Disc conveyer device
Technical field
The present invention relates to a kind of disc conveyer device, particularly relevant for a kind of disc conveyer device with two groups with moving push rod, the efficient when carrying to improve the casket dish.
Background technology
Semiconductor element test mostly uses Auto-Test System (Automatic TestEquipment at present, ATE) test, the wafer that has detected is through being cut into crystal grain (die), utilize crystal granules sorted machine (dice sorter) that crystal grain is positioned on the casket dish (tray) again, wherein the disc conveyer device on the crystal granules sorted machine has very big influence for the treatment effeciency of crystal granules sorted machine.
Figure 1A, Figure 1B show in the prior art respectively, the side schematic view of disc conveyer device and schematic top plan view, this disc conveyer device 10, comprise a casket dish accumulator tank 11, a delivery platform 12, a push rod 13, a start push rod 14, an output stage 16, a kick-off arm 18 and a casket and take inventory and put device 19, also comprise a chip pickup head 17 in addition.
Casket dish accumulator tank 11 is in order to store a plurality of casket dishes 2, and this casket dish accumulator tank 11 has a casket dish output unit 112, each exportable casket dish 2.Push rod 13 is arranged at casket dish accumulator tank 11 belows, in order to pushing to delivery platform 12 by the casket dish 2 of casket dish accumulator tank 11 outputs.
Delivery platform 12 is in order to the casket dish 2 of carrying by 11 outputs of casket dish accumulator tank, and this delivery platform 12 comprises a buffer zone 121 and a start district 122.Start push rod 14 is arranged at delivery platform 12, is positioned at the casket dish 2 of delivery platform 12 in order to ejection, and makes this casket dish 2 move on delivery platform 12.Chip pickup head 17 is arranged at the top in start district 122, in order to the chip on the wafer is put into casket dish 2.
Output stage 16 is in order to the casket dish 2 of carrying by delivery platform 12 outputs.Kick-off arm 18 is arranged at output stage 16, and the casket dish 2 that is positioned at output stage 16 in order to ejection moves on output stage 16.Casket is taken inventory and is put device 19 in order to store a plurality of casket dishes 2.
Fig. 1 C to Fig. 1 H shows among Figure 1B, the course of action of disc conveyer device.Wherein, Fig. 1 C shows that push rod 13 will be moved to the buffer zone 121 on the delivery platform 12 by the casket dish 2 of casket dish accumulator tank 11 outputs.
Fig. 1 D shows that start push rod 14 moves to buffer zone 121, moves on delivery platform 12 with ejection casket dish 2, and at this moment, casket dish accumulator tank 11 outputs one casket dish 2 is to push rod 13 the place aheads.
Fig. 1 E show start push rod 14 with 2 ejections of casket dish to start district 122, aforesaid chip pickup head 17 can be put into the chip on the wafer casket dish 2 (not shown), at this moment, push rod 13 will be moved to the buffer zone 121 on the delivery platform 12 by the casket dish 2 of casket dish accumulator tank 11 outputs.
The casket dish 2 that Fig. 1 F demonstration start push rod 14 will be finished the chip placement moves to the boundary of delivery platform 12 and output stage 16.
Fig. 1 G shows that start push rod 14 moves to the side of casket dish 2, and ejection casket dish 2 moves towards output stage 16, and at this moment, casket dish accumulator tank 11 outputs one casket dish 2 is to push rod 13 the place aheads.
Fig. 1 H shows the side of start push rod 14 ejection casket dishes 2, casket dish 2 is moved to output stage 16, and then by kick-off arm 18 casket dish 2 is moved to casket and take inventory and put device 19, then start push rod 14 repeats aforesaid action again, moves to buffer zone 121 and moves on delivery platform 12 with the next casket dish 2 of ejection.
Above-mentioned disc conveyer device 10 only has a start push rod 14, though can make casket dish 2 on delivery platform 12, move by this start push rod 14, yet after start push rod 14 moves to output stage 16 with casket dish 2, this start push rod 14 needs the long time of cost, move to the position of this buffer zone 121 by the position of output stage 16, to obtain next casket dish 2, this moment, the crystal granules sorted machine must be waited for this start push rod 14 execution, caused waste of time.
In view of above-mentioned existing in prior technology shortcoming, be necessary to propose a kind of disc conveyer device, must wait for the problem of start push rod to improve the crystal granules sorted machine, improve the efficient of crystal granules sorted machine, and can be used on the similar equipment with disc conveyer device.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art and defective, a kind of disc conveyer device is provided, must wait for the problem of start push rod, to improve the efficient of crystal granules sorted machine to improve the crystal granules sorted machine.
