CN109112499A - A kind of novel vapour deposition process prepares the process units of graphene - Google Patents
A kind of novel vapour deposition process prepares the process units of graphene Download PDFInfo
- Publication number
- CN109112499A CN109112499A CN201811005840.1A CN201811005840A CN109112499A CN 109112499 A CN109112499 A CN 109112499A CN 201811005840 A CN201811005840 A CN 201811005840A CN 109112499 A CN109112499 A CN 109112499A
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- frame body
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- transmission frame
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 34
- 229910021389 graphene Inorganic materials 0.000 title claims abstract description 30
- 238000000034 method Methods 0.000 title claims abstract description 23
- 238000005137 deposition process Methods 0.000 title claims abstract description 13
- 230000005540 biological transmission Effects 0.000 claims abstract description 42
- 238000010574 gas phase reaction Methods 0.000 claims abstract description 9
- 239000000047 product Substances 0.000 claims description 41
- 238000001816 cooling Methods 0.000 claims description 35
- 239000011265 semifinished product Substances 0.000 claims description 31
- 239000000758 substrate Substances 0.000 claims description 25
- 238000006243 chemical reaction Methods 0.000 claims description 23
- 238000010438 heat treatment Methods 0.000 claims description 18
- 239000007789 gas Substances 0.000 claims description 13
- 239000012495 reaction gas Substances 0.000 claims description 11
- 239000002912 waste gas Substances 0.000 claims description 10
- 239000000112 cooling gas Substances 0.000 claims description 8
- 230000007613 environmental effect Effects 0.000 claims description 7
- 239000006227 byproduct Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- -1 and cost is high Substances 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 238000009377 nuclear transmutation Methods 0.000 description 2
- 230000033116 oxidation-reduction process Effects 0.000 description 2
- 150000001336 alkenes Chemical class 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/182—Graphene
- C01B32/184—Preparation
- C01B32/186—Preparation by chemical vapour deposition [CVD]
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Nanotechnology (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
The present invention relates to the technical fields of the production of graphene, more particularly to a kind of novel vapour deposition process prepares the process units of graphene, including transmission frame body, the transmission device being arranged on transmission frame body, the manipulator that the gas phase reaction kiln for the rear edge for transmitting frame body is arranged in and is arranged in front of transmission frame body, the transmission device includes transmitting the circle conveyer belt being arranged on frame body, and the conveyer belt forms a circle along the edge of transmission frame body and is driven clockwise along the edge of transmission frame body.Rationally, be produced on a large scale high-quality graphene, reduces the pollution to environment for the configuration of the present invention is simple, design.
Description
Technical field
The present invention relates to the technical fields of the production of graphene more particularly to a kind of novel vapour deposition process to prepare graphene
Process units.
Background technique
Currently, industry mainly uses oxidation-reduction method and chemical vapour deposition technique (CVD) to produce graphene.Produce graphite
The enterprise of alkene powder mainly passes through oxidation-reduction method, carries out preparing graphene, redox skill using the technology of sur-face peeling
Art complex process needs to consume a large amount of sulfuric acid and water, while also generating a large amount of acid waste water and spent acid, and cost is high,
Pollutant can be generated, great threat is caused to environment.
Chemical vapour deposition technique (CVD) decomposes carbon source at high operating temperatures using carbon containing substance as carbon source, and carbon atom is logical
It crosses it to rearrange in substrate surface high temperature, grows graphene.Complete filmy graphite alkene is obtained since its is easily prepared, because
This has broad application prospects in fields such as electronic field, solar energy and Flied emissions.
Because prepared by chemical vapour deposition technique (CVD), graphene is simple and easy, and obtained graphene quality is high, can big face
Product growth, this preparation method do not generate biggish environmental contaminants yet, big burden are not caused to environment, have been increasingly becoming system
The main method of standby high-quality graphene, but present chemical vapour deposition technique not can manufacture graphene, Yield comparison
It is low.
