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CN109521064B - Room temperature NO2 sensor based on WO3 hollow sphere and preparation method thereof - Google Patents

Room temperature NO2 sensor based on WO3 hollow sphere and preparation method thereof Download PDF

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CN109521064B
CN109521064B CN201910014213.2A CN201910014213A CN109521064B CN 109521064 B CN109521064 B CN 109521064B CN 201910014213 A CN201910014213 A CN 201910014213A CN 109521064 B CN109521064 B CN 109521064B
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李秋霖
王振宇
胡梦晴
张鑫业
岳前进
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Dalian University of Technology
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Abstract

一种基于WO3空心球的室温NO2气体传感器及其制备方法,属于气体传感器技术领域。该传感器为旁热式结构,由带有铂线和金电极的氧化铝陶瓷管衬底、涂覆在陶瓷管外表面和金电极上的WO3空心球和置于陶瓷管内的镍铬合金加热丝组成;镍铬合金加热丝通以直流电来提供传感器的工作温度,通过测量不同气氛中两条金电极间的直流电阻阻值实现测量NO2浓度的功能。本发明制备方法简单,利用尺寸均一并且为中空结构的WO3对NO2气体进行检测,具有较高的灵敏度、较低的工作温度、较低的检测下限,在环境监测方面具有良好的应用前景。

Figure 201910014213

A room temperature NO 2 gas sensor based on WO 3 hollow spheres and a preparation method thereof belong to the technical field of gas sensors. The sensor is of a side-heated structure, heated by an alumina ceramic tube substrate with platinum wires and gold electrodes, WO 3 hollow spheres coated on the outer surface of the ceramic tube and on the gold electrodes, and a nickel-chromium alloy placed in the ceramic tube Wire composition; the nickel-chromium alloy heating wire provides the working temperature of the sensor with direct current, and the function of measuring the concentration of NO 2 is realized by measuring the direct current resistance value between the two gold electrodes in different atmospheres. The preparation method of the invention is simple, the NO 2 gas is detected by using WO 3 with a uniform size and a hollow structure, and the invention has higher sensitivity, lower working temperature and lower detection limit, and has a good application prospect in environmental monitoring. .

Figure 201910014213

Description

Room temperature NO2 sensor based on WO3 hollow sphere and preparation method thereof
Technical Field
The invention belongs to the field of gas sensors, and relates to a gas sensor based on WO3Room temperature NO of hollow sphere2A sensor and a method for manufacturing the same.
Background
With the advance of industrialization, a large amount of fossil fuel is consumed, and a large amount of nitrogen dioxide (NO)2) The gas is then also discharged into the air. NO2The harm is huge, which not only can cause photochemical smog, acid rain and other environmental problems, but also can damage the health of human beings. Thus to NO2It becomes necessary to perform effective monitoring so as to control the emission thereof. Gas sensor in NO in comparison to other kinds of methods2The measurement has many unique advantages, such as low cost, rapidness, real-time performance, convenience and the like.
Currently NO2The sensitive material of the gas sensor is Si, organic matter, semiconductor oxide, etc. Based on semiconductor oxidationNO of substance2The sensor has the characteristics of good stability, good selectivity, high sensitivity and the like, so the sensor is widely concerned. Tungsten oxide (WO) in contrast to other metal semiconductor oxides3) Because the valence state of the tungsten ion is variable, the oxygen content and oxygen defects of the tungsten ion are changed along with the change of environmental factors, so that the tungsten ion has NO2、H2S、 SO2、CO、NH3High sensitivity to gases such as ethanol and acetone, especially to NO2Has excellent response characteristics and is ideal NO2A sensitive material. However, WO3Materials in detecting NO2The problems of higher working temperature, poorer selectivity, higher detection limit and the like exist in the gas. Based on the above, the invention develops a method which works at room temperature and can detect low-concentration NO2WO3A sensor.
Disclosure of Invention
The invention provides a method based on WO3Room temperature NO of hollow sphere2The prepared gas sensor has the characteristics of higher sensitivity, lower detection lower limit, better selectivity and the like, and improves the application of the gas sensor under the room temperature condition.
