CN109660064B - Displacement device based on hybrid displacement sensor and planar motor - Google Patents
Displacement device based on hybrid displacement sensor and planar motor Download PDFInfo
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- CN109660064B CN109660064B CN201910087272.2A CN201910087272A CN109660064B CN 109660064 B CN109660064 B CN 109660064B CN 201910087272 A CN201910087272 A CN 201910087272A CN 109660064 B CN109660064 B CN 109660064B
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- 239000004020 conductor Substances 0.000 claims description 24
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- 238000000429 assembly Methods 0.000 claims description 18
- 230000033001 locomotion Effects 0.000 claims description 17
- 238000013519 translation Methods 0.000 claims description 5
- 238000012545 processing Methods 0.000 claims description 4
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/12—Stationary parts of the magnetic circuit
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
- H02K11/21—Devices for sensing speed or position, or actuated thereby
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
- H02K11/21—Devices for sensing speed or position, or actuated thereby
- H02K11/22—Optical devices
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K3/00—Details of windings
- H02K3/04—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors
- H02K3/28—Layout of windings or of connections between windings
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Abstract
The invention discloses a displacement device based on a hybrid displacement sensor and a planar motor, which comprises a workbench and a stator, wherein the stator is designed with a working area and comprises a magnet block system, the workbench is movably arranged adjacent to the stator along a third direction (Z), the workbench comprises a motor coil system, the motor coil system acts with the magnet block system to enable the workbench to generate six degrees of freedom displacement within the working area range, the displacement device also comprises a plurality of long-distance non-contact displacement sensors and a plurality of short-distance non-contact displacement sensors, the long-distance non-contact displacement sensors are arranged on the stator, the displacement of the workbench along the first direction (X) and the second direction (Y) and the three degrees of freedom of rotation along the third direction (Z) are obtained through feedback signals of the long-distance non-contact displacement sensors, and the short-distance non-contact displacement sensors are arranged on the workbench along the third direction (Z) and point to the stator and are used for measuring the distance between the workbench and the stator.
Description
Technical Field
The invention relates to the field of precision motion systems, in particular to a displacement device based on a hybrid displacement sensor and a planar motor.
Background
Many industrial applications require accurate positioning of objects in at least two directions that are substantially orthogonal to each other. For example, in the semiconductor industry, integrated circuit fabrication requires accurate positioning of objects (e.g., chips or reticles) in at least two directions for photolithography, inspection, dicing, packaging, and the like. The conventional technique is divided into multiple stages, wherein each stage can only cause motion in a single degree of freedom to produce a combined motion in multiple degrees of freedom. For example, known "H-bridge" designs include X-stages for causing Y-stages to move in the X-direction and Y-stages for carrying objects and causing the objects to move in the Y-direction. The combined action of the X-stage and Y-stage enables positioning of the object over the entire X-Y plane.
Recently, displacement means have been introduced for directly causing the stage to move in at least two orthogonal directions, for example, the X and Y directions. Such devices are commonly referred to as "planar motors". For some planar motors, the table may be controlled to move in six degrees of freedom. The planar motor has two parts: a stator and a workbench. The stator is typically sized larger than the table in the X-direction and Y-direction to provide a working area. One of the two parts comprises a magnet system and the other part comprises a motor coil system. The interaction between the current carrying coils and the magnets may cause movement of the table relative to the stator. Because this interaction is electromagnetic in nature, the two parts do not require any mechanical contact, thus eliminating disturbing forces, such as friction. Thus, higher positioning accuracy can be achieved than in the conventional technique. Positioning accuracy is a key performance criterion for displacement devices. A higher positioning accuracy means that the error between the actual position (true position) at which the object is positioned and the reference position is smaller. The quality of the table is much lower than in the conventional art due to the compact design. Thus, a smaller force can achieve the same acceleration. Other advantages of the "planar motor" technique compared to conventional techniques are more convenient assembly, less maintenance, and suitability for vacuum or ultra-clean environments.
The planar motor-based displacement device described in patent nos. 1 and 2 of the applicant's filed application, the coil array is disposed on the mover and the magnet array is disposed on the stator. The mover can make long-distance movement of two degrees of freedom (translational motion along X direction and translational motion along Y direction) and short-distance movement of the other four degrees of freedom (translational motion along Z direction and rotation around X, Y and Z direction) relative to the stator. If these six degrees of freedom motions are to be achieved, a real-time displacement measurement system is required to provide a displacement feedback signal to the closed loop control.
