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CN101481786A - Vacuum heat treatment furnace for metallic titanium coiled material and heat treatment method thereof - Google Patents

Vacuum heat treatment furnace for metallic titanium coiled material and heat treatment method thereof Download PDF

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Publication number
CN101481786A
CN101481786A CNA200910095946XA CN200910095946A CN101481786A CN 101481786 A CN101481786 A CN 101481786A CN A200910095946X A CNA200910095946X A CN A200910095946XA CN 200910095946 A CN200910095946 A CN 200910095946A CN 101481786 A CN101481786 A CN 101481786A
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China
Prior art keywords
furnace
heat treatment
vacuum
metallic titanium
coiled material
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Pending
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CNA200910095946XA
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Chinese (zh)
Inventor
周国展
张龙方
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FENGHUA GUANGLIANG HEAT TREATMENT ELECTRIC STOVE Co Ltd
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FENGHUA GUANGLIANG HEAT TREATMENT ELECTRIC STOVE Co Ltd
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Priority to CNA200910095946XA priority Critical patent/CN101481786A/en
Publication of CN101481786A publication Critical patent/CN101481786A/en
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Abstract

The invention relates to a metallic titanium coil vacuum heat treatment furnace, comprising a vacuum-pumping system, an electric heating system, an internal circulation cooling system, and a detecting, monitoring and operating system. A furnace body comprises an upper furnace cover, a furnace stack and a lower furnace seat which can be movably connected with the furnace stack; the furnace stack is internally provided with a furnace hearth which is enclosed by a plurality of layers of insulating reflecting screens; the inner wall of the furnace hearth is provided with electric heating components, between which a temperature monitoring element is arranged; the furnace stack is arranged on a platform; the lower furnace seat is internally provided with a material bearing disc and is arranged on a furnace bottom lifter; and the ascending or descending of the furnace bottom lifter which is arranged under the platform leads the lower furnace seat and the furnace stack to be sealed, closed or separated. The vacuum heat treatment furnace can improve the heat treatment efficiency, reduce the cost of the product and treat large amount of metallic titanium by one time; and the color of the treated product keeps bright. Meanwhile, heat treatment is carried out on the titanium coil and the layers are not bonded, thus guaranteeing the even hardness of all the parts of the coil. The time needed by heat treatment is short and the working efficiency is high.

Description

Metallic titanium coiled material vacuum heat treatment furnace and heat treating method thereof
Technical field
The present invention relates to the equipment and the heat treating method thereof in a kind of metal heat treatmet field, specifically is a kind of metal titanium vacuum heat treatment furnace and treatment process thereof.
Background technology
Titanium or titanium alloy intensity height, high temperature resistant, good corrosion resistance has good low-temperature flexibility, biocompatibility, thereby be widely used in fields such as national defence, chemical industry, the energy, aerospace and biotechnology.But titanium is in the course of processing, can occur the phenomenon of work hardening after rolling, drawing, and easy and many material generation adhesive wears are used widely thereby limited it.
Titanium can produce work hardening adding man-hour, and plasticity reduces.Can eliminate work hardening and can produce recrystallize by annealing, make material softening, plasticity improves.Wherein do not produce recrystallize, just eliminate the processing strained and be called stress relieving.In order to improve solidity to corrosion and to add the corrosion resistance of surface in man-hour and utilize the surface colour of its interference color to handle, also oxide treatment is carried out on the surface of titanium sometimes.
Through the literature search of prior art is found, thunderclap etc. are at " rare metal ", " the thermal treatment process research of accurate special-shaped titanium material processing " delivered on the phase 126-130 page or leaf in 2007 the 31st: accurate special-shaped titanium material heat-treating process is studied.Select the external-heat vacuum annealing furnace, accurate special-shaped titanium material is carried out anneal.Concrete technological process can be divided into two stages: the pre-treatment before the thermal treatment comprises cleaning, alkali cleaning, pickling.Purpose is to remove oxide skin, air suction layer and the residual pollutents such as lubricant of material surface; Annealing process is determined in the heat treatment process vacuum annealing, the titanium material is carried out vacuum annealing handle.Its shortcoming is: power is little, and each heat treated titanium material amount is less, and efficient is low, and investment and unit cost are all very big.Secondly, the vacuum tightness of vacuum oven is had relatively high expectations, the pre-treatment before the thermal treatment is complicated.
