CN101430299B - Miniature reversible sealing structure used for biomedicine fluid and its production method - Google Patents
Miniature reversible sealing structure used for biomedicine fluid and its production method Download PDFInfo
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- CN101430299B CN101430299B CN200810240371A CN200810240371A CN101430299B CN 101430299 B CN101430299 B CN 101430299B CN 200810240371 A CN200810240371 A CN 200810240371A CN 200810240371 A CN200810240371 A CN 200810240371A CN 101430299 B CN101430299 B CN 101430299B
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- 238000007789 sealing Methods 0.000 title claims abstract description 34
- 239000012530 fluid Substances 0.000 title claims abstract description 29
- 230000002441 reversible effect Effects 0.000 title claims abstract description 22
- 238000004519 manufacturing process Methods 0.000 title abstract description 4
- 239000004205 dimethyl polysiloxane Substances 0.000 claims abstract description 35
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims abstract description 35
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims abstract description 35
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims abstract description 35
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims abstract description 35
- 238000000034 method Methods 0.000 claims abstract description 17
- 239000000758 substrate Substances 0.000 claims description 42
- 239000000565 sealant Substances 0.000 claims description 14
- 238000000059 patterning Methods 0.000 claims description 4
- 238000010276 construction Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 238000002161 passivation Methods 0.000 description 4
- 230000002427 irreversible effect Effects 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 238000000018 DNA microarray Methods 0.000 description 1
- 238000011953 bioanalysis Methods 0.000 description 1
- 238000012742 biochemical analysis Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000008393 encapsulating agent Substances 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000012488 sample solution Substances 0.000 description 1
- 229920005573 silicon-containing polymer Polymers 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
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Abstract
The invention discloses a miniature reversible sealing structure used in biomedical microfluid. The miniature reversible sealing structure comprises a first underlay which is provided with a patterned PDMS sealing layer and a second underlay which is provided with a fluid controlling and processing functional apparatus that is enclosed between the first underlay and the second underlay by the PDMS sealing layer. The invention also discloses a method for manufacturing the miniature reversible sealing structure used in the biomedical microfluid. The method comprises the steps as follows: the patterned PDMS sealing layer is manufactured on the first underlay; the fluid controlling and processing functional apparatus is manufactured on the second underlay; and the second underlay is combined with the first underlay by the PDMS sealing layer to ensure that the fluid controlling and processing functional apparatus on the second underlay is enclosed between the first underlay and the second underlay.
Description
Technical field
The present invention relates to a kind of miniature reversible sealing structure that is used for biomedical microfluid and preparation method thereof; More specifically, relate to and a kind ofly be used for miniature reversible sealing structure of biomedical microfluid and preparation method thereof based on what MEMS (MEMS) micro-processing technology was made.
Background technology
Advantages such as microminiaturization biochemical analysis system is highly sensitive owing to it, selectivity good, cost is low, volume is little have a wide range of applications and the huge market space in fields such as biomedicine, outpatient service, medical jurisprudence.Microfluid biochip and biochemical measuring unit that microminiaturized bio-analysis system needs to be used for sample purifying, mixing, amplification, distribution usually carry out highly integrated.In the process of the processing of carrying out sample, preparation and amplification,,, then be easy at a certain temperature and humidity conditions be evaporated if seal badly because the amount of microfluid sample solution seldom.Therefore, need a kind of reliable hermetically-sealed construction that microfluid is sealed.
Dual mode is adopted in sealing to microfluid usually, and a kind of is reversible sealing, and another kind is irreversible sealing.Irreversible sealing normally utilizes the modes such as bonding in the micro-processing technology to realize.Microfluid is sealed the product that is obtained through irreversible encapsulating method and send one's regards to topic at aspects such as reliability, controllability and repeatabilities.Have and advantage such as be prone to fast go, can accomplish at ambient temperature and utilize polymeric material to carry out reversible sealing.Reversible encapsulant commonly used at present is PDMS, and promptly dimethyl silicone polymer is commonly called as silicon rubber.The mode of carrying out reversible sealing usually is that hermetically-sealed construction directly is prepared in above the fluid storehouse.For the biofluid system (one side as in sealing need make structures such as electrode) of complicacy, above-mentioned reversible encapsulating method has very big defective.
