CN101501333A - An electric based micro-fluidic device using active matrix principle - Google Patents

Abstract

The invention relates to an electric based micro-fluidic device using active matrix principle, for the use in medical and health and wellness products, in particular biochips or bio-systems. An electric based micro-fluidic device using active matrix principle, for the use in medical and health and wellness products, in particular biochips or bio-systems, wherein an 2-dimensional matrix array of poly MEMS actuators (PMA) (1) is arranged in a 2-dimenional system in which each single actuator is electrically/electronically steered independently from each other, in order to be able to generate a pattern of activation in the matrix.

Description

Use active matrix principle, based on the microfluidic device of electricity

Technical field

The present invention relates to a kind of microfluid based on electricity (Macro-fluidic) device that uses active matrix principle, be used for using, especially in Biological Chip or biosystem at medical treatment, health care and health-oriented products.

Background technique

Micro-fluid chip becomes the key foundation that is used for these products just day by day.In all microfluidic devices, the basic need of existence is that the control fluid flows, and in other words, fluid must be transmitted, mixes, separates and guide and pass through micro channel systems, and this micro channel systems is that a plurality of passages of 0.1mm are formed by common width.Various actuation mechanisms have been developed and have used.US 2004124384 A1 disclose a kind of electrostatically variable shape film, but it is the open and close element as a kind of little valve.

Summary of the invention

Therefore the objective of the invention is to realize a kind of programmable electrical actuator in the microstructure, be used for using, especially in Biological Chip or biosystem at medical treatment, health care and health-oriented products.

By each feature of Patent right requirement 1 at Biological Chip based on the microfluidic device of electricity and realized described purpose.

The further embodiment's of this system feature is described in dependent claims 2-10.

Each feature of the method for Patent right requirement 11 and has realized described purpose at operation this system, especially biosensor.

The further embodiment's of this method feature is explained in dependent claims 12.

A kind of use active matrix principle, based on the microfluidic device of electricity, be used for using at medical treatment, health care and health-oriented products, especially in Biological Chip or biosystem, wherein, many MEMS actuator (poly-MEMS actuator) 2 dimension matrix arrays (PMA) are arranged in 2 to be maintained in the system, wherein, each single actuator is handled independently of one another in the mode of electricity/electronics, so that can in described matrix, produce a kind of activation pattern (pattern).By means of the independent possibility of the activation of each PMA, can produce each and activate pattern, thereby can realize each selected fluid pumping effect.This is for being very favorable for the use in the biosensor micro-structural device, so that optimize the extremely optionally operation to micrometeor (micro-flux).

Advantageous embodiments is that the actuator with matrix is divided into row and row, wherein, each row-MEM on an electric ports by activating driver and line activating, each row-MEM (PMA) on another electric ports by selecting driver and line activating, thereby each actuator can both carry out addressing by selecting row and row, activates selected MEM (PMA) on the point of intersection thereby support one's family into coordinate by these electricity 2.By means of this, can drive or activate each single PMA with very easy and effective and efficient manner.

The further embodiment of the present invention has adopted the simple and easy module that pre-determines and coordinate that is used to activate pattern, by means of using electronics calculating and manipulation module is actuator and selection driver calculating voltage control signal, thus the predetermined activation pattern in the visit microfluidic device.

The further advantageous embodiment of the present invention is that each PMA comprises foil electrode and activated electrode, wherein, described activated electrode is visited by transistor switch, each other PMA in the row under the base contact of this transistor switch and this PMA switch concurrently, a contact and other row-PMA among the source/drain contact are connected in parallel, and another contact among the source/drain contact all is connected on the described activated electrode of its PMA separately.By using this thin film transistor, this system can be arranged on common substrate or the carrier fully.

This will be supported by further embodiment, and wherein, each foil electrode all electrically contacts with total public foil electrode.

In a further embodiment, integrated other electronic component on this array substrate is as the recording anemometer element and/or the light emitting diode of temperature transducer and/or microstructure.By means of this, this array can be by the localized sensor support, so that optimize the activation of array.

