CN109522931A - Judge the method and its system of the folded figure aggregation of defect - Google Patents
Judge the method and its system of the folded figure aggregation of defect Download PDFInfo
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- CN109522931A CN109522931A CN201811212402.2A CN201811212402A CN109522931A CN 109522931 A CN109522931 A CN 109522931A CN 201811212402 A CN201811212402 A CN 201811212402A CN 109522931 A CN109522931 A CN 109522931A
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Abstract
The application discloses the method and its system of a kind of folded figure aggregation of judgement defect, the defects of the folded figure of defect group is filtered out by the method for automation, judge that defect folds the defect cluster for being greater than the first preset value in figure with the presence or absence of defect counts, to judge the folded figure of defect with the presence or absence of aggregation, whether assemble relative to the folded figure of artificial observation defect, the application has found that the speed of the folded figure clustering phenomena of defect is faster and more acurrate.
Description
Technical field
This application involves display fabrication techniques field more particularly to a kind of method that the folded figure of judgement defect is assembled and its it is
System.
Background technique
In display production process, some defects can be generated and are concentrated in the fixed area of product, therefore by scarce
The trend of defect aggregation can be found by being trapped into the folded figure of row, when finding that certain defect has aggregation tendency, it is such it is abnormal need it is timely
It solves, the product that not so will lead to subsequent production continues to occur same abnormal so as to cause larger range of product defects.Mesh
Before, it is main that the folded result schemed and observe the folded figure of defect is carried out to determine whether depositing to defect present on product manually by personnel
In defect clustering phenomena, however since the fault of personnel will lead to anomaly problem not in time.
Therefore, it is necessary to provide a kind of technical solution and fold figure to solve the prior art due to being unable to automatization judgement defect and be
No existing defects clustering phenomena cause anomaly not in time the problem of.
Summary of the invention
A kind of method for being designed to provide folded figure aggregation of judgement defect of the application, automatically judges defect to realize
Folded figure aggregation, so that rapidly discovery defect folds figure clustering phenomena.
To achieve the above object, technical solution is as follows.
A method of judging the folded figure aggregation of defect, the method for the folded figure aggregation of judgement defect includes the following steps:
The defects of the folded figure of defect group is filtered out, it is the defect that there will be the batch products of identical defect that the defect, which folds figure,
It carries out what folded figure obtained, there is at least two identical defects in the defect cluster；
If the defect is folded in figure there are the defect cluster that the number of the identical defect is greater than the first preset value, institute is judged
Stating defect and folding figure is aggregation；
If the defect folds the defect cluster in figure there is no the number of the identical defect greater than first preset value,
Judging that the defect folds figure is not assemble.
It is described to filter out the defects of the folded figure of defect group including such as in the method that above-mentioned judgement defect folds figure aggregation
Lower step:
If the defect folds the distance between any two defect in figure less than the second preset value, any two
Defect belongs to the same defect cluster.
In the method for the folded figure aggregation of above-mentioned judgement defect, the method for the folded figure aggregation of judgement defect further includes that retrospect lacks
The source of folded figure aggregation is fallen into, the source of the folded figure aggregation of retrospect defect includes the following steps:
The identification code of the batch products for being judged as that the folded figure aggregation of defect is corresponding is identified, to trace described lack
Fall into the process equipment of the corresponding batch products of folded figure aggregation, the defect information of batch products described in the identification code recording, institute
Stating process equipment includes single path board and reaction chamber.
In the method that the folded figure of above-mentioned judgement defect is assembled, if the defect is folded to scheme adding for the corresponding batch products of aggregation
Construction equipment is single path board, then folds from the defect and extract lacking for the single path board batch products produced in figure
Folded figure is fallen into and carried out, the warning information that the single path board causes the folded figure aggregation of defect is simultaneously emitted by；
If the process equipment of the corresponding batch products of the folded figure aggregation of the defect is reaction chamber, from the folded figure of the defect
In extract the defect of reaction chamber batch products produced and carry out folded figure, and issue the reaction chamber and cause defect folded
Scheme the warning information of aggregation.
In the method for the folded figure aggregation of above-mentioned judgement defect, the defect information includes first kind defect information and the second class
Defect information, the defect of the first kind defect information fold the identification that figure needs the batch products described at least three
Code is identified that obtain, the defect of the second class defect information is folded figure and needed to described at least one batch products
Identification code is identified to obtain.
The system that the further object of the application is to provide a kind of folded figure aggregation of judgement defect.
To achieve the above object, technical solution is as follows.
A kind of system of the folded figure aggregation of judgement defect, the system of the folded figure aggregation of judgement defect include:
First screening module, for filtering out the defects of the folded figure of defect group, it is will have identical lack that the defect, which folds figure,
The defect of sunken batch products carries out what folded figure obtained, there is at least two identical defects in the defect cluster；
First judgment module is greater than first with the presence or absence of the number of the identical defect for judging that the defect is folded in figure
The defect cluster of preset value,
If the defect is folded in figure there are the defect cluster that the number of the identical defect is greater than the first preset value, institute is judged
Stating defect and folding figure is aggregation；
If the defect folds the defect cluster in figure there is no the number of the identical defect greater than first preset value,
Judging that the defect folds figure is not assemble.
In the system of the folded figure aggregation of above-mentioned judgement defect, first screening module includes:
First computing unit, for calculating the distance between any two defect in the folded figure of the defect, if described lack
The distance between any two defect in folded figure is fallen into less than the second preset value, then any two defect belongs to same lack
Fall into group.
In the system of the folded figure aggregation of above-mentioned judgement defect, the system of the folded figure aggregation of judgement defect further include:
Trace back block, for tracing the source of the folded figure aggregation of defect, the trace back block includes:
First recognition unit is carried out for the identification code to the batch products for being judged as that the folded figure aggregation of defect is corresponding
Identification, to trace the process equipment of the corresponding batch products of the folded figure aggregation of the defect, batch described in the identification code recording
The defect information of product, the process equipment include single path board and reaction chamber.
In the system of the folded figure aggregation of above-mentioned judgement defect, the trace back block includes:
First response unit, if the process equipment for responding the corresponding batch products of the folded figure aggregation of the defect is single
When the board of path, then defect and the progress that the single path board batch products produced are extracted in figure are folded from the defect
Folded figure is simultaneously emitted by the warning information that the single path board causes the folded figure aggregation of defect；
Second response unit, if the process equipment for responding the corresponding batch products of the folded figure aggregation of the defect is anti-
When answering room, is then folded from the defect and extract the defect of reaction chamber batch products produced in figure and carry out folded figure, and
Issue the warning information that the reaction chamber causes the folded figure aggregation of defect.
In the system of the folded figure aggregation of above-mentioned judgement defect, the defect information includes first kind defect information and the second class
Defect information, the defect of the first kind defect information fold the identification that figure needs the batch products described at least three
Code is identified that obtain, the defect of the second class defect information is folded figure and needed to described at least one batch products
Identification code is identified to obtain.
The utility model has the advantages that the application proposes the method and its system of a kind of folded figure aggregation of judgement defect, pass through the side of automation
Method filters out the defects of the folded figure of defect group, judges that defect folds the defect for being greater than the first preset value in figure with the presence or absence of defect counts
Group, to judge whether the folded figure of defect with the presence or absence of aggregation, is assembled, the application has found defect relative to the folded figure of artificial observation defect
The speed of folded figure clustering phenomena is faster and more acurrate.
Detailed description of the invention
Fig. 1 is the method for the folded figure aggregation of judgement defect of the application first embodiment；
Fig. 2 is the method for the folded figure aggregation of judgement defect of the application second embodiment；
Fig. 3 is the system of the folded figure aggregation of judgement defect of the application first embodiment.
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present application, technical solutions in the embodiments of the present application carries out clear, complete
Site preparation description.Obviously, described embodiments are only a part of embodiments of the present application, instead of all the embodiments.It is based on
Embodiment in the application, those skilled in the art's every other implementation obtained without creative efforts
Example, shall fall in the protection scope of this application.
As shown in Figure 1, it is the method for the folded figure aggregation of judgement defect of one embodiment of the application, include the following steps:
S10: the defects of the folded figure of defect group is filtered out, it is the defect that there will be the batch products of identical defect that defect, which folds figure,
It carries out what folded figure obtained, there is at least two identical defects in defect cluster；
In the present embodiment, batch products are to have defective thin film transistor base plate, and in other embodiments, batch produces
Product can be glass substrate, the defective color membrane substrates of tool or the defective liquid crystal cell of tool etc. with defect.Pass through imaging
Equipment obtains the defect image in batch products, which includes the location information of defect, then defect image is made to pass through figure
As processing equipment processing, the defect image with identical defect batch products is carried out folded figure to be lacked by such as computer etc.
