CN109516618A - Ultrapure water intelligent remote operational system - Google Patents
Ultrapure water intelligent remote operational system Download PDFInfo
- Publication number
- CN109516618A CN109516618A CN201811352656.4A CN201811352656A CN109516618A CN 109516618 A CN109516618 A CN 109516618A CN 201811352656 A CN201811352656 A CN 201811352656A CN 109516618 A CN109516618 A CN 109516618A
- Authority
- CN
- China
- Prior art keywords
- water
- equipment
- ultrapure water
- library
- bed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910021642 ultra pure water Inorganic materials 0.000 title claims abstract description 76
- 239000012498 ultrapure water Substances 0.000 title claims abstract description 76
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 102
- 238000002360 preparation method Methods 0.000 claims abstract description 36
- 238000012423 maintenance Methods 0.000 claims abstract description 32
- 238000004458 analytical method Methods 0.000 claims abstract description 22
- 238000003745 diagnosis Methods 0.000 claims abstract description 19
- 238000007405 data analysis Methods 0.000 claims abstract description 8
- 238000007726 management method Methods 0.000 claims description 56
- 239000010410 layer Substances 0.000 claims description 50
- 238000001223 reverse osmosis Methods 0.000 claims description 30
- 230000005540 biological transmission Effects 0.000 claims description 18
- 238000005498 polishing Methods 0.000 claims description 13
- 230000036541 health Effects 0.000 claims description 12
- 239000002346 layers by function Substances 0.000 claims description 12
- 238000005457 optimization Methods 0.000 claims description 11
- 238000011156 evaluation Methods 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 150000001450 anions Chemical class 0.000 claims description 9
- 229910052799 carbon Inorganic materials 0.000 claims description 9
- 125000002091 cationic group Chemical group 0.000 claims description 9
- 238000007872 degassing Methods 0.000 claims description 9
- 150000002500 ions Chemical class 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 8
- 238000012544 monitoring process Methods 0.000 claims description 8
- 239000007789 gas Substances 0.000 claims description 7
- 238000001764 infiltration Methods 0.000 claims description 7
- 238000007689 inspection Methods 0.000 claims description 7
- 230000001954 sterilising effect Effects 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 5
- 238000011160 research Methods 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 4
- 238000005553 drilling Methods 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 4
- 230000006872 improvement Effects 0.000 claims description 4
- 102000012739 Anion Transport Proteins Human genes 0.000 claims description 3
- 108010079442 Anion Transport Proteins Proteins 0.000 claims description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 3
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 claims description 3
- 239000002253 acid Substances 0.000 claims description 3
- 238000005261 decarburization Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 3
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 3
- 230000005518 electrochemistry Effects 0.000 claims description 3
- JEGUKCSWCFPDGT-UHFFFAOYSA-N h2o hydrate Chemical compound O.O JEGUKCSWCFPDGT-UHFFFAOYSA-N 0.000 claims description 3
- 239000013056 hazardous product Substances 0.000 claims description 3
- 230000003862 health status Effects 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 230000002706 hydrostatic effect Effects 0.000 claims description 3
- 238000013439 planning Methods 0.000 claims description 3
- 230000003449 preventive effect Effects 0.000 claims description 3
- 238000012549 training Methods 0.000 claims description 3
- 238000012800 visualization Methods 0.000 claims description 3
- 239000002351 wastewater Substances 0.000 claims description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 2
- 238000007619 statistical method Methods 0.000 claims description 2
- 238000012545 processing Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 8
- 241001310793 Podium Species 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005265 energy consumption Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000013473 artificial intelligence Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000013523 data management Methods 0.000 description 1
- 238000002242 deionisation method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 235000021472 generally recognized as safe Nutrition 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000000671 immersion lithography Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000026676 system process Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F9/00—Multistage treatment of water, waste water or sewage
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/001—Processes for the treatment of water whereby the filtration technique is of importance
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/30—Treatment of water, waste water, or sewage by irradiation
- C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
- C02F1/441—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by reverse osmosis
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
- C02F2001/422—Treatment of water, waste water, or sewage by ion-exchange using anionic exchangers
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
- C02F2001/425—Treatment of water, waste water, or sewage by ion-exchange using cation exchangers
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
- C02F2001/427—Treatment of water, waste water, or sewage by ion-exchange using mixed beds
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
- C02F2103/02—Non-contaminated water, e.g. for industrial water supply
- C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2201/00—Apparatus for treatment of water, waste water or sewage
- C02F2201/002—Construction details of the apparatus
- C02F2201/007—Modular design
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2301/00—General aspects of water treatment
- C02F2301/08—Multistage treatments, e.g. repetition of the same process step under different conditions
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Water Supply & Treatment (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Treatment Of Water By Ion Exchange (AREA)
Abstract
The invention discloses a kind of ultrapure water intelligent remote operational systems, it is arranged based on ultra-clean water Preparation equipment, include: intelligent operation platform, further includes maintenance maintenance module, spare part and consumable management module, device management module, data analysis module, Fault diagnosis and forecast module, safety management module based on the control of intelligent operation platform.The present invention is based on the work that the processing of big data and analysis can preferably control ultrapure water Preparation equipment, more standard compliant ultrapure water is prepared in guarantee.The present invention is suitable for all ultrapure water Preparation equipments.
