CN109818527A - Isosceles Trapezoid Stick-Slip Piezo Linear Actuator - Google Patents
Isosceles Trapezoid Stick-Slip Piezo Linear Actuator Download PDFInfo
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- CN109818527A CN109818527A CN201910261303.1A CN201910261303A CN109818527A CN 109818527 A CN109818527 A CN 109818527A CN 201910261303 A CN201910261303 A CN 201910261303A CN 109818527 A CN109818527 A CN 109818527A
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- isosceles trapezoid
- slider
- driving foot
- stator
- sliding block
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- 230000007246 mechanism Effects 0.000 claims abstract description 37
- 239000000919 ceramic Substances 0.000 claims abstract description 32
- 238000006073 displacement reaction Methods 0.000 claims abstract description 17
- 230000003068 static effect Effects 0.000 claims abstract description 7
- 230000000630 rising effect Effects 0.000 claims abstract 2
- 238000005452 bending Methods 0.000 claims description 11
- 230000010287 polarization Effects 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000003786 synthesis reaction Methods 0.000 claims description 3
- 230000007423 decrease Effects 0.000 claims description 2
- 238000000926 separation method Methods 0.000 claims 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 abstract description 9
- 210000002683 foot Anatomy 0.000 description 18
- 230000000694 effects Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 230000005284 excitation Effects 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 230000036316 preload Effects 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a kind of isosceles trapezoid stick-slip piezoelectric linear actuators, are made of pedestal, sliding block, isosceles trapezoid stator and pre-tightening mechanism.Sliding block and pre-tightening mechanism are installed on pedestal, are equipped with the pre-tightening mechanism of isosceles trapezoid stator for preloading isosceles trapezoid stator and sliding block.Isosceles trapezoid stator includes isosceles trapezoid compliant mechanism and four rectangular piezoelectric ceramic pieces, and isosceles trapezoid compliant mechanism is fixed on pre-tightening mechanism surface by two mounting holes.Sawtooth signal motivates piezoelectric ceramic piece, thus make isosceles trapezoid mechanism change driving foot and the x and y of shoe contact point to displacement, to change the frictional force of contact surface.Sawtooth signal rising edge, driving foot has biggish y to displacement, increase the normal pressure of slow polarizing stage, and then increase static friction driving force, sawtooth wave failing edge, driving foot have lesser y to displacement, reduce the kinetic frictional resistances in Quick-return stage, achieve the purpose that inhibit to retract, improves movenent performance.
Description
Technical field
The present invention relates to a kind of precise driving device using intellectual material, especially a kind of piezoelectricity straight line driver.
Background technique
Piezoelectric actuator refers to by piezoelectric materials systems such as lead zirconate titanate (PZT), lead niobate zinc (PZN), lead magnesium niobates (PMN)
At driver, micro-, nanometer or positioning application many of advantage, compare other executing agencies, it have high-resolution
The distinguishing feature of (Subnano-class), high natural frequency (being greater than kHz) and high drive (being greater than thousand newton grades), but it is also deposited
Displacement stroke small (10 μm -100 μm) the characteristics of, therefore the high-resolution of grade stroke is often realized in conjunction with stick-slip mechanism
Rate movement.
The working principle of piezoelectricity stick-slip driving is as follows: under the excitation of asymmetric sawtooth voltage signal, utilizing piezoelectric vibrator
Difference between kinematics and static friction power caused by asymmetry vibration generates micro-displacement to achieve the purpose that control driven object body.
Specific implementation can be used asymmetric sawtooth wave and excited slowly with quick alternative excitation using inverse piezoelectric effect to piezo-electric stack
Stator generate slowly with quick alternate motion deformation so that stator and mover are in " viscous " and " cunning " two kinds of motion states,
Frictional force effect is lower to realize mechanical movement output.
However since piezoelectricity stick-slip drives slowly with the rapid deformation stage, the frictional force between stator and mover plays difference
Effect, specially slowly the deformation driving stage is to show as friction drive, and show as rubbing when the rapid deformation driving stage
Resistance.Given this, traditional piezoelectricity stick-slip driver, rollback phenomenon is obvious, and delivery efficiency is lower.
