CN101718531A - Method and device for measuring appearance and wall thickness of sphere by combining differential confocal and point-diffraction interference - Google Patents
Method and device for measuring appearance and wall thickness of sphere by combining differential confocal and point-diffraction interference Download PDFInfo
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Abstract
The invention belongs to the field of optical precision measurement and relates to a method and a device for measuring the appearance and the wall thickness of a sphere by combining a differential confocal confocal technology and point-diffraction interference. The method realizes the high-precision rapid measurement on the appearance of the outer surface of the sphere by using the point-diffraction interference, the rotation of the measured sphere and the splice of a measuring sub-aperture; and the appearance and wall thickness of the inner surface and the outer surface of a key area of a transparent or semitransparent sphere can be scanned and measured point by point by using the differentia confocal technology. The invention organically integrates a point-diffraction interference technology and the differentia confocal technology so as to realize the synchronous measurement on the appearance and the wall thickness of the inner surface and the outer surface of the sphere, and aims to solve the difficult problems that the traditional AFM or a single confocal sensor and the other scanning methods have low measuring speed, low efficiency, easy leakage in measurement and the like during measuring the surface of the sphere. The invention has broad application prospect in the fields of testing the appearance and the wall thickness of a laser fusion pellet, the appearance and the outline of a spherical surface and the like.
Description
Technical field
The invention belongs to technical field of optical precision measurement, can be used for the measurement of spherome surface pattern, profile and surfaces externally and internally profile, pattern and the wall thickness measuring of transparent or semitransparent hollow ball.
Technical background
Hollow glass micro-ball have light weight, high-strength, heat insulation, corrosion-resistant, do not burn, advantage such as electrical isolation, chemical inertness and good fluidity, have a wide range of applications at aspects such as nuclear fusion, Chu Qing, deep-sea detecting, Aero-Space and pharmacodiagnosises.
Laser inertial confinement nuclear fusion (ICF) experiment pellet commonly used is to include D
2Or the microballoon of fusionable material such as DT, it has been generally acknowledged that: microcosmic geometry parameters such as the profile of pellet surfaces externally and internally and wall thickness are the key factors that causes Rayleigh-Taylor's fluid instability.In the implosion accelerating period, small surface disturbance may enlarge 100 times even more, causes the asymmetric compression of pellet or breaks, and finally causes the failure of practicing shooting.Therefore, the accurate measurement of pellet surface topography, analysis and control have important practical significance for ICF implosion test.
The surface topography analysis at first needs to obtain the pellet surface profile data.Pellet diameter commonly used is 100～2000 μ m, and wall thickness is 0.5～20 μ m, and wall thickness deviation requires at 0.03～0.5 μ m.Because the size of pellet is small, target shell fragility, clamping and location are all very difficult, are difficult to realize accurate nondestructive measurement.
At present, the research based on the new material of hollow glass micro-ball is a focus of international material research.By regulating the parameters such as size, composition, structure and surface topography of tiny balloon, the tiny balloon material can be realized character such as light, heat, electricity, magnetic and catalysis are carried out large-scale cutting, Here it is tiny balloon surface-functionalized.Utilize the surface-functionalized functional characteristic that can further expand glass microsphere, show more wide application prospect.
But there is certain problem in this research field at present, most studies mainly concentrates on the processing technology and the application facet of hollow ball, research at the hollow ball detection range is few, especially with the research of the character of surface of surface-functionalized relevant tiny balloon (as surface topography etc.) still less, be difficult to realize the complex microsphere performance is realized real chemical tailoring.Therefore hollow ball constituent and surface topography accurately being measured is to carry out the technical barrier that the surface-functionalized research of glass microsphere needs to be resolved hurrily.
The tiny balloon surface topography detects normal atomic force microscope (AFM), scanning electron microscope (SEM) and the x-ray method of adopting, but its limitation: AFM is all arranged because the restriction of its measurement range, can only measure very little outer surface region, can not wall-thickness measurement and inside surface; It is conductor that SEM needs measuring object, and tiny balloon itself is non-conductive, needs that before measurement last layer carbon is steamed on the pellet surface and is used for conducting electricity, and can introduce error, and in addition, the SEM operation also need be carried out in vacuum environment, requires very high to test environment; X-ray method can only be judged qualitatively and can't realize quantitative measurment according to image.
