CN100427880C - Real-time detection device and method for roughness of optical glass - Google Patents
Real-time detection device and method for roughness of optical glass Download PDFInfo
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- CN100427880C CN100427880C CNB200610117160XA CN200610117160A CN100427880C CN 100427880 C CN100427880 C CN 100427880C CN B200610117160X A CNB200610117160X A CN B200610117160XA CN 200610117160 A CN200610117160 A CN 200610117160A CN 100427880 C CN100427880 C CN 100427880C
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- 239000005304 optical glass Substances 0.000 title claims abstract description 49
- 238000000034 method Methods 0.000 title claims abstract description 17
- 238000011897 real-time detection Methods 0.000 title claims abstract description 16
- 230000003287 optical effect Effects 0.000 claims abstract description 37
- 238000012545 processing Methods 0.000 claims description 21
- 238000005259 measurement Methods 0.000 claims description 8
- 238000012360 testing method Methods 0.000 claims description 6
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 238000004088 simulation Methods 0.000 claims description 3
- 239000011521 glass Substances 0.000 abstract description 12
- 238000001514 detection method Methods 0.000 abstract description 10
- 230000006378 damage Effects 0.000 abstract description 4
- 230000003746 surface roughness Effects 0.000 abstract description 4
- 238000012544 monitoring process Methods 0.000 abstract description 3
- 238000009659 non-destructive testing Methods 0.000 abstract description 3
- 238000005498 polishing Methods 0.000 abstract 2
- 230000005284 excitation Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 description 3
- 208000027418 Wounds and injury Diseases 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 208000014674 injury Diseases 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
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Abstract
The invention relates to a real-time detection device and a method for roughness of optical glass used for an optical polishing machine, which utilize the surface scattering principle of laser, naturally separate scattered light from reflected light by adjusting the incident angle between a light beam emitted by a laser light source and the surface to be measured of the glass to be greater than or equal to a total reflection angle while the optical glass is processed, respectively measure the intensity of the two light beams and convert the intensity into current intensity, calculate the ratio of the current intensity generated by the excitation of the two light beams, and accurately calculate the surface roughness of the surface to be measured. The invention relates to a nondestructive testing measure, which can realize nondestructive monitoring of a ring polishing machine in real time, does not damage any workpiece during detection and ensures higher detection precision.
Description
Technical field
The present invention relates to optical glass, relate to optical glass roughness real-time detection apparatus and method, particularly a kind of optical glass roughness real-time detection apparatus and method that is used for the optical polish machine.
Background technology
In patent " a kind of method and device that detects surfaceness " (patent publication No. CN1081250), describe a kind of method of measure surface roughness in detail, this method is utilized digital image processing techniques that one or continuous several light is cut the bright band image to carry out rim detection, obtaining a sample length interior is the edge contour coordinate points and the roughness parameter of unit with the pixel, carry out the unit conversion according to calibration, can obtain the surface roughness parameter in the sample length.Making device in this way is by increasing imageing sensor, image collecting device, the making of parts such as calculating and control device on the light-section microscope basis.
This invention has a great defective can not detect in real time exactly, and especially for different processing environments, its portability is poor.Owing to must be placed on the worktable and detect, may cause damage to high-precision part, if workpiece can detect while process, promptly carry out the real non-destructive detection, the accuracy of detection that so just can improve workpiece also can be avoided the injury to workpiece.
In the prior art, in real time the measuring workpieces surfaceness adopts mostly and diminishes detection, because it causes to a certain degree injury to workpiece in testing process, manufacturing is unaccommodated so this detection means is for high-precision processing.
Summary of the invention
The object of the invention is intended to solve above-mentioned the deficiencies in the prior art, a kind of optical glass roughness real-time detection apparatus and method that is used for the optical polish machine is provided, it is a kind of Non-Destructive Testing measure, and it can make to detect in the real-time testing process does not injure any workpiece, guarantees than high measurement accuracy.
