CN109425627B - Multi-degree-of-freedom sample rod - Google Patents
Multi-degree-of-freedom sample rod Download PDFInfo
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- CN109425627B CN109425627B CN201811034050.6A CN201811034050A CN109425627B CN 109425627 B CN109425627 B CN 109425627B CN 201811034050 A CN201811034050 A CN 201811034050A CN 109425627 B CN109425627 B CN 109425627B
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- 239000000919 ceramic Substances 0.000 claims abstract description 62
- 238000003825 pressing Methods 0.000 claims description 134
- 238000000576 coating method Methods 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000013519 translation Methods 0.000 abstract description 5
- 239000000523 sample Substances 0.000 description 85
- 230000033001 locomotion Effects 0.000 description 18
- 210000000078 claw Anatomy 0.000 description 15
- 230000005540 biological transmission Effects 0.000 description 10
- 230000003068 static effect Effects 0.000 description 8
- 230000004323 axial length Effects 0.000 description 6
- 238000011065 in-situ storage Methods 0.000 description 6
- 238000009434 installation Methods 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000008188 pellet Substances 0.000 description 5
- 238000005266 casting Methods 0.000 description 4
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- 230000005484 gravity Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000014509 gene expression Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000013013 elastic material Substances 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000000741 silica gel Substances 0.000 description 2
- 229910002027 silica gel Inorganic materials 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000007743 anodising Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004627 transmission electron microscopy Methods 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2204—Specimen supports therefor; Sample conveying means therefore
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2007—Holding mechanisms
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Abstract
The multi-degree-of-freedom sample rod is provided with a nanometer positioner, the nanometer positioner comprises a driving piece, the driving piece is a piezoelectric ceramic tube, the piezoelectric ceramic tube is a hollow tube body, one end of the piezoelectric ceramic tube is fixed with a joint ball, and the other end of the piezoelectric ceramic tube is arranged on the sample rod; the piezoelectric ceramic tube is provided with an inner surface and an outer surface, a plurality of conductive area groups are arranged on one surface of the piezoelectric ceramic tube, each conductive area group comprises two symmetrical conductive areas, all the conductive areas are mutually independent, and each conductive area is provided with a conductive wire; the other surface of the piezoelectric ceramic tube is a whole area conductive part. The invention has the advantages of three degrees of freedom of X-axis translation, Y-axis translation and Z-axis rotation and stable performance in repeated use.
Description
Technical Field
The invention relates to a sample rod used under an electron microscope and a transmission electron microscope.
Background
In situ observation techniques have a long history in transmission electron microscopy studies. By applying various physical actions on a sample and observing the change of the microstructure and the chemical state of the material by using a transmission electron microscope (transmission electron microscope), the performance expression of the material or a device in the actual use process can be directly researched, and the method has important practical significance for the research of the material performance. The difficulty of the in-situ technique in the transmission electron microscope lies in that not only the physical action needs to be accurately applied to the sample, but also a series of harsh conditions are required to be met, for example, the ultra-high vacuum degree of the electron microscope system needs to be maintained, the extremely high stability of the sample stage is ensured, the imaging light path cannot be interfered, and the whole structure needs to be compact so as to be suitable for a narrow sample chamber of the transmission electron microscope and the like. Therefore, the difficulty of the in-situ electron microscope technology is mainly reflected in the research and manufacture of the in-situ sample rod.
An article "Compact design of a transmission electron microscope-scanning tunneling microscope holder with a three-dimensional core motion", published in 2003 by Svensson, k.et al, sweden, discloses a three-dimensional piezoelectric probe which is a part of a sample rod of a transmission electron microscope, the piezoelectric probe comprising a piezoelectric ceramic tube and a pellet, the pellet being fixed to the piezoelectric ceramic tube, the pellet having a sample holder holding the pellet by a flexible wire claw, the piezoelectric ceramic tube controlling the pellet to make a cyclic motion of a minute amplitude of "slow movement and rapid withdrawal" (the axial direction of the piezoelectric ceramic tube is less than 2.5 micrometers, and the other two directions are less than 30 micrometers). The small ball is gripped by the flexible wire claw through friction force, the piezoelectric ceramic tube makes circular motion, and the sample holder is continuously swung through the friction force between the flexible wire claw and the small ball, so that displacement control (rough adjustment) with large stroke and large step length is generated. The displacement control (fine adjustment) which is smaller in stroke and continuously adjustable and is generated by the piezoelectric ceramic tube is combined, and the accurate displacement control of the large stroke (about 3 mm) with three degrees of freedom (one degree of freedom in axial translation and two degrees of freedom in rotation around a small ball) can be realized in a small space in an accumulated mode. The three-dimensional piezoelectric probe is applied to a NanoEx 3D STM/EP system and a NanoEx 3D lndentor system of the company FEl in the USA, and realizes in-situ STM, in-situ indentation and electrical probing under a transmission electron microscope.