In order to achieve the purpose, the invention adopts the technical scheme that:
based on WO3Room temperature NO of hollow sphere2Sensor, said room temperature NO2The sensor is indirectly heated, and comprises a ceramic tube substrate with a platinum wire and a gold electrode, and WO coated on the outer surface of the alumina ceramic tube and the gold electrode3The hollow ball and a nickel-chromium alloy heating wire arranged in the ceramic tube; the working temperature of the sensor is provided by introducing direct current to the nichrome heating wire, and the NO is measured by measuring the resistance value of direct current resistance between two gold electrodes in different atmospheres2The function of the concentration. Wherein, said WO3The diameter of the hollow sphere is 2-5 mu m.
Based on WO3Room temperature NO of hollow sphere2The preparation method of the sensor comprises the following steps:
first step, preparation of WO3Hollow ball
(1) Dissolving sodium tungstate in deionized water, performing ultrasonic treatment for 10min to obtain a uniform solution, then adding sodium oxalate, stirring for 10min, dropwise adding 6M hydrochloric acid to adjust the pH value to 0.2-3.0, and then continuing stirring for 10 min; 0.40-0.60 g of sodium tungstate and 0.10-0.20 g of sodium oxalate are correspondingly added into every 25-35 ml of deionized water.
(2) Transferring the solution into a hydrothermal kettle, and then putting the hydrothermal kettle into an oven, wherein the oven parameters are set to be 150-180 ℃ for 10-24 hours;
(3) after the reaction is finished, alternately centrifuging and washing the product by using deionized water and ethanol, and drying the obtained product in an oven at the drying temperature of 40-80 ℃ for 8-12 h; then placing the mixture at 400-600 ℃ for calcining for 2-3 h to obtain WO3Materials, WO3The diameter of the hollow sphere is 2-5 mu m.
Secondly, preparing room temperature NO by adopting an indirectly heated structure2Sensor with a sensor element
(1) The WO prepared in the first step3The mass ratio of the material to ethanol is 0.2-0.4: 1, uniformly mixing to form slurry; uniformly coating the slurry on the surface of an alumina ceramic tube with a platinum wire and a gold electrode to ensure that the alumina ceramic tube completely covers the gold electrode; and a platinum wire is led out of the gold electrode;
(2) will coat with WO3Sintering the alumina ceramic tube of the hollow ball for 2-5 hours at 300-600 ℃, then enabling a nickel-cadmium heating coil to penetrate through the interior of the alumina ceramic tube, and supplying direct current to provide working temperature; welding an alumina ceramic tube on the universal indirectly heated hexagonal base through a platinum wire;
(3) finally, aging the sensor for 5-7 days in an air environment at 50-150 ℃ to obtain WO3Radical NO2A gas sensor.
Then, the gas-sensitive performance test is carried out, the test condition is room temperature, and nitrogen dioxide (NO) is tested2) The gas concentration is from 25ppb to 1000 ppb.
The invention has the beneficial effects that:
(1) the invention adopts WO synthesized by a one-step hydrothermal method3The hollow spheres have relatively uniform size distribution,simple preparation method for developing high-performance NO2Gas sensors provide an effective material.
(2) The invention uses WO of uniform size3Hollow sphere for NO2The gas has higher sensitivity.
(3) The developed sensor has lower working temperature and can be used at room temperature; the detection lower limit is lower, and can reach 25 ppb; has better stability and reliability.
(4) WO made by the present invention3Radical NO2The gas sensor has simple manufacturing process and low cost, and is suitable for industrial mass production. Has good application prospect in the aspect of environment detection.
Drawings
FIG. 1 shows WO prepared in example 3 of the present invention3SEM (a) and (b) for hollow spheres.
FIG. 2 shows WO of example 3 of the present invention at room temperature3Radical NO2Gas sensor sensitivity and NO2Graph between concentrations.
Detailed Description
The present invention will be described in further detail with reference to examples, but the present invention is not limited thereto.
Example 1
1. Firstly, dissolving 0.40g of sodium tungstate in 25ml of deionized water, carrying out ultrasonic treatment for 10min to obtain a uniform solution, then adding 0.20g of sodium oxalate, stirring for 10min, then dropping 6M hydrochloric acid to adjust the pH value to 0.2, and then continuing to stir for 10 min;
2. transferring the solution into a 50ml hydrothermal kettle, and then putting the hydrothermal kettle into an oven, wherein the oven parameters are set to be 150 ℃ and 10 hours;
3. after the reaction is finished, the product is alternately centrifugally washed by deionized water and ethanol, and the obtained product is dried in an oven and dried for 12 hours at the temperature of 60 ℃. Then calcining at 600 ℃ for 3h to obtain WO3A material.
