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CN109656092B - Ultraviolet relay framing optical system and ultraviolet framing camera - Google Patents

Ultraviolet relay framing optical system and ultraviolet framing camera Download PDF

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Publication number
CN109656092B
CN109656092B CN201910012410.0A CN201910012410A CN109656092B CN 109656092 B CN109656092 B CN 109656092B CN 201910012410 A CN201910012410 A CN 201910012410A CN 109656092 B CN109656092 B CN 109656092B
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China
Prior art keywords
optical system
ultraviolet
framing
lens
relay
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CN201910012410.0A
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CN109656092A (en
Inventor
吴鸿春
戴殊韬
翁文
林紫雄
李锦辉
黄见洪
林文雄
吴丽霞
张志�
史斐
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Fujian Institute of Research on the Structure of Matter of CAS
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Fujian Institute of Research on the Structure of Matter of CAS
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B39/00High-speed photography

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  • General Physics & Mathematics (AREA)
  • Lenses (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

The application discloses an ultraviolet relay framing optical system and an ultraviolet framing camera. The ultraviolet relay framing optical system comprises a first lens group, an optical filter, a second lens group, a pyramid reflecting prism, a reflecting mirror and an imaging surface; the first lens group, the optical filter, the second lens group and the pyramid reflecting prism are sequentially arranged along a first direction; the reflecting mirrors are respectively positioned at two sides of the pyramid reflecting prism along the second direction; the imaging surface is opposite to the reflecting mirror; the first lens group sequentially comprises a first negative lens, a first positive lens and a second positive lens along a first direction; the second lens group sequentially comprises a third positive lens, a second negative lens, a fourth positive lens, a fifth positive lens, a third negative lens, a fourth negative lens and a sixth positive lens along the first direction. The system ensures the imaging quality and sensitivity of 190-350 nm ultraviolet band.