Summary of the invention
The present invention proposes a kind of new reversible sealing structure and implementation method, utilizes this structure not only can realize repeating controlled sealing, and can carry out patterning to hermetically-sealed construction, makes functional units such as electrode at an end of sealing.Thereby realize the dirigibility and the practicality of complex fluid chip.
Particularly, one side of the present invention provides a kind of miniature reversible sealing structure of biomedical microfluid, and this structure is made up of two substrates, microfluid raceway groove and fluid reaction storehouse, PDMS sealant.
Another aspect of the present invention provides a kind of method of making the miniature reversible sealing structure of biomedical microfluid, comprising:
The PDMS sealant of pattern-makingization on first substrate;
On second substrate, make fluid control and processing capacity devices such as microfluid raceway groove and micro fluid reaction storehouse; And
Adopt suitable alignment function mode, carry out the reversible sealing of micro-fluid chip.
Wherein, on first substrate during PDMS sealant of pattern-makingization owing to can carry out graphically to PDMS, can be on first substrate functional units such as integrated microelectrode of while, microsensor.
The said fluid channel of on second substrate, making in one embodiment of the invention, and the thickness of reaction warehouse are 10-1000 μ m.
In one embodiment of the invention, the said PDMS on said first substrate is the thick thin layer of 1-10 μ m, this thin layer is carried out patterning can carry out through using plasma dry method or other lithographic methods.
In above-mentioned hermetically-sealed construction of the present invention and method for making; Owing to adopted two substrat structures; Respectively microfluid unit and sealant are produced on two different substrates; Adopt PDMS as sealant, the PDMS sealant is carried out patterning, thereby can realize the complicacy micro-fluid chip system integration flexibly.
Description of drawings
Below in conjunction with accompanying drawing principle of the present invention and preferred forms are described.The purpose of accompanying drawing and represented embodiment thereof only is in order to describe principle of the present invention, rather than will be by any way the scope of present patent application be limited to said embodiment.Wherein:
Fig. 1 illustrates the cross-sectional schematic of of the present invention pair of substrate hermetically-sealed construction, and wherein up-down structure is in separated position;
Fig. 2 illustrates another cross-sectional schematic of of the present invention pair of substrate hermetically-sealed construction, and wherein up-down structure is in the sealing bonding state.
Embodiment
Fig. 1 and Fig. 2 illustrate the cross-sectional schematic of of the present invention pair of substrate hermetically-sealed construction respectively, and be wherein shown in Figure 1 for up-down structure is in state separately, and shown in Figure 2ly be in the sealing bonding state for up-down structure.
According to one embodiment of present invention, when making of the present invention pair of substrate hermetically-sealed construction illustrated in figures 1 and 2, can adopt following steps:
1. make the PDMS sealant:
At first prepare the PDMS prepolymer.In order to dispose the PDMS prepolymer, need PDMS matrix and hardening agent be mixed in certain proportion.In manufacturing process, in order to prevent that having bubble to embed after PDMS from solidifying influences sealing effectiveness, usually need be to the processing that outgases of PDMS prepolymer.
Spin coating PDMS then.That is: the substrate (a) that is manufactured with the function element unit to the surface is arranged on the spin coater, will pass through above PDMS prepolymer that the degassing handles drops in, with certain rotating speed spin coating.Then spin coating there is substrate (a) oven dry of PDMS prepolymer.
Next make mask layer.Make certain thickness mask layer on the PDMS surface, so that in the PDMS etching process, non-etched area PDMS is protected.