At the measurement of tiny balloon, scholar both domestic and external has carried out a large amount of research.The people such as R.B.Stephens of U.S. General Atomic (GA) company in 2000 combine atomic force microscope, accurate rotary axis and fiber optic interferometric technology, measure the height value of tiny balloon outer surface profile with atomic force microscope, with the wall thickness of optical fiber interferometric method along identical trajectory measurement tiny balloon, the height value of outer surface profile is deducted wall thickness, obtained the height value of inner surface profile.But, in the method, measurement to the tiny balloon inside surface realizes indirectly by the interferometric method wall-thickness measurement, there is following problem: spot diameter big (100 μ m), resolving power is low, the track of interferometry wall thickness can't overlap fully with the track that atomic force microscope is measured outside surface, can introduce measuring error.
Atomic force microscope probe-type micro-measurement apparatus such as (AFM) is when measuring tiny balloon, owing to be to carry out " pointwise " scanning survey along certain track, measure place beyond the track and be measure less than, some crucial surface topography information of so just may slipping, as shown in Figure 6.In order to solve this class problem, people such as the breadboard R.C.Montesanti of U.S. Lawrence Livermore NationalLaboratory proposed to utilize the outside surface pattern of movable phase interfere commercial measurement tiny balloon in 2006.Compare with " pointwise " metering system of probe-type, interferometric method is that " by face " measures, and not only can improve efficiency of measurement, and can any surface topography of test leakage.But this method can only be measured the surface topography of tiny balloon, can't wall-thickness measurement, and the data of its measurement simultaneously can't combine with follow-up evaluation algorithms such as power spectrum.
The domestic research that the tiny balloon measurement is carried out mainly is to follow the tracks of advanced foreign technology.In " AFM precision measurement of pellet surface profile pattern and the evaluating characteristics " on " light laser and the particle beams " the 12nd phase in 2005, delivered, the surface profiler of Harbin Institute of Technology development adopts atomic force microscope and precision rotating air-bearing shafts system etc. to combine, and has realized accurate transformation and measurement on surperficial 3 orthogonal directionss of tiny balloon.But this method can only be measured the outer surface profile of tiny balloon, can't measure the inner surface profile and the wall thickness of tiny balloon.In " the phase shift interference method is measured ICF microballoon inside surface roughness " of on " atomic energy science technology " the 2nd phase in 2008, delivering, the method for phase shift interference method measurement tiny balloon inside surface roughness has been proposed.But in the method measuring process, interference fringe also can be subjected to the influence of tiny balloon outer surface roughness, and this method can only be measured the roughness of tiny balloon inside surface except being subjected to Effect of Environmental such as temperature, air-flow.
The general character of above method of testing is: pattern and the wall thickness that can't measure the tiny balloon surfaces externally and internally with a kind of method simultaneously.
In recent years, the confocal technology in micro-imaging field development both at home and abroad rapidly, this technology with axial light intensity response curve as opinion scale, have precision height, antijamming capability strong, have characteristics such as high chromatography imaging capability.Chinese patent " differential confocal the scanning detection method " (patent No.: 200410006359.6) for example with high spatial resolution, it has proposed the ultra-discrimination differential confocal detection method, make the system axial resolving power reach nanoscale, and significantly improved anti-environmental perturbation ability.Confocal technology mainly is applicable to microcosmic micrometering field; The point-diffraction interference technology is mainly used in the face type measurement of optical device etc. at present.But utilize a light path that differential confocal technology is combined with the point-diffraction interference technology, realize the simultaneously-measured report of hollow ball surfaces externally and internally pattern and wall thickness, do not see as yet up to now.
Summary of the invention
The objective of the invention is in order to solve the problem of geometric parameter high precision nondestructive measurements such as hollow ball surfaces externally and internally profile, pattern and wall thickness, propose a kind ofly to utilize a light path that point-diffraction interference and differential confocal technology are organically blended, realize the measuring method and the device of hollow ball surfaces externally and internally pattern, profile and wall thickness, can measure the outside surface pattern of hollow ball fast by measuring interference fringe; Match with high precision multidimensional worktable by confocal technology, the position of worktable when accurate measuring beam focus focuses on the inside and outside surface of hollow ball, and then obtain measuring the inside and outside surface profile altitude information of spheroid, just can obtain the wall thickness data as calculated.
The objective of the invention is to be achieved through the following technical solutions.