Patent document 1: PCT/EP 2016/063254
Patent document 2: CN201680039160.4
Disclosure of Invention
In order to solve the above problems, the present invention discloses a displacement device based on a hybrid displacement sensor and a planar motor, comprising a table and a stator, wherein the stator is designed with one working area and the stator comprises a magnet block system comprising: a plurality of first type magnet blocks, each of said first type magnet blocks comprising a plurality of first magnets extending substantially linearly in a first direction (X), each of said first magnets having a magnetization direction substantially orthogonal to said first direction (X), and at least two of said first magnets having magnetization directions different from each other; and a plurality of second-type magnet blocks, each of the second-type magnet blocks comprising a plurality of second magnets extending substantially linearly in a second direction (Y), the second direction (Y) being substantially orthogonal to the first direction (X), each of the second magnets having a magnetization direction substantially orthogonal to the second direction (Y), and at least two of the second magnets having magnetization directions different from each other, wherein the table is disposed adjacent to the stator movably along a third direction (Z), the third direction (Z) being substantially orthogonal to both the first direction (X) and the second direction (Y), the table comprising a motor coil system comprising: first type coil assemblies, each of said first type coil assemblies comprising a plurality of electrical conductors extending substantially linearly along a first direction (X); and second coil assemblies, each of said second coil assemblies comprising a plurality of electrical conductors extending substantially linearly along a second direction (Y); the motor coil system acts with the magnet block system to enable the workbench to generate long-distance displacement in translation along a first direction (X) and a second direction (Y) and short-distance displacement in translation along a third direction (Z) and rotation around the first direction (X), the second direction (Y) and the third direction (Z) in the working area range,
The first type coil assembly has a dimension in a first direction (X) substantially equal to n (m 1+m2), where n = 1,2,3, and m 1 is the dimension of a particular magnet block of the first type in the first direction, and m 2 is the dimension of a magnet block of the second type disposed adjacent to the particular magnet block of the first type in the first direction, and the second type coil assembly has a dimension in the first direction substantially equal to n (m 1+m2), where n = 1,2,3, and m 1 is the dimension of a magnet block of the particular first type in the first direction, and m 2 is the dimension of a magnet block of the second type disposed adjacent to the particular magnet block of the first type in the first direction,
The device also comprises a plurality of long-distance non-contact displacement sensors and a plurality of short-distance non-contact displacement sensors, wherein the long-distance non-contact displacement sensors are installed on the stator, the displacement of the three-degree-of-freedom motion of the workbench along the first direction (X) and the second direction (Y) in a translational manner and rotating around the third direction (Z) is obtained through feedback signals of the long-distance non-contact displacement sensors, and the short-distance non-contact displacement sensors are installed on the workbench in a manner of being parallel to the Z direction and pointing to the stator and are used for measuring the distance between the workbench and the stator.
In the displacement device based on the hybrid displacement sensor and the planar motor of the present invention, preferably, the number of the long-distance contactless displacement sensors is at least three, and the number of the short-distance contactless displacement sensors is at least three.
In the displacement device based on the hybrid displacement sensor and the planar motor, in the long-distance non-contact displacement sensor, a first long-distance non-contact displacement sensor and a second long-distance non-contact displacement sensor are arranged in parallel with a first direction (X) at a certain interval, and a third long-distance non-contact displacement sensor is arranged in parallel with a second direction (Y).
In the displacement device based on the hybrid displacement sensor and the planar motor, the installation position points of the short-distance non-contact displacement sensor on the workbench form a quadrangle or triangle.
In the displacement device based on the hybrid displacement sensor and the planar motor, the quadrangle is square.
In the displacement device based on the hybrid displacement sensor and the planar motor, the long-distance contactless displacement sensor can use a sensor based on a laser interference principle and can also use a laser triangular rule.
In the displacement device based on the hybrid displacement sensor and the planar motor, the short-distance non-contact displacement sensor is selected from an ultrasonic displacement sensor, an eddy current displacement sensor, a capacitance displacement sensor or an infrared displacement sensor.
In the displacement device based on the hybrid displacement sensor and the planar motor, the long-distance sensor comprises a reflecting mirror, a spectroscope, a light source and an optical signal receiving and processing unit.
Drawings
FIG. 1 is an X-Y plan view of a displacement device according to one embodiment of the present invention;
FIG. 2 is an X-Z plan view of the displacement device of FIG. 1 according to one embodiment;
FIG. 3 is an X-Z plan view of the motor coil system of the displacement device shown in FIG. 1 according to one embodiment;
FIG. 4 illustrates additional details of a layer of coil assemblies of the displacement device shown in FIG. 3 according to one particular embodiment;
FIG. 5 illustrates additional details of another layer of coil assembly of the displacement device shown in FIG. 3 according to one particular embodiment;
FIG. 6 is an X-Z plan view of the magnet block arrangement of the displacement device shown in FIG. 1 according to one particular embodiment;
FIG. 7 is a Y-Z plan view of the magnet block arrangement of the displacement device shown in FIG. 1 according to one particular embodiment;
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it should be understood that the specific embodiments described herein are only for explaining the present invention and are not intended to limit the present invention. The described embodiments are only some, but not all, embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the azimuth or positional relationship indicated by the terms "upper", "lower", "vertical", "horizontal", etc. are based on the azimuth or positional relationship shown in the drawings, and are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the apparatus or element referred to must have a specific azimuth, be constructed and operated in a specific azimuth, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In addition, many specific details of the invention, such as device structures, materials, dimensions, processing techniques and technologies, are set forth in the following description in order to provide a more thorough understanding of the invention. However, as will be understood by those skilled in the art, the present invention may be practiced without these specific details. Unless specifically indicated below, the various parts of the device may be composed of materials known to those skilled in the art, or materials developed in the future with similar functions may be used.
