CN101636585B

CN101636585B - Vacuum diaphragm pump unit

Info

Publication number: CN101636585B
Application number: CN2008800083168A
Authority: CN
Inventors: 克里斯托弗·里布萨门; 马塞尔·费尔伯
Original assignee: Medela Holding AG
Current assignee: Medela Holding AG
Priority date: 2007-03-13
Filing date: 2008-03-04
Publication date: 2012-02-22
Anticipated expiration: 2028-03-04
Also published as: RU2472967C2; AU2008226308A1; EP2129915A2; JP2010520962A; CA2679865A1; WO2008110022A3; BRPI0808211A2; KR20090118065A; RU2009136224A; WO2008110022A2; MX2009009807A; US20100086419A1; TW200900586A; CN101636585A

Abstract

The invention relates to a vacuum diaphragm pump unit, which comprises a dimensionally stable diaphragm base (1), a dimensionally stable one-piece diaphragm cover (3) having a bottom area and a side wall (36) that extends around the bottom area and widens towards the exterior, and a one-piece pump diaphragm (2) which has a diaphragm plate (20), a flexible diaphragm piston (21), at least one inlet valve flap (23) and at least one outlet valve flap (24). The diaphragm plate (20) is interposed between the diaphragm base (1) and the diaphragm cover (3). The pump diaphragm (2) and the diaphragm cover (3) are interconnected in a predetermined position with respect to each other via connecting elements (15, 15', 15''). The diaphragm piston (21) extends through the diaphragm base (1) and the diaphragm piston (21) covers a pump chamber (31) of the diaphragm cover (3). The invention is characterized in that more than three connecting elements (15, 15', 15'') are present and are integrally bonded and/or form-locked.

Description

Vacuum diaphragm pump unit

Technical field

The present invention relates to a kind of vacuum diaphragm pump unit.

Background technique

The vacuum diaphragm pump unit of known a kind of part as breast pump from US 4 964 851 for example.Breast pump has electric motor, by means of the connecting rod of motor driven and the pump diaphragm that is attached thereto.Pump diaphragm remains in the barrier film framework and with membrane cover and forms pump chamber.Can be from the pump that market obtains, barrier film framework, pump diaphragm and membrane cover interconnect by means of the extruding link, and wherein three of the barrier film framework pins remain in the corresponding hole in the membrane cover with the friction ways of connecting for this reason.

US 7 070 400 has also disclosed a kind of diaphragm pump unit of the same type of vacuum pump, and wherein here barrier film has the diaphragm piston of the recess that has the back.Membrane cover limit have that flat base section and taper ground outwards widens around the space of sidewall.This space covers and forms pump chamber by diaphragm piston.

EP 0 744 180 has explained a kind of vacuum diaphragm pump equally, and still said vacuum diaphragm pump is applicable to and uses two suction connectors simultaneously.

In addition, WO 2006/032156 illustrates a kind of diaphragm pump, and said diaphragm pump has by interconnective three case members of snap elements.

Summary of the invention

The objective of the invention is, a kind of vacuum diaphragm pump unit with process stability of raising is provided.

This purpose is achieved through a kind of vacuum diaphragm pump unit.

Vacuum diaphragm pump unit according to the present invention has: the barrier film framework of dimensionally stable; The membrane cover of the one of dimensionally stable, said membrane cover has the pump chamber that has bottom section and sidewall, this bottom section of said side walls enclose and outwards widen away from this bottom section; And the pump diaphragm of one; Said pump diaphragm has diaphragm plate, pliable and tough diaphragm piston, at least one inlet flap and at least one outlet flap; Wherein diaphragm plate is arranged between barrier film framework and the membrane cover, and barrier film framework, pump diaphragm and membrane cover interconnect on preposition by means of connecting element.Diaphragm piston passes the barrier film framework and diaphragm piston forms pump chamber or covers this pump chamber with membrane cover.According to the present invention, there is the connecting element more than three, wherein they form material and/or shape joint.

Connecting element is with the barrier film framework and membrane cover interconnects and pump diaphragm remains between barrier film framework and the membrane cover.Can pass or remain between the connecting element by connecting element at this pump diaphragm.

Material and/or shape engage not to be guaranteed to connect and can automatically or owing to vibrating unclamp.Under the situation that the friction of formerly using connects, between each parts, that is to say that the connection between framework, barrier film and lid may be unclamped, especially when pump causes vibration in the natural vibration scope of device.

