CN109580089B - Six-dimensional force sensor calibration device and calibration method thereof - Google Patents

Abstract

The invention provides a calibration device for a six-dimensional force sensor, wherein the six-dimensional force sensor comprises a sensor elastic body, and a stress hole is formed in the center of the sensor elastic body; the six-dimensional force sensor calibration device comprises a rack, a rotating mechanism, a force receiving device, a first loading device, a second loading device, a third loading device and a control system. According to the invention, the two ends of the elastic body of the six-dimensional force sensor are synchronously loaded, so that the accurate measurement of force/torque input and output of each dimension is realized; the method adopts a mode of fixing a force source and moving a sensor to be calibrated, only five force sources are used, and the whole calibration can be completed only by moving the rotating platform once; the rotary platform is electrically rotated and automatically limited, and the loading device and the stress shaft can synchronously rotate, so that the difficulty of manual operation is reduced, human errors are avoided, and the calibration repeatability is good; the spring is used as a force storage element, so that the instability error of the rotation of the motor is avoided, and the synchronous calibration of the loading and unloading processes is realized.

Description

Six-dimensional force sensor calibration device and calibration method thereof

Technical Field

The invention relates to the field of force sensor calibration, in particular to a six-dimensional force sensor calibration device and a calibration method thereof.

Background

The six-dimensional force sensor is the most complete form of the multi-dimensional force sensor, can simultaneously detect three-dimensional force components (Fx, Fy and Fz) and three-dimensional moment components (Mx, My and Mz) of any spatial coordinate system, and is widely applied to various fields of aerospace, mechanical manufacturing and assembly, medical engineering, automobile industry, sports competition and the like. The method is an important link in the sensor development process and directly influences the measurement precision of the sensor. The six-dimensional force sensor has more dimensions and larger influence of coupling among the dimensions, so that the six-dimensional force sensor is difficult to calibrate by using a calibration device and a calibration method of the traditional single-dimensional force sensor. Therefore, the calibration device and the calibration method of the six-dimensional force sensor have very important application value in research and design.

At present, calibration devices of multi-dimensional force sensors mainly comprise a weight loading type, a gantry type, a speed reducer type and the like. Chinese patent publication No. CN103604561A discloses a weight loading type calibration device, which performs calibration test on a sensor through weights and pulley sets, has the advantage of stable force value, but cannot perform automatic calibration, has large workload, and is easy to introduce human operation errors. Chinese patent publication No. CN103196629A discloses a device for calibrating by using a speed reducer and a high-precision single-dimensional force sensor, which controls the displacement and angle of movement by a grating, and further realizes automatic calibration of the sensor in each direction, but cannot realize independent loading of torque. Chinese patent publication No. CN103616128A discloses a calibration device using a combination of a servo motor and a spring as a loading unit, which can realize independent and combined calibration among multiple dimensions, but the number of loading units is very large, the operation is complicated, and complete separation of force and moment in all directions cannot be realized.

Disclosure of Invention

In order to solve the problems, the invention provides a six-dimensional force sensor calibration device and a calibration method thereof, which have the advantages of automatic accurate positioning and accurate loading, six-dimensional force and moment separation calibration, high calibration precision and simple and easy operation.

The technical scheme is as follows: the invention provides a calibration device for a six-dimensional force sensor, wherein the six-dimensional force sensor comprises a sensor elastic body, and a stress hole is formed in the center of the sensor elastic body; the six-dimensional force sensor calibration device comprises a rack, a rotating mechanism, a stress device, a first loading device, a second loading device, a third loading device and a control system;

the frame comprises a supporting platform, supporting legs and a door type bracket fixed on the supporting platform;

the rotating mechanism comprises a rotating platform arranged above the supporting platform, the rotating center of the rotating platform is positioned right below the midpoint of the beam of the door type support, and a mounting hole for fixing the elastic body of the sensor is formed in the rotating center of the rotating platform;

the stress device comprises a stress shaft which penetrates through the stress hole and is fixed in the stress hole, and the middle point of the stress shaft is positioned at the center of the stress hole;

the first loading device comprises a first driving mechanism capable of generating left and right forces, a first force application arm and a first force sensor for measuring the left and right forces of the first driving mechanism; the first driving mechanism is fixed on the left side upright post of the portal support and is positioned above the supporting platform; the left end of the first force application arm is connected with the output end of the first driving mechanism, and the right end of the first force application arm is connected with the upper end of the stressed shaft and applies left and right forces to the stressed shaft;

the second loading device and the first loading device are symmetrically arranged along the midpoint of the stress shaft; the second loading device comprises a second driving mechanism capable of generating left and right forces, a second force applying arm and a second force sensor for measuring the left and right forces of the second driving mechanism; the second driving mechanism is fixed on the upright column on the right side of the portal support and is positioned below the supporting platform; the right end of the second force application arm is connected with the output end of the second driving mechanism, and the left end of the second force application arm is connected with the lower end of the stressed shaft and applies left and right forces to the stressed shaft;

the third loading device comprises a third driving mechanism capable of generating vertical force, a fourth driving mechanism capable of generating front and back force, a fifth driving mechanism capable of generating front and back force and a third force applying arm; the third driving mechanism, the fourth driving mechanism and the fifth driving mechanism are all fixed on the door type support beam; the upper end surface of the third force application arm is connected with the output end of the third driving mechanism; the upper end of the third force application arm is also provided with a cross arm parallel to the beam of the door type support; the right side of the front end face of the cross arm is connected with the output end of the fourth driving mechanism, and the left side of the rear end face of the cross arm is connected with the output end of the fifth driving mechanism; the lower end of the third force application arm is connected with the upper end of the stressed shaft, and applies vertical force and rotating force along the axial lead of the stressed shaft to the stressed shaft; the third loading device also comprises a third force sensor used for measuring the vertical force applied to the stressed shaft by the third force applying arm and a torque sensor used for measuring the rotating force applied to the stressed shaft by the third force applying arm along the axial lead of the stressed shaft;

the control system sends out control signals to control the output forces of the first driving mechanism, the second driving mechanism and the third driving mechanism according to the received signals of the first force sensor, the second force sensor and the third force sensor; and the control system sends out control signals to control the output force of the fourth driving mechanism and the fifth driving mechanism according to the received signals of the torque sensor.

Furthermore, an upper end stress disc and a lower end stress disc are respectively fixed at the upper end and the lower end of the stress shaft, and the upper end stress disc and the lower end stress disc are respectively provided with a rotary through groove symmetrically arranged along the midpoint of the stress shaft; the rotary through groove comprises an arc through groove, a clockwise linear through groove and an anticlockwise linear through groove which are respectively arranged at the two ends of the arc through groove; the clockwise straight through groove is vertical to the anticlockwise straight through groove;

the right end of the first force applying arm is provided with a first hook which is hung in the upper end stressed disc rotating through groove and can slide along the upper end stressed disc rotating through groove; the left end of the second force applying arm is provided with a second hook which is hung in the lower end stressed disc rotating through groove and can slide along the lower end stressed disc rotating through groove;

when first couple was located the clockwise straight line of upper end atress dish and led to the groove, the second couple was located the clockwise straight line of lower extreme atress dish and led to the groove, just rotatory platform anticlockwise rotation 90 back, first couple was located the anticlockwise straight line of upper end atress dish and led to groove department, and the second couple is located the anticlockwise straight line of lower extreme atress dish and leads to the groove.

