CN101050942A - Image pickup apparatus equipped with a microscope and size measuring apparatus - Google Patents
Image pickup apparatus equipped with a microscope and size measuring apparatus Download PDFInfo
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- CN101050942A CN101050942A CN 200710084046 CN200710084046A CN101050942A CN 101050942 A CN101050942 A CN 101050942A CN 200710084046 CN200710084046 CN 200710084046 CN 200710084046 A CN200710084046 A CN 200710084046A CN 101050942 A CN101050942 A CN 101050942A
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Abstract
The present invention provides a system which has a microscope image device with multiple cameras and size measurement device, and can inspect the area when anyone of the cameras is out of the way. To the multiple image devices, there is backoff area respectively, and each camera has the stroke to the measurement point and can cover by other camera when one camera is out of way or non working state.
Description
Technical field
The size that the present invention relates to will to be formed at by the microscope image pick-up device pattern on the substrate is amplified the dimension measuring device that comes measurement size, particularly the utilization system of a plurality of cameras.
Background technology
Dimension measuring device is to carry out Flame Image Process, the device of measurement size automatically by the pattern image that the pattern image that microscope will obtain the subject irradiating illumination light that is formed on pattern on the camera substrate etc. amplifies, the camera head by CCD camera etc. is obtained this image pickup.
Under situation, have from microscope by coaxial reflected illumination and handle the indirect illumination mode of the image that obtains by its reflected light and from the adjust the telescope to one's eyes irradiation and handle the transmission illumination mode that sees through the image that light obtains by it of the dorsal part of test portion to subject irradiating illumination light.
In the such dimensional measurement that approaches transparent substrate (below be called glass substrate) of LCD (Liquid Crystal Device) substrate, possess two lighting mechanisms, separate use according to the object pattern.
In the past, the measurement of the pattern dimension of glass substrate generally was to realize by structure shown in Figure 3.Fig. 3 is the block diagram that is used for illustrating dimension measuring device in the past, is the figure from last observation dimension measuring device.In addition, Fig. 4 is used for the control block diagram of method of control of dimension measuring device of structure of key diagram 3.
In Fig. 3 and Fig. 4, be fixed on the Y direction moving stage 87 as the measured object 86 of glass substrate, under the effect of objective table driving control device 88, move to Y direction (arrow 98).
On the other hand, the microscope gauge head (head) 81 that possesses camera head and lighting device is arranged on and moves up and down on the objective table 83, is used for the automatic focusing control of the focus of aligming microscope image under the effect of image processing apparatus 89.
In addition, image processing apparatus 89 control microscope gauge heads 81, illumination adjustments, the lens multiplying power of carrying out microscope gauge head 81 selected, the dimensional measurement of focus automatically control, shooting and Flame Image Process.
Move up and down objective table 83 and be arranged on and be used on the directions X moving stage 82 of mobile microscope gauge head 81, directions X moving stage 82 moves up and down objective table 83 and moves along directions X microscope gauge head 81 is moved to directions X (arrow 99) by making under the control of objective table driving control device 88.
Dispose transmission illumination device 84 in the bottom of microscope gauge head 81, under the effect of objective table driving control device 88, synchronously move along directions X with microscope gauge head 81.
Objective table driving control device 88 is by being used for driving the driving circuit portion of Y direction moving stage 87 and directions X moving stage 82 and carrying out the mobile control of objective table and the objective table control part of position coordinates management constitutes, carry out each objective table (Y direction moving stage 87 and directions X moving stage 82) to location from the position coordinates of objective table control device 90 indications.
Moving range end at each objective table is provided with the limit sensors (not shown) that is used for preventing mechanical conflicts, if objective table driving control device 88 detects its signal, then this objective table is promptly stopped.
Move up and down at directions X moving stage 82, microscope gauge head under the effect of objective table 83, transmission illumination device directions X moving stage 85 and Y direction moving stage 87, microscope gauge head 81 can move to the position arbitrarily on the measured object 86, after microscope gauge head 81 moves to arbitrarily the position, carry out dimensional measurement (with reference to Patent Document 1) by image processing apparatus 89.
[Patent Document 1] spy opens the 2002-228411 communique
LCD maximizes in recent years with glass substrates such as substrates and constantly develops, and counting of thereupon measuring on 1 sheet glass substrate increases.
On the other hand, though carried out the improvement of the needed time of measurement of per 1 point, but because the expansion rate of being unable to catch up with the maximization of substrate so handle in order to finish the measurement that needs, needs in 1 production line than present increase dimension measuring device objective table number.
If increased the objective table number of dimension measuring device, the problem that then has investment amount significantly to rise.In order to prevent the increase of such investment amount, the productive temp time that significantly shortens under the situation of the objective table number that does not increase dimension measuring device in the dimensional measurement operation of glass substrate becomes bigger problem.
In order to solve above-mentioned problem, a plurality of microscope gauge heads are set and the method for patterning of measuring different positions with a plurality of microscopes simultaneously practicability.
This method is measured subject area to be divided into a plurality of, and the pattern of diverse locations is measured in a zone after making a microscope gauge head be responsible for cutting apart simultaneously by a plurality of microscopes.In the case, owing to need a plurality of microscope gauge heads, microscopical action objective table and image processing apparatus, out of order possibility increases, the work efficiency of device descends and the problem of the stability decreases of production line.
Promptly, if a part or the image processing apparatus fault of a part, for example microscope gauge head or the microscopical action objective table of device, then can not carry out the measurement of the measured subject area of cutting apart that system was responsible for of fault, so the problem of the measurement that can not carry out the whole zone of measured object is arranged.In addition, also have the fault generation device warning because of a part, the problem that apparatus system integral body is failure to actuate.The problem that huge expense such as outfit that spare unit takes place for the recovery treatment mechanism of setting up fault or maintenance mechanism fees of maintenance is arranged in addition.
On the other hand, under the situation of the recovery treatment mechanism of not setting up fault, can not the long-play device, even so realized the significantly shortening of productive temp time, also need to prepare backup unit, the problem that can not realize that the investment amount that brought by measurement mechanism objective table number reduced in size reduces is arranged.
Summary of the invention
The objective of the invention is to address the above problem, employing is provided with a plurality of microscope gauge heads, measures the method for patterning of diverse locations by a plurality of microscopes simultaneously for the shortening that realizes the productive temp time, and the device reserve function during substantial fault solves that device work efficiency that fault brings descends or the problem of the stability decreases of production line.