Further embodiment is to use and described foil electrode/activation electrodes device memory component in parallel, as capacitor, so that preserve the electronic memory of the operation state of each PMA.By means of this, can only produce the activation of PMA by pulse signal.Capacitor is preserved the memory of the active position of PMA.

PMA can be constituted or be developed as little winding paper tinsel, perhaps small cylindrical tube, perhaps shape whatsoever.Main points are that these elements can change shape by activation signal, thereby make it can move fluid when the passage in chamber of microstructure is passed in the fluid pumping.

At last, advantageously used a kind of method that is used to operate electric microfluidic device, wherein, at computing unit or in computing module, calculating is as the signal or the burst Vi of the function of time t, subsequently by guiding out this signal or burst Vi, so that produce the predetermined mode that PMA activates to the hormany operating of actuator and selection driver.

Provide this method further embodiment, in the evaluation of aforementioned control signal other uses of identification/signal of integrated sensor element.

Description of drawings

In Fig. 6, various embodiments of the invention have been shown at Fig. 1.

Embodiment

In Fig. 1, shown the utilizable actuator geometry of micro polymer easily 1.It has shown two-layer composite, comprises polymer film 2 (being acrylate in the case) and conductive film 3 (being chromium in the case), and this is to make in our laboratory.Processing is adjusted,, and at one end adhered to fixing so that this structure is upsweeped.When applying voltage difference between electrode below actuator 4 and the conductive film 3 as an actuating structure part, electrostatic force can pull to substrate with this structure.As a result, it is unfolded, and flattens on substrate.When removing this voltage, flat board will turn back to its original volume curved shape by elastic recovery.This actuation effect is bistable, and the position of actuator tip is the function of the voltage that applies.Specific hereto PMA design, " expansion " voltage Vun is 11V, " elastic recovery " voltage Ver is 5V.Usually can adjust these values between 1V and 100V, this depends on size and the mechanical property of PMA.

Should be understood that the geometrical construction of painting Fig. 1 medium-height grass only is a possible embodiment, many other geometrical constructioies also can be expected: right cylinder, cylindrical bar etc.The actuating of micro polymer actuator can cause that fluid flows in (biology) fluid, and is promptly fluid-operated.The typical frequencies that causes effective fluid to flow is between 1 to 100Hz.Effectively fluid-operated in order to realize (transmit, mix, rotation or other), requisite is to carry out independent addressing to micro-actuator or their group.This can allow to produce complicated fluid flow pattern.Can adopt out of phase slightly mode to activate this actuator (group) subsequently, produce for example undulatory motion of actuator set, this can cause transmitting mobile.Activate if carry out the not homophase of actuator group with suitable sequential, then can cause chaotic mixed mode.In addition, the controlled local addressing by to actuator can also realize multiple concrete flow pattern.

This need be used for producing in the position of each micro polymer actuator (group) module of internal field, promptly must carry out independent addressing to electrode.This specification provides and has used the solution of active matrix technology to this requirement.Broad-area electrode, and the specific active matrix technology that for example is used for thin film transistor (TFT) use in field of flat panel displays usually, are used for driving many display effects, LCD for example, OLED and electrophoresis.

At this, improved control to the electric actuator array, preferably, especially in microfluidic device, use, for example in Biological Chip or biosystem based on many MEM (micro electronmechanical) actuators (PMA) principle.Can control the PMA array with passive matrix approach.Preferably, can use based on the electrod-array able to programme of large area electron device and control PMA.More preferably, with the arranged in form electrod-array of active matrix array.Yet it can randomly comprise other elements, heating element for example, other sensing element, photoreceptor for example, temperature transducer etc.

This device can be realized the various defining modes of the electric actuation of many MEM element.Preferably, this device can also be realized the defining mode of a series of controllable dynamically changeables of the electric actuation of many MEM element.In a preferred embodiment, wish to utilize the high addressing speed of active matrix apparatus, on the optimized frequency scope of the described 1-100Hz of preface part, activate any PMA independently.