Summary of the invention
The technical problem to be solved in the present invention provides a kind of large-scale vacuum Equipment for Heating Processing and heat treating method thereof, by this large-scale vacuum Equipment for Heating Processing, can a large amount of metal titanium and the alloys thereof of disposable processing, product colour after the processing keeps light, when the titanium coiled material is heat-treated, can not bond together between layer and the layer, guarantee that coiled material each several part hardness is even.
The metallic titanium coiled material vacuum heat treatment furnace, it comprises pumped vacuum systems, electric heating system, internal recycle cooling system, detects monitoring and operating system, it is characterized in that body of heater comprise bell, shaft and can with the lower furnace base of shaft flexible connection; Establish the burner hearth that the multilayer insulation radiation shield surrounds in the shaft, establish electric heating assembly on the inboard wall of burner hearth, establish the temperature monitoring element between the electric heating assembly, shaft is located on the stand, establish the material load-bearing plate in the lower furnace base, lower furnace base is located at the rising or the decline of the furnace bottom elevator under the stand on the furnace bottom elevator, make lower furnace base with the shaft seal closure or separate.
The metallic titanium coiled material vacuum heat-treating method, its feature may further comprise the steps:
A, to installing the vacuum heat treatment stove evacuation of material, at first start working machine pump, to mechanical pump vacuumize valve when closing diffusion pump open, vacuum tightness arrives 6.67 * 10 -3~6.67 * 10 -4Stop during handkerchief;
B, to the heating of switching on of the above-mentioned material stove that has vacuumized, being heated to 700~850 ℃, vacuum tightness is 6.67 * 10 -2~6.67 * 10 -3Insulation is 10~15 hours during handkerchief, with the stove naturally cooling;
C, when above-mentioned furnace temperature drops to 400~350 ℃, feeding purity by the internal recycle cooling system is that 99.99% argon gas cools off fast;
D, when above-mentioned furnace temperature drops to below 80 ℃, internal recycle refrigerative argon gas is emptied completely, material is come out of the stove.
It is low to the present invention is directed to present metal titanium heat treatment furnace efficient, can only handle the little metal titanium, and the cost of unit product is very high at every turn, and the deficiency of the very high aspect of vacuum tightness requirement, provides a kind of than more excellent metal titanium heat treating method.Can improve heat treatment efficiency greatly, reduce the cost of product, can a large amount of metal titanium of disposable processing, and also the product colour after handling keeps light.When simultaneously the titanium coiled material being heat-treated, can not bond together between layer and the layer, guarantee that coiled material each several part hardness is even.This invention time needed by heat treatment is short, high efficiency.All have higher efficient and lower unit cost than most at present metal titanium heat treatment furnaces.The present invention can carry out vacuum heat treatment to metal titanium volume and cold rolling titanium material.
Description of drawings
Fig. 1 is the vacuum heat treatment furnace system construction drawing.
Fig. 2 is the body of heater sectional view.
Fig. 3 is lower furnace base and elevator synoptic diagram, and wherein a represents the hydraulic levels running gear, and b represents hydraulic lifting.
Fig. 4 is the pumped vacuum systems synoptic diagram.
Fig. 5 is an internal recycle cooling system synoptic diagram.
Embodiment
Vacuum heat treatment furnace system architecture shown in Figure 1 comprises body of heater 1, supports the stand 2 of body of heater, and elevator 3 moves horizontally materials vehicle 4, internal recycle cooling system 5, and pumped vacuum systems 6, the body water-cooling recycle system 7 detects monitoring and operating system and does not retouch out in the drawings.
Body of heater 1 comprises bell 16, shaft 17 and lower furnace base 18.