The disadvantages of such three-dimensional probes are: 1. the flexible wire claws are easy to deform, the shape of the flexible wire claws needs to be adjusted frequently in order to keep the friction force between the flexible wire claws and the small ball, but the number of the flexible wire claws is multiple, and the consistency of each flexible wire claw cannot be guaranteed, so that the precision of the three-dimensional probe is lower along with the use time and times. 2. The length of the flexible wire claw enables a gap to be reserved between the sample holder and the small ball, and when the small ball moves circularly, the sample holder is far away from the small ball or is close to the small ball along the wire claw, so that the axial displacement of the sample is realized, but the sample holder is hung on the small ball through the flexible wire claw, the sample holder and the sample on the sample holder can fall downwards under the action of gravity, and the position precision is not high. The viewing range in the transmission electron microscope is nanometer and micron, and the position deviation of the sample under the action of gravity is likely to cause the sample to deviate from the viewing range of the electron microscope and cannot be observed; and the presence of positional deviation makes it difficult to adjust the sample to a position and angle suitable for observation. 3. When the probe clamping device moves back and forth along the axial direction of the piezoelectric ceramic tube, the relationship between the shape of the flexible wire claw and the friction force is complex, and the adjustment of the shape of the flexible wire claw is difficult to ensure that the friction force is always appropriate. In addition, the probe clamping device is influenced by gravity, so that the combined movement is easy to generate during coarse adjustment, and the probe is difficult to accurately control; even because the shape of the flexible wire claw is not properly adjusted, the flexible wire claw cannot grab the small ball, and the probe clamping device can fall into the equipment to cause the damage of the equipment.
Disclosure of Invention
The invention aims to provide a multi-freedom-degree sample rod which has three degrees of freedom of X-axis translation, Y-axis translation and Z-axis rotation and has stable performance in repeated use.
The multi freedom sample pole, its characterized in that: the sample rod is provided with a nanometer positioner, the nanometer positioner comprises a driving piece, a joint ball and a pressing piece assembly, the joint ball is fixed with the driving piece, the pressing piece assembly comprises at least two pressing pieces and an elastic connecting assembly, the elastic connecting assembly is connected with the adjacent pressing pieces, the joint ball is embraced by the pressing piece assembly, and a pre-tightening force is arranged between the pressing pieces and the joint ball. Such as a piezo ceramic tube as the driver.
Casting die
Preferably, each pressing piece is provided with a concave part and a connecting part respectively, the elastic connecting assembly is arranged between the connecting parts of the adjacent pressing pieces, and the concave parts of all the pressing pieces form a concave groove matched with the joint ball. The concave groove is in line contact with the joint ball or surface contact or point contact; the elastic connecting part enables a pretightening force to be formed between the pressing piece and the joint ball, and when the joint ball is static or the driving piece drives the joint ball to move slowly, the static friction force between the joint ball and the pressing piece enables the pressing piece to be static relative to the shutdown ball. When the driving piece drives the joint ball to reset quickly, sliding friction force is generated between the joint ball and the pressing piece, and the joint ball resetting pressing piece keeps in the original position and does not reset along with the joint ball.
Preferably, the dimples are hemispherical, or V-shaped, or conical.
Preferably, the pressing member is a one-piece plate body, and the recessed portion is located in the center of the plate body.
Preferably, the compression element is located on the outside of the ball. When the sample rod is vertically placed, the nanometer positioner faces upwards, and the two sides are the outer sides of the sample rod in the vertical placement, left, right, front and back. Preferably, each pressing piece is provided with a sample clamping part, and all the sample clamping parts form a sample clamp. When all the pressing pieces are assembled in place, the sample holding parts are combined into a sample clamp, and the sample clamp is used for installing samples. During installation, the pressing piece is used for holding the joint ball from two sides of the joint ball, and the elastic connecting assembly provides pre-tightening force between the pressing piece and the joint ball.
Preferably, the pressing piece comprises a first pressing piece and a second pressing piece, a plurality of mounting positions are uniformly distributed around the recessed portion of the first pressing piece and the recessed portion of the second pressing piece respectively, each mounting position corresponds to one elastic connecting assembly, and the mounting position of the first pressing piece is aligned with the mounting position of the second pressing piece. Therefore, one end of the elastic connecting assembly is mounted at the mounting position of the first pressing piece, the other end of the elastic connecting assembly is mounted at the mounting position of the second pressing piece, the elastic force of the elastic connecting assembly is located on the same straight line, and torque is not generated.
Preferably, the first pressing member and the second pressing member are respectively located on both sides of the joint ball. Or the first pressing piece is arranged above the second pressing piece, and the concave groove of the second pressing piece is a through hole. The inner wall of the through hole is in a hemispherical shape, a V shape or a conical shape, etc. Preferably, the first pressing member is provided with a sample holder.
Preferably, the first element has a wear resistant layer on the surface of the dimple. Preferably, the dimpled surface of the second element has a wear resistant layer.
Elastic connecting assembly
Preferably, the elastic connection assembly is a spring or an elastic column (such as a silica gel column, a rubber column, etc.) made of an elastic material, one end of the elastic connection assembly is fixed with the first pressing member, and the other end of the elastic connection assembly is fixed with the second pressing member. After the two pressing pieces hold the joint ball, the elastic connecting assembly is in a deformation state, and the restoring force of the elastic connecting assembly provides pre-tightening force between the two pressing pieces and the joint ball.
Or the elastic connecting assembly consists of a screw rod and a spring, the spring is sleeved on the screw rod, the spring is positioned between the screw rod and the first pressing piece, and the mounting position of the second pressing piece is a screw hole meshed with the screw rod. After the screw rod is meshed with the mounting position of the second pressing piece, the spring is in a compressed state, the spring pushes the first pressing piece to the second pressing piece, and the spring provides pre-tightening force between the first pressing piece and the joint ball and between the second pressing piece and the joint ball.
Preferably, the mounting position of the first pressing piece is a through hole, and the through hole is in clearance fit with the screw rod. No friction exists between the through hole and the screw rod, and the first pressing piece is pushed by the spring.
Preferably, the screw rod extends out of the mounting hole of the second pressing piece, or a fixing part is arranged between the screw rod and the second pressing piece. For example, after the second pressing member is mounted in place, the screw and the second pressing member are welded or bonded. When the joint ball moves circularly to drive the first pressing piece and the second pressing piece to move, the first pressing piece and the second pressing piece swing to cause impact between the screw rod and the second pressing piece, so that the screw rod is loosened and even separated from the second pressing piece; loosening of the screw will affect the precise control of the position; the screw rod breaks away from the second casting die, then causes two casting dies and sample to drop, damages the electron microscope.
The pretightening force between the pressing piece and the joint ball is adjusted by the screwing degree of the screw rod in a screw rod and spring mode, so that the manufacturing requirement on the elasticity is reduced.
Driving member
Preferably, the driving part is a piezoelectric ceramic tube, the piezoelectric ceramic tube is a hollow tube body, one end of the piezoelectric ceramic tube is fixed with the joint ball, and the other end of the piezoelectric ceramic tube is arranged on the sample rod; the piezoelectric ceramic tube is provided with an inner surface and an outer surface, a plurality of conductive area groups are arranged on one surface of the piezoelectric ceramic tube, each conductive area group comprises two symmetrical conductive areas, all the conductive areas are mutually independent, and each conductive area is provided with a conductive wire; the other surface of the piezoelectric ceramic tube is a whole area conductive part. By a full area conductive portion is meant that the conductive coating completely covers all of the conductive area of the other surface.
Preferably, the conductive area group is arranged on the outer surface of the piezoelectric ceramic tube, and the whole conductive area group is arranged on the inner surface of the piezoelectric ceramic tube. Or the conductive area group is arranged on the inner surface of the piezoelectric ceramic tube, and the whole conductive area group is arranged on the outer surface of the piezoelectric ceramic tube. If the conductive area groups are uniformly distributed along the outer (inner) surface of the piezoelectric ceramic tube, the whole conductive area covers the inner (outer) surface, and the axial length of the whole conductive area is equal to that of the single conductive area, or the axial length of the whole conductive area is longer than that of the single conductive area.
