The method for making of contact panel, display and contact panel
Technical field
The present invention relates to the method for making of a kind of contact panel, display and contact panel, and relate in particular to a kind of method for making of contact panel, display and contact panel of high signal transmission quality.
Background technology
In recent years; Fast development and application along with infotech, wireless mobile communication and information household appliances; More facility, volume are more lightly changed and more humane purpose in order to reach; Many information products change into and use contact panel (Touch Panel) as input media by input medias such as the keyboard of tradition or mouses.
Fig. 1 illustrates a kind of contact panel of prior art, and wherein in order to clearly demonstrate the element design of prior art contact panel, Fig. 1 only illustrates the structure of the sensing serials of contact panel, and has omitted other rete that possibly exist or element.As shown in Figure 1, the contact panel 100 of prior art comprises a plurality of first sensing serials 120 and a plurality of second sensing serials 140.More detailed, first sensing serials 120 is extended along first direction D1, and wherein each first sensing serials 120 is to be connected in series with first bridging line 124 by a plurality of first sensor pads 122 to form.Second sensing serials 140 is extended along second direction D2, and wherein each second sensing serials 140 is to be connected in series with second bridging line 144 by a plurality of second sensor pads 142 to form.First sensor pad 122 and second sensor pad 142 can constitute a sensing array, to reach the sensing of face.;
When the user contacts contact panel 100 with finger, first sensing serials 120 of contact panel 100 and second sensing serials 140 can produce an electric capacity on finger institute position contacting change.Contact panel 100 just thus the change on the electric capacity calculate a suitable instruction with operating electronic devices.Yet first sensor pad 122, second sensor pad 142, first bridging line 124 and second bridging line 144 all are made by transparent conductive oxides such as indium tin oxides.So the transfer impedance of first bridging line 124 and second bridging line 144 is bigger, possibly influence signal transmission quality.In addition, first bridging line 124 and second bridging line, 144 ecotones have bigger stray capacitance, and are unfavorable for the calculating of position of touch.In other words, the contact panel 100 of prior art design has the problem that the signal transmission is bad and the sensing sensitivity is not good.
Summary of the invention
The present invention provides a kind of contact panel, to solve the transfer impedance and the bigger problem of stray capacitance of bridging line in the prior art contact panel.
The present invention provides a kind of display in addition, and its transmission quality with touch controllable function and touching signals is good.
The present invention provides a kind of method for making of contact panel again, to make the contact panel of low transmission impedance and low parasitic capacitance.
For realizing above-mentioned purpose, the present invention proposes a kind of contact panel, and it comprises a base material, at least one first sensing serials and at least one second sensing serials.First sensing serials is disposed on the base material and along a first direction extends, and wherein first sensing serials comprises a plurality of first sensor pads and at least one first bridging line.First bridging line is connected in series two adjacent first sensor pads, and the material of first bridging line is different from the material of first sensor pad.Second sensing serials is disposed on the base material and along a second direction extends, and wherein first direction is different with second direction.Second sensing serials comprises a plurality of second sensor pads and at least one second bridging line.Second bridging line is connected in series two adjacent second sensor pads.
In one embodiment of this invention, the material of the first above-mentioned sensor pad comprises transparent conductive oxide, and the material of first bridging line comprises metal.
In one embodiment of this invention, the conductance of above-mentioned second bridging line of part is higher than the conductance with second sensor pad at least.On the practice, the material of second sensor pad comprises transparent conductive oxide, and the material of second bridging line comprises metal.In one embodiment, metal comprises aluminium, copper, molybdenum, molybdenum aluminium alloy, titanium, titanium-aluminium alloy, silver, silver palladium alloy or combinations thereof.Transparent conductive oxide comprises indium zinc oxide, tin indium oxide or combinations thereof.
In one embodiment of this invention, above-mentioned first sensor pad and the second sensor pad copline.
In one embodiment of this invention, above-mentioned contact panel also comprises one first dielectric layer, and it is disposed on the base material to cover first sensing serials and second sensor pad.First dielectric layer for example has a plurality of interlayer holes, and second bridging line is positioned on first dielectric layer, and second bridging line is connected with second sensor pad through interlayer hole.In addition, contact panel also comprises one second dielectric layer, and it is disposed on first dielectric layer, to cover first sensing serials and second sensing serials.