Mask layer is carried out photoetching.Limit the shape of PDMS pattern through photoetching, and will need the mask layer of etch areas to carve.Want the PDMS zone of etching just to limit out like this with mask layer.
Etching PDMS then.Using plasma dry method or other lithographic methods etch away the PDMS layer of need etch areas.
Remove mask layer at last.After finishing, etching removes mask layer.
Through above-mentioned processing, just go up and form the PDMS sealant at substrate (a).
2. make microfluid raceway groove and little reaction warehouse:
Preparing substrate at first.The substrate (b) of needs is carried out the routine cleaning, and dry up with nitrogen.
Then ready substrate (b) is carried out Passivation Treatment.(b) does Passivation Treatment with substrate, makes its surface generate one deck passivation layer.
Next make function element.Through the substrate (b) of Passivation Treatment surface makings needs such as micro-heater, the so various function elements of microsensor.
Make fluid channel and little reaction warehouse at last.On substrate (b) surface that has been manufactured with function element with functional structures such as MEMS micro-processing technology making fluid channel and little reaction warehouses.
After above-mentioned steps 1 and step 2 processing; Obtained to be manufactured with the substrate (a) of function elements such as graphical PDMS sealant and microelectrode respectively and be manufactured with the microfluid raceway groove and the substrate (b) of control of fluid such as micro fluid reaction storehouse and processing capacity device, as shown in Figure 1.At this moment, can two parts up and down be combined, adopt suitable alignment function mode, realize the sealing of micro-fluid chip easily.Obtain the micro-fluid chip encapsulation unit accomplished at last, as shown in Figure 2.Because this sealing is reversible, thereby can reuse.
Although more than described embodiment of the present invention; But those skilled in the art is to be understood that; Under the prerequisite that does not depart from spirit of the present invention and purport, can carry out various accommodations and modification to concrete embodiment, these accommodations should all belong to scope of the present invention with revising.That is to say that scope of the present invention can't help above-described embodiment and limited, but is limited the back appending claims.
Claims (8)
1. miniature reversible sealing structure that is used for biomedical microfluid comprises:
First substrate, this first substrate is provided with the PDMS sealant of patterning;
Second substrate, this second substrate are provided with fluid control and processing capacity device; And
The fluid control and the processing capacity device that are provided with on said second substrate are encapsulated between said first substrate and second substrate through said PDMS sealant.
2. miniature reversible sealing structure as claimed in claim 1 also is provided with functional unit on wherein said first substrate, and this functional unit comprises electrode, sensor.
3. according to claim 1 or claim 2 miniature reversible sealing structure, the fluid that is provided with on wherein said second substrate control and processing capacity device comprise microfluid raceway groove and fluid reaction storehouse.
4. miniature reversible sealing structure as claimed in claim 3, the thickness of wherein said fluid channel and reaction warehouse are the 10-1000 micron.
5. a making is used for the method for the miniature reversible sealing structure of biomedical microfluid, comprising:
The PDMS sealant of pattern-makingization on first substrate;
On second substrate, make fluid control and processing capacity device; And
Through said PDMS sealant said second substrate is attached on said first substrate, makes that fluid control and the processing capacity device on said second substrate is encapsulated between said first substrate and said second substrate.
6. method as claimed in claim 5 wherein further is included on said first substrate in the step of the PDMS sealant of pattern-makingization on first substrate and makes functional unit, and this functional unit comprises electrode, sensor.
7. like claim 5 or 6 described methods, the fluid that is provided with on wherein said second substrate control and processing capacity device comprise microfluid raceway groove and fluid reaction storehouse.