Simplified assembling in addition.Usually manually assemble.In fact proof, therefore when having a plurality of connecting element and having a plurality of position than easy when necessary three corresponding positions of manual alignment.Therefore reduced the danger of tilting.

Although use the connecting element more than three in fact can cause uncertainty, show total shape stability that can be improved as static state.Therefore use more than three, especially six to 12 connecting element cause the advantages of higher stability and the longitudinal rigidity of device.Therefore membrane cover can not twisted with the barrier film framework, and the sealing that the unit has a raising is perhaps minimized the danger that the unit leaks owing to temperature change, vibration or fatigue of materials.Preferably use nine connecting element that are distributed on the fringe region.

Owing to use a plurality of connecting element also to improve the natural frequency of system.Improved acoustic characteristic.Reduced the tendency of background noise during aspiration procedure.

Bindiny mechanism is preferably the pin that is fixed in the bearing.For example they can be bonded, welding or riveted joint.But for example also can using, the shape joint element of snak link, pine tree formula spring latch and kindred organization substitutes pin.

It also is possible using shape and material to engage in addition, for example the pine tree formula spring latch through welding.

In preferred form of implementation, membrane cover has the thickness that roughly is formed uniformly on its whole surface.Therefore prevent warpage and distortion equally and improved sealing.

Can make at low cost according to vacuum pump unit of the present invention; Especially just form because of it by three parts; The wherein parts of two dimensionally stables---barrier film framework and membrane cover can be with die casting by the plastics manufacturings, and pump diaphragm preferably with die casting by the liquid silicone resin manufacturing.

This vacuum pump unit is preferably used in the humalactor with the suction breast milk.Yet it also is applicable to other vacuum pump, for example draining pump.

Other favourable form of implementation is shown by following explanation.

Description of drawings

Below will be by means of setting forth theme of the present invention in the preferred embodiment shown in the appended accompanying drawing.Accompanying drawing illustrates:

Fig. 1 illustrates the three-dimensional exploded view that vacuum diaphragm pump unit according to the present invention is seen from the top;

Fig. 2 illustrates the three-dimensional exploded view of seeing from the below according to the vacuum diaphragm pump unit of Fig. 1;

Fig. 3 illustrates the stereogram of barrier film framework;

Fig. 4 is illustrated in the stereogram of the membrane cover in second form of implementation;

Fig. 5 illustrates the stereogram of fixing pin;

Fig. 6 illustrates the exploded view of the barrier film framework with electric motor; And

Fig. 7 is illustrated in the three-dimensional exploded view of the vacuum diaphragm pump unit in another form of implementation.

Embodiment

Use direction indication below like preceding text and hereinafter.These relate to the structure of each parts in the drawings and do not relate to the mounting point according to vacuum diaphragm pump unit of the present invention in vacuum pump.

Vacuum diaphragm pump unit according to the present invention according to Fig. 1 has barrier film framework 1, pump diaphragm 2 and membrane cover 3.Preferably each all constitutes all these parts integratedly.Barrier film framework 1 and membrane cover 3 be dimensionally stable and preferably be made of plastics with die casting, for example process by the thermoplastic plastics of for example polyester.Pump diaphragm 2 also constitutes integratedly and is processed by liquid silicone resin with die casting.

Barrier film framework 1 has the parallel plane substrate 10 that has through hole 11.The baffle plate 16 molded ends that are formed on substrate 10 vertical with substrate 10.This baffle plate 16 has pump unit bearing 19, in said pump unit bearing, remains on this unshowned valve cell, and it is for example open in US 4 964851.In bearing 19, exist in the suction port 18 in the baffle plate 16, said suction port 18 gradually becomes sucking pipe 18 ' on the back side that can in Fig. 2, find out.

On the side relative with baffle plate 16 of substrate, have at the electric motor shown in Fig. 64, said electric motor 4 is connected with the described below connecting rod link 26 of pump diaphragm through unshowned connecting rod.

As in Fig. 2, being clear that, baffle plate 16 is provided with the inlet opening 13 of pointing to pump diaphragm 2.This inlet opening 13 is through connecting passage 13 " with this connecting passage 13 " inlet channel 13 ' that is connected is in communication with the outside.This can be clear that in Fig. 3.

In addition, now as can be clear that once more that in Fig. 1 substrate 10 has path 10 in its surface ', said path 10 ' ends at the through hole 10 in the baffle plate 16 " in.This is used for the assembling of unshowned vacuum conditions pin.