Furthermore, the upper end of the stress shaft is provided with a positioning pile, and the positioning pile comprises a positioning disc, a clockwise rotation positioning rod and an anticlockwise rotation positioning rod which are connected to the outer edge of the positioning disc; the lower end surface of the third force applying arm is connected with the upper end surface of the positioning disc, and the lower end of the third force applying arm is also provided with an L-shaped positioning hook; the lower bottom edge of the L-shaped positioning hook is connected with the lower end face of the positioning disc; the maximum relative rotation angle of the vertical edge of the L-shaped positioning hook between the clockwise rotation positioning rod and the anticlockwise rotation positioning rod along the outer edge of the positioning disc is 90 degrees; when the first hook is positioned in the clockwise straight through groove of the upper end stress disc, the vertical edge of the L-shaped positioning hook is connected with the clockwise rotating positioning rod; when the first hook is located in the anticlockwise straight-line through groove of the upper end stress disc, the vertical edge of the L-shaped positioning hook is connected with the anticlockwise rotating positioning rod.

Further, the rotating platform is a gear disc; the rotating mechanism also comprises a rotating platform driving motor fixed on the supporting platform and a rotating platform driving gear fixed on an output shaft of the rotating platform driving motor; the rotating platform driving gear is meshed with the outer teeth of the rotating platform; and the control system sends out a control signal to control the on-off and the steering of the rotating platform driving motor.

Further, the upper end of the rotating platform is provided with a radial clockwise rotating baffle and a radial anticlockwise rotating baffle; a limiting plate arranged on a rotating path of the clockwise rotating baffle and the anticlockwise rotating baffle is fixed on the supporting platform, and the maximum relative rotating angle of the limiting plate between the clockwise rotating baffle and the anticlockwise rotating baffle is 90 degrees; when the first hook is positioned in the clockwise straight through groove of the upper end stress disc, the limiting plate is connected with the clockwise rotating baffle; when the first hook is located in the anticlockwise straight-line through groove of the upper end stress disc, the limiting plate is connected with the anticlockwise rotating baffle.

Furthermore, a groove-shaped photoelectric switch is arranged at the end part of the limiting plate, and partition plates are arranged on the clockwise rotating baffle and the anticlockwise rotating baffle; when the rotating platform rotates to the state that the clockwise rotating baffle is connected with the limiting plate, the partition plate of the clockwise rotating baffle is inserted into the signal receiving and transmitting groove of the groove-shaped photoelectric switch to block signals of the signal receiving and transmitting groove; when the rotating platform rotates to the state that the anticlockwise rotating baffle is connected with the limiting plate, the partition plate of the anticlockwise rotating baffle is inserted into the signal receiving and transmitting groove of the groove-shaped photoelectric switch to block signals of the signal receiving and transmitting groove; and the control system sends a steering signal to the rotating platform driving motor after receiving the blocking signal of the signal receiving and sending slot.

Further, the first driving mechanism, the second driving mechanism, the third driving mechanism, the fourth driving mechanism and the fifth driving mechanism are linear screw rod stepping motors;

the first force applying arm further comprises a first spring connected to the left end of the first hook, and the left end of the first spring is connected with a first driving mechanism driving shaft; the first force sensor is disposed between the first drive mechanism drive shaft and the first spring;

the second force applying arm comprises a second spring connected to the right end of the second hook, and the right end of the second spring is connected with a second driving mechanism driving shaft; the second force sensor is arranged between the second drive mechanism drive shaft and the second spring;

the third force applying arm comprises a connecting part fixed with the upper end of the force applying shaft and a third spring fixed at the upper end of the connecting part, and the upper end of the third spring is connected with the cross arm; and the third force sensor and the torque sensor are sequentially arranged between the third spring and the cross arm.

Furthermore, vertical sliding grooves in the up-and-down direction and vertical sliding blocks sliding along the vertical sliding grooves are arranged on two upright columns of the door type support, and positioning bolts are arranged between the vertical sliding grooves and the vertical sliding blocks; the first driving mechanism is arranged on a vertical sliding block of a stand column on the left side of the portal support, and the second driving mechanism is arranged on a vertical sliding block of a stand column on the right side of the portal support.

Furthermore, a horizontal sliding groove along the left-right direction and a horizontal sliding block sliding along the horizontal sliding groove are arranged on a cross beam of the door-type support, and a positioning bolt is arranged between the horizontal sliding groove and the horizontal sliding block; and the third driving mechanism, the fourth driving mechanism and the fifth driving mechanism are arranged on the horizontal sliding block.

The method for calibrating the six-dimensional force sensor by using the six-dimensional force sensor calibration device comprises the following steps:

s1, the control system operates the rotating platform to rotate clockwise until the limiting plate is connected with the clockwise rotating baffle, meanwhile, the first hook is positioned in the clockwise linear through groove of the upper end stress disc, the second hook is positioned in the clockwise linear through groove of the lower end stress disc, and the vertical edge of the L-shaped positioning hook is connected with the clockwise rotating positioning rod; setting the position as an initial position, setting the right side of the elastic body of the sensor in the initial position state as the positive direction of an x axis, the rear side as the positive direction of a y axis and the upper side as the positive direction of a z axis;

s2, controlling the first driving mechanism to rotate out and the second driving mechanism to rotate in, and applying an x-axis positive force Fx +; the control system receives the pressure value of the first force sensor and the pressure value of the second force sensor, feedback-controls the first driving mechanism and the second driving mechanism to output a plurality of groups of force values, and keeps the output force values of the first driving mechanism and the second driving mechanism the same; recording a plurality of groups of output force values of the first driving mechanism and the second driving mechanism and the vision measuring data of the six-dimensional sensor in corresponding states;

s3, controlling the first driving mechanism to rotate in and the second driving mechanism to rotate out, and applying an x-axis negative force Fx-; the control system receives the pressure value of the first force sensor and the pressure value of the second force sensor, feedback-controls the first driving mechanism and the second driving mechanism to output a plurality of groups of force values, and keeps the output force values of the first driving mechanism and the second driving mechanism the same; recording a plurality of groups of output force values of the first driving mechanism and the second driving mechanism and the vision measuring data of the six-dimensional sensor in corresponding states;

s4, controlling the first driving mechanism to rotate out, controlling the second driving mechanism to rotate out, and applying a positive y-axis torque My +; the control system receives the pressure value of the first force sensor and the pressure value of the second force sensor, feedback-controls the first driving mechanism and the second driving mechanism to output a plurality of groups of force values, and keeps the output force values of the first driving mechanism and the second driving mechanism the same; recording a plurality of groups of output force values of the first driving mechanism and the second driving mechanism and the vision measuring data of the six-dimensional sensor in corresponding states;

s5, controlling the first driving mechanism to rotate in, and the second driving mechanism to rotate in, and applying a negative y-axis moment My-; the control system receives the pressure value of the first force sensor and the pressure value of the second force sensor, and controls the first driving mechanism and the second driving mechanism to output a plurality of groups of force values in a feedback mode and keeps the output force values of the first driving mechanism and the second driving mechanism identical; recording a plurality of groups of output force values of the first driving mechanism and the second driving mechanism and the vision measuring data of the six-dimensional sensor in corresponding states;

s6, controlling the third driving mechanism to rotate, and applying a positive z-axis force Fz +; the control system receives the pressure value of the third force sensor and controls the third driving mechanism to output a plurality of groups of force values in a feedback manner; recording an output force value of the third driving mechanism and the vision measuring data of the six-dimensional sensor in a corresponding state;

s7, controlling the third driving mechanism to rotate out and applying a negative force Fz & lt- & gt of the z axis; the control system receives the pressure value of the third force sensor and controls the third driving mechanism to output a plurality of groups of force values in a feedback manner; recording an output force value of the third driving mechanism and the vision measuring data of the six-dimensional sensor in a corresponding state;

