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CN109974648B - Method for evaluating geometric accuracy of micro-hole based on coordinate value - Google Patents

Method for evaluating geometric accuracy of micro-hole based on coordinate value Download PDF

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CN109974648B
CN109974648B CN201910262260.9A CN201910262260A CN109974648B CN 109974648 B CN109974648 B CN 109974648B CN 201910262260 A CN201910262260 A CN 201910262260A CN 109974648 B CN109974648 B CN 109974648B
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hole
micro
points
coordinates
coordinate
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CN109974648A (en
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汪文虎
张展飞
蒋睿嵩
靳成成
熊一峰
林坤阳
刘晓芬
朱孝祥
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Northwestern Polytechnical University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/10—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring diameters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/22—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes

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  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

The invention discloses a method for evaluating geometric accuracy of a micro-hole based on coordinate values, which is used for solving the technical problem that the existing method for evaluating the geometric accuracy of the micro-hole is complex. According to the technical scheme, three-dimensional coordinates I (X, Y and Z) of upper and lower planes of a micropore are obtained based on scanning of a surface profiler, hole wall contour noise points are removed according to Z-direction coordinate values, upper and lower two-dimensional plane points of the micropore are extracted, hole periphery contour points are extracted according to X-direction coordinate differences, and geometric characteristics such as diameter, roundness and taper of the micropore are calculated by using a least square method, a minimum area circle method and a taper calculation formula. The invention directly utilizes the three-dimensional coordinates of the micro-holes for detection, has accurate measurement result and simple algorithm program, reduces the algorithm complexity of the image processing method and improves the geometric precision measurement efficiency and precision of the micro-holes.