FIG. 1 is an X-Y plan view of a displacement device according to one embodiment of the present invention; fig. 2 is an X-Z plan view of the displacement device of fig. 1 according to one embodiment of the present invention. The displacement device 100 includes a stator 110 and a table 120 that move relative to each other. The stator 110 includes a system 111, i.e., magnet blocks 112X, 112Y (collectively, magnet blocks 112). The system 111 includes a two-dimensional array of magnet blocks 112 having a plurality of mutually orthogonal rows and columns. The row is parallel to the X-direction (also called the first direction) and the column is parallel to the Y-direction (also called the second direction). Each row and each column alternately contains a magnet block 112X and a magnet block 112Y. In the embodiment shown in fig. 1, all rows have a substantially equal X-dimension and all columns have a substantially equal Y-dimension. This is a preferred embodiment because it may reduce the manufacturing cost of the stator 110, but is not required. In some embodiments, the X-dimension of a first column (shown as m 1 in fig. 1) may be different from the X-dimension of a second column (shown as m 2 in fig. 1) located beside the first column. In some embodiments, the Y-dimension of a first row (shown as m 3 in fig. 1) may be different from the Y-dimension of a second row (shown as m 4 in fig. 1) located next to the first row. All of the magnet blocks 112 in a single column have substantially equal X dimensions and all of the magnet blocks 112 in a single row have substantially equal Y dimensions. Thus, m 1 may be the X-dimension of the plurality of magnet blocks 112Y, m 2 may be the X-dimension of the plurality of magnet blocks 112X, m 3 may be the Y-dimension of the plurality of magnet blocks 112Y, and m 4 may be the Y-dimension of the plurality of magnet blocks 112X.
Each magnet block 112X includes a plurality of (e.g., four in the illustrated embodiment) magnets 113X that are adjacently disposed in the X-direction and extend generally along the Y-direction. Each magnet block 112Y includes a plurality (e.g., four in the illustrated embodiment) of magnets 113Y that are adjacently disposed in the Y direction, extending generally along the X direction. The magnetization direction of the magnet 113X is substantially perpendicular to the Y direction, and the magnetization direction of the magnet 113Y is substantially perpendicular to the X direction.
The magnets 113X, 113Y (collectively referred to as magnets 113) are of three types: the first N-type, second S-type and third H-type are respectively called N-type magnet, S-type magnet and H-type magnet. The magnets 113 of each magnet block 112 are arranged in a so-called Halbach (Halbach) arrangement such that the magnetic field in which the table 120 is positioned is intensified. The magnetization direction of each of the N-type magnet and the S-type magnet is parallel to the Z-direction, the magnetization direction of the N-type magnet being directed toward the table 120, and the magnetization direction of the S-type magnet being directed away from the table 120, as indicated by the arrow in fig. 2. The magnetization direction of the H-shaped magnets of the magnet block 112X is substantially parallel to the X-direction, pointing toward the adjacent N-shaped magnets of the magnet block 112X, and away from the adjacent S-shaped magnets of the magnet block 112X. The magnetization direction of the H-shaped magnets of the magnet block 112Y is substantially parallel to the Y-direction, pointing toward the adjacent N-shaped magnets of the magnet block 112Y, and away from the adjacent S-shaped magnets of the magnet block 112Y.
In the illustrated embodiment (shown in fig. 1), the magnet 113X includes four different magnetization directions: +Z, -X, -Z, +X, which together provide a magnetic field space period lambda x, while magnet 113Y includes four different magnetization directions: +Z, +Y, -Z, -Y, which together provide a magnetic field space period lambda y. This is arranged according to the Halbach (Halbach) arrangement, which is a preferred embodiment, but not required. In some embodiments, the magnet block 112 may include only two magnets 113 having different magnetization directions to provide the magnetic field space period, while in some embodiments, the magnet block 112 may include more than four magnets 113 having different magnetization directions to provide the magnetic field space period.
In the illustrated embodiment (as shown in fig. 1), the magnets 113 belonging to a single magnet block 112 have equal lengths (the dimension of the direction in which the magnets 113 extend). This is a preferred embodiment, but not required. In some embodiments, the magnets 113 belonging to a single magnet block 112 may have unequal lengths. In the illustrated embodiment (as shown in fig. 1), the centroid points of the magnets 113X belonging to the single magnet block 112X have the same position in the Y direction, and the centroid points of the magnets 113Y belonging to the single magnet block 112Y have the same position in the X direction. This is a preferred embodiment, but not required. In some embodiments, the centroid point of the magnet 113X belonging to a single magnet block 112X may have different positions in the Y direction and the centroid point of the magnet 113Y belonging to a single magnet block 112Y may have different positions in the X direction.