In order to achieve the above object, dimension measuring device of the present invention is provided with a plurality of microscope gauge heads in order to enrich to adopt, measure the metering system of the method for patterning of diverse location simultaneously by a plurality of microscopes, device reserve function during with fault, the problem of the work ratio decline of the device that the solution fault is brought and the stability decreases of production line, following structure and control have been carried out, make a plurality of microscope gauge heads and transmission illumination device have the stroke that can on the measured zone on the glass substrate, move respectively with linearity, even under the abnormality of at least 1 microscope gauge head fault or inoperative etc., also make the microscope gauge head of fault or off working state move to retreating position, other microscope gauge heads are moved in the Zone Full in the measured zone of measured object and can measure processing.
And then, be in the state of retreating position at least by 1 microscope gauge head of sensor, carry out following software control: sensor to above-mentioned state during, make this microscope gauge head be in off working state, even, also can measure by remaining microscope gauge head with any or all dump of this microscope gauge head, relevant action axle or associated images treating apparatus.
In addition, on the directions X action axle of a plurality of microscope gauge heads and transmission illumination device, be respectively arranged with the limit sensors that before mechanically conflicting, detects, always monitor this signal, and always monitor the residual quantity that reaches the coordinate of the directions X between a plurality of transmission illumination devices between a plurality of microscope gauge heads, so that slow down in this residual quantity is predetermined value the time and stop, preventing mechanical conflicts by software control, realize that failure rate reduces.
That is, the microscope image pick-up device of relevant technical scheme 1 of the present invention possesses: the 1st objective table, can move abreast with cross one another the 1st direction and the 1st direction in the 2nd direction on the plane domain that has a plurality of measurement points on measured object; N camera, be set on above-mentioned the 1st objective table, can on above-mentioned the 1st objective table, move independently respectively abreast, to above-mentioned measured object shooting with above-mentioned the 2nd direction, measurement point in N the zone after cutting apart on above-mentioned plane domain moves respectively, and N is the integer more than 2; Move up and down objective table, this camera is moved up and down respectively independently; Abnormality detection mechanism is detected respectively unusually for an above-mentioned N camera; And control gear; Above-mentioned control gear is controlled, so that detect under the unusual situation in above-mentioned abnormality detection mechanism, make this camera keep out of the way the zone, do not detect unusual camera and can move at the whole plane domain of above-mentioned measured object by above-mentioned testing agency from the plane domain of above-mentioned measured object.
In addition, preferably, the microscope image pick-up device of relevant technical scheme 2 of the present invention also possesses: N transmission illumination device is corresponding respectively with above-mentioned N camera; And transmission illumination moving stage, above-mentioned transmission illumination device is moved to synchronously the position on the above-mentioned plane domain of an above-mentioned N camera, above-mentioned control gear, detect under the unusual situation of camera in above-mentioned abnormality detection mechanism, make corresponding transmission illumination device keep out of the way the zone from the plane domain of above-mentioned measured object.
In addition, preferably, the microscope image pick-up device of relevant technical scheme 3 of the present invention also possesses: N transmission illumination device is corresponding respectively with above-mentioned N camera; And transmission illumination moving stage, above-mentioned transmission illumination device is moved to synchronously the position on the above-mentioned plane domain of an above-mentioned N camera, the unusual of above-mentioned N transmission illumination device also detects in above-mentioned abnormality detection mechanism, above-mentioned control gear is controlled, so that under the unusual situation of any that detects above-mentioned N transmission illumination device, make this transmission illumination device keep out of the way the above-mentioned zone of keeping out of the way together, by not detecting the corresponding camera of unusual transmission illumination device with above-mentioned testing agency and can moving at the whole plane domain of above-mentioned measured object with corresponding camera.
In addition, dimension measuring device of the present invention possesses: technical scheme 1 described microscope image pick-up device; And N image processing part, corresponding with an above-mentioned N camera, according to carrying out the measurement of a plurality of measurement points of above-mentioned measured object from the picture signal of above-mentioned N camera output, the unusual of an above-mentioned N image processing part also detects in above-mentioned abnormality detection mechanism, above-mentioned control gear, detect in above-mentioned abnormality detection mechanism under any unusual situation of an above-mentioned N image processing part, make the camera corresponding keep out of the way the above-mentioned zone of keeping out of the way with detecting above-mentioned unusual image processing part.
In addition, dimension measuring device of the present invention possesses: technical scheme 2 or 3 described microscope image pick-up devices; And N image processing part, corresponding with an above-mentioned N camera, according to carrying out the measurement of a plurality of measurement points of above-mentioned measured object from the picture signal of above-mentioned N camera output, the unusual of an above-mentioned N image processing part also detects in above-mentioned abnormality detection mechanism, above-mentioned control gear, detect in above-mentioned abnormality detection mechanism under any unusual situation of an above-mentioned N image processing part, make camera and the transmission illumination device corresponding keep out of the way the above-mentioned zone of keeping out of the way with detecting above-mentioned unusual image processing part.
The effect of invention:
According to the present invention, can in 1 objective table device, use a plurality of microscopes to measure simultaneously, can realize the significantly shortening of productive temp time.
In addition, by a plurality of microscope action axles are had with illumination action axle the actuating length more than needed of keeping out of the way the zone is arranged, and carry out appropriate software and control, device reserve function when having enriched fault, can prevent the decline of work ratio of the device that fault is brought and the problem that line stability descends, reliability increases.
And then, under the situation that has a plurality of identical patterns on the glass substrate,, under the situation of having only 1 pattern, only drive 1 stature and measure by a plurality of measurements, can possess that to switch be by a plurality of actions or the function by the action of 1 stature.Therefore, can carry out various measurements according to the kind of substrate, the kind of product or the kind of measuring, so in 1 objective table device, can carry out multiple using method.
Description of drawings
Fig. 1 is the block diagram that is used for illustrating the dimension measuring device of one embodiment of the invention.
Fig. 2 is the control block diagram of method of control that is used for illustrating the dimension measuring device of one embodiment of the invention.
Fig. 3 is the block diagram that is used for illustrating dimension measuring device in the past.
Fig. 4 is the control block diagram of control method that is used for illustrating the dimension measuring device of structure in the past.
Fig. 5 is the figure of structure that is used for illustrating an embodiment of wire width measuring device of the present invention.
