CN109030360A - Optical path adjustment method - Google Patents
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- CN109030360A CN109030360A CN201810874164.5A CN201810874164A CN109030360A CN 109030360 A CN109030360 A CN 109030360A CN 201810874164 A CN201810874164 A CN 201810874164A CN 109030360 A CN109030360 A CN 109030360A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/73—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using plasma burners or torches
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Abstract
The invention discloses optical path adjustment methods, including spectrometer ontology and debugging step, grating is fixedly connected on the left of the spectrometer chamber body, top on the right side of the grating inner cavity is fixedly connected with focus lamp, bottom on the right side of the spectrometer chamber body is fixedly connected with collimating mirror, the focus lamp and collimating mirror mirror surface are opposite with grating, bottom on the left of the spectrometer ontology is provided with incident crack, it is provided with lens barrel on the left of the incidence crack, the top on the left of the spectrometer ontology is provided with outgoing crack.The present invention is used cooperatively by existing spectrometer ontology, grating, focus lamp, collimating mirror, incident crack, lens barrel, outgoing crack, detector, quartz lens, collimating mirror spot center and reference line, easily the optical path and colour band of Czerny-Turner type optical path monochromator can be leveled, effectively entrance slit is accurately imaged at exit slit, and image quality is fine, guarantees that monochromator has good resolution capability.
Description
Technical field
The present invention relates to spectrometer technical fields, specially optical path adjustment method.
Background technique
Single-channel scanning type ICP spectrometer beam splitting system is mainly by condenser lens, the monochromator that focal length is 1m and photodetection
The spectral information that device constitutes plasma flame excited species enters monochromator after focusing by condenser lens, divides in monochromator
Light finally receives wherein monochromator by photodetector and mainly (is reflected by entrance slit, collimating mirror (spherical reflector), grating
Formula), focus lamp (spherical reflector) and exit slit composition, adjustment method disclosed herein be first using stronger tungsten lamp as light
Source, using the plane that entrance slit and the exit slit line of centres and collimating mirror and the focus lamp line of centres determine as datum level
Optical path and colour band are leveled, then, as light source, to exist by micro- sem observation entrance slit (fine crack) compared with dim light low pressure pen type mercury lamp
Imaging contexts at exit slit focus and adjust slit to fix exit slit.
Single-channel scanning type ICP spectrometer is the characteristic spectral line for going out various elements to be measured in sample by ICP light source activation, this
The mix complex light of composition of a little characteristic spectral lines is divided into the light of many different wave lengths by beam splitting system, by testing these not
The intensity of co-wavelength characteristic spectral line come determine substance ingredient and content monochromator be spectrometer core component, its dispersion energy
Power and resolution capability directly affect the accuracy of test, the adjustment method of monochromator be influence its resolution capability key factor it
One, effective adjustment method has a decisive role the performance of production efficiency and instrument, has not yet to see related single
The adjustment method of color device is reported.
The dispersive power of spectrometer monochromator and the quality of resolution capability directly affect the resolution capability of spectrometer, but
Be have not yet to see the adjustment method in relation to spectrometer monochromator, so this also allow for spectrometer resolution capability can not be effective
Adjusting, and then directly affect the image quality of spectrometer, reduce the resolution capability of spectrometer.
The content of present invention
The purpose of the present invention is to provide optical path adjustment methods, have simple and effective advantage, solve spectrometer resolution
Ability can not be adjusted effectively, and then the problem of directly affect the image quality of spectrometer, reduce the resolution capability of spectrometer.
To achieve the above object, the invention provides the following technical scheme: a kind of optical path adjustment method, including spectrometer ontology
And debugging step, grating is fixedly connected on the left of the spectrometer chamber body, and the top on the right side of the grating inner cavity is fixed
It is connected with focus lamp, the bottom on the right side of the spectrometer chamber body is fixedly connected with collimating mirror, the focus lamp and collimating mirror
Mirror surface is opposite with grating, and the bottom on the left of the spectrometer ontology is provided with incident crack, the left side setting of the incidence crack
There is lens barrel, the top on the left of the spectrometer ontology is provided with outgoing crack, is provided with detector on the left of the outgoing crack,
The bottom of the detector is fixedly connected with spectrometer ontology.
The spectrometer ontology includes quartz lens, and the quartz lens is opposite with collimating mirror, the grating and lens barrel it
Between be provided with collimating mirror spot center, be provided with reference line at the center of the grating, collimating mirror spot center and lens barrel.
