CN101253281B - 工件承载装置 - Google Patents
工件承载装置 Download PDFInfo
- Publication number
- CN101253281B CN101253281B CN2006800315950A CN200680031595A CN101253281B CN 101253281 B CN101253281 B CN 101253281B CN 2006800315950 A CN2006800315950 A CN 2006800315950A CN 200680031595 A CN200680031595 A CN 200680031595A CN 101253281 B CN101253281 B CN 101253281B
- Authority
- CN
- China
- Prior art keywords
- drive
- workpiece carrier
- carrier device
- rotating frame
- work support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M13/00—Other supports for positioning apparatus or articles; Means for steadying hand-held apparatus or articles
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S269/00—Work holders
- Y10S269/90—Supporting structure having work holder receiving apertures or projections
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Retarders (AREA)
- Feeding Of Workpieces (AREA)
- Physical Vapour Deposition (AREA)
- Turning (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Automatic Assembly (AREA)
- Chain Conveyers (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Jigs For Machine Tools (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
Description
Claims (14)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005041016 | 2005-08-29 | ||
DE102005041016.2 | 2005-08-29 | ||
DECH122/06 | 2006-01-25 | ||
CH122/06 | 2006-01-25 | ||
CH00122/06A CH698143B1 (de) | 2006-01-25 | 2006-01-25 | Werkstückträgereinrichtung. |
PCT/CH2006/000387 WO2007025397A1 (de) | 2005-08-29 | 2006-07-24 | Werkstückträgereinrichtung |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101253281A CN101253281A (zh) | 2008-08-27 |
CN101253281B true CN101253281B (zh) | 2010-12-08 |
Family
ID=37037467
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2006800315950A Active CN101253281B (zh) | 2005-08-29 | 2006-07-24 | 工件承载装置 |
Country Status (15)
Country | Link |
---|---|
US (1) | US7588640B2 (zh) |
EP (1) | EP1917380B9 (zh) |
JP (1) | JP5313673B2 (zh) |
KR (1) | KR101296928B1 (zh) |
CN (1) | CN101253281B (zh) |
AT (1) | ATE426691T1 (zh) |
BR (1) | BRPI0615301B1 (zh) |
CA (1) | CA2620417C (zh) |
DE (1) | DE502006003280D1 (zh) |
ES (1) | ES2324493T3 (zh) |
MX (1) | MX2008002382A (zh) |
PL (1) | PL1917380T3 (zh) |
PT (1) | PT1917380E (zh) |
SI (1) | SI1917380T1 (zh) |
WO (1) | WO2007025397A1 (zh) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8361290B2 (en) * | 2006-09-05 | 2013-01-29 | Oerlikon Trading, Ag, Trubbach | Coating removal installation and method of operating it |
CA2666864C (en) * | 2006-10-19 | 2016-08-30 | Nanomech, Llc | Methods and apparatus for making coatings using ultrasonic spray deposition |
ATE503858T1 (de) * | 2007-10-08 | 2011-04-15 | Oerlikon Trading Ag | Werkstückträgereinrichtung |
ITBS20080210A1 (it) * | 2008-11-20 | 2010-05-21 | Abl Automazione S P A | Struttura di supporto per articoli destinati ad un procedimento di lavorazione, ad esempio una metallizzazione pvd o sputtering |
DE102010001218A1 (de) * | 2010-01-26 | 2011-07-28 | Esser, Stefan, Dr.-Ing., 52072 | Substratteller und Beschichtungsanlage zum Beschichten von Substraten |
CN103237680B (zh) * | 2010-12-02 | 2015-12-02 | C.劳勃.汉默斯坦两合有限公司 | 车辆座椅纵向调整装置的锁定装置以及用于制造锁定装置的方法和装置 |