Fig. 6 positional fault that to be explanation produce because of the lift-launch deviation of test portion and the figure of revisal.
Fig. 7 is the block diagram of structure of an embodiment of expression wire width measuring device of the present invention.
Fig. 8 is expression each the process flow diagram of an embodiment of sequence of movement of the present invention.
Fig. 9 is expression each the process flow diagram of an embodiment of sequence of movement of the present invention.
Figure 10 is expression each the process flow diagram of an embodiment of sequence of movement of the present invention.
Figure 11 is expression each the process flow diagram of an embodiment of sequence of movement of the present invention.
Figure 12 is expression each the process flow diagram of an embodiment of sequence of movement of the present invention.
Figure 13 is expression each the process flow diagram of an embodiment of sequence of movement of the present invention.
Figure 14 is expression each the process flow diagram of an embodiment of sequence of movement of the present invention.
Figure 15 is expression each the process flow diagram of an embodiment of sequence of movement of the present invention.
Figure 16 is expression each the process flow diagram of an embodiment of sequence of movement of the present invention.
Figure 17 is expression each the process flow diagram of an embodiment of sequence of movement of the present invention.
Figure 18 is expression each the process flow diagram of an embodiment of sequence of movement of the present invention.
Figure 19 is expression each the process flow diagram of an embodiment of sequence of movement of the present invention.
Figure 20 is the process flow diagram of an embodiment of expression sequence of movement of the present invention.
Embodiment
Especially the dimension measuring device that is formed on the pattern on the glass substrate by LCD wire width measuring device etc. describes microscope image pick-up device of the present invention and dimension measuring device.
Fig. 1 is the block diagram that is used for illustrating the dimension measuring device of one embodiment of the invention, is the figure from last observation dimension measuring device.In addition, Fig. 2 is used for the control block diagram of method of control of dimension measuring device of structure of key diagram 1.
In Fig. 1 and Fig. 2, be fixed on the Y direction moving stage 87 as the measured object 86 of the glass substrate of LCD substrate etc., move in the effect lower edge of objective table driving control device 88 ' Y direction (arrow 98).
On the other hand, the microscope gauge head 81 that possesses camera head and lighting device is arranged on as camera and moves up and down on the objective table 83, is used for the automatic focusing control of the focus of aligming microscope image under the effect of image processing apparatus 89.In addition, the microscope gauge head 91 that possesses camera head and lighting device is arranged on and moves up and down on the objective table 93, is used for the automatic focusing control of the focus of aligming microscope image under the effect of image processing apparatus 97.
In addition, image processing apparatus 89 control microscope gauge heads 81, illumination adjustments, the lens multiplying power of carrying out microscope gauge head 81 selected, focusing control automatically, shooting and the dimensional measurement by Flame Image Process.Equally, image processing apparatus 97 control microscope gauge heads 91, illumination adjustments, the lens multiplying power of carrying out microscope gauge head 91 selected, focusing control automatically, shooting and the dimensional measurement by Flame Image Process.
That is, microscope gauge head 81 and 91 can under the effect of objective table driving control device 88 ' respectively independently the position of the measurement point in the plane domain of measured object move.Image processing apparatus 89 and 97 can also be controlled microscope gauge head 81 and 91 and carry out the position revisal respectively, and then, carry out independently respectively that illumination adjustments, lens multiplying power are selected, focusing control automatically, shooting and the dimensional measurement by Flame Image Process.
Moving up and down objective table 83 is arranged on and is used on the directions X moving stage 82 of mobile microscope gauge head 81, make under the control of objective table driving control device 88 ' by directions X moving stage 82 to move up and down objective table 83 and move, microscope gauge head 81 is moved along directions X (arrow 99) along directions X.Equally, moving up and down objective table 93 is arranged on and is used on the directions X moving stage 92 of mobile microscope gauge head 91, make under the control of objective table driving control device 88 ' by directions X moving stage 92 to move up and down objective table 93 and move, microscope gauge head 91 is moved along directions X along directions X.
Moving up and down between objective table 93 and the directions X moving stage 92, be provided with and make microscope gauge head 91 fine move the Y direction fine motion objective table 94 of (little moving), the measured pattern position deviation (aftermentioned) that revisal produces with respect to the error of the sense of rotation of objective table because of the eccentric offset of measured object 86 lens when the effect lower edge of Y direction moving stage 87 Y direction moves, between the microscope gauge head or measured object 86 along the Y direction.
Directions X moving stage 82 and 92 has can make microscope gauge head 81,91 strokes that move at the whole plane domain of measured object respectively, at at least 1 microscope gauge head, transmission illumination device or image processing apparatus are under the situation of abnormality of fault or inoperative, if abnormality detection mechanism (not shown) detects this abnormality, then objective table driving control device 88 ' makes the microscope gauge head of fault or off working state and the transmission illumination device corresponding with it, the transmission illumination device of abnormality and the microscope gauge head corresponding and move to retreating position corresponding to the microscope gauge head and the transmission illumination device of the image processing apparatus of abnormality with it, remaining microscope gauge head and transmission illumination device can move at the whole plane domain of measured object, can move to all measurement point positions of the measurement point position that the camera that comprises the mobile status that is in fault or inoperative etc. is responsible for.
Therefore, for transmission illumination device 84 and 95, also has the stroke that can move respectively in measured zone, even at least 1 transmission illumination device is under fault or the off working state, also make this microscope gauge head and transmission illumination device move to retreating position, other microscope gauge head and transmission illumination device can move with linearity in whole measured zone.
In addition, on the retreating position separately of microscope gauge head 81 and 91, dispose retreating position detecting sensor (not shown), be in at least 1 microscope gauge head in this sensor retreating position state during, make this microscope gauge head become off working state, even carry out with any or all dump of this microscope gauge head, its relevant action axle or associated images treating apparatus 89,97, the software control that also can measure by remaining microscope gauge head, its relevant action axle and associated images treating apparatus.
In addition, above-mentioned control is undertaken by system control device 90 ', and the detection or the duty that possess fault in this system control device 90 ' still are the testing agency of off working state, but also can have testing agency in addition.
Objective table driving control device 88 ' by be used for driving objective table driving circuit and carry out the mobile control of objective table and the objective table control device of position coordinates management constitutes, each objective table is navigated to from the position coordinates of system control device 90 ' indication.