Fig. 2 has shown the first embodiment of the present invention, and it is the circuit design drawing of electric characteristic.In this first embodiment, we advise producing the various definitions pattern of the electric actuation of many MEM element 1 by being controlled at the amplitude of the voltage on the one group of activation electrodes that adopts the passive matrix array form.In this embodiment, electrod-array can be connected to external voltage drivers.In Fig. 2, schematically shown this situation.In order to realize this passive matrix layout, must with activation electrodes and foil electrode constitutes the form of line and the direction of these lines has an angle each other.In the example of Fig. 2, with the form formation activation electrodes of row, the form with row constitutes foil electrode simultaneously.In order successfully to operate passive matrix system, we need PMA to present Voltage threshold.As shown in the foreword, this is this situation; Near the voltage of requirement Vur launches thin slice, and near the voltage Vt is not enough for starting this expansion thus.

Use above-mentioned examples of threshold, can dispose electric transmission system based on passive matrix PMA.In this example, each PMA in matrix comprises 2 electrodes, is configured as the form of row-foil electrode 4 and row-activation electrodes 3, to constitute the PMA array.

The location number 3 of activation electrodes and the location number 4 of foil electrode equate on function with the nomenclature of the location number of Fig. 1.

Each row and each row can be connected to voltage source independently.For example, column electrode can be connected to selects driver 10 (for example being similar to the standard shift register of the gate drivers of AMLCD), and it can switch between the Vt at 0V.The row electrode is connected to actuator 20 subsequently.Actuator 20 can just be as for example passive or used normal voltage data driver of AMLCD (LCD), and its output can have 0V or (Vur-Vt) level.

Be performed as follows operation:

In state of dormancy, all column electrodes are set at 0V.In the case, can launch, because can not surpass Vt (promptly being lower than threshold value) across the voltage at electrode two ends without any PMA.

In order to launch the PMA of appointment, will switch to-Vt with the column electrode that this row PMA that comprises desired PMA is associated.All other row remain on 0V.

Voltage in the row electrode at PMA place is set to its release voltage+(Vur-Vt).Voltage across the electrode two ends of requirement PMA is Vur now, causes the expansion of PMA.

Voltage at all in other row remains on the not voltage of unfolded PMA (being 0V in this example).

If PMA needn't launch again, column electrode is set to 0V once more, and at this point, PMA can curl once more.

Can also be by (voltage=Vur-Vt) be applied to more than one row (see figure 2) in the array activates the more than one PMA in the nominated bank simultaneously with actuated signal.Can by activate another row (row voltage-Vt), and with actuated signal (voltage=Vur-Vt) is applied to one or more row in the array and activates PMA in not collinear.

The weakness of passive matrix approach is, can not be simultaneously and independently activate PMA in the different rows simultaneously.This has just limited the quantity of the actuation patterns that can realize.

Fig. 3 has shown further embodiment.In this embodiment, suggestion produces a large amount of defining modes of the electric actuation of many MEM element 1 by independently being controlled at the amplitude of one group of voltage on the activated electrode.

In simple embodiment, electrod-array can be used the large area electron device, as simple switch 11, is connected to external voltage source, and switch 11 is designed to voltage is sent to one or more electrodes from external source.In Fig. 3 (top), shown this situation.Embodiment hereto, switch can be implemented as (film) transistor (TFT) switch (shown in Fig. 3 bottom), diode switch or MIM (metal-insulator-metal type) diode switch, and can carry out addressing to one or more single electrodes with known driven with active matrix principle.

Under the situation based on transistorized active matrix array, for independent control single many MEM actuator (PMA), the operation of shown device is as follows.

In non-addressed state, all selection wires are set to the voltage of not conducting of switch.In the case, there is not PMA to be controlled.

For the PMA that controls appointment (and it is curled or launch), the switch that will comprise in the whole line of part of required PMA all switches on state (for example selecting signal by applying).

Control signal in the PMA row of living in (for example voltage) is set to its expected level.This signal is sent to the activation electrodes of PMA by switch, causes PMA to change its shape (promptly launching).

Control signal at all in other row remains on the level that can not change the shape of residue PMA in this row (in this example, they can remain on its rolled state).

Selection signals of all other row can remain on non-selected state, thereby other PMA is connected to same row via actuating switch not, and are not controlled.