In Fig. 2, can find out, exist in the bottom surface of substrate 10 around first seal groove 12.The groove that this first seal groove 12 surrounds through hole 11, inlet opening 13 and forms outlet passage 14.This outlet passage 14 be arranged on through hole 11 on diameter with respect to the side of inlet opening 13, and end on the side margin of substrate 10.On this end, substrate has upper channel link 17, and said upper channel link 17 has the form of the convex portion that has the U-shaped longitudinal section.

Molded integratedly formation is downwards towards the connecting element of pump diaphragm projection on substrate 10.In this form of implementation, these connecting element are essentially

columniform pin

15,15 ', 15 ".But also can there be for example other link of snap-lock element.In this case, the best molded outward edge that is formed on substrate of snap-lock element.In this second form of implementation shown in Fig. 7.On the barrier film framework 1, around end face on moldedly be formed with fastener 151, and seizing type shackle 152 molded being formed on the membrane cover 3 that are complementary with it.Pump diaphragm 2 does not need connecting element, but is clamped at simply between membrane cover 3 and the barrier film framework 1.

15,15 ', 15 according to first form of implementation " preferably only be arranged in the fringe region of substrate 10 and around the outside of seal groove 12 is distributed in.There is the

15,15 ', 15 more than three ".Be nine pins in the example shown here, wherein preferably use six to 12 pins.

In the simplest form of implementation, all pins constitute identical length and identical thickness.Yet also can use difform pin, as being exactly this situation here.Some pins---at least two relative pins 15 preferably ", constitute locating stud and have columniform matrix and the tip of tapered or taper.Some pins---here be first pin 15, have diameter greater than second pin 15

'.Pin

15,15 ', 15 " also can be provided with vertical flank 150, as shown in fig. 5.

15,15 ', 15 " length confirm as and make them pass subsequently the pump diaphragm 2 that is provided with, and charge in the membrane cover 3 at least in part or preferably equally fully pass membrane cover and on its facing surfaces, stop.

Also possible is, sells molded and is formed on the membrane cover or the part pin is arranged on the barrier film framework and part is arranged on the membrane cover.This is shown in Fig. 4.

The following pump diaphragm 2 that is arranged on substrate 10 has the diaphragm plate 20 of plane parallel ground formation basically equally.This diaphragm plate 20 has almost the basal plane identical with substrate 10.Gradually become in diaphragm plate 20 zone therebetween from diaphragm plate 20 and make progress towards the diaphragm piston 21 of substrate 10 projections.Diaphragm piston 21 constitutes the cover shape, wherein it preferably have circlewise around recess.The connecting rod base 26 molded centres that are formed on diaphragm piston 20 with hollow cylinder form.Connecting rod can easily insert in this seat 26 and shape engages and power remains on wherein ordinatedly.

There is horseshoe-shaped inlet flap 23 in a side in diaphragm piston 21.Diaphragm plate 20 has two horseshoe-shaped equally basically outlet flaps 24 that are provided with at a distance of certain distance in a relative side of diaphragm piston 21.Also can exist more than one or be less than two

flap

23,24.

Diaphragm plate 20 has last sealing lip 22, and the said sealing lip 22 of going up is surrounding diaphragm piston 21 and

flap

23,24 on the end face of substrate 10, and the said sealing lip 22 of going up is independently and to upper process.

With it similarly, diaphragm plate 20 its have on the bottom surface of membrane cover 3 around lower seal lip 28, the said lower seal lip 28 same diaphragm piston 21 of surrounding are with

flap

23,24 and to lower process.Two sealing lips 22,28 are preferably consistent.

Yet also possible is, it is not consistent only having in two sealing lips one or they.Also can exist seal groove to come replacement seal lip and membrane cover and/or diaphragm frame to set up corresponding sealing lip or sealing the margin.

Convex portion 27 is molded to be formed on the side margin of diaphragm plate 20, and said convex portion protrudes in the edge, but flushes with the end face and the bottom surface of plate 20 in others.

In the outside of sealing lip 22,28, diaphragm plate 20 is passed by first and

second fastener holes

25,25 ', said

fastener hole

25,25 ' diameter preferably be equivalent to or less times greater than the

relevant pin

15,15 ', 15 of substrate 10 ".