Preferably, there is an insulating coating between adjacent conductive regions.
Preferably, the two conductive regions of each conductive region group have opposite voltage directions, with only one conductive region group being energized at a time, or a plurality of conductive region groups being energized at a time.
As preferred scheme, the joint ball passes through the ball seat and links to each other with piezoceramics pipe, and the ball seat includes the connecting rod fixed with the joint ball and the connecting seat fixed with piezoceramics pipe, and the connecting rod is less than the joint ball, and the cross section equidimension of connecting seat and piezoceramics pipe. During installation, the connecting pipe penetrates through the concave through hole of the pressing piece, the concave of the pressing piece is in contact with the joint ball, and the connecting pipe is fixed with the connecting seat.
As preferred scheme, connecting rod and connecting seat are detachable fastening connection. Such as a threaded connection, keyed connection, etc. Therefore, the push-down piece is convenient to disassemble, assemble and replace.
The invention has the advantages that: 1. the elastic connecting assembly is used for providing pre-tightening force between the pressing piece and the joint ball, so that stable static friction force and dynamic friction force exist between the pressing piece and the joint ball, the static friction force is used for supporting the sample, the sample holder and the pressing piece, the influence of gravity on the sample is removed, and the displacement control precision is improved. 2. The nano positioner has the advantages of small number of parts, concise and clear connection relation, easy production and easy adjustment and calibration. 3. The concave groove is matched with the joint ball, the position between the pressing piece and the joint ball is stable, the connection relation between the pressing pieces is stable, and the nano positioner is prevented from falling off.
Drawings
Fig. 1 is a schematic view of a piezoelectric ceramic tube used in the present invention.
Fig. 2 is a schematic diagram of a nano-actuator.
Fig. 3 is a schematic view of a first sample holder.
Fig. 4 is a schematic view of a second sample holder.
Fig. 5 is a schematic view of a third sample holder.
Fig. 6 is a graph of the effect of the present invention on a sample observed under a transmission electron microscope, wherein a.b.c is the large step motion of a single step using a larger saw tooth peak-to-peak drive and d.e.f is the small step motion of a single step using a smaller saw tooth peak-to-peak drive.
Detailed Description
As shown in fig. 2, the sample rod with multiple degrees of freedom is provided with a nanometer positioner, the nanometer positioner comprises a driving part 1, a joint ball 3 and a pressing part assembly, the joint ball 3 is fixed with the driving part 1, the pressing part assembly comprises at least two pressing parts and an elastic connection assembly 4, the elastic connection assembly 4 is connected with the adjacent pressing parts, the pressing part assembly embraces the joint ball 3, and a pretightening force is arranged between the pressing parts and the joint ball 3. For example, a piezo ceramic tube is used as the driver 1.
Casting die
In some embodiments, each compression element has a recess 81 and a connecting portion 82, respectively, and the resilient connecting member 4 is disposed between the connecting portions 82 of adjacent compression elements, with the recesses 81 of all compression elements forming dimples that mate with the joint ball 3. The concave groove is in line contact with the joint ball 3 or in surface contact or point contact; the elastic connecting part 82 enables a pretightening force to be formed between the pressing piece and the joint ball 3, and when the joint ball 3 is static or the driving piece 1 drives the joint ball 3 to move slowly, the static friction force between the joint ball 3 and the pressing piece enables the pressing piece to be static relative to the shutdown ball. When the driving piece 1 drives the joint ball 3 to reset rapidly, sliding friction force is generated between the joint ball 3 and the pressing piece, and the resetting pressing piece of the joint ball 3 keeps in the original position and does not reset along with the joint ball 3.
The dimples are hemispherical, or V-shaped, or conical.
The pressing member is an integral plate body, and the recessed portion 81 is located in the center of the plate body.
The pressing member is located outside the joint ball 3. When the sample rod is vertically placed, the nanometer positioner faces upwards, and the two sides are the outer sides of the sample rod in the vertical placement, left, right, front and back. Preferably, each pressing member is provided with a sample holding portion, and all the sample holding portions constitute the sample holder 8. When all the press parts are fitted in place, the sample holding parts are combined into one sample holder 8, and the sample holder 8 is used for mounting a sample. During installation, the pressing piece is used for holding the joint ball 3 from two sides of the joint ball 3, and the elastic connecting assembly 4 provides pre-tightening force between the pressing piece and the joint ball 3.
As shown in fig. 2, in some embodiments, the pressing member includes a first pressing member 8 and a second pressing member 9, a plurality of mounting positions are uniformly distributed around the recessed portion 81 of the first pressing member 8 and the recessed portion 91 of the second pressing member 9, each mounting position corresponds to one elastic connection assembly 4, and the mounting position of the first pressing member 8 is aligned with the mounting position of the second pressing member 9. Therefore, one end of the elastic connecting component 4 is installed at the installation position of the first pressing piece 8, the other end of the elastic connecting component is installed at the installation position of the second pressing piece 9, the elastic force of the elastic connecting component 4 is located on the same straight line, and torque is not generated. The first pressing piece 8 is arranged above the second pressing piece 9, and the concave groove of the second pressing piece 9 is a through hole. The inner wall of the through hole is in a hemispherical shape, a V shape or a conical shape, etc. The first presser member 8 is provided with a sample holder 8.
Alternatively, the first presser 8 and the second presser 9 are respectively located on both sides of the joint ball 3.
The surface of the concave part of the first pressing piece 8 is provided with a wear-resistant layer. The surface of the concave part of the second pressing piece 9 is provided with a wear-resistant layer. The wear resistant layer is beneficial to keeping the friction stable. The surface of the joint ball 3 is provided with a wear-resistant layer, or the joint ball is made of wear-resistant materials. For example, aluminum or an aluminum alloy, and anodizing the surface of the recess and/or the surface of the joint ball.
When the driving member swings to the left side (or right side, front side, rear side), the nano positioner moves to the side by friction force, and the sample moves to the side. The distance of movement of the sample is proportional to the voltage value of the opposing constant voltages applied to the two sheets of conductive coating. The position of the sample is repeatedly observed, and the voltage value is adjusted according to the position, so that the sample moves to a required position.
Elastic connecting assembly
As shown in fig. 2-4, in some embodiments, the elastic connecting member 4 is a spring or an elastic column (e.g., a silica gel column, a rubber column, etc.) made of an elastic material, and one end of the elastic connecting member 4 is fixed to the first pressing member 8 and the other end is fixed to the second pressing member 9. After the two pressing pieces hold the joint ball 3, the elastic connecting assembly 4 is in a deformation state, and the restoring force of the elastic connecting assembly 4 provides the pre-tightening force between the two pressing pieces and the joint ball 3.
Or, the elastic connecting component consists of a screw rod 41 and a spring 42, the spring 42 is sleeved on the screw rod 41, the spring 42 is positioned between the screw rod 41 and the first pressing piece 8, and the mounting position of the second pressing piece 9 is a screw hole meshed with the screw rod 41. After the screw 41 is engaged with the mounting position of the second pressing member 9, the spring 42 is in a compressed state, the spring 42 pushes the first pressing member 8 towards the second pressing member 9, and the spring 42 provides pre-tightening force between the first pressing member 8, the second pressing member 9 and the joint ball 3. The mounting position of the first pressing member 8 is a through hole, and the through hole is in clearance fit with the screw 41. The through hole has no friction with the screw rod 41, which is beneficial for the spring 42 to push the first pressing piece 8.
In some embodiments, the screw 41 protrudes from the mounting hole 92 of the second presser member 9, or there is a fixing portion between the screw 41 and the second presser member 9; or the screw rod 41 passes through the first pressing piece 8 and the second pressing piece 9 in sequence to be meshed with the nut. For example, after the second presser member 9 is mounted in place, the screw 41 and the second presser member 9 are fixed by welding, bonding, or the like. This is because when the joint ball 3 moves circularly to drive the first pressing member 8 and the second pressing member 9 to displace, the first pressing member 8 and the second pressing member 9 swing to cause impact between the screw 41 and the second pressing member 9, and the screw 41 becomes loose and even separates from the second pressing member 9; loosening of the screw 41 will affect the precise control of the position; the screw 41 is disengaged from the second pressing piece 9, which causes the two pressing pieces and the sample to fall off, and damages the electron microscope. The screw and the second pressing piece are fixed, or the nut is arranged, and the redundant section of threads are reserved, so that the impact of the swinging of the nanometer positioner is buffered or resisted, the phenomenon that the nanometer positioner and a sample fall off due to the fact that the screw is separated from the second pressing piece 9 is avoided, and the stable connection between the pressing piece and the joint ball is kept.