Technology of the present invention solves principle: utilize the surface scattering of laser, when optical glass is processed, do not leave under the situation of worktable, incident angle by adjusting light beam that LASER Light Source sends and glass surface to be measured is more than or equal to the angle of total reflection, with scattered light naturally separately, measure the intensity of this two-beam respectively, and be converted into strength of current with reflected light, calculate the ratio that this two-beam excites the strength of current of generation, to calculate the surfaceness on surface to be measured accurately.
Technical solution of the present invention is as follows:
A kind of real-time detection apparatus that is used for the optical glass roughness of optical polish machine comprises the optical glass to be processed that a buffing machine is placed above, it is characterized in that comprising:
A guide rail beam is parallel to ground and is fixed on the support, vertically be provided with a lifting screw by the lifting nut that matches on this guide rail beam, this lifting screw can move horizontally along the guide rail of this guide rail beam and its height of the adjusting by described lifting nut, first light intensity detector is connected the lower end of described lifting screw, be provided with convex lens before this first light intensity detector, the test surface of described first light intensity detector is positioned on the focal plane of these convex lens; Described convex lens place processing optical glass to be measured finished surface to be measured directly over;
A LASER Light Source is installed on first optical adjusting frame; When sending a laser beam and arrive to be measured of upper surface of optical glass to be processed processing by optical glass to be processed by this LASER Light Source, the angle that forms with surface normal is greater than or equal to the angle of total reflection of this optical glass to be processed, is placing second light intensity detector along total reflection light direction; Second light intensity detector is placed on second optical adjusting frame;
Described first light intensity detector connects a computing machine by an A/D converter; Second light intensity detector connects described computing machine by another A/D converter, and a monitor links to each other with described computing machine.
Described first optical adjusting frame and second optical adjusting frame are four-dimensional optical adjusting frame.
Utilize the method for the real-time detection apparatus measurement optical glass roughness of described optical glass roughness, it is characterized in that comprising the following steps:
1. before measuring, at first determine glass types to be processed and the most not good enough position of optical glass finished surface to be processed, the i.e. position of tested point;
2. regulate the angle of LASER Light Source emission light beam by first optical adjusting frame, the described tested point of laser beam directive that this LASER Light Source is sent, and the angle 〉=angle of total reflection that is constituted with surface normal to be measured, by the angle that second optical adjusting frame is regulated second light intensity detector, make it can receive whole reflected light just;
3. regulate the position of lifting screw on guide rail beam, make first light intensity detector and described convex lens place processing optical glass processing to be measured surface tested point directly over, regulate lifting nut, guarantee that scattered light all converges in first light intensity detector by described convex lens;
4. select optical glass workpiece, under the condition of simulation processing environment, measure in real time, open described LASER Light Source, first light intensity detector, second light intensity detector and computing machine, measure with standard roughness; Set up roughness R
qWith I
1/ I
2Relation curve, in computing machine, set up corresponding database;
5. during actual measurement, the light intensity I that first light intensity detector and second light intensity detector are obtained
1And I
2By A/D converter input COMPUTER CALCULATION and with corresponding roughness R
qCompare, just can obtain the surfaceness R of optical glass to be measured
q, roughness value is presented on the monitor.
Principle of work of the present invention can simply be expressed as:
According to optical laws, a branch of illumination is mapped to body surface, will be divided into scattered light and reflected light, and following formula is arranged:
In the formula: l
1The expression reflective light intensity, I
2The expression scattered light intensity, f (M, R
q, λ) expression one and roughness R
q, λ optical source wavelength and the relevant function of material M character.By the above-mentioned fact as can be known, optical source wavelength and material character are known, and the light intensity of two-beam also can be measured, so roughness R
qCan obtain.For convenient calculating is special following formula is deformed into:
Following formula can be rewritten as:
Wherein Function Mapping concerns that F can calibrate by experiment and learns, corresponding to different materials and optical source wavelength, roughness R
qThough the formula that embodies different, can calibrate by experiment and try to achieve roughness R
qWith I
1/ I
2Relation curve, so can obtain accurate roughness value by the ratio of asking for the two-beam light intensity, its precision is relevant with the light intensity detector precision, therefore as long as choose high-precision light intensity detector, the precision of this device is can be guaranteed.