s8, controlling the fourth driving mechanism to rotate out, controlling the fifth driving mechanism to rotate out, and applying a z-axis positive moment Mz +; the control system receives the measured value of the torque sensor and controls the fourth driving mechanism and the fifth driving mechanism to output a plurality of groups of force values in a feedback mode; recording multiple groups of output force values of the fourth driving mechanism and the fifth driving mechanism and visual data of the six-dimensional sensor in corresponding states;

s9, operating the rotating platform by the control system to rotate 90 degrees anticlockwise until the limiting plate is connected with the anticlockwise rotating baffle plate, meanwhile, positioning the first hook in the anticlockwise linear through groove of the upper end stress disc, positioning the second hook in the anticlockwise linear through groove of the lower end stress disc, and connecting the vertical edge of the L-shaped positioning hook with the anticlockwise rotating positioning rod;

s10, controlling the fourth driving mechanism to rotate in, controlling the fifth driving mechanism to rotate in, and applying a negative z-axis moment Mz-; the control system receives the measured value of the torque sensor and controls the fourth driving mechanism and the fifth driving mechanism to output a plurality of groups of force values in a feedback mode; recording multiple groups of output force values of the fourth driving mechanism and the fifth driving mechanism and visual data of the six-dimensional sensor in corresponding states;

s11, controlling the first driving mechanism to rotate out, and the second driving mechanism to rotate in, and applying a negative force Fy & lt- & gt on the y axis; the control system receives the pressure value of the first force sensor and the pressure value of the second force sensor, feedback-controls the first driving mechanism and the second driving mechanism to output a plurality of groups of force values, and keeps the output force values of the first driving mechanism and the second driving mechanism the same; recording a plurality of groups of output force values of the first driving mechanism and the second driving mechanism and the vision measuring data of the six-dimensional sensor in corresponding states;

s12, controlling the first driving mechanism to rotate in and the second driving mechanism to rotate out, and applying a positive force Fy + of the y axis; the control system receives the pressure value of the first force sensor and the pressure value of the second force sensor, feedback-controls the first driving mechanism and the second driving mechanism to output a plurality of groups of force values, and keeps the output force values of the first driving mechanism and the second driving mechanism the same; recording a plurality of groups of output force values of the first driving mechanism and the second driving mechanism and the vision measuring data of the six-dimensional sensor in corresponding states;

s13, controlling the first driving mechanism to rotate out, controlling the second driving mechanism to rotate out, and applying an x-axis positive torque Mx +; the control system receives the pressure value of the first force sensor and the pressure value of the second force sensor, feedback-controls the first driving mechanism and the second driving mechanism to output a plurality of groups of force values, and keeps the output force values of the first driving mechanism and the second driving mechanism the same; recording a plurality of groups of output force values of the first driving mechanism and the second driving mechanism and the vision measuring data of the six-dimensional sensor in corresponding states;

s14, controlling the first driving mechanism to rotate in, and the second driving mechanism to rotate in, and applying an x-axis negative moment Mx-; the control system receives the pressure value of the first force sensor and the pressure value of the second force sensor, feedback-controls the first driving mechanism and the second driving mechanism to output a plurality of groups of force values, and keeps the output force values of the first driving mechanism and the second driving mechanism the same; recording a plurality of groups of output force values of the first driving mechanism and the second driving mechanism and the vision measuring data of the six-dimensional sensor in corresponding states;

and S15, performing operation processing on the data acquired in the step and calibrating the accuracy of the six-dimensional force sensor.

Has the advantages that: (1) according to the invention, the two ends of the elastic body of the six-dimensional force sensor are synchronously loaded, so that the force/torque input/output relation of each dimension is accurately measured;

(2) the invention adopts the modes of fixing the force source and moving the sensor to be calibrated, only uses five force sources, and only moves the rotating platform once to complete the whole calibration task, so that the device has more simplified structure, lower cost and better stability;

(3) the rotary platform is electrically rotated and automatically limited, the loading device and the stress shaft can synchronously rotate without being disassembled and assembled, the whole calibration process does not need any manual adjustment, and the automatic calibration can be carried out by the control of an upper computer after the assembly is finished, so that the difficulty of manual operation is greatly reduced, the calibration workload is reduced, the artificial error is avoided, and the calibration repeatability is better;

(4) the invention adopts the spring as the force storage element, avoids the unstable error of the rotation of the motor and realizes the synchronous calibration of the loading and unloading processes;

(5) the position of the loading device can be correspondingly corrected and matched through the sliding block, and the device can be used for calibrating six-dimensional force sensors with different measuring ranges and sizes and has higher universality.

Drawings

FIG. 1 is a schematic side-up perspective view of the present invention;

FIG. 2 is a schematic side-down perspective view of the present invention;

FIG. 3 is a schematic structural diagram of a rotating mechanism of the present invention;

FIG. 4 is a schematic structural diagram of a force-bearing device according to the present invention;

FIG. 5 is a partial structural view of the upper end of the force-bearing plate of the present invention;

FIG. 6 is a top view of the upper stressed disk of the present invention;

FIG. 7 is a schematic structural diagram of a first loading device according to the present invention;

FIG. 8 is a structural diagram of a third loading device according to the present invention;

FIG. 9 is a schematic structural view of the joint between the force-bearing shaft and the third force-applying arm according to the present invention;

fig. 10 is a top view of the force-bearing shaft of the present invention.

Detailed Description

As shown in fig. 1, the invention provides a six-dimensional force sensor calibration device, the six-dimensional force sensor includes a sensor elastic body, a force-receiving hole is disposed in the center of the sensor elastic body, and the six-dimensional force sensor calibration device includes a frame, a rotating mechanism, a force-receiving device, a first loading device, a second loading device, a third loading device, and a control system. The orientation of the present specification is based on fig. 1, and the right side of the sensor elastic body in the position state of fig. 1 is set as the x-axis positive direction, the rear side is set as the y-axis positive direction, and the upper side is set as the z-axis positive direction.

The frame includes supporting platform 1, supporting leg 2 and fixes portal trestle 3 on supporting platform 1.

The rotating mechanism comprises a rotating platform 4 arranged above the supporting platform, the rotating center of the rotating platform 4 is located under the middle point of the beam of the door type support, and a mounting hole 5 for fixing the elastic body of the sensor is formed in the rotating center of the rotating platform 4. The clockwise and counterclockwise rotation of the rotating platform 4 described in this specification is based on the perspective of looking down the support platform 1.

The force-bearing device comprises a force-bearing shaft 6 fixed in the force-bearing hole in a penetrating mode, and the middle point of the force-bearing shaft 6 is located at the center of the force-bearing hole.

The first loading device comprises a first driving mechanism A01 capable of generating left and right forces, a first force applying arm (A02) and a first force sensor A03 for measuring the left and right forces of the first driving mechanism A01; the first driving mechanism A01 is fixed on the left upright post of the door type bracket 3 and is positioned above the supporting platform 1; the left end of the first force applying arm A02 is connected to the output end of the first driving mechanism A01, and the right end of the first force applying arm A02 is connected to the upper end of the stressed shaft 6 to apply a left-right force to the stressed shaft 6.

As shown in fig. 2, the second loading device and the first loading device are symmetrically arranged along the midpoint of the stress axis; the second loading device comprises a second driving mechanism B01 capable of generating left and right forces, a second force applying arm B02 and a second force sensor B03 for measuring the left and right forces of the second driving mechanism B01; the second driving mechanism B01 is fixed on the right upright post of the door type bracket 3 and is positioned below the supporting platform 1; the right end of the second force applying arm B02 is connected with the output end of a second driving mechanism B01, and the left end of the second force applying arm B02 is connected with the lower end of the stressed shaft 6 to apply left and right forces to the stressed shaft 6.