In addition, objective table driving control device 88 ' always monitors between a plurality of microscope gauge heads and the residual quantity of the coordinate of the directions X between a plurality of transmission illumination device, in the time of in this residual quantity is the value of being scheduled to, carries out software control so that its deceleration stops, and avoids a conflict.
Moving range end at each objective table is provided with the limit sensors that is used for preventing mechanical conflicts, if objective table driving control device 88 ' detects its signal, then objective table is promptly stopped.
And then, on directions X moving stage 82 and 92, be respectively equipped with the limit sensors (not shown) that before mechanically conflicting, detects, objective table driving control device 88 ' always monitors its signal, and always monitor the residual quantity of the coordinate of the directions X between each microscope gauge head, in the time of in this residual quantity becomes predetermined value, by carrying out software control so that its deceleration stops to prevent mechanical conflicts.
Equally, on transmission illumination device directions X moving stage 85 and 96, also be respectively arranged with the limit sensors that before mechanically conflicting, detects, objective table driving control device 88 ' always monitors its signal, and always monitor the residual quantity of the coordinate of the directions X between each transmission illumination device, in the time of in this residual quantity becomes predetermined value, by carrying out software control so that its deceleration stops to prevent mechanical conflicts.
And then, microscope gauge head directions X moving stage 82 and 92, move up and down objective table 83 and 93, transmission illumination device directions X moving stage 85 and 96 and the effect of Y direction moving stage 87 under, each microscope gauge head 81 and 91 and transmission illumination device 84 and 95 can move to position arbitrarily on the measured object 86, at measured object along moment that the Y direction moves, each microscope gauge head moves to directions X simultaneously, and microscope gauge head 91 is mobile slightly along the Y direction.Then, when end is moved, on each the different position on the measured object 86, roughly side by side carry out measurement by each microscope gauge head independently and handle by Control Software.
In addition, in the above-described embodiments, being to move and structure that camera moves by Y direction moving stage, but also can being the structure that glass substrate is moved along the Y direction, also can be the structure that glass substrate and camera are moved.
And then, in the above-described embodiments, by with microscope gauge head 81, directions X moving stage 82, move up and down objective table 83, transmission illumination device 84, transmission illumination device directions X moving stage 85, and image processing apparatus 89 is handled the situation of the combination that unit controls as 1 group measurement, with with microscope gauge head 91, directions X moving stage 92, move up and down objective table 93, transmission illumination device 95, transmission illumination device directions X moving stage 96, and image processing apparatus 97, and Y direction fine motion objective table 94 handles the situation of the combination that unit controls as 1 group measurement, and embodiments of the invention have been described.
But, also can not be that as above to state embodiment be two combination like that, but the combination more than 3 in addition, also can be the structure that a plurality of Y direction moving stages are arranged.
In addition, at microscope gauge head 81, directions X moving stage 82 or move up and down under wantonly at least 1 wantonly at least 1 situation of objective table 83, also can and move up and down objective table 93 and the combination of transmission illumination device 84 and transmission illumination device directions X moving stage 85 is carried out to measure and handled by remaining combination, for example microscope gauge head 91, directions X moving stage 92 for fault or off working state for fault or off working state and transmission illumination device 95 or transmission illumination device directions X moving stage 96.
In addition, under the situation of image processing apparatus 89 and 97, also can carry out same processing, also can and move up and down combination, transmission illumination device and the combination of transmission illumination device directions X moving stage and the combination of image processing apparatus of objective table, measure with in running order carrying out each other and handle microscope gauge head, directions X moving stage.
In addition, the foregoing description is illustrated the measurement in the transmission illumination mode, but with the measurement of indirect illumination mode and transmission illumination mode and the time spent also can be described as same, under the situation of having only the indirect illumination mode, do not need transmission illumination device and transmission illumination device directions X moving stage, correspondingly structure and processing all become simple.
In addition, the maximization of the FPD (Flat Panel Display) of LCD substrate etc. in recent years constantly develops, the method for making of on 1 sheet glass substrate, making a plurality of products as above-mentioned embodiment not only, the situation that also can expect on 1 sheet glass substrate, only making the pattern of 1 objective table FPD product.
On 1 such plate base, only make under the situation of 1 product pattern,, do not need to make a plurality of heads to work simultaneously owing to do not measure or check the identical pattern of other products by a plurality of cameras.
Thereby if use 1 group or camera, image processing apparatus and the transmission illumination device of organizing according to product, then the present invention can also be applied in the product of a plurality of purposes more, and it is big that usable range becomes.In addition, in the case, also obsolete equipment can be pulled down and safeguard.
As the above embodiments, can on 1 objective table device, use a plurality of microscopes and measurement simultaneously, can realize the significantly shortening of productive temp.In addition, by a plurality of microscopes action axle and transmission illumination action axle being had have the actuating length more than needed of keeping out of the way the zone, carrying out appropriate software again and control, device reserve function in the time of can enriching fault prevents the work efficiency decline of the device that fault is brought and the problem of productive stability decreases.
Below further specify along the Y direction fine motion objective table 94 that the Y direction fine moves (little moving) for the microscope gauge head 91 that makes among Fig. 1 and Fig. 2.
According to Fig. 5 and Fig. 6 one embodiment of the invention are described.Fig. 5 is the figure that is used for illustrating the structure of LCD (the Liquid Crystal Display) wire width measuring device that adopts double end mode of the present invention.Fig. 5 (a) is the vertical view from last finder, and Fig. 5 (b) is the figure that observes the vertical view of Fig. 5 (a) from the direction of arrow A, and Fig. 5 (c) is the figure that observes the vertical view of Fig. 5 (a) from the direction of arrow B.
The structure and the direction of action of shifting axle of the LCD wire width measuring device of double end mode is described according to Fig. 5.The 101st, the loading pedestal, the 103rd, measured object, the 102nd, carry the test portion objective table of measured object 103.Be fixed with test portion objective table 102 on loading pedestal 101, measured object 103 is sent into or is passed out on the test portion objective table 102 by not shown delivery section.The measured object of sending into from delivery section 103 is fixed on the test portion objective table 102 by the method for vacuum suction etc.For example, measured object 103 is fixed on the test portion objective table 102 by the not shown adsorbing mechanism absorption of the LCD live width device of double end mode.Measured object 103 for example is the tabular matrix of substrate etc., measures or check the live width etc. of the film figure after the coating that is formed on the tabular matrix.Tabular matrix for example is the TFT (Thin Film Transistor) or the semi-conductive mask of LCD (LiquidCrystal Display) substrate.