In one embodiment of this invention, above-mentioned contact panel also comprises one first dielectric layer, and it is disposed on the base material and covers first sensing serials.First dielectric layer for example has a plurality of perforates corresponding to second sensor pad.Second sensor pad is positioned at pairing perforate, and first dielectric layer between two adjacent apertures is crossed in each second bridging line, and connects pairing two adjacent second sensor pads.Simultaneously, contact panel can also comprise one second dielectric layer, and it is disposed on first dielectric layer, and covers first sensing serials and second sensing serials.
In one embodiment of this invention, above-mentioned contact panel also comprises one first dielectric layer, and it is disposed on the base material and covers first bridging line, and wherein first sensor pad and second sensing serials are positioned on first dielectric layer.In addition, first dielectric layer has a plurality of interlayer holes, and first bridging line is connected with first sensor pad through pairing interlayer hole.In fact, contact panel comprises that also one is disposed at second dielectric layer on first dielectric layer, and second dielectric layer covers first sensing serials and second sensing serials.
In one embodiment of this invention, above-mentioned first direction is perpendicular to second direction.
In one embodiment of this invention; Above-mentioned contact panel also comprises many fan-out circuits (fan-out traces) that are disposed on the base material; Wherein fan-out circuit is connected with first sensing serials and second sensing serials, and the material of fan-out circuit is identical in fact with the material of first sensor pad.
In one embodiment of this invention; Above-mentioned contact panel also comprises many fan-out circuits (fan-out traces) that are disposed on the base material; Wherein fan-out circuit is connected with first sensing serials and second sensing serials, and the material of the material of fan-out circuit and first sensor pad is different in essence.
In one embodiment of this invention, the conductance of the first above-mentioned bridging line is about 0.01 Ω/ to 1000 Ω/, and the conductance of first sensor pad is about 0.01 Ω/ to 1000 Ω/.
In one embodiment of this invention, the first above-mentioned bridging line connects first sensor pad simultaneously.First bridging line and first sensor pad can be the isoplanar.In addition, second bridging line can connect second sensor pad simultaneously, and first bridging line and first sensor pad for example are the isoplanar.
In one embodiment of this invention, the conductance of the first above-mentioned bridging line is higher than the conductance of first sensor pad.
In one embodiment of this invention, the electrical impedance of the first above-mentioned bridging line is lower than the electrical impedance of first sensor pad.For example, the sheet of first bridging line resistance (sheet resistance) is about 0.01 Ω/ (ohm/side) to 1000 Ω/, and the resistance of the sheet of first sensor pad is about 0.01 Ω/ to 1000 Ω/.
In one embodiment of this invention, the material of the second above-mentioned bridging line is different from the material of those second sensor pads.
In one embodiment of this invention, the material of the second above-mentioned bridging line is same as the material of those second sensor pads.
In one embodiment of this invention, the first above-mentioned sensing serials also comprises at least one first service bridge wiring serial connection two adjacent first sensor pads in addition, and wherein the material of the material of the first service bridge wiring and first sensor pad is identical and be the isoplanar.
In one embodiment of this invention, the second above-mentioned sensing serials also comprises at least one second service bridge wiring serial connection two adjacent second sensor pads in addition, and wherein the material of the material of the second service bridge wiring and second sensor pad is identical and be the isoplanar.
And for realizing above-mentioned purpose, the present invention proposes a kind of display in addition, comprises aforesaid any contact panel and a display panel.Display panel and contact panel electrically connect.
In one embodiment of this invention, above-mentioned display panel comprises a display panels, an electric exciting light emitting display panel, an electric slurry display panel or a micro electronmechanical display panel.
And for realizing above-mentioned purpose, the present invention proposes a kind of method for making of contact panel again.The method for making of this contact panel comprises following each step.On a base material, form at least one first sensing serials, wherein first sensing serials is extended along a first direction.First sensing serials comprises a plurality of first sensor pads and a plurality of first bridging line, and each first bridging line is connected in series two adjacent first sensor pads, and the conductance of part first bridging line at least is higher than the conductance of first sensor pad.Then, on base material, form at least one second sensing serials, wherein second sensing serials is extended along a second direction, and first direction is different with second direction.Each second sensing serials comprises a plurality of second sensor pads and a plurality of second bridging line, and respectively second bridging line is connected in series two adjacent second sensor pads.