The pretightening force between the pressing piece and the joint ball 3 is adjusted by the screwing degree of the screw rod 41 in a screw rod 41 and spring 42 mode, so that the manufacturing requirement on the elasticity is reduced. The elastic connecting component 4 provides continuous and stable pressure between the pressing component and the joint ball, so that stable friction force exists between the pressing component and the joint ball.
Driving member
As shown in fig. 1, in some embodiments, the driving member 1 is a piezoelectric ceramic tube, which is a hollow tube body, one end of the piezoelectric ceramic tube is fixed with the joint ball 3, and the other end is mounted on the sample rod; the piezoelectric ceramic tube is provided with an inner surface and an outer surface, a plurality of conductive area groups are arranged on one surface of the piezoelectric ceramic tube, each conductive area group comprises two symmetrical conductive areas 13, all the conductive areas 13 are mutually independent, and each conductive area 13 is provided with a conductive wire; the other surface of the piezoelectric ceramic tube is the entire area conductive part 12. The full area conductive portion 12 means that the conductive coating completely covers all conductive areas 13 of the other surface.
As shown in fig. 1, the conductive regions 13 are arranged on the outer surface of the piezoelectric ceramic tube, and the entire region conductive portion 12 is arranged on the inner surface of the piezoelectric ceramic tube. Alternatively, the conductive region 13 is provided on the inner surface of the piezoelectric ceramic tube, and the entire region conductive part 12 is provided on the outer surface of the piezoelectric ceramic tube. For example, if the groups of conductive regions 13 are uniformly distributed along the outer (inner) surface of the piezoelectric ceramic tube, the entire region conductive part 12 covers the inner (outer) surface, and the axial length of the entire region conductive part 12 is equal to the axial length of the single conductive region 13, or the axial length of the entire region conductive part 12 is longer than the axial length of the single conductive region 13. Between adjacent conductive areas 13 there is an insulating coating. The two conductive areas 13 of each group of conductive areas 13 are voltage-oppositely directed, with only one group of conductive areas 13 being energized at a time, or with a plurality of groups of conductive areas 13 being energized at a time.
In some embodiments, the joint ball 3 is connected with the piezoelectric ceramic tube through the ball seat 2, the ball seat 2 includes a connecting rod fixed with the joint ball 3 and a connecting seat fixed with the piezoelectric ceramic tube, the connecting rod is smaller than the joint ball, and the connecting seat has the same size with the cross section of the piezoelectric ceramic tube. During installation, the connecting pipe penetrates through the concave through hole of the lower pressing piece, the concave of the lower pressing piece is contacted with the joint ball 3, and the connecting pipe is fixed with the connecting seat.
The bottom end of a piezoelectric ceramic tube 1 is fixed, a conducting wire is welded on the conducting coating on the inner side surface of the piezoelectric ceramic tube 1 and is kept grounded, four conducting wires are respectively welded on four conducting coatings on the outer side surface of the piezoelectric ceramic tube 1, the other end of each conducting wire is connected to each output end of a voltage amplifier, and then each input end of the voltage amplifier is connected to a function signal generator. The two degrees of freedom of the sample rod can be driven separately. The method for driving the sample rod to move to a required position in any degree of freedom comprises the following steps: and applying sawtooth waves with opposite positive and negative polarities to the two symmetrical conductive coatings on the outer side surface of the piezoelectric ceramic tube 1 through the lead. The sawtooth wave may be continuous or may be pulsed, as shown in fig. 3. The more conductive areas 13, the more possible directions of movement of the joint ball 3.
