CN109781329B - Six-dimensional force sensor with six-beam structure - Google Patents
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- CN109781329B CN109781329B CN201910061692.3A CN201910061692A CN109781329B CN 109781329 B CN109781329 B CN 109781329B CN 201910061692 A CN201910061692 A CN 201910061692A CN 109781329 B CN109781329 B CN 109781329B
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Abstract
The invention discloses a six-dimensional force sensor with a six-beam structure, which is characterized in that: the device comprises a stress disc, a shell, a base, an elastic beam, a plug connecting piece and a plug; the stress disc is connected with a force application device through the screw hole; the plug connecting piece is arranged on the outer side surface of the shell; the plug is fixed on the plug connecting piece; the base boss of the base is arranged in the shell; the elastic beam comprises a disc beam body and six support beams; the disc beam body is connected with the stressed disc; stress concentration holes are formed in the six supporting beams; two strain gauges are arranged on two sides of the center of the stress concentration hole on each supporting beam; the elastic beam is arranged on the base; the sensor has the advantages of simple and compact structure, small number of strain gauges, simple process, higher sensitivity, higher decoupling precision and the like.
Description
Technical Field
The invention relates to the technical field of strain sensors, in particular to a six-dimensional force sensor with a six-beam structure.
Background
The six-dimensional force sensor has rich force measurement information and is a sensor capable of detecting three components in space and three moment components. Currently, it is used in many industries, such as intelligent robots, aerospace, military, biomedicine, etc.
In the design of the six-dimensional force sensor, the structural layout of the force-sensitive element and the pasting mode of the strain gauge determine the comprehensive performance of the designed sensor to a great extent. Therefore, it is critical to design a reasonable and feasible layout of the force-sensitive elements and the way of attaching the strain gauge. The multi-dimensional force sensor based on the cross-shaped elastic beam structure is a common structure, has the advantages of compact structure and the like, and has the defects of complex beam structure and the like. The six-dimensional force sensor comprises a binocular structure in the prior art, wherein an elastic beam is of a double-layer cross beam structure, although the six-dimensional force sensor has good sensitivity, the coupling degree between the two-dimensional force sensor is large, the double-layer structure is not beneficial to reducing the overall height of the sensor, and the processing difficulty is large. Moreover, the number of the resistance strain gauges of the existing strain type six-dimensional force sensor is large, so that resource waste is caused, and the process difficulty is increased.
Accordingly, there is a need in the art for a six-dimensional force sensor that overcomes the above-mentioned problems.
Disclosure of Invention
The technical scheme adopted for achieving the aim of the invention is that the six-dimensional force sensor with the six-beam structure is characterized in that: comprises a stress disc, a shell, a base, an elastic beam, a plug connecting piece and a plug.
The center of the plane of the stressed disc is provided with through holes which are uniformly distributed on the same circumference. And screw holes uniformly distributed on the same circumference are also formed in the plane of the stressed disk. The screw hole surrounds the through hole. The stress disc is connected with a force application device through the screw hole.
The shell is a hollow cylinder. And a plug mounting hole I is formed in the side surface of the shell.
The plug connecting piece is arc-shaped plate-shaped. And the middle part of the plug connecting piece is provided with a plug mounting hole II. The plug mounting hole II corresponds to the plug mounting hole I. The plug connector is mounted on the outer side of the housing.
The plug is inserted into the plug mounting hole II and the plug mounting hole I and fixed on the plug connecting piece.
The base comprises a disc base and a base boss arranged on the plane of the disc base.
The base boss is circular. And a circuit board is arranged in the base boss. And elastic beam mounting holes uniformly distributed on the same circumference are formed in the annular plane of the base boss.
The base boss of the base is mounted inside the housing.
The elastic beam comprises a disc beam body and six support beams.
And the plane of the disc beam body is provided with stressed disc connecting holes which are uniformly distributed on the same circumference. The stress disc connecting hole corresponds to the through hole. The disc beam body is connected with the stressed disc through the stressed disc connecting hole.
Six the corbels are in radial arrangement on the disc roof beam body, and the contained angle between every corbel central line is 60. And respectively marking the six support beams as a first support beam, a second support beam, a third support beam, a fourth support beam, a fifth support beam and a sixth support beam.