When the rotary platform 4 rotates to a certain position, the first driving mechanism A01 and the second driving mechanism B01 simultaneously apply a same-direction force to the force-bearing shaft, the force-bearing shaft applies a force in the x-axis direction to the force-bearing hole of the six-dimensional force sensor, and detection calculation is performed through the first force sensor A03 and the second force sensor B03, so that the force in the x-axis direction of the six-dimensional force sensor is calibrated; the first driving mechanism A01 and the second driving mechanism B01 apply reverse force to the stressed shaft at the same time, the stressed shaft applies positive and negative rotation torque with the y axis as the axis to the stressed hole of the six-dimensional force sensor, and the positive and negative rotation torque with the y axis as the axis of the six-dimensional force sensor is calibrated by detecting and calculating the first force sensor A03 and the second force sensor B03.

When the rotating platform 4 rotates 90 degrees from the position, the force bearing shaft at the original position and the force bearing hole of the six-dimensional force sensor rotate to the direction of the x axis along the contact surface of the y axis. The first driving mechanism A01 and the second driving mechanism B01 apply the same-direction force to the stressed shaft at the same time, the stressed shaft applies the force of the y-axis direction to the stressed hole of the six-dimensional force sensor, and the force is detected and calculated through the first force sensor A03 and the second force sensor B03 and used for calibrating the force of the y-axis direction of the six-dimensional force sensor; the first driving mechanism A01 and the second driving mechanism B01 apply reverse force to the stressed shaft at the same time, the stressed shaft applies positive and negative rotation torque with the x axis as the axis to the stressed hole of the six-dimensional force sensor, and the positive and negative rotation torque with the x axis as the axis of the six-dimensional force sensor is calibrated by detecting and calculating the first force sensor A03 and the second force sensor B03.

The third loading device comprises a third driving mechanism C01 capable of generating vertical force, a fourth driving mechanism C02 capable of generating front and back force, a fifth driving mechanism C03 capable of generating front and back force and a third force applying arm C04; the third driving mechanism C01, the fourth driving mechanism C02 and the fifth driving mechanism C03 are all fixed on the beam of the portal frame 3; the upper end surface of the third force applying arm C04 is connected with the output end of a third driving mechanism C01; the upper end of the third force applying arm C04 is also provided with a cross arm C05 parallel to the cross beam of the portal bracket 3; the right side of the front end surface of the cross arm C05 is connected with the output end of the fourth driving mechanism C02, and the left side of the rear end surface of the cross arm C05 is connected with the output end of the fifth driving mechanism C03; the lower end of the third force application arm C04 is connected with the upper end of the stressed shaft 6, and applies vertical force and rotating force along the axial lead of the stressed shaft 6 to the stressed shaft 6; the third loading device further comprises a third force sensor C06 for measuring the vertical force applied by the third force applying arm C04 to the force bearing shaft 6 and a torque sensor C07 for measuring the rotating force applied by the third force applying arm C04 to the force bearing shaft 6 along the axial lead of the force bearing shaft 6.

The third driving mechanism detects the vertical force applied by the force-bearing shaft 6 through a third force sensor C06, and is used for calibrating the z-direction force of the six-dimensional force sensor.

The fourth driving mechanism C02 and the fifth driving mechanism C03 simultaneously apply thrust to the cross arm C05, and the third force applying arm C04 applies anticlockwise rotation moment along the axial lead of the force receiving shaft 6 to the force receiving shaft 6; the fourth driving mechanism C02 and the fifth driving mechanism C03 simultaneously apply pulling force to the cross arm C05, and the third force applying arm C04 applies clockwise rotation moment along the axial lead of the force receiving shaft 6 to the force receiving shaft 6. The torque sensor C07 is used for detecting the anticlockwise rotation moment and the clockwise rotation moment and calibrating the positive and negative rotation moments of the six-dimensional force sensor by taking z as the axis.

The control system sends out control signals to control the output force of the first driving mechanism A01, the second driving mechanism B01 and the third driving mechanism C01 according to the received signals of the first force sensor A03, the second force sensor B03 and the third force sensor C06; the control system sends out control signals to control the output force of the fourth driving mechanism C02 and the fifth driving mechanism C03 according to the received signals of the torque sensor C07.

As shown in fig. 4, an upper end stress disk 7 and a lower end stress disk 8 are respectively fixed at the upper end and the lower end of the stress shaft 6, and the upper end stress disk 7 and the lower end stress disk 8 are respectively provided with a rotary through groove symmetrically arranged along the midpoint of the stress shaft 6; as shown in fig. 6, the rotary through groove comprises an arc through groove 9, and a clockwise straight through groove 10 and an anticlockwise straight through groove 11 respectively arranged at two ends of an arc of the arc through groove 9; the clockwise straight through groove 10 and the anticlockwise straight through groove 11 are vertical.

As shown in fig. 5, the right end of the first force applying arm a02 is provided with a first hook a04 which is hung in the rotary through groove of the upper end force receiving disc 7 and can slide along the rotary through groove of the upper end force receiving disc 7; the left end of the second force applying arm B02 is provided with a second hook B04 which is hung in the rotary through groove of the lower end stress disk 8 and can slide along the rotary through groove of the lower end stress disk 8.

When first couple A04 was located the logical groove 10 of clockwise straight line of upper end atress dish 7, second couple B04 was located the logical groove 10 of clockwise straight line of lower extreme atress dish 8, just rotary platform 4 anticlockwise rotation 90 back, first couple A04 was located the logical groove 11 department of anticlockwise straight line of upper end atress dish 7, and second couple B04 is located the logical groove 11 of anticlockwise straight line of lower extreme atress dish 8.

As shown in fig. 9 and 10, the upper end of the stress shaft 6 is provided with a positioning pile, and the positioning pile comprises a positioning disc 12, and a clockwise rotation positioning rod 13 and a counterclockwise rotation positioning rod 14 which are connected to the outer edge of the positioning disc 12; the lower end surface of the third force applying arm C04 is connected with the upper end surface of the positioning disc 12, and the lower end of the third force applying arm C04 is also provided with an L-shaped positioning hook C08; the lower bottom edge of the L-shaped positioning hook C08 is connected with the lower end surface of the positioning disc 12; the maximum relative rotation angle of the vertical edge of the L-shaped positioning hook C08 between the clockwise rotation positioning rod 13 and the anticlockwise rotation positioning rod 14 along the outer edge of the positioning disc 12 is 90 degrees; when the first hook A04 is positioned in the clockwise straight through groove 10 of the upper stress disc 7, the vertical edge of the L-shaped positioning hook C08 is connected with the clockwise rotation positioning rod 13; when the first hook A04 is located in the counterclockwise straight through slot 11 of the upper stress disc 7, the vertical edge of the L-shaped positioning hook C08 is connected with the counterclockwise rotation positioning rod 14.

As shown in fig. 3, the rotary platform 4 is a gear disc; the rotating mechanism also comprises a rotating platform driving motor 15 fixed on the supporting platform 1 and a rotating platform driving gear 16 fixed on an output shaft of the rotating platform driving motor 15; the rotary platform driving gear 16 is meshed with the external teeth of the rotary platform 4; the control system sends out control signals to control the on-off and steering of the rotary platform driving motor 15.

The upper end of the rotary platform 4 is provided with a radial clockwise rotation baffle 17 and a radial anticlockwise rotation baffle 18; a limiting plate 19 arranged on the rotating path of the clockwise rotating baffle 17 and the anticlockwise rotating baffle 18 is fixed on the supporting platform 1, and the maximum relative rotating angle of the limiting plate 19 between the clockwise rotating baffle 17 and the anticlockwise rotating baffle 18 is 90 degrees; when the first hook A04 is positioned in the clockwise straight through groove 10 of the upper stress disc 7, the limit plate 19 is connected with the clockwise rotary baffle 17; when the first hook A04 is located in the counterclockwise straight through slot 11 of the upper force-bearing plate 7, the limit plate 19 is connected with the counterclockwise rotation baffle 18.

A groove-shaped photoelectric switch 20 is arranged at the end part of the limiting plate 19, and partition plates 21 are arranged on the clockwise rotating baffle 17 and the anticlockwise rotating baffle 18; when the rotary platform 4 rotates until the clockwise rotation baffle 17 is connected with the limiting plate 19, the partition plate 21 of the clockwise rotation baffle 17 is inserted into the signal receiving and transmitting groove of the groove-shaped photoelectric switch 20 to block the signal of the signal receiving and transmitting groove; when the rotary platform 4 rotates until the anticlockwise rotating baffle 18 is connected with the limiting plate 19, the partition plate 21 of the anticlockwise rotating baffle 18 is inserted into the signal receiving and transmitting groove of the groove-shaped photoelectric switch 20 to block signals of the signal receiving and transmitting groove; and the control system sends a steering signal to the rotating platform driving motor 15 after receiving the blocking signal of the signal receiving and sending slot.

The rotating mechanism is provided with 90-degree rotation limit, so that the rotating platform 4 can automatically rotate in a 90-degree interval. In the rotating process of the rotating platform 4, the first hook A04 and the upper end stress disc 7, the second hook B04 and the lower end stress disc 8, and the third force application arm C04 and the stress shaft can synchronously rotate relative to each other by 90 degrees, so that the automatic calibration is realized without any dismounting operation.

The first driving mechanism A01, the second driving mechanism B01, the third driving mechanism C01, the fourth driving mechanism C02 and the fifth driving mechanism C03 are linear screw rod stepping motors.

As shown in fig. 7, the first force applying arm a02 further comprises a first spring a05 connected to the left end of the first hook a04, and the left end of the first spring a05 is connected to the driving shaft of the first driving mechanism a 01; the first force sensor a03 is disposed between the first drive mechanism a01 drive shaft and the first spring a 05.

The second force applying arm B02 further comprises a second spring connected to the right end of the second hook B04, and the right end of the second spring is connected with a driving shaft of a second driving mechanism B01; the second force sensor B03 is disposed between the second drive mechanism B01 drive shaft and the second spring.

As shown in fig. 8, a third spring C09 connecting the upper end and the lower end of the third force applying arm C04 is arranged in the middle of the third force applying arm C04, and the upper end of the third spring C09 is connected with the cross arm C05; the third force sensor C06 and the torque sensor C07 are disposed between the third spring C09 and the cross arm C05 in that order.

The loading device of the invention adopts the spring as the force storage element, avoids the instability error of the rotation of the motor and realizes the synchronous calibration of the loading and unloading processes.

Vertical sliding grooves 22 in the up-and-down direction and vertical sliding blocks 23 sliding along the vertical sliding grooves 22 are formed in the two upright columns of the door type support 3, and positioning bolts are further arranged between the vertical sliding grooves 22 and the vertical sliding blocks 23; the first driving mechanism A01 is arranged on the vertical slide block 23 of the left side upright post of the portal frame 3, and the second driving mechanism B01 is arranged on the vertical slide block 23 of the right side upright post of the portal frame 3.

A horizontal sliding groove 24 along the left-right direction and a horizontal sliding block 25 sliding along the horizontal sliding groove 24 are arranged on a cross beam of the door type support 3, and a positioning bolt is further arranged between the horizontal sliding groove 24 and the horizontal sliding block 25; the third driving mechanism C01, the fourth driving mechanism C02 and the fifth driving mechanism C03 are disposed on the horizontal slider 25. The structure is used for adjusting the positions of the first loading device, the second loading device and the third loading device.

The method for calibrating the six-dimensional force sensor by using the six-dimensional force sensor calibration device of the embodiment comprises the following steps:

s1, the control system operates the rotating platform 4 to rotate clockwise until the limit plate 19 is connected with the clockwise rotating baffle 17, meanwhile, the first hook A04 is positioned in the clockwise straight through groove 10 of the upper end stress disc 7, the second hook B04 is positioned in the clockwise straight through groove 10 of the lower end stress disc 8, and the vertical edge of the L-shaped positioning hook C08 is connected with the clockwise rotating positioning rod 13; setting the position as an initial position, setting the right side of the elastic body of the sensor in the initial position state as the positive direction of an x axis, the rear side as the positive direction of a y axis and the upper side as the positive direction of a z axis;

s2, controlling the first driving mechanism A01 to rotate out, and the second driving mechanism B01 to rotate in, and applying an x-axis positive force Fx +; the control system receives the pressure value of the first force sensor A03 and the pressure value of the second force sensor B03, feedback-controls the first driving mechanism A01 and the second driving mechanism B01 to output multiple sets of force values, and keeps the output force values of the first driving mechanism A01 and the second driving mechanism B01 the same; recording multiple groups of output force values of the first driving mechanism A01 and the second driving mechanism B01 and visual data of the six-dimensional sensor in corresponding states;

s3, controlling the first driving mechanism A01 to rotate in, and the second driving mechanism B01 to rotate out, and applying an x-axis negative force Fx-; the control system receives the pressure value of the first force sensor A03 and the pressure value of the second force sensor B03, feedback-controls the first driving mechanism A01 and the second driving mechanism B01 to output multiple sets of force values, and keeps the output force values of the first driving mechanism A01 and the second driving mechanism B01 the same; recording multiple groups of output force values of the first driving mechanism A01 and the second driving mechanism B01 and visual data of the six-dimensional sensor in corresponding states;

s4, controlling the first driving mechanism A01 to rotate out, controlling the second driving mechanism B01 to rotate out, and applying a positive y-axis torque My +; the control system receives the pressure value of the first force sensor A03 and the pressure value of the second force sensor B03, feedback-controls the first driving mechanism A01 and the second driving mechanism B01 to output multiple sets of force values, and keeps the output force values of the first driving mechanism A01 and the second driving mechanism B01 the same; recording multiple groups of output force values of the first driving mechanism A01 and the second driving mechanism B01 and visual data of the six-dimensional sensor in corresponding states;

s5, controlling the first driving mechanism A01 to rotate in, and the second driving mechanism B01 to rotate in, and applying a negative y-axis moment My-; the control system receives the pressure value of the first force sensor A03 and the pressure value of the second force sensor B03, feedback-controls the first driving mechanism A01 and the second driving mechanism B01 to output multiple sets of force values, and keeps the output force values of the first driving mechanism A01 and the second driving mechanism B01 the same; recording multiple groups of output force values of the first driving mechanism A01 and the second driving mechanism B01 and visual data of the six-dimensional sensor in corresponding states;

s6, controlling the third driving mechanism C01 to rotate, and applying a z-axis positive force Fz +; the control system receives the pressure value of the third force sensor C06 and controls the third driving mechanism C01 to output a plurality of groups of force values in a feedback manner; recording the output force value of the third driving mechanism C01 and the vision measuring data of the six-dimensional sensor in a corresponding state;

s7, controlling the third driving mechanism C01 to rotate out, and applying a negative z-axis force Fz-; the control system receives the pressure value of the third force sensor C06 and controls the third driving mechanism C01 to output a plurality of groups of force values in a feedback manner; recording the output force value of the third driving mechanism C01 and the vision measuring data of the six-dimensional sensor in a corresponding state;

s8, controlling the fourth driving mechanism C02 to rotate out, controlling the fifth driving mechanism C03 to rotate out, and applying a z-axis positive torque Mz +; the control system receives the measured value of the torque sensor C07 and controls the fourth driving mechanism C02 and the fifth driving mechanism C03 to output a plurality of force values in a feedback mode; recording multiple groups of output force values of the fourth driving mechanism C02 and the fifth driving mechanism C03 and visual data of the six-dimensional sensor in corresponding states;

s9, operating the rotating platform 4 by the control system to rotate 90 degrees anticlockwise until the limiting plate 19 is connected with the anticlockwise rotating baffle 18, meanwhile, the first hook A04 is positioned in the anticlockwise linear through groove 11 of the upper end stress disc 7, the second hook B04 is positioned in the anticlockwise linear through groove 11 of the lower end stress disc 8, and the vertical edge of the L-shaped positioning hook C08 is connected with the anticlockwise rotating positioning rod 14;

s10, controlling the fourth driving mechanism C02 to rotate, controlling the fifth driving mechanism C03 to rotate, and applying a negative z-axis moment Mz-; the control system receives the measured value of the torque sensor C07 and controls the fourth driving mechanism C02 and the fifth driving mechanism C03 to output a plurality of force values in a feedback mode; recording multiple groups of output force values of the fourth driving mechanism C02 and the fifth driving mechanism C03 and visual data of the six-dimensional sensor in corresponding states;

s11, controlling the first driving mechanism A01 to rotate out, and the second driving mechanism B01 to rotate in, and applying a negative force Fy & lt- & gt on the y axis; the control system receives the pressure value of the first force sensor A03 and the pressure value of the second force sensor B03, feedback-controls the first driving mechanism A01 and the second driving mechanism B01 to output multiple sets of force values, and keeps the output force values of the first driving mechanism A01 and the second driving mechanism B01 the same; recording multiple groups of output force values of the first driving mechanism A01 and the second driving mechanism B01 and visual data of the six-dimensional sensor in corresponding states;

s12, controlling the first driving mechanism A01 to rotate in, and the second driving mechanism B01 to rotate out, and applying a positive force Fy + on the y axis; the control system receives the pressure value of the first force sensor A03 and the pressure value of the second force sensor B03, feedback-controls the first driving mechanism A01 and the second driving mechanism B01 to output multiple sets of force values, and keeps the output force values of the first driving mechanism A01 and the second driving mechanism B01 the same; recording multiple groups of output force values of the first driving mechanism A01 and the second driving mechanism B01 and visual data of the six-dimensional sensor in corresponding states;

s13, controlling the first driving mechanism A01 to rotate out, controlling the second driving mechanism B01 to rotate out, and applying an x-axis positive torque Mx +; the control system receives the pressure value of the first force sensor A03 and the pressure value of the second force sensor B03, feedback-controls the first driving mechanism A01 and the second driving mechanism B01 to output multiple sets of force values, and keeps the output force values of the first driving mechanism A01 and the second driving mechanism B01 the same; recording multiple groups of output force values of the first driving mechanism A01 and the second driving mechanism B01 and visual data of the six-dimensional sensor in corresponding states;

s14, controlling the first driving mechanism A01 to rotate, controlling the second driving mechanism B01 to rotate, and applying an x-axis negative moment Mx-; the control system receives the pressure value of the first force sensor A03 and the pressure value of the second force sensor B03, feedback-controls the first driving mechanism A01 and the second driving mechanism B01 to output multiple sets of force values, and keeps the output force values of the first driving mechanism A01 and the second driving mechanism B01 the same; recording multiple groups of output force values of the first driving mechanism A01 and the second driving mechanism B01 and visual data of the six-dimensional sensor in corresponding states;

and S15, performing operation processing on the data acquired in the step and calibrating the accuracy of the six-dimensional force sensor.

Claims (10)

1. The utility model provides a six-dimensional force transducer calibration device, six-dimensional force transducer includes the sensor elastomer, the center of sensor elastomer is provided with atress hole, its characterized in that: the device comprises a rack, a rotating mechanism, a stress device, a first loading device, a second loading device, a third loading device and a control system;

the frame comprises a supporting platform (1), supporting legs (2) and a door type support (3) fixed on the supporting platform (1);

the rotating mechanism comprises a rotating platform (4) arranged above the supporting platform, the rotating center of the rotating platform (4) is positioned right below the middle point of the beam of the door type support, and a mounting hole (5) for fixing a sensor elastomer is formed in the rotating center of the rotating platform (4);

the stress device comprises a stress shaft (6) fixed in the stress hole in a penetrating way, and the middle point of the stress shaft (6) is positioned at the center of the stress hole;

the first loading device comprises a first driving mechanism (A01) capable of generating left and right force, a first force applying arm (A02) and a first force sensor (A03) for measuring the left and right force of the first driving mechanism (A01); the first driving mechanism (A01) is fixed on a left side upright post of the door type support (3) and is positioned above the supporting platform (1); the left end of the first force application arm (A02) is connected to the output end of the first driving mechanism (A01), and the right end of the first force application arm (A02) is connected with the upper end of the stressed shaft (6) and applies left and right force to the stressed shaft (6);

the second loading device and the first loading device are symmetrically arranged along the midpoint of the stress shaft; the second loading device comprises a second driving mechanism (B01) capable of generating left and right force, a second force applying arm (B02) and a second force sensor (B03) for measuring the left and right force of the second driving mechanism (B01); the second driving mechanism (B01) is fixed on the right upright post of the door type support (3) and is positioned below the supporting platform (1); the right end of the second force application arm (B02) is connected to the output end of the second driving mechanism (B01), and the left end of the second force application arm (B02) is connected with the lower end of the stressed shaft (6) and applies left and right force to the stressed shaft (6);

the third loading device comprises a third driving mechanism (C01) capable of generating vertical force, a fourth driving mechanism (C02) capable of generating forward and backward force, a fifth driving mechanism (C03) capable of generating forward and backward force and a third force applying arm (C04); the third driving mechanism (C01), the fourth driving mechanism (C02) and the fifth driving mechanism (C03) are all fixed on the beam of the door type bracket (3); the upper end face of the third force applying arm (C04) is connected with the output end of a third driving mechanism (C01); the upper end of the third force application arm (C04) is also provided with a cross arm (C05) parallel to the cross beam of the door type bracket (3); the right side of the front end surface of the cross arm (C05) is connected with the output end of the fourth driving mechanism (C02), and the left side of the rear end surface of the cross arm (C05) is connected with the output end of the fifth driving mechanism (C03); the lower end of the third force application arm (C04) is connected with the upper end of the stressed shaft (6) and applies vertical force and rotating force along the axial lead of the stressed shaft (6) to the stressed shaft (6); the third loading device also comprises a third force sensor (C06) used for measuring the vertical force applied to the stress shaft (6) by the third force applying arm (C04) and a torque sensor (C07) used for measuring the rotating force applied to the stress shaft (6) by the third force applying arm (C04) along the axial lead of the stress shaft (6);

the control system sends out control signals to control the output forces of the first driving mechanism (A01), the second driving mechanism (B01) and the third driving mechanism (C01) according to the received signals of the first force sensor (A03), the second force sensor (B03) and the third force sensor (C06); the control system sends out control signals to control the output force of the fourth driving mechanism (C02) and the fifth driving mechanism (C03) according to the received signals of the torque sensor (C07).

