031 2010-04-21 2010-04-21 Planetary wheel numerical control polishing removal function generator Pending CN101823224A (en)

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Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102059638A (en) * 2010-11-19 2011-05-18 苏州大学 Method for polishing computer-controlled gadget
CN102744663A (en) * 2012-07-30 2012-10-24 中国人民解放军国防科学技术大学 Flat-rotating polishing fairing device
CN102922420A (en) * 2012-11-05 2013-02-13 北京理工大学 Revolution box body type air pressure force-application numerical control polishing device with adjustable large eccentricity
CN102941529A (en) * 2012-12-08 2013-02-27 中国科学院光电技术研究所 Planetary motion type grinding device
CN102950540A (en) * 2012-11-07 2013-03-06 长春设备工艺研究所 Rotation stopping guide rail slide block device for main body of high-rotating-speed polishing head
CN102962764A (en) * 2012-12-17 2013-03-13 北京理工大学 Rigid eccentric-gearing revolution and rotation pneumatic-force-application numerically-controlled polishing device
CN102979870A (en) * 2012-12-05 2013-03-20 中国科学院光电技术研究所 Mechanism capable of transmitting rotating torque and axially reciprocating
CN104385079A (en) * 2014-10-16 2015-03-04 中山市吉尔科研技术服务有限公司 Pressurization type optical lens polisher
CN104385077A (en) * 2014-10-16 2015-03-04 中山市吉尔科研技术服务有限公司 A two-way polishing device for optical lenses
CN105598775A (en) * 2015-12-29 2016-05-25 山西顾德宝丰重工机械有限公司 Roller carrier shaft burr polishing mechanism and method
CN106737134A (en) * 2016-12-30 2017-05-31 浙江工业大学 It is a kind of to realize the mechanism that polishing disk irrational number is rotated
CN107414631A (en) * 2017-08-17 2017-12-01 天津大学 Aperture aspherical robot eccentric planetary burnishing device
CN107685267A (en) * 2017-10-09 2018-02-13 中国科学院国家天文台南京天文光学技术研究所 A kind of lapping using star lapping machine instrument
CN107803723A (en) * 2017-11-30 2018-03-16 苏州陈那自动化技术有限公司 A kind of grinding and polishing device
CN108000174A (en) * 2017-12-08 2018-05-08 合肥海源机械有限公司 A kind of hole processing device of axles in industrial vehicles shell
CN109488733A (en) * 2018-12-30 2019-03-19 苏州富强科技有限公司 A kind of planetary gear transmission mechanism
CN109773247A (en) * 2019-02-21 2019-05-21 安徽新园矿山设备制造有限责任公司 A kind of edge milling machines suitable for roller carrier shaft processing
CN110948380A (en) * 2019-12-13 2020-04-03 中国科学院长春光学精密机械与物理研究所 A planetary grinding device and a method for optimizing the removal function of the planetary grinding device
CN111002157A (en) * 2019-12-16 2020-04-14 厦门理工学院 Polishing device
CN112247735A (en) * 2020-10-22 2021-01-22 中国科学院国家天文台南京天文光学技术研究所 Planet grinding tool based on parallel flat rotating structure
CN114523405A (en) * 2021-10-14 2022-05-24 杭州电子科技大学 Eccentric slewer of translation revolution
CN114800140A (en) * 2022-04-22 2022-07-29 中国科学院上海光学精密机械研究所 Double-rotor grinding and polishing tool used with robot
CN117260514A (en) * 2023-11-22 2023-12-22 北京特思迪半导体设备有限公司 Accurate control method of eccentric driving mechanism