Debugging step is as follows:
Step 1: arrangement reference line:
Using the two crack lines of centres as reference line；
Step 2: leveling collimating mirror；
Thick slit is placed at entrance slit, tungsten lamp light, according to full collimating mirror, is adjusted after lens barrel illuminates thick entrance slit
Its institute is overlapped at spot center with reference line by whole collimating mirror；
Step 3: leveling grating:
Grating, rotating shutter are loaded onto, light impinges upon on collimating mirror again through optical grating reflection, it focuses near incident crack,
Grating zero level spot center is overlapped with reference line by adjusting grating；
Step 4: leveling focuses:
Rotating shutter, light is imaged near outgoing crack after optical grating reflection is beaten on focus lamp, by adjusting focusing
Mirror is overlapped it with reference line at spot center；
Step 5: leveling colour band:
Rotating shutter allows diffraction colour band to appear near crack, is overlapped colour band center with reference line by adjusting grating；
Step 6: incident crack is installed:
Pen type mercury lamp is used instead, by lens barrel imaging re-incident in crack, with microscope in outgoing crevice place observation imaging feelings
Condition, adjustment microscope see clearly incident crack picture, fixed thin crack；
Step 7: focusing:
Thick crack is placed in outgoing crack, rotating shutter allows zero order light to appear in thick crack, is imaged with micro- sem observation
Situation judges the relative position of incident crack imaging and thick crack；
Step 8: installation outgoing crack:
It uses thin slit at exit slit instead, with micro- sem observation, adjusts thin slit, be directed at it formed by entrance slit
Picture, fixed exit slit.
Preferably, the pen type mercury lamp of using instead is to be imaged on the imaging ratio of incident crack compared with weak light source low pressure pen type mercury lamp
Example is 1:1, and incident crack uses thin crack instead, rotate thin incident crack to image quality preferably when, thin crack is fixed.
Preferably, the thin incident crack picture of the adjustment and thick incident crack, and judge thin incident crack picture and thick incident folder
It is sewn on the same face.
Compared with prior art, beneficial effects of the present invention are as follows:
1, the present invention passes through existing spectrometer ontology, grating, focus lamp, collimating mirror, incident crack, lens barrel, outgoing crack, spy
Being used cooperatively for device, quartz lens, collimating mirror spot center and reference line is surveyed, it can be easily Czerny-Turner type light
The optical path and colour band of road monochromator level, and are effectively accurately imaged on entrance slit at exit slit, and image quality is fine,
Guarantee that monochromator has good resolution capability.
Detailed description of the invention
Fig. 1 is schematic structural view of the invention；
Fig. 2 is structure of the invention beam splitting system schematic diagram；
Fig. 3 is structure of the invention benchmark schematic diagram.
In figure: 1, spectrometer ontology；2, grating；3, focus lamp；4, collimating mirror；5, incident crack；6, lens barrel；7, outgoing folder
Seam；8, detector；9, quartz lens；10, collimating mirror spot center；11, reference line.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Fig. 1-3 is please referred to, the present invention provides a kind of technical solution: a kind of optical path adjustment method, including 1 He of spectrometer ontology
Debugging step is fixedly connected with grating 2 on the left of 1 inner cavity of spectrometer ontology, and the top on the right side of 2 inner cavity of grating is fixedly connected with poly-
Burnt mirror 3, the bottom on the right side of 1 inner cavity of spectrometer ontology are fixedly connected with collimating mirror 4, focus lamp 3 and 4 mirror surface of collimating mirror and grating 2
Relatively, the bottom in 1 left side of spectrometer ontology is provided with incident crack 5, and the left side of incident crack 5 is provided with lens barrel 6, spectrometer sheet
The top in 1 left side of body is provided with outgoing crack 7, and the left side of outgoing crack 7 is provided with detector 8, the bottom of detector 8 and spectrum
Instrument ontology 1 is fixedly connected.