8. method as claimed in claim 7, the thickness of wherein said fluid channel and reaction warehouse are the 10-1000 micron.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810240371A CN101430299B (en) | 2008-12-19 | 2008-12-19 | Miniature reversible sealing structure used for biomedicine fluid and its production method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810240371A CN101430299B (en) | 2008-12-19 | 2008-12-19 | Miniature reversible sealing structure used for biomedicine fluid and its production method |
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| Publication Number | Publication Date |
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| CN101430299A CN101430299A (en) | 2009-05-13 |
| CN101430299B true CN101430299B (en) | 2012-09-05 |
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| CN200810240371A Active CN101430299B (en) | 2008-12-19 | 2008-12-19 | Miniature reversible sealing structure used for biomedicine fluid and its production method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US8734628B2 (en) | 2010-03-10 | 2014-05-27 | Empire Technology Development, Llc | Microfluidic channel device with array of drive electrodes |
| CN104165906B (en) * | 2014-07-14 | 2017-10-24 | 中国农业大学 | A kind of Viral diagnosis instrument |
Citations (8)
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|---|---|---|---|---|
| WO2000050871A1 (en) * | 1999-02-26 | 2000-08-31 | Orchid Biosciences, Inc. | Microstructures for use in biological assays and reactions |
| WO2001026812A1 (en) * | 1999-10-14 | 2001-04-19 | Ce Resources Pte Ltd | Microfluidic structures and methods of fabrication |
| CN1576372A (en) * | 2003-07-29 | 2005-02-09 | 中国科学院电子学研究所 | Polydimethyl Siloxanes sandwich type micro-fluid biological chip |
| US6921603B2 (en) * | 2002-04-24 | 2005-07-26 | The Regents Of The University Of California | Microfluidic fuel cell systems with embedded materials and structures and method thereof |
| CN101008594A (en) * | 2007-01-25 | 2007-08-01 | 重庆大学 | Micro-fluidic chip containing sample pre-treatment film and production method therefor |
| WO2007112878A1 (en) * | 2006-03-31 | 2007-10-11 | Sony Deutschland Gmbh | A method of applying a pattern of metal, metal oxide and/or semiconductor material on a substrate |
| CN100528736C (en) * | 2007-11-20 | 2009-08-19 | 东南大学 | Method for manufacturing wafer-level MEMS micro channel |
| CN101535171A (en) * | 2006-11-20 | 2009-09-16 | Nxp股份有限公司 | A sealing structure and a method of manufacturing the same |
-
2008
- 2008-12-19 CN CN200810240371A patent/CN101430299B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000050871A1 (en) * | 1999-02-26 | 2000-08-31 | Orchid Biosciences, Inc. | Microstructures for use in biological assays and reactions |
| WO2001026812A1 (en) * | 1999-10-14 | 2001-04-19 | Ce Resources Pte Ltd | Microfluidic structures and methods of fabrication |
| US6921603B2 (en) * | 2002-04-24 | 2005-07-26 | The Regents Of The University Of California | Microfluidic fuel cell systems with embedded materials and structures and method thereof |
| CN1576372A (en) * | 2003-07-29 | 2005-02-09 | 中国科学院电子学研究所 | Polydimethyl Siloxanes sandwich type micro-fluid biological chip |
| WO2007112878A1 (en) * | 2006-03-31 | 2007-10-11 | Sony Deutschland Gmbh | A method of applying a pattern of metal, metal oxide and/or semiconductor material on a substrate |
| CN101535171A (en) * | 2006-11-20 | 2009-09-16 | Nxp股份有限公司 | A sealing structure and a method of manufacturing the same |
| CN101008594A (en) * | 2007-01-25 | 2007-08-01 | 重庆大学 | Micro-fluidic chip containing sample pre-treatment film and production method therefor |
| CN100528736C (en) * | 2007-11-20 | 2009-08-19 | 东南大学 | Method for manufacturing wafer-level MEMS micro channel |
Non-Patent Citations (1)
| Title |
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| 叶美英等.聚二甲基硅氧烷基质微流控芯片封接技术的研究.《高等学校化学学报》.2002,第23卷(第12期),2243-2246. * |
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| CN101430299A (en) | 2009-05-13 |
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