CN100435970C - A process for producing microfluidic arrangements from a plate-shaped composite structure - Google Patents
A process for producing microfluidic arrangements from a plate-shaped composite structure Download PDFInfo
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- CN100435970C CN100435970C CNB2004800262278A CN200480026227A CN100435970C CN 100435970 C CN100435970 C CN 100435970C CN B2004800262278 A CNB2004800262278 A CN B2004800262278A CN 200480026227 A CN200480026227 A CN 200480026227A CN 100435970 C CN100435970 C CN 100435970C
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/26—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with means for mechanically breaking-up or deflecting the jet after discharge, e.g. with fixed deflectors; Breaking-up the discharged liquid or other fluent material by impinging jets
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Abstract
This invention relates to a process for producing a multiplicity of micro fluidic arrangements (1) from a plate-shaped composite structure, wherein each arrangement comprises a groove structure (4) which forms flow channels and the dimensions of which are in the micrometre range. The lines (6) for the optional subsequent mechanical separation of bridging groove structures (4) are joined to each other and are partly or completely filled with a filling medium (7) before mechanical machining. The medium (7) is selected so that it is not removed from the groove structures (1) either by the mechanical machining or by aids used during mechanical machining. Afterwards, however, the filling medium (7) is removed from the groove structures (6) by suitable measures. The groove structures (4) are thereby prevented from becoming blocked due to mechanical contaminants. An atomiser which is provided with the nozzle arrangement is also proposed.
Description
Technical field
The present invention relates to the technology of producing a large amount of microfluidic devices, particularly spray nozzle device with the plate-shaped composite structure that comprises micron order size groove structure.Such as technology is known, includes as the feature as described in the preamble in the claim 1 of U.S. Pat 5547094A.The invention still further relates to the atomizer that comprises this class spray nozzle device.
Background technology
This class spray nozzle device of being discussed is used for by liquid under high pressure being urged the nozzle opening through small bore, and liquid mist is changed into very small droplet.In other application of this class nozzle, for instance, this class spray nozzle device is used in medical field and is acted on the atomizer that sucks purposes.This class spray nozzle device of being discussed has been proposed strict demand about droplet size, for example since suck use in order to enter lung satisfactorily, the droplet of enough vast scales should have the diameter less than 6 μ m.In general, diameter is considered to suck less than the particulate of 10 μ m or droplet.
U.S. Pat 5547094A ad hoc relates to and is used for the block-like nozzle arrangements that this class is used, and relates to a kind of method of producing a large amount of block-like nozzle arrangements of this class consistently high quality.In this known process, can also in spray nozzle device, be combined with filter or even multistage filter.
The disclosed full content of U.S. Pat 5547094A becomes the disclosed part of present patent application by reference.The all process steps of disclosed corresponding production technology and disclosed all material specification and employed instrument or the like can use in processing range according to the present invention equally in this U.S. Pat 5547094A.About further openly can in patent WO 94/07607 A1 and WO 99/16530 A1, finding of these spray nozzle devices.
Already known processes at first relates to the manufacturing of plate-shaped composite structure, and this plate-shaped composite structure comprises two flat boards, the intrinsic plane that it has regularly and mutually combines two-dimensionally.In addition, also can optionally add more plate.In fact, the spray nozzle device of plate-shaped composite structure provides many circulation groove structures to form on the intrinsic plane by a plate therein, wherein the intrinsic plane of this plate combines with the intrinsic plane of another piece plate, and each groove structure is corresponding to a spray nozzle device.These groove structures can also optionally be arranged on two opposed facing of this two boards, and wherein this two boards here is associated and mutually combines.In the prior art, especially preferred compound is the composite of silicon steel plate and glass plate, has wherein also mentioned other modification.
Groove structure has finally formed the fluid passage that preferably has the spray nozzle device of micron order size.For the notion about the groove structure order of size is provided, the structure height that prior art is mentioned between 2-40 μ m, preferably between 5-7 μ m, the sectional area of nozzle about 25 to about 500 μ m
2Between.
Can be along the separator bar that between two groove structures, extends, separate plate-shaped composite structure by machining and obtain independent spray nozzle device, wherein plate-shaped composite structure comprises a large amount of spray nozzle devices.So be that block little surface area spray nozzle device exists individually in the past.In the prior art, separate especially with annular saw, be preferably that the diamond circular saw sawing that runs up realizes by machining.For example, cut-out and the disconnection to big plate-shaped composite structure is cited as alternative equally.These procedure of processings also can merge mutually, i.e. sawing can be implemented in the first step, and then finish processing in second step by fractureing or cutting apart with laser beam.
