Nothing Special   »   [go: up one dir, main page]

CN108803252B - Light guide plate production and processing technology and coating exposure equipment thereof - Google Patents

Light guide plate production and processing technology and coating exposure equipment thereof Download PDF

Info

Publication number
CN108803252B
CN108803252B CN201810680462.0A CN201810680462A CN108803252B CN 108803252 B CN108803252 B CN 108803252B CN 201810680462 A CN201810680462 A CN 201810680462A CN 108803252 B CN108803252 B CN 108803252B
Authority
CN
China
Prior art keywords
exposure
machine
substrate
base
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201810680462.0A
Other languages
Chinese (zh)
Other versions
CN108803252A (en
Inventor
覃佐波
刘莎莉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hefei Taiwo Intelligent Equipment Co ltd
Original Assignee
Hefei Taiwo Intelligent Equipment Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hefei Taiwo Intelligent Equipment Co ltd filed Critical Hefei Taiwo Intelligent Equipment Co ltd
Priority to CN201810680462.0A priority Critical patent/CN108803252B/en
Publication of CN108803252A publication Critical patent/CN108803252A/en
Application granted granted Critical
Publication of CN108803252B publication Critical patent/CN108803252B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • G03F7/2051Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16Coating processes; Apparatus therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Coating Apparatus (AREA)

Abstract

The invention discloses a light guide plate production and processing technology and coating exposure equipment thereof, wherein the equipment comprises a transfer table, a coating machine and an exposure machine; the coating machine is positioned on one side of the exposure machine, the transfer platform sequentially passes through the coating machine and the exposure machine, and the top of the exposure machine is provided with an ultraviolet light source generator; the middle of the exposure machine is provided with an exposure cavity, a rotary exposure device is arranged in the exposure cavity, and the rotary exposure device is connected to an ultraviolet light source generator through a light source incident device; the lower surface of the transfer platform is arranged on a first base cross beam and a second base cross beam, and the first base cross beam is arranged on a coating shockproof base below the coating machine; the second base beam is arranged on the exposure shockproof base below the exposure machine. The invention has the characteristics of no need of an exposure mask plate, high processing speed, high processing efficiency, large processing size and strong processing compatibility.

Description

Light guide plate production and processing technology and coating exposure equipment thereof
Technical Field
The invention relates to a light guide plate production and processing technology and coating exposure equipment thereof, in particular to a light guide plate production and processing technology and coating exposure equipment thereof, which do not need an exposure mask plate, have high processing speed, high processing efficiency, large processing size and strong processing compatibility.
Background
The light guide plate mesh point photoetching processing method comprises the following steps: laser dot processing, ink dot processing and hot pressing dot processing, wherein the ink dot processing is to coat ink on the processing surface of the light guide plate, and then the ink on the processing surface of the light guide plate is exposed through an exposure machine.
The photoetching processing of the light guide plate mesh points needs to use coating and exposure, and belongs to two processes and equipment, and the processing work section is long; uncertain factors are easy to appear in the processing, the reject ratio is high, and the processing time is long; the prior coating exposure equipment comprises surface exposure and single-point linear exposure, wherein the surface exposure needs a mask plate, and the mask plate can be formed only by processing for many times, so that the mask plate is high in manufacturing cost and long in manufacturing time; the single-point linear exposure machine does not need a mask plate, but has low processing speed and small processing area, and cannot be applied to large-size exposure.