Folded figure is fallen into, defect, which folds figure, can react location distribution information of the identical defect in batch products, the defects of folded figure of defect number
When measuring enough, folding in defect will form multiple defect clusters in figure, and the defect cluster containing multiple defects reacts identical defect aggregation
It is larger in the probability of certain area, the defect cluster containing fewer defect react identical defect be gathered in the probability of certain area compared with
It is small.
S11: if defect is folded there are the defect cluster that the number of the identical defect is greater than the first preset value in figure, judgement is lacked
Falling into folded figure is aggregation；
If defect is folded in figure, there is no the defect clusters that the number of identical defect is greater than the first preset value, judge the folded figure of defect
Not assemble.
By comparing the defect number of the defect cluster containing most defect counts and the size of the first preset value, to judge defect
Whether in certain region clustering, to judge the phenomenon that folded figure of defect is with the presence or absence of aggregation, it is greater than if there is defect counts
The defect cluster of first preset value, then defect fold figure in existing defects certain area assemble the phenomenon that.The size of first preset value
It can be adjusted according to the number of batch products, the application does not do specific restriction.
Whether above scheme filters out the defects of the folded figure of defect group by the method automated, judge that defect is folded and deposit in figure
It is greater than the defect cluster of the first preset value in defect counts, to judge the folded figure of defect with the presence or absence of aggregation, relative to artificial observation
Whether the folded figure of defect is assembled, and the application has found that the speed of the folded figure clustering phenomena of defect is faster and more acurrate.
As shown in Fig. 2, it is the method for the folded figure aggregation of judgement defect of the application second embodiment, include the following steps:
S20: output batch products.
As described in the first embodiment, batch products are to have defective thin film transistor base plate, by transmitting device with
Batch is that unit output has defective thin film transistor base plate.Defect source on thin film transistor base plate is brilliant in preparing film
Each processing procedure of body pipe substrate, the distinct of defect, and the probability that different defects occurs on thin film transistor (TFT) is also different.
The present embodiment is by output batch products to prepare for the subsequent folded figure of defect that obtains.
S21: the identification code of the batch products of output is screened.
When batch products export, there is identification code, the defect of the identification code recording faulty goods on each faulty goods
Information screens identification code by using scanning device, the product screening with identical defect is come out.It is general for occurring
The lesser first kind defect of rate, such as have foreign matter on grid tunic, have foreign matter etc. in semiconductor tunic, it needs at least three batch
The identification code of secondary product, which is identified, can just obtain the folded figure of defect, the second class defect biggish for probability of occurrence, such as be coated with
Small foreign matter, semiconductor material residual etc. before technique, needing to identify the identification code of at least one batch products just can obtain
The folded figure of defect.
S22: carrying out folded figure to the defect of the batch products with same identification code, obtains the folded figure of defect.
Specifically, after the product screening with identical defect comes out, the product of identical defect is obtained by imaging device
The image of defect, the image include the location information of defect, then make defect image by image processing device processes, such as calculate
Defect image with identical defect batch products is carried out folded figure to obtain the folded figure of defect by machine etc., and defect, which folds figure, to react
Location distribution information of the identical defect in batch products is folded in figure when the defects of folded figure of defect quantity is enough in defect
Will form multiple defect clusters, the defect cluster containing multiple defects react identical defect be gathered in certain area probability it is larger, contain
Have the defect cluster of fewer defect react identical defect be gathered in certain area probability it is smaller.
S23: filtering out the defects of the folded figure of defect group, is less than if defect folds the distance between any two defect in figure
Second preset value, then any two defect belongs to the same defect cluster.
Identical defect on different thin film transistor base plates is located at different positions, by that will be in the identical of different location
Defect carries out folded figure to obtain the folded figure of defect, then calculates the distance for any two defect that defect is folded in figure, to define any two
Whether a defect belongs to same defect cluster.Due to general defect size in the micron-scale, i.e. the size of defect is smaller, can recognize
It is point defect for such defect, the size of the second preset value can be set to 300 microns to judge whether two defects belong to together
One defect cluster, in other embodiments, the second preset value can be adjusted according to the actual situation, for larger-size line
Defect or planar defect can directly be judged as aggregation.
S24: if defect is folded in figure there are the defect cluster that the number of identical defect is greater than the first preset value, judge that defect is folded
Figure is aggregation；
It is greater than in figure there is no the number of identical defect in the defect cluster of first preset value if defect is folded, judgement lacks
Falling into folded figure is not assemble.
S25: the source of the folded figure aggregation of retrospect defect, comprising:
The identification code for being judged as the corresponding batch products of the folded figure aggregation of defect is identified, it is poly- to trace the folded figure of defect
The process equipment of the corresponding batch products of collection, the defect information of identification code recording batch products, process equipment includes single path
Board and reaction chamber；
The identification code for the batch products for being determined as defect aggregation is identified, identification then can be traced according to identification code
The production and processing information of the corresponding product of code, in addition, the defect information reacted according to identification code, which can trace back to, causes defect
Process equipment.Process equipment includes single path board and reaction chamber, and single path board includes physical deposition device and wet corrosion again
Engraving device etc., reaction chamber include the reaction chamber for chemically reacting chamber and dry ecthing, that is, can be with by the identification code of faulty goods
The production and processing information for transferring faulty goods can track the processing for causing defect in conjunction with the defect information that identification code reflects
Equipment.
Then, if the process equipment of batch products corresponding to the folded figure aggregation of the defect is single path board, from institute
It states and extracts the defect of the single path board batch products produced in the folded figure of defect and carry out folded figure, be simultaneously emitted by described
Single path board causes the warning information of the folded figure aggregation of defect；
If the process equipment of the corresponding batch products of the folded figure aggregation of the defect is reaction chamber, from the folded figure of the defect
In extract the defect of reaction chamber batch products produced and carry out folded figure, and issue the reaction chamber and cause defect folded
Scheme the warning information of aggregation.
After tracking the process equipment for causing defect, defect caused by extracting same process equipment in figure is folded simultaneously from defect
Folded figure is carried out the process equipment is simultaneously emitted by and cause the folded figure aggregation of defect as defect historical information caused by the process equipment
Warning information, by cause defect fold figure process equipment overhaul, production can be further resulted in avoid process equipment
Product defect.
Above-described embodiment judges whether the folded figure of defect is assembled by the method automated, then to the original of the folded figure aggregation of defect
Because being traced, be conducive to solve to the reason of causing the folded figure of defect to assemble.
As shown in figure 3, the application also provides a kind of system 30 of folded figure aggregation of judgement defect, comprising:
First screening module 31, for filtering out the defects of the folded figure of defect group, it is will have identical defect that defect, which folds figure,
The defects of batch products carry out what folded figure obtained, have at least two identical defects in defect cluster；
First judgment module 32 is greater than the first preset value with the presence or absence of the number of identical defect for judging that defect is folded in figure
Defect cluster,
If defect is folded in figure there are the defect cluster that the number of identical defect is greater than the first preset value, judge that defect folds figure and is
Aggregation；
If defect is folded in figure there is no the defect cluster that the number of identical defect is greater than the first preset value, the defect is judged
Folded figure is not assemble.
Further, the first screening module includes:
First computing unit, for calculating the distance between any two defect in the folded figure of defect, if defect is folded in figure
The distance between any two defect less than the second preset value, then any two defect belongs to the same defect cluster.
Further, judge the system of the folded figure aggregation of defect further include:
Trace back block, for tracing the source of the folded figure aggregation of defect, trace back block includes:
First recognition unit, for knowing to the identification code for being judged as that the folded figure of defect assembles corresponding batch products
Not, to trace the process equipment of the corresponding batch products of the folded figure aggregation of defect, the defect information of identification code recording batch products,
Process equipment includes single path board and reaction chamber.
Further, trace back block includes:
First response unit, if the process equipment for responding the corresponding batch products of the folded figure aggregation of defect is single path
When board, is then folded from defect and extract the defect of single path board batch products produced in figure and carry out folded figure, sent out simultaneously
Single path board causes the warning information of the folded figure aggregation of defect out；
Second response unit, if the process equipment for responding the corresponding batch products of the folded figure aggregation of defect is reaction chamber
When, then it is folded from defect and extracts the defect of reaction chamber batch products produced in figure and carry out folded figure, and issued reaction chamber and make
At the warning information of the folded figure aggregation of defect.
Further, defect information includes first kind defect information and the second class defect information, first kind defect information
Defect folds figure and the identification code at least three batch products is needed to be identified to obtain, the folded figure of the defect of the second class defect information
It needs to identify to obtain the identification code of at least one batch products.
The system of the folded figure aggregation of the judgement defect of the application filters out the defects of folded figure of defect by the method automated
Group judges that defect folds the defect cluster for being greater than the first preset value in figure with the presence or absence of defect counts, to whether judge the folded figure of defect
Whether there are aggregations, assemble relative to the folded figure of artificial observation defect, the application has found that defect folds the speed of figure clustering phenomena faster
And it is more acurrate.In addition, process equipment caused by folding figure defect by trace back block is traced and is issued associated alarm information,
Be conducive to solve to the reason of causing the folded figure of defect to assemble.
It should be understood that the system of the folded figure aggregation of judgement defect provided by the above embodiment is according to above-mentioned each function mould
The division of block is illustrated, and in practical application, be can according to need and is completed by different functional modules above-mentioned function distribution,
Judge that the system of the folded figure aggregation of defect can be divided into different functional modules, to complete all or part of function of foregoing description
Energy.
Technical solution of the present invention that the above embodiments are only used to help understand and its core concept；This field
Those of ordinary skill is it is understood that it is still possible to modify the technical solutions described in the foregoing embodiments or right
Part of technical characteristic is equivalently replaced；And these are modified or replaceed, it does not separate the essence of the corresponding technical solution
The range of the technical solution of various embodiments of the present invention.
Claims (10)
1. a kind of method of the folded figure aggregation of judgement defect, which is characterized in that the method for the folded figure aggregation of judgement defect includes such as
Lower step:
The defects of the folded figure of defect group is filtered out, the defect is folded the defect that figure is the batch products that there will be identical defect and carried out
What folded figure obtained, there are at least two identical defects in the defect cluster；
If the defect is folded in figure, there are the defect clusters that the number of the identical defect is greater than the first preset value, judge described lack
Falling into folded figure is aggregation；
If the defect is folded in figure there is no the defect cluster that the number of the identical defect is greater than first preset value, judge
It is not assemble that the defect, which folds figure,.
2. the method for the folded figure aggregation of judgement defect according to claim 1, which is characterized in that described to filter out the defect
The defects of folded figure group includes the following steps:
If the defect folds the distance between any two defect in figure less than the second preset value, any two defect
Belong to the same defect cluster.
3. the method for the folded figure aggregation of judgement defect according to claim 1, which is characterized in that the folded figure of the judgement defect is poly-
The method of collection further includes tracing the source of the folded figure aggregation of defect, and the source of the folded figure aggregation of retrospect defect includes the following steps:
The identification code of the batch products for being judged as that the folded figure aggregation of defect is corresponding is identified, it is folded to trace the defect
Figure assembles the process equipment of corresponding batch products, and the defect information of batch products described in the identification code recording is described to add
Construction equipment includes single path board and reaction chamber.
4. the method for the folded figure aggregation of judgement defect according to claim 3, which is characterized in that if the folded figure aggregation of the defect
The process equipment of corresponding batch products is single path board, then folds in figure from the defect and extract the single path board
The defect of batch products produced simultaneously carries out folded figure, is simultaneously emitted by the alarm that the single path board causes the folded figure aggregation of defect
Information；
If the process equipment of the corresponding batch products of the folded figure aggregation of the defect is reaction chamber, folds in figure and mention from the defect
It takes out the defect of reaction chamber batch products produced and carries out folded figure, and issue the reaction chamber and cause the folded figure of defect poly-
The warning information of collection.
5. the method for the folded figure aggregation of judgement defect according to claim 3, which is characterized in that the defect information includes the
A kind of defect information and the second class defect information, the defect of the first kind defect information are folded figure and are needed at least three institute
The identification code for stating batch products is identified that obtain, the folded figure of the defect of the second class defect information is needed to extremely
The identification code of few batch products is identified to obtain.