With regard to the manufacturing of composite construction,, and further specify with reference to other interconnection techniques such as comprising bonding, ultrasonic bonding especially with reference to on-the-spot secondary combined technology.
Suppose to use this known process to make spray nozzle device, will produce such problem by the plate-shaped composite structure that comprises micron order size groove structure, promptly groove structure machining, particularly can be contaminated in the sawing process.In mechanical processing process, use liquid cools lubricant, particularly water base lubricant usually.Because lubricant and the smear metal of carrying secretly thereof, groove structure can be blocked in some cases, therefore in fact can not clear up groove structure again.Consequently high percent defective.In this, should consider at first on plate-shaped composite structure, to form a hundreds of independent spray nozzle device, separate these spray nozzle devices by the separator bar of lattice-shaped network afterwards.Therefore, the independent manufacturing of this class spray nozzle device is mysterious fully.
Above the disclosed problem plate-shaped composite structure that utilizes that is not only applicable to relate to above-mentioned prior art make a large amount of bulks, independent spray nozzle device, but also be applicable to a large amount of microfluidic devices that generally comprise the corresponding recesses structure by plate-shaped composite structure manufacturing.Except spray nozzle device, this problem also appear at other do not have direct nozzle function on microfluidic device, for example filter or the distributor.
Generally with regard to microfluidic device, plate-shaped composite structure preferably carries out machining along line, described line extends between groove structure and differs and is decided to be separator bar, therefore, separated individually or separated in groups after the microfluidic device in the composite construction but not exclusively separated, perhaps in fact individually separate but separation fully in groups.
Summary of the invention
According to the present invention, before machining, utilize filled media to come the filling groove structure, before finishing, machining can from groove structure, not remove this filled media once more.Therefore, just prevented reliably in mechanical processing process that smear metal and/or cooling-lubricant from polluting groove structure.Groove structure is in and is subjected to the protection state, and can not expose once more before operation is finished.Owing to systematically prevented pollutant contact groove structure, therefore just reduced the percent defective of microfluidic device.
Filling groove structure completely or partially, make filled media block the opening that is exposed to outside or machining of groove structure at least, thereby make groove structure in the mechanical processing process of composite construction, avoid the pollution of smear metal, cooling-lubricant or similar impurity.About the protection of polluting, it is unimportant whether filled media has also filled the inside or the inside part of groove structure, as long as filled media sealing or blocked all and lead to outside opening or connections in mechanical processing process.
Description of drawings
In the description to the example of embodiment in conjunction with the accompanying drawings, be described in more detail the present invention and embodiment and more progress, wherein:
Fig. 1 is the perspective view of microfluidic device of the present invention;
Fig. 2 a is the plane of the Lower Half of microfluidic device shown in Figure 1, has shown groove structure;
Fig. 2 b is the profile of microfluidic device shown in Figure 1, has shown composite construction;
Fig. 2 c is the profile of another kind of microfluidic device, has shown the position of composite construction and groove structure;
Fig. 3 is the plane of a plate-shaped composite structure part, and this composite construction comprises a large amount of microfluidic devices as shown in Figure 1;
Fig. 4 is the schematic cross sectional view of atomizer of the present invention, wherein with this class spray nozzle device be positioned at its not tension;
Fig. 5 is the schematic cross sectional view that is in the atomizer of tension, and it has rotated 90 ° with respect to Fig. 4.
The specific embodiment
Fig. 1 at first shown here for spray nozzle device and has been divided into the device 1 of group, and this device 1 comprises lower floor's plate-shaped member 2 and upper strata parts 3, and parts 3 also are tabular and are located on the lower part 2 and combine regularly with it.According to a preferred embodiment, lower part 2 comprises silicon.Yet the prior art that introductory song is mentioned also discloses a series of other material.In a preferred embodiment, upper strata parts 3 comprise glass, but prior art also discloses other alternatives in this, for example silicon, silicon nitride or germanium.Separating nozzle device 1 shown in Figure 1 has the overall dimension of 2.0mm * 2.5mm * 1.5mm.Spray nozzle device like this is to make in the clean room of suitable grade.