For a continuous sawtooth wave, the preferred parameters are peak-to-peak value of 100V, frequency of less than 100Hz, and slew rate of more than 100V/. mu.s. A suitable reduction in peak-to-peak value may reduce the motion step, but too low a peak-to-peak value (in some cases, below 40V) may cause the motion step to drop sharply to zero, as may be related to the microstructure of the friction face. When the peak-to-peak value is higher than 100V, the piezoelectric ceramic is broken down, and the piezoelectric ceramic tube 1 is damaged. When the frequency is higher than 100HZ, the intrinsic vibration of the piezoelectric ceramic tube 1 or the whole device structure can be excited, so that the motion of the joint ball 3 is no longer 'slow and fast' motion in a plane, the driving principle of the nano positioner cannot be met, and the sample cannot move. The reduction of the frequency can reduce the number of movement steps generated in unit time and control the movement speed of the sample. When the slew rate is lower than 100V/mus, the motion acceleration of the joint ball 3 in the sliding stage is too small, the friction force can keep the motion part to move along with the joint ball 3 without sliding, and the sample cannot generate long-stroke motion by accumulating steps.
When the sample moves to the vicinity of the target position, opposite constant voltages are applied to the symmetrical conductive regions, so that one side of the piezoelectric ceramic tube 1 is elongated and the other side is shortened to be bent as a whole, and the joint ball 3 fixed to one end of the piezoelectric ceramic tube 1 is moved to one side.
In some embodiments, the connecting rod and the connecting seat are detachably fastened. Such as a threaded connection, keyed connection, etc. Therefore, the push-down piece is convenient to disassemble, assemble and replace.
As shown in FIG. 3, the sample holder is a sleeve, the sleeve 6 is integrated with the upper pressing member 8, and a fastening screw 7 is installed on the wall of the sleeve 6 in a penetrating manner. And inserting the rod-shaped or tubular sample into the sleeve 6, and tightly pressing the sample by using the fastening screw 7 to finish the clamping of the sample.
In another form of the sample holder shown in figure 4, the sample holder is conical, the cone 61 being integral with the upper platen 8. And gluing the powdery sample on the vertex of the cone 61 to finish the clamping of the sample.
In another form of the sample holder shown in fig. 5, the sample holder comprises a base 62, a spacer 621 and a fastening screw 622; base member 62 is connecting portion and clamping part, and connecting portion are the cylinder fixed with the top board, and the clamping part is for cutting the incomplete cylinder that has the plane, and gasket 621 fastens in the clamping part through fastening screw 622, is used for clamping sample 623 between the plane of clamping part and gasket 621.
The invention shown and described herein may be practiced in the absence of any element or elements, limitation or limitations, which is specifically disclosed herein. The terms and expressions which have been employed are used as terms of description and not of limitation, and there is no intention in the use of such terms and expressions of excluding any equivalents of the features shown and described or portions thereof, and it is recognized that various modifications are possible within the scope of the invention. It should therefore be understood that although the present invention has been specifically disclosed by various embodiments and optional features, modification and variation of the concepts herein described may be resorted to by those skilled in the art, and that such modifications and variations are considered to be within the scope of this invention as defined by the appended claims.
The contents of the articles, patents, patent applications, and all other documents and electronically available information described or cited herein are hereby incorporated by reference in their entirety to the same extent as if each individual publication was specifically and individually indicated to be incorporated by reference. Applicants reserve the right to incorporate into this application any and all materials and information from any such articles, patents, patent applications, or other documents.
Claims (5)
1. The multi freedom sample pole, its characterized in that: the sample rod is provided with a nanometer positioner, the nanometer positioner comprises a driving piece, the driving piece is a piezoelectric ceramic tube, the piezoelectric ceramic tube is a hollow tube body, one end of the piezoelectric ceramic tube is fixed with the joint ball, and the other end of the piezoelectric ceramic tube is arranged on the sample rod; the piezoelectric ceramic tube is provided with an inner surface and an outer surface, a plurality of conductive area groups are arranged on one surface of the piezoelectric ceramic tube, each conductive area group comprises two symmetrical conductive areas, all the conductive areas are mutually independent, and each conductive area is provided with a conductive wire; the other surface of the piezoelectric ceramic tube is a whole-area conductive part; the nanometer positioner comprises a joint ball and a pressing piece assembly, the joint ball is fixed with a driving piece, the pressing piece assembly comprises at least two pressing pieces and an elastic connecting assembly, the elastic connecting assembly is connected with the adjacent pressing pieces, the pressing piece assembly embraces the joint ball, and pretightening force is arranged between the pressing pieces and the joint ball.