Summary of the invention
Present invention aim to address the above problems, provide a kind of by the way that a circle conveyer belt, setting is arranged in transmission frame body
The manipulator in front and the rear edge for transmitting frame body have been set gradually from left to right kiln body preheating
Area, kiln body heating reaction zone and cooling zone, form the circulating production line of a graphene, can scale mass production high quality
The novel vapour deposition process of graphene prepares the process units of graphene.
To solve the above-mentioned problems, the technical solution used in the present invention is:
A kind of novel vapour deposition process prepares the process units of graphene, including transmission frame body, the biography being arranged on transmission frame body
The manipulator for sending device, the gas phase reaction kiln for the rear edge for transmitting frame body being set and is arranged in front of transmission frame body, institute
The transmission device stated includes transmitting the circle conveyer belt being arranged on frame body, and the conveyer belt is surrounded along the edge of transmission frame body
One encloses and is driven clockwise along the edge of transmission frame body, and the gas phase reaction kiln includes the back along transmission frame body
Edge has been set gradually from left to right kiln body preheating zone, kiln body heating reaction zone and cooling zone, the back of the transmission frame body
Conveyer belt at edge sequentially passes through kiln body preheating zone, kiln body heating reaction zone and cooling zone, sets on the kiln body preheating zone
It is equipped with gas atmosphere inlet, reaction gas inlet is provided on the kiln body heating reaction zone, is arranged on the cooling zone
Have a cooling gas inlet, the manipulator be used to load semi-finished product substrate on conveyer belt and unloaded from conveyer belt stacking at
Product.
The left side of the manipulator is feeding area, and the feeding area is for stacking semi-finished product substrate, the machinery
The left side of hand is that finished product unloads area, and the finished product unloading area is for stacking finished product.
Semi-finished product entrance, the conveyer belt of the rear edge of the transmission frame body are provided on the left of the kiln body preheating zone
Kiln body preheating zone is penetrated by semi-finished product entrance, the semi-finished product inlet matching is provided with wicket one, the wicket one
With being slidably mounted on kiln body preheating zone, the wicket one is slided up and down.
It is provided with product outlet on the right side of the cooling zone, the conveyer belt of the rear edge of the transmission frame body passes through into
Product outlet is pierced by cooling zone, and matching is provided with wicket two at the product outlet, and the matching of wicket two is slidably mounted on cold
But in area, the wicket two is slided up and down.
It further include emission-control equipment, the emission-control equipment heats anti-through piping and kiln body preheating zone, kiln body
Area is answered to be connected to cooling zone, the exhaust gas in the kiln body preheating zone, kiln body heating reaction zone and cooling zone enters through pipeline
By concentration environmental protection treatment in emission-control equipment.
Hot waste gas outlet is provided on the cooling zone, the hot waste gas outlet passes through pipeline and kiln body preheating zone phase
Connection.
Gain effect of the invention is:
Kiln body preheating zone of the invention is heated to semi-finished product substrate, and kiln body heating reaction zone is filled with reaction gas, makes half
Finished product substrate and reaction gas carry out pyroreaction, generate finished product, and cooling zone is filled with cooling gas, with reasonable temperature gradient,
Cool down to finished product, semi-finished product substrate is passed through into finished product by conveyer belt by gas phase reaction transmutation from feeding area, finished product is again
It is transported to discharge zone, completes the Automatic Conveying from semi-finished product substrate to finished product；Manipulator can be automatically performed semi-finished product substrate
Loading and finished product unload stacking, realize graphene production line automation；Emission-control equipment is to kiln body preheating zone, kiln body
Exhaust gas in heating reaction zone, these three regions of cooling zone is collected and handles, and is discharged into atmosphere again after reaching the requirement of environmental protection,
It avoids being directly discharged into environment and pollutes environment.Rationally, be produced on a large scale high-quality graphene for the configuration of the present invention is simple, design,
Reduce the pollution to environment.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention.
Fig. 2 is the process principle figure that the present invention prepares graphene production line.
Specific embodiment
Below in conjunction with attached drawing, specific embodiments of the present invention will be described in detail.