DE102011113563A1 (de) | 2011-09-19 | 2013-03-21 | Oerlikon Trading Ag, Trübbach | Karussellschlitten für Vakuumbehandlungsanlage |
RU2507306C1 (ru) * | 2012-09-04 | 2014-02-20 | Открытое акционерное общество "Концерн "Центральный научно-исследовательский институт "Электроприбор" | Установка для напыления покрытий на прецизионные детали узлов гироприборов |
CN105734519B (zh) * | 2014-12-09 | 2018-03-06 | 宜昌后皇真空科技有限公司 | 一种刀具pvd镀膜自转转架 |
PL3583243T3 (pl) * | 2017-02-16 | 2023-03-06 | Oerlikon Surface Solutions Ag, Pfäffikon | Mocowanie narzędziowe dla wielu etapów procesu |
USD881242S1 (en) * | 2018-01-29 | 2020-04-14 | Oerlikon Surface Solutions Ag, Pfaffikon | Tool holder |
DE102018126862A1 (de) | 2018-10-26 | 2020-04-30 | Oerlikon Surface Solutions Ag, Pfäffikon | Werkstückträgereinrichtung und Beschichtungsanordnung |
DE102019110158A1 (de) | 2019-04-17 | 2020-10-22 | Oerlikon Surface Solutions Ag, Pfäffikon | Werkstückträgereinrichtung |
CN110760810B (zh) * | 2019-11-27 | 2022-04-08 | 中山凯旋真空科技股份有限公司 | 转架及具有其的镀膜设备 |
DE102020116888A1 (de) | 2020-06-26 | 2022-01-13 | Oerlikon Surface Solutions Ag, Pfäffikon | Vereinzelungsvorrichtung zum zuführen und vereinzeln von werkstücken und beladungssystem mit einer vereinzelungsvorrichtung und einer zufuhrvorrichtung |
CN114102474B (zh) * | 2021-12-02 | 2024-04-05 | 重庆恒伟林汽车零部件有限公司 | 一种可满足不同型号新能源汽车减速器试验用安装装置 |
CN116443330A (zh) * | 2023-02-09 | 2023-07-18 | 江苏华曼复合材料科技有限公司 | 一种聚氨酯smc成品塑膜封装机构 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1347110A (zh) * | 2000-10-11 | 2002-05-01 | 财团法人工业技术研究院 | 光盘承载装置 |
EP1153155B1 (de) * | 1998-12-15 | 2005-01-19 | Balzers Aktiengesellschaft | Planetensystem-werkstückträger und verfahren zur oberflächenbehandlung von werkstücken |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0610954Y2 (ja) * | 1988-11-30 | 1994-03-23 | 株式会社ジューキ | 動力伝達装置 |
DD287164A7 (de) | 1989-02-28 | 1991-02-21 | Veb Hochvakuum Dresden,De | Substrathalterung mit planetenbewegung |
WO1999033093A1 (de) * | 1997-12-22 | 1999-07-01 | Unaxis Trading Ag | Vakuumbehandlungsanlage |
DE19803278C2 (de) * | 1998-01-29 | 2001-02-01 | Bosch Gmbh Robert | Werkstückträger und dessen Verwendung zur Behandlung und Beschichtung von Werkstücken |
JP2001286027A (ja) * | 2000-03-31 | 2001-10-12 | Taiton Kk | スパイラルチューブ及びそのスパッタリング方法 |
DE50205082D1 (de) | 2001-05-08 | 2006-01-05 | Unaxis Balzers Ag | Werkstückträger |
DE102004027989B4 (de) * | 2004-06-09 | 2007-05-10 | Esser, Stefan, Dr.-Ing. | Werkstückträgervorrichtung zum Halten von Werkstücken |
-
2006
- 2006-07-24 PT PT06761238T patent/PT1917380E/pt unknown
- 2006-07-24 KR KR1020087004733A patent/KR101296928B1/ko active IP Right Grant
- 2006-07-24 DE DE502006003280T patent/DE502006003280D1/de active Active
- 2006-07-24 CA CA2620417A patent/CA2620417C/en active Active
- 2006-07-24 ES ES06761238T patent/ES2324493T3/es active Active
- 2006-07-24 CN CN2006800315950A patent/CN101253281B/zh active Active
- 2006-07-24 WO PCT/CH2006/000387 patent/WO2007025397A1/de active Application Filing
- 2006-07-24 PL PL06761238T patent/PL1917380T3/pl unknown
- 2006-07-24 BR BRPI0615301-1A patent/BRPI0615301B1/pt active IP Right Grant
- 2006-07-24 JP JP2008528310A patent/JP5313673B2/ja active Active
- 2006-07-24 AT AT06761238T patent/ATE426691T1/de active