Differential confocal of the present invention combines with point-diffraction interference and measures the method for spheroid pattern and wall thickness, may further comprise the steps:
1. the light that sends from the pointolite 1 of being with reflection function is divided into two parts through spectroscope 2, and the light of transmission converges to transparent or semitransparent hollow ball 7 through object lens 5; Light through hollow ball 7 surface reflections, once more by object lens 5, be divided into two parts by spectroscope 2, the light of reflection enters differential confocal detection system 8, the light of transmission is reflected by pointolite 1 reflecting surface, another Shu Guang that sends with pointolite is assembled by spectroscope 2 reflections, object lens 3 successively, interferes on the CCD4 surface, and detects the interference fringe that has hollow ball 7 surface informations by CCD4;
2. when working in the point-diffraction interference measurement, adjust, make the focal beam spot size to fit that projects hollow ball 7 surfaces by multidimensional worktable 6;
3. drive the rotation of hollow ball 7 by multidimensional worktable 6, CCD4 can record the multi-frame interferometry image; Sub-aperture stitching algorithm by prior art is handled interference image, records the pattern on hollow ball 7 surfaces.
4. when working in the differential confocal measurement, by moving of multidimensional worktable 6, make the focus of light project the outside surface and the inside surface of hollow ball 7 successively, 0. 25,0. 26 corresponding respectively object lens 5 on differential confocal detection system 8 response curves focus on hollow ball 7 outer, inside surface positions;
5. survey 0. 25,0. 26 successively by differential confocal detection system 8, measure respectively and the position of surveying 0. 25 and 0. 26 corresponding multidimensional worktable 6, its value is designated as a and b respectively;
Wherein a is the height value of the corresponding hollow ball 7 outside surface patterns of aiming point, and b is the height value of corresponding hollow ball 7 internal surface shapes of aiming point;
6. a and b subtract each other and obtain the wall thickness 27 of hollow ball 7 at the aiming point place;
7. 4. hollow ball 7 reuses step along with multidimensional worktable 6 at the uniform velocity rotates in the rotary course, obtains the height value data { a of hollow ball 7 outer surface profiles
1, a
2, a
3..., a
n, the height value data { b of inner surface profile
1, b
2, b
3..., b
nAnd the corresponding rotation angle value { θ of each aiming point
1, θ
2, θ
3..., θ
n;
8. by { a
1, a
2, a
3..., a
nAnd { θ
1, θ
2, θ
3..., θ
nCalculate the outer surface profile of hollow ball 7;
9. by { b
1, b
2, b
3..., b
nAnd { θ
1, θ
2, θ
3..., θ
nCalculate the inner surface profile of hollow ball 7;
10. by { a
1, a
2, a
3..., a
nAnd { b
1, b
2, b
3..., b
nSubtract each other, obtain the wall thickness value of one group of hollow ball 7: { Δ
1, Δ
2, Δ
3..., Δ
n.
Measuring method of the present invention can also be carried out phase shift to light source, obtains several phase-shift interferences at CCD4, improves the precision of interferometry.
Measuring method of the present invention can also be carried out phase shift by travelling table 6, obtains several phase-shift interferences at CCD4, improves the precision of interferometry.
Measuring method of the present invention can also replace symmetrical Jiao preceding, defocused detector 13 and the detector 11 of being placed in the differential confocal detection system 8 with a confocal detector 29 that is placed on focus.
The present invention also provides differential confocal to combine with point-diffraction interference and has measured the device of spheroid pattern and wall thickness, comprise light source 14, object lens 15, it is characterized in that: aperture 16, spectroscope 2, object lens 3, CCD4, object lens 5, worktable 6 and the differential confocal detection system 8 of going back the band reflection function; Wherein object lens 15, the aperture 16 of band reflection function is successively placed on light source 14 emergent ray directions, and aperture 16 is placed on the focus place of object lens 15, spectroscope 2 is placed on the exit direction of pointolite 1, object lens 3 and CCD4 are placed on the reflection direction of spectroscope 2 successively, object lens 5 and worktable 6 are placed on the transmission direction of spectroscope 2 successively, differential confocal detection system 8 is placed on the opposite direction of spectroscope 2 reflection directions, pin hole 10 in the differential confocal detection system 8, detector 11 is placed on the transmission direction of spectroscope 9 successively, pin hole 12, detector 13 is placed on the reflection direction of spectroscope 9 successively, and place detector 11 defocused, before detector 13 placed Jiao, detector 11 and detector 13 were about the focus symmetry;
Measurement mechanism of the present invention can also replace symmetrical Jiao preceding, defocused detector 13 and the detector 11 of being placed in the differential confocal detection system 8 with a confocal detector 29 that is placed on focus.