4. 0.4mg of the prepared material was mixed with 1mg of absolute ethanol to form a slurry. And dipping a proper amount of slurry by using a brush, and coating the slurry on the outer surface of a commercial ceramic tube to completely cover the gold electrode on the outer surface.
5. The coated ceramic tube was sintered at 300 ℃ for 3h, and then a nickel cadmium alloy heating coil was passed through the inside of the ceramic tube, and direct current was applied to provide the operating temperature. Finally, welding the ceramic tube on a universal indirectly heated hexagonal base through a platinum wire to obtain WO3Radical NO2A sensor.
6. And finally, aging the sensor in an air environment at 80 ℃ for 5 days for later use.
7. Testing the sensor for 25ppb to 1000ppb NO at room temperature2The sensitivity of (2).
Example 2
1. Firstly, 0.45g of sodium tungstate is dissolved in 30ml of deionized water, a uniform solution is obtained after ultrasonic treatment for 10min, then 0.15g of sodium oxalate is added, stirring is carried out for 10min, 6M hydrochloric acid is dropped to adjust the pH value to 0.2, and then stirring is carried out for 10 min;
2. transferring the solution into a 50ml hydrothermal kettle, and then putting the hydrothermal kettle into an oven, wherein the oven parameters are set to be 160 ℃ and 12 h;
3. after the reaction is finished, the product is alternately centrifugally washed by deionized water and ethanol, and the obtained product is dried in an oven for 8 hours at 40 ℃. Then calcining at 500 ℃ for 2h to obtain WO3A material.
4. 0.4mg of the prepared material was mixed with 1mg of absolute ethanol to form a slurry. And dipping a proper amount of slurry by using a brush, and coating the slurry on the outer surface of a commercial ceramic tube to completely cover the gold electrode on the outer surface.
5. The coated ceramic tube was sintered at 500 ℃ for 2h, and then a nickel cadmium alloy heating coil was passed through the inside of the ceramic tube, and direct current was applied to provide the operating temperature. Finally, welding the ceramic tube on a universal indirectly heated hexagonal base through a platinum wire to obtain WO3Radical NO2A sensor.
6. And finally, aging the sensor in an air environment at 50 ℃ for 7 days for later use.
7. Testing the sensor for 25ppb to 1000ppb NO at room temperature2The sensitivity of (2).
Example 3
1. Firstly, 0.45g of sodium tungstate is dissolved in 30ml of deionized water, a uniform solution is obtained after ultrasonic treatment for 10min, then 0.15g of sodium oxalate is added, stirring is carried out for 10min, 6M hydrochloric acid is dropped to adjust the pH value to 0.7, and then stirring is carried out for 10 min;
2. transferring the solution into a 50ml hydrothermal kettle, and then putting the hydrothermal kettle into an oven, wherein the oven parameters are set to be 160 ℃ and 12 h;
3. after the reaction is finished, the product is alternately centrifugally washed by deionized water and ethanol, and the obtained product is dried in an oven for 8 hours at 40 ℃. Then calcining at 500 ℃ for 2h to obtain WO3A material.
4. 0.4mg of the prepared material was mixed with 1mg of ethanol to form a slurry. And dipping a proper amount of slurry by using a brush, and coating the slurry on the outer surface of a commercial ceramic tube to completely cover the gold electrode on the outer surface.
5. The coated ceramic tube was sintered at 500 ℃ for 2h, and then a nickel cadmium alloy heating coil was passed through the inside of the ceramic tube, and direct current was applied to provide the operating temperature. Finally, welding the ceramic tube on a universal indirectly heated hexagonal base through a platinum wire to obtain WO3Radical NO2A sensor.
6. And finally, aging the sensor in an air environment at 50 ℃ for 7 days for later use.
7. Testing the sensor for 25ppb to 1000ppb NO at room temperature2The sensitivity of (2).
WO prepared as shown in FIG. 1(a)3The hollow spheres are uniform in size, each hollow sphere is 2-5 microns in diameter, and careful observation shows that some broken hollow spheres are obtained. FIG. 1(b) shows an enlarged view of the hollow sphere, which is also evidence of WO3The hollow structure of (a) provides a direct proof. FIG. 2 shows the WO prepared3Radical NO2Sensitivity of gas sensor at room temperature and NO2Graph of concentration. Of note is the NO that the sensor is able to detect2The lower limit of the concentration is 25 ppb.