Referring to Fig. 1 and Fig. 2, serial number in figure: 1 be kiln body preheating zone, 2 be emission-control equipment, 3 be kiln body heating reaction
Area, 4 be cooling zone, 5 be cooling gas inlet, 6 be finished product, 7 be transmission frame body, 8 be manipulator, 9 be reaction gas inlet, 10
It is gas atmosphere inlet for semi-finished product substrate, 11,12 be conveyer belt, 13 be wicket one and 14 is wicket two.
A kind of novel vapour deposition process of the present invention prepares the process units of graphene, including transmission frame body 7, setting are transmitting
Transmission device on frame body 7, be arranged in transmission frame body 7 rear edge gas phase reaction kiln and be arranged before transmitting frame body 7
The manipulator 8 of side, the transmission device include transmitting the circle conveyer belt 12 being arranged on frame body 7,12 edge of conveyer belt
Transmission frame body 7 edge form a circle and along transmission frame body 7 edge be driven clockwise, the gas phase reaction kiln
Including being set gradually from left to right kiln body preheating zone 1 along the back edge of transmission frame body 7, kiln body heats reaction zone 3 and cold
But area 4, the conveyer belt 12 of the rear edge of the transmission frame body 7 sequentially pass through kiln body preheating zone 1, kiln body heating reaction zone 3
And cooling zone 4, it is provided with gas atmosphere inlet 11 on the kiln body preheating zone 1, is set on the kiln body heating reaction zone 3
It is equipped with reaction gas inlet 9,5 entrance of cooling gas is provided on the cooling zone 4, the manipulator 8 is used for transmission
Semi-finished product substrate 10 is loaded on band 12 and stacking finished product 6 is unloaded from conveyer belt 12.
The left side of the manipulator 8 is feeding area, and the feeding area is for stacking semi-finished product substrate 10, the machine
The left side of tool hand 8 is that finished product unloads area, and the finished product unloading area is for stacking finished product 6.
Semi-finished product entrance, the transmission of the rear edge of the transmission frame body are provided on the left of the kiln body preheating zone 1
The more than half finished-product entrances of band logical penetrate kiln body preheating zone 1, and the semi-finished product inlet matching is provided with wicket 1, the wicket
One 13 matchings are slidably mounted on kiln body preheating zone 1, and the wicket 1 slides up and down.
Product outlet is provided on the right side of the cooling zone 4, the conveyer belt of the rear edge of the transmission frame body passes through
Product outlet is pierced by cooling zone 4, and matching is provided with wicket 2 14, the matching of the wicket 2 14 sliding peace at the product outlet
On cooling zone 4, the wicket 2 14 is slided up and down.
It further include emission-control equipment 2, the emission-control equipment 2 is heated through piping and kiln body preheating zone 1, kiln body
Reaction zone 3 is connected to cooling zone 4, and the exhaust gas in the kiln body preheating zone 1, kiln body heating reaction zone 3 and cooling zone 4 is through pipe
Road enters in emission-control equipment 2 by concentration environmental protection treatment.
The cooling zone 4 is provided with hot waste gas outlet, and the hot waste gas outlet is connected by pipeline and kiln body preheating zone 1
It is logical.
Working principle: semi-finished product substrate 10 prepares in feeding area, and semi-finished product substrate 10 is packed into conveyer belt by manipulator 8
On 12, semi-finished product substrate 10 is transported to by conveyer belt the wicket 13 of kiln body preheating zone 1, opens wicket 13, semi-finished product substrate
10 enter kiln body preheating zone 1, and wicket 13 is closed, and gas atmosphere inlet 11 is opened, and preheat, have preheated to semi-finished product substrate 10
Cheng Hou, semi-finished product substrate enter kiln body heating reaction zone 3, open reaction gas inlet 9, be filled with reaction gas, semi-finished product substrate
10 and reaction gas carry out pyroreaction, after reaction, finished product 6 on conveyer belt 12 enters cooling zone 4, cooling gas inlet
5 open, and are filled with cooling gas, cool down to finished product, and after the completion, wicket 2 14 is opened, and finished product 6 is reached with conveyor belt 12
Finished product unloads area, by manipulator 8, finished product 6 is carried out unloading stacking, kiln body preheating zone 1, kiln body heat reaction zone 3, cooling zone
Exhaust gas in 4 these three regions enters emission-control equipment 2 through pipeline, carries out concentration environmental protection treatment, then drains into atmosphere, described
Cooling zone 4 be provided with hot waste gas outlet, the described hot waste gas outlet is connected to by pipeline with kiln body preheating zone 1, cooling zone
Hot waste gas is entered in kiln body preheating zone 1, and the thermal energy in hot waste gas can be made to reuse, reduce the waste of thermal energy.