Fig. 1 has shown the device 1 of first embodiment with exploded view, and promptly wherein upper strata parts 3 lift.Fig. 2 a is the plane of lower part 2.Fig. 2 b is in it to have assembled or the profile of the isolated system 1 of completion status.Fig. 3 is the plane of plate-shaped composite structure, and the many devices 1 that wherein comprise groove structure 4 can be produced by this composite construction.
Fig. 2 c is the profile corresponding to Fig. 2 b according to the device 1 of second embodiment.
The layer order of device shown 1 be corresponding to the layer order of whole plate-shaped composite structure among Fig. 2 b and Fig. 2 c, (see figure 3) when this layer order is presented on this manufacturing step and begins.The two boards that this composite construction comprises regularly and mutually combines two-dimensionally can form plate-shaped member 2 and the parts 3 that optionally divide device 1 in groups by this two boards subsequently.This plate has the surface of general planar, and a large amount of circulation groove structures 4 that wherein form the fluid passage are located on the surface of one of them piece plate, and this surface combines with the surface of another piece plate.These each self-formings of groove structure a real nozzle 5 (Fig. 1), or its counterpart (Fig. 2 b or Fig. 2 c).Fig. 3 has shown the groove structure of isolated system 1, and this device 1 still interconnects on plate-shaped composite structure in Fig. 3.
Design for nozzle 5 and groove structure 4 has widely and can select, and some of them disclose in above-mentioned prior art according to U.S. Pat 5547094 A, and this patent also discloses corresponding manufacturing technique method, for example photoetching process and etching technique.With regard to employed filtration, but referenced patent WO 99/16530 A1, this patent open also as the disclosed part of present patent application.
From the plate-shaped composite structure of Fig. 3, can along the line 6 separate plate-shaped composite structure and obtain isolated system 1 as shown in Fig. 1 perspective view by machining, its center line 6 extends between per two groove structures 4 and represents with chain-dotted line in Fig. 3, and therefore after this block-like nozzle arrangements 1 exists individually.Fig. 3 has shown the grid of line 6, and these lines 6 intersect with meeting at right angles and surround one separately and install 1.The opposite end by side by side exposing respective nozzles 5 or groove structure 4 or the inlet of corresponding filtration, and by with diamond circular saw with at a high speed (usually above 20000 rev/mins) exactly along these lines 6 or between two such lines 6, carry out sawing more accurately, but the just accurate separation of implement device 1.
Obviously, line 6 needn't occur with entity, perhaps needn't manifest by mark.Line 6 only is that help demonstrated instrument, particularly the saw needs are directed on plate-shaped composite structure wherein being used for of fabricating.This can realize by the automatic technology with corresponding software equally.
As mentioned above, separate and can a plurality of steps realize that also wherein at least one separating step is realized by machining, this can cause above-mentioned pollution owing to formed smear metal and/or employed any adminicle.
For first embodiment shown in Fig. 1, Fig. 2 a, Fig. 2 b and Fig. 3, the section among Fig. 2 has shown nozzle 5.Here used twin-jet nozzle, this nozzle mutually combines two fluid streams jets and handles, and makes them clash into mutually from nozzle 5 a distance and division atomizing mutually.This expection that has just produced small drop sizes distributes.
Fig. 2 b and Fig. 2 c are the cross sections of composite construction, and this also is a focus of the present invention.This composite construction is used to produce and needn't be a large amount of microfluidic devices 1 of spray nozzle device.
In second embodiment shown in Fig. 2 c, said nozzle 5 is rendered as the form of the nozzle passage 5 ' that extends in upper strata parts 3, wherein according to preferably telling about content, upper strata parts 3 comprise glass, nozzle passage 5 ' is perpendicular to the principal plane of upper strata parts 3, and leads to towards the lower end of lower part 2 in the groove structure 4 on this surface, place.Therefore, compare with the lateral flow of example among above-mentioned first embodiment, this device can be used for realizing seeing from the outside vertically passes flowing of microfluidic device 1.
The groove structure 4 of microfluidic device 1 carries out machining by 6 pairs of plate-shaped composite structures along the line and obtains, wherein this line extends between each groove structure 4, make that the microfluidic device 1 in the composite construction is after this cut apart individually or cut apart in groups but not exclusively separates, or cut apart fully in groups but only in each group, exist individually.