Example 4
1. Firstly, 0.60g of sodium tungstate is dissolved in 35ml of deionized water, a uniform solution is obtained after ultrasonic treatment is carried out for 10min, then 0.10g of sodium oxalate is added, stirring is carried out for 10min, 6M hydrochloric acid is dropped into the solution to adjust the pH value to 1.3, and then stirring is carried out for 10 min;
2. transferring the solution into a 50ml hydrothermal kettle, and then putting the hydrothermal kettle into an oven, wherein the oven parameters are set to be 180 ℃ and 24 hours; 180-24
3. After the reaction is finished, the product is alternately centrifugally washed by deionized water and ethanol, and the obtained product is dried in an oven for 10 hours at 80 ℃. Then calcining at 400 ℃ for 3h to obtain WO3A material.
4. 0.2mg of the prepared material was mixed with 1mg of ethanol to form a slurry. And dipping a proper amount of slurry by using a brush, and coating the slurry on the outer surface of a commercial ceramic tube to completely cover the gold electrode on the outer surface.
5. The coated ceramic tube was sintered at 600 ℃ for 5h, and then a nickel cadmium alloy heating coil was passed through the inside of the ceramic tube, and direct current was applied to provide the operating temperature. Finally, welding the ceramic tube on a universal indirectly heated hexagonal base through a platinum wire to obtain WO3Radical NO2A sensor.
6. And finally, aging the sensor in an air environment at 150 ℃ for 6 days for later use.
7. Testing the sensor for 25ppb to 1000ppb NO at room temperature2The sensitivity of (2).
Example 5
1. Firstly, 0.45g of sodium tungstate is dissolved in 30ml of deionized water, a uniform solution is obtained after ultrasonic treatment for 10min, then 0.15g of sodium oxalate is added, stirring is carried out for 10min, 6M hydrochloric acid is dropped to adjust the pH value to 1.3, and then stirring is carried out for 10 min;
2. transferring the solution into a 50ml hydrothermal kettle, and then putting the hydrothermal kettle into an oven, wherein the oven parameters are set to be 160 ℃ and 12 h;
3. after the reaction is finished, the product is alternately centrifugally washed by deionized water and ethanol, and the obtained product is dried in an oven for 8 hours at 40 ℃. Then calcining at 500 ℃ for 2h to obtain WO3A material.
4. 0.4mg of the prepared material was mixed with 1mg of ethanol to form a slurry. And dipping a proper amount of slurry by using a brush, and coating the slurry on the outer surface of a commercial ceramic tube to completely cover the gold electrode on the outer surface.
5. Will be coatedThe ceramic tube was sintered at 500 ℃ for 2h, and then a nichrome heating coil was passed through the inside of the ceramic tube, and direct current was applied to provide the operating temperature. Finally, welding the ceramic tube on a universal indirectly heated hexagonal base through a platinum wire to obtain WO3Radical NO2A sensor.
6. And finally, aging the sensor in an air environment at 50 ℃ for 7 days for later use.
7. Testing the sensor for 25ppb to 1000ppb NO at room temperature2The sensitivity of (2).
Example 6
1. Firstly, 0.50g of sodium tungstate is dissolved in 30ml of deionized water, a uniform solution is obtained after ultrasonic treatment is carried out for 10min, then 0.15g of sodium oxalate is added, stirring is carried out for 10min, 6M hydrochloric acid is dropped into the solution to adjust the pH value to 2.2, and then stirring is carried out for 10 min;
2. transferring the solution into a 50ml hydrothermal kettle, and then putting the hydrothermal kettle into an oven, wherein the oven parameters are set to be 160 ℃ and 18 h;
3. after the reaction is finished, the product is alternately centrifugally washed by deionized water and ethanol, and the obtained product is dried in an oven and dried for 12 hours at the temperature of 60 ℃. Then calcined at 500 ℃ for 2.5h to obtain WO3A material.
4. 0.2mg of the prepared material was mixed with 1mg of ethanol to form a slurry. And dipping a proper amount of slurry by using a brush, and coating the slurry on the outer surface of a commercial ceramic tube to completely cover the gold electrode on the outer surface.
5. The coated ceramic tube was sintered at 400 ℃ for 4h, and then a nickel cadmium alloy heating coil was passed through the inside of the ceramic tube, and direct current was applied to provide the operating temperature. Finally, welding the ceramic tube on a universal indirectly heated hexagonal base through a platinum wire to obtain WO3Radical NO2A sensor.
6. And finally, aging the sensor in an air environment at 100 ℃ for 7 days for later use.
7. Testing the sensor for 25ppb to 1000ppb NO at room temperature2The sensitivity of (2).
Example 7
1. Firstly, 0.45g of sodium tungstate is dissolved in 30ml of deionized water, a uniform solution is obtained after ultrasonic treatment is carried out for 10min, then 0.15g of sodium oxalate is added, stirring is carried out for 10min, 6M hydrochloric acid is dropped into the solution to adjust the pH value to 2.2, and then stirring is carried out for 10 min;
2. transferring the solution into a 50ml hydrothermal kettle, and then putting the hydrothermal kettle into an oven, wherein the oven parameters are set to be 160 ℃ and 12 h;
3. after the reaction is finished, the product is alternately centrifugally washed by deionized water and ethanol, and the obtained product is dried in an oven for 8 hours at 40 ℃. Then calcining at 400 ℃ for 3h to obtain WO3A material.
4. 0.4mg of the prepared material was mixed with 1mg of ethanol to form a slurry. And dipping a proper amount of slurry by using a brush, and coating the slurry on the outer surface of a commercial ceramic tube to completely cover the gold electrode on the outer surface.
5. The coated ceramic tube was sintered at 500 ℃ for 2h, and then a nickel cadmium alloy heating coil was passed through the inside of the ceramic tube, and direct current was applied to provide the operating temperature. Finally, welding the ceramic tube on a universal indirectly heated hexagonal base through a platinum wire to obtain WO3Radical NO2A sensor.
6. And finally, aging the sensor in an air environment at 50 ℃ for 7 days for later use.
7. Testing the sensor for 25ppb to 1000ppb NO at room temperature2The sensitivity of (2).
Example 8
1. Firstly, 0.45g of sodium tungstate is dissolved in 30ml of deionized water, a uniform solution is obtained after ultrasonic treatment for 5min, then 0.15g of sodium oxalate is added, stirring is carried out for 10min, 6M hydrochloric acid is dropped to adjust the pH value to 3.0, and then stirring is carried out for 10 min;
2. transferring the solution into a 50ml hydrothermal kettle, and then putting the hydrothermal kettle into an oven, wherein the oven parameters are set to be 160 ℃ and 12 h;
3. after the reaction is finished, the product is alternately centrifugally washed by deionized water and ethanol, and the obtained product is dried in an oven and dried for 12 hours at the temperature of 60 ℃. Then calcined at 500 ℃ for 2.5h to obtain WO3A material.
4. 0.2mg of the prepared material was mixed with 1mg of ethanol to form a slurry. And dipping a proper amount of slurry by using a brush, and coating the slurry on the outer surface of a commercial ceramic tube to completely cover the gold electrode on the outer surface.
5. The coated ceramic tube was sintered at 500 ℃ for 2h, and then a nickel cadmium alloy heating coil was passed through the inside of the ceramic tube, and direct current was applied to provide the operating temperature. Finally, welding the ceramic tube on a universal indirectly heated hexagonal base through a platinum wire to obtain WO3Radical NO2A sensor.
6. And finally, aging the sensor in an air environment at 80 ℃ for 7 days for later use.
7. Testing the sensor for 25ppb to 1000ppb NO at room temperature2The sensitivity of (2).
Example 9
1. Firstly, 0.45g of sodium tungstate is dissolved in 30ml of deionized water, a uniform solution is obtained after ultrasonic treatment is carried out for 10min, then 0.15g of sodium oxalate is added, stirring is carried out for 10min, 6M hydrochloric acid is dropped into the solution to adjust the pH value to 3.0, and then stirring is carried out for 10 min;
2. transferring the solution into a 50ml hydrothermal kettle, and then putting the hydrothermal kettle into an oven, wherein the oven parameters are set to be 160 ℃ and 12 h;
3. after the reaction is finished, the product is alternately centrifugally washed by deionized water and ethanol, and the obtained product is dried in an oven for 8 hours at 40 ℃. Then calcining at 500 ℃ for 2h to obtain WO3A material.
4. 0.3mg of the prepared material was mixed with 1mg of ethanol to form a slurry. And dipping a proper amount of slurry by using a brush, and coating the slurry on the outer surface of a commercial ceramic tube to completely cover the gold electrode on the outer surface.
5. The coated ceramic tube was sintered at 500 ℃ for 2h, and then a nickel cadmium alloy heating coil was passed through the inside of the ceramic tube, and direct current was applied to provide the operating temperature. Finally, welding the ceramic tube on a universal indirectly heated hexagonal base through a platinum wire to obtain WO3Radical NO2A sensor.
6. And finally, aging the sensor in an air environment at 50 ℃ for 7 days for later use.
7. Testing the sensor for 25ppb to 1000ppb NO at room temperature2The sensitivity of (2).
Table 1: gas sensor at 200ppb NO2Sensitivity to pH in the atmosphere
(sensitivity S ═ Rg/Ra, where Ra represents the resistance of the sensor in air and Rg is the resistance of the sensor in the gas to be measured)
Examples pH value Sensitivity S (Rg/Ra)
Example 2 0.2 2.1
Example 3 0.7 7.6
Example 5 1.3 1.4
Example 7 2.2 1.0
Example 9 3.0 1.0
The above-mentioned embodiments only express the embodiments of the present invention, but not should be understood as the limitation of the scope of the invention patent, it should be noted that, for those skilled in the art, many variations and modifications can be made without departing from the concept of the present invention, and these all fall into the protection scope of the present invention.

Claims (4)

1. Based on WO3Room temperature NO of hollow sphere2The preparation method of the sensor is characterized in that the room temperature NO is2The sensor is indirectly heated, and comprises an alumina ceramic tube substrate with a platinum wire and a gold electrode, and WO coated on the outer surface of the alumina ceramic tube and the gold electrode3The hollow ball and a nickel-chromium alloy heating wire arranged in the alumina ceramic tube; the working temperature of the sensor is provided by introducing direct current to the nichrome heating wire, and the NO is measured by measuring the resistance value of direct current resistance between two gold electrodes in different atmospheres2The function of concentration;
the preparation method comprises the following steps:
first step, preparation of WO3Hollow ball
(1) Dissolving sodium tungstate in deionized water, performing ultrasonic treatment to obtain a uniform solution, then adding sodium oxalate, stirring, dropwise adding hydrochloric acid to adjust the pH value to 0.2-3.0, and then continuing stirring; adding 0.40-0.60 g of sodium tungstate and 0.10-0.20 g of sodium oxalate into 25-35 ml of deionized water correspondingly;
(2) transferring the solution into a hydrothermal kettle, and then putting the hydrothermal kettle into an oven, wherein the oven parameters are set to be 150-180 ℃ for 10-24 hours;
(3) after the reaction is finished, alternately centrifuging and washing the product by using deionized water and ethanol, and drying the obtained product in an oven; then placing the mixture at 400-600 ℃ for calcining for 2-3 h to obtain WO3Hollow spheres;
secondly, preparing room temperature NO by adopting an indirectly heated structure2Sensor with a sensor element
(1) The WO prepared in the first step3The hollow spheres are uniformly mixed with ethanol to form slurry; uniformly coating the slurry on the surface of an alumina ceramic tube with a platinum wire and a gold electrode to ensure that the alumina ceramic tube completely covers the gold electrode; and a platinum wire is led out of the gold electrode;
(2) will coat with WO3Alumina ceramic of hollow ballSintering the ceramic tube at 300-600 ℃ for 2-5 h, then enabling the nickel-chromium alloy heating wire to penetrate through the aluminum oxide ceramic tube, and supplying direct current to provide working temperature; then welding an alumina ceramic tube on the universal indirectly heated base through a platinum wire;
(3) aging the sensor in an air environment at 50-150 ℃ for 5-7 days to obtain WO3Basic room temperature NO2A sensor.
2. WO-based material according to claim 13Room temperature NO of hollow sphere2A method for producing a sensor, characterized in that said WO3The diameter of the hollow sphere is 2-5 mu m.
3. The preparation method according to claim 1, wherein the oven drying temperature in the first step (3) is 40-80 ℃ and the drying time is 8-12 h.
4. The process according to claim 1 or 3, wherein the WO in the second step (1)3The mass ratio of the hollow spheres to the ethanol is 0.2-0.4: 1.
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