- 2006-07-24 EP EP06761238A patent/EP1917380B9/de active Active
- 2006-07-24 MX MX2008002382A patent/MX2008002382A/es active IP Right Grant
- 2006-07-24 SI SI200630328T patent/SI1917380T1/sl unknown
- 2006-07-27 US US11/494,669 patent/US7588640B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1153155B1 (de) * | 1998-12-15 | 2005-01-19 | Balzers Aktiengesellschaft | Planetensystem-werkstückträger und verfahren zur oberflächenbehandlung von werkstücken |
CN1347110A (zh) * | 2000-10-11 | 2002-05-01 | 财团法人工业技术研究院 | 光盘承载装置 |
Also Published As
Publication number | Publication date |
---|---|
ES2324493T3 (es) | 2009-08-07 |
US7588640B2 (en) | 2009-09-15 |
KR20080038185A (ko) | 2008-05-02 |
PT1917380E (pt) | 2009-06-25 |
WO2007025397A1 (de) | 2007-03-08 |
SI1917380T1 (sl) | 2009-10-31 |
CA2620417C (en) | 2014-08-26 |
EP1917380B1 (de) | 2009-03-25 |
JP5313673B2 (ja) | 2013-10-09 |
ATE426691T1 (de) | 2009-04-15 |
DE502006003280D1 (de) | 2009-05-07 |
CN101253281A (zh) | 2008-08-27 |
BRPI0615301A2 (pt) | 2011-05-17 |
PL1917380T3 (pl) | 2009-08-31 |
EP1917380B9 (de) | 2010-02-24 |
KR101296928B1 (ko) | 2013-08-20 |
CA2620417A1 (en) | 2007-03-08 |
US20070057138A1 (en) | 2007-03-15 |
MX2008002382A (es) | 2008-03-18 |
JP2009506214A (ja) | 2009-02-12 |
BRPI0615301B1 (pt) | 2019-06-25 |
EP1917380A1 (de) | 2008-05-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101253281B (zh) | 工件承载装置 | |
JP6535135B2 (ja) | アンテナ伝動装置及びアンテナ | |
CN1840382B (zh) | 枢轴装置及其制造方法,以及使用该装置的车辆座椅 | |
CN105514610B (zh) | 一种天线传动装置及天线 | |
CN1841242B (zh) | 包括至少两个调节系统的手表 | |
CN100460908C (zh) | 一种光纤旋转连接器 | |
US8596626B2 (en) | Workpiece carrier device | |
JP5242082B2 (ja) | ラベリング・マシンの容器保持プレートを駆動するためのモータ | |
CN103562004A (zh) | 座椅升降器 | |
US6398006B1 (en) | Rotary turret with pedestals and a method of controlling rotation thereof | |
CN102455652A (zh) | 具有模块化模拟显示件的时计 | |
CN101092190B (zh) | 用于贴标机的板的马达、马达-板单元以及旋转贴标机 | |
US20150136029A1 (en) | Film deposition system | |
CN201985685U (zh) | 用于发光旋转物体的电机 | |
CN105324513B (zh) | 可搬型旋转装置及成膜装置 | |
US20120090541A1 (en) | Workpiece carrier and deposition device having same | |
CN109586003A (zh) | 天线装置 | |
CN108087508A (zh) | 天线下倾角的传动装置及其切换组件 | |
US20200200248A1 (en) | Transmission module, gripper module with transmission module and gripper device with gripper module | |
CN103183161B (zh) | 用于传送容器贴标签用装配件的设备 | |
CN106964543B (zh) | 一种张弛筛杠杆传动系统 | |
CN108412744A (zh) | 一种带有输出齿盘行星减速箱和h型同步盘的蠕动泵 | |
CN210805099U (zh) | 一种新型多幅面广告展示装置 | |
CN105761604A (zh) | 一种多功能模块化行星传动教具 | |
CN105257783B (zh) | 一种大传动比的减速器 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: Swiss Te Lui Bach Patentee after: OERLIKON TRADING AG, TRuBBACH Address before: Swiss Te Lui Bach Patentee before: OERLIKON TRADING AG, TRuBBACH Address after: Swiss Te Lui Bach Patentee after: OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON Address before: Swiss Te Lui Bach Patentee before: OERLIKON TRADING AG, TRuBBACH |
|
CP02 | Change in the address of a patent holder | ||
CP02 | Change in the address of a patent holder |
Address after: Swiss hole Patentee after: OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON Address before: Swiss Te Lui Bach Patentee before: OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON |