CN109454640A - Method for shortening time length of exchange piece - Google Patents
Method for shortening time length of exchange piece Download PDFInfo
- Publication number
- CN109454640A CN109454640A CN201811351359.8A CN201811351359A CN109454640A CN 109454640 A CN109454640 A CN 109454640A CN 201811351359 A CN201811351359 A CN 201811351359A CN 109454640 A CN109454640 A CN 109454640A
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- Prior art keywords
- arm
- changing plate
- support plate
- duration
- film releasing
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- 238000000034 method Methods 0.000 title claims abstract description 34
- 238000004904 shortening Methods 0.000 title claims abstract description 26
- 230000007246 mechanism Effects 0.000 claims description 29
- 238000004519 manufacturing process Methods 0.000 abstract description 15
- 230000008569 process Effects 0.000 abstract description 4
- 230000007423 decrease Effects 0.000 description 10
- 230000000694 effects Effects 0.000 description 7
- 230000000630 rising effect Effects 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1679—Programme controls characterised by the tasks executed
- B25J9/1682—Dual arm manipulator; Coordination of several manipulators
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention is suitable for the technical field of carrying equipment, and provides a method for shortening the time length of an exchange piece, which comprises the following steps: the first arm moves from the initial position to a film taking position to take the film; the first arm returns to the initial position; the second arm moves from the original position to the film placing position to place the film; the second arm returns to the original position. According to the invention, the first arm is moved to the position below the film taking position, so that the lifting speed of the first arm can be increased in the process of lifting the first arm to take the film, and when the first arm returns to the initial position to take the film, the returning speed of the first arm can also be increased; similarly, in the process of lowering and placing the second arm, the lowering speed of the second arm can be increased, and when the second arm is placed back to the original position, the returning speed of the second arm can also be increased. Therefore, the time length of the exchange piece can be shortened by increasing the moving speed of the first arm and the second arm, and the production efficiency is improved.
Description
Technical field
The present invention is suitable for haulage equipment technical field, is to be related to a kind of side for shortening changing plate duration more specifically
Method.
Background technique
In the array yellow light process of display equipment, transfer robot needs to carry out sheet glass swap operation with objective table.
Transfer robot includes the first arm, the second arm, expansion bracket and the driving dress for driving the expansion bracket to stretch in the Z-axis direction
It sets, it is mobile with Y direction along the x axis respectively that transfer robot can realize the first arm and the second arm, to realize and carry
Object platform completes changing plate operation.
Currently, the first arm of transfer robot, the second arm movement speed during changing plate are slower, arc is acted
Spend the camber line arc larger, i.e. that the mobile track in the track and Y direction that the first arm or the second arm move along the x axis is formed
Spend larger, and the stroke that expansion bracket drives the first arm, the second arm to move up and down is longer, this results in transfer robot and carries
Object platform changing plate duration is very long, seriously affects production efficiency.
Summary of the invention
The purpose of the present invention is to provide a kind of methods for shortening changing plate duration, to solve transfer robot and objective table
The problem that the duration of changing plate is longer and causes production efficiency low.
To achieve the above object, the technical solution adopted by the present invention is that: provide it is a kind of shorten changing plate duration method, base
Implement in changing plate equipment, the changing plate equipment includes the first arm, the second arm, for supporting first arm respectively
With the expansion bracket of second arm and for driving first arm, second arm and the expansion bracket respectively
Mobile driving device, which comprises
First arm moves to the lower section for taking piece position from initial position;
First arm rise to it is described take at piece position and obtain this take the first object object on piece position;
First arm is back to the initial position after continuing to rise to predeterminated position;
Second arm for being loaded with the second object moves to the top of film releasing position from home position;
Second arm drops at the film releasing position and second object is placed on the film releasing position;
Second arm continues to be back to the home position after dropping to target position.
In one embodiment, when first arm is located at the initial position, the first-hand arm rest is closely described
Take piece position one end and this to take horizontal distance range between piece position be 1550mm-1600mm.
In one embodiment, when first arm is located at the initial position, the first-hand arm rest is closely described
Take piece position one end and this to take horizontal distance between piece position be 1580mm.