Specifically, Fig. 2 c has shown that groove 6 ' (between two lines 6) carries out the purposes of machining for along the line 6 and is introduced in the composite construction.These grooves run through lower plywood among Fig. 2 c, promptly comprise the plate 2 of groove structure 4, and can not run through another plate as the top plate in the exemplary embodiment 3, but only are formed at the passage of place, bottom sealing there.
For of the present invention telling about be substantially for the content, the existence of the necessity of protection groove structure 4 in mechanical processing process, and be how to form or where form irrelevant in plate-shaped composite structure with these groove structures 4.
The description of the production process of the present invention of being carried out below with reference to the horizontally set structure of the groove structure in the plate-shaped composite structure 4 also is illustrated above-mentioned this respect.For the vertical means structure shown in Fig. 2 c, in production process of the present invention,, and can correspondingly use these and consider item without any variation.
Production process of the present invention relates to the part of whole production processes of relevant this class microfluidic device 1.This production process originates in the existing plate-shaped composite structure that comprises a large amount of devices 1, and at first differentiation is, make the groove structure 4 of plate-shaped composite structure, make these groove structures 4 to be connected with each other continuously to opposite edges by line 6 edge from plate-shaped composite structure at least one direction.Certainly this can see in Fig. 3 that wherein Fig. 3 has shown the part of in fact sizable composite construction.Among the embodiment shown in this, groove structure 4 is connected with each other from bottom to top continuously.Between the inlet of the outlet of the nozzle 5 of a groove structure 4 and the groove structure above it 4, be provided with the interconnection between online 6, the nozzle 5 that this passage will be positioned at groove structure 4 groove structure 4 below being positioned on its whole width at top couples together.
According to the present invention, so the groove structure 4 of plate-shaped composite structure was filled with dielectric before machining.The process of filling with filled media is not subjected to any problems affect, because groove structure 4 is connected with each other as described above.Yet, must select filled media, any adminicle that makes filled media can therefore not be machined or may be used in mechanical processing process is removed from groove structure 4.As the summary part at this specification has illustrated, therefore in mechanical processing process, just can prevent that pollutant from entering groove structure 4.After machining is finished, from groove structure 4, remove filled media once more.Thereby can obtain being in its original state and unpolluted groove structure 4, to be used for further manufacturing procedure.
As filling the alternative or additional of (or vertically filling) from bottom to top, the configuration (see figure 3) that interconnection or another from left to right extend can be used for filled media.If interconnection has width separately, this may cause having only the opening of interconnection and groove structure 4 to have to be filled with dielectric.By so partially filled, just can after composite construction machining, easily remove filled medias from groove structure 4.
The result of above-mentioned operation can see in Fig. 2 c that its further groove 6 ' is used there, and has formed groove structure 4 from the bottom side of lower part 2, so this finally feasible nozzle passage 5 ' that can enter in the parts of upper strata.Can visualize, this class microfluidic device 1 can in a row be used for a large amount of spray nozzle devices, or is used for the more manufacturing technique method of the multichannel microfluidic device of wide region.
The result of above-mentioned operation is a device 1, and it especially exists with bulk form or with the platelet form of composite, as depicted in figs. 1 and 2.For first embodiment, Fig. 2 b has shown two outlets that have been filled filled media of nozzle 5 with the ratio of amplifying a little, and wherein label 7 refers to filled media.
It should be understood that process of the present invention preferably utilizes the clean room technology to carry out, wherein should select the clean room of appropriate level to handle.
The selection of filled media is particular importance for process of the present invention.About this point, must consider that the size of micron order groove structure 4 needs special filling technique.The effect of capillarity, surface tension and surface viscosity, the result here be very different from those macro-sizes than the observed result of giant device.In addition, known water-cooled freeze techniques and wide of the mark here from macroscopical technology.
First important attribute of filled media be filled media non-miscible in and be not dissolved in employed any cooling-lubricant.In order to prevent that filled media from dissolving from groove structure 4 in process, the effect of these dissolvings is inappreciable at least.For example, if used mechanical sawing, adopt water base cooling-lubricant usually.So, filled media should be insoluble to or be insoluble in very much water.Practice shows that this puts to be in micron order from size, can select the best filled media of using with liquid form that is used for filling groove structure 4.