2. The six-dimensional force sensor calibration device according to claim 1, wherein: an upper end stress disc (7) and a lower end stress disc (8) are respectively fixed at the upper end and the lower end of the stress shaft (6), and the upper end stress disc (7) and the lower end stress disc (8) are respectively provided with a rotary through groove symmetrically arranged along the midpoint of the stress shaft (6); the rotary through groove comprises an arc through groove (9), and a clockwise straight through groove (10) and an anticlockwise straight through groove (11) which are respectively arranged at the two ends of the arc through groove (9); the clockwise straight through groove (10) is vertical to the anticlockwise straight through groove (11);

the right end of the first force applying arm (A02) is provided with a first hook (A04) which is hung in the rotary through groove of the upper end stress disc (7) and can slide along the rotary through groove of the upper end stress disc (7); the left end of the second force application arm (B02) is provided with a second hook (B04) which is hung in the rotary through groove of the lower end stress disc (8) and can slide along the rotary through groove of the lower end stress disc (8);

when first couple (A04) is located the clockwise straight line of upper end atress dish (7) and leads to groove (10), second couple (B04) is located the clockwise straight line of lower extreme atress dish (8) and leads to groove (10), just rotary platform (4) anticlockwise rotation 90 back, first couple (A04) is located the anticlockwise straight line of upper end atress dish (7) and leads to groove (11) department, and second couple (B04) is located the anticlockwise straight line of lower extreme atress dish (8) and leads to groove (11).

3. The six-dimensional force sensor calibration device according to claim 2, wherein: the upper end of the stress shaft (6) is provided with a positioning pile, and the positioning pile comprises a positioning disc (12), and a clockwise rotation positioning rod (13) and an anticlockwise rotation positioning rod (14) which are connected to the outer edge of the positioning disc (12); the lower end face of the third force applying arm (C04) is connected with the upper end face of the positioning disc (12), and the lower end of the third force applying arm (C04) is also provided with an L-shaped positioning hook (C08); the lower bottom edge of the L-shaped positioning hook (C08) is connected with the lower end surface of the positioning disc (12); the maximum relative rotation angle of the vertical edge of the L-shaped positioning hook (C08) between the clockwise rotation positioning rod (13) and the anticlockwise rotation positioning rod (14) along the outer edge of the positioning disc (12) is 90 degrees; when the first hook (A04) is positioned in the clockwise straight through groove (10) of the upper stress disc (7), the vertical edge of the L-shaped positioning hook (C08) is connected with the clockwise rotating positioning rod (13); when the first hook (A04) is positioned in the anticlockwise straight through groove (11) of the upper end stress disc (7), the vertical edge of the L-shaped positioning hook (C08) is connected with the anticlockwise rotating positioning rod (14).

4. The six-dimensional force sensor calibration device according to claim 3, wherein: the rotary platform (4) is a gear disc; the rotating mechanism also comprises a rotating platform driving motor (15) fixed on the supporting platform (1) and a rotating platform driving gear (16) fixed on an output shaft of the rotating platform driving motor (15); the rotating platform driving gear (16) is meshed and connected with the external teeth of the rotating platform (4); the control system sends out control signals to control the on-off and the steering of a driving motor (15) of the rotating platform.

5. The six-dimensional force sensor calibration device according to claim 4, wherein: the upper end of the rotary platform (4) is provided with a radial clockwise rotating baffle (17) and a radial anticlockwise rotating baffle (18); a limiting plate (19) arranged on a rotating path of the clockwise rotating baffle (17) and the anticlockwise rotating baffle (18) is fixed on the supporting platform (1), and the maximum relative rotating angle of the limiting plate (19) between the clockwise rotating baffle (17) and the anticlockwise rotating baffle (18) is 90 degrees; when the first hook (A04) is positioned in the clockwise straight through groove (10) of the upper stress disc (7), the limiting plate (19) is connected with the clockwise rotating baffle (17); when the first hook (A04) is positioned in the anticlockwise linear through groove (11) of the upper stress disc (7), the limiting plate (19) is connected with the anticlockwise rotating baffle (18).

6. The six-dimensional force sensor calibration device according to claim 5, wherein: a groove-shaped photoelectric switch (20) is arranged at the end part of the limiting plate (19), and partition plates (21) are arranged on the clockwise rotating baffle (17) and the anticlockwise rotating baffle (18); when the rotary platform (4) rotates to the state that the clockwise rotating baffle (17) is connected with the limiting plate (19), the partition plate (21) of the clockwise rotating baffle (17) is inserted into the signal receiving and transmitting groove of the groove-shaped photoelectric switch (20) to interrupt the signal of the signal receiving and transmitting groove; when the rotary platform (4) rotates to the state that the anticlockwise rotating baffle (18) is connected with the limiting plate (19), the partition plate (21) of the anticlockwise rotating baffle (18) is inserted into the signal receiving and transmitting groove of the groove-shaped photoelectric switch (20) to interrupt the signal of the signal receiving and transmitting groove; and after receiving the blocking signal of the signal receiving and transmitting slot, the control system sends a steering signal to a driving motor (15) of the rotating platform.

7. The six-dimensional force sensor calibration device according to any one of claims 2 to 6, wherein: the first drive mechanism (A01), the second drive mechanism (B01), the third drive mechanism (C01), the fourth drive mechanism (C02) and the fifth drive mechanism (C03) are linear screw stepping motors;

the first force applying arm (A02) further comprises a first spring (A05) connected to the left end of the first hook (A04), and the left end of the first spring (A05) is connected with a driving shaft of a first driving mechanism (A01); the first force sensor (A03) is disposed between a first drive mechanism (A01) drive shaft and a first spring (A05);

the second force application arm (B02) further comprises a second spring connected to the right end of the second hook (B04), and the right end of the second spring is connected with a driving shaft of a second driving mechanism (B01); the second force sensor (B03) is arranged between a second drive mechanism (B01) drive shaft and a second spring;

the middle part of the third force applying arm (C04) is provided with a third spring (C09) which is connected with the upper end part and the lower end part of the third force applying arm (C04), and the upper end of the third spring (C09) is connected with the cross arm (C05); the third force sensor (C06) and the torque sensor (C07) are sequentially arranged between the third spring (C09) and the cross arm (C05).

8. The six-dimensional force sensor calibration device according to claim 1, wherein: vertical sliding grooves (22) in the vertical direction and vertical sliding blocks (23) sliding along the vertical sliding grooves (22) are formed in two upright columns of the door type support (3), and positioning bolts are further arranged between the vertical sliding grooves (22) and the vertical sliding blocks (23); the first driving mechanism (A01) is arranged on a vertical sliding block (23) of a left side upright post of the door type support (3), and the second driving mechanism (B01) is arranged on a vertical sliding block (23) of a right side upright post of the door type support (3).

9. The six-dimensional force sensor calibration device according to claim 8, wherein: a horizontal sliding groove (24) along the left-right direction and a horizontal sliding block (25) sliding along the horizontal sliding groove (24) are arranged on a cross beam of the door type support (3), and a positioning bolt is further arranged between the horizontal sliding groove (24) and the horizontal sliding block (25); the third driving mechanism (C01), the fourth driving mechanism (C02) and the fifth driving mechanism (C03) are arranged on the horizontal sliding block (25).