Description
Technical field
The invention belongs to electric power maintenance field of tool, specifically a kind of ultrapure water intelligent remote operational system.
Background technique
In large scale integrated circuit or display device manufacturing, ultrapure water is used in liquid immersion lithography step
Immersion liquid, and the water quality of ultrapure water greatly affects the quality of photoetching, therefore, it is integrated that the ultrapure water of water quality qualification, which is made,
Essential process in circuit manufacturing, and then ultrapure water system technique and information system management is enabled to become high-tech electronic work
The important link of factory.Domestic ultrapure water preparation industry is in quick developing stage at present, but compared to external development
Level still has very big gap.With popularizing for domestic semiconductor production line, the demand of ultrapure water Preparation equipment is increasing, and
Domestic semiconductors manufacture manufacturer relies primarily on external ultrapure water Preparation equipment and its management system at present, not only at high cost,
And later maintenance is very inconvenient.Therefore, ultrapure water novel maintenance need independent research.
It is disclosed in Zhejiang University's Master's thesis " ultra-pure-water treatment system design and its information-based project study " a kind of super
The informationization technology of pure water, the content of the paper project cover ultrapure water production system craft lectotype, process design, equipment choosing
Type, structure design, control system type selecting, system process and debugging.Meanwhile it being had also been devised in the project a set of to ultrapure
Water system operation data carries out the solution of remote collection and publication, and the program defines the design and data for needing to transmit
The method of transmission, format, while data are devised in the storing mode of server, database design is completed, net is finally realized
Publication of the page to ultrapure water system data.Greatly improve the data managing capacity of ultrapure water system.But it, should due to some limitations
Project also needs the intelligent remote O&M of ultrapure water system perfect, comprising: industrial cloud and big data processing, telecommunication and prison
There is shortcoming or fail perfect in the schemes such as control, data analysis and statistics, the prediction based on artificial intelligence and analysis.
Summary of the invention
It is existing in the prior art above insufficient to solve, the present invention is intended to provide a kind of ultrapure water intelligent remote O&M system
System to enable it that can prepare equipment intelligent control to ultra-clean water, and has the function of big data analysis, enables ultra-clean water Preparation equipment more
Add intelligence.
To achieve the above object, the technical solution adopted in the present invention is as follows:
A kind of ultrapure water intelligent remote operational system is arranged based on ultra-clean water Preparation equipment, comprising:
Intelligent operation platform is further included the maintenance maintenance module controlled based on intelligent operation platform, spare part and consumable management module, set
Standby management module, data analysis module, Fault diagnosis and forecast module, safety management module, the maintenance maintenance module are used for
Inspection management, Remote support, staff training, emergency scheduling, typesetting management, preventive maintenance；The spare part and consumable management
Module is for stock control, purchasing management, replacement early warning；The device management module is used to transport device's document, equipment
Row, BIM+AR+ visualization are managed；The data analysis module is used for consumptive material and standby redundancy quality comprehensive ranking, sets
Received shipment row statistical analysis, water quality indicator analysis, the analysis of standby redundancy consumption forecast, consumable items allowance, can consumption/expense statistics,
Equipment analysis on the health status；The Fault diagnosis and forecast module is used for fault diagnosis and optimization, equipment health control；It is described
Safety management module is used to use detection, basement waste water terminal leakage alarm, hydrogen region to hazardous material management, eye syringe
Break monitoring, personal management, nitrogen gas concn monitoring, soda acid leakage alarm.