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Cited By (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102059638A (en) * 2010-11-19 2011-05-18 苏州大学 Method for polishing computer-controlled gadget
CN102059638B (en) * 2010-11-19 2012-09-05 苏州大学 Method for polishing computer-controlled gadget
CN102744663A (en) * 2012-07-30 2012-10-24 中国人民解放军国防科学技术大学 Flat-rotating polishing fairing device
CN102922420A (en) * 2012-11-05 2013-02-13 北京理工大学 Revolution box body type air pressure force-application numerical control polishing device with adjustable large eccentricity
CN102922420B (en) * 2012-11-05 2015-05-13 北京理工大学 Revolution box body type air pressure force-application numerical control polishing device with adjustable large eccentricity
CN102950540B (en) * 2012-11-07 2014-10-15 长春设备工艺研究所 Rotation stopping guide rail slide block device for main body of high-rotating-speed polishing head
CN102950540A (en) * 2012-11-07 2013-03-06 长春设备工艺研究所 Rotation stopping guide rail slide block device for main body of high-rotating-speed polishing head
CN102979870A (en) * 2012-12-05 2013-03-20 中国科学院光电技术研究所 Mechanism capable of transmitting rotating torque and axially reciprocating
CN102979870B (en) * 2012-12-05 2015-06-17 中国科学院光电技术研究所 Mechanism capable of transmitting rotating torque and axially reciprocating
CN102941529A (en) * 2012-12-08 2013-02-27 中国科学院光电技术研究所 Planetary motion type grinding device
CN102941529B (en) * 2012-12-08 2015-11-18 中国科学院光电技术研究所 Planetary motion type grinding device
CN102962764A (en) * 2012-12-17 2013-03-13 北京理工大学 Rigid eccentric-gearing revolution and rotation pneumatic-force-application numerically-controlled polishing device
CN102962764B (en) * 2012-12-17 2015-03-18 北京理工大学 Rigid eccentric-gearing revolution and rotation pneumatic-force-application numerically-controlled polishing device
CN104385079A (en) * 2014-10-16 2015-03-04 中山市吉尔科研技术服务有限公司 Pressurization type optical lens polisher
CN104385077A (en) * 2014-10-16 2015-03-04 中山市吉尔科研技术服务有限公司 A two-way polishing device for optical lenses
CN105598775A (en) * 2015-12-29 2016-05-25 山西顾德宝丰重工机械有限公司 Roller carrier shaft burr polishing mechanism and method
CN106737134A (en) * 2016-12-30 2017-05-31 浙江工业大学 It is a kind of to realize the mechanism that polishing disk irrational number is rotated
CN107414631B (en) * 2017-08-17 2019-04-05 天津大学 Aperture aspherical robot eccentric planetary burnishing device
CN107414631A (en) * 2017-08-17 2017-12-01 天津大学 Aperture aspherical robot eccentric planetary burnishing device
CN107685267A (en) * 2017-10-09 2018-02-13 中国科学院国家天文台南京天文光学技术研究所 A kind of lapping using star lapping machine instrument
CN107685267B (en) * 2017-10-09 2019-02-19 中国科学院国家天文台南京天文光学技术研究所 A planetary grinding tool
CN107803723A (en) * 2017-11-30 2018-03-16 苏州陈那自动化技术有限公司 A kind of grinding and polishing device
CN108000174A (en) * 2017-12-08 2018-05-08 合肥海源机械有限公司 A kind of hole processing device of axles in industrial vehicles shell
CN109488733A (en) * 2018-12-30 2019-03-19 苏州富强科技有限公司 A kind of planetary gear transmission mechanism
CN109773247A (en) * 2019-02-21 2019-05-21 安徽新园矿山设备制造有限责任公司 A kind of edge milling machines suitable for roller carrier shaft processing
CN110948380A (en) * 2019-12-13 2020-04-03 中国科学院长春光学精密机械与物理研究所 A planetary grinding device and a method for optimizing the removal function of the planetary grinding device
CN111002157A (en) * 2019-12-16 2020-04-14 厦门理工学院 Polishing device
CN112247735A (en) * 2020-10-22 2021-01-22 中国科学院国家天文台南京天文光学技术研究所 Planet grinding tool based on parallel flat rotating structure
CN114523405A (en) * 2021-10-14 2022-05-24 杭州电子科技大学 Eccentric slewer of translation revolution
CN114800140A (en) * 2022-04-22 2022-07-29 中国科学院上海光学精密机械研究所 Double-rotor grinding and polishing tool used with robot
CN117260514A (en) * 2023-11-22 2023-12-22 北京特思迪半导体设备有限公司 Accurate control method of eccentric driving mechanism
CN117260514B (en) * 2023-11-22 2024-02-09 北京特思迪半导体设备有限公司 Accurate control method of eccentric driving mechanism

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