Kiln body preheating zone 1 of the invention is heated to semi-finished product substrate 10, and kiln body heating reaction zone 3 is filled with reaction gas
Body makes semi-finished product substrate 10 and reaction gas carry out pyroreaction, generates finished product, cooling zone 4 is filled with cooling gas, with reasonable
Temperature gradient cools down to finished product 6, and semi-finished product substrate 10 is passed through gas phase reaction transmutation from feeding area by conveyer belt 12
At finished product 6, finished product 6 is transported to discharge zone again, completes from semi-finished product substrate 10 to the Automatic Conveying of finished product 6；Manipulator 8 can be with
The loading and finished product 6 for being automatically performed semi-finished product substrate 10 unload stacking, realize the automation of graphene production line；Exhaust-gas treatment dress
Setting 2 is that the exhaust gas in kiln body preheating zone, kiln body heating reaction zone, these three regions of cooling zone is collected and is handled, and is reached
It is discharged into atmosphere again after the requirement of environmental protection, avoids being directly discharged into environment and pollutes environment.The configuration of the present invention is simple, design rationally, can
Large-scale production high-quality graphene reduces the pollution to environment.
The basic principles, main features and advantages of the present invention have been shown and described above.The technology of the industry
Personnel are it should be appreciated that the present invention is not limited to the above embodiments, and what is described in the above embodiment and the description is only the present invention
Principle, various changes and improvements may be made to the invention without departing from the spirit and scope of the present invention, these variation and
Improvement is both fallen in the range of claimed invention.The present invention claims protection scope by appended claims and its
Equivalent defines.
Claims (6)
1. a kind of novel vapour deposition process prepares the process units of graphene, including transmission frame body, it is arranged on transmission frame body
Transmission device, the gas phase reaction kiln that the rear edge for transmitting frame body is set and the manipulator being arranged in front of transmission frame body,
It is characterized by: the transmission device includes transmitting the circle conveyer belt being arranged on frame body, the conveyer belt is along transmission
The edge of frame body form a circle and along transmission frame body edge be driven clockwise, the gas phase reaction kiln include along
The back edge of transmission frame body has been set gradually from left to right kiln body preheating zone, kiln body heating reaction zone and cooling zone, described
The conveyer belt for transmitting the rear edge of frame body sequentially passes through kiln body preheating zone, kiln body heating reaction zone and cooling zone, described
It is provided with gas atmosphere inlet on kiln body preheating zone, is provided with reaction gas inlet on the kiln body heating reaction zone, it is described
Cooling zone on be provided with cooling gas inlet, the manipulator is used to load semi-finished product substrate on conveyer belt and from transmission
Take unloading stacking finished product.
2. the process units that a kind of novel vapour deposition process according to claim 1 prepares graphene, it is characterised in that: institute
The left side for the manipulator stated is feeding area, and for stacking semi-finished product substrate, the left side of the manipulator is for the feeding area
Finished product unloads area, and the finished product unloading area is for stacking finished product.
3. the process units that a kind of novel vapour deposition process according to claim 1 prepares graphene, it is characterised in that: institute
It is provided with semi-finished product entrance on the left of the kiln body preheating zone stated, the conveyer belt of the rear edge of the transmission frame body passes through semi-finished product
Entrance penetrates kiln body preheating zone, and the semi-finished product inlet matching is provided with wicket one, and the matching of wicket one is slidably installed
On kiln body preheating zone, the wicket one is slided up and down.