After PMA was set to expecting state, the switch in this line was set to nonconducting state once more, had avoided the further change (unless across the voltage leak at PMA two ends, at this moment, PMA curls once more) of PMA shape.

This device can remain on non-addressed state subsequently, changes the shape of first or another PMA up to needs control signal subsequently, at this moment, repeats the above sequence of operation.

Can also in during selected, control signal be applied to more than one row in the array, control more than one PMA in the nominated bank simultaneously.Can sequentially control the PMA in the different rows by activating another row (use and select driver) and control signal being applied to one or more row in the array.

Can carry out addressing to this system, thereby when having control signal, only activate this PMA.Yet, in a preferred embodiment, advantageously storage arrangement is included among the PMA storage capacitor elements 12 for example in parallel with the PMA electrode, perhaps based on transistorized memory component, thereby remember this control signal (see figure 4) after during this selection, finishing.This makes the PMA diversity that can any some place on array obtains curly form or expansion shape simultaneously.Certainly, if can use storage arrangement, will clearly need second control signal that PMA is taken back its curly form.

In a series of preferred embodiments, realized that with thin film transistor (TFT) technology active matrix PMA fax send device, to guarantee to drive all PMA (see figure 3)s independently.TFT is a known switching element in the film large area electron device, and has found in flat panel display applications for example and be extensive use of.Industrial, the main manufacture methods of TFT is based on amorphous silicon (a-Si) or low temperature polycrystalline silicon (LPTS) technology, can use other technology simultaneously, and for example organic semiconductor or other be not based on the semiconductor technology (for example CdSe) of silicon.

Provide compare slightly poor flexibility than the situation of using TFT in, can also realize sending device the thin film diode technology that does not ask too much on its operation technique or metal-insulator-metal (MIM) diode technologies based on the PMA fax of active matrix.

Fig. 5 has shown further embodiment, wherein TFT and duolaser device exchange.Compare slightly poor flexibility simultaneously providing than the situation of using TFT, can also realize sending device based on the fax of active matrix PMA, it has used the technical thin film diode technology that does not ask too much.Can drive diode active matrix array (as being used for for example thin film transistor) in several known modes, one of mode wherein is to have duolaser (D2R) scheme that resets.

The image element circuit that in Fig. 5, has shown this active matrix array.Each PMA of diode matrix has two diodes, and a diode provides control data via guide line to activation electrodes, and a diode removes control data via the common reset line from electrode.Determine the obstruction scope by external voltage, thereby make this scope adjustable that described obstruction scope is the voltage range under the diode not on-state.Its major advantage is to need higher operating voltage PMA.By provide series diode (because this avoided independent diode than the puncture of high backward voltage-with this voltage division to these diodes) be easy to hold high voltage-see Fig. 5.The outside quantity that connects equals row and adds the quantity that row add one (reset line).This circuit is not subjected to the influence of diode characteristic, and can select Pin diode or Schottky diode.By using the diode of extra serial or parallel connection, make circuit have redundancy for short circuit or open circuit mistake.Can be randomly, drive row with the repositioning method of 5 voltage levels.

Can constitute PIN (or Schottky-IN) diode with simple 3 layer process.With amorphous semiconductor layer, i.e. stack area p doping, intrinsic, that n mixes is clipped between the upper and lower wire, and this two metal line direction is vertical.Electrical characteristic does not almost have sensitive alignment.

Fig. 6 has shown the further embodiment of the present invention.Compare slightly poor flexibility simultaneously providing than the situation of using TFT, can also realize sending device based on the fax of active matrix PMA, it has used the technical metal-insulator that does not ask too much-metal (MIM) diode 13 technology.

Traditionally, MIM diode 13 active matrix arrays-as be used for thin film transistor, have in the similar layout of passive matrix described in the embodiment 1.Yet, introduce the MIM diode as the nonlinear resistive element of connecting, to allow active array addressing with each assembly.

By (example is the hydrogenated silicon nitride that is clipped between Cr or the Mo metal by thin dielectric layer, the perhaps Ta2O5 insulator between the Ta metal film) separates 2 metal layers, produce this MIM device, and realize this MIM device expediently with the form of interleaved structure (cross over structure).MIM is connected to activation electrodes with selection wire or control data line (shown in).Metal layer and isolation layer both realize on same substrate.Second line electrode that can be by being increased to paper tinsel for first substrate (be used to provide select signal), and with other (thicker) isolation layer as intersecting with its separation, finish the PMA connection.