Measurement mechanism of the present invention can also plate the optical fiber 22 replacement apertures 16 of reflectance coating with end face, realizes having the pointolite function of strong reflection ability.
The present invention contrasts prior art and has following inventive point:
1. utilize a light path that point-diffraction interference and differential confocal formula technology are organically blended, realize the measurement of hollow ball surface topography.At first can utilize point-diffraction interference to measure fast to the outside surface pattern of hollow ball, find out critical area or crucial track, with differential confocal formula technology critical area or crucial track are carried out " pointwise " measurement then, link work at selected spots with that in entire areas, improve the reliability of efficiency of measurement and measurement result.
2, utilize differential confocal technology to have high this characteristic of chromatography imaging capability and aim at triggering, moving and high accuracy displacement sensor of cooperating platform measured when realizing hollow ball surfaces externally and internally pattern, profile and wall thickness.
Measure when 3, realizing hollow ball surfaces externally and internally profile and wall thickness with sensor, it is identical to measure track, has avoided measuring respectively under hollow ball surfaces externally and internally and the wall thickness situation with distinct methods and has measured the different introducing of track measuring error.
After adopting above-mentioned technology, the present invention has following remarkable advantage:
1, improve efficiency of measurement, avoid the surface topography of any key of test leakage, and two kinds of measurement results is verified the reliability of raising measurement result mutually;
2, the differential detection method that subtracts each other can suppress common-mode noises such as environmental change, light source fluctuation, detector drift, significantly improves the signal to noise ratio (S/N ratio) of measuring system and sensitivity etc.;
3, the measurement of point-diffraction interference and differential confocal technology belongs to measuring method, and is contactless with sample, also do not need sample is done any processing, belongs to Non-Destructive Testing, and measuring condition is simple and easy to satisfy.
Description of drawings
Fig. 1 is for adopting the measuring method synoptic diagram of differential confocal detection system;
Fig. 2 is for adopting the measuring method synoptic diagram of confocal detection system;
Fig. 3 is the synoptic diagram of measurement mechanism of the present invention;
Fig. 4 is the synoptic diagram of the embodiment of the invention;
Fig. 5 is the differential response curve of the embodiment of the invention;
Fig. 6 measures test leakage key point synoptic diagram for the probe sensor point by point method.
Wherein: 1-has the pointolite of reflection potential, the 2-spectroscope, the 3-object lens, 4-CCD, the 5-object lens, the 6-worktable, the 7-hollow ball, 8-differential confocal detection system, the 9-spectroscope, the 10-pin hole, the 11-detector, the 12-pin hole, the 13-detector, the 14-light source, the 15-object lens, the 16-aperture, the 17-reflective mirror, the catoptron of 18-Piezoelectric Ceramic, the 19-spectroscope, the 20-light source, the 21-object lens, the optical fiber of 22-end face plating reflectance coating, the 23-TT﹠C system, the 24-computing machine, 25-zero point, 26-zero point, the 27-wall thickness, the 28-pin hole, the 29-detector.
Embodiment
The invention will be further described below in conjunction with drawings and Examples.
Propose first a kind ofly to utilize a light path that point-diffraction interference and differential confocal technology are organically blended, realize the measurement of hollow ball surfaces externally and internally pattern and wall thickness.
Basic thought of the present invention is to utilize the point-diffraction interference technology, can measure the outside surface pattern of hollow ball fast by measuring interference fringe; Match with high precision multidimensional worktable by differential confocal technology, the position of worktable when accurate measuring beam focus focuses on the inside and outside surface of hollow ball, and then obtain the inside and outside surface profile altitude information of spheroid, just can obtain the wall thickness data by calculating.