In the illustrated embodiment (shown in fig. 1), the magnets 113X of the magnet blocks 112X have the same or substantially the same X-dimension, while the magnets 113Y of the magnet blocks 112Y have the same or substantially the same Y-dimension. This is a preferred embodiment, but not required. In some embodiments, the Z dimension of magnet block 112X may be equal to the X dimension of magnet block 113X and the Z dimension of magnet block 112Y may be equal to the Y dimension of magnet block 113Y. This is a preferred embodiment, but not required. The advantage of these preferred embodiments is that the generated magnetic field is more sinusoidal, as this is less harmonic distortion. Many early publications have described this advantage, for example, international publication WO 2009/083889. In some embodiments, the H-type magnet may have a different size than the N-type magnet and the S-type magnet. In some embodiments, the H-type magnet may not be included. In some embodiments, the Z dimension of the magnet block 112Y may be other values.
The X dimension m 2 of the magnet block 112X is equal to or substantially equal to nλ x/2, where n=1, 2,3,..(in the embodiment shown in fig. 1, n is selected as 2), the Y dimension m 3 of the magnet block 112Y is equal to or substantially equal to nλ y/2, where n=1, 2,3,... One of the advantages of the preferred embodiment is that the manufacturing costs of the system 111 of magnet blocks 112 may be reduced. In some embodiments, m 2 may be any value greater than λ x/2, and m 3 may be any value greater than λ y/2.
In the illustrated embodiment (shown in fig. 2), all magnet blocks 112X have the same arrangement of magnets 113X, while all magnet blocks 112Y have the same arrangement of magnets 113Y. This embodiment is not necessary. In some embodiments, it may be designed that only the magnet blocks 112X located in the same column have the same arrangement of magnets 113X and only the magnet blocks 112Y located in the same row have the same arrangement of magnets 113Y. In some embodiments, the arrangement of the magnets 113 of the magnet blocks 112 may be different from the arrangement of any other magnet blocks 112.
Fig. 6 is an X-Z plan view of an arrangement of the system 111 of magnet blocks 112, wherein the magnet blocks 112Y are arranged transparent and only the magnet blocks 112X are visible. The magnet blocks 112X shown in dashed outline are located in different rows (different positions in the Y direction) than the magnet blocks 112X shown in solid traces. By setting the magnet block 112Y to be transparent, the spatial period λ x of the magnet block 112X and its relationship to the X dimension (m 1 and m 2) of the magnet block 112X can be displayed more clearly. Fig. 7 is a Y-Z plan view of an arrangement of the system 111 of magnet blocks 112, wherein the magnet blocks 112X are arranged transparent and only the magnet blocks 112Y are visible. The magnet block 112Y shown in the dotted trace is located in a different column (different position in the X direction) than the magnet block 112Y shown in the solid trace. By setting the magnet block 112X transparent, the spatial period λ y of the magnet block 112Y and its relationship to the Y dimension (m 3 and m 4) of the magnet block 112Y are more clearly shown. Note that for the embodiment shown, m 1＝m2 and m 3＝m4. An important observation that can be made by comparing fig. 6 and 7 is that the characteristics of magnet block 112X can be similar to the characteristics of magnet block 112Y, except that the X-direction and Y-direction are interchanged. For example, the patterns of the magnetization directions of the magnets 113 of the magnet blocks 112X and 112Y are: n, H, S, H, N, H, S, H … …. This is a preferred embodiment, but not required. In some embodiments, the magnet block 112X and the magnet block 112Y may have different characteristics.
In the illustrated embodiment (shown in FIG. 1), long-range non-contact displacement sensors 132A,132B,132C are mounted on stator 110, and the displacement of three degrees of freedom motion of stage 120 in the X-and Y-directions and in rotation about the Z-direction can be derived from the feedback signals of long-range non-contact displacement sensors 132A,132B, 132C. Wherein the first long-distance noncontact displacement sensor 132A and the second long-distance noncontact displacement sensor 132B are disposed parallel to the X direction at a certain pitch, and the third long-distance noncontact displacement sensor 132C is disposed parallel to the Y direction. The long-distance sensor comprises a reflecting mirror, a spectroscope, a light source and an optical signal receiving and processing unit. The long-distance noncontact displacement sensor can perform long-distance (hundreds of millimeters) noncontact displacement measurement, and can use a sensor based on a laser interference principle, a laser triangular ruler and the like.
Short-distance non-contact displacement sensors 131a,131b,131c,131d are mounted on the table 120 (as shown in fig. 1 and 2) in parallel to the Z direction and directed toward the stator 110 for measuring the distance between the table 120 and the stator 110. The short-range non-contact displacement sensor includes a probe head that is substantially perpendicular to the surface of the stator 110, and the stator 110 does not require the installation of a signal emitting source and wires. The short-distance non-contact displacement sensor can be selected from an ultrasonic displacement sensor, an eddy current displacement sensor, a capacitance displacement sensor, an infrared displacement sensor and the like.
In the illustrated embodiment (shown in FIG. 1), the number of long-range contactless displacement sensors 132A,132B,132C is three, and the number of short-range contactless displacement sensors 131A,131B,131C,131D is four. This is a preferred embodiment, but not required. The number of the long-distance noncontact displacement sensors may be plural, preferably three or more. The number of the short-distance noncontact displacement sensors may be plural, preferably three or more.
In the illustrated embodiment (as shown in fig. 1), the mounting location points of the short-range contactless displacement sensor on the table 120 form a square. This is a preferred embodiment, but not required. In some embodiments, the mounting location points of the short-range contactless displacement sensor on the table 120 may also constitute a quadrangle of other shapes such as a rectangle, a parallelogram, etc., while in some embodiments, the mounting location points of the short-range contactless displacement sensor on the table 120 may also constitute a triangle.
In the illustrated embodiment (shown in fig. 3), the table 120 includes a motor coil system having multiple layers (e.g., four layers in the illustrated embodiment) 123A, 123B, 123C, 123D (collectively layers 123) and coil assembly units 122A, 122B, 122C, 122D (collectively coil assembly units 122) located in the layers. The layers 123 are adjacently arranged in the Z direction. The details of layer 123 and coil assembly unit 122 are further shown in fig. 4 and 5, as will be described in more detail below. It should be appreciated that the number of layers 123 of the table 120 and the number of coil assembly units 122 in the layers 123 may vary for particular embodiments, with the number of layers 123 and the number of coil assembly units 122 in the layers 123 shown in the illustrated embodiment being for ease of illustration only.
In the illustrated embodiment (as shown in fig. 4), each layer 123A, 123C includes a plurality of (e.g., two in the illustrated embodiment) coil block units 122A, 122B that are adjacently disposed in the X-direction. Each coil assembly unit 122A, 122B includes one or more (e.g., two in the illustrated embodiment) coil assemblies 121Y that are adjacently arranged in the Y direction. Each coil assembly 121Y includes a plurality (e.g., twelve in the illustrated embodiment) of electrical conductors 124Y extending generally linearly along the X-direction and disposed adjacent in the Y-direction. The lorentz forces exerted on the coil assembly units 122A, 122B when in the magnetic field of the system 111 of magnet blocks 112 can cause translational movement of the table 120 in the Y-direction and Z-direction, and rotational movement of the table 120 in three directions (X, Y, Z).
In the illustrated embodiment (shown in fig. 5), each layer 123B, 123D includes a plurality of (e.g., two in the illustrated embodiment) coil block units 122C, 122D that are adjacently disposed in the Y-direction. Each coil assembly unit 122C, 122D includes one or more (e.g., two in the illustrated embodiment) coil assemblies 121X, which are adjacently arranged in the X direction. Each coil assembly 121X includes a plurality (e.g., twelve in the illustrated embodiment) of electrical conductors 124X that extend generally linearly along the Y-direction, adjacently disposed in the X-direction. The lorentz forces exerted on the coil assembly units 122C, 122D when in the magnetic field of the system 111 of magnet blocks 112 may cause translational movement of the table 120 in the X-direction and Z-direction, as well as rotational movement of the table 120 in three directions (X, Y, Z).
Coil assemblies 121X and 121Y are collectively referred to as coil assembly 121. The conductors 124X and 121Y are collectively referred to as conductors 124. Each coil assembly 121 is provided by a p-phase system, where p=2, 3,4,... Length b y in fig. 4 is defined as the spacing in the Y direction of the centroid points of two adjacent conductors 124Y in coil assembly 121Y, which is equal to or substantially equal to (n-1)Where n=1, 2, 3. (in the illustrated embodiment, n is selected as 1), and the length b x in fig. 5 is defined as the spacing in the X-direction of the centroid points of two adjacent electrical conductors 124X in the coil assembly 121X, which is equal to or substantially equal to (n-1)/>Where n=1, 2, 3. (in the illustrated embodiment, n is selected as 1). The X dimension of the coil assembly 121Y is defined as the length of each electrical conductor 124Y in the coil assembly 121Y, as shown in fig. 4c 1. The Y dimension of coil assembly 121Y is shown as c 3 in fig. 4, which is defined as jb y, where j is the number of electrical conductors 124Y in coil assembly 121Y (in the embodiment shown, j is selected to be 12). The Y-dimension of the coil assembly 121X is defined as the length of each electrical conductor 124X in the coil assembly 121X, as shown in fig. 5 c 4. The X dimension of the coil assembly 121X is shown as c 2 in fig. 5, which is defined as jb x, where j is the number of electrical conductors 124X in the coil assembly 121X (in the embodiment shown, j is selected to be 12).
In the illustrated embodiment (shown in fig. 4 and 5), all of the coil assemblies 121 include the same number of electrical conductors 124. This is a preferred embodiment, but not required. In some embodiments, the coil assembly 121 may have a different number of electrical conductors 124. In the illustrated embodiment, all of the electrical conductors 124 belonging to a single coil assembly 121 have substantially equal lengths (dimensions in the direction in which the electrical conductors 124 extend). This is the preferred embodiment.
The X dimension of coil assembly 121Y is equal to or substantially equal to n (m 1+m2), where n=1, 2,3 (in the embodiment shown in fig. 4, n is selected to be 1). The X dimension of the coil assembly 121Y is equal to or substantially equal to 2nm 1, where n=1, 2,3 if m 1 and m 2 are equal or substantially equal to each other. This preferred choice of parameters may be the first sufficient condition to obtain a location-independent lorentz force on the coil assembly 121Y. With proper multiphase rectification (multiphase rectification will be apparent to those skilled in the art), the lorentz forces applied to the coil assembly 121Y in the Y and Z directions can be independently controlled and can be position independent, and the lorentz forces applied to the coil assembly 121Y in the X direction can be zero (position independent). The location independent lorentz forces may lead to a higher positioning accuracy.
The Y dimension of coil assembly 121Y is equal to or substantially equal to n (m 3+m4), where n=1, 2,3 (in the embodiment shown in fig. 4, n is selected to be 1). The Y dimension of the coil assembly 121Y is equal to or substantially equal to 2nm 3, where n=1, 2,3 if m 3 and m 4 are equal or substantially equal to each other. This preferred choice of parameters may be a second sufficient condition for obtaining a location-independent lorentz force on the coil assembly 121Y. By satisfying the first and second sufficient conditions to obtain a location independent lorentz force on the coil assembly 121Y, an additional advantage may be brought about, as will be described in more detail below. The coil assembly 121Y is rectified to obtain a position-independent lorentz force such that the torque in the Z direction is zero or substantially zero. This torque will create disturbances because it is accompanied by lorentz forces. Without this torque, higher positioning accuracy can be achieved, and the complexity of the controller can be reduced.
The Y-dimension of coil assembly 121X is equal to or substantially equal to n (m 3+m4), where n=1, 2,3 (in the embodiment shown in fig. 5, n is selected to be 1). The Y dimension of the coil assembly 121Z is equal to or substantially equal to 2nm 3, where n=1, 2,3 if m 3 and m 4 are equal or substantially equal to each other. This preferred choice of parameters may be the first sufficient condition to obtain a location-independent lorentz force on the coil assembly 121X. With proper multiphase rectification, the lorentz forces applied to the coil assembly 121X in the X-direction and Z-direction can be independently controlled and can be position independent, and the lorentz forces applied to the coil assembly 121X in the Y-direction can be zero (position independent). The location independent lorentz forces may lead to a higher positioning accuracy.
The X dimension of coil assembly 121X is equal to or substantially equal to n (m 1+m2), where n=1, 2,3 (in the embodiment shown in fig. 5, n is selected to be 1). This preferred parameter selection is a second sufficient condition to obtain a location independent lorentz force on the coil assembly 121X. By satisfying the first and second sufficient conditions for achieving a location independent lorentz force on the coil assembly 121X, an additional advantage may be brought about, as will be described in more detail below. Rectifying the coil assembly 121X to obtain a position independent lorentz force results in zero or substantially zero torque in the Z direction. This torque will create disturbances because it is accompanied by lorentz forces. Without this torque, higher positioning accuracy can be achieved, and the complexity of the controller can be reduced.
In some embodiments, the sum of the X dimensions of the plurality of coil assemblies 121 of the same type (121X or 121Y) may be equal to or substantially equal to n (m 3+m4), where n=1, 2, 3. In some embodiments, the sum of the Y dimensions of the plurality of coil assemblies 121 of the same type (121X or 121Y) may be equal to or substantially equal to n (m 1+m2), where n=1, 2, 3. In some embodiments, coil assembly 121 may have other dimensions.
To obtain a constant lorentz force parallel to the Z direction or a constant lorentz force perpendicular to the Z direction, the current distribution (rectification) of the electrical conductor 124 of the coil assembly 121 also creates a local force parallel to the Z direction, which force creates a disturbance torque perpendicular to the Z direction. This torque will create disturbances because it is accompanied by lorentz forces. In a preferred embodiment (as shown in FIG. 4), the distance in the Y direction of the centroid point of two adjacent coil assemblies 121Y within the same coil assembly unit, as shown by d y in FIG. 4, is equal to or substantially equal toWhere k is the number of coil assemblies 121Y within the coil assembly units 122A, 122B (in the illustrated embodiment, k is selected to be 2) and n=1, 2,3,... In a preferred embodiment (as shown in FIG. 5), the distance in the X direction of the centroid point of two adjacent coil assemblies 121X within the same coil assembly unit, as shown by d x in FIG. 5, is equal to or substantially equal to/>Where k is the number of coil assemblies 121X within the coil assembly units 122C, 122D (in the illustrated embodiment, k is selected to be 2) and n=1, 2,3,... These are preferred parameter choices, which have the advantage that the disturbing torques generated by the coil assemblies 121 located on the same coil assembly unit 122 cancel each other out, thus generating substantially no torque acting on the coil assembly unit 122, and thus, a higher positioning accuracy can be achieved and the complexity of the controller can be reduced.
An important observation that can be made by comparing fig. 4 and 5 is that the characteristics of coil assembly 121X and electrical conductor 124X can be similar to those of coil assembly 121Y and electrical conductor 124Y, except that the X-direction and Y-direction are interchanged. For example, coil assembly 121X and coil assembly 121Y may have the same number, size, and number of electrical conductors 124 and may each be provided by a three-phase system. This embodiment is not necessary. In some embodiments, coil assembly 121X and electrical conductor 124X may have different characteristics than coil assembly 121Y and electrical conductor 124Y.
Regarding some embodiments of the coil assembly of the displacement device, some embodiments of the magnet block, some embodiments of the multi-layered coil assembly unit, some embodiments of the table, the relevant content of patent 1 is incorporated by reference in its entirety into this specification.
The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any changes or substitutions easily contemplated by those skilled in the art within the scope of the present invention should be included in the present invention.
Claims (5)
1. A displacement device based on a hybrid displacement sensor and a planar motor is characterized in that,
Comprising a table and a stator, wherein the stator is designed with a working area and the stator comprises a magnet block system comprising:
A plurality of first type magnet blocks, each of said first type magnet blocks comprising a plurality of first magnets extending substantially linearly in a first direction (X), each of said first magnets having a magnetization direction substantially orthogonal to said first direction (X), and at least two of said first magnets having magnetization directions different from each other; and
A plurality of second type magnet blocks, each of said second type magnet blocks comprising a plurality of second magnets extending substantially linearly in a second direction (Y), said second direction (Y) being substantially orthogonal to said first direction (X), each of said second magnets having a magnetization direction substantially orthogonal to said second direction (Y), and at least two of said second magnets having magnetization directions different from each other,
Wherein the table is arranged movably adjacent to the stator along a third direction (Z) which is substantially orthogonal to both the first direction (X) and the second direction (Y), the table comprising a motor coil system comprising:
First type coil assemblies, each of said first type coil assemblies comprising a plurality of electrical conductors extending substantially linearly along a first direction (X); and
A second type of coil assembly, each of said second type of coil assembly comprising a plurality of electrical conductors extending substantially linearly along a second direction (Y);
The motor coil system acts with the magnet block system to enable the workbench to generate long-distance displacement in translation along a first direction (X) and a second direction (Y) and short-distance displacement in translation along a third direction (Z) and rotation around the first direction (X), the second direction (Y) and the third direction (Z) in the working area range,
The first type coil assembly having a dimension in a first direction (X) substantially equal to n (m 1+m2), where n = 1,2,3, …, and m 1 is the dimension in the first direction of a particular magnet block of the first type, and m 2 is the dimension in the first direction of a magnet block of the second type disposed adjacent to the particular magnet block of the first type, and the second type coil assembly having a dimension in the first direction substantially equal to n (m 1+m2), where n = 1,2,3, …, and m 1 is the dimension in the first direction of a magnet block of the first type, and m 2 is the dimension in the first direction of a magnet block of the second type disposed adjacent to the particular magnet block of the first type,
The device also comprises a plurality of long-distance non-contact displacement sensors and a plurality of short-distance non-contact displacement sensors, wherein the long-distance non-contact displacement sensors are arranged on the stator, the feedback signals of the long-distance non-contact displacement sensors are used for obtaining the displacement of the three degrees of freedom motion of the workbench along the translation of the first direction (X) and the second direction (Y) and the rotation of the workbench along the third direction (Z), the short-distance non-contact displacement sensors are arranged on the workbench in a mode of being parallel to the Z direction and pointing to the stator and are used for measuring the distance between the workbench and the stator, the short-distance non-contact displacement sensors comprise a detection head which is approximately perpendicular to the surface of the stator, the stator does not need to be provided with a signal transmitting source and a wire, the short-distance non-contact displacement sensors are ultrasonic displacement sensors, eddy current displacement sensors, capacitance displacement sensors or infrared displacement sensors,
The number of the long-distance non-contact displacement sensors is at least three, the number of the short-distance non-contact displacement sensors is at least three, in the long-distance non-contact displacement sensors, a first long-distance non-contact displacement sensor and a second long-distance non-contact displacement sensor are arranged in parallel with a first direction (X) at a certain interval, and a third long-distance non-contact displacement sensor is arranged in parallel with a second direction (Y).
2. The displacement device based on a hybrid displacement sensor and planar motor as claimed in claim 1, wherein,
And the installation position points of the short-distance non-contact displacement sensor on the workbench form a quadrangle or triangle.
3. The displacement device based on a hybrid displacement sensor and a planar motor as claimed in claim 2, wherein,
The quadrangle is square.
4. The displacement device based on a hybrid displacement sensor and planar motor as claimed in claim 1, wherein,
The long-distance non-contact displacement sensor can use a sensor based on a laser interference principle, and can also use a laser triangular rule.
5. The displacement device based on a hybrid displacement sensor and planar motor as claimed in claim 1, wherein,
The long-distance contactless displacement sensor comprises a reflecting mirror, a spectroscope, a light source and an optical signal receiving and processing unit.
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| CN112436711B (en) * | 2020-11-12 | 2022-03-11 | 复旦大学 | Displacement device |
| CN112729089B (en) * | 2020-12-28 | 2022-08-19 | 无锡广联数字传感科技有限公司 | Displacement sensor applied to multiple occasions |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6175169B1 (en) * | 1999-05-03 | 2001-01-16 | Ralph L. Hollis, Jr. | Closed-loop planar linear motor with integral monolithic three-degree-of-freedom AC-magnetic position/orientation sensor |
| CN1625028A (en) * | 2003-12-02 | 2005-06-08 | 株式会社千叶精密 | Planar motor |
| CN101107571A (en) * | 2005-01-17 | 2008-01-16 | 皇家飞利浦电子股份有限公司 | Displacement device |
| CN104871090A (en) * | 2012-10-15 | 2015-08-26 | Asml荷兰有限公司 | Actuator mechanism, optical apparatus, lithographic apparatus and method of manufacturing a device |
| CN105452812A (en) * | 2013-08-06 | 2016-03-30 | 不列颠哥伦比亚大学 | Displacement devices and methods and apparatus for detecting and estimating motion associated with same |
| CN105493237A (en) * | 2013-06-28 | 2016-04-13 | 株式会社尼康 | Mobile body apparatus, exposure apparatus, and device manufacturing method |
| CN206075152U (en) * | 2016-08-31 | 2017-04-05 | 华南理工大学 | Based on the Biaxial synchronous motion control device that laser displacement sensor feeds back |
| CN107063104A (en) * | 2017-04-01 | 2017-08-18 | 清华大学 | Planar motor rotor position measuring system and method based on grating scale and Two-dimensional PSD |
| CN107949809A (en) * | 2015-07-06 | 2018-04-20 | 广东极迅精密仪器有限公司 | Gearshift |
| CN108604853A (en) * | 2016-02-12 | 2018-09-28 | Asml荷兰有限公司 | Multiphase linear motor, multiphase planar motor, platform, lithographic equipment and device making method |
| CN209767305U (en) * | 2019-01-29 | 2019-12-10 | 广东极迅精密仪器有限公司 | Displacement device based on hybrid displacement sensor and planar motor |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI258914B (en) * | 2000-12-27 | 2006-07-21 | Koninkl Philips Electronics Nv | Displacement device |
| US11223303B2 (en) * | 2017-06-19 | 2022-01-11 | Nikon Research Corporation Of America | Motor with force constant modeling and identification for flexible mode control |
-
2019
- 2019-01-29 CN CN201910087272.2A patent/CN109660064B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6175169B1 (en) * | 1999-05-03 | 2001-01-16 | Ralph L. Hollis, Jr. | Closed-loop planar linear motor with integral monolithic three-degree-of-freedom AC-magnetic position/orientation sensor |
| CN1625028A (en) * | 2003-12-02 | 2005-06-08 | 株式会社千叶精密 | Planar motor |
| CN101107571A (en) * | 2005-01-17 | 2008-01-16 | 皇家飞利浦电子股份有限公司 | Displacement device |
| CN104871090A (en) * | 2012-10-15 | 2015-08-26 | Asml荷兰有限公司 | Actuator mechanism, optical apparatus, lithographic apparatus and method of manufacturing a device |
| CN105493237A (en) * | 2013-06-28 | 2016-04-13 | 株式会社尼康 | Mobile body apparatus, exposure apparatus, and device manufacturing method |
| CN105452812A (en) * | 2013-08-06 | 2016-03-30 | 不列颠哥伦比亚大学 | Displacement devices and methods and apparatus for detecting and estimating motion associated with same |
| CN107949809A (en) * | 2015-07-06 | 2018-04-20 | 广东极迅精密仪器有限公司 | Gearshift |
| CN108604853A (en) * | 2016-02-12 | 2018-09-28 | Asml荷兰有限公司 | Multiphase linear motor, multiphase planar motor, platform, lithographic equipment and device making method |
| CN206075152U (en) * | 2016-08-31 | 2017-04-05 | 华南理工大学 | Based on the Biaxial synchronous motion control device that laser displacement sensor feeds back |
| CN107063104A (en) * | 2017-04-01 | 2017-08-18 | 清华大学 | Planar motor rotor position measuring system and method based on grating scale and Two-dimensional PSD |
| CN209767305U (en) * | 2019-01-29 | 2019-12-10 | 广东极迅精密仪器有限公司 | Displacement device based on hybrid displacement sensor and planar motor |
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|---|---|
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