6. a kind of system that judgement defect folds figure aggregation, which is characterized in that described to judge that the folded system for scheming aggregation of defect includes:
First screening module, for filtering out the defects of the folded figure of defect group, the defect, which folds figure, will have identical defect
The defect of batch products carries out what folded figure obtained, there is at least two identical defects in the defect cluster；
First judgment module whether there is the number of the identical defect than the first preset value for judging that the defect is folded in figure
Big defect cluster,
If the defect is folded in figure, there are the defect clusters that the number of the identical defect is greater than the first preset value, judge described lack
Falling into folded figure is aggregation；
If the defect is folded in figure there is no the defect cluster that the number of the identical defect is greater than first preset value, judge
It is not assemble that the defect, which folds figure,.
7. the system of the folded figure aggregation of judgement defect according to claim 6, which is characterized in that the first screening module packet
It includes:
First computing unit, for calculating the distance between any two defect in the folded figure of the defect, if the defect is folded
The distance between any two defect in figure is less than the second preset value, then any two defect belongs to the same defect
Group.
8. the system of the folded figure aggregation of judgement defect according to claim 6, which is characterized in that the folded figure of the judgement defect is poly-
The system of collection further include:
Trace back block, for tracing the source of the folded figure aggregation of defect, the trace back block includes:
First recognition unit is known for the identification code to the batch products for being judged as that the folded figure aggregation of defect is corresponding
Not, to trace the process equipment of the corresponding batch products of the folded figure aggregation of the defect, batch described in the identification code recording is produced
The defect information of product, the process equipment include single path board and reaction chamber.
9. the system of the folded figure aggregation of judgement defect according to claim 8, which is characterized in that the trace back block includes:
First response unit, if the process equipment for responding the corresponding batch products of the folded figure aggregation of the defect is single path
When board, is then folded from the defect and extract the defect of the single path board batch products produced in figure and folded
Figure is simultaneously emitted by the warning information that the single path board causes the folded figure aggregation of defect；
Second response unit, if the process equipment for responding the corresponding batch products of the folded figure aggregation of the defect is reaction chamber
When, then it is folded from the defect and extracts the defect of reaction chamber batch products produced in figure and carry out folded figure, and issued
The reaction chamber causes the warning information of the folded figure aggregation of defect.
10. the system of the folded figure aggregation of judgement defect according to claim 8, which is characterized in that the defect information includes
First kind defect information and the second class defect information, the defect of the first kind defect information are folded figure and are needed at least three
The identification code of the batch products is identified that obtain, the defect of the second class defect information is folded to scheme needs pair
The identification code of at least one batch products is identified to obtain.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
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| CN201811212402.2A CN109522931A (en) | 2018-10-18 | 2018-10-18 | Judge the method and its system of the folded figure aggregation of defect |
| PCT/CN2018/120979 WO2020077784A1 (en) | 2018-10-18 | 2018-12-13 | Method and system for determining defect aggregation in image overlay |
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| CN201811212402.2A CN109522931A (en) | 2018-10-18 | 2018-10-18 | Judge the method and its system of the folded figure aggregation of defect |
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| CN111403309A (en) * | 2020-03-30 | 2020-07-10 | 上海华力集成电路制造有限公司 | Wafer aggregation-like defect detection method and detection system thereof |
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| US20010016061A1 (en) * | 2000-02-15 | 2001-08-23 | Atsushi Shimoda | Method for analyzing circuit pattern defects and a system thereof |
| CN106067427A (en) * | 2016-05-25 | 2016-11-02 | 上海华力微电子有限公司 | Partial exposure exception defect automatic testing method |
| CN107767024A (en) * | 2017-09-20 | 2018-03-06 | 彩虹集团（邵阳）特种玻璃有限公司 | One kind is used for cover-plate glass product of production line quality real-time monitoring system and method |
| CN107941812A (en) * | 2017-12-20 | 2018-04-20 | 联想(北京)有限公司 | Information processing method and electronic equipment |
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| CN110111265A (en) * | 2019-04-04 | 2019-08-09 | 深圳市华星光电技术有限公司 | The bearing calibration of superposed graph and the means for correcting of superposed graph |
| CN110111265B (en) * | 2019-04-04 | 2021-08-06 | Tcl华星光电技术有限公司 | Method and apparatus for correcting overlay pattern |
| CN111403309A (en) * | 2020-03-30 | 2020-07-10 | 上海华力集成电路制造有限公司 | Wafer aggregation-like defect detection method and detection system thereof |
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