Embodiment
As shown in Figure 4, differential confocal combines with point-diffraction interference and measures the method for spheroid pattern and wall thickness, and its measuring process is:
At first, open light source 20, penetrate the directional light process by spectroscope 19, the effect of the phase-shift system that catoptron 17 and Piezoelectric Ceramic catoptron 18 are formed, but become the directional light of phase shift, converge to the incident end of optical fiber 22 again through object lens 21, light from the ejaculation of optical fiber 22 exit ends, pass through spectroscope 2 and object lens 5 successively, be focused at the surface of hollow ball 7, light is again after the surface reflection by hollow ball 7, by object lens 5, be divided into two parts by spectroscope 2: a part reflexes to differential confocal measuring system 8, and a part is transmitted to the exit end of optical fiber 22, reflection through optical fiber 22 exit end reflectings surface, pass through the reflection of spectroscope 2 with its light that sends, converging of object lens 3 interferes on the CCD4 surface, and CCD4 detects the surface topography information interference fringe that has hollow ball 7;
When system works during in interferometry, move by TT﹠C system 23 control multidimensional worktable 6, make the focal beam spot size to fit that projects hollow ball 7 surfaces;
By TT﹠C system 23 controlling and driving piezoelectric ceramics catoptron 18 is moved then, can produce several phase-shift interferences, measure interferogram with CCD4, and measurement result is sent to computing machine 24;
Then, repeat above-mentioned measuring process, can obtain the phase-shift interference on the full surface of hollow ball by 6 rotations of TT﹠C system 23 Control work platforms;
By computing machine 24 these interferograms are carried out computing at last, just can obtain the outside surface pattern of hollow ball 7.
When system works when differential confocal is measured, the light that enters the differential confocal detection system is divided into two-way by spectroscope 9 with light, transmitted ray shines detector 11 through needle passing hole 10, reflection ray shines detector 13 through needle passing hole 12; Make shuttle-scanning by TT﹠C system 23 Control work platforms 6 at optical axis direction.The response curve of differential confocal aiming system 10 as shown in Figure 5.Determine that by surveying 0. 25 the focus of object lens 5 has been targeted to the outside surface of spheroid 7, trigger the position of TT﹠C system 23 surveying work platforms 6, its value is designated as a, and a is the height value of hollow ball 7 outside surfaces institute aiming point profile.
Then, worktable 6 continues to be moved to the left scanning along optical axis, determines that by surveying 0. 26 the focus of object lens 5 has been targeted to the inside surface of spheroid, triggers the position of TT﹠C system surveying work platform 6, its value is designated as b, and b is the height value of hollow ball inside surface institute aiming point profile.
A and b subtract each other and obtain the wall thickness 27 of hollow ball 7 at the aiming point place.
Then, hollow ball 7 repeats above-mentioned measuring process along with worktable 6 at the uniform velocity rotates, and up to the wheel measuring of finishing a week, obtains the height value data { a of the profile of hollow ball 7 outside surfaces
1, a
2, a
3..., a
n, the height value data { b of inner surface profile
1, b
2, b
3..., b
n; Obtain the corresponding rotation angle value { θ of each aiming point simultaneously
1, θ
2, θ
3..., θ
n.
Then, by least square method evaluation deviation from circular from, calculate the radial error that hollow ball 7 outside surface of surveying circle i is ordered by following formula:
Wherein, ε
OiBe that the i point is with respect to hollow ball outside surface least square circumference distance radially, a
iBe the height value of hollow ball 7 outside surface i dot profiles, θ
iIt is the corresponding anglec of rotation of i point.
The deviation from circular from of hollow ball 7 outside surfaces is:
f
Outward=(ε
Oi)
Max-(ε
Oi)
Min(2)
Then, calculate the radial error that hollow ball 7 inside surface of surveying circle i is ordered by following formula:
Wherein, ε
SiBe that the i point is with respect to hollow ball inside surface least square circumference distance radially, b
iBe the height value of hollow ball 7 inside surface i dot profiles, θ
iIt is the corresponding anglec of rotation of i point.