The right-handed Cartesian coordinate system is established by using the plane center of the disc beam body, wherein the direction of a z axis is perpendicular to the plane of the disc beam body upwards, the direction of the x axis is parallel to the plane of the disc beam body rightwards, the direction of the y axis is parallel to the plane of the disc beam body forwards, the first supporting beam is located in a first interval formed by the x axis and the y axis, the central line of the first supporting beam deviates from the x axis by theta degrees, theta is more than 0 and less than 60, and the rest five supporting beams are sequentially a second supporting beam, a third supporting beam, a fourth supporting beam, a fifth supporting beam and a sixth supporting beam in a counterclockwise direction.
And the six support beams are provided with stress concentration holes. The opening directions of the stress concentration holes of the first supporting beam, the third supporting beam and the fifth supporting beam are parallel to the z axis. And the opening directions of the stress concentration holes of the second supporting beam, the fourth supporting beam and the sixth supporting beam are vertical to the z axis.
And the six support beams are all provided with strain gauges. And two sides of each supporting beam positioned in the center of the stress concentration hole are respectively provided with a strain gauge.
And positioning holes are formed in the six supporting beams. The positioning holes correspond to the elastic beam mounting holes. The elastic beam is installed on the base through the positioning hole.
During measurement, the base is fixed on a measurement object, and the force application device applies force to the stressed disk. And the stress disc deforms the elastic beam after being stressed. The resistance across the strain gage changes. And after the circuit board converts the resistance signal into a voltage signal and amplifies the voltage signal, the signal is led out at the plug, and a measurement signal is output outwards.
When F is presentxWhen acting on the sensor, the first, third and fifth corbels generate strain, which is recorded as
Fx＝f1sinθ°+f3sin(60-θ)°+f5cos (theta-30) °. (formula one)
When F is presentyWhen acting on the sensor, the first, third and fifth corbels generate strain, which is recorded as
Fy＝f1cosθ°+f3cos(60-θ)°+f5sin (theta-30) °. (formula II)
When F is presentzWhen acting on the sensor, the second, fourth and sixth beams generate strains with the same magnitude and direction, which are recorded as
Fz＝f2+f4+f6. (III)
And recording the distance from the center of the stress concentration hole on each support beam to the center of the disc beam body as L.
When M isxWhen acting on the sensor, the second, fourth and sixth beams produce strain, which is recorded as
Mx＝[f2cos(θ-30)°-f4sinθ°-f6sin(60-θ)°]And L. (formula IV)
When M isyWhen acting on the sensor, the second, fourth and sixth beams produce strain, which is recorded as
My＝[f2sin(θ-30)°-f4cosθ°-f6cos(60-θ)°]And L. (formula five)
When M iszWhen acting on the sensor, the first, third and fifth beams generate strain in the same direction, which is recorded as
Mz＝(f1+f5-f3) And L. (type six)
In the first formula: fxIs the force in the x-direction of the six-dimensional force experienced by the sensor. f. of1Is the strain experienced by the first strut. f. of3Is the strain experienced by the third corbel. f. of5Is the strain experienced by the fifth corbel.
In the second formula: fyIs the force in the y-direction of the six-dimensional force experienced by the sensor.
In the third formula: fzIs the force in the z direction of the six-dimensional force experienced by the sensor. f. of2Is strain to the second corbel。f4Is the strain experienced by the fourth corbel. f. of6Is the strain experienced by the sixth corbel.
In the fourth formula: mxIs the moment in the x-direction of the six-dimensional force experienced by the sensor.
In the formula V: myIs the moment in the y-direction of the six-dimensional force experienced by the sensor.
In the sixth formula: mzIs the moment in the z direction of the six-dimensional force experienced by the sensor.
Furthermore, the annular plane of the base boss is also provided with a plurality of circuit board fixing grooves on the same circumference. The base boss fixes the circuit board through the circuit board fixing groove.
And a groove is also arranged on the outer side surface of the boss of the base. The groove corresponds to the plug mounting hole I.
Further, the materials of the stressed disc, the shell, the base, the elastic beam, the plug connecting piece and the plug comprise hard aluminum alloy.
Further, the two strain gauges on each of the support beams form half-bridge opposite sides of a group of Wheatstone bridges.
Furthermore, a plurality of base mounting holes are formed in the side face of the shell.
And a plurality of threaded holes corresponding to the base mounting holes are formed in the base bosses of the base.
The base boss of the base is fixed inside the shell through screws.
Furthermore, a plurality of connecting holes I are formed in the periphery of the plug mounting hole I.
And a plurality of connecting holes II are formed around the plug mounting hole II. The connecting hole II corresponds to the connecting hole I.
The plug connecting piece is fixed on the outer side face of the shell through screws.