As limitation of the invention: the intelligence operation platform includes:
Intellisense/access communications layer is equipped with sension unit, is respectively used to perceive the number of all parts in ultra-clean water Preparation equipment
It is believed that breath, and transmitted by transmission network；
Novel maintenance service platform layer, resource layer and support function layer including being respectively provided with several libraries, wherein resource layer connects
The data information for receiving transmission network transmission, is compared with the data in itself each library, it is each to obtain ultra-clean water Preparation equipment
The fault message of component, and with can cost, the support function layer then to fault restoration cost, with can cost provide it is corresponding
Support；
Novel maintenance Service application layer, including user interface layer and pure water O&M functional layer, wherein user interface layer be used for it is outer
The each personnel in portion interact, and pure water O&M functional layer then carries out assessment management to each index of ultrapure water Preparation equipment；
Limit as to another kind of the invention: the ultrapure water Preparation equipment includes sequentially connected pretreatment system, softening
System, counter-infiltration system, mixed-bed system, polishing system, the pretreatment system include that entrance by raw water pump pumps former pond
The pretreatment heat exchanger of middle raw water, the entrance of the outlet connection more medium filter of the pretreatment heat exchanger, multimedium
The outlet of filter connects filtered water reservoir, and filtered water pump is equipped in filtered water reservoir, and the outlet of the filtered water pump connects active carbon
The entrance of filter；
The melded system includes exporting the cationic bed being connected with active carbon filter, is successively arranged decarburization after cationic bed
The softened water of tower, water tank, anion bed water supply pump, anion bed, the anion bed outflow flows into softening pond；
The counter-infiltration system includes the reverse osmosis water supply pump that softened water is pumped by softening pond, and the outlet of reverse osmosis water supply pump is logical
It crosses cartridge filter and connects reverse osmosis host, sterilizing viltalight lamp is equipped between the reverse osmosis water supply pump and cartridge filter；
The mixed-bed system includes connecting the reverse osmosis pond of reverse osmosis host, and mixed bed water supply pump, institute are equipped in reverse osmosis pond
The entrance of the outlet connection hybrid ionic exchange bed of reverse osmosis water supply pump is stated, hybrid ionic exchanges the outlet connection degassing film dress of bed
It sets；
The polishing system includes the ultrapure water tank of connection degassing film device outlet, is equipped in ultrapure water tank by ultrapure water pump
The ultrapure water conveying pump of ultrapure water heat exchanger is drawn, the outlet of the ultrapure water heat exchanger is connected by sterilizing viltalight lamp throws
Light mixed bed, the polishing mixed bed is interior to be equipped with terminal booster pump, and the outlet of the terminal booster pump is connected ultrapure by end utrafiltration
Water water spot.
As the restriction to above-mentioned sension unit: the sension unit includes the water-aspirator pressure sensing set on raw water pump discharge
Device, the water level sensor set on more medium filter exit, the electrochemistry set on active carbon filter exit, gas etc. pass
Sensor, the ion transducer in cationic bed, the gas sensor in decarbonizing tower, the ion on anion bed
Sensor, the filter-press set on cartridge filter exit, is set to the flow sensor set on reverse osmosis water supply pump discharge
The hydrostatic sensor in reverse osmosis host exit is handed over set on the liquid level sensor in mixed bed water supply pump exit, set on hybrid ionic
Change the ion transducer in bed, the pressure sensor set on degassing film device exit, the pressure set on the outlet of ultrapure water conveying pump
Force snesor, the water quality sensor in polishing mixed bed, and the pressure sensor set on end utrafiltration exit.
Further define that the resource layer is equipped with fault indices pattern library, prediction model as to intelligent operation platform
Library, model library, project resource library, life period of equipment library, cost pattern library, the information of the transmission network transmission and each library
The data of middle storage are compared, and obtain corresponding equipment fault situation and with can cost；
The support function layer includes failure cost rule base, load prediction analysis library, equipment fault knowledge base, equipment health pipe
Manage planning library, expert diagnosis rule base, policy optimization rule base；
The user interface layer is terminal switch equipment, including administrative staff's portal, operations staff's portal, equipment supplier's door
Family and government, scientific research institution's portal；
The pure water O&M functional layer includes fault diagnosis and fault prediction plate, equipment management plate, spare unit consumptive material management plate, life
Cycle management plate is ordered, further includes fault statistics ranking, equipment use analysis and performance evaluation, equipment health Evaluation, water
Consumption index, water quality indicator, technological improvement effect assessment, inspection line optimization, life period of an equipment totle drilling cost are estimated, equipment is complete
Life cycle management.