Detect in real time for surfaceness, need not repeat above-mentioned result, as long as buffing machine is opened, glass to be processed is rotated around Z, start mill grinding work piece upper surface simultaneously, the position of its monitoring point and the position of grinding points go out the ratio of the current value that two light intensity are transformed by COMPUTER CALCULATION, the result is converted into roughness value is illustrated on the monitor.
Technique effect of the present invention is:
1, can in the polishing process of buffing machine, carry out Non-Destructive Testing, reach the purpose of real-time control by this detection means glass pieces;
2, after finishing necessary adjustment and manual fine setting, this device can be monitored automatically;
3, any roughness of detection optics separately also can be carried out kinetic measurement by connecting signal processing apparatus, can finish the detection that whole optical device roughness distributes like this;
4, testing result precision height;
5, the present invention detects in real time and controls in real time buffing machine and is of great importance.
Description of drawings
Fig. 1 is the structural representation of the real-time detection apparatus most preferred embodiment of optical glass roughness of the present invention.
Fig. 2 concerns vertical view for the position of measurement point of the present invention.
Fig. 3 is the part index path of apparatus of the present invention.
Embodiment
The invention will be further described with real-time example below in conjunction with accompanying drawing.
See also Fig. 1 earlier, Fig. 1 is the structural representation of the real-time detection apparatus most preferred embodiment of optical glass roughness of the present invention.As seen from the figure, the present invention is used for the real-time detection apparatus of the optical glass roughness of optical polish machine, comprises the optical glass workpiece to be processed that a buffing machine 3 is placed above, it is characterized in that comprising:
A guide rail beam 10 is parallel to ground and is fixed on the support 11, vertically be provided with a lifting screw 9 by the lifting nut 8 that matches on this guide rail beam 10, this lifting screw 9 can move horizontally along the guide rail of this guide rail beam 10 and its height of the adjusting by described lifting nut 8, first light intensity detector 6 is connected the lower end of described lifting screw 9, be provided with convex lens 7 before this first light intensity detector 6, the test surface of described first light intensity detector 6 is positioned on the focal plane of these convex lens 7; Described convex lens 7 place processing optical glass to be measured finished surface to be measured directly over;
A LASER Light Source 2 is installed on first optical adjusting frame 1; When sending a laser beam and arrive to be measured of upper surface of optical glass to be processed processing by optical glass to be processed by this LASER Light Source 2, the angle that forms with surface normal is greater than or equal to the angle of total reflection of this optical glass to be processed, is placing second light intensity detector 4 along total reflection light direction; Second light intensity detector 4 is placed on second optical adjusting frame 5;
Described first light intensity detector 6 connects a computing machine 13 by an A/D converter; Second light intensity detector 4 connects 13, one monitors 12 of described computing machine by another A/D converter and links to each other with described computing machine 13.Described first optical adjusting frame 1 and second optical adjusting frame 5 are four-dimensional optical adjusting frame.
Utilize the real-time detection apparatus of optical glass roughness of the present invention to be used for the method for real-time detection of the optical glass roughness of optical polish machine, comprise the following steps:
1. before measuring, at first determine glass types to be processed and the most not good enough position of optical glass finished surface to be processed, the i.e. position of tested point;
2. regulate the angle that LASER Light Source 2 is launched light beams by first optical adjusting frame 1, the described tested point of laser beam directive that this LASER Light Source 2 is sent, and the angle 〉=angle of total reflection that is constituted with surface normal to be measured, angle by second optical adjusting frame 5 is regulated second light intensity detector 4 makes it can receive whole reflected light just;
3. regulate the position of lifting screw 9 on guide rail beam 10, make first light intensity detector 6 and described convex lens 7 place processing optical glass processing to be measured surface tested point directly over, regulate lifting nut 8, guarantee that scattered light all converges in first light intensity detector 6 by described convex lens 7;
4. select optical glass workpiece, under the condition of simulation processing environment, measure in real time, open described LASER Light Source 2, first light intensity detector 6, second light intensity detector 4 and computing machine 13, measure: set up roughness R with standard roughness
qWith I
1/ I
2Relation curve, in computing machine 13, set up corresponding database;
5. during actual measurement, the light intensity I that first light intensity detector 6 and second light intensity detector 4 are obtained
1And I
2By A/D converter input computing machine 13 calculate and with corresponding roughness R
qCompare, just can obtain the surfaceness R of optical glass to be measured
q, roughness value is presented on the monitor 12.
In case, in computing machine 13, set up the roughness R under the corresponding processing environment
qWith I
1/ I
2, the database of relation curve after, when measuring in real time once more, just needn't repeat for the 4. step.
Described first optical adjusting frame (1) is four-dimensional optical adjusting frame, adjust its X, Y, the position of Z direction and around the angle of X-axis, in the ordinary course of things, the total reflection angle of glass to be processed and air is between 55～75 °, so as long as guarantee LASER Light Source 2 penetrate light with the incident angle between the surface on glass to be processed greater than 80 °.The light path that forms as shown in Figure 3.Because surface roughness profile is with workpiece rotational frequency and Workpiece Rotating time correlation, so must know the rotating speed of buffing machine 3.If glass to be processed is thinner, then continue to adjust first optical adjusting frame 1, adjust its Z direction height, reduce its Z direction height poor with the workpiece height, adjust the angle of LASER Light Source 2 subsequently around X-axis, up to can squeezing into the poorest processing stand with laser is accessible, and guarantee to penetrate from glass sides to be processed from the light that the poorest processing stand reflects.Continue to adjust second light intensity detector 4, make it can receive the reflected light that comes out from glass to be processed.
Open the light intensity that computing machine 13, the first light intensity detectors 6 and second light intensity detector 4 detect and be converted into strength of current, by A/D converter, input computing machine 13 through computing machine 13 computings, is presented at the result on the monitor 12.
Detect in real time for surfaceness, need not repeat above-mentioned result,, glass to be processed is rotated around Z, start mill grinding work piece upper surface simultaneously, the position of its monitoring point and the position of grinding points such as Fig. 2 as long as buffing machine 3 is opened.
Claims (3)
1, a kind of real-time detection apparatus that is used for the optical glass roughness of optical polish machine comprises the optical glass to be processed that a buffing machine (3) is placed above, it is characterized in that comprising:
A guide rail beam (10) is parallel to ground and is fixed on the support (11), this guide rail beam (10) is gone up and vertically is provided with a lifting screw (9) by the lifting nut (8) that matches, this lifting screw (9) can move horizontally along the guide rail of this guide rail beam (10), regulate the height of described lifting screw (9) by described lifting nut (8), first light intensity detector (6) is connected the lower end of described lifting screw (9), this first light intensity detector (6) is provided with convex lens (7) before, and the test surface of described first light intensity detector (6) is positioned on the focal plane of these convex lens (7); Described convex lens (7) place optical glass to be processed finished surface to be measured directly over;
A LASER Light Source (2) is installed on first optical adjusting frame (1); When sending a laser beam and arrive to be measured of upper surface of optical glass to be processed processing by optical glass to be processed by this LASER Light Source (2), the angle that forms with surface normal is greater than or equal to the angle of total reflection of this optical glass to be processed, is placing second light intensity detector (4) along total reflection light direction; Second light intensity detector (4) is placed on second optical adjusting frame (5);
Described first light intensity detector (6) connects a computing machine (13) by an A/D converter; Second light intensity detector (4) connects described computing machine (13) by another A/D converter, and a monitor (12) links to each other with described computing machine (13).
2, the real-time detection apparatus of optical glass roughness according to claim 1 is characterized in that described first optical adjusting frame (1) and second optical adjusting frame (5) are four-dimensional optical adjusting frame.
3, utilize the real-time detection apparatus of the described optical glass roughness of claim 1 to carry out the method for real-time measurement of the optical glass roughness of optical polish machine, it is characterized in that comprising the following steps:
1. before measuring, at first determine optical glass kind to be processed and the most not good enough position of optical glass finished surface to be processed, the i.e. position of tested point;
2. regulate the angle of LASER Light Source (2) emission light beam by first optical adjusting frame (1), the described tested point of laser beam directive that this LASER Light Source (2) is sent, and the angle that is constituted with surface normal to be measured is more than or equal to the angle of total reflection, angle by second optical adjusting frame (5) is regulated second light intensity detector (4) makes it can receive whole reflected light just;
3. regulate the position of lifting screw (9) on guide rail beam (10), make first light intensity detector (6) and described convex lens (7) place processing optical glass processing to be measured surface tested point directly over, regulate lifting nut (8), guarantee that scattered light all converges in first light intensity detector (6) by described convex lens (7);
4. select optical glass workpiece, under the condition of simulation processing environment, measure in real time, open described LASER Light Source (2), first light intensity detector (6), second light intensity detector (4) and computing machine (13), measure with standard roughness; Set up roughness R
qWith I
1/ I
2Relation curve, in computing machine (13), set up corresponding database, wherein I
1Be the light intensity that first light intensity detector (6) is obtained, I
2It is the light intensity that second light intensity detector (4) is obtained;
5. during actual measurement, the light intensity I that first light intensity detector (6) and second light intensity detector (4) are obtained
1And I
2By A/D converter input computing machine (13) calculate and with corresponding roughness R
qCompare, just can obtain the surfaceness R of optical glass to be measured
q, roughness value is presented on the monitor (12).
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| CNB200610117160XA CN100427880C (en) | 2006-10-16 | 2006-10-16 | Real-time detection device and method for roughness of optical glass |
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| CNB200610117160XA CN100427880C (en) | 2006-10-16 | 2006-10-16 | Real-time detection device and method for roughness of optical glass |
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| CN100427880C true CN100427880C (en) | 2008-10-22 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108680126A (en) * | 2018-04-27 | 2018-10-19 | 上海集成电路研发中心有限公司 | A kind of device and method of detection pipeline inner wall roughness |
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| KR101383600B1 (en) * | 2010-03-11 | 2014-04-11 | 주식회사 엘지화학 | Apparatus and method for monitoring glass plate polishing state |
| CN102102977B (en) * | 2011-01-05 | 2012-07-25 | 北京物资学院 | Driving unit of roughmeter |
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| CN107036560B (en) * | 2016-11-09 | 2019-04-19 | 上海理工大学 | The Surface Roughness Detecting Method of optical glass accurate grinding processing |
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| CN113048921A (en) * | 2021-03-24 | 2021-06-29 | 长江存储科技有限责任公司 | Method and system for measuring surface roughness of wafer |
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|---|---|---|---|---|
| CN1037125C (en) * | 1992-07-10 | 1998-01-21 | 山东工业大学 | Method and apparatus for detecting surface roughness |
| JPH10185829A (en) * | 1996-12-20 | 1998-07-14 | Matsushita Electric Ind Co Ltd | Method and device for inspecting defect on surface of transparent flat body |
| JP2001099629A (en) * | 1999-09-30 | 2001-04-13 | Nippon Muki Co Ltd | Method for measuring surface unevenness of fiber paper |
| CN200965465Y (en) * | 2006-10-16 | 2007-10-24 | 中国科学院上海光学精密机械研究所 | Real-time detection device for roughness of optical glass |
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2006
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1037125C (en) * | 1992-07-10 | 1998-01-21 | 山东工业大学 | Method and apparatus for detecting surface roughness |
| JPH10185829A (en) * | 1996-12-20 | 1998-07-14 | Matsushita Electric Ind Co Ltd | Method and device for inspecting defect on surface of transparent flat body |
| JP2001099629A (en) * | 1999-09-30 | 2001-04-13 | Nippon Muki Co Ltd | Method for measuring surface unevenness of fiber paper |
| CN200965465Y (en) * | 2006-10-16 | 2007-10-24 | 中国科学院上海光学精密机械研究所 | Real-time detection device for roughness of optical glass |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108680126A (en) * | 2018-04-27 | 2018-10-19 | 上海集成电路研发中心有限公司 | A kind of device and method of detection pipeline inner wall roughness |
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