The LCD wire width measuring device of double end mode is the LCD wire width measuring device that possesses two shooting heads, and the LCD wire width measuring device of a so-called N mode is the LCD wire width measuring device (N is the natural number more than 2) that possesses N shooting head.
The 1st, the beam of Y-axis, the 2nd, the guidance part of X1 axle, the 3rd, the guidance part of X2 axle.The beam 1 of Y-axis is parallel to X-axis (in Fig. 5 (a) along the paper left and right directions) along the guidance part 3 of the guidance part 2 of X1 axle and X2 axle and moves.The rail portion of the beam 1 of the Y-axis track of Y-axis (below be called) is for respect to the X-axis perpendicular configuration.In addition, also can make the height of guidance part 3 of the guidance part 2 of X1 axle and X2 axle lower and the beam 1 of Y-axis is made a type (door frame) structure.
The 4th, the guidance part of Y1 axle, the 5th, the guidance part of Y2 axle.The guidance part 4 of Y1 axle and the guidance part 5 of Y2 axle move respectively independently along the track of Y-axis.In addition, the guidance part of the guidance part of Y1 axle and Y2 axle moves along the direction (Y-axis (about the middle paper of Fig. 5 (a)) direction) with respect to the X-axis quadrature at this moment.
The 6th, the guidance part of Z1 axle, the 7th, the guidance part of Z2 axle.The guidance part 6 of Z1 axle carries on the guidance part 4 of Y1 axle, and the guidance part 7 of Z2 axle carries on the guidance part 5 of Y2 axle.The guidance part 6 of Z1 axle moves on Z axle (paper above-below direction in Fig. 5 (b)) direction along the guidance part 4 of Y1 axle, and is same, and the guidance part 7 of Z2 axle moves on Z-direction along the guidance part 5 of Y2 axle.
The 8th, the guidance part of Δ X1 axle, the 9th, the guidance part of Δ X2 axle, 10 and 11 is shooting heads.The guidance part 8 of Δ X1 axle carries on the guidance part 6 of Z1 axle, and the guidance part 9 of Δ X2 axle carries on the guidance part 7 of Z2 axle.
And then, in the embodiment of Fig. 5, be equipped with and shooting head 10 and the 11 transmission illumination axis mechanisms that move in couples respectively.That is, the 12nd, the Py1 axle of shooting head 10, the 13rd, the Py2 axle of shooting head 11, the 14th, the Δ Px1 axle of shooting head 10, the 15th, the Δ Px2 axle of shooting head 11.
And then, on Py1 axle 12, be provided with Δ Px1 axle 14, on Py2 axle 13, be provided with Δ Px2 axle 15.On Δ Px1 axle 14, be equipped with transmission illumination 16, on Δ Px2 axle 15, be equipped with transmission illumination 17.
If transmission illumination 16 moves along Δ Px1 axle 14, then with the mobile interlock along Δ X1 axle 8 of shooting head 10, for example the ejaculation central shaft of the illumination light of transmission illumination 16 is identical optical axises 101 with the incident light axis of the head 10 of making a video recording.
Equally, if transmission illumination 17 moves along Δ Px2 axle 15, then with the mobile interlock along Δ X2 axle 9 of shooting head 11, for example the ejaculation central shaft of the illumination light of transmission illumination 17 is identical optical axises 102 with the incident light axis of the head 11 of making a video recording.
In addition, in Fig. 5 (b), make the part of beam 1 and be installed in Py1 axle 12, Py2 axle 13, Δ Px1 axle 14, Δ Px2 axle 15 and transmission illumination 16,17 on the beam 1 and test portion objective table 102 mixes and has from appreciable position of the direction of arrow B and the position that can't see, as the figure of easy reading, not correct side view.Equally, Fig. 5 (c) also is the cut-open view of signal.
Fig. 6 is used for the lift-launch deviation of test portion required for the present invention is described and the positional fault that takes place and the figure of revisal.The transverse axis of Fig. 6 is represented the moving direction of the X-axis on the test portion objective table 102 of wire width measuring device, and the longitudinal axis is represented the moving direction of the Y-axis on the test portion objective table 102 of wire width measuring device.
Frame of broken lines 24 is loading positions of desirable measured object, is coordinate axis and benchmark (initial point of measured object and the initial point of wire width measuring device) the consistent loading position parallel with the XY axle of the objective table mechanism of wire width measuring device that the measured object 103 at this loading position place is had.At so measured object is under the situation of for example LCD substrate, and a plurality of identical shaped a plurality of inspection object products are parallel to its X-axis and dispose x, are parallel to Y-axis and dispose y, dispose x * y altogether with identical spacing when frame of broken lines 24.
Fig. 6 is the figure of the deviation (the particularly deviation of sense of rotation) that produces of the lift-launch of expression by measured object, the 24th, represent the frame of broken lines of the loading position of desirable measured object, the 25th, the solid box of the loading position of the measured object that expression is actual, the 18th, the position deviation amount θ of sense of rotation.In the loading position of the measured object of reality, the loading position of desirable measured object and the position deviation of sense of rotation have been produced.The 18th, the position deviation amount θ of sense of rotation, the 19th, the position in the multi-cam portion as the measurement coordinate P1 (measurement point) of the shooting head 10 of the benchmark on the position control, the 20th, be by the position of the measurement coordinate P2 that measures practically of shooting head 11, the 21st, the position of the measurement coordinate of the shooting head 11 at the loading position place of desirable measured object, the 22nd, the departure Δ X of the Y direction that produces because of the deviation of the sense of rotation of wanting revisal, the 23rd, the departure Δ Y of the Y direction that produces because of the deviation of the sense of rotation of wanting revisal, the 24th, measure coordinate P1 and measure distance (Y between the coordinate P2
P1-P2).The visual field (field of view) scope when in addition, the square frame that surrounds each point P1, P2, P2 ' here schematically represents to be the center shooting with each measurement point.In addition, in Fig. 6, described 1 measurement point (because the shooting head is two, so be actually a pair of), but a plurality of measurement points have been arranged usually.
In addition, in order to detect the deviation of sense of rotation, for example utilize Fig. 6 to bit patterns 28, matching treatment by pattern of logining in advance and the image of making a video recording by shooting head 10, obtain position coordinates by pattern identification, then, shooting head 10 is moved bit patterns 28, obtain position coordinates by same pattern identification, detect and obtain difference with desirable test portion loading position to bit patterns 29.