Last bell 16 walls adopt double-deck double wall structure, form by double-deck standard sealing head and ring flange assembly welding, interlayer internal recycle water coolant cools off, interior end socket and ring flange adopt the manufacturing of high-quality stainless material, glossing in interior end socket inwall adopts, last bell 16 connects a plurality of bolted of the employings structure that is tightly connected with shaft 17;
The heat insulating reflecting screen 101 of last bell adopts the form of all-metal heat insulating reflecting screen, is made up of four layers of high temperature resistant stainless steel plate and one deck heat-resistance stainless steel plate fixed frame.
Explosion-proof equipment 9 be used for when cooling when charging into argon pressure in the stove when too high, releasing pressure automatically starts voluntarily and guarantees work safety;
A temperature thermocouple 13 puts in the burner hearth in the middle of being contained in bell 16, to measure the temperature of material spare heart portion.
Shaft 17 is equipped with double hull, heat insulating reflecting screen 102, electric heating assembly 11 and temperature-control heat couple 14 etc.
Furnace body wall adopts double-deck double wall structure, form by outer furnace tube in double-deck and ring flange assembly welding, interlayer internal recycle water coolant cools off, interior stove tube and ring flange adopt the manufacturing of high-quality stainless material, glossing in inwall adopts, last bell 16 connects a plurality of bolt fastening structures of employing with shaft 17, and lower furnace base 18 connects a plurality of removable seal fastenings of employing with shaft 17 and connects;
Heat insulating reflecting screen 102 adopts the form of all-metal heat insulating reflecting screen, is made up of four layers of high temperature resistant stainless steel plate and one deck heat-resistance stainless steel plate fixed frame.Be provided with some fast cold tuyeres in the thermoscreen bottom, equipment can make air-flow evenly spray to the thermal treatment object when carrying out fast cold technology, and being provided with some fast cold jet refluxing openings on thermoscreen top, equipment can make air-flow evenly be back to internal cooling recirculation blower ingress when carrying out fast cold technology;
Electric heating assembly 11 is made up of an electric heating element 111 and water cooled electrode 112 polyphones, an electric heating element 111 is selected nichrome resistance (Cr20Ni80) alloy bandlet for use, string hangs on the heat insulating reflecting screen inwall, is connected with external source by the water cooled electrode 112 that is located at burner hearth interlayer wall.Establish six above an electric heating element 111 in the burner hearth, per three electric heating heating units are established the thermopair 14 of a temperature control, and thermopair is connected with operating system with the monitoring temperature of peripheral hardware, according to the working order of temperature variation regulation and control heat treatment furnace.
Referring to shown in Figure 3, lower furnace base 18 comprises furnace base, heat insulating reflecting screen 103 and material load-bearing plate rail 15.
Furnace base adopts double-deck double wall structure, form by double-deck standard sealing head and ring flange assembly welding, interlayer internal recycle water coolant cools off, interior end socket and ring flange adopt the manufacturing of high-quality stainless material, glossing in interior end socket inwall adopts, lower furnace base connects a plurality of detachable airtight fastening syndetons of employing with heating furnace body;
Lower furnace base 18 heat insulating reflectings screen 103 is adopted the form with the all-metal heat insulating reflecting, is made up of four layers of high temperature resistant stainless steel plate and one deck heat-resistance stainless steel plate fixed frame.Establish the material load-bearing plate 15 of carrying material 12 on the fixed frame.
Material load-bearing plate 15 is a ceramic, is used for placing the thermal treatment part, and it is pollution-free to thermal treatment part and burner hearth.
Heat insulating reflecting screen 10 comprise in the bell 16 and the screen of the circular plate type heat insulating reflectings in the lower furnace base 18 101 and 103 and shaft 17 in annulus wall heat insulating reflectings shield 102, upper and lower plectane covers the formation heating furnace mutually with the annulus wall.
Lower furnace base 18 is by the hydraulic lift supporting elevation, and lower furnace base 18 rises to till the lower flange baseplane of shaft, strike with tightening device to fasten, during decline to the shelf 41 of materials vehicle 4 till.
Stand 2 adopts shaped steel and steel plate seam to form, be used for supporting comprising bell and furnace body structure, on one side about stand is equipped with the operative employee ladder, be used for handled easily and maintenance.
Furnace base elevator 3 adopts hydraulicefficiency elevation structures, supports lower furnace base 18, material load-bearing plate 15 and materials 12 with oil cylinder piston 31, is used for the usefulness of elevator furnace base and material to be processed.Elevator about 3 is made furnace base carry out oscilaltion along fixed guide rail pole 21 and also can accurately be located automatically by the liner of being made up of guiding cross bar 23, pilot bearing 22 and tail rod 21.Hydraulic ram 32 is located at 24 li of melt pits under the stand 2, so that oil cylinder piston is when dropping to lower-most point, lower furnace base is just in time put to be placed on and moved horizontally on the materials vehicle.
Materials vehicle 4 adopts hydraulic levels push-pull mechanism 43 to move furnace base loading and unloading material by horizontal rail 42 carryings, makes things convenient for material handling.
Referring to shown in Figure 4, vacuum system 6 is made up of mechanical pump 61, lobe pump 62, diffusion pump 63, vacuum pipe and valve etc.Mechanical pump 61 and lobe pump 62 polyphones, lobe pump 62 and diffusion pump 63 polyphones, diffusion pump 63 is connected in shaft 17 air inlet/outlets.
The working order of pumped vacuum systems is: at first begin to vacuumize with mechanical pump, because mechanical pump self, vacuum tightness does not reach requirement.This moment mechanical pump valve closes.The valve open of diffusion pump begins to continue to vacuumize.It is the vacuum pump that utilizes the oil vapour jet of low pressure, high speed and directed flow to bleed.The highest attainable vacuum of this pump is 10 -4~10 -5Handkerchief, working pressure range are 10 -1~10 -4Handkerchief, pumping speed scope are tens to tens0000 liters/second.Oil diffusion pump is the major equipment that obtains high vacuum, needs only vacuum tightness in the used vacuum oven and reaches 6.67 * 10 -3Handkerchief just can satisfy the demand of equipment;
Referring to shown in Figure 5, internal recycle cooling system 5 comprises argon gas intake valve 50, heat exchanger 51, Pneumatic vacuum valve 52, vacuum pressure gauge 54, high pressure positive blower 55 and airduct road 53.Argon gas is introduced in the burner hearth of body of heater by high pressure positive blower 55, behind heat exchanger 51 heat-shifts outside body of heater 1, through Pneumatic vacuum valve 52, enters high pressure positive blower 55 again and recycles.
Heat exchanger 51 adopts the copper fin structure, and heat exchanger effectiveness can reduce the temperature of the argon body of flowing through rapidly than higher, guarantees the requirement of the required process gas of processed workpiece.
Now the anneal with metallic titanium coiled material is an example, the operating process of summary annealing process step:
1, mobile materials vehicle moves to loading and unloading material position to furnace base, install coiled material after, adopt hydraulic moving mechanism that mobile materials vehicle is walked under the heating furnace body, putting in place stops;
2, join till by the furnace base hoisting appliance furnace base being risen to lower flange baseplane with shaft automatically then, and strike with tightening device and to fasten;
3, vacuumize, at first start working machine pump, to mechanical pump vacuumize valve when closing diffusion pump open, vacuum tightness arrives 6.67 * 10 -3~6.67 * 10 -4Behind the Pa, finish to vacuumize;
4, carry out electrically heated after vacuum tightness, being heated to 700~850 ℃ of vacuum tightnesss is 6.67 * 10 -2Pa~6.67 * 10 -3During Pa, be incubated 10~15 hours, with the stove naturally cooling;
5, when above-mentioned furnace temperature drops to 400~350 ℃, feeding purity via the internal recycle cooling system is that 99.99% argon gas cools off fast;
6, when above-mentioned furnace temperature drops to below 80 ℃, the emptying of internal recycle cooling system argon gas have been arranged, material is come out of the stove;
7, open tightening device earlier, start the furnace base hoisting appliance then and descend, drop to automatically on the mobile materials vehicle, with the hydraulic levels push-pull mechanism mobile material dolly is moved to the workpiece loading and unloading position, the back hangs out workpiece with special hanger again, and shove charge is again used so repeatedly.
Example one: the about 5 tons heavy clean annealings of pure titanium roll material Φ 1530 * 1300mm.Vacuumize after the shove charge, vacuum tightness is extracted into 6.67 * 10 -3~6.67 * 10 -4Finish behind the Pa to vacuumize, heat after vacuum tightness, being heated to 700~750 ℃, to be incubated this moment hot vacuum tightness be 6.67 * 10 -2~6.67 * 10 -3Pa, soaking time is 10~15 hours, then furnace cooling.When cooling to 400~350 ℃, feeding purity through the internal recycle cooling system is that 99.99% argon gas cools off fast, cools can come out of the stove below 80 ℃.Till must having arranged the emptying of internal recycle cooling system argon gas when coming out of the stove.
Example two: the about 4.5 tons heavy clean annealings of titanium alloy coiled strip Φ 1450 * 1250mm.Vacuumize after the shove charge, vacuum tightness is extracted into final vacuum 6.67 * 10 -3~6.67 * 10 -4Finish behind the Pa to vacuumize, heat after vacuum tightness, being heated to 750~850 ℃, to be incubated this moment hot vacuum tightness be 6.67 * 10 -2~6.67 * 10 -3Pa, soaking time is 10~15 hours, then furnace cooling.When cooling to 400~350 ℃, feeding purity through the internal recycle cooling system is that 99.99% argon gas cools off fast, cools can come out of the stove below 80 ℃.Till must having arranged the emptying of internal recycle cooling system argon gas when coming out of the stove.

Claims (10)

1, metallic titanium coiled material vacuum heat treatment furnace, it comprises pumped vacuum systems, electric heating system, internal recycle cooling system, detects monitoring and operating system, it is characterized in that body of heater comprise bell, shaft and can with the lower furnace base of shaft flexible connection; Establish the burner hearth that the multilayer insulation radiation shield surrounds in the shaft, establish electric heating assembly on the inboard wall of burner hearth, establish the temperature monitoring element between the electric heating assembly, shaft is located on the stand, establish the material load-bearing plate in the lower furnace base, lower furnace base is located at the rising or the decline of the furnace bottom elevator under the stand on the furnace bottom elevator, make lower furnace base with the shaft seal closure or separate.
2, metallic titanium coiled material vacuum heat treatment furnace according to claim 1 is characterized in that the heat insulating reflecting screen (10) in the body of heater (1) adopts four layers of high temperature resistant stainless steel plate and one deck heat-resistance stainless steel plate fixed frame to form.
3, metallic titanium coiled material vacuum heat treatment furnace according to claim 1 and 2 is characterized in that heat insulating reflecting screen (10) comprises in the bell (16) and the screen of the annulus wall heat insulating reflecting in screen of the circular plate type heat insulating reflecting in the lower furnace base (18) (101 and 103) and the shaft (17) (102).
4, metallic titanium coiled material vacuum heat treatment furnace according to claim 1, it is characterized in that lower furnace base (18) is by hydraulic lift (3) supporting elevation, lower furnace base (18) rises to till the lower flange baseplane of shaft (17), during decline to the shelf 41 of materials vehicle 4 till.
5, metallic titanium coiled material vacuum heat treatment furnace according to claim 1, it is characterized in that internal recycle cooling system (5) comprises argon gas intake valve (50), heat exchanger (51), Pneumatic vacuum valve (52), vacuum pressure gauge (54), high pressure positive blower (55) and airduct road (53), argon gas is introduced in the burner hearth of body of heater (1) by high pressure positive blower (55), behind the heat exchanger heat-shift outside body of heater (1), through Pneumatic vacuum valve (52), enter high pressure positive blower (55) again and recycle.
6, metallic titanium coiled material vacuum heat treatment furnace according to claim 1, it is characterized in that vacuum system (6) is made up of mechanical pump (61), lobe pump (62), diffusion pump (63), vacuum pipe and valve, mechanical pump (61) and lobe pump (62) polyphone, lobe pump (62) and diffusion pump (63) polyphone, diffusion pump (63) is connected in shaft (17) air inlet/outlet.
7, according to wanting profit to require 1 described metallic titanium coiled material vacuum heat treatment furnace, it is characterized in that electric heating assembly (11) is contacted with water cooled electrode (112) mutually by an electric heating element (111) to form, described an electric heating element (111) is the nichrome bandlet.
8, the heat treating method of metallic titanium coiled material vacuum heat treatment furnace, its feature may further comprise the steps:
A, to installing the vacuum heat treatment stove evacuation of material, at first start working machine pump, to mechanical pump vacuumize valve when closing diffusion pump open, vacuum tightness arrives 6.67 * 10 -3~6.67 * 10 -4Stop during handkerchief;
B, to the heating of switching on of the above-mentioned material stove that has vacuumized, being heated to 700~850 ℃, vacuum tightness is 6.67 * 10 -2~6.67 * 10 -3Insulation is 10~15 hours during handkerchief, with the stove naturally cooling;
C, when above-mentioned furnace temperature drops to 400~350 ℃, feeding purity by the internal recycle cooling system is that 99.99% argon gas cools off fast;
D, when above-mentioned furnace temperature drops to below 80 ℃, internal recycle refrigerative argon gas is emptied completely, material is come out of the stove.
9, the heat treating method of metallic titanium coiled material vacuum heat treatment furnace according to claim 8 is characterized in that the pure titanium roll material is through being evacuated to 6.67 * 10 -3~6.67 * 10 -4After, be heated to 700~750 ℃ and be incubated.
10, the heat treating method of metallic titanium coiled material vacuum heat treatment furnace according to claim 8 is characterized in that the pure titanium roll material is through being evacuated to 6.67 * 10 -2~6.67 * 10 -3After, be heated to 700~850 ℃ and be incubated.
CNA200910095946XA 2009-02-21 2009-02-21 Vacuum heat treatment furnace for metallic titanium coiled material and heat treatment method thereof Pending CN101481786A (en)

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Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102002658A (en) * 2010-11-24 2011-04-06 莱芜钢铁股份有限公司 Annealing process of cold rolled titanium roll
CN102095310A (en) * 2011-01-20 2011-06-15 首钢总公司 Dual-chamber dual-temperature pipe type atmosphere comprehensive resistance furnace and using method thereof
CN102409146A (en) * 2011-11-14 2012-04-11 云南钛业股份有限公司 Titanium roll tape cover annealing method and device thereof
CN102560439A (en) * 2012-03-29 2012-07-11 雅视光学有限公司 Method and device for carrying out surface treatment on plasma
CN102899472A (en) * 2011-07-26 2013-01-30 张家港华裕有色金属材料有限公司 Titanium and titanium alloy U-shaped bend vacuum heat treatment method and apparatus thereof
CN103031417A (en) * 2012-12-29 2013-04-10 江苏丰东热技术股份有限公司 Furnace gas balancing replacement system and balancing replacement method for vacuum heat treatment furnace
CN103230981A (en) * 2013-05-14 2013-08-07 盐城市科奥热处理设备制造厂 Vertical steamer type multi-layer combined heating furnace
CN104004981A (en) * 2014-06-05 2014-08-27 湖南湘投金天钛金属有限公司 Vacuum induction direct heating annealing device for cold-rolled titanium tape rolls
CN104152832A (en) * 2014-08-26 2014-11-19 攀钢集团攀枝花钢铁研究院有限公司 A vacuum annealing technology of cold rolled commercial pure titanium coils
CN104236991A (en) * 2014-08-19 2014-12-24 宁波英飞迈材料科技有限公司 Detachable in-situ heat treatment device and using method thereof
CN106513690A (en) * 2016-11-24 2017-03-22 上海电机学院 Ball milling-isometric angle extrusion-annealing method for pure titanium waste chip circular curing
CN106643131A (en) * 2016-10-20 2017-05-10 北京华海中谊节能科技股份有限公司 Movable type vertical vacuum furnace structure
CN112429931A (en) * 2020-11-25 2021-03-02 薛媛媛 Sludge vacuum drying treatment system
CN112782218A (en) * 2021-01-28 2021-05-11 北京科技大学 Device and method for measuring thermal conductivity of wide-temperature-range material
CN113512636A (en) * 2021-05-24 2021-10-19 江苏爱科斯真空科技有限公司 Vertical vacuum heat treatment furnace

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102002658A (en) * 2010-11-24 2011-04-06 莱芜钢铁股份有限公司 Annealing process of cold rolled titanium roll
CN102002658B (en) * 2010-11-24 2012-11-07 山东钢铁股份有限公司 Annealing process of cold rolled titanium roll
CN102095310A (en) * 2011-01-20 2011-06-15 首钢总公司 Dual-chamber dual-temperature pipe type atmosphere comprehensive resistance furnace and using method thereof
CN102095310B (en) * 2011-01-20 2012-08-01 首钢总公司 Dual-chamber dual-temperature pipe type atmosphere comprehensive resistance furnace and using method thereof
CN102899472A (en) * 2011-07-26 2013-01-30 张家港华裕有色金属材料有限公司 Titanium and titanium alloy U-shaped bend vacuum heat treatment method and apparatus thereof
CN102409146A (en) * 2011-11-14 2012-04-11 云南钛业股份有限公司 Titanium roll tape cover annealing method and device thereof
CN102560439A (en) * 2012-03-29 2012-07-11 雅视光学有限公司 Method and device for carrying out surface treatment on plasma
CN103031417A (en) * 2012-12-29 2013-04-10 江苏丰东热技术股份有限公司 Furnace gas balancing replacement system and balancing replacement method for vacuum heat treatment furnace
CN103230981A (en) * 2013-05-14 2013-08-07 盐城市科奥热处理设备制造厂 Vertical steamer type multi-layer combined heating furnace
CN104004981A (en) * 2014-06-05 2014-08-27 湖南湘投金天钛金属有限公司 Vacuum induction direct heating annealing device for cold-rolled titanium tape rolls
CN104004981B (en) * 2014-06-05 2016-04-13 湖南湘投金天钛金属有限公司 A kind of cold rolled titanium roll coil of strip vacuum induction direct heating annealing device
CN104236991A (en) * 2014-08-19 2014-12-24 宁波英飞迈材料科技有限公司 Detachable in-situ heat treatment device and using method thereof
CN104152832A (en) * 2014-08-26 2014-11-19 攀钢集团攀枝花钢铁研究院有限公司 A vacuum annealing technology of cold rolled commercial pure titanium coils
CN104152832B (en) * 2014-08-26 2016-06-01 攀钢集团攀枝花钢铁研究院有限公司 The vacuum annealing process of cold rolling industry pure titanium coil
CN106643131A (en) * 2016-10-20 2017-05-10 北京华海中谊节能科技股份有限公司 Movable type vertical vacuum furnace structure
CN106513690A (en) * 2016-11-24 2017-03-22 上海电机学院 Ball milling-isometric angle extrusion-annealing method for pure titanium waste chip circular curing
CN112429931A (en) * 2020-11-25 2021-03-02 薛媛媛 Sludge vacuum drying treatment system
CN112782218A (en) * 2021-01-28 2021-05-11 北京科技大学 Device and method for measuring thermal conductivity of wide-temperature-range material
CN113512636A (en) * 2021-05-24 2021-10-19 江苏爱科斯真空科技有限公司 Vertical vacuum heat treatment furnace

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