Membrane cover 3 has cover plate 30, said cover plate 30 towards the end face of pump diaphragm 2 equally basically plane earth constitute.And its bottom surface constitutes as mentioned belowly.The pump chamber 31 molded centres that are formed on cover plate 30.This pump chamber have with the surperficial identical height of remaining cover plate 30 on base section and circularly around the sidewall 36 of convexity, wherein sidewall 36 constitutes upwards and is outward-dipping, makes opening on bottom section, widen.Sidewall 36 can constitute straight inclination, or crooked as constituting shown in here.

Sidewall 36 here is that three inlet channeles 33 ' that extend in parallel to each other pass by at least one inlet channel.These passages are from inlet recess 33, and said inlet recess 33 constitutes the recess in cover plate 30 and ends in the bottom section with sidewall 36 with keeping at a certain distance away.On opposite side, sidewall 36 is by at least one, and here two outlet passages that extend radially outwardly 34 pass, and this outlet passage 34 ends at sidewall 36 outsides one distance in the cover plate 30.

Pump chamber 31, inlet recess 33 and inlet channel and outlet passage 33 ', 34 by fully around second seal groove 32 center on.

Projection is molded to be formed on the side margin of cover plate 30, and said projection and vertical sidewall form lower channel link 37.This lower channel link 37 forms with respect to the counterpart of upper channel link 17 and therefore preferably has the U-shaped longitudinal section.The above-mentioned convex portion 27 of pump diaphragm 2 is sized to make it corresponding to the basal plane of

passage link

17,37 and remain in these passages.

Exist in the outside of second seal groove 32 and to hold locating stud and fixed

15,15 ', 15 " bearing

hole

35,35 ', 35 ".These

holes

35,35 ', 35 " on the end face of cover plate 30, flush with this cover plate.Yet they constitute and hold socket on the bottom surface of cover plate, and wherein they preferably interconnect through stiffening rib 38.Socket side within it also can be provided with stiffening rib or have the location auxiliary member.Socket preferably has non-circular internal cross section, and socket is preferably polygonal.This has improved and the pin connection stability once more.

Can be clear that in Fig. 2 the bottom surface of cover plate 30 constitutes the element opposite configuration with molded formation in the end face of cover plate.That is to say that the recess of end face constitutes to extending below and the rising part of end face correspondingly sink in the bottom surface in the bottom surface.Therefore cover plate 30 roughly has the thickness that remains unchanged on the whole zone of basal plane or most of zone.Yet this is not suitable for all places.For example this is not suitable in the zone of the strengthening web between other the possible rising part between the socket or in the bottom surface.In vacuum pump unit, also can use such structuring cover plate, the connecting element frictional engagement or the power of said vacuum pump unit connect each parts ordinatedly.

Under the state according to the assembling of unit of the present invention, pump diaphragm 2 or its diaphragm plate 20 are sandwiched between the cover plate 30 of substrate 10 and diaphragm plate 3 of barrier film framework 1.Pass through hole 11 and can be upwards and move downward in this diaphragm piston 21 according to motor.Diaphragm piston 21 covers pump chamber 31; And because the outer diameter of diaphragm piston 21 is identical with the outer diameter of the sidewall 36 of pump chamber 31; Or greater than the outer diameter of the sidewall 36 of pump chamber 31, so diaphragm piston 21 sealing pump chamber 31 except entrance and exit passage 33 ', 34.

Fixed

15,15 ', 15 " pass pump diaphragm 2

fastener hole

25,25 ' and shape engage that ground inserts membrane cover 3

hold socket

35,35 ', 35 " in.In addition, fixed pin is bonded in by means of tackiness agent and holds in the socket or otherwise material joint ground connection.Fixed pin for example can be by ultrasonic welding, Vibration Welding, by high frequency welding or ultrasound riveted joint.

Because this accurate localization of three independent parts, so inlet opening 13 is positioned at inlet flap 23 tops and inlet flap 23 is positioned at inlet recess 33 tops.The outlet passage 14 of barrier film framework 1 is positioned at outlet flap 24 tops and exports outlet passage 34 tops that flap 24 is positioned at membrane cover.

Last sealing lip and lower seal lip 22,28 lay respectively in first and second seal grooves 12,32 and therefore to external sealed respectively so area surrounded.

The sidewall of lower channel link 37 flexibly surrounds the sidewall of upper channel link 17 and therefore forms the shape joint and the power cooperation of sealing.The convex portion 27 of pump diaphragm 2 is positioned on the lower channel link 37.

Under the state of the assembling of unit, diaphragm piston 21 is passed the through hole 11 of substrate 10.