Description

Method for evaluating geometric accuracy of micro-hole based on coordinate value
Technical Field
The invention relates to a method for evaluating geometric accuracy of a micro-hole, in particular to a method for evaluating geometric accuracy of a micro-hole based on coordinate values.
Background
The document "micro-hole optical feature recognition technology research based on image processing, tool technology, 2010, Vol44p 102-105" discloses a micro-hole geometric accuracy assessment method based on image processing. The method extracts the edges of the micro-holes through image processing technologies such as median filtering, gray threshold variation and the like, and calculates the geometric structural characteristics of the micro-holes by utilizing a least square method direct fitting, a new roundness judgment algorithm and taper detection. The method described in the literature is a method for extracting the peripheral outline of the micro-hole by digitally processing an image obtained by shooting with a CCD camera and performing geometric feature detection. The extraction of the hole periphery contour point coordinates from the CCD image can be realized only by complex algorithms such as median filtering, threshold value change and the like, and in addition, the accuracy of the image shot by the CCD camera directly influences the complexity of the image preprocessing algorithm, so the image processing method has higher requirements on the image quality and the image processing algorithm, and the algorithm is relatively complex to realize.
Disclosure of Invention
In order to overcome the defect that the existing micro-hole geometric accuracy evaluation method is complex, the invention provides a micro-hole geometric accuracy evaluation method based on coordinate values. According to the method, three-dimensional coordinates I (X, Y, Z) of upper/lower planes of a micropore are obtained based on scanning of a surface profiler, hole wall contour noise points are removed according to Z-direction coordinate values, upper/lower two-dimensional plane points of the micropore are extracted, hole periphery contour points are extracted according to X-direction coordinate differences, and geometric characteristics such as diameter, roundness and taper of the micropore are calculated by using a least square method, a minimum area circle method and a taper calculation formula. The invention directly utilizes the three-dimensional coordinates of the micro-holes for detection, has accurate measurement result and simple algorithm program, can reduce the algorithm complexity of the image processing method and improve the geometric precision measurement efficiency and precision of the micro-holes.
The technical scheme adopted by the invention for solving the technical problems is as follows: a method for evaluating the geometric accuracy of a micro-hole based on coordinate values is characterized by comprising the following steps:
(a) and scanning to obtain three-dimensional point coordinates of the upper/lower planes of the micro-holes.
Scanning by a surface profiler to obtain three-dimensional coordinates I (X, Y, Z) of upper/lower planes of the micro-hole, sequentially deriving the three-dimensional coordinates I (X, Y, Z) of points on the planes, and storing the three-dimensional coordinates I (X, Y, Z) into a matrix coordinate matrix M3×uWherein u is the number of coordinate points.
Figure BDA0002015668130000021
In the formula, x1，x2，…，xuThe micro-aperture plane scanning sequence is arranged from left to right and from top to bottom.
(b) And eliminating the noise points of the hole wall profile and reducing the noise points into two-dimensional plane coordinates.
Eliminating hole wall contour noise points by utilizing scanning point Z coordinate values, and solving the mean value of Z coordinates in three-dimensional coordinates I (X, Y, Z) of plane points
Figure BDA0002015668130000022
Figure BDA0002015668130000023
By mean of Z coordinates
Figure BDA0002015668130000024
Taking a neighborhood delta up and down as a reference, screening the three-dimensional plane points according to the Z coordinate in the three-dimensional coordinates I (X, Y, Z), and eliminating the Z coordinate in the three-dimensional plane point coordinates I (X, Y, Z) in the interval
Figure BDA0002015668130000025
Outer spatial points:
Figure BDA0002015668130000026
extracting X and Y direction coordinates in the three-dimensional coordinate values of the remaining points, and storing the coordinates in a coordinate matrix N2×vAnd reducing the three-dimensional coordinates of the upper/lower planes into two-dimensional plane coordinates, wherein v is the number of the remaining coordinate points after the contour points of the hole wall are removed.
(c) And extracting contour points around the hole.
According to the X-direction coordinate difference X of adjacent pointsi+1-xiExtracting hole periphery contour points for the criterion, and obtaining the coordinate matrix x according to the step (a)1，x2，…，xuThe micro-hole plane scanning sequence is from left to right and from top to bottom, therefore, if adjacent points are arrangedCoordinate difference xi+1-xiA scanning accuracy of β or less indicates a point (x)i,yi) Points on the plane outside the hole are eliminated (x)i,yi) If the coordinate difference of the adjacent points is greater than the scanning precision β, which indicates that the two points are hole periphery contour points, the point (x) is retainedi,yi) And point (x)i+1,yi+1)：
Figure BDA0002015668130000027
By applying to all two-dimensional plane coordinates, i.e. coordinate matrix N2×vAll elements in the solution are distinguished, and a hole periphery contour point N is extracted2×wAnd w is the number of contour points around the hole.
(d) And (4) calculating the diameter of the micro hole.
And after the peripheral contour point coordinates of the micro-hole are obtained, performing fitting calculation on the diameter of the micro-hole by using a least square method. Let O (x)0，y0) And D is the circle center and the diameter of a least square fitting circle, and according to the least square principle, the following constraint problems are established:
Figure BDA0002015668130000031
and solving the constraint problem by using a Matlab tool frame to obtain the least square diameter D of the outlet/inlet of the micro-hole.
(e) And (5) calculating the roundness of the micro hole.
Evaluating the roundness error of the micro hole by using a minimum area principle: two concentric circles are used for containing all hole periphery contour points, and the minimum value of the radius difference between the two concentric circles is defined as the minimum zone roundness error. Maximum inscribed circle max phi with one of the two concentric circles as a contour pointInscribed circleOne is the minimum circumscribed circle min phi of the contour pointCircumscribed circleThen the roundness error is expressed as:
min F(r)＝min{max Rinscribed circle-min RCircumscribed circle} (6)
And programming in Matlab according to the definition of the roundness error of the minimum area to obtain the roundness error of the micro hole.
(f) And (5) calculating the taper of the micro holes.
The circular hole taper is defined as the ratio of the diameter difference of the air film hole inlet and the air film hole outlet to the air film hole depth, namely:
Figure BDA0002015668130000032