The deviation from circular from of hollow ball 7 inside surfaces is:
f
In=(ε
Si)
Max-(ε
Si)
Min(4)
At last, calculate the wall thickness at the i point place of hollow ball 7 by following formula:
Δ
i＝a
i-b
i (5)
As shown in Figure 4, differential confocal combines with point-diffraction interference and measures the device of spheroid pattern and wall thickness, comprise pointolite 1, comprising the optical fiber 22 of light source 20, catoptron 17, Piezoelectric Ceramic catoptron 18, spectroscope 19, object lens 21 and outgoing end face plating reflectance coating; Also comprise the spectroscope 2, object lens 5 and the multidimensional worktable 6 that are placed on pointolite 1 exit direction successively; Also comprise the object lens 3 and the CCD4 that are placed on spectroscope 2 reflection directions successively; Also comprise and be placed on the reciprocal differential confocal detection system 8 of spectroscope 2 reflection directions, comprising spectroscope 9, be placed on the pin hole 10 and the detector 11 of spectroscope 9 transmission direction successively, be placed on the pin hole 12 and the detector 13 of spectroscope 9 reflection directions successively, detector 11 is placed on defocused, before detector 13 was placed on Jiao, the two position was about the focus symmetry;
When system works when point-diffraction interference is measured, move by TT﹠C system 23 control multidimensional worktable 6, make the focal beam spot size to fit that projects hollow ball 7 surfaces; By TT﹠C system 23 controlling and driving piezoelectric ceramics catoptron 18 is moved then, can produce several phase-shift interferences, measure interferogram with CCD4, and measurement result is sent to computing machine 24, drive hollow ball 7 rotations by worktable 6, can record the phase-shift interference of whole spheres, handle, can obtain the surface topography of hollow ball 7 by COMPUTER CALCULATION;
When system works when differential confocal is measured, hollow ball 7, spectroscope 2, with the spectroscope 9 of beam reflection in the differential confocal measuring system 8, spectroscope 9 is with the light beam separated into two parts: transmitted ray shines on the detector 11 through needle passing hole 10; Reflection ray shines on the detector 13 through needle passing hole 12.Nanoscale micro-displacement work table 6 drives hollow balls 7 in the optical axis direction scanning that moves reciprocatingly.In scanning process, the focus of object lens 5 successively is targeted to the outside surface and the inside surface of spheroid 7, in the respectively corresponding differential confocal sensor output response curve 0. 25,0. 26.Utilize and remove to trigger the shift value that TT﹠C system 23 goes to write down the sensor output of micro-displacement work table 6 this two zero points, can obtain surfaces externally and internally surface profile value and the wall thickness of hollow ball 7 in this point.Worktable 6 drives hollow ball 7 and does at the uniform velocity rotation, repeats surfaces externally and internally profile value and corresponding rotation angle value that above-mentioned measuring process obtains a series of hollow balls 7.By processing, just can obtain the profile and the wall thickness of the surfaces externally and internally of hollow ball 7 to these data.
This embodiment has realized quick, the high-acruracy survey of inside and outside surface topography of hollow ball and wall thickness by a series of measure, hollow ball surfaces externally and internally pattern and wall thickness measuring method and apparatus have been realized based on point-diffraction interference and confocal technology, compare with other measuring method, have can measure simultaneously that surfaces externally and internally pattern and wall thickness, measuring accuracy height, speed are fast, antijamming capability by force, advantage such as not test leakage.
Below in conjunction with the accompanying drawings the specific embodiment of the present invention is described; but these explanations can not be understood that to have limited scope of the present invention; protection scope of the present invention is limited by the claims of enclosing, and any change on claim of the present invention basis all is protection scope of the present invention.
Claims (7)
1. differential confocal combines with point-diffraction interference and measures the method for spheroid pattern and wall thickness, it is characterized in that:
1. the light that sends from the pointolite (1) of being with reflection function is divided into two parts through spectroscope (2), and the light of transmission converges to transparent or semitransparent hollow ball (7) through object lens (5); Light through hollow ball (7) surface reflection, once more by object lens (5), be divided into two parts by spectroscope (2), the light of reflection enters differential confocal detection system (8), transmitted light is reflected by pointolite (1) reflecting surface, another Shu Guang that sends with pointolite is assembled by spectroscope (2) reflection, object lens (3) successively, interferes on CCD (4) surface, and detects the interference fringe that has hollow ball (7) surface information by CCD (4);
2. when working in the point-diffraction interference measurement, adjust, make the focal beam spot size to fit that projects hollow ball (7) surface by multidimensional worktable (6);
3. drive the rotation of hollow ball (7) by multidimensional worktable (6), CCD (4) records the multi-frame interferometry image and through the sub-aperture stitching algorithm process, records the pattern on hollow ball (7) surface.
4. when working in the differential confocal measurement, by moving of multidimensional worktable (6), make the focus of light project the outside surface and the inside surface of hollow ball (7) successively, the zero point (25) on differential confocal detection system (8) response curve, zero point (26), corresponding object lens (5) focused on that hollow ball (7) is outer, the inside surface position respectively;
5. survey zero point (25), zero point (26) successively by differential confocal detection system (8), measure respectively and the position of surveying corresponding multidimensional worktable (6) of zero point (25) and zero point (26), its value is designated as a and b respectively;
Wherein a is the height value of corresponding hollow ball (7) the outside surface pattern of aiming point, and b is the height value of corresponding hollow ball (7) internal surface shape of aiming point;
6. a and b subtract each other and obtain the wall thickness (27) of hollow ball (7) at the aiming point place;
7. 4. hollow ball (7) reuses step along with multidimensional worktable (6) at the uniform velocity rotates in the rotary course, obtains the height value data { a of hollow ball (7) outer surface profile
1, a
2, a
3..., a
n, the height value data { b of inner surface profile
1, b
2, b
3..., b
nAnd the corresponding rotation angle value { θ of each aiming point
1, θ
2, θ
3..., θ
n;
8. by { a
1, a
2, a
3..., a
nAnd { θ
1, θ
2, θ
3..., θ
nCalculate the outer surface profile of hollow ball (7);
9. by { b
1, b
2, b
3..., b
nAnd { θ
1, θ
2, θ
3..., θ
nCalculate the inner surface profile of hollow ball (7);
10. by { a
1, a
2, a
2..., a
nAnd { b
1, b
2, b
3..., b
nSubtract each other, obtain the wall thickness value of one group of hollow ball (7): { Δ
1, Δ
2, Δ
3..., Δ
n.
2. combine with point-diffraction interference according to right 1 described differential confocal and measure the method for spheroid pattern and wall thickness, it is characterized in that: can also carry out phase shift to light source, obtain several phase-shift interferences, improve the precision of interferometry at CCD (4).
3. combine with point-diffraction interference according to right 1 described differential confocal and measure the method for spheroid pattern and wall thickness, it is characterized in that: can also carry out phase shift by travelling table (6), obtain several phase-shift interferences at CCD (4), improve the precision of interferometry.
4. combine with point-diffraction interference according to right 1 described differential confocal and measure the method for spheroid pattern and wall thickness, it is characterized in that: before symmetry is placed on focus in the differential confocal detection system (8), the detector after the focus (13) and detector (11), can also replace with a confocal detector (29) that is placed on focus.
5. differential confocal combines with point-diffraction interference and measures the device of spheroid pattern and wall thickness, comprise light source (14), object lens (15), it is characterized in that: also comprise aperture (16), spectroscope (2), object lens (3), CCD (4), object lens (5), worktable (6) and the differential confocal detection system (8) of being with reflection function; Object lens (15) wherein, the aperture (16) of band reflection function is successively placed on light source (14) emergent ray direction, and aperture (16) is placed on the focus place of object lens (15), spectroscope (2) is placed on the exit direction of pointolite (1), object lens (3) and CCD (4) are placed on the reflection direction of spectroscope (2) successively, object lens (5) and worktable (6) are placed on the transmission direction of spectroscope (2) successively, differential confocal detection system (8) is placed on the opposite direction of spectroscope (2) reflection direction, pin hole (10) in the differential confocal detection system (8), detector (11) is placed on the transmission direction of spectroscope (9) successively, pin hole (12), detector (13) is placed on the reflection direction of spectroscope (9) successively, and place detector (11) defocused, before detector (13) placed Jiao, detector (11) and detector (13) were about the focus symmetry.
6. differential confocal according to claim 5 combines with point-diffraction interference and measures the device of spheroid pattern and wall thickness, its feature also is: symmetry is placed on burnt preceding, defocused detector (13) and detector (11) in the differential confocal detection system (8), can also replace with a confocal detector (29) that is placed on focus.
7. differential confocal according to claim 5 combines with point-diffraction interference and measures the device of spheroid pattern and wall thickness, its feature also is: can also plate optical fiber (22) the replacement aperture (16) of reflectance coating with end face, realize having the pointolite function of strong reflection ability.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009102374395A CN101718531B (en) | 2009-11-06 | 2009-11-06 | Method and device for measuring appearance and wall thickness of sphere by combining differential confocal and point-diffraction interference |
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|---|---|---|---|
| CN2009102374395A CN101718531B (en) | 2009-11-06 | 2009-11-06 | Method and device for measuring appearance and wall thickness of sphere by combining differential confocal and point-diffraction interference |
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|---|---|
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| CN101718531B CN101718531B (en) | 2011-01-05 |
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