2. The multiple degree of freedom sample rod of claim 1, wherein: the conductive area group is arranged on the outer surface of the piezoelectric ceramic tube, and the whole area conductive part is arranged on the inner surface of the piezoelectric ceramic tube; or the conductive area group is arranged on the inner surface of the piezoelectric ceramic tube, and the whole conductive area group is arranged on the outer surface of the piezoelectric ceramic tube.
3. The multiple degree of freedom sample rod of claim 1, wherein: an insulating coating is arranged between the adjacent conductive areas.
4. The multiple degree of freedom sample rod of claim 1, wherein: the voltage direction of the two conductive regions of each conductive region group is opposite, with only one conductive region group being energized at a time, or with a plurality of conductive region groups being energized at a time.
5. The multiple degree of freedom sample rod of claim 1, wherein: the joint ball passes through the ball seat and links to each other with piezoceramics pipe, and the ball seat includes the connecting rod fixed with the joint ball and the connecting seat fixed with piezoceramics pipe, and the connecting rod is less than the joint ball, and the cross section equidimension of connecting seat and piezoceramics pipe.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2017107918003 | 2017-09-05 | ||
| CN201710791800.3A CN107576823A (en) | 2017-09-05 | 2017-09-05 | Nanopositioner for transmission electron microscope sample bar |
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| Publication Number | Publication Date |
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| CN109425627A CN109425627A (en) | 2019-03-05 |
| CN109425627B true CN109425627B (en) | 2021-02-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710791800.3A Pending CN107576823A (en) | 2017-09-05 | 2017-09-05 | Nanopositioner for transmission electron microscope sample bar |
| CN201811034050.6A Active CN109425627B (en) | 2017-09-05 | 2018-09-05 | Multi-degree-of-freedom sample rod |
| CN201811034047.4A Active CN109459456B (en) | 2017-09-05 | 2018-09-05 | Three-freedom-degree sample rod |
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| CN201710791800.3A Pending CN107576823A (en) | 2017-09-05 | 2017-09-05 | Nanopositioner for transmission electron microscope sample bar |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201811034047.4A Active CN109459456B (en) | 2017-09-05 | 2018-09-05 | Three-freedom-degree sample rod |
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Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107576823A (en) * | 2017-09-05 | 2018-01-12 | 浙江大学 | Nanopositioner for transmission electron microscope sample bar |
| CN111337521B (en) * | 2018-11-30 | 2021-03-05 | 浙江大学 | Multi freedom sample rod |
| CN111337522B (en) * | 2018-11-30 | 2021-10-19 | 浙江大学 | Multi-degree-of-freedom sample rod with sample clamping nozzle |
| CN111257355B (en) * | 2018-11-30 | 2021-04-27 | 浙江大学 | Multi-degree-of-freedom sample rod with rotating shaft driving assembly |
| WO2020108038A1 (en) * | 2018-11-30 | 2020-06-04 | 浙江大学 | Multi-degree of freedom sample rod |
| CN111261479B (en) * | 2018-11-30 | 2021-10-26 | 浙江大学 | Multi-freedom-degree sample rod with static electricity leading-out function |
| CN111257359B (en) * | 2018-11-30 | 2021-03-02 | 浙江大学 | Method for adjusting sample to align with axis of rotating shaft |
| CN111257597B (en) * | 2018-11-30 | 2021-06-29 | 浙江大学 | Multi-degree-of-freedom sample rod with self-positioning function |
| CN111257358B (en) * | 2018-11-30 | 2021-08-31 | 浙江大学 | Method for carrying out in-situ dynamic three-dimensional reconstruction on sample by using multi-degree-of-freedom sample rod |
| CN111261480B (en) * | 2020-01-31 | 2021-03-23 | 浙江大学 | Transmission electron microscope in-situ sample rod with double-inclination function |
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| GB0209558D0 (en) * | 2002-04-26 | 2002-06-05 | Council Cent Lab Res Councils | Goniometer sample holder for aligning a sample to a radiation beam |
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-
2017
- 2017-09-05 CN CN201710791800.3A patent/CN107576823A/en active Pending
-
2018
- 2018-09-05 CN CN201811034050.6A patent/CN109425627B/en active Active
- 2018-09-05 CN CN201811034047.4A patent/CN109459456B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN109459456A (en) | 2019-03-12 |
| CN109459456B (en) | 2021-03-23 |
| CN109425627A (en) | 2019-03-05 |
| CN107576823A (en) | 2018-01-12 |
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