10. A method of six-dimensional force sensor calibration using the six-dimensional force sensor calibration apparatus of claim 7, wherein: comprises the following steps

S1, the control system operates the rotating platform (4) to rotate clockwise until the limiting plate (19) is connected with the clockwise rotating baffle (17), meanwhile, the first hook (A04) is located in the clockwise straight through groove (10) of the upper end stress disc (7), the second hook (B04) is located in the clockwise straight through groove (10) of the lower end stress disc (8), and the vertical edge of the L-shaped positioning hook (C08) is connected with the clockwise rotating positioning rod (13); setting the position as an initial position, setting the right side of the elastic body of the sensor in the initial position state as the positive direction of an x axis, the rear side as the positive direction of a y axis and the upper side as the positive direction of a z axis;

s2, controlling the first driving mechanism (A01) to rotate out, and controlling the second driving mechanism (B01) to rotate in, and applying an x-axis positive force Fx +; the control system receives the pressure value of the first force sensor (A03) and the pressure value of the second force sensor (B03), feedback-controls the first driving mechanism (A01) and the second driving mechanism (B01) to output multiple sets of force values, and keeps the output force values of the first driving mechanism (A01) and the second driving mechanism (B01) the same; recording multiple groups of output force values of a first driving mechanism (A01) and a second driving mechanism (B01) and visual data of the six-dimensional sensor in corresponding states;

s3, controlling the first driving mechanism (A01) to rotate in, and the second driving mechanism (B01) to rotate out, and applying an x-axis negative force Fx-; the control system receives the pressure value of the first force sensor (A03) and the pressure value of the second force sensor (B03), feedback-controls the first driving mechanism (A01) and the second driving mechanism (B01) to output multiple sets of force values, and keeps the output force values of the first driving mechanism (A01) and the second driving mechanism (B01) the same; recording multiple groups of output force values of a first driving mechanism (A01) and a second driving mechanism (B01) and visual data of the six-dimensional sensor in corresponding states;

s4, controlling the first driving mechanism (A01) to rotate out, controlling the second driving mechanism (B01) to rotate out, and applying a positive y-axis torque My +; the control system receives the pressure value of the first force sensor (A03) and the pressure value of the second force sensor (B03), feedback-controls the first driving mechanism (A01) and the second driving mechanism (B01) to output multiple sets of force values, and keeps the output force values of the first driving mechanism (A01) and the second driving mechanism (B01) the same; recording multiple groups of output force values of a first driving mechanism (A01) and a second driving mechanism (B01) and visual data of the six-dimensional sensor in corresponding states;

s5, controlling the first driving mechanism (A01) to rotate in, and the second driving mechanism (B01) to rotate in, and applying a negative y-axis moment My-; the control system receives the pressure value of the first force sensor (A03) and the pressure value of the second force sensor (B03), feedback-controls the first driving mechanism (A01) and the second driving mechanism (B01) to output multiple sets of force values, and keeps the output force values of the first driving mechanism (A01) and the second driving mechanism (B01) the same; recording multiple groups of output force values of a first driving mechanism (A01) and a second driving mechanism (B01) and visual data of the six-dimensional sensor in corresponding states;

s6, controlling the third driving mechanism (C01) to rotate, and applying a z-axis positive force Fz +; the control system receives the pressure value of the third force sensor (C06) and controls the third driving mechanism (C01) to output a plurality of force values in a feedback mode; recording the output force value of the third driving mechanism (C01) and the vision measuring data of the six-dimensional sensor in the corresponding state;

s7, controlling the third driving mechanism (C01) to rotate out, and applying a negative z-axis force Fz-; the control system receives the pressure value of the third force sensor (C06) and controls the third driving mechanism (C01) to output a plurality of force values in a feedback mode; recording the output force value of the third driving mechanism (C01) and the vision measuring data of the six-dimensional sensor in the corresponding state;

s8, controlling the fourth driving mechanism (C02) to rotate out, controlling the fifth driving mechanism (C03) to rotate out, and applying a z-axis positive torque Mz +; the control system controls the fourth driving mechanism (C02) and the fifth driving mechanism (C03) to output a plurality of force values in a feedback mode by receiving the measured value of the torque sensor (C07); recording multiple groups of output force values of the fourth driving mechanism (C02) and the fifth driving mechanism (C03) and visual data of the six-dimensional sensor in corresponding states;

s9, operating the rotating platform (4) by the control system to rotate 90 degrees anticlockwise until the limiting plate (19) is connected with the anticlockwise rotating baffle (18), meanwhile, the first hook (A04) is positioned in the anticlockwise linear through groove (11) of the upper end stress disc (7), the second hook (B04) is positioned in the anticlockwise linear through groove (11) of the lower end stress disc (8), and the vertical edge of the L-shaped positioning hook (C08) is connected with the anticlockwise rotating positioning rod (14);

s10, controlling the fourth driving mechanism (C02) to rotate, and controlling the fifth driving mechanism (C03) to rotate, and applying a negative z-axis moment Mz-; the control system controls the fourth driving mechanism (C02) and the fifth driving mechanism (C03) to output a plurality of force values in a feedback mode by receiving the measured value of the torque sensor (C07); recording multiple groups of output force values of the fourth driving mechanism (C02) and the fifth driving mechanism (C03) and visual data of the six-dimensional sensor in corresponding states;

s11, controlling the first driving mechanism (A01) to rotate out, and the second driving mechanism (B01) to rotate in, and applying a negative force Fy & lt- & gt on the y axis; the control system receives the pressure value of the first force sensor (A03) and the pressure value of the second force sensor (B03), feedback-controls the first driving mechanism (A01) and the second driving mechanism (B01) to output multiple sets of force values, and keeps the output force values of the first driving mechanism (A01) and the second driving mechanism (B01) the same; recording multiple groups of output force values of a first driving mechanism (A01) and a second driving mechanism (B01) and visual data of the six-dimensional sensor in corresponding states;

s12, controlling the first driving mechanism (A01) to rotate in, and the second driving mechanism (B01) to rotate out, and applying a positive force Fy + on the y axis; the control system receives the pressure value of the first force sensor (A03) and the pressure value of the second force sensor (B03), feedback-controls the first driving mechanism (A01) and the second driving mechanism (B01) to output multiple sets of force values, and keeps the output force values of the first driving mechanism (A01) and the second driving mechanism (B01) the same; recording multiple groups of output force values of a first driving mechanism (A01) and a second driving mechanism (B01) and visual data of the six-dimensional sensor in corresponding states;

s13, controlling the first driving mechanism (A01) to rotate out, controlling the second driving mechanism (B01) to rotate out, and applying an x-axis positive torque Mx +; the control system receives the pressure value of the first force sensor (A03) and the pressure value of the second force sensor (B03), feedback-controls the first driving mechanism (A01) and the second driving mechanism (B01) to output multiple sets of force values, and keeps the output force values of the first driving mechanism (A01) and the second driving mechanism (B01) the same; recording multiple groups of output force values of a first driving mechanism (A01) and a second driving mechanism (B01) and visual data of the six-dimensional sensor in corresponding states;

s14, controlling the first driving mechanism (A01) to rotate, controlling the second driving mechanism (B01) to rotate, and applying an x-axis negative moment Mx-; the control system receives the pressure value of the first force sensor (A03) and the pressure value of the second force sensor (B03), feedback-controls the first driving mechanism (A01) and the second driving mechanism (B01) to output multiple sets of force values, and keeps the output force values of the first driving mechanism (A01) and the second driving mechanism (B01) the same; recording multiple groups of output force values of a first driving mechanism (A01) and a second driving mechanism (B01) and visual data of the six-dimensional sensor in corresponding states;

and S15, performing operation processing on the data acquired in the step and calibrating the accuracy of the six-dimensional force sensor.

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