The PMA device of Fig. 1 comes work by apply voltage on two electrodes to launch this device.Shown in device in, cover electrode on the substrate by insulator, do not cover the electrode on the polymer simultaneously.Therefore advantageously will back one not the voltage of coated electrode remain as far as possible the current potential of the liquid of operating therein near this electrode.This can suppress electrolysis (if liquid is water, it can occur) and other electrode corrosion state more than about 2V appearance under active matrix embodiment's situation, this means that coated electrode can advantageously not constitute common electrode (remaining on for example 0V).

Under the situation of passive matrix, coated electrode can advantageously not constitute the selection electrode, its under non-selected state (most of time) remains on 0V, and when actual selection during this line (each frame of addressing only once-usually＜time 1%) only receive and select voltage.This also can limit electrolysis and corrosion.

Claims (12)

1, a kind of use active matrix principle, based on the microfluidic device of electricity, be used for using at medical treatment, health care and health-oriented products, especially in Biological Chip or biosystem, use, wherein, 2 dimension matrix arrays (1) of many MEMS actuator (PMA) are arranged in 2 and maintain in the system, therein, each single actuator is handled independently of one another in the mode of electricity/electronics, so that can in described matrix, produce a kind of activation pattern.

2, electric microfluidic device as claimed in claim 1, it is characterized in that, described actuator in the described matrix is divided into row and row, wherein, each row-MEM on an electric ports by activating driver (20) and line activating, each row-MEM (PMA) on another electric ports by selecting driver (10) and line activating, thereby each actuator can both carry out addressing by selecting row and row, activates selected MEM (PMA) on the point of intersection thereby support one's family into coordinate by these electricity 2.

3, electric microfluidic device as claimed in claim 1 or 2, it is characterized in that, use electronics to calculate and manipulation module, so that be described actuator drive (20) and described selection driver (10) calculating voltage control signal, with the predetermined enable mode of visit in described microfluidic device.

4, as claim 1,2 or 3 described electric microfluidic devices, it is characterized in that, each PMA (1) comprises foil electrode (3) and activated electrode (4), wherein, described activated electrode (4) is visited by transistor switch (11), each other PMA in base contact of this transistor switch (11) and the row of this PMA switch concurrently, one of source/drain contact is connected in parallel with other row-PMA, and another contact among the source/drain contact is connected on the described activated electrode of its PMA separately.

As any described electric microfluidic device in the claim 1 to 4, it is characterized in that 5, each foil electrode (3) all electrically contacts with total public foil electrode.

6, electric microfluidic device as claimed in claim 5 is characterized in that, with described PMA arranged in arrays or be integrated on the common substrate.

As any described electric microfluidic device in the claim 1 to 6, it is characterized in that 7, integrated other electronic component on described array substrate is as temperature transducer and/or recording anemometer element and/or light emitting diode.

8, as any described electric microfluidic device in the claim 1 to 7, it is characterized in that, use and described foil electrode/activated electrode device (3,4) memory component in parallel, as capacitor (12), so that preserve the electronic memory of the operation state of each PMA.

9, as electric microfluidic device as described in any in the claim 1 to 8, it is characterized in that, be not by described transistor switch (11), but visit described activated electrode (4) by device with at least two diodes.

10, as electric microfluidic device as described in any in the claim 1 to 8, it is characterized in that, be not by described transistor switch (11), but visit described activated electrode (4) by MIM (metal-insulator-metal type) diode apparatus (13).

11, be used for operating method according at least one described electric microfluidic device of claim 1 to 10, wherein, at computing unit or in computing module, calculating is as the signal or the burst Vi of the function of time t, subsequently by guiding out described signal or burst Vi, so that produce the predetermined mode that PMA activates to the hormany operating of described actuator drive and described selection driver.

12, as method as described in the claim 11, it is characterized in that, in the evaluation of aforementioned control signal identification other use/signal of integrated sensor element.

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