Due to the adoption of the above technical solution, compared with prior art, the present invention acquired beneficial effect is:
The present invention is equipped with intelligent operation platform, maintenance maintenance module, spare part and consumable management module, device management module, data point
Module, Fault diagnosis and forecast module, safety management module are analysed, ultrapure water Preparation equipment in the prior art is solved and lacks management
Process is only capable of being regulated and controled at the scene, the status of lack of wisdom software and data analysis, is truly realized and sets to ultrapure water preparation
Standby intelligentized control method and big data management has carried out effective monitoring, maintenance and management to the Preparation equipment of ultrapure water, has been super
The preparation of pure water provides the reliable foundation of science, so that the ultrapure water purity arrived is higher, more meets electronic integrated circuit production
Demand, while real-time prognostic and health management is carried out to ultrapure water Preparation equipment, promotes the ineffectiveness of malfunction elimination,
Extend the service life of ultrapure water Preparation equipment, and maximizes the system effectiveness of ultrapure water Preparation equipment；
Ultrapure water Preparation equipment of the invention includes pretreatment system, melded system, counter-infiltration system, mixed-bed system, polishing system
System can carry out raw water adequately to remove deionization and impurity, obtain ultrapure water, enable the water quality more meet demand of ultrapure water；
It is equipped with multiple sensors in ultrapure water Preparation equipment of the invention, is located on different components, system can be acquired respectively
Each real-time parameter during standby ultrapure water guarantees the safety of the pure property and preparation process of ultrapure water preparation.
In conclusion the present invention is based on the works that the processing of big data and analysis can preferably control ultrapure water Preparation equipment
Make, more standard compliant ultrapure water is prepared in guarantee.
The present invention is suitable for all ultrapure water Preparation equipments.
Detailed description of the invention
With reference to the accompanying drawing and specific embodiment makees more detailed description to the present invention.
Fig. 1 is the functional block diagram of the embodiment of the present invention；
Fig. 2 is the structural schematic diagram of ultrapure water Preparation equipment in the embodiment of the present invention；
Fig. 3 is the functional diagram of the embodiment of the present invention.
Specific embodiment
A kind of ultrapure water intelligent remote operational system of embodiment
The present embodiment is arranged based on ultrapure water Preparation equipment, and the ultrapure water Preparation equipment is as shown in Fig. 2, include sequentially connected
Pretreatment system, melded system, counter-infiltration system, mixed-bed system, polishing system, the pretreatment system include that entrance passes through original
Water pump pumps the pretreatment heat exchanger of raw water in former pond, and the outlet of the pretreatment heat exchanger connects more medium filter
Entrance, the outlet of more medium filter connects filtered water reservoir, filtered water pump is equipped in filtered water reservoir, and the filtered water pump goes out
The entrance of mouth connection active carbon filter；
The melded system includes exporting the cationic bed being connected with active carbon filter, is successively arranged decarburization after cationic bed
The softened water of tower, water tank, anion bed water supply pump, anion bed, the anion bed outflow flows into softening pond；
The counter-infiltration system includes the reverse osmosis water supply pump that softened water is pumped by softening pond, and the outlet of reverse osmosis water supply pump is logical
It crosses cartridge filter and connects reverse osmosis host, sterilizing viltalight lamp is equipped between the reverse osmosis water supply pump and cartridge filter；
The mixed-bed system includes connecting the reverse osmosis pond of reverse osmosis host, and mixed bed water supply pump, institute are equipped in reverse osmosis pond
The entrance of the outlet connection hybrid ionic exchange bed of reverse osmosis water supply pump is stated, hybrid ionic exchanges the outlet connection degassing film dress of bed
It sets；
The polishing system includes the ultrapure water tank of connection degassing film device outlet, is equipped in ultrapure water tank by ultrapure water pump
The ultrapure water conveying pump of ultrapure water heat exchanger is drawn, the outlet of the ultrapure water heat exchanger is connected by sterilizing viltalight lamp throws
Light mixed bed, the polishing mixed bed is interior to be equipped with terminal booster pump, and the outlet of the terminal booster pump is connected ultrapure by end utrafiltration
Water water spot.