In one embodiment, when second arm is located at the home position, second-hand's arm rest is closely described
Horizontal distance range between one end of film releasing position and the film releasing position is 1550mm-1600mm.
In one embodiment, when second arm is located at the home position, second-hand's arm rest is closely described
Horizontal distance between one end of film releasing position and the film releasing position is 1580mm.
In one embodiment, when first arm moves to the predeterminated position, the altitude range of the expansion bracket
For 105mm-115mm.
In one embodiment, when second arm moves to target position, the altitude range of the expansion bracket is
30mm-40mm。
In one embodiment, first arm is connected with second arm, and second arm is set on described
Above first arm, first arm is set on the expansion bracket.
In one embodiment, first arm is including the first support plate and for driving first support plate mobile
The first driving mechanism, first support plate is connected with first driving mechanism, and first driving mechanism is set to described
On expansion bracket, setting is parallel to the horizontal plane in first support plate.
In one embodiment, second arm is including the second support plate and for driving second support plate mobile
The second driving mechanism, second support plate is connected with second driving mechanism, and second driving mechanism is set to described
In first driving mechanism, second support plate and the first support plate parallel interval are arranged.
A kind of beneficial effect of method shortening changing plate duration provided by the invention is: the present invention passes through will be first-hand
Arm moves to the lower section for taking piece position, during the rising of the first arm takes piece, the rate of climb of the first arm can be improved, when the
When one arm takes piece to be back to initial position, the return speed of the first arm can also be increased;Similarly, decline film releasing in the second arm
During, the decrease speed of the second arm can be improved, when the second arm film releasing is back to home position, second can also be increased
The return speed of arm.It therefore, can be by the movement speed of increase the first arm and the second arm, when so as to shorten changing plate
It is long, and then improve production efficiency.
Detailed description of the invention
It to describe the technical solutions in the embodiments of the present invention more clearly, below will be to embodiment or description of the prior art
Needed in attached drawing be briefly described, it should be apparent that, the accompanying drawings in the following description is only of the invention some
Embodiment for those of ordinary skill in the art without any creative labor, can also be according to these
Attached drawing obtains other attached drawings.
Fig. 1 is a kind of flow diagram of method for shortening changing plate duration provided in an embodiment of the present invention;
Fig. 2 is the structural schematic diagram of changing plate equipment provided in an embodiment of the present invention.
Wherein, each attached drawing main mark in figure:
The first arm of 1-;The first support plate of 11-;The first driving mechanism of 12-;
The second arm of 2-;The second support plate of 21-;The second driving mechanism of 22-;
3- expansion bracket;4- driving device.
Specific embodiment
In order to which technical problems, technical solutions and advantages to be solved are more clearly understood, tie below
Accompanying drawings and embodiments are closed, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is only
To explain the present invention, it is not intended to limit the present invention.
It should be noted that it can be directly another when element is referred to as " being fixed on " or " being set to " another element
On one element or indirectly on another element.When an element is known as " being connected to " another element, it can
To be directly to another element or be indirectly connected on another element.
In addition, term " first ", " second " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance
Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or
Implicitly include one or more of the features.In the description of the present invention, the meaning of " plurality " is two or more,
Unless otherwise specifically defined.
In the description of the present invention, it is to be understood that, term " center ", " length ", " width ", " thickness ", "upper",
The orientation or position of the instructions such as "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside"
Relationship is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of description of the present invention and simplification of the description, without referring to
Show or imply that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore cannot manage
Solution is limitation of the present invention.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected;It can
To be mechanical connection, it is also possible to be electrically connected;It can be directly connected, can also can be indirectly connected through an intermediary
The interaction relationship of connection or two elements inside two elements.It for the ordinary skill in the art, can be with
The concrete meaning of above-mentioned term in the present invention is understood as the case may be.
For the convenience of description, orthogonal three reference axis are respectively X-axis, Y-axis and Z axis on definition space, wherein X-axis
It is orthogonal two reference axis of same level with Y-axis, Z axis is the reference axis of vertical direction;X-axis, Y-axis and Z axis are located at
Space is mutually perpendicular to there are three plane be respectively the face XY, the face YZ and the face XZ, wherein the face XY is horizontal plane, and the face XZ and the face YZ are
Vertical plane, and the face XZ is vertical with the face YZ.
Also referring to Fig. 1 and Fig. 2, now to a kind of method progress for shortening changing plate duration provided in an embodiment of the present invention
Explanation.The method of the shortening changing plate duration includes changing plate equipment, which includes setting in the plane flexible
Frame 3, the first arm 1 being separately positioned on expansion bracket 3 and the second arm 2 and driving dress for driving expansion bracket 3 mobile
4 are set, the first arm 1, the second arm 2 and expansion bracket 3 are connected with driving device 4 respectively.Expansion bracket 3 can be in the drive of driving device 4
Movement is extended or is shortened up and down along Z-direction with lower;First arm 1 can be under the driving effect of driving device 4, can be flexible
It is mobile with Y direction along the x axis on frame 3;Second arm 2 can also be under the driving effect of driving device 4, can be in expansion bracket 3
On it is mobile with Y direction along the x axis, and be interval setting, the first arm 1 and second between the first arm 1 and the second arm 2
It works and is independent of each other between arm 2.
When changing plate equipment and objective table swap piece, changing plate equipment can be mobile robot, in driving device 4
Under driving effect, the first arm 1 and the second arm 2 can realize moving along XYZ axis direction;It is provided on objective table and takes piece position
With film releasing position, which can realize moving along Z-direction.
The step of swapping piece between changing plate equipment and objective table include:
S1. the first arm 1 moves to the lower section for taking piece position of objective table from initial position.First arm 1 is in driving device 4
Driving effect under, the lower section for taking piece position is moved to Y direction along the x axis.
S2. the first arm 1, which rises to, takes at piece position and obtains this and take the first object object on piece position.In driving device
Under 4 driving effect, expansion bracket 3 rises along Z-direction, and the first arm 1 and the second arm 2 is driven to move up together, and first
After the arrival of arm 1 takes piece position, obtains this and take the first object object on piece position.
S3. the first arm 1 continues to rise to after predeterminated position and is back to initial position.When the first arm 1 obtains first
After object, driving device 4 continues that the first arm 1 is driven to rise to predeterminated position, and then the first arm 1 is along the x axis and Y-axis
Direction is mobile, to avoid taking piece position and drop to initial position under the drive of expansion bracket 3.
S4. be loaded with the second object the second arm 2 moved to from home position objective table film releasing position top.Second
Arm 2 is moved to the top of film releasing position under the driving effect of driving device 4 with Y direction along the x axis.
S5. the second arm 2 drops at film releasing position and the second object is placed on the film releasing position.It is filled in driving
It sets under 4 driving effect, expansion bracket 3 declines along Z-direction, and drive the first arm 1 and the second arm 2 to move down together, the
After two arms 2 reach film releasing position, the second object on the film releasing position is obtained.
S6. the second arm 2 continues to drop to behind target position and is back to home position.When the second arm 2 obtains second
After object, driving device 4 continues that the second arm 2 is driven to drop to target position, and then the second arm 2 is along the x axis and Y-axis
Direction is mobile, to avoid film releasing position and rise to home position under the drive of expansion bracket 3.
A kind of method shortening changing plate duration provided by the invention, the present invention take piece position by moving to the first arm 1
During the rising of the first arm 1 takes piece the rate of climb of the first arm 1 can be improved, when the first arm 1 takes in the lower section set
When piece is back to initial position, the return speed of the first arm 1 can also be increased;Similarly, in the process of the second arm 2 decline film releasing
In, the decrease speed of the second arm 2 can be improved, when 2 film releasing of the second arm is back to home position, can also increase by the second arm
2 return speed.It therefore, can be by the movement speed of increase the first arm 1 and the second arm 2, so as to shorten changing plate equipment
The duration of changing plate between objective table, and then improve production efficiency.
In step S2, the rate of climb of the first arm 1 promotes 20%.It is first-hand in display assembling production process
Arm 1 is 5m/s from the movement speed being moved to below piece position take from piece position is taken.By by the rate of climb of the first arm 1
It is promoted to 6m/s, the first arm 1 can be improved takes piece speed, and then can shorten the changing plate between changing plate equipment and objective table
Duration improves production efficiency.
In step S5, the decrease speed of the second arm 2 promotes 20%.In display assembling production process, second-hand
It is 5m/s that arm 2 is moved to the movement speed from film releasing position above film releasing position.By by the decrease speed of the second arm 2
It is promoted to 6m/s, the film releasing speed of the second arm 2 can be improved, and then the changing plate between changing plate equipment and objective table can be shortened
Duration improves production efficiency.
In step S3, the first arm 1 promotes 20% from the speed for taking piece position to move to initial position.Specifically, first
Arm 1 continues to rise to predeterminated position after taking piece, then drops to initial position from predeterminated position.It is risen in the first arm 1
During predeterminated position, the rate of climb of the first arm 1 is promoted to 6m/s by 5m/s;In the first arm 1 under predeterminated position
During being down to initial position, the decrease speed of the first arm 1 is also promoted to 6m/s by 5m/s.By increasing by the first arm 1
Movement speed, and then the changing plate duration between changing plate equipment and objective table can be shortened, improve production efficiency.
In step S6, the second arm 2 is promoted to from the speed that film releasing position moves to home position by initial 30%
50%.Specifically, continue to drop to target position after 2 film releasing of the second arm, then rise to home position from target position.?
During second arm 2 drops to target position, the decrease speed of the second arm 2 is promoted to 6m/s by 5m/s;In second-hand
During arm 2 rises to home position from target position, the rate of climb of the second arm 2 is promoted to 6m/s by 5m/s.Pass through
Increase the movement speed of the second arm 2, and then the changing plate duration between changing plate equipment and objective table can be shortened, improves production
Efficiency.
Further, also referring to Fig. 1 and Fig. 2, as the side provided in an embodiment of the present invention for shortening changing plate duration
A kind of specific embodiment of method, in step s3, when the first arm 1 moves to predeterminated position, the altitude range of expansion bracket 3 is
105mm-115mm.Preferably, the height of expansion bracket 3 is 110mm at this time.Currently, needing to continue after the first arm 1 takes piece
After rising, and one end distance is moved along the y axis to avoid taking piece position, to return to initial position.By by predeterminated position
Height turn down, can reduce expansion bracket 3 rising stroke, and then shorten changing plate duration, improve changing plate efficiency.
Further, also referring to Fig. 1 and Fig. 2, as the side provided in an embodiment of the present invention for shortening changing plate duration
A kind of specific embodiment of method, in step s 6, when the second arm 2 moves to target position, the altitude range of expansion bracket 3 is
30mm-40mm.Preferably, the height of expansion bracket 3 is 35mm at this time.Currently, needing to continue to decline after the second 2 film releasing of arm
Afterwards, and along the y axis one end distance is moved to avoid film releasing position, to return to original position.By by target position
Height increases, and can reduce the stroke of the decline of expansion bracket 3, and then shorten changing plate duration, improve changing plate efficiency.
Further, also referring to Fig. 1 and Fig. 2, as the side provided in an embodiment of the present invention for shortening changing plate duration
A kind of specific embodiment of method, when the first arm 1 is located at initial position, the first arm 1 close to take one end of piece position with
It is 1550mm-1600mm that this, which takes the horizontal distance range between piece position,.Preferably, the first arm 1 is close to taking the one of piece position
It holds and this takes the horizontal distance between piece position for 1580mm.Currently, the first arm 1 end and objective table take piece position it
Between horizontal distance be 2075mm.By by the first arm 1 close to the horizontal distance for taking one end of piece position to take with this piece position
Adjustment drops to 1580mm, and in step sl, the first arm 1 needs to be moved to the lower section for taking piece position along the x axis, therefore can
The stroke that the first arm 1 is moved at the lower section for taking piece position is reduced, so as to shorten between changing plate equipment and objective table
Changing plate duration improves production efficiency.
Further, also referring to Fig. 1 and Fig. 2, as the side provided in an embodiment of the present invention for shortening changing plate duration
A kind of specific embodiment of method, when second arm 2 is located at the home position, second arm 2 is close to described
Horizontal distance range between one end of film releasing position and the film releasing position is 1550mm-1600mm.Preferably, the second arm 2
Horizontal distance between one end and the film releasing position of film releasing position is 1580mm.Currently, end and the load of the second arm 2
Horizontal distance between the film releasing position of object platform is 2075mm.By the way that the second arm 2 is put close to one end of film releasing position with this
The horizontal distance adjustment of piece position drops to 1580mm, and in step s 4, the second arm 2 needs to be moved to film releasing along the x axis
The top of position, therefore the stroke that the second arm 2 is moved at the top of film releasing position can be reduced, it is set so as to shorten changing plate
The standby changing plate duration between objective table improves production efficiency.
Further, referring to Figure 2 together, one as the method provided in an embodiment of the present invention for shortening changing plate duration
Kind specific embodiment, the first arm 1 are connected with the second arm 2, and the second arm 2 is set to 1 top of the first arm, the first arm
1 is set on expansion bracket 3, and the first arm 1 is between the second arm 2 and expansion bracket 3.This structure, expansion bracket 3 move down along Z axis
When dynamic, the first arm 1 and the second arm 2 can be driven to move up and down simultaneously, the first arm 1 and the second arm 2 are also able to achieve in Y-axis
It is mobile while direction, the consistency that the first arm 1 and the second arm 2 move up and down can be improved, and then improve and pick and place piece efficiency.
Further, referring to Figure 2 together, one as the method provided in an embodiment of the present invention for shortening changing plate duration
Kind specific embodiment, the first arm 1 include the first support plate 11 and the first driving for driving the first support plate 11 mobile
Mechanism 12, the first support plate 11 are connected with the first driving mechanism 12, and the first driving mechanism 12 is set on expansion bracket 3, the first support
Setting is parallel to the horizontal plane in plate 11.This structure can drive the first support plate 11 flexible along X-axis by the first driving mechanism 12.When
When first arm 1 needs to take piece, the first driving mechanism 12 drives the first support plate 11 along the x axis to front stretching, and takes
First object object on piece position;After the completion of taking piece, the first driving mechanism 12 drives the first support plate 11 along the x axis backward
It retracts, and then shortens the shift motion of the first arm 1, improve changing plate efficiency.
Further, referring to Figure 2 together, one as the method provided in an embodiment of the present invention for shortening changing plate duration
Kind specific embodiment, the second arm 2 include the second support plate 21 and the second driving for driving the second support plate 21 mobile
Mechanism 22, the second support plate 21 are connected with the second driving mechanism 22, and the second driving mechanism 22 is set in the first driving mechanism 12, the
Two support plates 21 and 11 parallel interval of the first support plate are arranged.This structure can drive the second support by the second driving mechanism 22
Plate 21 is flexible along X-axis.When the second arm 2 needs to take piece, the second driving mechanism 22 drive the second support plate 21 along the x axis to
Front stretching, and obtain the second object on film releasing position;After the completion of film releasing, the second driving mechanism 22 drives the second support plate
21 retract backward along the x axis, and then shorten the shift motion of the second arm 2, improve changing plate efficiency.
The radian of the arching trajectory of first support plate 11 in the horizontal plane is 5 °.First support plate 11 is after taking piece along X-axis
It needs to bounce back along Y-axis, the arching trajectory that the first support plate 11 is formed in the horizontal plane.Currently, the first support plate 11 is along X-axis and Y
The radian of the mobile arching trajectory formed of axis direction is 10 °.By by the first support plate 11 in the horizontal plane along X-axis and Y-axis side
Be decreased to 5 ° to the radian of mobile arching trajectory, can shorten the stroke of the first support plate 11, so shorten changing plate equipment with
Changing plate duration between objective table improves production efficiency.