The existing surface exposure machine generally adopts lower exposure, light passes through a mask plate from bottom to top and then reaches a coating surface below a light guide plate, an exposure area of the coating surface is solidified into a needed mesh point microstructure, the pattern of the mesh point microstructure is transcribed through the pattern on the mask plate, the manufacturing cost of the mask plate and the mesh point microstructure is very high, the larger the size of the light guide plate is, the manufacturing cost of the mask plate is higher, and the processing cost of mesh points is higher. The mask plate is made of optical glass and an optical cement coating layer which are used as raw materials, and most of the mask plates are imported from foreign countries at present, so that the raw material incoming period is long. If the upper exposure is adopted, the lower exposure difficulty is higher, the upper exposure mask plate is arranged above the coating layer, the distance between the coating layer and the mask plate needs to be ensured, the coating layer cannot be close to the mask plate, the distance cannot be too large, and the pattern precision is not high when the distance is too large for exposure. Due to the upper exposure mode, the mask plate is easily polluted because the solvent volatilizes in the exposure process, the cleaning times of the mask plate are increased, and the rejection rate of the mask plate is high. The single-point exposure machine processes a pattern by point-line exposure according to the drawn pattern by condensing light through a lens, and the exposure mode does not need a mask plate and can also carry out upper exposure, but the mode is mainly used for small size, generally below 10 inches; since the exposure is a single-point linear process and the processing speed is slow, the size limitation and the processing speed of the exposure machine are limited.
In addition, in the field of backlight module production, both TFT glass processing and CF color filter processing require an efficient, large-sized exposure machine.
Disclosure of Invention
The invention aims to provide a light guide plate production and processing technology and coating exposure equipment thereof, which do not need an exposure mask plate, have high processing speed, high processing efficiency, large processing size and strong processing compatibility.
The purpose of the invention can be realized by the following technical scheme:
a production and processing technology of a light guide plate comprises the following steps:
step one, automatic feeding: placing the base plates which are cut preliminarily on a pallet, and placing a plurality of base plates on the pallet in a stacked mode; the automatic grabbing manipulator grabs the base plate on the pallet and then places the base plate on the transmission track;
step two, tearing the film: when the substrate on the transmission track passes through the automatic film tearing machine, the automatic film tearing machine tears off the protective film on the substrate; then the substrate is continuously conveyed to the post-process along with the conveying crawler;
step three, cleaning: when the substrate passes below the automatic cleaning machine along with the conveying crawler belt, the automatic cleaning machine adds cleaning solution to the substrate, and the cleaning solution washes oily stains and dust on the surface of the substrate;
step four, drying: the base plate is conveyed from the automatic cleaning machine to the lower part of the drying machine along with the conveying crawler belt; the dryer blows high-pressure hot air to the substrate, and the high-pressure hot air forms a hot air knife after passing through a narrow air outlet on the lower surface of the dryer; the hot air knife sweeps the cleaning liquid and dust left on the surface of the substrate;
step five, coating and exposure: the substrate is conveyed into coating exposure equipment under the driving of a conveying crawler belt, the coating exposure equipment blade coats uniform ultraviolet ink on the substrate, and the ultraviolet ink is subjected to rotary exposure and then is subjected to area exposure under the ultraviolet light under rotary irradiation;
step six, developing: the exposed substrate is conveyed to the lower part of a developing machine, the developing machine sprays developing solution to the substrate, the developing solution carries out developing and washing on the ultraviolet ink on the upper surface of the substrate, and the unexposed ultraviolet ink is washed away;
step seven, curing: the developed substrate is conveyed to the position below the UV curing lamp through the conveying crawler, the UV curing lamp emits UV light, the UV light irradiates ultraviolet ink on the substrate, the ultraviolet ink is cured through the UV light, and a structural pattern is formed on the upper surface of the substrate; then, the substrate passes through the lower part of the structural pattern detection equipment, the structural pattern detection equipment detects the structural pattern after the exposure and solidification of the upper surface of the substrate, and the substrate with poor structural pattern is removed in time;
step eight, laminating a finished product: after the substrate passes through the automatic film laminating machine, the automatic film laminating machine covers a protective film on the structural graph-shaped upper surface of the substrate; then the substrate is grabbed and transferred to a finished product packaging paper box by an automatic grabbing and counting mechanical arm, and the finished product packaging paper box is positioned on a conveying track;
step nine, packaging and transferring: after the packaging paper box containing the finished product is full, the finished product packaging paper box is conveyed backwards through the conveying crawler belt, and the packaging paper box is sealed through a box sealing adhesive tape;
the substrate is one of TFT glass and a CF color filter;
a coating exposure device for producing and processing a light guide plate comprises a transfer table, a coating machine and an exposure machine;