And the present embodiment is as shown in Figure 1, Figure 3, comprising:
One, Intellisense/access communications layer is equipped with sension unit, for obtaining the water quality, water, energy of ultrapure water Preparation equipment
Consumption, process control etc. data.It is additionally provided with transmission network, and transmission network can choose and have having for Internet of Things transmittability
Line and wireless network, transmission network correspond to the infrastructure services layer (IaaS) of industrial Internet of Things pessimistic concurrency control, transmitted data category
In multi-source, isomeric data, need to be converted to the identifiable format of unified system by gateway processes.
Sension unit in the present embodiment includes set on the water-aspirator pressure sensor of raw water pump discharge, set on multi-medium filtering
The sensors such as the water level sensor in device exit, the electrochemistry set on active carbon filter exit, gas are set to cationic bed
Interior ion transducer, the gas sensor in decarbonizing tower, the ion transducer on anion bed, be set to it is reverse osmosis
The flow sensor of water supply pump discharge, set on cartridge filter exit filter-press, be set to reverse osmosis host exit
Hydrostatic sensor, set on mixed bed water supply pump exit liquid level sensor, set on hybrid ionic exchange bed in ion sensor
Device, the pressure sensor set on the outlet of ultrapure water conveying pump, is set to polishing at the pressure sensor set on degassing film device exit
Water quality sensor in mixed bed, and the pressure sensor set on end utrafiltration exit.
It further include alarm, identification label (including RFID label tag, two dimensional code), position sensor, image acquisition device (use
Camera), the alarm, identification label, position sensor, image acquisition device are based on the control of intelligent operation platform, and
The data that acquisition is come up are carried out the information processing of novel maintenance by communication network transmission to cloud platform by data mart modeling.
Two, novel maintenance service platform layer is equivalent to the platform services layer (PaaS) of industry internet model, including respectively
Resource layer and support function layer with several libraries, wherein resource layer receive transmission network transmission sension unit and other set
Standby data information is compared with the data in itself each library, obtains the failure letter of ultra-clean water Preparation equipment all parts
Breath, and with can cost, the support function layer then to fault restoration cost, with can cost provide accordingly support.
Supporting layer in the present embodiment includes failure cost rule base, load prediction analysis library, equipment fault knowledge base, sets
Standby health control rule base, expert diagnosis rule base, policy optimization rule base.
The resource layer include fault indices pattern library, forecasting model database, model library, project resource library, implementation database,
Life period of equipment library, cost pattern library, fault diagnosis library, fault prediction model library, digitization modeling model library, water quality indicator
Library, engineering resources library, water quality indicator pattern library, device resource library, with can cost pool.
Three, novel maintenance Service application layer is transported corresponding to the application layer of industry internet, including user interface layer and pure water
Functional layer is tieed up, wherein user interface layer is used to interact with external each personnel, including personnel inquiry, input definition etc.；It is pure
Water transport dimension functional layer then carries out assessment management to each index of ultrapure water Preparation equipment.
The user interface layer of the present embodiment can be implemented using B/S structure, provide administrative staff, operation maintenance personnel, terminal are set
The interface of standby, supplier, organization, while the function for specific implementation provides interface and interface, is respectively equipped with following portal:
Administrative staff's portal logs in, maintenance system for administrative staff；Operations staff's portal is used for operation maintenance personnel remote monitoring and administration；
Equipment supplier's portal, for lectotype selection, buying；Government, scientific research institution's portal, for providing the statistical numbers such as energy consumption, environmental protection
According to.
The pure water O&M functional layer forms the workflow or operation flow of function, and provides corresponding man-machine interface and connect
Mouthful.Pure water O&M functional layer realizes corresponding function by boundary layer, the database and algorithm engine of calling platform layer.
The present embodiment includes following plate: fault diagnosis and fault prediction plate, is occurred for failure reason analysis and failure
Time and type prediction；Equipment management plate, for equipment operation and maintenance management；Spare unit consumptive material plate, it is standby for managing
Purchase, inventory and the use of product consumptive material.The pure water O&M functional layer is also able to realize following functions: life cycle pipe
Reason, equipment use analysis and performance evaluation, water consume index evaluation, technological improvement effect assessment, life period of an equipment totle drilling cost
It estimates, fault statistics ranking, equipment health Evaluation, water index evaluation, inspection line optimization, equipment life period management.
Based on said frame, the function of the present embodiment includes:
1) maintenance maintenance, including preventive maintenance, management of arranging an order according to class and grade, emergency scheduling, staff training, Remote support, inspection pipe
Reason.The function is mainly realized in the support function sublayer of podium level.