4. the process units that a kind of novel vapour deposition process according to claim 1 prepares graphene, it is characterised in that: institute
It is provided with product outlet on the right side of the cooling zone stated, the conveyer belt of the rear edge of the transmission frame body is pierced by by product outlet
Cooling zone, matching is provided with wicket two at the product outlet, and the matching of wicket two is slidably mounted on cooling zone, described
Wicket two slide up and down.
5. the process units that a kind of novel vapour deposition process according to claim 1 prepares graphene, it is characterised in that: also
Including emission-control equipment, the emission-control equipment is through piping and kiln body preheating zone, kiln body heating reaction zone and cooling
Qu Jun connection, the kiln body preheating zone, kiln body heat the exhaust gas in reaction zone and cooling zone and enter exhaust-gas treatment dress through pipeline
It sets interior by concentration environmental protection treatment.
6. the process units that a kind of novel vapour deposition process according to claim 1 prepares graphene, it is characterised in that: institute
Hot waste gas outlet is provided on the cooling zone stated, the hot waste gas outlet is connected by pipeline with kiln body preheating zone.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811005840.1A CN109112499A (en) | 2018-08-30 | 2018-08-30 | A kind of novel vapour deposition process prepares the process units of graphene |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811005840.1A CN109112499A (en) | 2018-08-30 | 2018-08-30 | A kind of novel vapour deposition process prepares the process units of graphene |
Publications (1)
| Publication Number | Publication Date |
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| CN109112499A true CN109112499A (en) | 2019-01-01 |
Family
ID=64861588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201811005840.1A Pending CN109112499A (en) | 2018-08-30 | 2018-08-30 | A kind of novel vapour deposition process prepares the process units of graphene |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11718527B2 (en) | 2021-12-22 | 2023-08-08 | General Graphene Corporation | Systems and methods for high yield and high throughput production of graphene |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11718527B2 (en) | 2021-12-22 | 2023-08-08 | General Graphene Corporation | Systems and methods for high yield and high throughput production of graphene |
| US11718526B2 (en) | 2021-12-22 | 2023-08-08 | General Graphene Corporation | Systems and methods for high yield and high throughput production of graphene |
| US11753304B2 (en) | 2021-12-22 | 2023-09-12 | General Graphene Corporation | Systems and methods for high yield and high throughput production of graphene |
| US11827519B2 (en) | 2021-12-22 | 2023-11-28 | General Graphene Corporation | Systems and methods for high yield and high throughput production of graphene |
| US11858813B2 (en) | 2021-12-22 | 2024-01-02 | General Graphene Corporation | Systems and methods for high yield and high throughput production of graphene |
| US11866333B2 (en) | 2021-12-22 | 2024-01-09 | General Graphene Corporation | Systems and methods for high yield and high throughput production of graphene |
| US11866334B2 (en) | 2021-12-22 | 2024-01-09 | General Graphene Corporation | Systems and methods for high yield and high throughput production of graphene |
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Effective date of registration: 20200407 Address after: 450000 102, No. 2 building, Xinghua building, 58 Avenue, second Zhengzhou street, Zhengzhou, Henan. Applicant after: Zhengzhou great Gong high and new technologies Co.,Ltd. Address before: 450000 Zhengzhou Free Trade Experimental Zone, Zhengzhou, Henan Province 102, No. 2 Building, Xinghua Building, No. 8, Second Street (Jingkai) Applicant before: Zhengzhou great Gong high and new technologies Co.,Ltd. Applicant before: Dalian University of Technology's Grand Equipments design and manufacture Zhengzhou Research Institute |
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Effective date of registration: 20220808 Address after: No. 102, Building 2, Xinghua Building, No. 58, Second Street, Henan Free Trade Pilot Zone, Zhengzhou Area (Jingkai), Zhengzhou City, Henan Province, 450000 Applicant after: Zhengzhou great Gong high and new technologies Co.,Ltd. Applicant after: DALIAN University OF TECHNOLOGY Address before: 450000 102, No. 2 building, Xinghua building, 58 Avenue, second Zhengzhou street, Zhengzhou, Henan. Applicant before: Zhengzhou great Gong high and new technologies Co.,Ltd. |
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Application publication date: 20190101 |
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