Yet, according to a particularly preferred embodiment, filled media in mechanical processing process with agglomerating solid-state appearance.Therefore just guarantee that groove structure 4 avoids the pollution of pollutant.The agglomerating solid-state of filled media can obtain by the evaporation of the solvent flashing that may use or by carrying out chemical process.Yet employing will be particularly advantageous with the production process of temperature correlation.Therefore just can guarantee in mechanical processing process to be in normal temperature following time, filled media is with agglomerating solid-state the existence, but is being much higher than under the filling temp of normal temperature, and the filled media of liquid form has just been filled groove structure 4.
Obviously, these temperature, be that normal temperature and filling temp all depend on filled media largely.Certainly, regularly and the material of the plate that mutually combines two-dimensionally also play a part certain.Yet, it is contemplated that usually normal temperature range is between about 2 ℃ to about 120 ℃, the filling temp scope is between about 5 ℃ to about 280 ℃.
Usually, in order to allow to process, will use low viscosity and/or high-volatile filled media with low relatively temperature.Yet, also can under longer process time and/or higher processing temperature, use to have the more filled media of high viscosity.
For example, by the mixture of unit alcohol or polyalcohol, saturated and undersaturated aliphatic acid, fatty acid ester and these materials, can realize forcing at the above requirement on the filled media more generally.Polyalcohol (being called multi-functional or polyhydroxy-alcohol with the free burial ground for the destitute) also comprises ployalkylene glycol, for example polyethylene glycol.Verified, the unit alcohol or the polyalcohol that comprise 10-30 carbon atom, preferably comprise 12-24 carbon atom, especially comprise 16-20 carbon atom especially cause people's attention.The fusing point of these chemicals has the size that causes people and pay close attention to, for example is about 60 ℃, and they also have and for example are about 210 ℃ suitable boiling point.They preferably are insoluble in water but are dissolved in pure and mild ether, therefore are suitable for very much process of the present invention.The selection of employed filled media will be considered on market whether available problem of these chemicals during each was used separately.If more multiple selection is arranged, just can select for use abnormal cost efficiently, commercially available chemicals.
Alternative or additional for to the method for described and chemicals or temperature correlation can use other material to be used for filling.For example, have the liquid (ERF) that when applying voltage, can change its density.This liquid can use in described process, for example as filled media.
Problem the when size of micron order groove structure 4 has caused filling the groove structure 4 of plate-shaped composite structure.Promptly must consider to adopt special filling technique here.According to preferably telling about content, and practice verified particularly advantageously like this be the composite construction of before filled media 4 is filled into filled media, finding time, and in a vacuum, particularly residual pressure is less than filling under about 250 millibars situation.Thereby avoided in groove structure 4, producing bubble group.
Also advantageously, after groove structure 4 is filled filled medias, plate-shaped composite structure is got back under the normal pressure condition once more, and it also is favourable that the filled media that is initially liquid is solidified under the normal pressure condition.
In practice, plate-shaped composite structure integrally is inserted in the vessel volume that is evacuated under the expection residual pressure.Plate-shaped composite structure is tilted in institute subsequently and reaches in the volume and be immersed in the liquid filled media bath, is covered fully by liquid filled media up to it.This occurs on the continuous closure between the groove structure 4, make the liquid level of the filled media in the groove structure 4 from rising lentamente to the relative edge on one side, up to final filled media complete filling whole plate-shaped composite structure, i.e. wherein all groove structures 4.
After this, vessel volume is come back under the normal pressure.By plate-shaped composite structure horizontal positioned integrally, still being in liquid filled media just can be therefore and be retained in the groove structure 4 under himself surface tension effects.Reduce temperature subsequently, make filled media in groove structure 4, solidify.
After this, comprise the plate-shaped composite structure that solidifies filled media and cut off, or cut off along the groove 6 ' shown in Fig. 2 c by high speed diamond circular saw along the line 6.Subsequently, from groove structure 4, remove filled media.
In similarly installing, filled media can be packed in the groove structure 4 under pressure or by pressure.
As institute was necessary when how liquid filled media imported groove structure 4 before carrying out cutting operation is considered especially about being preferably, also need special consideration about how after machining, removing the filled media that is arranged in groove structure 4 once more.In this, recommend to utilize the rising of filled media temperature, come from the groove structure 4 of separating nozzle device 1, to remove filled media.This may mean filled media pass through temperature rising and from groove structure 4 evaporation.Except adopting the rising method of temperature, can also promote evaporation more easily to take place fast by environmental pressure is enough hanged down.Replacement scheme as to this facts have proved, can be by dissolving filled media in solvent and by spraying the mixture of filled media/solvent where necessary, and from the groove structure 4 of the spray nozzle device 1 that separates, remove filled media.The use that can mutually combine of these two kinds of methods.