The reference mark inventory

1 barrier film framework

10 substrates

10 ' passage

10 " through hole

11 through holes

12 first seal grooves

13 inlet openings

13 ' inlet channel

13 " connecting passage

14 outlet passages

15 first fixing pins

15 ' second fixing pin

15 " locating stud

150 vertical flanks

151 fasteners

152 seizing type shackles

16 baffle plates

17 upper channel links

18 suction ports

18 ' sucking pipe

19 pump unit bearings

2 pump diaphragms

20 diaphragm plates

21 diaphragm piston

Sealing lip on 22

23 inlet flaps

24 outlet flaps

25 first fastener holes

25 ' second fastener hole

26 connecting rod links

27 convex portions

28 lower seal lips

3 membrane cover

30 cover plates

31 pump chambers

32 second seal grooves

33 inlet recesses

33 ' inlet channel

34 outlet passages

35 first bearing holes

35 ' second bearing hole

35 " positioning hole

36 sidewalls

37 lower channel links

38 stiffening ribs

4 electric motors

Claims

1. vacuum diaphragm pump unit, it has: the barrier film framework (1) of dimensionally stable; The membrane cover of the one of dimensionally stable (3), said membrane cover (3) have the pump chamber (31) that has bottom section and sidewall (36), and said sidewall (36) surrounds said bottom section and outwards widens away from said bottom section; And the pump diaphragm of one (2); Said pump diaphragm (2) has diaphragm plate (20), pliable and tough diaphragm piston (21), at least one inlet flap (23) and exports flap (24) with at least one; Wherein said diaphragm plate (20) is arranged between said barrier film framework (1) and the said membrane cover (3); And barrier film framework (1), pump diaphragm (2) and membrane cover (3) interconnect on preposition by means of connecting element (15,15 ', 15 "); wherein said diaphragm piston (21) is passed said barrier film framework (1); and wherein said diaphragm piston (21) covers the pump chamber (31) of said membrane cover (3), it is characterized in that, have connecting element more than three (15,15 ', 15 ") and their form material and/or shape engages.

2. vacuum pump unit as claimed in claim 1; Wherein said connecting element (15,15 ', 15 ") inserts in the bearing hole (35,35 ', 35 ") of said barrier film framework (1) and/or said membrane cover (3), and said connecting element and said barrier film framework (1) and/or said membrane cover (3) welding, riveted joint or bonding.

3. wherein there are six to 12 connecting element (15,15 ', 15 ") in according to claim 1 or claim 2 vacuum pump unit.

4. wherein there are nine connecting element (15,15 ', 15 ") in vacuum pump unit as claimed in claim 3.

5. according to claim 1 or claim 2 vacuum pump unit, wherein said connecting element (15,15 ', 15 ") only passes said pump diaphragm (2) in the outer edge zone may of said pump diaphragm (2).

6. according to claim 1 or claim 2 vacuum pump unit, wherein said membrane cover (3) roughly fully has the thickness that on its whole surface, remains unchanged.

7. according to claim 1 or claim 2 vacuum pump unit, and wherein said connecting element (15,15 ', 15 ") be pin or spring clip element.

8. according to claim 1 or claim 2 vacuum pump unit, at least a portion of wherein said connecting element (15,15 ', 15 ") is arranged on the said barrier film framework (1).

9. according to claim 1 or claim 2 vacuum pump unit, at least a portion of wherein said connecting element (15,15 ', 15 ") is arranged on the said membrane cover (3).

10. according to claim 1 or claim 2 vacuum pump unit, wherein said membrane cover (3) is made of plastics with said barrier film framework (1) and said connecting element (15,15 ', 15 ") is connected with said membrane cover (3) or said barrier film framework (1) integratedly.

11. vacuum pump unit according to claim 1 or claim 2, at least a portion of wherein said connecting element (15,15 ', 15 ") is provided with vertical flank.

12. vacuum pump unit according to claim 1 or claim 2, at least a portion of wherein said connecting element (15,15 ', 15 ") is provided with the location auxiliary member.

13. vacuum pump unit according to claim 1 or claim 2, wherein said membrane cover (3) and/or said barrier film framework (1) have the bearing (35,35 ', 35 ") of the receptacle-shaped that is used to hold said connecting element (15,15 ', 15 ").

14. vacuum pump unit as claimed in claim 13, and the bearing of wherein said receptacle-shaped (35,35 ', 35 ") interconnect through flank (38).

15. vacuum pump unit as claimed in claim 13, wherein said bearing (35,35 ', 35 ") has non-circular cross section.