According to above-mentioned purpose, the invention provides a kind of disc conveyer device, comprise: a delivery platform, this delivery platform comprise a buffer zone and a start district; One material feeding pushing rod, this material feeding pushing rod is arranged at delivery platform, and the one first casket dish that is positioned at buffer zone in order to ejection moves on delivery platform; One start push rod, this start push rod is arranged at delivery platform, and the one second casket dish that is positioned at the start district in order to ejection moves on delivery platform; And an output stage, this output stage is in order to carrying this second casket dish by this delivery platform output; Wherein, material feeding pushing rod and start push rod are with moving, this second casket dish ejection that will be positioned at the start district when the start push rod is during to output stage, material feeding pushing rod can will be positioned at this first casket dish ejection of buffer zone to the start district, this start push rod comprises one first start ejection end and one second start ejection end, earlier with this this second casket dish of first start ejection end ejection, again with this this second casket dish of second start ejection end ejection, this second casket dish ejection that will be positioned at this start district is to this output stage, this material feeding pushing rod comprises one first pan feeding ejection end and one second pan feeding ejection end, earlier with this this first casket dish of first pan feeding ejection end ejection, with this this first casket dish of second pan feeding ejection end ejection, this first casket dish ejection that will be positioned at this buffer zone is to this start district again.
Useful technique effect of the present invention is, utilize disc conveyer device of the present invention, can be in output casket dish, the casket dish that will be positioned at buffer zone moves into the start district, because the displacement of start push rod significantly reduces, required traveling time also reduces thereupon, not only can effectively improve the problem that the crystal granules sorted machine must be waited for the start push rod, and the also minimizing thereupon of required traveling time, the efficient that the casket dish is carried significantly improves.
Description of drawings
Figure 1A and Figure 1B show respectively in the prior art, the side schematic view of disc conveyer device and schematic top plan view;
Fig. 1 C to Fig. 1 H shows among Figure 1B, the course of action of disc conveyer device;
Fig. 2 A and Fig. 2 B show side schematic view and the schematic top plan view according to the disc conveyer device of a preferred embodiment of the present invention respectively;
Among Fig. 2 C to Fig. 2 F displayed map 2B, disc conveyer device course of action;
Fig. 3 A and Fig. 3 B show the side schematic view and the schematic top plan view of the disc conveyer device of another preferred embodiment according to the present invention respectively.
Symbol description among the figure
2 casket dishes
10 disc conveyer devices
11 casket dish accumulator tanks
12 delivery platforms
13 push rods
14 start push rods
16 output stages
17 chip pickup heads
18 kick-off arms
19 caskets are taken inventory and are put device
112 casket dish output units
121 buffer zones
122 start districts
20 disc conveyer devices
21 casket dish accumulator tanks
22 delivery platforms
23 push rods
24 material feeding pushing rods
25 start push rods
26 output stages
27 acting devices
28 kick-off arms
29 caskets are taken inventory and are put device
50 feeding devices
51 drive units
52 support bars
53 suction nozzles
212 casket dish output units
221 buffer zones
222 start districts
241 first pan feeding ejection ends
242 second pan feeding ejection ends
251 first start ejection ends
252 second start ejection ends
281 first discharging ejection ends
282 second discharging ejection ends
Embodiment
Some embodiments of the present invention will be described in detail as follows.Yet except following description, the present invention can also be widely implements at other embodiment, and protection scope of the present invention is not subjected to the qualification of embodiment, and its scope with claims is as the criterion.Moreover for clearer description being provided and being more readily understood the present invention, each several part is not drawn according to its relative size in the accompanying drawing, and some size is compared with other scale dependent and exaggerated; Incoherent detail section is not drawn fully yet, in the hope of graphic succinct.
Fig. 2 A and Fig. 2 B show side schematic view and the schematic top plan view according to the disc conveyer device of a preferred embodiment of the present invention respectively.This disc conveyer device 20, comprise a casket dish accumulator tank 21, a delivery platform 22, a push rod 23, a material feeding pushing rod 24, a start push rod 25, a kick-off arm 28, an output stage 26 and a casket and take inventory and put device 29, also comprise an acting device 27 in addition.
Casket dish accumulator tank 21, in order to store a plurality of casket dishes 2, this casket dish accumulator tank 21 has a casket dish output unit 212, each exportable casket dish 2.Push rod 23 is arranged at casket dish accumulator tank 21 belows, in order to pushing to delivery platform 22 by the casket dish 2 of casket dish accumulator tank 21 outputs.