Summary of the invention
For realize big stroke, high-precision, heavy load combination precise driving device, while piezoelectricity stick-slip being inhibited to drive
Rollback phenomenon, the invention discloses a kind of isosceles trapezoid stick-slip piezoelectric linear actuators.Itd is proposed piezoelectricity straight line driver etc.
The trapezoidal stator of waist can act on the power of piezoelectric ceramics on slide block movement direction and stator positive pressure direction both direction simultaneously, produce
Transverse movement is given birth to increase the normal pressure of the slow polarizing stage of piezoelectric ceramics, reduces the dynamic friction in piezoelectric ceramics Quick-return stage
Power achievees the purpose that inhibit to retract.
The technical solution adopted by the present invention to solve the technical problems is:
A kind of isosceles trapezoid stick-slip piezoelectric linear actuator, mainly by pedestal (1), sliding block (2), isosceles trapezoid stator (3)
It is formed with pre-tightening mechanism (4);Sliding block (2) and pre-tightening mechanism (4) are installed on pedestal (1), and pre-tightening mechanism (4) is for preloading etc.
The trapezoidal stator of waist (3) and sliding block (2);The isosceles trapezoid stator (3) includes isosceles trapezoid compliant mechanism (3-1) and four squares
Shape piezoelectric ceramic piece (3-2), isosceles trapezoid compliant mechanism (3-1) are fixed on pre-tightening mechanism (4) by two mounting holes (3-1-6)
Surface;Isosceles trapezoid compliant mechanism (3-1) is flexible double rocker mechanism, and wherein horizontal axis (3-1-5) is fixed frame, drives sufficient institute
Be connecting rod in bar, left flexible beam (3-1-3) and right flexible beam (3-1-4) be pasted with respectively left bending piezoelectric ceramics (3-2-1) and
Right bending piezoelectric ceramics (3-2-2) is used as drive rocker;Four piezoelectric ceramic pieces (3-2) are believed by same positive-going sawtooth wave when work
Number excitation, four piezoelectric ceramic pieces (3-2) generate polarization in the same direction, and left flexible beam (3-1-3) and right flexible beam (3-1-4) are by piezoelectricity
The effect of potsherd (3-2) generates bending deformation, and the left imaginary motion profile for driving foot (3-1-1) and sliding block (2) contact point can
Be decomposed into x to y to displacement, when driving foot is in close contact with sliding block, contact point imagination motion profile variation performance
It drives foot (3-1-1) to be left and right drives contact surface normal normal pressure and tangential friction force between foot (3-1-2) and sliding block (2)
Variation;In " viscous " stage, i.e. left driving foot (3-1-1) and when sliding block (2) contact movement, contact point imagination track be positive x to
Negative y can generate larger normal pressure between left driving foot (3-1-1) and sliding block (2), therefore can generate more between the two to the synthesis of movement
Big stiction drives the sliding block (2) along positive x to moving;In " cunning " stage, i.e., elasticity of the left flexible beam (3-1-3) because of itself
When Quick-return, contact point imagination track is negative x to the synthesis with positive y to movement, at this time left driving foot (3-1-1) and sliding block
(2) there is lesser normal pressure, the kinetic frictional resistances between the two can be smaller, and sliding block (2) is acted on the rollback generated by it also just between
It is smaller.
Wherein, four piezoelectric ceramic pieces (3-2) are pasted in the way of polarization direction having the same, by same positive saw
When tooth wave signal motivates, in the slow ascent stage of sawtooth signal, left flexible beam (3-1-3) and right flexible beam (3-1-4) are slow
Bending deformation, right driving foot (3-1-2) separate with sliding block (2), mainly by static friction between left driving foot (3-1-1) and sliding block (2)
Power effect, and because contact point has negative y to displacement, i.e., left flexible beam (3-1-3) and sliding block (2) are even closer, contact point positive pressure
Power becomes larger, so static friction driving force is larger, has better load capacity;In the sawtooth signal rapid decrease stage, Zuo Rou
Property beam (3-1-3) restore to the original state because of natural resiliency, left driving is mainly acted on by kinetic force of friction between (3-1-1) and sliding block (2) enough, this
When contact point have positive y to displacement, to reduce the normal pressure of contact point, there is lesser kinetic frictional resistances, make sliding block (2)
It retracts smaller;When four piezoelectric ceramic pieces (3-2) are motivated by same negative going sawtooth signal, sliding block (2) is by right driving foot (3-
1-2) effect will generate negative x to movement.
The invention has the advantages that driver overall structure is simple, convenient for output is adjusted, isosceles ladder is used
Shape stator come generate transverse movement so that increase the slow polarizing stage of piezoelectric ceramics normal pressure, reduce piezoelectric ceramics Quick-return
The kinetic force of friction in stage has achieved the purpose that inhibit to retract.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples.
Fig. 1 is isosceles trapezoid stick-slip piezoelectric linear actuator schematic diagram;
Fig. 2 is isosceles trapezoid stator schematic diagram;
Fig. 3 is isosceles trapezoid stator movement direction schematic diagram;
Fig. 4 is isosceles trapezoid stick-slip piezoelectric linear actuator working principle diagram;
Fig. 5 is inclination board-type flexibility mover isosceles trapezoid stick-slip piezoelectric linear actuator schematic diagram.
1. pedestal in figure, 2. sliding blocks, 3. isosceles trapezoid stators, 4. pre-tightening mechanisms
Specific embodiment
Implementation method is further illustrated with reference to the accompanying drawing:
[embodiment 1]
Isosceles trapezoid stick-slip piezoelectric linear actuator as shown in Figure 1, mainly by pedestal (1), sliding block (2), isosceles trapezoid
Stator (3) and pre-tightening mechanism (4) composition.Sliding block (2) and pre-tightening mechanism (4) are installed on pedestal (1), and it is fixed to be equipped with isosceles trapezoid
The pre-tightening mechanism (4) of sub (3) is for preloading isosceles trapezoid stator (3) and sliding block (2).It is sliding that cylindrical roller is had chosen in embodiment
Block, impulse stroke are about 28mm, and the quality of sliding block is about 23.6g;Pre-tightening mechanism (4) is flat using manual displacement in embodiment
Platform can achieve the purpose that preloading by adjusting and locking position of platform.Isosceles trapezoid stator (3) generates laterally after being powered
Movement drives foot (3-1) that sliding block (2) is pushed to move horizontally according to stick-slip principle.Isosceles trapezoid stator (3) is the driving
The core component of device, for providing driving force needed for slide block movement, as shown in Fig. 2, isosceles trapezoid stator (3) includes isosceles trapezoid
Compliant mechanism (3-1) and four rectangular piezoelectric ceramic pieces (3-2), by two mounting holes (3-1-6) by isosceles trapezoid flexible machine
Structure (3-1) is fixed on pre-tightening mechanism (4) surface.Two pieces of left side piezoelectric ceramic piece is known as left bending piezoelectric ceramics (3-2-1), passes through
Epoxy resin is adhered to the arranged on left and right sides of left flexible beam (3-1-3), and other two potsherd is known as right bending piezoelectric ceramics
(3-2-2) is adhered to the arranged on left and right sides of right flexible beam (3-1-4).Four piezoelectric ceramic pieces (3-2) are polarized along its thickness direction,
And polarization direction having the same.Slide block movement direction is as shown in figure 3, left driving foot (3-1-1) is used to drive sliding block to x forward direction
Mobile, right driving foot (3-1-2) is for driving sliding block mobile to x negative sense.There is an angle, θ between flexible beam and horizontal axis, passes through
θ is adjusted the angle to adjust the x and y of driving foot to displacement.
Transverse movement refers to while generating the fortune of movement on x (slide block movement direction) and y (positive pressure direction) both direction
It is dynamic.It is slow to increase piezoelectric ceramics that the isosceles trapezoid stator for the piezoelectricity straight line driver that this patent proposes can produce transverse movement
The normal pressure of polarizing stage to increase the stiction in driving stage, while reducing the dynamic of piezoelectric ceramics Quick-return stage
Frictional force achievees the purpose that inhibit to retract.