This departure Δ X22 and departure Δ Y23 can obtain by following formula (1) and formula (2).
Δ X=Y
P1-P2* sin θ ... formula (1)
Δ Y=Y
P1-P2* (1-cos θ) ... formula (2)
In Fig. 6, under the situation of the loading position deviation of solid box 25 measured objects 103, the coordinate of position 20 on X-axis on the loading position of original desirable measured object on the test portion objective table 102 of the position 19 on the test portion objective table 102 of the measurement coordinate P1 of shooting head 10 and the measurement coordinate P2 of shooting head 11 must be consistent, but deviation amount Δ X22, the amount Δ Y23 that also had on Y-axis also deviation.
If the position 19 of measurement coordinate P1 with shooting head 10 is a benchmark, then in order to make shooting head 11 move to correct measuring position 20, must amount of movement Δ X22 and amount Δ Y23.Here, move, need be used for making shooting head 10 and the mobile respectively driving shaft of shooting head 11 for the revisal of the amount of carrying out Δ X22.That is, need Δ X1 axle 8 of the present invention and Δ X2 axle 9.
For example, by only make shooting head 11 move slightly and only make shooting head 10 mobile slightly by Δ X2 axle 9 along X-direction by Δ X1 axle 8 along X-direction, any that makes make a video recording at least head 10 or shooting head 11 respectively moves, and can carry out revisal thus so that shooting head 10 is consistent on X-axis with the measurement point of the head 11 of making a video recording.
In addition, on Y direction, also make in shooting head 10 or the shooting head 11 at least one move revisal more accurately respectively by guidance part 5 by the guidance part 4 of Y1 axle or Y2 axle.
In addition, the quantity of shooting head is two objective tables in the above-described embodiments, but so long as many objective tables are just passable, several objective tables can.
In addition, in the above-described embodiments, be measurement or inspection, but, then do not need transmission illumination if having only the wire width measuring device of the measurement or the inspection of indirect illumination by transmission illumination, certainly do not need yet with the shooting head with respect to the interlock of moving.
In above-mentioned Fig. 5, in wire width measuring device, the structure of relevant invention only has been described, but has for example needed to obtain the image of the predetermined portions of measured object from the shooting head, export to after the image processing part and the unit of measuring or checking.In addition, in transmission illumination, for the not record of all structures that must attach light source and be used for making mechanism's part that each guidance part and axle move etc. in wire width measuring device, to need in order to carry out position revisal etc.For example, need the such structure of explanation among Fig. 7 at least.
Fig. 7 is the block diagram of the schematic configuration of expression wire width measuring device.
In Fig. 7, the 508th, use the color camera unit by observing, the surveying camera unit, electronic spinner (revolver) unit, and the laser shooting head that unit etc. constitutes of focusing automatically, the 509th, the test portion objective table, the 510th, the position correcting section, the 512nd, air removes the objective table that shakes, the 513rd, the electric consumption on lighting source, the 514th, colour picture monitor, the 515th, measure and use monitor, the 516th, measurement result shows uses monitor, the 517th, video printer, the 518th, Flame Image Process PC (Personal Computer), the 519th, control PC, the 520th, objective table control part, the 521st, transmission illumination power supply, the 522nd, transmission illumination head.In addition, the 501st, remove the measurement section that the objective table 512 that shakes, electric consumption on lighting source 513, objective table control part 520, transmission illumination constitute with power supply 521, transmission illumination head 522 by shooting head 508, test portion objective table 509, position correcting section 510, air.
In Fig. 7, the image of being taken with color camera by the observation of shooting head 508 is displayed on the colour picture monitor 514, and the image of being taken by surveying camera is displayed on measurement with on the monitor 515.
Measurement mechanism begins to measure according to the instruction of external host (HOST) or control PC519.Measurement is to begin automatically or by manual activity according to predefined method (recipe), measurement result is displayed on measurement result and shows with on the monitor 516, and measurement result is written in the predetermined zone of disk of the HD (Hard Disk) that for example controls in the PC519 etc.In addition, the requirement of the data based external host of these measurement results is distributed to external host.
In addition, removing the objective table 512 that shakes by air makes outside vibration can not pass to test portion objective table 509.
Flame Image Process PC518 resolves from the image of shooting head 508 inputs, and identification is set in advance in the predetermined pattern in the measured object 103 and obtains its position coordinates, obtains the revisal amount.
The revisal amount of obtaining is outputed among the control PC5 19, and control PC5 19 makes the information issuing control indicator signal of objective table control part 520 according to the revisal amount.Objective table control part 520 will be given to position correcting section 510 corresponding to the control signal of the control indicator signal of importing, and carry out the position revisal.
On one side carry out the position revisal like this, Yi Bian measure or check.
In addition, (unit: mm) be, crossfoot cun X * linear foot cun Y for example is 1850 * 1500 or 2250 * 1950 etc. to the size of LCD substrate, and thickness is about 0.5～0.7.For example the position deviation amount when prediction is sent to test portion objective table on by transfer robot etc. measured object is under the situation about ± 5～10mm, and the maximal value of revisal amount is set at ± 10mm.That is, as long as be with the travel settings of the guidance part 9 of the guidance part 8 of Δ X1 axle and Δ X2 axle ± 10mm is just passable.
In addition, the revisal of the deviation of Y direction also can be carried out by the guidance part 4 of Y1 axle or the guidance part 5 of Y2 axle as described later.
And then also can use can be along the executor (マ ニ ユ プ レ one ) of X-direction, Y direction and rotation (θ) directional trim, and PC5 19 carries out revisal by control.
More than, according to the present invention, what become problem in the mode of utilizing in the past clamping device (by the dipper crowding gear of cylinder etc.) that the loading position of measured object is moved forcibly is that the influence of maximization, static etc. because of measured object in fact can not mobile test portion this point.Even in addition under the situation of utilization by the method for the deviation of image recognition measurement and revisal loading position, also (made under 2 the identical situation of the coordinate of X-direction by for example two objective tables shooting head measurement originally because of the problem that can not measure efficiently of position deviation between the head of multi-cam generation, carrying out image simultaneously by the location action of 1 time X-direction and be taken into that to handle be efficient, is the purpose of multi-camization.But, the position deviation of generation Δ X because in the loading position deviation of test portion, containing the rotation composition, in large-scale test portion, the action of directions X location that particularly in fact can not be by 1 time detect processings), by Δ X-axis mechanism being set and position revisal partly solves with controlling as amount Δ X with this mechanism.