In one embodiment of this invention; Above-mentioned formation first sensing serials and the method for second sensing serials comprise: on base material, form first sensor pad, first bridging line and second sensor pad, so that first sensor pad, first bridging line and the second sensor pad copline.Then, on base material, form one first dielectric layer, to cover first sensor pad, first bridging line and second sensor pad.Afterwards, in first dielectric layer, form a plurality of interlayer holes.Thereupon, on first dielectric layer, form second bridging line, so that each second bridging line connects pairing second sensor pad through pairing interlayer hole.
In one embodiment of this invention, the method for making of above-mentioned contact panel also is included in and forms one second dielectric layer on first dielectric layer, to cover first sensing serials and second sensing serials.
In one embodiment of this invention, the method for making of above-mentioned contact panel, the method that wherein forms first sensing serials and second sensing serials comprises: on base material, form first sensing serials.Then, on base material, form one first dielectric layer, to cover first sensing serials.Thereupon, in first dielectric layer, form a plurality of perforates.Then, form second sensing serials, wherein second sensor pad in second sensing serials be formed in the pairing perforate and with the first sensor pad copline.On the practice, first dielectric layer between two adjacent apertures is crossed in second bridging line in second sensing serials, to connect pairing two adjacent second sensor pads.In addition, the method also is included in and forms one second dielectric layer on first dielectric layer, to cover first sensing serials and second sensing serials.
In one embodiment of this invention, the method for above-mentioned formation first sensing serials and second sensing serials is included in and forms first bridging line on the base material; On base material, form one first dielectric layer, to cover first bridging line; In first dielectric layer, form a plurality of interlayer holes; And, on first dielectric layer, form first sensor pad and second sensing serials, wherein first sensor pad, second sensor pad and the second bridging line copline, and first sensor pad connects pairing first bridging line respectively through pairing interlayer hole.In addition, the method for making of contact panel also is included in and forms one second dielectric layer on first dielectric layer, to cover first sensing serials and second sensing serials.
In one embodiment of this invention; The method for making of above-mentioned contact panel also is included in and forms many fan-out circuits (fan-out traces) on the base material; Wherein a little fan-out circuits are connected with first sensing serials and second sensing serials, and the material of fan-out circuit is identical in fact with the material of first sensor pad.
In one embodiment of this invention; The method for making of above-mentioned contact panel also is included in and forms many fan-out circuits (fan-out traces) on the base material; Wherein a little fan-out circuits are connected with first sensing serials and second sensing serials, and the material of the material of fan-out circuit and first sensor pad is different in essence.
In one embodiment of this invention, the method for making of above-mentioned contact panel also comprises and makes first bridging line connect first sensor pad simultaneously.In one embodiment, the method for making of contact panel comprises that also making first bridging line and first sensor pad is the isoplanar.Simultaneously, the method for making of contact panel can also comprise and makes second bridging line connect second sensor pad simultaneously.
In one embodiment of this invention; The method of above-mentioned formation first sensing serials also comprises and forms at least one first service bridge wiring serial connection two adjacent first sensor pads in addition, and wherein the material of the material of the first service bridge wiring and first sensor pad is identical and be the isoplanar.Certainly, the method that forms second sensing serials also can comprise and form at least one second service bridge wiring serial connection two adjacent second sensor pads in addition, and wherein the material of the material of the second service bridge wiring and second sensor pad is identical and be the isoplanar.
The present invention makes sensor pad and bridging line in the sensing serials because of adopting different conductive material, and therefore the method for making of contact panel of the present invention, display and contact panel can make the signal transmission quality of sensing serials obtain compensation.For example, the bridging line of sensing serials can be to be made to promote whole signal transfer impedance by the high material of conductance, reduces the stray capacitance between the bridging line simultaneously.
Description of drawings
Fig. 1 illustrates a kind of contact panel of prior art;
Fig. 2 to Fig. 5 illustrates the top view into the contact panel of first to fourth embodiment of the present invention;
Fig. 6 illustrates the sectional view into the contact panel of one embodiment of the invention;
Fig. 7 illustrates the sectional view into the contact panel of another embodiment of the present invention;
Fig. 8 illustrates the sectional view into the contact panel of another embodiment of the present invention;
Fig. 9 illustrates the contact panel into the fifth embodiment of the present invention;
The sectional view that Figure 10 is illustrated for the hatching line C-C ' along Fig. 9.