The six-dimensional force sensor has the advantages of simple and compact structure, small quantity of strain gauges, simple process, higher sensitivity, higher decoupling precision and the like.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is an exploded view of the present invention;
FIG. 3 is a schematic three-dimensional structure of the elastic beam according to the present invention;
FIG. 4 is a schematic view of the mounting of the spring beam of the present invention;
FIG. 5 is a schematic plan view of the spring beam of the present invention 1;
fig. 6 is a schematic plan view 2 of the spring beam of the present invention.
In the figure: the stress disc 1, the through hole 101, the screw hole 102, the shell 2, the plug mounting hole I201, the base mounting hole 202, the connection I203, the base 3, the disc base 301, the base boss 302, the circuit board fixing groove 3021, the elastic beam mounting hole 3022, the groove 3023, the screw hole 3024, the elastic beam 4, the disc beam body 41, the stress disc connecting hole 411, the support beam 42, the stress concentration hole 421, the strain gauge 422, the positioning hole 423, the plug connector 5, the plug mounting hole II501, the connection II502, and the plug 6.
Detailed Description
The present invention is further illustrated by the following examples, but it should not be construed that the scope of the above-described subject matter is limited to the following examples. Various substitutions and alterations can be made without departing from the technical idea of the invention and the scope of the invention is covered by the present invention according to the common technical knowledge and the conventional means in the field.
Example 1:
referring to fig. 1 to 3, a six-dimensional force sensor of a six-beam structure is characterized in that: comprises a stressed disc 1, a shell 2, a base 3, an elastic beam 4, a plug connecting piece 5 and a plug 6.
In this embodiment, the stressed disk 1, the housing 2, the base 3, the elastic beam 4, the plug connector 5 and the plug 6 are made of duralumin alloy LY 12.
Six through holes 101 uniformly distributed on the same circumference are formed in the center of the plane of the stress disc 1. Eight screw holes 102 uniformly distributed on the same circumference are also formed in the plane of the stressed disk 1. The screw hole 102 surrounds the through hole 101. The force-bearing disc 1 is connected with a force application device through the screw hole 102.
The housing 2 is a hollow cylinder. And a plug mounting hole I201 is formed in the side surface of the shell 2.
The plug connector 5 is arc-shaped plate-shaped. The middle part of the plug connecting piece 5 is provided with a plug mounting hole II 501. The plug mounting hole II501 corresponds to the plug mounting hole I201. The plug connection 5 is mounted on the outer side of the housing 2.
The plug 6 is inserted into the plug mounting hole II501 and the plug mounting hole I201, and fixed to the plug connector 5.
The base 3 comprises a disc base 301 and a base boss 302 arranged on the plane of the disc base 301.
The base boss 302 is circular. The annular plane of the base boss 302 is further provided with four circuit board fixing slots 3021 on the same circumference. The base boss 302 is fixedly mounted with a circuit board through the circuit board fixing groove 3021.
Six elastic beam mounting holes 3022 uniformly distributed on the same circumference are formed in the annular plane of the base boss 302.
The base boss 302 of the base 3 is installed inside the housing 2 and is limited by the disc base 301.
The outer side surface of the base boss 302 is also provided with a groove 3023. The groove 3023 corresponds to the plug mounting hole I201, and is convenient for accommodating a plug 6.
The elastic beam 4 includes a disc beam body 41 and six corbels 42.
Six stressed disk connecting holes 411 which are uniformly distributed on the same circumference are formed in the plane of the disk beam body 41. The force receiving disk coupling hole 411 corresponds to the through hole 101. The disc beam body 41 is connected with the force-bearing disc 1 through the force-bearing disc connecting hole 411.
Six corbels 42 are arranged on disc beam body 41 in a radial mode, and the included angle between the central lines of each corbel 42 is 60 degrees. The six support beams 42 are respectively marked as a first support beam, a second support beam, a third support beam, a fourth support beam, a fifth support beam and a sixth support beam.
Referring to fig. 3 to 6, a right-handed cartesian coordinate system is established with the center of the plane of the disc beam body 41, wherein the direction of the z-axis is upward perpendicular to the plane of the disc beam body 41, the direction of the x-axis is rightward parallel to the plane of the disc beam body 41, the direction of the y-axis is forward parallel to the plane of the disc beam body 41, the first support beam is located in a first interval formed by the x-axis and the y-axis, the center line of the first support beam is deviated from the x-axis by θ °,0< θ <60, and the remaining five support beams 42 are sequentially a second support beam, a third support beam, a fourth support beam, a fifth support beam and a sixth support beam counterclockwise.