Spectrometer ontology 1 includes quartz lens 9, and quartz lens 9 and collimating mirror 4 are opposite, is arranged between grating 2 and lens barrel 6
There is collimating mirror spot center 10, reference line 11 is provided at the center of grating 2, collimating mirror spot center 10 and lens barrel 6；
Embodiment one:
Debugging step is as follows:
Step 1: arrangement reference line:
Using the two crack lines of centres as reference line；
Step 2: leveling collimating mirror；
Thick slit is placed at entrance slit, tungsten lamp light, according to full collimating mirror, is adjusted after lens barrel illuminates thick entrance slit
Its institute is overlapped at spot center with reference line by whole collimating mirror；
Step 3: leveling grating:
Grating, rotating shutter are loaded onto, light impinges upon on collimating mirror again through optical grating reflection, it focuses near incident crack,
Grating zero level spot center is overlapped with reference line by adjusting grating；
Step 4: leveling focuses:
Rotating shutter, light is imaged near outgoing crack after optical grating reflection is beaten on focus lamp, by adjusting focusing
Mirror is overlapped it with reference line at spot center；
Step 5: leveling colour band:
Rotating shutter allows diffraction colour band to appear near crack, is overlapped colour band center with reference line by adjusting grating；
Step 6: incident crack is installed:
It uses instead to be imaged on incident crack by lens barrel, incident crack is thin incident folder compared with weak light source low pressure pen type mercury lamp
Seam, and the imaging scale for being imaged on incident crack is 1:1, observes imaging contexts in outgoing crevice place with microscope, adjusts micro-
Mirror sees clearly incident crack picture, when the thin incident crack of rotation to image quality preferably when, fixed thin crack；
Step 7: focusing:
Thick crack is placed in outgoing crack, rotating shutter allows zero order light to appear in thick crack, is imaged with micro- sem observation
Situation is adjusted thin incident crack picture and thick incident crack, judges the relative position of incident crack imaging and thick crack, and
So that disconnected thin incident crack picture and thick incident crack are on the same face, the angle of thin incidence crack is 11 degree, thick incidence crack
Angle is 14 degree；
Step 8: installation outgoing crack:
It uses thin slit at exit slit instead, with micro- sem observation, adjusts thin slit, be directed at it formed by entrance slit
Picture, fixed exit slit.
Embodiment two: the difference between this embodiment and the first embodiment lies in:
Debugging step is as follows:
Step 1: arrangement reference line:
Using the two crack lines of centres as reference line；
Step 2: leveling collimating mirror；
Thick slit is placed at entrance slit, tungsten lamp light, according to full collimating mirror, is adjusted after lens barrel illuminates thick entrance slit
Its institute is overlapped at spot center with reference line by whole collimating mirror；
Step 3: leveling grating:
Grating, rotating shutter are loaded onto, light impinges upon on collimating mirror again through optical grating reflection, it focuses near incident crack,
Grating zero level spot center is overlapped with reference line by adjusting grating；
Step 4: leveling focuses:
Rotating shutter, light is imaged near outgoing crack after optical grating reflection is beaten on focus lamp, by adjusting focusing
Mirror is overlapped it with reference line at spot center；
Step 5: leveling colour band:
Rotating shutter allows diffraction colour band to appear near crack, is overlapped colour band center with reference line by adjusting grating；
Step 6: incident crack is installed:
It uses instead to be imaged on incident crack by lens barrel, incident crack is thin incident folder compared with weak light source low pressure pen type mercury lamp
Seam, and the imaging scale for being imaged on incident crack is 1:1.1, observes imaging contexts in outgoing crevice place with microscope, adjustment is aobvious
Micro mirror sees clearly incident crack picture, when the thin incident crack of rotation to image quality preferably when, fixed thin crack；
Step 7: focusing:
Thick crack is placed in outgoing crack, rotating shutter allows zero order light to appear in thick crack, is imaged with micro- sem observation
Situation is adjusted thin incident crack picture and thick incident crack, judges the relative position of incident crack imaging and thick crack, and
So that disconnected thin incident crack picture and thick incident crack are on the same face, the angle of thin incidence crack is 15 degree, thick incidence crack
Angle is 20 degree；
Step 8: installation outgoing crack:
It uses thin slit at exit slit instead, with micro- sem observation, adjusts thin slit, be directed at it formed by entrance slit
Picture, fixed exit slit.