Fig. 8～Figure 19 is the process flow diagram of an embodiment of the sequence of movement of expression each among the present invention.
The process flow diagram of the location action of one embodiment of the invention divides 4 processing sequences to constitute substantially.Promptly, administer the whole master's order portion that handles, resolve the 1st image analysis order portion of the image that the head 10 of making a video recording made a video recording according to the indication that comes autonomous order portion, resolve the 2nd image analysis order portion of the image that the head 11 of making a video recording made a video recording according to the indication that comes autonomous order portion, control the measurement section 501 of wire width measuring device (by structure shown in Figure 7, by shooting head 508 according to the indication that comes autonomous order portion, test portion portion 509, position correcting section 510, air removes the objective table 512 that shakes, electric consumption on lighting source 513, objective table control part 520, transmission illumination power supply 521, and transmission illumination head 522 formations) objective table order portion constitutes.
In addition, if represent with Fig. 7, then lead order portion and controlling with processed in the PC519, the 1st image analysis order portion and the 2nd image analysis order portion accept from control processed in Flame Image Process PC518 with the indication of PC519.And then the action of measurement section 501 is accepted from control processed in objective table control part 520 with the indication of PC519.
Fig. 8, Figure 11, Figure 16 control with the main sequence of movement of handling among the PC519 by the flowcharting of the center processing action of the order of expression location action of the present invention.In addition, Fig. 9～Figure 10, Figure 12～Figure 15 and Figure 17～Figure 19 represent to return to according to the control of each objective table portion of the Flame Image Process of carrying out each from the main indication of handling sequence of movement of Fig. 8, Figure 11 and Figure 16, wire width measuring device, with object information the process flow diagram of the processing sequence of movement of main processing sequence of movement.
For example, the image 1 that Fig. 9, Figure 12 and Figure 17 represent to handle the image (Image1) that shooting head 10 takes is handled the process flow diagram of sequence of movement, and the image 2 that Fig. 9, Figure 13 and Figure 18 represent to handle the image (Image 2) that shooting head 11 takes is handled the process flow diagram of sequence of movement.In addition, Figure 10, Figure 14, Figure 15 and Figure 19 represent the structural portion of the needs of measurement section 501 is accepted independently to handle the instruction of sequence of movement and the measurement section processing sequence handled.
Interlock signal among Fig. 8 ceases and desist order very much, for example waits to enter into operator to detect door under the indoor situation that is provided with device and open and produce.In addition, be the operator by situation of the stop button of lower device etc.Under the situation of having imported this Interlock signal, carry out Interlock and have or not judgment processing, if the input of Interlock signal is arranged, then handle and the action of stop device as Error.The input of this Interlock signal and Interlock have or not judgment processing need show in the drawings and represent in proper order as this of Fig. 8, handle action but all imported to carry out under the situation of Interlock signal in main which order of handling in the sequence of movement.
In addition, in the Image of Fig. 9 PC HDD, preserve the shooting head image of making a video recording, be taken into desired images, in the processing sequence of movement of image 1 or 2, use according to the appointment of the address of independently handling sequence of movement etc.And preserve its result.
In addition, in the revisal table of Figure 10, preserve straightness etc. and be used for the revisal data of machine error of compensating device, in the revisal of position coordinates etc., use.
In addition, the automatic focusing process of laser in the order of Figure 12～Figure 15 and Figure 17～Figure 19 (LaserAF) or measure automatic focusing process (measure AF) diagram not in Fig. 7, but use technique known (for example with reference to the spy open the 2005-98970 communique, the spy opens flat 7-17013 communique).
Then, according to Figure 20 and Fig. 6, the embodiment that the position revisal to the shooting head of the deviation of sense of rotation the when lift-launch for test portion (measured object) of the present invention is described is handled.Figure 20 is the process flow diagram of an embodiment of expression sequence of movement of the present invention.
As shown in Figure 6, compare as can be known, illustrate that the measured object (solid box 25) that carries on test portion objective table 102 moves along the processing of the position revisal of the situation of sense of rotation deviation with desirable loading position (frame of broken lines 24).
At first, in Fig. 6, calculate the departure Δ X of the directions X that the deviation in response to the sense of rotation of revisal produces and the departure Δ Y of Y direction by above-mentioned formula (1) and formula (2).
Utilize the departure Δ X22 and the departure Δ Y23 that calculate like this, carry out the position revisal by order shown in Figure 20.
In Figure 20, Main PC HDD output measuring position coordinate data 301 from Fig. 8, the Flame Image Process PC518 of Fig. 7 resolves from the image of shooting head 508 inputs, identification is set in advance in the predetermined pattern in the measured object 103, obtain its position coordinates, obtain calibration (alignment) revisal amount data 302.
According to these data, with the amount of movement (X1+X of X-axis
AL_offset), the amount of movement (Y1+Y of Y1 axle
AL_offset), the amount of movement (Y2+Y of Y2 axle
AL_offset+ Y
AL_angle), the amount of movement (X2-X1+Y of Δ X2 axle
AL_offset+ Y
AL_angle) send to objective table control part 520 with PC519 from control, each moves (objective table moves 303).
Thus, each measurement point P1 and P2 are mapped to shooting head 10 and 11 within sweep of the eye.
Then, undertaken handling (detect and handle 304) by Flame Image Process PC518 by the part of the image 1 obtained of shooting head 10 and the pattern match position probing of the pattern of login in advance, calculating is used for revisal amount that measuring object is moved to the center of field range, and the amount of movement of Y1 axle and the amount of movement of Δ X1 axle are sent (processing 305) with PC519 to objective table control part 520 via control.
Equally, undertaken handling (detect and handle 306) by Flame Image Process PC518 by the part of the image 2 obtained of shooting head 11 and the pattern match position probing of the pattern of login in advance, calculating is used for revisal amount that measuring object is moved to the center of field range, and the amount of movement of Y2 axle and the amount of movement of Δ X2 axle are sent (processing 307) with PC519 to objective table control part 520 via control.
Objective table control part 520 is accepted the above-mentioned indication of moving, and under the state that X-axis is fixed Y1 axle, Δ X1 axle, Y2 axle and Δ X2 axle is moved, and obtains image by shooting head 10 and 11 separately then, carries out wire width measuring and handles 309 and 310.