2) spare part and consumable management, including stock control, purchasing management, replacement early warning；The function is mainly in podium level
Sublayer realize.
3) equipment management, including device's document, equipment operation, BIM+AR+ visualization are managed；The function mainly exists
The support function layer of podium level is realized.
4) data are analyzed, including consumptive material and standby redundancy quality comprehensive ranking, the analysis of equipment operating statistic, water quality indicator point
Analysis, the analysis of standby redundancy consumption forecast, consumable items allowance, energy consumption/expense statistics, equipment analysis on the health status；Function master
It to be realized in the support function layer of podium level, and be called by application layer and form visualized graphs displaying.
5) Fault diagnosis and forecast, including fault diagnosis and optimization, equipment health control；The function is mainly in podium level
Support function layer is realized.
6) safety management, including hazardous material management, eye syringe use detection, basement waste water terminal leakage alarm, hydrogen
Break monitoring, personal management, nitrogen gas concn monitoring, soda acid leakage alarm in gas region.Generally Recognized as safe management realized by separate modular,
It is related to sensing layer, podium level and application layer.
Claims (6)
1. a kind of ultrapure water intelligent remote operational system is arranged based on ultra-clean water Preparation equipment, characterized by comprising:
Intelligent operation platform is further included the maintenance maintenance module controlled based on intelligent operation platform, spare part and consumable management module, set
Standby management module, data analysis module, Fault diagnosis and forecast module, safety management module, the maintenance maintenance module are used for
Inspection management, Remote support, staff training, emergency scheduling, typesetting management, preventive maintenance；The spare part and consumable management
Module is for stock control, purchasing management, replacement early warning；The device management module is used to transport device's document, equipment
Row, BIM+AR+ visualization are managed；The data analysis module is used for consumptive material and standby redundancy quality comprehensive ranking, sets
Received shipment row statistical analysis, water quality indicator analysis, the analysis of standby redundancy consumption forecast, consumable items allowance, can consumption/expense statistics,
Equipment analysis on the health status；The Fault diagnosis and forecast module is used for fault diagnosis and optimization, equipment health control；It is described
Safety management module is used to use detection, basement waste water terminal leakage alarm, hydrogen region to hazardous material management, eye syringe
Break monitoring, personal management, nitrogen gas concn monitoring, soda acid leakage alarm.
2. ultrapure water intelligent remote operational system according to claim 1, it is characterised in that: the intelligence operation platform packet
It includes:
Intellisense/access communications layer is equipped with sension unit, is respectively used to perceive the number of all parts in ultra-clean water Preparation equipment
It is believed that breath, and transmitted by transmission network；
Novel maintenance service platform layer, resource layer and support function layer including being respectively provided with several libraries, wherein resource layer connects
The data information for receiving transmission network transmission, is compared with the data in itself each library, it is each to obtain ultra-clean water Preparation equipment
The fault message of component, and with can cost, the support function layer then to fault restoration cost, with can cost provide it is corresponding
Support；
Novel maintenance Service application layer, including user interface layer and pure water O&M functional layer, wherein user interface layer be used for it is outer
The each personnel in portion interact, and pure water O&M functional layer then carries out assessment management to each index of ultrapure water Preparation equipment.
3. ultrapure water intelligent remote operational system according to claim 1 or 2, it is characterised in that: the ultrapure water preparation
Equipment includes sequentially connected pretreatment system, melded system, counter-infiltration system, mixed-bed system, polishing system, the pretreatment
System includes the pretreatment heat exchanger that entrance pumps raw water in former pond by raw water pump, and the pretreatment heat exchanger goes out
The entrance of mouth connection more medium filter, the outlet of more medium filter connect filtered water reservoir, were equipped with drainage in filtered water reservoir
Pump, the entrance of the outlet connection active carbon filter of the filtered water pump；
The melded system includes exporting the cationic bed being connected with active carbon filter, is successively arranged decarburization after cationic bed
The softened water of tower, water tank, anion bed water supply pump, anion bed, the anion bed outflow flows into softening pond；
The counter-infiltration system includes the reverse osmosis water supply pump that softened water is pumped by softening pond, and the outlet of reverse osmosis water supply pump is logical
It crosses cartridge filter and connects reverse osmosis host, sterilizing viltalight lamp is equipped between the reverse osmosis water supply pump and cartridge filter；
The mixed-bed system includes connecting the reverse osmosis pond of reverse osmosis host, and mixed bed water supply pump, institute are equipped in reverse osmosis pond
The entrance of the outlet connection hybrid ionic exchange bed of reverse osmosis water supply pump is stated, hybrid ionic exchanges the outlet connection degassing film dress of bed
It sets；
The polishing system includes the ultrapure water tank of connection degassing film device outlet, is equipped in ultrapure water tank by ultrapure water pump
The ultrapure water conveying pump of ultrapure water heat exchanger is drawn, the outlet of the ultrapure water heat exchanger is connected by sterilizing viltalight lamp throws
Light mixed bed, the polishing mixed bed is interior to be equipped with terminal booster pump, and the outlet of the terminal booster pump is connected ultrapure by end utrafiltration
Water water spot.