The solvent of the above filled media of describing in detail and will particularly advantageously using of the recommended conduct of pure and mild ether.Preferred low-molecular-weight alcohol or ether, for example methyl alcohol, ethanol, propyl alcohol, isopropyl alcohol and/or the diethyl ether of using.Therefore, can from groove structure 4, remove the residue of filled media in practice up hill and dale, and can make microfluidic device by low-down percent defective.
In above-mentioned connection, before the cleaning after the machining that prevents from the follow-up pollution of groove structure 4, be recommended in yet to comprise cutting operation, do not remove filled media.
Fig. 4 and Fig. 5 are illustrating of atomizer 11 of the present invention, it comprises microfluidic device or the spray nozzle device 1 according to first or second embodiment that is used for atomizing fluids 12, particularly efficient medicine or similar solvent, and wherein atomizer is in not tension (Fig. 4) or its tension (Fig. 5).Especially, atomizer 11 forms portable inhalator, and preferably operates under the situation of gaseous propellant not having.
Atomize by the fluid 12 that is preferably liquid, particularly medicine, but just formed the aerosol of user's incoming call or suction, wherein the user is not shown in the diagram goes out.Suck and to carry out once every day at least usually, one day several times especially, and preferably carry out at interval with preset time.
When driving spring 17 is axially strained, keep seat 16 to move down as shown in figure with container 13 and feed pipe 19, fluid 12 is sucked out container 13 via check-valves 20 and enters the balancing gate pit 21 of pressure generator 15.Because spray nozzle device 1 has very little flow section and is preferably formed and is capillary, therefore just produced enough strong throttle effect, it is enough to prevent reliably the suction that the inhalation power by this some place produces air, even also be like this when not having check-valves.
When after operating locking element 18, discharging pulling force, fluid 12 in the balancing gate pit 21 just by driving spring 17, be that spring force is under the pressure, this spring force makes feed pipe 19 move up once more, fluid 12 is discharged and atomizing by spray nozzle device 1, especially be atomized into micron order or nano level particle, preferably be atomized into the particle of about 5 μ m that can enter lung, and form the vaporific or jet of aerosol 24 as shown in Figure 4.Therefore, fluid 12 is preferred pure mechanically to be transmitted and atomizes, and is not particularly having gaseous propellant and is not having under the situation of electric power.
User (among the figure not shown go out) can inhalation aerosol 24, and other gas can be inhaled in the interface 23 by at least one other air openings 25 therefrom.
By manual rotational shell parts 28, inner part 27 can be with respect to 26 rotations of shell upper part, and driving spring 17 can be strained by driver not shown but that act on the maintenance seat 16 thus.When applying pulling force, container 13 moves axially downwards, presents the final position that is in the tension as shown in Figure 5 up to container 13.In the nebulisation operation process, driving spring 17 is retracted its initial position once more with container 13.Therefore container 13 carries out stroke movement when tension operation and nebulisation operation.
Therefore, the present invention relates to be used to suck the atomizer 11 of purposes, this atomizer produces aerosol or in fact stable aerosol, and its speed of sending is enough low, makes aerosol in fact reach dead state after propagating some centimetres.For by sucking aerosol 24, additional air-flow is necessary.
In order to finish disclosing of present patent application, carried out explanation in advance in conjunction with the complete disclosure of patent WO 91/1446 A1 and WO97/12687 A1.The disclosure of the Invention of these two patents relates generally to atomizer, it has the 5-60MPa that acts on the fluid, the spring pressure that is preferably 10-50MPa, and have 10-50 μ l, be preferably 10-20 μ l, most preferably be every stroke volume of about 15 μ l, its particle size can be up to 20 μ m, be preferably 3-10 μ m.The disclosure of the Invention of these two patents also preferably relates to the atomizer that has with the cylinder similar shapes, its length is that the extremely about 15cm length and width degree of about 9cm is about 2cm to 5cm, and the angle of flare of injection stream is 20 ° to 160 °, is preferably 80 ° to 100 °.The value of this magnitude, particularly preferred value also are applicable to the atomizer 11 of telling about content according to the present invention.
Claims (20)
1. process of producing a large amount of microfluidic devices with plate-shaped composite structure, wherein, described plate-shaped composite structure comprises each other two-dimensionally and together the two boards with flat surfaces of being permanently connected, with and be of a size of micron order and formed a large amount of circulation groove structures of fluid passage, described groove structure is arranged in the surface of a wherein plate that combines with the surface of another piece plate
Wherein, described plate-shaped composite structure is carried out machining along the line that extends between described groove structure, makes that the microfluidic device in the described plate-shaped composite structure is separated afterwards individually or in groups,
It is characterized in that,
Form the groove structure of plate-shaped composite structure, make described groove structure via described line at least one direction the one side from described plate-shaped composite structure interconnect continuously to the relative edge,
Before machining, utilize filled media to fill the groove structure of described plate-shaped composite structure at least in part, make described groove structure before machining and/or afterwards lead to outside opening or part is filled by described filled media, wherein, described filled media be selected such that it not can by described machining itself or in mechanical processing process used other adminicle remove, and
After machining, from the groove structure of described microfluidic device, remove described filled media.
2. process according to claim 1 is characterized in that, employed described filled media non-miscible in and/or be not dissolved in employed cooling-lubricant in the machining.
3. process according to claim 1 and 2 is characterized in that, utilizes liquid filled media to fill described groove structure.
4. process according to claim 1 and 2 is characterized in that employed filled media exists with agglomerating solid-state form in mechanical processing process.
5. process according to claim 4 is characterized in that, filled media is being introduced in the described groove structure under the temperature of normal temperature.
6. process according to claim 5 is characterized in that, the scope of described normal temperature is between 2 ℃ to 120 ℃.
7. process according to claim 4 is characterized in that, the scope of filling temp is between 5 ℃ to 280 ℃.
8. process according to claim 1 and 2 is characterized in that, has used alcohols, aliphatic acid, saturated and undersaturated fatty acid ester, the perhaps mixture of these materials.
9. process according to claim 1 and 2 is characterized in that, utilizing before described filled media fills described groove structure, and the described plate-shaped composite structure of finding time, and under vacuum, fill.
10. process according to claim 9, it is characterized in that, utilizing after described filled media fills described groove structure, described plate-shaped composite structure is got back under the normal pressure, and be initially liquid being solidificated under the normal pressure of filled media and carry out.
11. process according to claim 1 and 2 is characterized in that, removes described filled media be from described groove structure in temperature following time that described filled media is in rising and carry out.
12. process according to claim 1 and 2 is characterized in that, removing described filled media from described groove structure is to be undertaken by described filled media of dissolving solvent and the mixture that optionally sprays described filled media/solvent.
13. process according to claim 12 is characterized in that, uses alcohol or ether to be used as described solvent.
14. process according to claim 1 and 2 is characterized in that, up to finish machining, then cleared up described microfluidic device after, just remove described filled media.
15. process according to claim 1 and 2 is characterized in that, by carrying out machining along described line, just groove structure is incorporated in the described plate-shaped composite structure, described groove structure has run through a plate, and can not run through another piece plate.
16. atomizer (11) that is used for fluid (12), described atomizer (11) comprises the spray nozzle device (1) of described fluid (12) that are used to atomize, it is characterized in that described spray nozzle device (1) is produced according to the described process of above-mentioned each claim.
17. atomizer according to claim 16 is characterized in that, atomizing is pure mechanically realization.
18., it is characterized in that described atomizer (11) comprises container (13) according to claim 16 or 17 described atomizers, described container (13) is a changeable type, and described fluid (12) is housed.
19. atomizer according to claim 18 is characterized in that, in order to produce the pressure of atomizing usefulness, described container (13) moves in the mode of stroke.
20., it is characterized in that described atomizer (11) forms the inhalator that is used for medical atomizing agent treatment according to claim 16 or 17 described atomizers.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10332434.8 | 2003-07-16 | ||
| DE10332426.7 | 2003-07-16 | ||
| DE10332434 | 2003-07-16 |
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| CN1849174A CN1849174A (en) | 2006-10-18 |
| CN100435970C true CN100435970C (en) | 2008-11-26 |
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| CN (1) | CN100435970C (en) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2077132A1 (en) | 2008-01-02 | 2009-07-08 | Boehringer Ingelheim Pharma GmbH & Co. KG | Dispensing device, storage device and method for dispensing a formulation |
| EP2254704B1 (en) * | 2008-03-17 | 2016-10-19 | Boehringer Ingelheim International GmbH | Reservoir and nebulizer |
| JP5670421B2 (en) | 2009-03-31 | 2015-02-18 | ベーリンガー インゲルハイム インターナショナル ゲゼルシャフト ミット ベシュレンクテル ハフツング | Component surface coating method |
| JP5763053B2 (en) | 2009-05-18 | 2015-08-12 | ベーリンガー インゲルハイム インターナショナル ゲゼルシャフト ミット ベシュレンクテル ハフツング | Adapter, inhaler and atomizer |
| JP5658268B2 (en) | 2009-11-25 | 2015-01-21 | ベーリンガー インゲルハイム インターナショナル ゲゼルシャフト ミット ベシュレンクテル ハフツング | Nebulizer |
| US10016568B2 (en) | 2009-11-25 | 2018-07-10 | Boehringer Ingelheim International Gmbh | Nebulizer |
| UA107097C2 (en) | 2009-11-25 | 2014-11-25 | Бьорінгер Інгельхайм Інтернаціональ Гмбх | Dispenser |
| US9943654B2 (en) | 2010-06-24 | 2018-04-17 | Boehringer Ingelheim International Gmbh | Nebulizer |
| EP2694220B1 (en) | 2011-04-01 | 2020-05-06 | Boehringer Ingelheim International GmbH | Medical device comprising a container |
| US9827384B2 (en) | 2011-05-23 | 2017-11-28 | Boehringer Ingelheim International Gmbh | Nebulizer |
| WO2013152894A1 (en) | 2012-04-13 | 2013-10-17 | Boehringer Ingelheim International Gmbh | Atomiser with coding means |
| US9744313B2 (en) | 2013-08-09 | 2017-08-29 | Boehringer Ingelheim International Gmbh | Nebulizer |
| EP2835146B1 (en) | 2013-08-09 | 2020-09-30 | Boehringer Ingelheim International GmbH | Nebulizer |
| WO2015169732A1 (en) | 2014-05-07 | 2015-11-12 | Boehringer Ingelheim International Gmbh | Container, nebulizer and use |
| EP3139984B1 (en) | 2014-05-07 | 2021-04-28 | Boehringer Ingelheim International GmbH | Nebulizer |
| RS63171B1 (en) | 2014-05-07 | 2022-05-31 | Boehringer Ingelheim Int | Nebulizer |
| CN112090603B (en) * | 2019-06-17 | 2022-11-08 | 苏州天健云康信息科技有限公司 | Microfluidic device and method for manufacturing the same |
| CN117442826B (en) * | 2023-10-26 | 2024-10-01 | 苏州新劢德医疗器械科技有限公司 | Integrated nozzle structure, assembling method and atomizing device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1187976A (en) * | 1966-07-04 | 1970-04-15 | Plessey Btr Ltd | Improvements in the Manufacture of Recesses of Rectangular Cross-Section Using an Abrasive Jet. |
| GB1273741A (en) * | 1968-08-09 | 1972-05-10 | Plessey Co Ltd | Improvements relating to electroforming of fluidic devices |
| WO1994007607A1 (en) * | 1992-09-29 | 1994-04-14 | Boehringer Ingelheim International Gmbh | Atomising nozzle and filter and spray generating device |
| WO1997012687A1 (en) * | 1995-10-04 | 1997-04-10 | Boehringer Ingelheim International Gmbh | Device of miniaturised construction for producing high pressure in a fluid to be atomised |
-
2004
- 2004-07-13 CN CNB2004800262278A patent/CN100435970C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1187976A (en) * | 1966-07-04 | 1970-04-15 | Plessey Btr Ltd | Improvements in the Manufacture of Recesses of Rectangular Cross-Section Using an Abrasive Jet. |
| GB1273741A (en) * | 1968-08-09 | 1972-05-10 | Plessey Co Ltd | Improvements relating to electroforming of fluidic devices |
| WO1994007607A1 (en) * | 1992-09-29 | 1994-04-14 | Boehringer Ingelheim International Gmbh | Atomising nozzle and filter and spray generating device |
| WO1997012687A1 (en) * | 1995-10-04 | 1997-04-10 | Boehringer Ingelheim International Gmbh | Device of miniaturised construction for producing high pressure in a fluid to be atomised |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1849174A (en) | 2006-10-18 |
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