Embodiment three: the present embodiment and the difference of embodiment one and embodiment two are:
Debugging step is as follows:
Step 1: arrangement reference line:
Using the two crack lines of centres as reference line；
Step 2: leveling collimating mirror；
Thick slit is placed at entrance slit, tungsten lamp light, according to full collimating mirror, is adjusted after lens barrel illuminates thick entrance slit
Its institute is overlapped at spot center with reference line by whole collimating mirror；
Step 3: leveling grating:
Grating, rotating shutter are loaded onto, light impinges upon on collimating mirror again through optical grating reflection, it focuses near incident crack,
Grating zero level spot center is overlapped with reference line by adjusting grating；
Step 4: leveling focuses:
Rotating shutter, light is imaged near outgoing crack after optical grating reflection is beaten on focus lamp, by adjusting focusing
Mirror is overlapped it with reference line at spot center；
Step 5: leveling colour band:
Rotating shutter allows diffraction colour band to appear near crack, is overlapped colour band center with reference line by adjusting grating；
Step 6: incident crack is installed:
It uses instead to be imaged on incident crack by lens barrel, incident crack is thin incident folder compared with weak light source low pressure pen type mercury lamp
Seam, and the imaging scale for being imaged on incident crack is 1:1.3, observes imaging contexts in outgoing crevice place with microscope, adjustment is aobvious
Micro mirror sees clearly incident crack picture, when the thin incident crack of rotation to image quality preferably when, fixed thin crack；
Step 7: focusing:
Thick crack is placed in outgoing crack, rotating shutter allows zero order light to appear in thick crack, is imaged with micro- sem observation
Situation is adjusted thin incident crack picture and thick incident crack, judges the relative position of incident crack imaging and thick crack, and
So that disconnected thin incident crack picture and thick incident crack are on the same face, the angle of thin incidence crack is 18 degree, thick incidence crack
Angle is 16 degree；
Step 8: installation outgoing crack:
It uses thin slit at exit slit instead, with micro- sem observation, adjusts thin slit, be directed at it formed by entrance slit
Picture, fixed exit slit.
Example IV: the present embodiment and the difference of embodiment one, embodiment two and embodiment three are:
Debugging step is as follows:
Step 1: arrangement reference line:
Using the two crack lines of centres as reference line；
Step 2: leveling collimating mirror；
Thick slit is placed at entrance slit, tungsten lamp light, according to full collimating mirror, is adjusted after lens barrel illuminates thick entrance slit
Its institute is overlapped at spot center with reference line by whole collimating mirror；
Step 3: leveling grating:
Grating, rotating shutter are loaded onto, light impinges upon on collimating mirror again through optical grating reflection, it focuses near incident crack,
Grating zero level spot center is overlapped with reference line by adjusting grating；
Step 4: leveling focuses:
Rotating shutter, light is imaged near outgoing crack after optical grating reflection is beaten on focus lamp, by adjusting focusing
Mirror is overlapped it with reference line at spot center；
Step 5: leveling colour band:
Rotating shutter allows diffraction colour band to appear near crack, is overlapped colour band center with reference line by adjusting grating；
Step 6: incident crack is installed:
It uses instead to be imaged on incident crack by lens barrel, incident crack is thin incident folder compared with weak light source low pressure pen type mercury lamp
Seam, and the imaging scale for being imaged on incident crack is 1:1.4, observes imaging contexts in outgoing crevice place with microscope, adjustment is aobvious
Micro mirror sees clearly incident crack picture, when the thin incident crack of rotation to image quality preferably when, fixed thin crack；
Step 7: focusing:
Thick crack is placed in outgoing crack, rotating shutter allows zero order light to appear in thick crack, is imaged with micro- sem observation
Situation is adjusted thin incident crack picture and thick incident crack, judges the relative position of incident crack imaging and thick crack, and
So that disconnected thin incident crack picture and thick incident crack are on the same face, the angle of thin incidence crack is 13 degree, thick incidence crack
Angle is 19 degree；
Step 8: installation outgoing crack:
It uses thin slit at exit slit instead, with micro- sem observation, adjusts thin slit, be directed at it formed by entrance slit
Picture, fixed exit slit.
Embodiment five: the present embodiment and the difference of embodiment one, embodiment two, embodiment three and example IV are:
Debugging step is as follows:
Step 1: arrangement reference line:
Using the two crack lines of centres as reference line；
Step 2: leveling collimating mirror；
Thick slit is placed at entrance slit, tungsten lamp light, according to full collimating mirror, is adjusted after lens barrel illuminates thick entrance slit
Its institute is overlapped at spot center with reference line by whole collimating mirror；
Step 3: leveling grating:
Grating, rotating shutter are loaded onto, light impinges upon on collimating mirror again through optical grating reflection, it focuses near incident crack,
Grating zero level spot center is overlapped with reference line by adjusting grating；
Step 4: leveling focuses:
Rotating shutter, light is imaged near outgoing crack after optical grating reflection is beaten on focus lamp, by adjusting focusing
Mirror is overlapped it with reference line at spot center；
Step 5: leveling colour band:
Rotating shutter allows diffraction colour band to appear near crack, is overlapped colour band center with reference line by adjusting grating；
Step 6: incident crack is installed:
It uses instead to be imaged on incident crack by lens barrel, incident crack is thin incident folder compared with weak light source low pressure pen type mercury lamp
Seam, and the imaging scale for being imaged on incident crack is 1:1.5, observes imaging contexts in outgoing crevice place with microscope, adjustment is aobvious
Micro mirror sees clearly incident crack picture, when the thin incident crack of rotation to image quality preferably when, fixed thin crack；
Step 7: focusing:
Thick crack is placed in outgoing crack, rotating shutter allows zero order light to appear in thick crack, is imaged with micro- sem observation
Situation is adjusted thin incident crack picture and thick incident crack, judges the relative position of incident crack imaging and thick crack, and
So that disconnected thin incident crack picture and thick incident crack are on the same face, the angle of thin incidence crack is 17 degree, thick incidence crack
Angle is 23 degree；
Step 8: installation outgoing crack:
It uses thin slit at exit slit instead, with micro- sem observation, adjusts thin slit, be directed at it formed by entrance slit
Picture, fixed exit slit.
It should be noted that, in this document, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to
Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those
Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or equipment
Intrinsic element.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (3)
1. optical path adjustment method, including spectrometer ontology (1) and debugging step, it is characterised in that: in the spectrometer ontology (1)
It is fixedly connected on the left of chamber grating (2), the top on the right side of grating (2) inner cavity is fixedly connected with focus lamp (3), the light
Bottom on the right side of spectrometer ontology (1) inner cavity is fixedly connected with collimating mirror (4), the focus lamp (3) and collimating mirror (4) mirror surface and light
Relatively, the bottom on the left of the spectrometer ontology (1) is provided with incident crack (5) grid (2), the left side of the incidence crack (5)
It is provided with lens barrel (6), the top on the left of the spectrometer ontology (1) is provided with outgoing crack (7), outgoing crack (7)
Left side is provided with detector (8), and the bottom of the detector (8) is fixedly connected with spectrometer ontology (1)；
The spectrometer ontology (1) includes quartz lens (9), the quartz lens (9) and collimating mirror (4) relatively, the grating
(2) it is provided between lens barrel (6) collimating mirror spot center (10), the grating (2), collimating mirror spot center (10) and lens barrel
(6) reference line (11) are provided at center.
Debugging step is as follows:
Step 1: arrangement reference line:
Using the two crack lines of centres as reference line；
Step 2: leveling collimating mirror；
Thick slit is placed at entrance slit, for tungsten lamp light according to full collimating mirror after lens barrel illuminates thick entrance slit, adjustment is quasi-
Its institute is overlapped at spot center with reference line by straight mirror；
Step 3: leveling grating:
Grating, rotating shutter are loaded onto, light impinges upon on collimating mirror again through optical grating reflection, focuses near incident crack, passes through
Adjustment grating is overlapped grating zero level spot center with reference line；
Step 4: leveling focuses:
Rotating shutter, light are imaged near outgoing crack after optical grating reflection is beaten on focus lamp, make by adjusting focus lamp
It is overlapped at spot center with reference line；
Step 5: leveling colour band:
Rotating shutter allows diffraction colour band to appear near crack, is overlapped colour band center with reference line by adjusting grating；
Step 6: incident crack is installed:
It uses pen type mercury lamp instead, by lens barrel imaging re-incident in crack, observes imaging contexts in outgoing crevice place with microscope, adjust
Whole microscope sees clearly incident crack picture, fixed thin crack；
Step 7: focusing:
Thick crack is placed in outgoing crack, rotating shutter allows zero order light to appear in thick crack, and feelings are imaged with micro- sem observation
Condition judges the relative position of incident crack imaging and thick crack, and the angle of thin incidence crack is 15 degree, the angle of thick incidence crack
Degree is 20 degree；
Step 8: installation outgoing crack:
It uses thin slit at exit slit instead, with micro- sem observation, adjusts thin slit, it is made to be directed at entrance slit imaging, Gu
Determine exit slit.
2. optical path adjustment method according to claim 1, it is characterised in that: the pen type mercury lamp of using instead is low compared with weak light source
Pen type mercury lamp is pressed, the imaging scale for being imaged on incident crack is 1:1, and incident crack uses thin crack instead, rotates thin incident crack
When to image quality preferably, thin crack is fixed.
3. optical path adjustment method according to claim 1, it is characterised in that: described to adjust thin incident crack picture and thick incidence
Crack, and judge thin incident crack picture and thick incident crack on the same face.
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| CN112433420A (en) * | 2020-11-30 | 2021-03-02 | 中国科学院长春光学精密机械与物理研究所 | Rapid focus detection device and method for aerial camera |
| CN113551876A (en) * | 2021-07-09 | 2021-10-26 | 安徽创谱仪器科技有限公司 | Positioning system and method of optical instrument and optical instrument |
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