If being through with current measurement point P1, P2 is the wire width measuring processing within the vision at center, then export the measuring position coordinate data 301 of next measurement point from the Main PC HDD of Fig. 8, move to next measurement point.Promptly repeat the action of Figure 20.
More than, a plurality of shooting heads are moved under the situation of measurement point, the mobile required quantity and the order that can make the rotation when carrying on the test portion objective table for revisal measuring object thing and carry out a plurality of shooting heads become Min., so can shorten the productive temp time.
In addition, in the above-described embodiments, when measurement point mobile, carry out the position revisal of Δ X2 axle, if but other the several products production location precision separately on 1 measured object is good, then, can not carry out the position revisal of Δ X2 axle whenever moving of measurement point as long as carry out the position revisal of 1 Δ X2 axle yet.
Claims (5)
1, a kind of microscope image pick-up device is characterized in that,
Possess: the 1st objective table, can move abreast with cross one another the 1st direction and the 1st direction in the 2nd direction on the plane domain that has a plurality of measurement points on measured object; N camera, be set on above-mentioned the 1st objective table, can on above-mentioned the 1st objective table, move independently respectively abreast, to above-mentioned measured object shooting with above-mentioned the 2nd direction, measurement point in N the zone after cutting apart on above-mentioned plane domain moves respectively, and N is the integer more than 2; Move up and down objective table, this camera is moved up and down respectively independently; Abnormality detection mechanism is detected respectively unusually for an above-mentioned N camera; And control gear;
Above-mentioned control gear is controlled, so that detect under the unusual situation in above-mentioned abnormality detection mechanism, make this camera keep out of the way the zone, do not detect unusual camera and can move at the whole plane domain of above-mentioned measured object by above-mentioned testing agency from the plane domain of above-mentioned measured object.
2, microscope image pick-up device as claimed in claim 1 is characterized in that,
Also possess: N transmission illumination device is corresponding respectively with above-mentioned N camera; And the transmission illumination moving stage, above-mentioned transmission illumination device is moved to synchronously the position on the above-mentioned plane domain of an above-mentioned N camera,
Above-mentioned control gear detects under the unusual situation of camera in above-mentioned abnormality detection mechanism, makes corresponding transmission illumination device keep out of the way the zone from the plane domain of above-mentioned measured object.
3, microscope image pick-up device as claimed in claim 1 is characterized in that,
Also possess: N transmission illumination device is corresponding respectively with above-mentioned N camera; And the transmission illumination moving stage, above-mentioned transmission illumination device is moved to synchronously the position on the above-mentioned plane domain of an above-mentioned N camera,
The unusual of above-mentioned N transmission illumination device also detects in above-mentioned abnormality detection mechanism,
Above-mentioned control gear is controlled, so that under the unusual situation of any that detects above-mentioned N transmission illumination device, make this transmission illumination device keep out of the way the above-mentioned zone of keeping out of the way together, by not detecting the corresponding camera of unusual transmission illumination device with above-mentioned testing agency and can moving at the whole plane domain of above-mentioned measured object with corresponding camera.
4, a kind of dimension measuring device is characterized in that,
Possess: the described microscope image pick-up device of claim 1; And N image processing part, corresponding with an above-mentioned N camera, carry out the measurement of a plurality of measurement points of above-mentioned measured object according to the picture signal of exporting from above-mentioned N camera,
The unusual of an above-mentioned N image processing part also detects in above-mentioned abnormality detection mechanism,
Above-mentioned control gear detects in above-mentioned abnormality detection mechanism under any unusual situation of an above-mentioned N image processing part, makes the camera corresponding with detecting above-mentioned unusual image processing part keep out of the way the above-mentioned zone of keeping out of the way.
5, a kind of dimension measuring device is characterized in that,
Possess: claim 2 or 3 each described microscope image pick-up devices; And N image processing part, corresponding with an above-mentioned N camera, carry out the measurement of a plurality of measurement points of above-mentioned measured object according to the picture signal of exporting from above-mentioned N camera,
The unusual of an above-mentioned N image processing part also detects in above-mentioned abnormality detection mechanism,
Above-mentioned control gear detects in above-mentioned abnormality detection mechanism under any unusual situation of an above-mentioned N image processing part, makes camera and the transmission illumination device corresponding with detecting above-mentioned unusual image processing part keep out of the way the above-mentioned zone of keeping out of the way.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP035164/2006 | 2006-02-13 | ||
| JP087500/2006 | 2006-03-28 | ||
| JP2006087500A JP2007240503A (en) | 2005-04-08 | 2006-03-28 | Microscope imaging device and dimension measuring instrument |
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| Publication Number | Publication Date |
|---|---|
| CN101050942A true CN101050942A (en) | 2007-10-10 |
| CN100526795C CN100526795C (en) | 2009-08-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2007100840466A Active CN100526795C (en) | 2006-02-13 | 2007-02-13 | Image pickup apparatus equipped with a microscope and size measuring apparatus |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102647553A (en) * | 2011-02-17 | 2012-08-22 | 株式会社三丰 | Vision measuring device and auto-focusing control method |
| CN110207593A (en) * | 2019-05-29 | 2019-09-06 | 广东天机工业智能系统有限公司 | Dimension measuring device |
| CN112594512A (en) * | 2020-12-11 | 2021-04-02 | 苏州泰迪智能科技有限公司 | Based on machine vision is with industry measuring device |
-
2007
- 2007-02-13 CN CNB2007100840466A patent/CN100526795C/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102647553A (en) * | 2011-02-17 | 2012-08-22 | 株式会社三丰 | Vision measuring device and auto-focusing control method |
| CN102647553B (en) * | 2011-02-17 | 2016-08-24 | 株式会社三丰 | Image measuring apparatus and auto-focusing control method |
| CN110207593A (en) * | 2019-05-29 | 2019-09-06 | 广东天机工业智能系统有限公司 | Dimension measuring device |
| CN110207593B (en) * | 2019-05-29 | 2021-08-31 | 广东天机工业智能系统有限公司 | Dimension measuring device |
| CN112594512A (en) * | 2020-12-11 | 2021-04-02 | 苏州泰迪智能科技有限公司 | Based on machine vision is with industry measuring device |
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|---|---|
| CN100526795C (en) | 2009-08-12 |
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