Wherein, Reference numeral:
100,200,300,400,500,900: contact panel
120,210,310,410,510,910: the first sensing serials
122,212,312,512,912: the first sensor pads
124,214,314,414,514, bridging line in 914: the first
140,220,320,420,520,920: the second sensing serials
142,222,522,922: the second sensor pads
144,224,324,424,524, bridging line in 924: the second
230,930: fan-out circuit
414A, 414B, 424A, 424B: bridge joint line segment
502,902: substrate
540,740,840,940: the first dielectric layers
542,842: interlayer hole
550: the second dielectric layers
742: opening
A-A ', B-B ', C-C ': hatching line
D1, D2: direction
Embodiment
Fig. 2 to Fig. 5 illustrates the top view into the contact panel of first to fourth embodiment of the present invention.Please earlier with reference to Fig. 2, contact panel 200 has at least one first sensing serials 210 and at least one second sensing serials 220.First sensing serials 210 is extended D1 along a first direction, and wherein first sensing serials 210 comprises a plurality of first sensor pads 212 and at least one first bridging line 214.First sensor pad 212 that first bridging line 214 serial connection two is adjacent, and the material of first bridging line 214 is different from the material of first sensor pad 212.
220 edges of second sensing serials, one second direction D2 extends, and wherein first direction D1 is different with second direction D2.Second sensing serials 220 comprises a plurality of second sensor pads 222 and at least one second bridging line 224.Second sensor pad 222 that second bridging line 224 serial connection two is adjacent.
In addition; Contact panel 200 also comprises many fan-out circuits (fan-out traces) 230; Wherein fan-out circuit 230 is connected with first sensing serials 210 and second sensing serials 220, and the material of fan-out circuit 230 can be in fact identical or different with the material of first sensor pad 212.Fan-out circuit 230 mainly is to transfer to first sensing serials 210 and second sensing serials 220 in order to the sensing signal that is produced in first sensing serials 210 and second sensing serials 220 is transferred to control circuit and will control the electric control signal of going into to be exported.
What deserves to be mentioned is that the conductance of first bridging line 214 is greater than the conductance of first sensor pad 212.For example, the material of first sensor pad 212 comprises transparent conductive oxide, and the material of first bridging line 214 comprises metal.On the practice, metal comprises aluminium, copper, molybdenum, molybdenum aluminium alloy, titanium, titanium-aluminium alloy, silver, silver palladium alloy or combinations thereof, and transparent conductive oxide comprises indium zinc oxide, tin indium oxide or combinations thereof.Above-described each material only illustrates, and is not in order to limit the present invention.In the present embodiment; The sheet resistance of first bridging line 214 is about 0.01 Ω/ to 1000 Ω/; And the resistance of the sheet of first sensor pad 212 is about 0.01 Ω/ to 1000 Ω/; Preferably, the resistance of the sheet of first bridging line 214 is about 0.1 Ω/ to 100 Ω/, and the resistance of the sheet of first sensor pad 212 is about 1 Ω/ to 1000 Ω/.
In addition, in the present embodiment, second sensor pad 222 and second bridging line 224 for example are to process with identical transparent conductive oxide material, and second sensor pad 222 and second bridging line 224 for example are coplines.On the practice, first sensor pad 212 can also with second sensor pad, 222 coplines.The transparent conductive oxide material will make contact panel 200 produce visual otherness as if being disposed at alternately on the Different Plane, so present embodiment makes first sensor pad 212 and second sensor pad, 222 coplines can avoid contact panel 200 to produce bad vision difference.
In the present embodiment, utilize the material of high conductivity to make first bridging line 214.So contact panel 200 has signal transmission quality preferably at least on first direction D1.But, the present invention is not limited to this.Please with reference to Fig. 3, contact panel 300 is similar with contact panel 200, and wherein the bearing of trend (D1 and D2) of first sensing serials 310 of contact panel 300 and second sensing serials 320 is just opposite with the design of contact panel 200.Simultaneously, present embodiment is optionally to make first bridging line 214 with the material of high conductivity.Auspicious speech it, in the contact panel 300,214 of first sensor pad 212 of unlike material and first bridging lines constitute first sensing serials 310.Simultaneously, second sensor pad 222 for example is to be made with identical material with second sensing serials 320 that second bridging line 224 is constituted.In other words, the design of present embodiment can make the transfer impedance of contact panel on first direction D1 reduce and help to promote the signal transmission quality of first direction D1.
Generally speaking, utilize first bridging line 214 of the higher material construction drawing 2 of conductance such as metal or second bridging line 324 of Fig. 3, then contact panel 200 can descend with the signal transfer impedance of contact panel 300 effectively.Also promptly, the present invention select for use the higher material of conductance as the part bridging line to promote the signal transmission quality of whole contact panel 200 or 300.
Certainly, the present invention is not limited thereto.Please with reference to Fig. 4, in contact panel 400, first bridging line 414 of first sensing serials 410 for example comprises by the two kind of first bridge joint line segment 414A of unlike material and the second bridge joint line segment 414B and forming.Simultaneously, second bridging line 424 of second sensing serials 420 also for example is made up of the second bridge joint line segment 424A and the second bridge joint line segment 424B of unlike material.For example, the first bridge joint line segment 414A and the second bridge joint line segment 424A are that material by high conductivities such as metals is made.
Under such design, the transfer impedance of first bridging line 414 and second bridging line 424 can descend because of the application of high conductivity material.Therefore, the signal transmission quality of contact panel 400 on first direction D1 and second direction D2 can be raised effectively.
Again furthermore, please with reference to Fig. 5, have better signal transmission quality in order to make contact panel 500, all first bridging line 514 and second bridging lines 524 can utilize the material of high conductivities such as metal to make.At this moment, first sensing serials 510 and second sensing serials 520 can show the good signal transmission quality.Can know that by Fig. 2 to Fig. 5 contact panel 200,300,400 of the present invention and 500 can be selected for use through the material of bridging line has the good signal transmission quality.Because first sensing serials and second sensing serials can also have multiple different retes configuration design at cross-section structure except the described configuration relation of last TV structure that above Fig. 2 to Fig. 5 illustrated.In order clearly to express design concept of the present invention, below be the cross-section structure that example is explained contact panel 500 of the present invention with the contact panel 500 of Fig. 5.
Fig. 6 illustrates the sectional view into the contact panel of one embodiment of the invention, and wherein Fig. 6 is illustrated sectional view by the hatching line A-A ' along Fig. 5.Please be simultaneously with reference to Fig. 5 and Fig. 6, contact panel 500 comprises substrate 502, first sensing serials 510 and second sensing serials 520 in fact.First sensing serials 510 and second sensing serials 520 all are disposed on the base material 502, and first sensor pad 512 and second sensor pad 522 for example are the isoplanars.In addition, contact panel 500 also comprises one first dielectric layer 540, and it covers first sensing serials 510 and second sensor pad 522.First dielectric layer 540 for example has a plurality of interlayer holes 542, and second bridging line 524 is positioned on first dielectric layer 540, and second bridging line 524 is connected with second sensor pad 522 through interlayer hole 542.That is to say that second bridging line 524 for example is across the top of first bridging line 514 and is connected between adjacent second sensor pad 522.
For proper protection is provided, contact panel 500 also comprises one second dielectric layer 550, and it is disposed on first dielectric layer 540, to cover first sensing serials 510 and second sensing serials 520.What deserves to be mentioned is that in the present embodiment, first bridging line 514 and second bridging line 524 all are that the material with high conductivity is made, but the invention is not restricted to this.In other embodiments, staggered first bridging line 514 and second bridging line 524 can only have wherein one or partly select for use the material of high conductivity to make, just like contact panel 200,300 that Fig. 2 to Fig. 4 illustrated and 400 design.
In detail, please continue the while with reference to Fig. 5 and Fig. 6, the method for making of contact panel 500 may further comprise the steps.At first, on base material 502, form at least one first sensing serials 510, wherein first sensing serials 510 is extended along a first direction D1.First sensing serials 510 comprises a plurality of first sensor pads 512 and a plurality of first bridging lines 514, and the first adjacent sensor pad 512 of each first bridging line, 514 serial connection two.Then, on base material 502, form at least one second sensing serials 520, wherein second sensing serials 520 is extended D2 along a second direction, and first direction D1 is different with second direction D2.Each second sensing serials 520 comprises a plurality of second sensor pads 522 and a plurality of second bridging lines 524, and the second adjacent sensor pad 522 of each second bridging line, 524 serial connection two.
Particularly; Formation first sensing serials 510 of present embodiment and the method for second sensing serials 520 comprise: on base material 502, form first sensor pad 512, first bridging line 514 and second sensor pad 522, so that first sensor pad 512, first bridging line 514 and second sensor pad, 522 coplines.That is, first sensor pad 512 and second sensor pad 522 for example are in identical step, to be formed at the lip-deep of substrate 502 with identical materials.Then, on base material 502, form one first dielectric layer 540, to cover first sensor pad 512, first bridging line 514 and second sensor pad 522.Afterwards, in first dielectric layer 540, form a plurality of interlayer holes 542.Thereupon, on first dielectric layer 540, form second bridging line 524, so that each second bridging line 524 connects pairing second sensor pad 522 through pairing interlayer hole 542.Then, can also on first dielectric layer 540, form one second dielectric layer 550, to cover first sensing serials 510 and second sensing serials 520.
First sensor pad 512 and second sensor pad 514 for example all are made by the electrically conducting transparent material, and these electrically conducting transparent materials can visually produce otherness if be disposed on the different plane usually.In the present embodiment, first sensor pad 512 is positioned at identical plane with second sensor pad 522, so first sensor pad 512 and 522 of second sensor pads do not have visual otherness.Therefore, when a contact panel 500 and a display panel were integrated into the display with touch controllable function, contact panel 500 can have optical property preferably.For example, display panel can electrically connect with contact panel 500, and display panel comprises a display panels, an electric exciting light emitting display panel, an electric slurry display panel or a micro electronmechanical display panel etc.Certainly, contact panel 200,300 and 400 also can electrically connect to constitute a display of tool touch controllable function with a display panel.
In addition, in the present embodiment, first bridging line 514 and second bridging line 524 all have high conductance.So the signal transmission quality of contact panel 500 can be raised efficiently.What deserves to be mentioned is that in the contact panel 500, first bridging line 514 and second bridging line 524 have the favorable conductive rate, therefore when making first bridging line 514 and second bridging line 524, can moderately dwindle its live width.Thus, the configuration of first bridging line 514 and second bridging line 524 is difficult for the light transmittance of contact panel 500 is caused negative influence, and makes contact panel 500 keep good optical character.Simultaneously, the area that overlaps of first bridging line 514 and second bridging line 524 can dwindle effectively and helps to reduce the stray capacitance between two lines.The sensing sensitivity of the more little then contact panel 500 of stray capacitance of first bridging line 514 and second bridging line 524 is good more.In other words, first bridging line 514 and second bridging line, 524 overlapping areas dwindles the quality that helps to promote contact panel 500.
Fig. 7 illustrates the sectional view into the contact panel of another embodiment of the present invention, and wherein Fig. 7 is illustrated sectional view by the hatching line A-A ' along Fig. 5.Please be simultaneously with reference to Fig. 5 and Fig. 7, in the contact panel 500 of Fig. 5, the design of cross-section structure can be to make to be disposed at first dielectric layer, 740 coverings, first sensing serials 510 on the base material 502.In addition, first dielectric layer 740 for example has a plurality of perforates 742 corresponding to second sensor pad 522.Second sensor pad 522 is positioned at pairing perforate 742, and first dielectric layer 740 that each second bridging line 524 is crossed between two adjacent apertures 742, and connect pairing two adjacent second sensor pads 522.Simultaneously, second dielectric layer 550 is disposed on first dielectric layer 740, and covers first sensing serials 510 and second sensing serials 520.
In the present embodiment, first dielectric layer 740 for example has the perforate 742 that just can hold second sensor pad 522.In order to accomplish such configuration relation, the method that forms first sensing serials 510 and second sensing serials 520 for example may further comprise the steps.Prior to forming first sensing serials 510 on the base material 502.Then, on base material 502, form one first dielectric layer 740, to cover first sensing serials 510.Thereupon, in first dielectric layer 740, form a plurality of perforates 742.Then, form second sensing serials 520, wherein second sensor pad 522 in second sensing serials 520 be formed in the pairing perforate 742 and with first sensor pad, 512 coplines.That is to say that present embodiment is just to make second sensor pad 522 after earlier first dielectric layer 740 being formed.In addition, second sensor pad 522 of present embodiment is not for example covered by first dielectric layer 740.
On the practice, first dielectric layer 740 that second bridging line 524 in second sensing serials 520 is crossed between two adjacent apertures 742 is to connect pairing two adjacent second sensor pads 524.First bridging line 514 and second bridging line 524 all utilize the material of high conductivity to make at present embodiment.So first bridging line 514 and second bridging line 524 have the good signal transmission quality.Therefore, first bridging line 514 and second bridging line 524 just can have the good signal transmission quality under less live width design, and the stray capacitance of winning between the bridging line 514 and second bridging line 524 is dwindled.In other embodiment, first bridging line 514 and second bridging line 524 certainly optionally only have part to make with the metal material of high conductivity, and partly make with transparent conductive oxide, and the present invention is not limited thereto.
Fig. 8 illustrates the sectional view into the contact panel of another embodiment of the present invention, and wherein Fig. 8 is illustrated sectional view by the hatching line A-A ' along Fig. 5.Please be simultaneously with reference to Fig. 5 and Fig. 8, the design on the cross-section structure of contact panel 500 can be that first dielectric layer 840 covers first bridging line 514, wherein first sensor pad 512 and second sensing serials 522 (not illustrating among Fig. 8) then are positioned on first dielectric layer 840.In addition, first dielectric layer 840 has a plurality of interlayer holes 842, and first bridging line 514 is connected with first sensor pad 512 through pairing interlayer hole 842.In addition, second dielectric layer 550 covers first sensing serials 510 and second sensing serials 520.
In the present embodiment; First dielectric layer 840 only covers first bridging line 514; And part of first dielectric layer 840 is between first sensor pad 512 and substrate 502, and part of first dielectric layer 840 is to be positioned between second sensor pad 522 (Fig. 8 does not illustrate) and the substrate 502.That is to say that present embodiment is that first sensor pad 512 and second sensor pad 522 (Fig. 8 does not illustrate) are disposed on first dielectric layer 840 simultaneously.Thus, first sensor pad 512 and second sensor pad 522 (Fig. 8 does not illustrate) come down to the isoplanar so that contact panel 500 presents good optical character.Certainly, in the present embodiment, first bridging line 514 and second bridging line 524 can be only partly to use the metal material of high conductivity to be made fully or optionally, so the signal transmission quality of contact panel 500 is good.
The cross-section structure of the contact panel 500 that particularly, Fig. 8 illustrated can be via the following steps made.At first, on substrate 502, form first bridging line 514.Then, on first bridging line 514 and substrate 502, form first dielectric layer 840 all sidedly, and in first dielectric layer 840, form a plurality of interlayer holes 842.These interlayer holes 842 expose the part zone of each first bridging line 514 in fact.Then, on first dielectric layer 840, form first sensor pad 512 and second sensing serials 520 (Fig. 8 only draws second bridging line 524).For example be to make first sensor pad 512 see through interlayer hole 842 to be electrically connected to first bridging line 514 when forming first sensor pad 512.Afterwards, on first sensing serials 510 and second sensing serials 520, form second dielectric layer 550 all sidedly.
In the present embodiment, all sensor pads (512,522) all are to be disposed on the surface of first dielectric layer 840, that is to say that first sensor pad 512 comes down to be positioned on the identical plane with second sensor pad 522.At this moment, contact panel 500 just can not be positioned at the effect that visually makes a difference on the Different Plane because of first sensor pad 512 and second sensor pad 522.In other words, when the design of contact panel 500 and a display panel are combined into touch-sensitive display, touch-sensitive display can present superior display quality.
Furthermore, Fig. 9 illustrates the contact panel into the fifth embodiment of the present invention.Please earlier with reference to Fig. 9, contact panel 900 has one first sensing serials 910 and one second sensing serials 920.First sensing serials 910 is extended along a first direction D1, and first sensing serials 910 comprises a plurality of first sensor pads 912 and one first bridging line 914.First bridging line 914 for example is the first all sensor pad 912 of serial connection, and the material of first bridging line 914 is different from first sensor pad, 912 materials.Second sensing serials 920 is extended along a second direction D2, and wherein first direction D1 is different with second direction D2.Second sensing serials 920 comprises a plurality of second sensor pads 922 and many second bridging lines 924.Second sensor pad 922 that each second bridging line 924 serial connection two is adjacent.In addition, contact panel 900 also has many fan-out circuits 930 so that first sensor pad 910 can transfer in the corresponding control circuit with signal on second sensor pad 920.
In the present embodiment; First bridging line 914 is that all first sensor pads 912 that are positioned on same first sensing serials 910 are serially connected; That is to say that first bridging line 914 is a single lead, overlap and be connected in series with first sensor pad 912 on being positioned at same first sensing serials 910.In addition, first bridging line 914 for example is that material by high conductivities such as metals is made.Generally speaking, make first bridging line 914 with metal suitable good signal transport property can be provided.But, the shading character of metal itself possibly make contact panel 900 present not good light penetration rate or make contact panel 900 visually cause uneven phenomenon.Yet; In the present embodiment, because the application of metal material provides goodish signal transmission quality, so first bridging line 914 can be as the design aspect with narrower live width; For example, the live width of first bridging line 914 is less than the live width of second bridging line 924.That is, the live width of first bridging line 914 can moderately be dwindled and produced the uneven situation of penetrability when avoiding human eye to watch contact panel 900.
Generally, present embodiment utilizes first bridging line 914 of high conductivity and strip, first sensor pad 912 that all are corresponding to be serially connected, so contact panel 900 to the signal transmission quality that is less than on the first direction D1 can effectively be raised.Certainly, also further promote in order to make the signal transmission quality of contact panel 900 on second direction D2, second bridging line 924 also can optionally adopt the metal material of high conductivity to make, and the present invention does not limit the material of second bridging line 924.Further, in other embodiments, the design of first bridging line 914 and second bridging line 924 can be exchanged each other, and makes the high conductivity transmission line of second bridging line 924 for all second sensor pads 922 of serial connection, and the present invention is not limited to this.
Particularly, the sectional view of Figure 10 for being illustrated along the hatching line C-C ' of Fig. 9.Please be simultaneously with reference to Fig. 9 and Figure 10, first sensing serials 910 and second sensing serials 920 come down to be disposed on the substrate 902 to constitute contact panel 900.In addition, the method for making of contact panel 900 for example is prior to formation first bridging line 914 on the substrate 902, forms one first dielectric layer 940 afterwards to cover first bridging line 914, and wherein first dielectric layer 940 for example has a plurality of interlayer holes (not illustrating).Then, on substrate 902, form first sensor pad 912 and second sensing serials 920.At this moment, first bridging line 914 electrically connects through the pairing interlayer hole (not illustrating) and first sensor pad 912.924 of second bridging lines cross between two adjacent second sensor pads 922 first dielectric layer 940 so that second sensor pad 922 be serially connected.
In the present embodiment, except first bridging line 914 be directly be disposed on the substrate 902, first sensor pad 912 and second sensor pad 922 also can be directly to be disposed on the substrate 902.In other words, first sensor pad 912 and second sensor pad 922 are positioned on the same level.In these enforcements proposed by the invention, the design of sensor pad all is to be positioned on the same level, but the invention is not restricted to this.In other embodiment, these sensor pads in fact also can be disposed on the different plane.
In sum, the display that contact panel and this contact panel of the present invention constituted utilizes the higher material of conductance to make part first bridging line and second bridging line at least, and the transfer impedance of contact panel is reduced effectively.Therefore, contact panel and display proposed by the invention present low signal transfer impedance.In addition, the application of high conductive material helps to reduce the stray capacitance between each sensing serials in the contact panel of the present invention, and makes contact panel have good touch-control sensitivity.Manufacturing process by contact panel of the present invention can be known, the section design that each sensing serials can make identical design of going up TV structure present multiple kenel through different sequence of steps, thereby contact panel of the present invention has more diversity.
Certainly; The present invention also can have other various embodiments; Under the situation that does not deviate from spirit of the present invention and essence thereof; Those of ordinary skill in the art work as can make various corresponding changes and distortion according to the present invention, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the present invention.