CN108982922B - Electrostatic detection device for wafer production environment - Google Patents
Electrostatic detection device for wafer production environment Download PDFInfo
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- CN108982922B CN108982922B CN201811166536.5A CN201811166536A CN108982922B CN 108982922 B CN108982922 B CN 108982922B CN 201811166536 A CN201811166536 A CN 201811166536A CN 108982922 B CN108982922 B CN 108982922B
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- 238000001514 detection method Methods 0.000 title claims abstract description 37
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 34
- 239000000523 sample Substances 0.000 claims abstract description 54
- 230000003068 static effect Effects 0.000 claims abstract description 22
- 230000005611 electricity Effects 0.000 claims abstract description 21
- 230000001681 protective effect Effects 0.000 claims description 47
- 230000000670 limiting effect Effects 0.000 claims description 20
- 238000007689 inspection Methods 0.000 claims description 14
- 238000004891 communication Methods 0.000 claims description 4
- 125000003003 spiro group Chemical group 0.000 claims description 2
- 241000252254 Catostomidae Species 0.000 description 3
- 230000002829 reductive effect Effects 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000010415 tidying Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/24—Arrangements for measuring quantities of charge
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- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention relates to the technical field of electrostatic detection accessory devices, in particular to an electrostatic detection device for a wafer production environment; the static electricity detector comprises a static electricity detector body, a connecting wire and a probe gun, wherein a display screen, a control key group and a port group are arranged on the front side wall of the static electricity detector body, and a probe is arranged on the probe gun; the device also comprises a front connecting column, a handle, a connecting frame, a front rotating column, a connecting spring and a rear rotating column; the device also comprises two groups of fixing blocks, two groups of pull plates, two groups of connecting rods, two groups of springs and two groups of connecting plates, wherein the two groups of fixing blocks are respectively provided with a through hole; still include four sets of bolts, four sets of nuts, four sets of landing legs and four sets of dwang, four sets of dwang one end all rotatable be provided with the universal wheel, four sets of dwang other ends all are provided with the sucking disc, all are provided with first through-hole on four sets of landing legs, all are provided with the second through-hole on four sets of dwang, all are provided with the locking pad between four sets of nuts and the four sets of dwang.
Description
Technical Field
The invention relates to the technical field of electrostatic detection accessory devices, in particular to an electrostatic detection device for a wafer production environment.
Background
As is well known, an electrostatic inspection apparatus for a wafer production environment is an auxiliary apparatus for performing electrostatic inspection on a production environment during a wafer production process, so that a wafer is more safely produced, and is widely used in the field of electrostatic inspection; the existing electrostatic detection device for the wafer production environment comprises an electrostatic detector body, a connecting wire and a probe gun, wherein the front side wall of the electrostatic detector body is provided with a display screen, a control key group and a port group, the probe gun is connected with the electrostatic detector body through the connecting wire, and the probe gun is provided with a probe; when the conventional electrostatic detection device for the wafer production environment is used, electrostatic detection is performed through a probe, data display is performed through a display screen, operation control is performed on an electrostatic detector body through a control key set, various other wires are connected through a port set, the electrostatic detector body, a connecting wire, a probe gun and the probe are common electric devices in the market, and the electrostatic detector body, the connecting wire, the probe gun and the probe can be used only by being mutually and electrically connected with a commercial power according to a purchased use instruction and being electrically connected with the commercial power when being used again, so that the electrostatic detector is not described again herein; the existing electrostatic detection device for the wafer production environment is used, when the connecting wires are too long, winding arrangement cannot be conveniently carried out, so that the connecting wires are easy to wind from phases, and the practicability is poor; the probe gun cannot be stably placed conveniently, so that the probe gun is inconvenient to use; and the whole body cannot be conveniently moved, so that the adaptability is poor.