And the six support beams 42 are provided with stress concentration holes 421. The opening direction of the stress concentration hole 421 of the first, third and fifth support beams is parallel to the z-axis. The opening direction of the stress concentration hole 421 of the second, fourth and sixth support beams is perpendicular to the z-axis.
And the strain gauges 422 are mounted on the six support beams 42. One strain gauge 422 is mounted on each of the support beams 42 on both sides of the center of the stress concentration hole 421. The two strain gauges 422 on each of the support beams 42 form a set of half-bridge opposite sides of a wheatstone bridge. Namely, 12 strain gages 422 on six beams 42 form opposite half-bridge sides of a six-set wheatstone bridge.
The six support beams 42 are provided with positioning holes 423. The positioning holes 423 correspond to the elastic beam mounting holes 3022. The elastic beam 4 is mounted on the base 3 through the positioning hole 423.
During measurement, the base 3 is fixed on a measurement object, and the force application device applies force to the stressed disk 1. The stress disc 1 deforms the elastic beam 4 after being stressed. The resistance on the strain gage 422 changes, changing the resistance by the wheatstone bridge. The circuit board converts the resistance signal into a voltage signal and amplifies the voltage signal, and then the signal is led out at the plug 6 to output a measurement signal outwards.
When F is presentxWhen acting on the sensor, the first, third and fifth corbels generate strain, which is recorded as
Fx＝f1sinθ°+f3sin(60-θ)°+f5cos (theta-30) °. (formula one)
When F is presentyWhen acting on the sensor, the first, third and fifth corbels generate strain, which is recorded as
Fy＝f1cosθ°+f3cos(60-θ)°+f5sin (θ -30) °; (formula II)
When F is presentzWhen acting on the sensor, the second, fourth and sixth beams generate strains with the same magnitude and direction, which are recorded as
Fz＝f2+f4+f6(ii) a (III)
The distance from the center of the stress concentration hole 421 on each of the support beams 42 to the center of the disc beam body 41 is denoted as L.
When M isxWhen acting on the sensor, the second, fourth and sixth support beams generate strain, which is marked as Mx＝[f2cos(θ-30)°-f4sinθ°-f6sin(60-θ)°]L; (formula IV)
When M isyWhen acting on the sensor, the second, fourth and sixth beams produce strain, which is recorded as
My＝[f2sin(θ-30)°-f4cosθ°-f6cos(60-θ)°]L; (formula five)
When M iszWhen acting on the sensor, the first supporting beam, the third supporting beam and the fifth supporting beam generate strain with the same direction, and the strain is marked as Mz＝(f1+f5-f3) L (six type)
Therefore, when an external force acts on the center of the force application platform, the output of the six-dimensional force sensor is as follows:
in the first formula: fxIs the force in the x-direction of the six-dimensional force experienced by the sensor. f. of1Is the strain experienced by the first strut. f. of3Is a third supporting beamIs subjected to strain. f. of5Is the strain experienced by the fifth corbel.
In the second formula: fyIs the force in the y-direction of the six-dimensional force experienced by the sensor.
In the third formula: fzIs the force in the z direction of the six-dimensional force experienced by the sensor. f. of2Is the strain experienced by the second corbel. f. of4Is the strain experienced by the fourth corbel. f. of6Is the strain experienced by the sixth corbel.
In the fourth formula: mxIs the moment in the x-direction of the six-dimensional force experienced by the sensor.
In the formula V: myIs the moment in the y-direction of the six-dimensional force experienced by the sensor.
In the sixth formula: mzIs the moment in the z direction of the six-dimensional force experienced by the sensor.
By using the formula, the six-dimensional force F acting on the six-dimensional force sensor can be solvedx、Fy、Fz、Mx、My、Mz。
Example 2:
the structure of this embodiment is the same as that of embodiment 1, and further, 3 base mounting holes 202 are provided on the side surface of the housing 2.
The base boss 302 of the base 3 is provided with 3 screw holes 3024 corresponding to the base mounting holes 202.
The base boss 302 of the base 3 is screwed into the base mounting hole 202 and the screw hole 3024 in sequence by screws, and fixed inside the housing 2.
Example 3:
the structure of this embodiment is the same as that of embodiment 1, and further, four connection holes I203 are formed around the plug mounting hole I201.
Four connecting holes II502 are formed in the periphery of the plug mounting hole II 501. The connection II502 corresponds to the connection I203.
The plug connecting piece 5 is screwed into the connection I203 and the connection II502 in sequence through screws and fixed on the outer side surface of the shell 2.
Claims (6)
1. The utility model provides a six-dimensional force transducer of six beam structure which characterized in that: comprises a stressed disc (1), a shell (2), a base (3), an elastic beam (4), a plug connecting piece (5) and a plug (6);
through holes (101) uniformly distributed on the same circumference are formed in the center of the plane of the stress disc (1); the plane of the stressed disc (1) is also provided with screw holes (102) which are uniformly distributed on the same circumference; the screw hole (102) surrounds the through hole (101); the stressed disc (1) is connected with a force application device through the screw hole (102);
the shell (2) is a hollow cylinder; a plug mounting hole I (201) is formed in the side face of the shell (2);
the plug connecting piece (5) is arc-shaped plate-shaped; the middle part of the plug connecting piece (5) is provided with a plug mounting hole II (501); the plug mounting hole II (501) corresponds to the plug mounting hole I (201); the plug connecting piece (5) is arranged on the outer side surface of the shell (2);
the plug (6) is inserted into the plug mounting hole II (501) and the plug mounting hole I (201) and fixed on the plug connecting piece (5);
the base (3) comprises a disc base (301) and a base boss (302) arranged on the plane of the disc base (301);
the base boss (302) is annular; a circuit board is arranged inside the base boss (302); elastic beam mounting holes (3022) uniformly distributed on the same circumference are formed in the annular plane of the base boss (302);
a base boss (302) of the base (3) is arranged inside the shell (2);
the elastic beam (4) comprises a disc beam body (41) and six support beams (42);
the plane of the disc beam body (41) is provided with stressed disc connecting holes (411) which are uniformly distributed on the same circumference; the stress disc connecting hole (411) corresponds to the through hole (101); the disc beam body (41) is connected with the stressed disc (1) through the stressed disc connecting hole (411);
the six support beams (42) are radially arranged on the disc beam body (41), and the included angle between the central lines of each support beam (42) is 60 degrees; marking the six support beams (42) as a first support beam, a second support beam, a third support beam, a fourth support beam, a fifth support beam and a sixth support beam respectively;
establishing a right-handed Cartesian coordinate system by using the plane center of the disc beam body (41), wherein the direction of a z axis is perpendicular to the plane of the disc beam body (41) upwards, the direction of an x axis is parallel to the plane of the disc beam body (41) rightwards, the direction of a y axis is parallel to the plane of the disc beam body (41) forwards, the first supporting beam is located in a first interval formed by the x axis and the y axis, the central line of the first supporting beam deviates from the x axis by theta DEG, 0< theta <60, and the rest five supporting beams (42) are sequentially a second supporting beam, a third supporting beam, a fourth supporting beam, a fifth supporting beam and a sixth supporting beam in a counterclockwise direction;
stress concentration holes (421) are formed in the six support beams (42); the opening directions of the stress concentration holes (421) of the first supporting beam, the third supporting beam and the fifth supporting beam are parallel to the z axis; the opening direction of the stress concentration holes (421) of the second supporting beam, the fourth supporting beam and the sixth supporting beam is vertical to the z axis;
strain gauges (422) are mounted on the six support beams (42); two sides of each supporting beam (42) positioned in the center of the stress concentration hole (421) are respectively provided with a strain gauge (422);
positioning holes (423) are formed in the six support beams (42); the positioning hole (423) corresponds to the elastic beam mounting hole (3022); the elastic beam (4) is installed on the base (3) through the positioning hole (423);
during measurement, the base (3) is fixed on a measurement object, and the force application device applies force to the stressed disc (1); the elastic beam (4) is deformed after the stress disc (1) is stressed; a change in resistance across the strain gauge (422); the circuit board converts the resistance signal into a voltage signal and amplifies the voltage signal, and then the signal is led out at the plug (6) to output a measurement signal outwards;
when F is presentxWhen acting on the sensor, the first, third and fifth corbels generate strain, which is recorded as
Fx＝f1sinθ°+f3sin(60-θ)°+f5cos (theta-30) °; (formula (II)A)