Description

Ultraviolet relay framing optical system and ultraviolet framing camera
Technical Field
The application relates to an ultraviolet relay framing optical system and an ultraviolet framing camera, and belongs to the technical field of framing imaging.
Background
In some fields where the imaging shutter integration time is highly demanding, such as ultrafast imaging, ballistic studies, particle image velocity measurement, etc., image-enhanced ultra-high-speed camera systems are commonly employed, as shown in fig. 1. The principle of an image intensifier which converts an optical signal into an electric signal and then converts the electric signal into the optical signal through electric amplification can realize the nanosecond time scale shutter imaging control. However, current image-enhanced ultra-high-speed camera systems can only capture frames at intervals above 400 ns, limited by the fluorescent off-time of the phosphor screen material. The relay framing mode is adopted to perform time-sharing shooting by utilizing a plurality of cameras, so that the defect of limited frame interval time of a single-channel camera can be avoided, and continuous shooting with infinitely short frame interval time can be realized. At present, the technology of a framing camera is mature, but in the ultraviolet band below 350nm, the scheme of a framing type ultra-high-speed camera is few, and the imaging quality and the sensitivity of the framing type camera in the prior art are not high.
Disclosure of Invention
According to one aspect of the present application, an ultraviolet relay framing optical system is provided that ensures imaging quality and sensitivity in the 190-350 nm ultraviolet band.
An ultraviolet relay framing optical system comprises a first lens group, an optical filter, a second lens group, a pyramid reflecting prism, a reflecting mirror and an imaging surface;
the first lens group, the optical filter, the second lens group and the pyramid reflecting prism are sequentially arranged along a first direction;
the reflecting mirrors are respectively positioned at two sides of the pyramid reflecting prism along the second direction;
the imaging surface is opposite to the reflecting mirror;
the first lens group sequentially comprises a first negative lens, a first positive lens and a second positive lens along a first direction;
the second lens group sequentially comprises a third positive lens, a second negative lens, a fourth positive lens, a fifth positive lens, a third negative lens, a fourth negative lens and a sixth positive lens along the first direction;
the first direction is a direction from an object space to an image space, and the second direction is a direction perpendicular to the first direction.
Optionally, the relative aperture of the ultraviolet relay framing optical system is F1.4-4.0.
Optionally, the focal length of the first lens group and the second lens group is 0.2 < f1/f2 < 2.5;
wherein f1 is the focal length of the first lens group, and f2 is the focal length of the second lens group.
Optionally, an exit pupil position of the ultraviolet relay framing optical system is located behind the sixth positive lens.
Optionally, the cone point or edge of the pyramid reflecting prism is located within a range of 5mm before and after the exit pupil position of the ultraviolet relay framing optical system.
Optionally, the magnification of the ultraviolet relay framing optical system is 0.8-4.
Optionally, an optical material having a transmittance of greater than 90% for the ultraviolet range of 190-400 nm is used.
Optionally, the optical material is selected from any one of fused quartz and fluoride materials;
wherein the fluoride material comprises any one of calcium fluoride and magnesium fluoride.
According to another aspect of the present application, there is also provided an ultraviolet framing camera including an objective optical system and the ultraviolet relay framing optical system described in any one of the above.
Optionally, the imaging surface of the objective optical system is behind the light incident surface of the first negative lens in the ultraviolet relay framing optical system.
The beneficial effects that this application can produce include:
1) The ultraviolet relay framing optical system provided by the application ensures the imaging quality and sensitivity of 190-350 nm ultraviolet band.
2) The ultraviolet relay framing optical system comprises a field lens optical lens group (a first lens group) and a conjugate optical lens group (a second lens group) which are matched, wherein the field lens optical lens group has the main functions of enabling the entrance pupil position of the ultraviolet relay framing optical system to be matched with the exit pupil position of an objective optical system, and guaranteeing the transmission efficiency of an ultraviolet image and the imaging illumination uniformity of each point in an imaging range.
3) The exit pupil position of the ultraviolet relay framing optical system is behind the last transmission lens, and the spatial position of the exit pupil position is the front edge or front cone point position of a multi-face reflection prism used for framing, so that the imaging illumination uniformity of each point in the imaging range of the framing image is ensured.
Drawings
FIG. 1 is a schematic diagram of an optical system of a conventional single-channel image-intensifier camera according to the prior art;
fig. 2 is a schematic structural diagram of an ultraviolet relay framing optical system provided in embodiment 1;
fig. 3 is a schematic diagram of a matching optical path between the ultraviolet relay framing optical system and the objective optical system provided in embodiment 1;
FIG. 4 is a graph showing the optical transfer function of the UV relay framing optical system according to example 1;