Specific working principle and contact point force analysis are as shown in Figure 4.
Under original state, as shown in fig. 4 a, preloaded force F0Sliding block and two driving foots is kept to contact with each other, as time t=t0
When, the preloaded force F of sliding block0The normal pressure F generated equal to pre-load mechanismP, it is left and right bending piezoelectric ceramics driving signal be
Sawtooth wave.Each period of motion is divided into two steps:
Step 1: from moment t0To t1, left and right bending piezoelectric ceramics is slow simultaneously to be polarized, and isosceles trapezoid compliant mechanism is made
Left driving foot obtains two displacement (l on the direction x and yxAnd ly), as shown in Figure 4 b, the stiction F of generationSPush sliding block edge
X-axis is just being marched forward Δ L;
Step 2: from moment t1To t2, left and right bending piezoelectric ceramics fast quick-recovery, therefore isosceles trapezoid compliant mechanism simultaneously
Back to its initial position, due to the effect of inertia force, sliding block will remain in position as illustrated in fig. 4 c.By repeat step 1 and
2, the piezoelectric actuator proposed is done step-by-step to be moved along the big impulse stroke of x-axis forward direction.
From fig. 4, it can be seen that in t0-t1Stage, stiction FSIt is the driving force that sliding block advances, it is left to drive the x generated enough
Axis positive-displacement lxFor pushing sliding block to move along x-axis forward direction;The y-axis negative sense of generation is displaced lyFor increasing generation stiction
FSNormal pressure FP.In step 2, by normal pressure FPThe kinetic force of friction F of generationdIt is resistance.Kinetic force of friction FdIt may be defined as Fd=
μd FP;Wherein FdIt is kinetic force of friction, μdIt is dynamic friction coefficient, FPIt is normal pressure, normal pressure FPIt is a variable.At the t1 moment, just
Pressure FPReach maximum value, from the t1 moment to the t2 moment, normal pressure FPIt is rapidly decreased to F0, can according to the definition of formula kinetic force of friction
Know, normal pressure FPReducing makes to generate the kinetic force of friction F to retractdIt reduces, therefore inhibits rollback.It realizes along the big of x-axis negative sense
When stroke motion, reversed sawtooth wave driving electric signal need to be only provided, the right driving of isosceles trapezoid stator drives sliding block along x enough
Axis negative movement.
[embodiment 2]
The isosceles trapezoid stick-slip piezoelectric linear actuator can also improve and optimize to structure, as shown in figure 5,
For the isosceles trapezoid stick-slip piezoelectric linear actuator for installing inclination board-type flexibility mover additional, flexible mover (2a) is mainly led by fixation
Rail and flexible slide block composition, wherein critical component be flexible slide block by sliding block, shoe contact end, inclination straight beam type flexible hinge and
Left and right driving foot contact jaw composition.The sliding block in guide rail and flexible slide block is wherein fixed using straight-line guide rail slide block, sliding block
Contact jaw, inclination straight beam type flexible hinge and left and right driving foot contact jaw there is linear cutter to form, by epoxide-resin glue with
Linear slider is pasted together.Whole driver mainly includes pedestal, flexible mover, isosceles trapezoid stator and pre-tightening mechanism.It is soft
Property mover and pre-tightening mechanism be installed on pedestal, isosceles trapezoid stator is fixed on pre-tightening mechanism, pass through pre-tightening mechanism adjust etc.
Latching force between the trapezoidal stator of waist and flexible mover.By the flexibility mover while inhibiting to retract by y to (positive pressure direction)
Preload displacement be also translated into displacement of the x for pushing mover mobile to (the mover direction of motion), improve the output performance of driver.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality
The all possible combination of each technical characteristic in example is applied all to be described, however, as long as the combination of these technical characteristics is not deposited
In contradiction, all should be considered as described in this specification.
The embodiments described above only express several embodiments of the present invention, and the description thereof is more specific and detailed, but simultaneously
The limitation to the scope of the patents therefore cannot be interpreted as.It should be appreciated that for those of ordinary skill in the art,
Under the premise of not departing from present inventive concept, various modifications and improvements can be made, these are all belonged to the protection scope of this patent.
Therefore, the scope of protection shall be subject to the appended claims for this patent.
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110120760A (en) * | 2019-06-18 | 2019-08-13 | 哈尔滨理工大学 | Double mode piezoelectricity stick-slip linear actuator |
CN111030505A (en) * | 2020-02-20 | 2020-04-17 | 吉林大学 | Secondary displacement amplification type piezoelectric driver |
CN111162690A (en) * | 2020-01-08 | 2020-05-15 | 浙江师范大学 | Piezoelectric drive device and control method thereof |
CN113612406A (en) * | 2021-08-17 | 2021-11-05 | 吉林大学 | Piezoelectric driver based on differential motion principle and control method thereof |
CN115085581A (en) * | 2022-07-25 | 2022-09-20 | 山东大学 | A stick-slip driver and method for actively suppressing retraction motion |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6979934B1 (en) * | 1999-06-30 | 2005-12-27 | Pi Ceramic Gmbh | Piezoelectric drive, especially a holding frame, a friction element and a circuit configuration |
CN102497130A (en) * | 2011-12-20 | 2012-06-13 | 哈尔滨工业大学深圳研究生院 | Linear ultrasonic motor |
CN106685262A (en) * | 2017-01-12 | 2017-05-17 | 广东工业大学 | A Fully Flexible Micro-displacement Amplifying Mechanism |
CN108199613A (en) * | 2018-01-29 | 2018-06-22 | 长春工业大学 | The fixed accurate piezoelectricity stick-slip line motor of bimorph transducer and its driving method |
CN109217717A (en) * | 2018-09-26 | 2019-01-15 | 吉林大学 | Arcuate structure hinge inhibits the apparatus and method of parasitic piezoelectric actuator rollback movement |
-
2019
- 2019-04-02 CN CN201910261303.1A patent/CN109818527B/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6979934B1 (en) * | 1999-06-30 | 2005-12-27 | Pi Ceramic Gmbh | Piezoelectric drive, especially a holding frame, a friction element and a circuit configuration |
CN102497130A (en) * | 2011-12-20 | 2012-06-13 | 哈尔滨工业大学深圳研究生院 | Linear ultrasonic motor |
CN106685262A (en) * | 2017-01-12 | 2017-05-17 | 广东工业大学 | A Fully Flexible Micro-displacement Amplifying Mechanism |
CN108199613A (en) * | 2018-01-29 | 2018-06-22 | 长春工业大学 | The fixed accurate piezoelectricity stick-slip line motor of bimorph transducer and its driving method |
CN109217717A (en) * | 2018-09-26 | 2019-01-15 | 吉林大学 | Arcuate structure hinge inhibits the apparatus and method of parasitic piezoelectric actuator rollback movement |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110120760A (en) * | 2019-06-18 | 2019-08-13 | 哈尔滨理工大学 | Double mode piezoelectricity stick-slip linear actuator |
CN111162690A (en) * | 2020-01-08 | 2020-05-15 | 浙江师范大学 | Piezoelectric drive device and control method thereof |
CN111162690B (en) * | 2020-01-08 | 2023-08-25 | 浙江师范大学 | Piezoelectric driving device and control method thereof |
CN111030505A (en) * | 2020-02-20 | 2020-04-17 | 吉林大学 | Secondary displacement amplification type piezoelectric driver |
CN111030505B (en) * | 2020-02-20 | 2024-04-30 | 吉林大学 | Secondary displacement amplifying piezoelectric driver |
CN113612406A (en) * | 2021-08-17 | 2021-11-05 | 吉林大学 | Piezoelectric driver based on differential motion principle and control method thereof |
CN115085581A (en) * | 2022-07-25 | 2022-09-20 | 山东大学 | A stick-slip driver and method for actively suppressing retraction motion |
CN115085581B (en) * | 2022-07-25 | 2024-06-04 | 山东大学 | Stick-slip driver and method for actively inhibiting rollback movement |
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