16. vacuum pump unit as claimed in claim 15, wherein said bearing (35,35 ', 35 ") has polygonal cross section.

17. vacuum pump unit according to claim 1 or claim 2; Wherein said diaphragm plate (20) has the inlet flap and has first sealing lip (22) with outlet flap (23,24) and in a side; Wherein said sealing lip (22) fully surrounds said diaphragm piston (21) and said inlet flap and is positioned at by said sealing lip (22) area surrounded with outlet flap (23,24), and wherein said connecting element (15,15 ', 15 ") said around sealing lip (22) outside pass said diaphragm plate (20).

18. vacuum pump unit as claimed in claim 17; Wherein said diaphragm plate (20) has second sealing lip (28) that cooperates with said first sealing lip (22) on opposite side, said second sealing lip (28) surrounds said diaphragm piston (21) and said entrance and exit flap (23,24) equally.

19. vacuum pump unit as claimed in claim 18, wherein said first and second sealing lips (22,28) are consistent.

20. vacuum pump unit according to claim 1 or claim 2, wherein said pump diaphragm (2) is made up of pliable and tough material integratedly.

21. a vacuum diaphragm pump unit, it has: the barrier film framework (1) of dimensionally stable; The membrane cover of the one of dimensionally stable (3), said membrane cover (3) have the pump chamber (31) that has bottom section and sidewall (36), and said sidewall (36) surrounds said bottom section and outwards widens away from said bottom section; And the pump diaphragm of one (2); Said pump diaphragm (2) has diaphragm plate (20), pliable and tough diaphragm piston (21), at least one inlet flap (23) and exports flap (24) with at least one; Wherein said diaphragm plate (20) is arranged between said barrier film framework (1) and the said membrane cover (3); And barrier film framework (1), pump diaphragm (2) and membrane cover (3) interconnect on preposition by means of connecting element (15,15 ', 15 "); wherein said diaphragm piston (21) is passed said barrier film framework (1); and wherein said diaphragm piston (21) covers the pump chamber (31) of said membrane cover (3), it is characterized in that, have connecting element more than three (15,15 ', 15 ").

22. a vacuum diaphragm pump unit, it has: the barrier film framework (1) of dimensionally stable; The membrane cover of the one of dimensionally stable (3), said membrane cover (3) have the pump chamber (31) that has bottom section and sidewall (36), and said sidewall (36) surrounds said bottom section and outwards widens away from said bottom section; And the pump diaphragm of one (2); Said pump diaphragm (2) has diaphragm plate (20), pliable and tough diaphragm piston (21), at least one inlet flap (23) and exports flap (24) with at least one; Wherein said diaphragm plate (20) is arranged between said barrier film framework (1) and the said membrane cover (3); And barrier film framework (1), pump diaphragm (2) and membrane cover (3) interconnect on preposition by means of connecting element (15,15 ', 15 "); wherein said diaphragm piston (21) is passed said barrier film framework (1); and wherein said diaphragm piston (21) covers the pump chamber (31) of said membrane cover (3), it is characterized in that, said connecting element (15,15 ', 15 ") forms material and/or shape engages.

23. a vacuum diaphragm pump unit, it has: the barrier film framework (1) of dimensionally stable; The membrane cover of the one of dimensionally stable (3), said membrane cover (3) have the pump chamber (31) that has bottom section and sidewall (36), and said sidewall (36) surrounds said bottom section and outwards widens away from said bottom section; And the pump diaphragm of one (2); Said pump diaphragm (2) has diaphragm plate (20), pliable and tough diaphragm piston (21), at least one inlet flap (23) and exports flap (24) with at least one; Wherein said diaphragm plate (20) is arranged between said barrier film framework (1) and the said membrane cover (3); And barrier film framework (1), pump diaphragm (2) and membrane cover (3) interconnect on preposition by means of connecting element (15,15 ', 15 "); wherein said diaphragm piston (21) is passed said barrier film framework (1); and wherein said diaphragm piston (21) covers the pump chamber (31) of said membrane cover (3), it is characterized in that said membrane cover (3) roughly fully has the thickness that on its whole surface, remains unchanged.

24. vacuum pump unit as claimed in claim 23; Wherein said membrane cover (3) has end face and back to the bottom surface of said pump diaphragm (2); Said bottom surface structurally forms; Make the recess of said end face in said bottom surface, constitute to extending below, and the rising part of end face correspondingly sink in said bottom surface.