The radian of the arching trajectory of second support plate 21 in the horizontal plane is 5 °.Second support plate 21 is after taking piece along X-axis
It needs to bounce back along Y-axis, the arching trajectory that the second support plate 21 is formed in the horizontal plane.Currently, the second support plate 21 is along X-axis and Y
The radian of the mobile arching trajectory formed of axis direction is 10 °.By by the second support plate 21 in the horizontal plane along X-axis and Y-axis side
Be decreased to 5 ° to the radian of mobile arching trajectory, can shorten the stroke of the second support plate 21, so shorten changing plate equipment with
Changing plate duration between objective table improves production efficiency.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (10)
1. it is a kind of shorten changing plate duration method, based on changing plate equipment implement, the changing plate equipment include the first arm,
Second arm, the expansion bracket for supporting first arm and second arm respectively and for respectively drive described in
The mobile driving device of first arm, second arm and the expansion bracket, which is characterized in that the described method includes:
First arm moves to the lower section for taking piece position from initial position;
First arm rise to it is described take at piece position and obtain this take the first object object on piece position;
First arm is back to the initial position after continuing to rise to predeterminated position;
Second arm for being loaded with the second object moves to the top of film releasing position from home position;
Second arm drops at the film releasing position and second object is placed on the film releasing position;
Second arm continues to be back to the home position after dropping to target position.
2. a kind of method for shortening changing plate duration as described in claim 1, it is characterised in that: when first arm is located at
When the initial position, the nearly described one end for taking piece position of the first-hand arm rest and this take the horizontal distance model between piece position
It encloses for 1550mm-1600mm.
3. a kind of method for shortening changing plate duration as claimed in claim 2, it is characterised in that: when first arm is located at
When the initial position, the nearly described one end for taking piece position of the first-hand arm rest and this take the horizontal distance between piece position to be
1580mm。
4. a kind of method for shortening changing plate duration as described in claim 1, it is characterised in that: when second arm is located at
Horizontal distance model when the home position, between one end and the film releasing position of the closely described film releasing position of second-hand's arm rest
It encloses for 1550mm-1600mm.
5. a kind of method for shortening changing plate duration as claimed in claim 4, it is characterised in that: when second arm is located at
When the home position, the horizontal distance between one end and the film releasing position of the closely described film releasing position of second-hand's arm rest is
1580mm。
6. a kind of method for shortening changing plate duration as described in any one in claim 1-5, it is characterised in that: when described first
When arm moves to the predeterminated position, the altitude range of the expansion bracket is 105mm-115mm.
7. a kind of method for shortening changing plate duration as described in any one in claim 1-5, it is characterised in that: when described second
When arm moves to target position, the altitude range of the expansion bracket is 30mm-40mm.
8. a kind of method for shortening changing plate duration as described in any one in claim 1-5, it is characterised in that: described first-hand
Arm is connected with second arm, and second arm is set to above first arm, and first arm is set to described
On expansion bracket.
9. a kind of method for shortening changing plate duration as described in any one in claim 1-5, it is characterised in that: described first-hand
Arm includes the first support plate and the first driving mechanism for driving first support plate mobile, first support plate and institute
It states the first driving mechanism to be connected, first driving mechanism is set on the expansion bracket, and first support plate and horizontal plane are flat
Row setting.
10. a kind of method for shortening changing plate duration as claimed in claim 9, it is characterised in that: second arm includes
Second support plate and the second driving mechanism for driving second support plate mobile, second support plate and described second
Driving mechanism is connected, and second driving mechanism is set in first driving mechanism, second support plate and described first
The setting of support plate parallel interval.
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CN1603897A (en) * | 2003-10-01 | 2005-04-06 | 周星工程股份有限公司 | Apparatus having conveyor and method of transferring substrate using the same |
CN101842303A (en) * | 2007-10-31 | 2010-09-22 | 旭硝子株式会社 | Container exchanging device and container exchanging method |
CN102113107A (en) * | 2008-08-01 | 2011-06-29 | 爱发科股份有限公司 | Transfer robot control method |
CN102129963A (en) * | 2010-11-25 | 2011-07-20 | 深圳市华星光电技术有限公司 | Dual-arm mechanical arm and method for moving plates by using same |
CN103213124A (en) * | 2012-01-24 | 2013-07-24 | 株式会社安川电机 | Robot system |
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