When F is presentyWhen acting on the sensor, the first, third and fifth corbels generate strain, which is recorded as
Fy＝f1cosθ°+f3cos(60-θ)°+f5sin (θ -30) °; (formula II)
When F is presentzWhen acting on the sensor, the second, fourth and sixth beams generate strains with the same magnitude and direction, which are recorded as
Fz＝f2+f4+f6(ii) a (III)
Recording the distance from the center of the stress concentration hole (421) on each supporting beam (42) to the center of the disc beam body (41) as L;
when M isxWhen acting on the sensor, the second, fourth and sixth beams produce strain, which is recorded as
Mx＝[f2cos(θ-30)°-f4sinθ°-f6sin(60-θ)°]L; (formula IV)
When M isyWhen acting on the sensor, the second, fourth and sixth beams produce strain, which is recorded as
My＝[f2sin(θ-30)°-f4cosθ°-f6cos(60-θ)°]L; (formula five)
When M iszWhen acting on the sensor, the first, third and fifth beams generate strain in the same direction, which is recorded as
Mz＝(f1+f5-f3) L; (type six)
In the first formula: fxIs the force of the six-dimensional force on the sensor in the x direction; f. of1Is the strain experienced by the first strut; f. of3Is the strain experienced by the third corbel; f. of5Is the strain experienced by the fifth corbel;
in the second formula: fyIs the force of the six-dimensional force on the sensor in the y direction;
in the third formula: fzIs the force in the z direction of the six-dimensional force to which the sensor is subjected; f. of2Is the strain experienced by the second corbel; f. of4Is the strain experienced by the fourth corbel; f. of6Is the strain experienced by the sixth corbel;
in the fourth formula: mxThe moment of the six-dimensional force on the sensor in the x direction;
in the formula V: myThe moment of the six-dimensional force on the sensor in the y direction;
in the sixth formula: mzIs the moment in the z direction of the six-dimensional force experienced by the sensor.
2. The six-dimensional force sensor of a six-beam structure according to claim 1, wherein: the annular plane of the base boss (302) is also provided with a plurality of circuit board fixing grooves (3021) on the same circumference; the base boss (302) fixes the circuit board through the circuit board fixing groove (3021);
a groove (3023) is also formed in the outer side surface of the base boss (302); the groove (3023) corresponds to the plug mounting hole I (201).
3. The six-dimensional force sensor of a six-beam structure according to claim 1, wherein: the stressed disc (1), the shell (2), the base (3), the elastic beam (4), the plug connecting piece (5) and the plug (6) are made of hard aluminum alloy.
4. The six-dimensional force sensor of a six-beam structure according to claim 1, wherein: two strain gauges (422) on each of the support beams (42) form half-bridge opposite sides of a group of Wheatstone bridges.
5. The six-dimensional force sensor of a six-beam structure according to claim 1, wherein: a plurality of base mounting holes (202) are formed in the side face of the shell (2);
a base boss (302) of the base (3) is provided with a plurality of threaded holes (3024) corresponding to the base mounting holes (202);
and a base boss (302) of the base (3) is fixed in the shell (2) through a screw.
6. The six-dimensional force sensor of a six-beam structure according to claim 1, wherein: a plurality of connecting holes I (203) are formed in the periphery of the plug mounting hole I (201);
a plurality of connecting holes II (502) are formed in the periphery of the plug mounting hole II (501); the connection II (502) corresponds to the connection hole I (203);
the plug connecting piece (5) is fixed on the outer side face of the shell (2) through a screw.
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| CN110514341B (en) * | 2019-08-30 | 2021-04-06 | 中国科学院长春光学精密机械与物理研究所 | Six-dimensional force and torque sensor with fault-tolerant capability for aerospace mechanical arm |
| CN111412951B (en) * | 2020-04-14 | 2021-05-07 | 大连理工大学 | Sensor for monitoring vibration fatigue load of mechanical part in real time under impact load and design method |
| CN114720028B (en) * | 2022-03-03 | 2024-09-06 | 陕西电器研究所 | Integrated multidimensional force sensor based on thin film sputtering technology |
| CN116007817A (en) * | 2022-12-30 | 2023-04-25 | 航天南洋（浙江）科技有限公司 | Six-dimensional force sensor |
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| CN104677543A (en) * | 2015-01-29 | 2015-06-03 | 重庆大学 | Piezoelectric type six-dimensional force/torque sensor adopting six groups of force-measuring sensitive units |
| CN105424256A (en) * | 2016-01-26 | 2016-03-23 | 哈尔滨工业大学 | Decoupling type six-dimensional force detection device |
| CN106124113A (en) * | 2016-06-14 | 2016-11-16 | 南京神源生智能科技有限公司 | A kind of new six power and torque sensor |
| CN106556488A (en) * | 2016-10-13 | 2017-04-05 | 同济大学 | A kind of strain-type six-dimension force sensor |
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