CN100406737C

CN100406737C - Vacuum pump with turbination

Info

Publication number: CN100406737C
Application number: CNB2004100574318A
Authority: CN
Inventors: 武藤龙介
Original assignee: Anest Iwata Corp
Current assignee: Anest Iwata Corp
Priority date: 2004-08-13
Filing date: 2004-08-13
Publication date: 2008-07-30
Anticipated expiration: 2024-08-13
Also published as: CN1734096A

Abstract

The present invention relates to a vortex vacuum pump with rotating and fixing vortexes. The rotating vortex is fixed on an eccentric part of a driving shaft in the rotating way and is rotated by the driving shaft, and therefore, gas is sucked in a compression chamber positioned between the rotating vortex and the fixing vortex through a sucking hole. Outer air is introduced in the compression chamber through a ventilating hole axially formed in the driving shaft and a check valve, the check valve is turned on by centrifugal force in the rotation of the driving shaft, and therefore, in order to enhance the durability of the eccentric part and a bearing, the eccentric part and the bearing are cooled. When the driving shaft stops rotating, the check valve is turned off, and therefore, noxious gas in the compression chamber can not be leaked outside. Therefore, environmental pollution is avoided.

Description

The scrollwork vacuum pump

Technical field

The present invention relates to a kind of scrollwork vacuum pump, relate in particular to a kind of like this scrollwork vacuum pump, wherein the fixedly scroll of fixed scroll meshes with the revolution scroll that rotation is installed to the revolution scrollwork of live axle eccentric part in the shell, with certain eccentricity rotation, the gas that passes through the excircle suction of shell so just compresses towards the center and discharging the revolution scrollwork by live axle.

Background technique

The scrollwork vacuum pump is known.In the scrollwork vacuum pump, the operating time is long, and the eccentric part of live axle and bearing and the temperature that supports its packing can raise, thereby causes bearing and packing to damage, and they just become and are difficult to use like this.

Therefore, in the scrollwork vacuum pump, in order to improve serviceability, can not become too high in the operating time when long even it is highly important that the temperature that makes the live axle eccentric part yet.

In order to satisfy this requirement, the known following measures of those skilled in the art:

(1) low temperature or air at room temperature or nitrogen are imported the constricted zone of scrollwork vacuum pump and when toxic gas dilutes in constricted zone, this zone is cooled off.

(2) allow low temperature or air at room temperature or nitrogen to be discharged on the bearing and import in the constricted zone to the vent hole that forms at the live axle axis.Gas is released after this zone is cooled off.

(3) eccentric part of live axle is a hollow, and low temperature or room temperature air are imported eccentric part so that it is cooled off.

JP 63-105294A discloses as above-mentioned measure (1) described with inert gas N for example ₂Import by the outside, and Fig. 5 has wherein shown the gas flow paths in the eccentric part of the live axle described in above-mentioned measure (3).

Yet, still have problems in the abovementioned technology.For with in low temperature or room temperature air or the nitrogen importing constricted zone, lead-in path must be provided therein, and the device of supply gas will externally be provided.So its structure becomes complicated and maximizes, thereby has increased cost.

When live axle rotates, low temperature or air at room temperature or nitrogen import with cooling bearing by the vent hole of live axle, but when live axle stopped the rotation, toxic gas in the constricted zone or the gas that comprises impurity just flow backwards and are discharged into the outside by vent hole, thereby cause environmental pollution.

Summary of the invention

In view of the defective that exists in the prior art, an object of the present invention is to provide a kind of scrollwork vacuum pump, wherein outside air is imported into the pressing chamber between revolution scrollwork and fixed scroll, thereby in operating process, bearing is cooled off with the raising serviceability, and the toxic gas in the pressing chamber can not leak into the outside when inoperation.

For achieving the above object, the invention provides a kind of scrollwork vacuum pump, comprising:

A shell;

Live axle along this shell center, described live axle has an eccentric part;

A fixed scroll that is fixed in this shell, described fixed scroll have a fixedly scroll; And

A revolution scrollwork of installing and having the revolution scroll rotatably around the eccentric part of live axle, this revolution scrollwork is rotated prejudicially by live axle, the just shell center compression in the pressing chamber between fixedly scroll that is engaged with each other and revolution scroll and discharging of the gas that sucks of excircle by shell like this, thereby gas is sucked in the pressing chamber

Described live axle have one with external communications and axially extended therein vent, a valve opening that radially extends, this valve opening at one end is communicated with vent, open at the other end to pressing chamber, described valve opening has a safety check, thereby this safety check imports pressing chamber in live axle rotation with outside air and is opened by centrifugal force when cooling off, thereby and safety check when live axle stops the rotation, close and prevent that gas from leaking into the outside from pressing chamber.

Description of drawings

By the following description of being done at the accompanying drawing illustrated embodiment, it is more apparent that the features and advantages of the present invention will become, wherein:

Fig. 1 is the vertical sectional side view according to an embodiment of scrollwork vacuum pump of the present invention;

Fig. 2 is the decomposition vertical sectional view of the anti-spin of pin-crank type mechanism; And

Fig. 3 is the amplification vertical sectional view of safety check.

Embodiment

Fig. 1 is the vertical sectional side view of scrollwork vacuum pump of the present invention, wherein turning round scrollwork rotates, thereby will push to the pressing chamber that is formed between revolution scrollwork and the fixed scroll by the gas that excircle sucks, the gas after the compression is discharged in the position near the center.

Numeral 1 expression has the shell of the plate-like pressing chamber 2 of sealing, and it comprises casing 3 and cover 4, and cover 4 has suction port 1a on its outer periphery.Casing 3 and cover 4 have fixed charge method end plate 3a and the 4a that surrounds pressing chamber 2.Fixed charge

method end plate

3a and 4a have screw fixed scroll 3b and the 4b that forms fixed

scroll

3c and 4c respectively.

In the pressing chamber 2 between fixed charge

method end plate

3a and 4a, revolution scrollwork 5 is around the rotational of pressing chamber 2.Revolution scrollwork 5 has revolution scroll 5b, the 5b with fixed scroll 3c, the 4c engagement that departs from 180 degree each other, and it is installed on the eccentric part 8a of live axle 8 by bearing 6,7 rotatably at the center of shell 1.

Revolution end plate 5a is connected on the fixed charge method end plate 3a by the anti-spin of three known pin-crank type mechanism (not showing among Fig. 1).When live axle 8 rotation, finger plate 5a rotates in pressing chamber 2 prejudicially, thereby changes the fixedly seal space between scroll 3b, the 4b and intermeshing with it revolution scroll 5b.

As shown in Figure 2, in the anti-spin of pin-crank type mechanism, the main shaft 11a of pin-crank 11 is assemblied among the fixed charge method end plate 3a rotatably by ball bearing 12, and the bearing 14 of crankshaft 11b by the excircle of close finger plate 5a is assemblied in the supported hole 13.

Form a through hole 16 that is communicated with pressing chamber 2, and through hole 16 in the outer end by near connector 15 closures at cover 4 centers.Discharge orifice 17 is radially extended to the excircle of cover 4 by through hole 16.Discharging joint 18 is assemblied on the discharge orifice 17.Live axle 8 is driven by the motor (not shown), and

cooling fan

19,20 is installed on the live axle 8 respectively the position near casing 3 and cover 4 outer ends.Cooling fin 3d, 4d protrude from the outer surface of casing 3 and cover 4 respectively.

According to the present invention, the vent hole 21 that at one end is communicated with outside air extends along the center of live axle 8, and is communicated with valve opening 22 in the centre that thickens eccentric part 8a of live axle 8.Valve opening 22 is radially extended to the external peripheral surface of eccentric part 8a by vent hole 21.

Revolution end plate 5a has discharge orifice 24, discharge orifice 24 radially extends via communication path 24a from the outer end of vent hole 21, and via opening to being formed at fixedly the area of low pressure at the radius middle part of the pressing chamber 2 between scroll 3b, the 4b and revolution scroll 5b than the outlet 23 of minor diameter.

In valve opening 22, has the open and not open safety check 25 of radial outward inwardly.

Shown safety check 25 among Fig. 3.

Have the inner that radially is formed at valve opening 22 than the valve seat 22a of minor diameter, have larger-diameter part 22b and be formed at the outer end.Valve disc 26 has tapered portion that is positioned at low side and the columnar portion that has a plurality of vertical groove 26a at external peripheral surface.When valve opening 22 was closed by safety check 25, the tapered portion of valve disc 26 just was assemblied on the valve seat 22a.On than major diameter part 22b, provide support plate 27 with exhaust openings 27a.

Valve shaft 28 by the central vertical of valve disc 26 extend in the support plate 27, and the pressure spring 29 that this valve shaft 28 is positioned between valve disc 26 and the support plate 27 centers on.

In the scrollwork vacuum pump, the target that will describe below the intensity of the pressure spring 29 of safety check 25 is confirmed as realizing, and inlet hole 1a is connected to a seal container (not shown), with decompression or emptying when valve disc 26 is closed.Seal container accommodates poisonous gas, for example HCI.When the vent 21 of live axle 8 was communicated with outside air, live axle 8 was driven.

Along with the rotation of live axle 8, the revolution scrollwork that is installed to rotationally above it rotates with certain eccentricity when meshing with fixed scroll 3c, 4c.Therefore, be connected to that seal container on the inlet hole 1a reduces pressure gradually and emptying, toxic gas just is inhaled in the pressure chamber 2 in the scrollwork vacuum pump like this.

When the rotational speed of live axle 8 surpasses a particular value, therefore the valve disc 26 of safety check 25 will be subjected to and the centrifugal force that produces, thereby and move radially against pressure spring 29 and to open.

Simultaneously, the pressing chamber 2 in the scrollwork vacuum pump is compressed, but always has the pressure that forces down than atmosphere.

When valve disc 26 under the action of centrifugal force when valve seat 22a removes, the air that is imported valve openings 22 by the outside via vent 21 flows into discharge orifice 24 by the groove 26a of valve disc 26 and the opening 27a on chassis 27.At last, air is by exporting 23 pressing chambers 2 that are inhaled between

fixed scroll

3c, 4c and revolution scrollwork 5.

Therefore, the eccentric part 8a of live axle 8 and around it bearing 9,10 and packing by the air coolings that import by outlet 23 from the outside, thereby improved serviceability.

When operation stopped, safety check 25 cut out automatically, thereby prevented that the toxic gas in the pressing chamber 2 is discharged into the outside.So environment can not polluted by toxic gas.

Fixed scroll among the embodiment and revolution scrollwork have two faces, but the present invention also can be applicable to the single face scrollwork.

Above only relate to embodiments of the invention.Those skilled in the art can not deviate from the scope of claim and make multiple improvement and modification.

Claims

1. scrollwork vacuum pump comprises:

A shell;

Live axle along this shell center, described live axle has an eccentric part;

2. scrollwork vacuum pump as claimed in claim 1 wherein turns round scrollwork and has from valve opening to the discharge orifice open to pressing chamber that exports.