Disclosure of Invention
In order to solve the technical problems, the invention provides a device which can conveniently carry out winding arrangement when connecting wires are too long, so that the connecting wires are not easy to wind from the phases, and the practicability is improved; the probe gun can be conveniently and stably placed, so that the probe gun is convenient to use; and the whole electrostatic detection device can be conveniently moved, so that the adaptability of the electrostatic detection device is improved, and the electrostatic detection device is used for the wafer production environment.
The invention relates to an electrostatic detection device for a wafer production environment, which comprises an electrostatic detector body, a connecting wire and a probe gun, wherein the front side wall of the electrostatic detector body is provided with a display screen, a control key group and a port group; the front connecting column is arranged in front of the top end of the static electricity detector body, the handle is arranged on the connecting frame, the front end of the front rotating column is connected with the connecting frame, the rear end of the front rotating column penetrates through the front connecting column and extends to the rear side of the front connecting column to be connected with the front end of the connecting spring, and the rear end of the connecting spring is connected with the front end of the rear rotating column; the static electricity detector comprises a static electricity detector body, and is characterized by further comprising two groups of fixed blocks, two groups of pull plates, two groups of connecting rods, two groups of springs and two groups of connecting plates, wherein the two groups of fixed blocks are respectively arranged on the front side and the rear side of the left side wall of the static electricity detector body, through holes are formed in the two groups of fixed blocks, one ends of the two groups of connecting rods are respectively connected with the two groups of pull plates, the other ends of the two groups of connecting rods respectively penetrate through the two groups of through holes and respectively extend into the inner sides of the two groups of fixed blocks to be connected with the two groups of connecting plates, the two groups of springs are respectively sleeved on the outer sides of the two groups of connecting rods, one ends of the two groups of springs are respectively connected with the inner side walls of the fixed blocks, and the other ends of the two groups of springs are respectively connected with the outer sides of the two groups of connecting plates; still including four sets of bolts, four sets of nuts, four sets of landing legs and four sets of dwells, four sets of landing legs are installed respectively in the left front side of static detector body bottom, right front side, left rear side and right rear side, four sets of dwells one end all rotatable be provided with the universal wheel, four sets of dwells other end all are provided with the sucking disc, all be provided with first through-hole on four sets of landing legs, all be provided with the second through-hole on four sets of dwells, four sets of bolts pass four sets of first through-holes and four sets of second through-holes respectively and insert respectively and the spiro union is to four sets of nuts inside, all be provided with the locking pad between four sets of nuts and the four sets of dwells, four sets of locking pads suit respectively in four sets of bolt outsides.
The invention relates to an electrostatic detection device for a wafer production environment, which further comprises a protective shell, wherein a protective cavity is arranged in the protective shell, a protective opening is formed in the right side of the protective shell in a communicating manner, a protective shell cover is arranged on a probe, a probe is positioned in the protective cavity, limiting columns are arranged at the top end and the bottom end of the probe, elastic ropes are arranged at the top end and the bottom end of the protective shell, and two groups of elastic ropes are respectively sleeved outside the two groups of limiting columns.
The invention relates to an electrostatic detection device for a wafer production environment, which further comprises a rear connecting column, wherein the rear connecting column is arranged behind the top end of an electrostatic detector body, a placing groove is formed in the front side wall of the rear connecting column, a ball bearing and a limiting piece are arranged in the placing groove, a baffle piece is arranged on the front side of the placing groove, and the electrostatic detection device further comprises a rotating tube, and the rear side of the rotating tube is inserted into the ball bearing through the baffle piece and is connected with the limiting piece.
The invention relates to an electrostatic detection device for a wafer production environment, which is characterized in that the front side of a rotating pipe is communicated with a communication port, and the electrostatic detection device also comprises an adjusting spring set and a fixed ring, wherein one end of the adjusting spring set is connected with the inner side of the rotating pipe, the other end of the adjusting spring set is connected with the fixed ring, a notch is arranged on the fixed ring, and the rear side of a rear rotating column is clamped in the fixed ring.