Delivery platform 22 is in order to the casket dish 2 of carrying by 21 outputs of casket dish accumulator tank, and this delivery platform 22 comprises a buffer zone 221 and a start district 222.Acting device 27 is arranged at 222 tops, start district, in order to the casket dish 2 that is positioned at start district 222 is carried out start.This acting device 27 can be a chip pickup head, in order to the chip on the wafer is put into casket dish 2, or a chip detection head, in order to the chip on the casket dish 2 is detected.Material feeding pushing rod 24 is arranged at delivery platform 22, and this material feeding pushing rod 24 comprises one first pan feeding ejection end 241 and one second pan feeding ejection end 242, and the casket dish 2 that is positioned at buffer zone 221 in order to ejection moves on delivery platform 22.Start push rod 25 comprises one first start ejection end 251 and one second start ejection end 252, is arranged at delivery platform 22, and the casket dish 2 that is positioned at start district 222 in order to ejection moves on delivery platform 22.Wherein, material feeding pushing rod 24 and start push rod 25 be with moving, and casket dish 2 ejections that will be positioned at start district 222 when start push rod 25 are during to output stage 26, and material feeding pushing rod 24 can will be positioned at casket dish 2 ejections of buffer zone 221 to start district 222.
Output stage 26 is in order to the casket dish 2 of carrying by delivery platform 22 outputs.Kick-off arm 28 comprises one first discharging ejection end 281 and one second discharging ejection end 282, is arranged at output stage 26, and the casket dish 2 that is positioned at output stage 26 in order to ejection moves on output stage 26.Casket is taken inventory and is put device 29 in order to store a plurality of casket dishes 2.
Among Fig. 2 C to Fig. 2 F displayed map 2B, disc conveyer device course of action.Wherein, Fig. 2 C shows that start push rod 25 ejection casket dishes 2 move in start district 222, is arranged at acting device 27 (not shown) of 222 tops, start district, can carry out start to the casket dish 2 that is positioned at start district 222.When start device 27 is a chip pickup head, the chip on the wafer can be put into casket dish 2, or when start device 27 is a chip detection, can the chip on the casket dish 2 be detected.At this moment, material feeding pushing rod 24 also ejection casket dish 2 moves in buffer zone 221, and simultaneously, casket dish accumulator tank 21 outputs one casket dish 2 is to push rod 23 the place aheads.
Fig. 2 D shows that casket dish 2 ejections that start push rod 25 will be finished start move to the boundary of delivery platform 22 and output stage 26, and simultaneously, material feeding pushing rod 24 ejection casket dishes 2 move towards start district 222.
Fig. 2 E shows that material feeding pushing rod 24 also moved to the side of casket dish 2 when start push rod 25 moved to the side of casket dish 2.
Fig. 2 F shows the side of start push rod 25 ejection casket dishes 2, casket dish 2 is moved to output stage 26, and then by kick-off arm 28 casket dish 2 is moved to casket and take inventory and put device 29, at this moment, material feeding pushing rod 24 is the side of ejection casket dish 2 also, casket dish 2 is moved to start district 222, simultaneously, push rod 23 will be moved to the buffer zone 221 on the delivery platform 22 by the casket dish 2 of casket dish accumulator tank 21 outputs, material feeding pushing rod 24 repeats aforesaid action again with start push rod 25 then, material feeding pushing rod 24 moves to buffer zone 221 and is positioned at the casket dish 2 of buffer zone 221 with ejection, and simultaneously, start push rod 25 moves to start district 222 is positioned at start district 222 with ejection casket dish 2.
Fig. 3 A and Fig. 3 B show the side schematic view and the schematic top plan view of the disc conveyer device of another preferred embodiment according to the present invention respectively.Present embodiment has a feeding device 50, and in order to casket dish 2 is moved to the buffer zone 221 of delivery platform 22, this feeding device 50 comprises a drive unit 51, support bar 52 and at least one suction nozzle 53.This support bar 52 is arranged at this drive unit 51, and this support bar 52 has suction nozzle 53, after casket dish 2 is picked up with suction nozzle 53, delivers to buffer zone 221 by drive unit 51 again.According to present embodiment, aforementioned support bar 52 has the external form of a L type, but not as limit, the support bar 52 of L type can be avoided in moving process, bump with the structure of delivery platform 22, the space of delivery platform 22 is fully utilized, has very big effect for the design of board.
Utilize disc conveyer device of the present invention, can be in output casket dish, the casket dish that will be positioned at buffer zone moves into the start district, because the displacement of start push rod significantly reduces, required traveling time also reduces thereupon, not only can effectively improve the problem that the crystal granules sorted machine must be waited for the start push rod, and the also minimizing thereupon of required traveling time, the efficient that the casket dish is carried significantly improves.
The above embodiments only are explanation technological thought of the present invention and characteristics, its purpose makes those skilled in the art can understand content of the present invention and is implementing according to this, when can not with qualification claim of the present invention, be that all other do not break away from various equivalences that disclosed spirit finishes and change or modify and all be encompassed in the disclosed scope of the present invention, all should be included in the scope of claims.