4. ultrapure water intelligent remote operational system according to claim 2, it is characterised in that: the sension unit includes setting
Water-aspirator pressure sensor in raw water pump discharge, is set to active carbon mistake at the water level sensor set on more medium filter exit
The sensors such as electrochemistry, gas at filter outlets, the ion transducer in cationic bed, the gas in decarbonizing tower
Sensor, the ion transducer on anion bed, set on the flow sensor of reverse osmosis water supply pump discharge, set on ensuring public security
Filter-press at filter outlets, set on reverse osmosis host exit hydrostatic sensor, be set to mixed bed water supply pump exit
Liquid level sensor, set on hybrid ionic exchange bed in ion transducer, set on degassing film device exit pressure sensing
Device, the pressure sensor set on the outlet of ultrapure water conveying pump, the water quality sensor in polishing mixed bed, and it is super set on terminal
Filter the pressure sensor in exit.
5. ultrapure water intelligent remote operational system according to claim 2 or 4, it is characterised in that: the resource layer is equipped with
Fault indices pattern library, forecasting model database, model library, project resource library, life period of equipment library, cost pattern library, the biography
The data stored in the information of defeated transmission of network and each library are compared, and obtain corresponding equipment fault situation and with can be at
This；
The support function layer includes failure cost rule base, load prediction analysis library, equipment fault knowledge base, equipment health pipe
Manage planning library, expert diagnosis rule base, policy optimization rule base；
The user interface layer is terminal switch equipment, including administrative staff's portal, operations staff's portal, equipment supplier's door
Family and government, scientific research institution's portal；
The pure water O&M functional layer includes fault diagnosis and fault prediction plate, equipment management plate, spare unit consumptive material management plate, life
Cycle management plate is ordered, further includes fault statistics ranking, equipment use analysis and performance evaluation, equipment health Evaluation, water
Consumption index, water quality indicator, technological improvement effect assessment, inspection line optimization, life period of an equipment totle drilling cost are estimated, equipment is complete
Life cycle management.
6. ultrapure water intelligent remote operational system according to claim 3, it is characterised in that: the resource layer is equipped with failure
Indexed basis library, forecasting model database, model library, project resource library, life period of equipment library, cost pattern library, the transmission network
The data stored in information and each library of network transmission are compared, and obtain corresponding equipment fault situation and with energy cost；
The support function layer includes failure cost rule base, load prediction analysis library, equipment fault knowledge base, equipment health pipe
Manage planning library, expert diagnosis rule base, policy optimization rule base；
The user interface layer is terminal switch equipment, including administrative staff's portal, operations staff's portal, equipment supplier's door
Family and government, scientific research institution's portal；
The pure water O&M functional layer includes fault diagnosis and fault prediction plate, equipment management plate, spare unit consumptive material management plate, life
Cycle management plate is ordered, further includes fault statistics ranking, equipment use analysis and performance evaluation, equipment health Evaluation, water
Consumption index, water quality indicator, technological improvement effect assessment, inspection line optimization, life period of an equipment totle drilling cost are estimated, equipment is complete
Life cycle management.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811352656.4A CN109516618A (en) | 2018-11-14 | 2018-11-14 | Ultrapure water intelligent remote operational system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811352656.4A CN109516618A (en) | 2018-11-14 | 2018-11-14 | Ultrapure water intelligent remote operational system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109516618A true CN109516618A (en) | 2019-03-26 |
Family