The invention relates to an electrostatic detection device for a wafer production environment, which further comprises a fixed column and a protective cover, wherein the fixed column is arranged on the front side of an electrostatic detector body, the fixed column is positioned above a control key group and a port group, the top end of the protective cover is hinged with the fixed column, and the control key group and the port group are both positioned in the protective cover.
The invention relates to an electrostatic detection device for a wafer production environment, which also comprises a torsion spring and a fixing clamp, wherein the fixing clamp is arranged on the side wall of a rear rotating column through the torsion spring.
The invention relates to an electrostatic detection device for a wafer production environment, which further comprises two groups of lifting rods and lifting rods, wherein the left sides and the right sides of the lifting rods are respectively connected with the upper parts of the two groups of lifting rods, and the lower parts of the two groups of lifting rods are arranged at the top end of an electrostatic detector body.
According to the electrostatic detection device for the wafer production environment, when the two groups of elastic ropes are respectively sleeved outside the two groups of limiting posts, the two groups of elastic ropes are in a stretching state.
Compared with the prior art, the invention has the beneficial effects that: the handle can be manually rotated to drive the rear rotating column on the connecting frame to rotate, one end of the connecting wire is fixed on the rear rotating column, so that the connecting wire can be wound and tidied conveniently, and when the connecting wire is overlong, the connecting wire can be wound and tidied conveniently, so that the connecting wire is not easy to wind from the phase, and the practicability is improved; the two groups of pull plates can be pulled outwards, the two groups of pull plates respectively drive the two groups of connecting plates to move forwards and backwards, the probe gun is placed, the two groups of pull plates are loosened, the two groups of connecting plates clamp and fix the probe gun under the action of the two groups of springs, so that the probe gun can be conveniently and stably placed, the use is convenient, and when the probe gun is detached, the two groups of pull plates are pulled open, the probe gun is taken out, the stable placement or detachment can be conveniently carried out, and the use limitation of the probe gun is reduced; moreover, the four groups of universal wheels can be used for enabling the whole body to conveniently move, stability is improved through the four groups of suckers, when the whole body needs to move, the four groups of nuts are unscrewed, the rotating rod is rotated, the universal wheel end is rotated to the lower side, the four groups of nuts are screwed down, when the whole body needs to be stable, the four groups of nuts are unscrewed, the rotating rod is rotated, the sucker end is rotated to the lower side, the four groups of nuts are screwed down, the whole body can be conveniently moved, accordingly adaptability is improved, the locking pad is convenient to lock between the nuts and the rotating rod, and use reliability is improved.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic view of the structure of the front and rear connection posts;
FIG. 3 is a schematic view of the internal structure of the rotating tube;
FIG. 4 is a schematic view of the structure of the connection of the fixed block and the connection plate;
FIG. 5 is an enlarged partial view of portion A of FIG. 1;
The reference numerals in the drawings: 1. an electrostatic detector body; 2. connecting wires; 3. a probe gun; 4. a probe; 5. a front connecting column; 6. a handle; 7. a connecting frame; 8. a front rotating column; 9. a rear rotating column; 10. a fixed block; 11. pulling a plate; 12. a connecting rod; 13. sleeving a spring; 14. a connecting plate; 15. a bolt; 16. a nut; 17. a support leg; 18. a rotating lever; 19. a locking pad; 20. a protective shell; 21. a limit column; 22. an elastic rope; 23. a rear connection post; 24. a baffle; 25. a rotary tube; 26. a fixing ring; 27. fixing the column; 28. a protective cover; 29. a fixing clamp; 30. a lifting rod; 31. a handle; 32. a display screen; 33. a control key group; 34. a port group.
Detailed Description
The following describes in further detail the embodiments of the present invention with reference to the drawings and examples. The following examples are illustrative of the invention and are not intended to limit the scope of the invention.
As shown in fig. 1 to 5, the electrostatic detection device for a wafer production environment of the present invention comprises an electrostatic detector body 1, a connection wire 2 and a probe gun 3, wherein a display screen 32, a control key group 33 and a port group 34 are arranged on the front side wall of the electrostatic detector body 1, the probe gun 3 is connected with the electrostatic detector body 1 through the connection wire 2, and a probe 4 is arranged on the probe gun 3; the static electricity detector further comprises a front connecting column 5, a handle 6, a connecting frame 7, a front rotating column 8, a connecting spring and a rear rotating column 9, wherein the front connecting column 5 is arranged in front of the top end of the static electricity detector body 1, the handle 6 is arranged on the connecting frame 7, the front end of the front rotating column 8 is connected with the connecting frame 7, and the rear end of the front rotating column 8 penetrates through the front connecting column 5 and extends out to the rear side of the front connecting column 5 to be connected with the front end of the connecting spring; the static electricity detector comprises a static electricity detector body 1, and is characterized by further comprising two groups of fixing blocks 10, two groups of pull plates 11, two groups of connecting rods 12, two groups of springs 13 and two groups of connecting plates 14, wherein the two groups of fixing blocks 10 are arranged on the front side and the rear side of the left side wall of the static electricity detector body 1, through holes are formed in the two groups of fixing blocks 10, one ends of the two groups of connecting rods 12 are respectively connected with the two groups of pull plates 11, the other ends of the two groups of connecting rods 12 respectively penetrate through the two groups of through holes and respectively extend into the inner sides of the two groups of fixing blocks 10 to be connected with the two groups of connecting plates 14, the two groups of springs 13 are respectively sleeved outside the two groups of connecting rods 12, one ends of the two groups of springs 13 are respectively connected with the inner side walls of the fixing blocks 10, and the other ends of the two groups of springs 13 are respectively connected with the outer sides of the two groups of connecting plates 14; the static electricity detector comprises a static electricity detector body 1, and is characterized by further comprising four groups of bolts 15, four groups of nuts 16, four groups of supporting legs 17 and four groups of rotating rods 18, wherein the four groups of supporting legs 17 are respectively arranged at the left front side, the right front side, the left rear side and the right rear side of the bottom end of the static electricity detector body 1, one end of each of the four groups of rotating rods 18 is rotatably provided with a universal wheel, the other end of each of the four groups of rotating rods 18 is provided with a sucker, the four groups of supporting legs 17 are provided with first through holes, the four groups of rotating rods 18 are respectively provided with second through holes, the four groups of bolts 15 respectively pass through the four groups of first through holes and the four groups of second through holes and are respectively inserted into the four groups of nuts 16 and are screwed into the four groups of nuts 16, locking pads 19 are respectively arranged between the four groups of nuts 16 and the four groups of rotating rods 18, and the four groups of locking pads 19 are respectively sleeved outside the four groups of bolts 15; the handle can be manually rotated to drive the rear rotating column on the connecting frame to rotate, one end of the connecting wire is fixed on the rear rotating column, so that the connecting wire can be wound and tidied conveniently, and when the connecting wire is overlong, the connecting wire can be wound and tidied conveniently, so that the connecting wire is not easy to wind from the phase, and the practicability is improved; the two groups of pull plates can be pulled outwards, the two groups of pull plates respectively drive the two groups of connecting plates to move forwards and backwards, the probe gun is placed, the two groups of pull plates are loosened, the two groups of connecting plates clamp and fix the probe gun under the action of the two groups of springs, so that the probe gun can be conveniently and stably placed, the use is convenient, and when the probe gun is detached, the two groups of pull plates are pulled open, the probe gun is taken out, the stable placement or detachment can be conveniently carried out, and the use limitation of the probe gun is reduced; moreover, the four groups of universal wheels can be used for enabling the whole body to conveniently move, stability is improved through the four groups of suckers, when the whole body needs to move, the four groups of nuts are unscrewed, the rotating rod is rotated, the universal wheel end is rotated to the lower side, the four groups of nuts are screwed down, when the whole body needs to be stable, the four groups of nuts are unscrewed, the rotating rod is rotated, the sucker end is rotated to the lower side, the four groups of nuts are screwed down, the whole body can be conveniently moved, accordingly adaptability is improved, the locking pad is convenient to lock between the nuts and the rotating rod, and use reliability is improved.
The invention relates to an electrostatic detection device for a wafer production environment, which further comprises a protective shell 20, wherein a protective cavity is arranged in the protective shell 20, a protective opening is communicated on the right side of the protective shell 20, the protective shell 20 is covered on a probe 3, a probe 4 is positioned in the protective cavity, limit posts 21 are arranged at the top end and the bottom end of the probe 3, elastic ropes 22 are arranged at the top end and the bottom end of the protective shell 20, and two groups of elastic ropes 22 are respectively sleeved outside the two groups of limit posts 21; the material protection can be carried out when the probe is idle through the protective housing, so that the use reliability is improved.
The invention relates to an electrostatic detection device for a wafer production environment, which further comprises a rear connecting column 23, wherein the rear connecting column 23 is arranged behind the top end of an electrostatic detector body 1, a placing groove is formed in the front side wall of the rear connecting column 23, a ball bearing and a limiting piece are arranged in the placing groove, a baffle piece 24 is arranged on the front side of the placing groove, the electrostatic detection device further comprises a rotating tube 25, and the rear side of the rotating tube 25 penetrates through the baffle piece 24 to be inserted into the ball bearing and is connected with the limiting piece; it can rotate through ball bearing convenient supplementary post of post that rotates, and spacing piece is spacing to the pivoted tube, prevents that it from leaping out the standing groove, and spacing piece and pivoted tube rigid connection, and when pivoted tube rotated, spacing piece rotated along with it to ball bearing clamps between separation blade and spacing piece, thereby can not leaping out the standing groove, can mechanical locking between spacing piece and the standing groove, thereby makes things convenient for spacing piece further to fix.
The invention relates to an electrostatic detection device for a wafer production environment, wherein the front side of a rotating pipe 25 is provided with a communication port in a communication way, and the electrostatic detection device also comprises an adjusting spring set and a fixed ring 26, wherein one end of the adjusting spring set is connected with the inner side of the rotating pipe 25, the other end of the adjusting spring set is connected with the fixed ring 26, a notch is arranged on the fixed ring 26, and the rear side of a rear rotating column 9 is clamped in the fixed ring 26; it can be through the rotation pipe to back rotation post rear side plug up, makes the connecting wire be difficult for droing, drives the solid fixed ring through the adjusting spring group and carries out the clamping to back rotation post fixedly, makes things convenient for back rotation post to dismantle and break away from to make things convenient for the connecting wire to dismantle and assemble.
The invention relates to an electrostatic detection device for a wafer production environment, which further comprises a fixed column 27 and a protective cover 28, wherein the fixed column 27 is arranged on the front side of an electrostatic detector body 1, the fixed column 27 is positioned above a control key group 33 and a port group 34, the top end of the protective cover 28 is hinged with the fixed column 27, and the control key group 33 and the port group 34 are both positioned inside the protective cover 28; the control key group can be protected through the protective cover, and false touch is prevented.
The invention relates to an electrostatic detection device for a wafer production environment, which also comprises a torsion spring and a fixing clamp 29, wherein the fixing clamp 29 is arranged on the side wall of a rear rotating column 9 through the torsion spring; the connecting wire fixing device has the advantages that one end of a connecting wire can be conveniently fixed on the rear connecting column through the cooperation of the fixing clamp and the rear connecting column, and when the connecting wire fixing device is fixed, the fixing clamp is broken off, one end of the connecting wire is placed between the fixing clamp and the rear connecting column, and the connecting wire fixing device is limited and fixed under the action of the torsion spring.
The invention relates to an electrostatic detection device for a wafer production environment, which further comprises two groups of lifting rods 30 and lifting handles 31, wherein the left side and the right side of each lifting handle 31 are respectively connected with the upper parts of the two groups of lifting rods 30, and the lower parts of the two groups of lifting rods 30 are respectively arranged at the top end of an electrostatic detector body 1; the portable electric bicycle can be conveniently lifted integrally through the handle, and is more portable.
According to the electrostatic detection device for the wafer production environment, when the two groups of elastic ropes 22 are respectively sleeved outside the two groups of limiting posts 21, the two groups of elastic ropes 22 are in a stretching state; the protective shell can be limited by two groups of elastic ropes in a stretching state, so that the protective shell is convenient to fix, and when the protective shell is taken off, the two groups of elastic ropes are not sleeved at the two groups of limiting posts under the elastic action, so that the protective shell can be taken off conveniently.
According to the electrostatic detection device for the wafer production environment, when the electrostatic detection device works, the handle can be manually rotated to drive the rear rotating column on the connecting frame to rotate, one end of the connecting wire is fixed on the rear rotating column, so that the connecting wire can be wound and tidied conveniently, and when the connecting wire is overlong, the winding and tidying can be carried out conveniently, so that the connecting wire is not easy to wind from the other side, and the practicability is improved; the two groups of pull plates can be pulled outwards, the two groups of pull plates respectively drive the two groups of connecting plates to move forwards and backwards, the probe gun is placed, the two groups of pull plates are loosened, the two groups of connecting plates clamp and fix the probe gun under the action of the two groups of springs, so that the probe gun can be conveniently and stably placed, the use is convenient, and when the probe gun is detached, the two groups of pull plates are pulled open, the probe gun is taken out, the stable placement or detachment can be conveniently carried out, and the use limitation of the probe gun is reduced; the four groups of universal wheels can be used for enabling the whole body to conveniently move, stability is improved through the four groups of suckers, when the whole body needs to move, the four groups of nuts are unscrewed, the rotating rod is rotated, the universal wheel end is rotated to the lower side, the four groups of nuts are screwed down, when the whole body needs to be stable, the four groups of nuts are unscrewed, the rotating rod is rotated, the sucker end is rotated to the lower side, the four groups of nuts are screwed down, the whole body can conveniently move, so that adaptability is improved, the locking pad is convenient for locking between the nuts and the rotating rod, and use reliability is improved; the material protection can be carried out on the probe when the probe is idle through the protective shell, so that the use reliability is improved; the ball bearing is used for conveniently assisting the rear rotating column to rotate, the limiting piece limits the rotating pipe, the rotating pipe is prevented from being out of the placing groove, the limiting piece is rigidly connected with the rotating pipe, when the rotating pipe rotates, the limiting piece rotates together with the rotating pipe, the ball bearing is clamped between the blocking piece and the limiting piece, so that the rotating pipe cannot be out of the placing groove, the limiting piece and the placing groove can be mechanically locked, and further fixing of the limiting piece is facilitated; the rear side of the rear rotating column is plugged through the rotating tube, so that the connecting wires are not easy to fall off, the fixing ring is driven by the adjusting spring group to clamp and fix the rear rotating column, and the rear rotating column is convenient to detach and separate, so that the connecting wires are convenient to disassemble and assemble; the control key set can be protected through the protective cover, so that false touch is prevented; one end of the connecting wire can be conveniently fixed on the rear connecting column through the cooperation of the fixing clamp and the rear connecting column, and when the connecting wire is fixed, the fixing clamp is broken off, one end of the connecting wire is arranged between the fixing clamp and the rear connecting column, and the connecting wire is limited and fixed under the action of the torsion spring; the whole body of the portable electric bicycle can be conveniently lifted by carrying the handle by hands, so that the portable electric bicycle is more portable; the protective housing can be limited through two groups of elastic ropes in a stretching state, so that the protective housing is convenient to fix, and when the protective housing is taken off, the two groups of elastic ropes are not sleeved at the two groups of limiting posts under the elastic action, so that the protective housing can be taken off conveniently.
The installation mode, the connection mode or the setting mode of all the components are common mechanical modes, and the specific structure, the model and the coefficient index of all the components are self-contained technologies, so long as the beneficial effects can be achieved, the implementation is omitted.
In the electrostatic inspection device for wafer production environment of the present invention, unless otherwise stated, terms such as "upper, lower, left, right, front, rear, inner, outer, vertical and horizontal" and the like, which are included in terms, merely represent the orientation of the term in a normal use state, or are commonly known as those skilled in the art, and should not be construed as limiting the term, meanwhile, the terms such as "first", "second" and "third" do not represent specific numbers or sequences, and are merely used for distinguishing the names.
The foregoing is merely a preferred embodiment of the present invention, and it should be noted that it will be apparent to those skilled in the art that modifications and variations can be made without departing from the technical principles of the present invention, and these modifications and variations should also be regarded as the scope of the invention.
Claims (8)
1. The utility model provides an electrostatic detection device for wafer production environment, includes electrostatic detector body (1), connecting wire (2) and spy rifle (3), and electrostatic detector body (1) front side wall is provided with display screen (32), control key group (33) and port group (34), and spy rifle (3) are connected with electrostatic detector body (1) through connecting wire (2), are provided with probe (4) on spy rifle (3); the static electricity detector is characterized by further comprising a front connecting column (5), a handle (6), a connecting frame (7), a front rotating column (8), a connecting spring and a rear rotating column (9), wherein the front connecting column (5) is arranged in front of the top end of the static electricity detector body (1), the handle (6) is arranged on the connecting frame (7), the front end of the front rotating column (8) is connected with the connecting frame (7), and the rear end of the front rotating column (8) penetrates through the front connecting column (5) and extends out to the rear side of the front connecting column (5) to be connected with the front end of the connecting spring; the static electricity detector comprises a static electricity detector body (1), and is characterized by further comprising two groups of fixing blocks (10), two groups of pull plates (11), two groups of connecting rods (12), two groups of springs (13) and two groups of connecting plates (14), wherein the two groups of fixing blocks (10) are respectively arranged on the front side and the rear side of the left side wall of the static electricity detector body (1), through holes are respectively formed in the two groups of fixing blocks (10), one ends of the two groups of connecting rods (12) are respectively connected with the two groups of pull plates (11), the other ends of the two groups of connecting rods (12) respectively penetrate through the two groups of through holes and respectively extend into the inner sides of the two groups of fixing blocks (10) to be connected with the two groups of connecting plates (14), the two groups of springs (13) are respectively sleeved on the outer sides of the two groups of connecting rods (12), one ends of the two groups of springs (13) are respectively connected with the inner side walls of the fixing blocks (10), and the other ends of the two groups of springs (13) are respectively connected with the outer sides of the two groups of connecting plates (14). Still including four bolt (15) of group, four nut (16) of group, four landing leg (17) and four dwang (18) of group, four landing leg (17) are installed respectively in the left front side of static electricity detector body (1) bottom, the right front side, left rear side and right rear side, four dwang (18) one end all rotatable is provided with the universal wheel, four dwang (18) other end all is provided with the sucking disc, all be provided with first through-hole on four landing leg (17) of group, all be provided with the second through-hole on four dwang (18) of group, four bolt (15) of group pass four first through-holes and four second through-holes of group respectively and insert respectively and the spiro union to four nut (16) insidely, all be provided with locking pad (19) between four nut (16) and four dwang (18) of group, four locking pad (19) suit are in four bolt (15) of group outside respectively.
2. The electrostatic detection device for a wafer production environment according to claim 1, further comprising a protective shell (20), wherein a protective cavity is formed in the protective shell (20), a protective opening is formed in the right side of the protective shell (20) in a communicating mode, the protective shell (20) is covered on the probe gun (3), the probe (4) is located in the protective cavity, limit posts (21) are arranged at the top end and the bottom end of the probe gun (3), elastic ropes (22) are arranged at the top end and the bottom end of the protective shell (20), and two groups of elastic ropes (22) are respectively sleeved outside the two groups of limit posts (21).
3. An electrostatic inspection device for a wafer production environment according to claim 2, further comprising a rear connection post (23), wherein the rear connection post (23) is mounted behind the top end of the electrostatic inspection device body (1), a placement groove is formed in the front side wall of the rear connection post (23), a ball bearing and a limiting piece are arranged in the placement groove, a baffle piece (24) is arranged on the front side of the placement groove, and the electrostatic inspection device further comprises a rotating tube (25), wherein the rear side of the rotating tube (25) penetrates through the baffle piece (24) to be inserted into the ball bearing and connected with the limiting piece.
4. An electrostatic inspection device for a wafer production environment according to claim 3, characterized in that the front side of the rotating tube (25) is provided with a communication port, and further comprises an adjusting spring group and a fixing ring (26), one end of the adjusting spring group is connected with the inner side of the rotating tube (25), the other end of the adjusting spring group is connected with the fixing ring (26), a notch is arranged on the fixing ring (26), and the rear side of the rear rotating column (9) is clamped inside the fixing ring (26).
5. The electrostatic inspection device according to claim 4, further comprising a fixing post (27) and a protective cover (28), wherein the fixing post (27) is mounted on the front side of the electrostatic inspection device body (1), the fixing post (27) is located above the control key group (33) and the port group (34), the top end of the protective cover (28) is hinged to the fixing post (27), and the control key group (33) and the port group (34) are located inside the protective cover (28).
6. An electrostatic inspection device for a wafer production environment as claimed in claim 5, further comprising a torsion spring and a mounting clip (29), the mounting clip (29) being mounted on the side wall of the rear rotating post (9) by the torsion spring.
7. The electrostatic inspection device according to claim 6, further comprising two sets of levers (30) and a handle (31), wherein the left side and the right side of the handle (31) are respectively connected to the upper sides of the two sets of levers (30), and the lower sides of the two sets of levers (30) are respectively mounted on the top end of the electrostatic inspection device body (1).
8. An electrostatic inspection device according to claim 7, characterized in that the two groups of elastic ropes (22) are stretched when they are respectively sleeved outside the two groups of limiting posts (21).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811166536.5A CN108982922B (en) | 2018-10-08 | 2018-10-08 | Electrostatic detection device for wafer production environment |
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| CN201811166536.5A CN108982922B (en) | 2018-10-08 | 2018-10-08 | Electrostatic detection device for wafer production environment |
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| CN108982922A CN108982922A (en) | 2018-12-11 |
| CN108982922B true CN108982922B (en) | 2024-04-30 |
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| CN110646695B (en) * | 2019-09-29 | 2021-07-23 | 潍坊歌尔微电子有限公司 | Static test tool |
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| JPH1062471A (en) * | 1996-08-22 | 1998-03-06 | Kasuga Denki Kk | Static electricity detector |
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| CN209231368U (en) * | 2018-10-08 | 2019-08-09 | 江苏英锐半导体有限公司 | A kind of electrostatic testing apparatus for wafer production environment |
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| US7358741B2 (en) * | 2004-05-25 | 2008-04-15 | Alps Electric Co., Ltd | Electrostatic detection apparatus and method, and coordinate detection program |
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| CN104952845A (en) * | 2014-03-28 | 2015-09-30 | 中芯国际集成电路制造(上海)有限公司 | Structure and method for detecting static of spraying nozzle |
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