wherein tan gamma is the micropore taper, DInto，DGo outRespectively showing the diameters of an inlet and an outlet of the gas film hole, and h is the depth of the gas film hole.
The invention has the beneficial effects that: according to the method, three-dimensional coordinates I (X, Y, Z) of upper/lower planes of a micropore are obtained based on scanning of a surface profiler, hole wall contour noise points are removed according to Z-direction coordinate values, upper/lower two-dimensional plane points of the micropore are extracted, hole periphery contour points are extracted according to X-direction coordinate differences, and geometric characteristics such as diameter, roundness and taper of the micropore are calculated by using a least square method, a minimum area circle method and a taper calculation formula. The invention directly utilizes the three-dimensional coordinates of the micro-holes for detection, has accurate measurement result and simple algorithm program, reduces the algorithm complexity of the image processing method and improves the geometric precision measurement efficiency and precision of the micro-holes.
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
Drawings
FIG. 1 is a flow chart of the method for evaluating geometric accuracy of micro-holes based on coordinate values according to the present invention.
Fig. 2 is a flowchart of an algorithm for eliminating noise points of the hole wall profile in fig. 1.
Fig. 3 is a flowchart of an algorithm for extracting contour points around the hole in fig. 1.
FIG. 4 is a diagram illustrating an example of the geometric accuracy of a small hole in an embodiment of the method of the present invention.
Detailed Description
Reference is made to fig. 1-4. The invention relates to a method for evaluating geometric accuracy of a micropore based on coordinate values, which comprises the following steps:
measuring three-dimensional coordinates of an upper plane and a lower plane of a micro hole based on a surface profiler by taking evaluation of geometric accuracy of the ultra-fast laser processing cylindrical gas film hole as an object; eliminating noise points of the hole wall profile and reducing the noise points into two-dimensional plane coordinates; extracting contour points around the hole; and calculating the diameter, roundness and taper of the micro hole by using a least square method, a minimum area method and a taper formula.
(a) And scanning to obtain three-dimensional point coordinates of the upper/lower planes of the micro-holes.
Scanning to obtain a three-dimensional geometric profile of an exit plane of the gas film hole (as shown in fig. 4 (a)) by using an automatic zooming three-dimensional surface profiler InfiniteFocusG4, extracting a three-dimensional coordinate value of the exit plane of the gas film hole, deriving a three-dimensional profile point coordinate I (X, Y, Z), and storing 24850 coordinate points in a coordinate matrix M24850×3The method comprises the following steps:
Figure BDA0002015668130000041
(b) and eliminating the noise points of the hole wall profile and reducing the noise points into two-dimensional plane coordinates.
In the process of processing the gas film hole by the ultrafast laser, because molten metal materials can be accumulated on the inner walls of the inlet and the outlet to form residues, the residues in the hole wall can be scanned when a surface profiler is adopted for scanning, and the geometric accuracy evaluation error of the gas film hole can be increased when the noise point of the hole wall is obtained by scanning.
Eliminating hole wall contour noise points by utilizing scanning point Z coordinate values, and solving the mean value of Z coordinates in three-dimensional coordinates I (X, Y, Z) of plane points
Figure BDA0002015668130000042
Figure BDA0002015668130000043
In that
Figure BDA0002015668130000044
Selecting a region with radius delta of 5 μm from the top and bottom, screening the three-dimensional plane points by using the Z coordinate in the three-dimensional coordinate I (X, Y, Z), and eliminating the Z coordinate in the region [46241.4, 46251.4 ] in the three-dimensional plane point coordinate I (X, Y, Z)]Outer points, points within the reserved interval:
Figure BDA0002015668130000045
after the noise points on the hole wall contour are eliminated, the micropore plane (as shown in FIG. 4 (b)) is subjected to the transformation of the residual 24310 coordinate points, namely, the coordinate matrix into M24310×3Extracting M24310×3Two middle and front columns of coordinate values are stored in a coordinate matrix N24310×2And reducing the three-dimensional coordinates of the outlet plane of the air film hole into two-dimensional plane coordinates.
(c) And extracting contour points around the hole.
By the difference X between two adjacent X-direction coordinatesi+1-xiAccording to the selected camera, the distance between adjacent points on a plane obtained by scanning is 3.5 mu m, so that the scanning precision is set to be β and is slightly larger than 3.5 mu m, in the embodiment, β is set to be 6 mu m, and if the difference X of the X coordinates of the adjacent points is larger than that of the adjacent pointsi+1-xiLess than β, point (x) is indicatedi,yi) If the point on the plane outside the hole is a point, then the point (x) is deletedi,yi) (ii) a If the difference value of the adjacent coordinates is larger than 6 mu m, the two points are indicated as hole periphery contour points, and (x) is reservedi,yi) And (x)i+1,yi+1) Point:
Figure BDA0002015668130000051
by aligning the coordinate matrix N24310×2All the points are distinguished, and the matrix obtained after calculation is N190×2That is, 190 extraction hole peripheral contour points are illustrated (as shown in fig. 4 (c)).
Figure BDA0002015668130000052
(d) And (4) calculating the diameter of the micro hole.
Obtaining the coordinates N of the contour points around the micro-hole190×2And fitting the outlet diameter of the air film hole by using a least square method. Let O (x)0,y0) And D is the circle center and the diameter of a least square fitting circle, and is established according to the least square principleThe constraint problem is as follows:
Figure BDA0002015668130000053
finding the objective function F (x) in equation (5) using the Matlab toolbox0,y0D) minimum value, that is, the least square diameter D of the exit of the gas film hole is 333.9 μm (as shown in fig. 4 (D).
(e) And (5) calculating the roundness of the micro hole.
According to the minimum area method roundness error definition:
min F(r)＝min{max Rinscribed circle-min RCircumscribed circle} (6)
Programming in Matlab, and calculating to obtain the maximum circumscribed circle radius max R of the peripheral contour point of the air film holeInscribed circle176.8 μm, minimum circle radius min RCircumscribed circle154.8 μm (as shown in fig. 4 (e)). The roundness error of the outlet of the air film hole is as follows:
r＝max Rinscribed circle-min RCircumscribed circle＝176.8-154.8＝22.0μm
(f) And (5) calculating the taper of the micro holes.
Calculating the diameter D of the outlet of the gas film hole according to the least square methodGo out333.9 μm, the same applies to the inlet diameter D of the gas film holeIntoThe hole depth h in this example is 2000 μm (as shown in fig. 4 (f)), 560.7 μm. The taper of the air film hole is as follows:
Figure BDA0002015668130000061

Claims (1)

1. a method for evaluating geometric accuracy of a micropore based on coordinate values is characterized by comprising the following steps:
(a) scanning to obtain three-dimensional point coordinates of an upper plane and a lower plane of the micro hole;
scanning by a surface profiler to obtain three-dimensional coordinates I (X, Y, Z) of upper/lower planes of the micro-hole, sequentially deriving the three-dimensional coordinates I (X, Y, Z) of points on the planes, and storing the three-dimensional coordinates I (X, Y, Z) into a matrix coordinate matrix M3×uWherein u is a coordinate pointThe number of the cells;
Figure FDA0002328580850000011
in the formula, x1，x2，…，xuSequentially arranging from left to right and from top to bottom according to the plane scanning sequence of the micro holes;
(b) eliminating noise points of the hole wall profile and reducing the noise points into two-dimensional plane coordinates;
eliminating hole wall contour noise points by using the Z coordinate values of the scanning points, and solving the mean value of the Z coordinates in the three-dimensional coordinates I (X, Y, Z) of the plane points
Figure FDA0002328580850000012
Figure FDA0002328580850000013
By mean of Z coordinates
Figure FDA0002328580850000014
Taking a neighborhood delta up and down as a reference, screening the three-dimensional plane points according to the Z coordinate in the three-dimensional coordinates I (X, Y, Z), and eliminating the Z coordinate in the three-dimensional plane point coordinates I (X, Y, Z) in the interval
Figure FDA0002328580850000015
Outer spatial points:
Figure FDA0002328580850000016
extracting X and Y direction coordinates in the three-dimensional coordinate values of the remaining points, and storing the coordinates in a coordinate matrix N2×vReducing the three-dimensional coordinates of the upper/lower planes into two-dimensional plane coordinates, wherein v is the number of the remaining coordinate points after the noise points of the hole wall contour are eliminated;
(c) extracting contour points around the hole;
according to the X-direction coordinate difference X of adjacent pointsi+1-xiExtracting contour points around the hole for the criterion according to the steps(a) The coordinate matrix x1，x2，…，xuThe coordinate difference x of adjacent points is determined by arranging the micro-hole plane scanning sequence from left to right and from top to bottomi+1-xiA scanning accuracy of β or less indicates a point (x)i,yi) Points on the plane outside the hole are eliminated (x)i,yi) If the coordinate difference of the adjacent points is greater than the scanning precision β, which indicates that the two points are hole periphery contour points, the point (x) is retainedi,yi) And point (x)i+1,yi+1)：
Figure FDA0002328580850000021
By applying to all two-dimensional plane coordinates, i.e. coordinate matrix N2×vAll elements in the solution are distinguished, and a hole periphery contour point N is extracted2×wWherein w is the number of contour points around the hole;
(d) calculating the diameter of the micro-hole;
after the peripheral contour point coordinates of the micro-hole are obtained, fitting calculation is carried out on the diameter of the micro-hole by using a least square method; let O (x)0，y0) And D is the circle center and the diameter of a least square fitting circle, and according to the least square principle, the following constraint problems are established:
Figure FDA0002328580850000022
solving the constraint problem by using a Matlab tool frame to obtain the least square diameter D of the outlet/inlet of the micro-hole;
(e) calculating the roundness of the micro-hole;
evaluating the roundness error of the micro hole by using a minimum area principle: containing all hole periphery contour points by two concentric circles, wherein the minimum value of the radius difference between the two concentric circles is defined as the roundness error of the minimum area; maximum inscribed circle max phi with one of the two concentric circles as a contour pointInscribed circleOne is the minimum circumscribed circle min phi of the contour pointCircumscribed circleThen the roundness error is expressed as:
minF(r)＝min{maxRinscribed circle-minRCircumscribed circle} (6)
Programming in Matlab according to the definition of the roundness error of the minimum area to obtain the roundness error of the micro hole;
(f) calculating the taper of the micro hole;
the circular hole taper is defined as the ratio of the diameter difference of the inlet and the outlet of the micro hole to the depth of the micro hole, namely:
Figure FDA0002328580850000023
wherein tan gamma is the micropore taper, DInto，DGo outRespectively showing the diameters of the inlet and the outlet of the micro-hole, and h is the depth of the micro-hole.
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CN110989075B (en) * 2019-12-30 2021-04-23 中国科学技术大学 Optical fiber unit-based focal plane non-planar array hole equipartition manufacturing method
CN112508855B (en) * 2020-11-16 2024-01-09 英特派铂业股份有限公司 Roundness judgment method in iridium crucible rounding process
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