ID=65777551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811352656.4A Pending CN109516618A (en) | 2018-11-14 | 2018-11-14 | Ultrapure water intelligent remote operational system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109516618A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112591950A (en) * | 2020-12-30 | 2021-04-02 | 佛山市雅洁源科技股份有限公司 | Hospital water monitoring system based on Internet of things |
| CN114612022A (en) * | 2022-05-16 | 2022-06-10 | 深圳市升邦水处理设备有限公司 | Method, device, equipment and storage medium for realizing ultrapure water treatment monitoring |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101654309A (en) * | 2009-09-15 | 2010-02-24 | 上海华强环保设备工程有限公司 | Intelligent pure water/ultra-pure water preparing system and automatic control method thereof |
| CN107673533A (en) * | 2015-11-13 | 2018-02-09 | 江苏理工学院 | Method for preparing ultrapure water without wastewater discharge |
| CN207596640U (en) * | 2017-11-22 | 2018-07-10 | 深圳市治标环保环境技术有限公司 | A kind of ultrapure water production system |
| CN209276294U (en) * | 2018-11-14 | 2019-08-20 | 中国电子工程设计院有限公司 | Ultrapure water intelligent remote operational system |
-
2018
- 2018-11-14 CN CN201811352656.4A patent/CN109516618A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101654309A (en) * | 2009-09-15 | 2010-02-24 | 上海华强环保设备工程有限公司 | Intelligent pure water/ultra-pure water preparing system and automatic control method thereof |
| CN107673533A (en) * | 2015-11-13 | 2018-02-09 | 江苏理工学院 | Method for preparing ultrapure water without wastewater discharge |
| CN207596640U (en) * | 2017-11-22 | 2018-07-10 | 深圳市治标环保环境技术有限公司 | A kind of ultrapure water production system |
| CN209276294U (en) * | 2018-11-14 | 2019-08-20 | 中国电子工程设计院有限公司 | Ultrapure water intelligent remote operational system |
Non-Patent Citations (1)
| Title |
|---|
| 缪兴锋 等: "《物联网技术应用实务》", 华中科技大学出版社, pages: 9 - 13 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112591950A (en) * | 2020-12-30 | 2021-04-02 | 佛山市雅洁源科技股份有限公司 | Hospital water monitoring system based on Internet of things |
| CN114612022A (en) * | 2022-05-16 | 2022-06-10 | 深圳市升邦水处理设备有限公司 | Method, device, equipment and storage medium for realizing ultrapure water treatment monitoring |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109032099A (en) | Engineering machinery assemble production line online awareness system | |
| CN109978052A (en) | A kind of user side energy device wisdom repair method | |
| CN110020967A (en) | Information processing method and device for intelligent warning of power grid dispatching end transformer substation | |
| CN105807742A (en) | Production equipment monitoring method and system | |
| CN102923538A (en) | Elevator health management and maintenance system based on Internet of things and collection and assessment method | |
| CN105094030A (en) | Machine room environmental data management and real-time analyzing and processing system | |
| CN103971294B (en) | One kind assesses information display system based on power transmission and transformation equipment state | |
| CN108776276A (en) | Multiplexing electric abnormality detection method and system | |
| CN102222270B (en) | Manufacture and perform management system and production curves device | |
| CN109447286A (en) | A kind of power transformation O&M Intelligent mobile job platform based on Internet of Things | |
| CN107861471A (en) | A kind of control system of remote monitoring machine tool net safe operation | |
| CN110784537A (en) | Real-time Internet of things sensing method for power Internet of things sensing layer equipment | |
| CN109516618A (en) | Ultrapure water intelligent remote operational system | |
| CN107673501A (en) | A kind of purifier intelligent management system | |
| CN116596463A (en) | Intelligent management and control system for aviation heat meter processing workshop | |
| CN113673952A (en) | Cloud service system based on industrial internet platform | |
| CN209276294U (en) | Ultrapure water intelligent remote operational system | |
| CN107368054A (en) | Performance analysis management system and factory management system | |
| CN105743220A (en) | Dispatching automation monitoring information analyzing and processing system and method | |
| CN106709659A (en) | LNG gas station equipment management system | |
| CN212990152U (en) | Agricultural sewage management system | |
| CN107065759A (en) | Coating process process data acquisition method and system | |
| CN115760065A (en) | Equipment maintenance management system and method | |
| CN207418437U (en) | A kind of purifier intelligent management system | |
| Shimada | Development of Environment for Logical Process Safety Management Based on the Business Process Model |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |