CN100469680C - Base plate elevating apparatus and its fulcrum mechanism - Google Patents
Base plate elevating apparatus and its fulcrum mechanism Download PDFInfo
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- CN100469680C CN100469680C CNB2006100077672A CN200610007767A CN100469680C CN 100469680 C CN100469680 C CN 100469680C CN B2006100077672 A CNB2006100077672 A CN B2006100077672A CN 200610007767 A CN200610007767 A CN 200610007767A CN 100469680 C CN100469680 C CN 100469680C
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Abstract
The present invention relates to one kind of base plate elevating apparatus and its fulcrum mechanism. The fulcrum mechanism includes a main body, a fulcrum, a transmitting element and an elastic element. The fulcrum set on the main body can move between the first position and the second position; the transmitting element pushes the fulcrum to move from the first position to the second position in the first direction; and the elastic element set in the fulcrum provides one elastic force to the fulcrum in the second direction opposite to the first direction.
Description
Technical field
The invention relates to a kind of fore-set mechanism, particularly relevant for a kind of fore-set mechanism that is applied to a substrate elevating equipment.
Background technology
With reference to Fig. 1 a, it is the platform 1 that shows in the known substrate elevating equipment, is formed with a plurality of through holes 2 on the platform 1.Substrate 3 promptly is placed on this platform 1.Collocation is with reference to Fig. 1 b, be provided with fore-set 4 in the through hole 2, fore-set 4 can move to a second place (position that Fig. 1 b is shown) from a primary importance (position that Fig. 1 a is shown), rises among the through hole 2 and raises substrate 3, picks and places this substrate 3 with a convenient mechanical arm (not shown).
With reference to Fig. 2 a, it is the detail structure of the known fore-set of demonstration mechanism 10, and fore-set mechanism 10 comprises a body 11, a driver element 12, this fore-set 4 and a cylinder 13.Fore-set 4 is located on the body 11, and when cylinder 13 upwards promoted driver element 12 with cylinder rod 131, driver element 12 promoted this fore-set 4 and moves up.Collocation is with reference to Fig. 2 b, and driver element 12 is a flat board, can promote a plurality of fore-sets 4 simultaneously.
In known technology, when desiring to make this fore-set 4 from this second site reversion to this primary importance, the cylinder rod 131 of this cylinder 13 descends and driver element 12 is descended, and this moment, fore-set 4 dropped down onto this second place automatically because of the effect of gravity.Yet, as shown in Fig. 2 c, the particulate that is produced during owing to processing substrate, for example, separation material (spacer) can fall among the through hole 2 and increases friction force between fore-set 4 and through hole 2 inwalls, so can cause fore-set 4 can't fall the situation of primary importance smoothly after rise.So can cause the inclination of substrate 3, reduce the degree of uniformity of substrate 3 on handling, and reduce the qualification rate of product.
Summary of the invention
The purpose of this invention is to provide a kind of substrate elevating equipment and fore-set mechanism thereof, to solve the problem of above-mentioned known technology.
For this reason, the invention provides a kind of fore-set mechanism, comprise a body, a fore-set, a driver element and an elastic element.Fore-set is located on this body, and this fore-set can move between a primary importance and a second place.Driver element promotes this fore-set, makes this fore-set move to this second place from this primary importance along a first direction.Elastic element is located on this fore-set, and this elastic element provides an elastic force to this fore-set, and wherein, the action direction of this elastic force is towards a second direction, and this second direction is in contrast to this first direction.
Preferably, this elastic element is a spring, and an end of this spring is connected to this fore-set, and the other end of this spring is connected to this body.
Preferably, this body comprises one first section portion and one first through hole, and this first through hole is formed on this first section portion, and this fore-set extends through this first through hole.
Preferably, this body more comprises one second a section portion and a guide groove, and this first section portion connects this second section portion, and second section portion of this first section portion and this is vertical mutually, and this guide groove is strip and is formed on this second section portion.
Preferably, this fore-set comprises a cylinder and a guide portion, and this guide portion connects this cylinder, and this cylinder passes this first through hole, and this guide portion extends into this guide groove.
Preferably, this guide portion is passed this guide groove.
Preferably, this elastic element is arranged on this guide portion.
Preferably, this body more comprises a fixed part, is located on this second section portion, and this elastic element is a spring, and an end of this spring is connected to this guide portion, and the other end of this spring is connected to this fixed part.
The invention allows for a kind of substrate elevating equipment, comprising: a platform in order to support a substrate, is formed with a plurality of second through holes on this platform; And a plurality of above-mentioned fore-set mechanism, wherein, when desire rose this substrate, described fore-set passed described second through hole and raises this substrate.
Preferably, each elastic element is a spring, and an end of this spring is connected to this fore-set, and the other end of this spring is connected to this body.
Preferably, each body comprises one first section portion and one first through hole, and this first through hole is formed on this first section portion, and this fore-set extends through this first through hole.
Preferably, this body more comprises one second a section portion and a guide groove, and this first section portion connects this second section portion, and second section portion of this first section portion and this is vertical mutually, and this guide groove is strip and is formed on this second section portion.
Preferably, this fore-set comprises a cylinder and a guide portion, and this guide portion connects this cylinder, and this cylinder passes this first through hole, and this guide portion extends into this guide groove.
Preferably, this guide portion is passed this guide groove.
Preferably, this elastic element is arranged on this guide portion.
Preferably, this body more comprises a fixed part, is located on this second section portion, and this elastic element is a spring, and an end of this spring is connected to this guide portion, and the other end of this spring is connected to this fixed part.
Preferably, this substrate elevating equipment is applied to a separation material dissemination apparatus.
Use the present invention, fore-set is fallen after rise smoothly to primary importance, therefore can avoid the inclination of substrate, promote the degree of uniformity of substrate on handling, and improve the qualification rate of product.
Description of drawings
Fig. 1 a shows that fore-set is positioned at the situation of primary importance in the known substrate processing apparatus;
Fig. 1 b shows that fore-set is positioned at the situation of the second place in the known substrate processing apparatus;
Fig. 2 a is the detail structure of the known fore-set of demonstration mechanism;
Fig. 2 b is the birds-eye view of the known fore-set of demonstration mechanism;
Fig. 2 c shows that fore-set can't fall the situation to primary importance smoothly after rise;
Fig. 3 a is that fore-set is positioned at the situation of primary importance in the demonstration fore-set of the present invention mechanism;
Fig. 3 b is that fore-set is positioned at the situation of the second place in the demonstration fore-set of the present invention mechanism; And
Fig. 4 shows substrate processing apparatus of the present invention.
Description of reference numerals:
1～platform; 2～through hole;
3～substrate; 4～fore-set;
10～fore-set mechanism; 11～body;
12～driver element; 13～cylinder;
131～cylinder rod; 20～fore-set mechanism;
21～body; 211～the first sections portions;
212～the second sections portions; 213～the first through holes;
214～guide groove; 215～fixed part;
22～fore-set; 221～cylinder;
222～guide portion; 23～elastic element.
The specific embodiment
With reference to Fig. 3 a, it is a demonstration fore-set of the present invention mechanism 20, comprises a body 21, a fore-set 22, an elastic element 23, a driver element and a cylinder 13.Fore-set 22 is located on this body 21.Driver element 12 is replaced fore-set 22.Cylinder 13 sees through cylinder rod 131 and connects driver element 12.Elastic element 23 is located on this fore-set 22 and this body 21.At this is simplified illustration, therefore omits to show this fore-set mechanism 20 proximity structure on every side.
This fore-set 22 comprises that a cylinder 221 and draws 1 and leads portion 222, and this guide portion 222 connects this cylinder 221, and vertical mutually with this cylinder 221.This cylinder 221 passes this first through hole 213.This guide portion 222 extends through this guide groove 214.
This elastic element 23 is a spring, and an end of this elastic element 23 connects this guide portion 222, and simultaneously, the other end of this elastic element 23 connects this fixed part 215.
Collocation is with reference to Fig. 3 a and 3b, and the cylinder rod 131 of this cylinder 13 can make this fore-set 22 move between a primary importance (position that Fig. 3 a is shown) and the second place (position that Fig. 3 b is shown).When desiring with 22 pairs of substrates of fore-set (not shown) when supporting, this cylinder rod 131 and this driver element 12 can raise this fore-set 22 to this second place from this primary importance along a first direction y.When desire was removed the support of 22 pairs of substrates of fore-set (not shown), cylinder rod 131 and this driver element 12 descended, and simultaneously, this elastic element 23 is pulled down to this primary importance with this fore-set 22 from this second place along one second direction-y.23 pairs of these fore-sets 22 of this elastic element provide an elastic force, and the action direction of this elastic force is same as this second direction-y.This second direction-y is in contrast to this first direction y.
With reference to Fig. 4, among the platform 1 ' that fore-set of the present invention mechanism 20 can be located in the substrate elevating equipment.The surface of platform 1 ' is provided with a plurality of second through holes 2.Wherein, when desire rising substrate 3, fore-set 22 rises and passes second through hole 2 with supporting substrate 3.
This substrate elevating equipment can be applicable to a separation material (spacer) dissemination apparatus.
In the above-described embodiments, disclosed with the enforcement sample attitude of spring as elastic element, so it does not limit the present invention.Under spirit of the present invention, also can see through air cylinder or the time alternate manner such as magnetic element elastic force is provided.
In addition, in the above-described embodiments, spring provides the elastic force of at least 400 grams, to overcome the friction force between fore-set 22 and second through hole, 2 inwalls.
Use the present invention, fore-set is fallen after rise smoothly to primary importance, therefore can avoid the inclination of substrate, promote the degree of uniformity of substrate on handling, and improve the qualification rate of product.
Though the present invention discloses as above with concrete preferred embodiment; right its is not in order to limit the present invention; anyly have the knack of this skill person; without departing from the spirit and scope of the present invention; still can do a little change and retouching, so protection scope of the present invention is as the criterion when looking claims person of defining.
Claims (17)
1. a fore-set mechanism is characterized in that, comprising:
One body;
One fore-set is located on this body, and this fore-set can move between a primary importance and a second place;
One driver element, this driver element promotes this fore-set, and this fore-set is moved between this primary importance and this second place; And
One elastic element is located on this fore-set, and this elastic element provides drawing stress when this fore-set is moved to this second place, and compressing stress is provided when this fore-set is moved to this primary importance.
2. fore-set as claimed in claim 1 mechanism is characterized in that this elastic element is a spring, and an end of this spring is connected to this fore-set, and the other end of this spring is connected to this body.
3. fore-set as claimed in claim 1 mechanism is characterized in that this body comprises one first section portion and one first through hole, and this first through hole is formed on this first section portion, and this fore-set extends through this first through hole.
4. fore-set as claimed in claim 3 mechanism, it is characterized in that this body more comprises one second a section portion and a guide groove, this first section portion connects this second section portion, second section portion of this first section portion and this is vertical mutually, and this guide groove is strip and is formed on this second section portion.
5. fore-set as claimed in claim 4 mechanism is characterized in that this fore-set comprises a cylinder and a guide portion, and this guide portion connects this cylinder, and this cylinder passes this first through hole, and this guide portion extends into this guide groove.
6. fore-set as claimed in claim 5 mechanism is characterized in that this guide portion is passed this guide groove.
7. fore-set as claimed in claim 6 mechanism is characterized in that this elastic element is arranged on this guide portion.
8. fore-set as claimed in claim 7 mechanism is characterized in that this body more comprises a fixed part, is located on this second section portion, and this elastic element is a spring, and an end of this spring is connected to this guide portion, and the other end of this spring is connected to this fixed part.
9. substrate elevating equipment comprises:
One platform in order to support a substrate, is formed with a plurality of second through holes on this platform; And
A plurality of fore-set as claimed in claim 1 mechanism, wherein, when desire rose this substrate, described fore-set passed described second through hole and raises this substrate.
10. substrate elevating equipment as claimed in claim 9 is characterized in that, each elastic element is a spring, and an end of this spring is connected to this fore-set, and the other end of this spring is connected to this body.
11. substrate elevating equipment as claimed in claim 9 is characterized in that, each body comprises one first section portion and one first through hole, and this first through hole is formed on this first section portion, and this fore-set extends through this first through hole.
12. substrate elevating equipment as claimed in claim 11, it is characterized in that this body more comprises one second a section portion and a guide groove, this first section portion connects this second section portion, second section portion of this first section portion and this is vertical mutually, and this guide groove is strip and is formed on this second section portion.
13. substrate elevating equipment as claimed in claim 12 is characterized in that, this fore-set comprises a cylinder and a guide portion, and this guide portion connects this cylinder, and this cylinder passes this first through hole, and this guide portion extends into this guide groove.
14. substrate elevating equipment as claimed in claim 13 is characterized in that this guide portion is passed this guide groove.
15. substrate elevating equipment as claimed in claim 14 is characterized in that this elastic element is arranged on this guide portion.
16. substrate elevating equipment as claimed in claim 15 is characterized in that this body more comprises a fixed part, is located on this second section portion, this elastic element is a spring, and an end of this spring is connected to this guide portion, and the other end of this spring is connected to this fixed part.
17. substrate elevating equipment as claimed in claim 9 is characterized in that, this substrate elevating equipment is applied to a separation material dissemination apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100077672A CN100469680C (en) | 2006-02-20 | 2006-02-20 | Base plate elevating apparatus and its fulcrum mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100077672A CN100469680C (en) | 2006-02-20 | 2006-02-20 | Base plate elevating apparatus and its fulcrum mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1810625A CN1810625A (en) | 2006-08-02 |
| CN100469680C true CN100469680C (en) | 2009-03-18 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006100077672A Expired - Fee Related CN100469680C (en) | 2006-02-20 | 2006-02-20 | Base plate elevating apparatus and its fulcrum mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100469680C (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101656222B (en) * | 2009-07-29 | 2011-07-27 | 东莞宏威数码机械有限公司 | Nested support pillar equipment |
-
2006
- 2006-02-20 CN CNB2006100077672A patent/CN100469680C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1810625A (en) | 2006-08-02 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| ASS | Succession or assignment of patent right |
Owner name: YOUDA PHOTOELECTRIC CO., LTD. Free format text: FORMER OWNER: GUANGHUI ELECTRONIC CO., LTD. Effective date: 20071130 |
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| C41 | Transfer of patent application or patent right or utility model | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20071130 Address after: Hsinchu city of Taiwan Province Applicant after: AU Optronics Corporation Address before: Taoyuan County of Taiwan Province Applicant before: Guanghui Electronic Co., Ltd. |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090318 Termination date: 20210220 |