fig. 5 is a graph showing curvature of field and distortion of the ultraviolet relay framing optical system provided in example 1;
fig. 6 is a schematic structural diagram of an optical system in the ultraviolet framing camera provided in embodiment 2.
List of parts and reference numerals:
a diaphragm 100; a first lens group 200;
a first negative lens 201; a first positive lens 202;
a second positive lens 203; a filter 300;
a second lens group 400; a third positive lens 401;
a second negative lens 402; a fourth positive lens 403;
a fifth positive lens 404; a third negative lens 405;
a fourth negative lens 406; a sixth positive lens 407;
a pyramid reflecting prism 500; a mirror 600;
imaging plane 700.
Detailed Description
The present application is described in detail below with reference to examples, but the present application is not limited to these examples.
The application provides an ultraviolet relay framing optical system, which comprises a first lens group 200, an optical filter 300, a second lens group 400, a pyramid reflecting prism 500, a reflecting mirror 600 and an imaging surface 700; the first lens group 200, the optical filter 300, the second lens group 400, and the pyramid reflecting prism 500 are sequentially arranged along a first direction; the reflecting mirrors 600 are respectively positioned at both sides of the pyramid reflecting prism 500 along the second direction; imaging plane 700 is opposite mirror 600; the first lens group 200 includes a first negative lens 201, a first positive lens 202, and a second positive lens 203 in this order along a first direction; the second lens group 400 includes, in order along the first direction, a third positive lens 401, a second negative lens 402, a fourth positive lens 403, a fifth positive lens 404, a third negative lens 405, a fourth negative lens 406, and a sixth positive lens 407; the first direction is the direction from the object space to the image space; the second direction is a direction perpendicular to the first direction.
In the present application, the object direction is defined as the front, and the imaging plane direction is defined as the rear. The optical structure of the ultraviolet relay framing optical system is divided into a first lens group 200 and a second lens group 400, wherein the first lens group 200 of the front group consists of three lenses and is mainly used for changing the angle of the principal ray in the direction of an objective lens so as to realize the exit pupil matching with the objective lens system; the second lens group 400 of the rear group is composed of 7 lenses, and is mainly used for completing aberration correction of a relay optical system, realizing transfer of an objective lens image and imaging on an imaging surface of a sensor.
The ultraviolet relay framing optical system described in the application adopts an optical structure of 10 groups of 10 sheets, and sequentially comprises a first negative lens 201, a first positive lens 202, a second positive lens 203, an optical filter 300, a third positive lens 401, a second negative lens 402, a fourth positive lens 403, a fifth positive lens 404, a third negative lens 405, a fourth negative lens 406, a sixth positive lens 407, a pyramid reflecting prism 500, a reflecting mirror 600 and an imaging surface 700, which are sequentially arranged from the object side to the image side.
Optionally, the relative aperture of the ultraviolet relay framing optical system is F1.4-4.0.
Optionally, the focal length of the first lens group 200 and the second lens group 400 is 0.2.ltoreq.f1/f2.ltoreq.2.5; wherein f1 is the focal length of the first lens group, and f2 is the focal length of the second lens group.
Specifically, the focal length ratio of the first lens group 200 and the second lens group 400 of the two-group optical system satisfies the inequality: and f1/f2 is more than or equal to 0.2 and less than or equal to 2.5.
Alternatively, the exit pupil position of the ultraviolet relay framing optical system is located behind the sixth positive lens 407.
Specifically, the exit pupil position of the ultraviolet relay framing optical system in the present application is located behind the last spherical mirror (i.e., the sixth positive lens 407).
Alternatively, the cone point or edge of the pyramid reflecting prism 500 is located within 5mm before and after the exit pupil position of the ultraviolet relay framing optical system.
In this application, when the cone point or edge of the pyramid reflecting prism 500 is located within 5mm before and after the exit pupil position of the ultraviolet relay framing optical system, it is considered that the cone point or edge of the pyramid reflecting prism 500 coincides with the exit pupil position.
In a specific example, the exit pupil position of the ultraviolet relay framing optical system is located behind the last spherical lens (i.e. the sixth positive lens 407), and the exit pupil position coincides with the position of the conical point or the edge position of the beam splitting pyramid prism, so that the uniformity of imaging illumination of each point in the imaging range of the framing image can be ensured.
Optionally, the magnification of the ultraviolet relay framing optical system is 0.8-4.
Optionally, an optical material having a transmittance of greater than 90% for the ultraviolet range of 190-400 nm is used.
Specifically, the ultraviolet relay framing optical system is made of an optical material with high transmittance in the ultraviolet band of 190-400 nm.
Optionally, the optical material is selected from any one of fused quartz and fluoride materials;
wherein the fluoride material comprises any one of calcium fluoride and magnesium fluoride
The application also provides an ultraviolet framing camera, which comprises an objective optical system and the ultraviolet relay framing optical system.
Specifically, the objective optical system is located in front of the ultraviolet relay framing optical system.
The objective optical system comprises a diaphragm 100 as shown in fig. 2.
Optionally, the imaging surface of the objective optical system is behind the light incident surface of the first negative lens 201 in the ultraviolet relay framing optical system.
Specifically, when the ultraviolet relay framing optical system provided by the invention is matched with the front objective optical system, the imaging surface of the objective optical system is positioned behind the left optical end surface of the first negative lens 201 of the relay optical system. The structure can be compatible with all objective optical systems with the exit pupil positions within the range of 50-200 mm in front of the imaging face of the objective and the relative aperture value larger than F2.0, and realizes good matching of optical image transmission efficiency and energy transmission efficiency.
The ultraviolet relay framing optical system provided by the application has an image magnification of 0.8-4 for the objective optical system, preferably a magnification of 2.0, and a relative aperture magnification ratio of 0.5 for the objective optical system with a relative aperture value greater than F2.0.
The relay framing optical system is positioned between the objective lens and the imaging surface and is used for transferring and framing an objective lens image.
The technical scheme adopts a few ultraviolet relay optical systems designed and manufactured by ultraviolet light materials, and can realize the relay amplification ratio of F1.4-4.0 relative aperture and 0.8-4 times.
The ultraviolet relay framing optical system comprises a field lens optical lens group (a first lens group) and a conjugate optical lens group (a second lens group) which are matched, wherein the field lens optical lens group has the main functions of enabling the entrance pupil position of the ultraviolet relay framing optical system to be matched with the exit pupil position of an objective optical system, and guaranteeing the transmission efficiency of an ultraviolet image and the imaging illumination uniformity of each point in an imaging range.
In the application, the direction of the objective optical system is taken as the front, the exit pupil position of the ultraviolet relay framing optical system is positioned behind the last transmission lens, the space position of the exit pupil position is the front edge or front cone point position of the multi-face reflection prism used for framing, and the imaging illumination uniformity of each point in the imaging range of the framing image is ensured.
Example 1
Fig. 2 is a schematic structural diagram of an ultraviolet relay framing optical system according to the present embodiment, and the following description will discuss the present embodiment with reference to fig. 2.
As shown in fig. 2, the ultraviolet relay framing optical system provided in this embodiment includes a diaphragm 100, a first negative lens 201, a first positive lens 202, a second positive lens 203, an optical filter 300, a third positive lens 401, a second negative lens 402, a fourth positive lens 403, a fifth positive lens 404, a third negative lens 405, a fourth negative lens 406, a sixth positive lens 407, a pyramid reflecting prism 500, a reflecting mirror 600, and an imaging plane 700. The normalized parameters of the ultraviolet relay framing optical system provided in this embodiment are shown in table 1:
TABLE 1
Fig. 3 is a schematic diagram of a matching light path between the ultraviolet relay framing optical system and the objective optical system provided in this embodiment. As can be seen from fig. 3, the objective imaging plane is located behind the light entrance plane of the first negative lens 201 in the relay lens group.
Fig. 4 is an optical transfer function graph of the ultraviolet relay framing optical system provided in this embodiment, and it can be seen from fig. 4 that the central field of view Optical Transfer Function (OTF) of the relay optical system reaches above 0.4 and the edge field of view Optical Transfer Function (OTF) reaches above 0.3 under the spatial frequency of 50 line pairs/mm.
Fig. 5 is a graph of field curvature and distortion of the ultraviolet relay framing optical system provided in this embodiment, and it can be seen from fig. 5 that the field curvature of the relay optical system is within plus or minus 0.2 mm, and the distortion of the full field of view is within plus or minus 0.35%.
Remarks: the said figures 3 to 5 are calculated by ZEMAX optical design software from the company radio Zemax of America
Example 2
Fig. 6 is a schematic structural diagram of an optical system in the ultraviolet framing camera according to the present embodiment. The present embodiment will be described with reference to fig. 6.
As shown in fig. 6, the optical system in the ultraviolet framing camera provided in the present embodiment includes an objective optical system and the above-described ultraviolet relay framing optical system. The objective optical system is in front of the ultraviolet relay framing optical system.
The technical scheme of the embodiment is based on the framing camera principle, and the imaging quality and the sensitivity of the ultraviolet band of 190-350 nm can be ensured by adopting a reflective framing mode.
The foregoing description is only a few examples of the present application and is not intended to limit the present application in any way, and although the present application is disclosed in the preferred examples, it is not intended to limit the present application, and any person skilled in the art may make some changes or modifications to the disclosed technology without departing from the scope of the technical solution of the present application, and the technical solution is equivalent to the equivalent embodiments.

Claims (10)

1. The ultraviolet relay framing optical system is characterized by comprising a first lens group, an optical filter, a second lens group, a pyramid reflecting prism, a reflecting mirror and an imaging surface;
the first lens group, the optical filter, the second lens group and the pyramid reflecting prism are sequentially arranged along a first direction;
the reflecting mirrors are respectively positioned at two sides of the pyramid reflecting prism along the second direction;
the imaging surface is opposite to the reflecting mirror;
the first lens group consists of a first negative lens, a first positive lens and a second positive lens in sequence along a first direction;
the second lens group sequentially comprises a third positive lens, a second negative lens, a fourth positive lens, a fifth positive lens, a third negative lens, a fourth negative lens and a sixth positive lens along the first direction;
the first direction is a direction from an object space to an image space, and the second direction is a direction perpendicular to the first direction.
2. The ultraviolet relay framing optical system of claim 1, wherein the relative aperture of the ultraviolet relay framing optical system is F1.4-4.0.
3. The ultraviolet relay framing optical system of claim 1, wherein the first lens group and the second lens group have a focal length of 0.2 +.f1/f2 +.2.5;
wherein f 1 F is the focal length of the first lens group 2 Is the focal length of the second lens group.
4. The ultraviolet relay framing optical system according to claim 1, wherein an exit pupil position of the ultraviolet relay framing optical system is located behind a sixth positive lens.
5. The ultraviolet relay framing optical system of claim 4, wherein a cone point or edge of the pyramid reflecting prism is located within 5mm before and after an exit pupil position of the ultraviolet relay framing optical system.
6. The ultraviolet relay framing optical system according to claim 1, wherein the magnification of the ultraviolet relay framing optical system is 0.8 to 4.
7. The ultraviolet relay framing optical system according to claim 1, wherein an optical material having a transmittance of more than 90% for an ultraviolet band of 190 to 400nm is used.
8. The ultraviolet relay framing optical system according to claim 7, wherein the optical material is selected from any one of fused silica, fluoride material;
wherein the fluoride material comprises any one of calcium fluoride and magnesium fluoride.
9. An ultraviolet framing camera comprising an objective optical system and the ultraviolet relay framing optical system according to any one of claims 1 to 8.
10. The ultraviolet framing camera of claim 9, wherein the imaging plane of the objective optical system is rearward of the first negative lens light entrance plane in the ultraviolet relay framing optical system.
CN201910012410.0A 2019-01-07 2019-01-07 Ultraviolet relay framing optical system and ultraviolet framing camera Active CN109656092B (en)

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CN101666970A (en) * 2009-09-25 2010-03-10 深圳大学 Optical waiting type plane imaging system for framing, scanning and simultaneous recording
CN101950065A (en) * 2010-09-10 2011-01-19 北京理工大学 Fully-spherical deep ultraviolet lithography objective
JP2012168456A (en) * 2011-02-16 2012-09-06 Konica Minolta Advanced Layers Inc Imaging optical system and imaging apparatus
CN203275870U (en) * 2013-05-16 2013-11-06 中国科学院西安光学精密机械研究所 Optical Kerr gate gating framing camera
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CN103533236A (en) * 2013-09-27 2014-01-22 中国工程物理研究院流体物理研究所 Superhigh-speed digital photography device capable of being applied to multiple schlieren photography and optical splitter
CN103698885A (en) * 2014-01-06 2014-04-02 中国科学院光电技术研究所 High-image-quality projection optical system of ultraviolet band
CN209182650U (en) * 2019-01-07 2019-07-30 中国科学院福建物质结构研究所 A kind of ultraviolet relaying framing optical system and ultraviolet framing camera

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JP6400104B2 (en) * 2014-08-05 2018-10-03 オリンパス株式会社 Imaging optical system and optical apparatus provided with the same

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5903400A (en) * 1996-08-08 1999-05-11 Nikon Corporation Projection-optical system for use in a projection-exposure apparatus
CN101644603A (en) * 2009-09-04 2010-02-10 中国科学院上海技术物理研究所 Large-visual-field wide-wave-band optical analog system based on digital micromirror array view
CN101666970A (en) * 2009-09-25 2010-03-10 深圳大学 Optical waiting type plane imaging system for framing, scanning and simultaneous recording
CN101950065A (en) * 2010-09-10 2011-01-19 北京理工大学 Fully-spherical deep ultraviolet lithography objective
JP2012168456A (en) * 2011-02-16 2012-09-06 Konica Minolta Advanced Layers Inc Imaging optical system and imaging apparatus
CN203275870U (en) * 2013-05-16 2013-11-06 中国科学院西安光学精密机械研究所 Optical Kerr gate gating framing camera
CN103533236A (en) * 2013-09-27 2014-01-22 中国工程物理研究院流体物理研究所 Superhigh-speed digital photography device capable of being applied to multiple schlieren photography and optical splitter
CN103487920A (en) * 2013-09-30 2014-01-01 中国科学院西安光学精密机械研究所 Wide-field image space telecentric three-line-array stereo aerial surveying camera optical system
CN103698885A (en) * 2014-01-06 2014-04-02 中国科学院光电技术研究所 High-image-quality projection optical system of ultraviolet band
CN209182650U (en) * 2019-01-07 2019-07-30 中国科学院福建物质结构研究所 A kind of ultraviolet relaying framing optical system and ultraviolet framing camera

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