the coating machine is positioned on one side of the exposure machine, the transfer platform sequentially passes through the coating machine and the exposure machine, and the top of the exposure machine is provided with an ultraviolet light source generator; the middle of the exposure machine is provided with an exposure cavity, a rotary exposure device is arranged in the exposure cavity, and the rotary exposure device is connected to an ultraviolet light source generator through a light source incident device;
the lower surface of the transfer platform is arranged on a first base cross beam and a second base cross beam, and the first base cross beam is arranged on a coating shockproof base below the coating machine; the second base beam is arranged on the exposure shockproof base below the exposure machine;
the transfer platform comprises an air suspension platform, a movable slide rail and a movable adsorption platform, the movable slide rail is arranged on the upper surface of the air suspension platform, the movable slide rail is matched with a platform slide block arranged on the lower surface of the movable adsorption platform, and the movable adsorption platform is arranged on the air suspension platform through the platform slide block and the movable slide rail;
an adsorption through hole is formed in the movable adsorption platform;
a coating shockproof base is arranged below the coating machine, a first base cross beam is arranged on the coating shockproof base, and an air suspension platform is fixed above the first base cross beam; a coating groove is arranged above the coating machine, and a scraping knife is arranged below the coating groove;
an exposure shockproof base is arranged below the exposure machine, a second base beam is arranged on the exposure shockproof base, and an air suspension platform is fixed above the second base beam; an ultraviolet light source generator is arranged at the top of the exposure machine, an exposure cavity is arranged on the exposure machine below the ultraviolet light source generator, and a light path through hole is arranged on the exposure machine at the top of the exposure cavity; the ultraviolet light source generator is connected to the rotary exposure device by passing through the light path through hole through an optical fiber;
the rotary exposure device comprises a rotating shaft, a rotating frame, a light source injector, a focusing lens, a rotating base and a reflector, wherein the rotating base is arranged on the upper surface of the exposure machine at the bottom of the exposure cavity, the rotating shaft is arranged at the top of the rotating base, and the rotating frame is arranged on the rotating shaft above the rotating base; a light source injector is arranged above the rotating shaft and is connected to the exposure cavity through an optical fiber penetrating through a light path through hole on the exposure machine at the top of the exposure cavity; a reflector is arranged at the edge of the rotating frame; the reflectors are distributed on the upper surface of the rotating frame in a circular matrix;
the reflector comprises a reflector fixing frame, a reflector and an exposure hole, the exposure hole is formed in the rotating frame, the reflector fixing frame is arranged above the exposure hole, and the reflector is arranged in the reflector fixing frame; the reflector is connected to the light source injector by an optical fiber.
The invention provides a light guide plate production processing technology and coating exposure equipment thereof, which have the characteristics of no need of an exposure mask plate, high processing speed, high processing efficiency, large processing size and strong processing compatibility. The air suspension platform is connected to the air pump, the air suspension platform is buffered through air suspension, and the movable sliding rail on the air suspension platform is stable, so that light explosion displacement caused by vibration in the light guide plate processing process is avoided; the movable adsorption platform moves along the movable slide rail; the adsorption through hole is connected to the air pump; the movable adsorption platform adsorbs and fixes the substrate placed on the movable adsorption platform through the adsorption through hole; ultraviolet ink is placed in the coating groove, the ultraviolet ink flows to a substrate which is fixedly adsorbed on the movable adsorption platform through a glue flowing port at the bottom of the coating groove, the blade coating knife abuts against the upper surface of the substrate, and the substrate is driven by the movable adsorption platform to move into the exposure machine after the ultraviolet ink on the substrate is blade-coated and leveled; the ultraviolet light source generator generates ultraviolet light, the ultraviolet light is guided into the light source injector through the optical fiber, the light source injector splits the guided ultraviolet light and then guides the split ultraviolet light into the reflector through the optical fiber, and the reflector reflects the split ultraviolet light onto the substrate below the reflector to expose ultraviolet ink coated on the substrate; the rotating shaft drives the rotating rack to rotate, and the rotating rack drives the reflector to rotate; the exposure machine reflects ultraviolet light to the substrate through the reflector, and carries out upper exposure on the photoetching machine coated above the substrate, and the exposure machine does not need a mask plate; the multi-reflector improves the processing speed of the mesh points of the substrate, and improves the processing efficiency; the rotary frame can be designed in a rotating way, so that the reflector is positioned at the center or the edge of different exposure cavities, the processing size of the substrate is increased, the processing of the substrates with different sizes is compatible, and the cost is reduced; in addition, the ultraviolet light within the exposure machine may also propagate through the mirror.
Drawings
In order to facilitate understanding for those skilled in the art, the present invention will be further described with reference to the accompanying drawings.
FIG. 1 is a flow chart of a light guide plate manufacturing process according to the present invention;
FIG. 2 is a schematic structural diagram of a coating and exposing apparatus for manufacturing and processing a light guide plate according to the present invention;
FIG. 3 is a schematic structural diagram of a rotary exposure device of a coating exposure apparatus for manufacturing and processing a light guide plate according to the present invention.
Detailed Description
The purpose of the invention can be realized by the following technical scheme:
a light guide plate production process, see fig. 1, comprising the steps of:
step one, automatic feeding: placing the base plates 4 which are cut preliminarily on the pallet, and placing a plurality of base plates 4 on the pallet in a stacked mode; the automatic grabbing manipulator grabs the base plate 4 on the pallet and then places the base plate on the transmission track;
step two, tearing the film: when the substrate 4 on the transmission track passes through the automatic film tearing machine, the automatic film tearing machine tears off the protective film on the substrate 4; the substrate 4 then continues to be transported with the conveyor track towards the post-process;
step three, cleaning: when the substrate 4 passes below the automatic cleaning machine along with the conveying crawler, the automatic cleaning machine adds cleaning solution to the substrate 4, and the cleaning solution washes oily stains and dust on the surface of the substrate 4;
step four, drying: the base plate 4 is conveyed from the automatic cleaning machine to the lower part of the drying machine along with the conveying crawler; the dryer blows high-pressure hot air to the substrate 4, and the high-pressure hot air forms a hot air knife after passing through a narrow air outlet on the lower surface of the dryer; the hot air knife sweeps the cleaning solution and dust left on the surface of the substrate 4;
step five, coating and exposure: the substrate 4 is driven by the conveying crawler belt, the substrate 4 is conveyed to the coating exposure equipment, the coating exposure equipment blade coats uniform ultraviolet ink on the substrate 4, and after the ultraviolet ink is subjected to rotary exposure, the ultraviolet ink is subjected to area exposure under the ultraviolet light under rotary irradiation;
step six, developing: the exposed substrate is conveyed to the lower part of a developing machine, the developing machine sprays developing solution to the substrate 4, the developing solution carries out developing and washing on the ultraviolet ink which is not subjected to ultraviolet exposure on the upper surface of the substrate 4, and the unexposed ultraviolet ink is washed away;
step seven, curing: the developed substrate 4 is conveyed to the lower part of a UV curing lamp through a conveying crawler, the UV curing lamp emits UV light, the UV light irradiates ultraviolet ink on the substrate 4, the ultraviolet ink is cured through the UV light, and a structural pattern is formed on the upper surface of the substrate 4; then, the substrate 4 passes through the lower part of the structural pattern detection equipment, the structural pattern detection equipment detects the structural pattern after exposure and solidification on the upper surface of the substrate 4, and the substrate 4 with poor structural pattern is removed in time;
step eight, laminating a finished product: after the substrate 4 passes through the automatic film laminating machine, the automatic film laminating machine covers a protective film on the structural graph-shaped upper surface of the substrate 4; subsequently, the substrate 4 is grabbed and transferred to a finished product packaging paper box by an automatic grabbing and counting mechanical arm, and the finished product packaging paper box is positioned on a conveying track;
step nine, packaging and transferring: after the packaging paper box containing the finished product is full, the finished product packaging paper box is conveyed backwards through the conveying crawler belt, and the packaging paper box is sealed through a box sealing adhesive tape;
the substrate 4 is one of TFT glass and a CF color filter;
a light guide plate production processing coating exposure device is disclosed in 2-3, and comprises a transfer table 1, a coating machine 2 and an exposure machine 3;
the coating machine 2 is positioned on one side of the exposure machine 3, the transfer table 1 sequentially penetrates through the coating machine 2 and the exposure machine 3, and the top of the exposure machine 3 is provided with an ultraviolet light source generator 33; the middle of the exposure machine 3 is provided with an exposure cavity 34, a rotary exposure device 35 is arranged in the exposure cavity 34, and the rotary exposure device 35 is connected to the ultraviolet light source generator 33 through a light source incident device 353;
the lower surface of the transfer platform 1 is arranged on a first base cross beam 22 and a second base cross beam 32, and the first base cross beam 22 is arranged on a coating shockproof base 21 below the coating machine 2; the second base beam 32 is arranged on the exposure shockproof base 31 below the exposure machine 3;
the transfer platform 1 comprises an air suspension platform 11, a movable slide rail 12 and a movable adsorption platform 13, wherein the movable slide rail 12 is arranged on the upper surface of the air suspension platform 11, the movable slide rail 12 is matched with a platform slide block arranged on the lower surface of the movable adsorption platform 13, and the movable adsorption platform 13 is arranged on the air suspension platform 11 through the platform slide block and the movable slide rail 12; the air suspension platform 11 is connected to an air pump, the air suspension platform 11 is buffered through air suspension, the movable slide rail 12 on the air suspension platform 11 is stable, and light explosion displacement caused by vibration in the light guide plate processing process is avoided; the movable adsorption platform 13 moves along the movable slide rail 12;
the movable adsorption platform 13 is provided with an adsorption through hole, and the adsorption through hole is connected to the air pump; the movable adsorption platform 13 adsorbs and fixes the substrate 4 placed on the movable adsorption platform 13 through the adsorption through hole;
a coating shockproof base 21 is arranged below the coating machine 2, a first base cross beam 22 is arranged on the coating shockproof base 21, and an air suspension platform 11 is fixed above the first base cross beam 22; a coating groove 24 is arranged above the coating machine 2, and a scraping knife 23 is arranged below the coating groove 24; ultraviolet ink is placed in the coating groove 24, the ultraviolet ink passes through a glue outlet at the bottom of the coating groove 24 and is coated on the substrate 4 which is adsorbed and fixed on the movable adsorption platform 13 through extrusion, the blade coating knife 23 is abutted against the upper surface of the substrate 4, and the substrate 4 is driven by the movable adsorption platform 13 to blade and level the ultraviolet ink on the substrate 4 and then moves into the exposure machine 3;
an exposure shockproof base 31 is arranged below the exposure machine 3, a second base beam 32 is arranged on the exposure shockproof base 31, and an air suspension platform 11 is fixed above the second base beam 32; an ultraviolet light source generator 33 is arranged at the top of the exposure machine 3, an exposure cavity 34 is arranged on the exposure machine 3 below the ultraviolet light source generator 33, and a light path through hole is arranged on the exposure machine 3 at the top of the exposure cavity 34; the ultraviolet light source generator 33 is connected to the rotary exposer 35 through an optical fiber passing through the light path through hole;
the rotary exposure device 35 comprises a rotating shaft 351, a rotating frame 352, a light source injector 353, a focusing lens 354, a rotating base 355 and a reflector 356, wherein the rotating base 355 is arranged on the upper surface of the exposure machine 3 at the bottom of the exposure cavity 34, the rotating shaft 351 is installed at the top of the rotating base 355, and the rotating frame 352 is installed on the rotating shaft 351 above the rotating base 355; a light source incident device 353 is installed above the rotating shaft 351, and the light source incident device 353 is connected to the exposure cavity 34 through an optical fiber passing through a light path through hole on the exposure machine 3 at the top of the exposure cavity 34; a reflector 356 is arranged at the edge of the rotating frame 352; a plurality of reflectors 356 distributed in a circular matrix on the upper surface of the rotating gantry 352;
the reflector 356 comprises a reflector fixing frame, a reflector and an exposure hole, the exposure hole is formed in the rotating frame 352, the reflector fixing frame is arranged above the exposure hole, and the reflector is arranged in the reflector fixing frame; the reflector 356 is connected to the light source injector 353 by an optical fiber; the ultraviolet light source generator 33 generates ultraviolet light, the ultraviolet light is guided into the light source injector 353 through an optical fiber, the light source injector 353 splits the guided ultraviolet light and then guides the split ultraviolet light into the reflector 356 through the optical fiber, the reflector 356 reflects the split ultraviolet light onto the substrate 4 below the reflector 356, and ultraviolet ink coated on the substrate 4 is exposed; the rotating shaft 351 drives the rotating frame 352 to rotate, and the rotating frame 352 drives the reflector 356 to rotate; this exposure machine passes through reflector 356 with ultraviolet reflection to base plate 4 on, carries out the exposure on the lithography machine of coating above base plate 4, this exposure machine does not need mask plate, and process velocity is fast, and the machining dimension is big, workable jumbo size light guide plate site, and the cost is reduced has promoted machining efficiency.
The working principle of the invention is as follows:
the air suspension platform 11 is connected to an air pump, the air suspension platform 11 is buffered through air suspension, the movable slide rail 12 on the air suspension platform 11 is stable, and light explosion displacement caused by vibration in the light guide plate processing process is avoided; the movable adsorption platform 13 moves along the movable slide rail 12; the adsorption through hole is connected to the air pump; the movable adsorption platform 13 adsorbs and fixes the substrate 4 placed on the movable adsorption platform 13 through the adsorption through hole; ultraviolet ink is placed in the coating groove 24, the ultraviolet ink flows onto the substrate 4 which is fixedly adsorbed on the movable adsorption platform 13 through a glue flow opening at the bottom of the coating groove 24, the blade coating knife 23 abuts against the upper surface of the substrate 4, and the substrate 4 is driven by the movable adsorption platform 13 to move into the exposure machine 3 after the ultraviolet ink on the substrate 4 is blade-coated and leveled;
the ultraviolet light source generator 33 generates ultraviolet light, the ultraviolet light is guided into the light source injector 353 through an optical fiber, the light source injector 353 splits the guided ultraviolet light and then guides the split ultraviolet light into the reflector 356 through the optical fiber, the reflector 356 reflects the split ultraviolet light onto the substrate 4 below the reflector 356, and ultraviolet ink coated on the substrate 4 is exposed; the rotating shaft 351 drives the rotating frame 352 to rotate, and the rotating frame 352 drives the reflector 356 to rotate; the exposure machine reflects ultraviolet light to the substrate 4 through the reflector 356, and performs upper exposure on the lithography machine coated above the substrate 4, and the exposure machine does not need a mask plate; the multi-reflector 356 improves the processing speed of the mesh points of the substrate 4, and improves the processing efficiency; the rotating frame 352 can be designed to rotate, so that the reflector 356 is positioned at the center or the edge of the different exposure cavities 34, the processing size of the substrate 4 is increased, the processing of the substrates 4 with different sizes is compatible, and the cost is reduced;
in addition, the ultraviolet light in the exposure machine 3 may also propagate through the mirror.
The invention provides a light guide plate production processing technology and coating exposure equipment thereof, which have the characteristics of no need of an exposure mask plate, high processing speed, high processing efficiency, large processing size and strong processing compatibility. The air suspension platform is connected to the air pump, the air suspension platform is buffered through air suspension, and the movable sliding rail on the air suspension platform is stable, so that light explosion displacement caused by vibration in the light guide plate processing process is avoided; the movable adsorption platform moves along the movable slide rail; the adsorption through hole is connected to the air pump; the movable adsorption platform adsorbs and fixes the substrate placed on the movable adsorption platform through the adsorption through hole; ultraviolet ink is placed in the coating groove, the ultraviolet ink flows to a substrate which is fixedly adsorbed on the movable adsorption platform through a glue flowing port at the bottom of the coating groove, the blade coating knife abuts against the upper surface of the substrate, and the substrate is driven by the movable adsorption platform to move into the exposure machine after the ultraviolet ink on the substrate is blade-coated and leveled; the ultraviolet light source generator generates ultraviolet light, the ultraviolet light is guided into the light source injector through the optical fiber, the light source injector splits the guided ultraviolet light and then guides the split ultraviolet light into the reflector through the optical fiber, and the reflector reflects the split ultraviolet light onto the substrate below the reflector to expose ultraviolet ink coated on the substrate; the rotating shaft drives the rotating rack to rotate, and the rotating rack drives the reflector to rotate; the exposure machine reflects ultraviolet light to the substrate through the reflector, and carries out upper exposure on the photoetching machine coated above the substrate, and the exposure machine does not need a mask plate; the multi-reflector improves the processing speed of the mesh points of the substrate, and improves the processing efficiency; the rotary frame can be designed in a rotating way, so that the reflector is positioned at the center or the edge of different exposure cavities, the processing size of the substrate is increased, the processing of the substrates with different sizes is compatible, and the cost is reduced; in addition, the ultraviolet light within the exposure machine may also propagate through the mirror.
The foregoing is merely exemplary and illustrative of the present invention and various modifications, additions and substitutions may be made by those skilled in the art to the specific embodiments described without departing from the scope of the invention as defined in the following claims.

Claims (2)

1. The utility model provides a light guide plate production and processing coating exposure equipment, includes transfer table (1), coating machine (2), exposure machine (3), its characterized in that:
the coating machine (2) is positioned on one side of the exposure machine (3), the transfer platform (1) sequentially penetrates through the coating machine (2) and the exposure machine (3), and the top of the exposure machine (3) is provided with an ultraviolet light source generator (33); an exposure cavity (34) is arranged in the middle of the exposure machine (3), a rotary exposure device (35) is arranged in the exposure cavity (34), and the rotary exposure device (35) is connected to an ultraviolet light source generator (33) through a light source injector (353);
the lower surface of the transfer table (1) is arranged on a first base cross beam (22) and a second base cross beam (32), and the first base cross beam (22) is arranged on a coating shockproof base (21) below the coating machine (2); the second base beam (32) is arranged on an exposure shockproof base (31) below the exposure machine (3);
the transfer platform (1) comprises an air suspension platform (11), a movable sliding rail (12) and a movable adsorption platform (13), wherein the movable sliding rail (12) is arranged on the upper surface of the air suspension platform (11), the movable sliding rail (12) is matched with a platform sliding block arranged on the lower surface of the movable adsorption platform (13), and the movable adsorption platform (13) is installed on the air suspension platform (11) through the platform sliding block and the movable sliding rail (12);
the movable adsorption platform (13) is provided with an adsorption through hole;
a coating shockproof base (21) is arranged below the coating machine (2), a first base cross beam (22) is arranged on the coating shockproof base (21), and an air suspension platform (11) is fixed above the first base cross beam (22); a coating groove (24) is arranged above the coating machine (2), and a scraping knife (23) is arranged below the coating groove (24);
an exposure shockproof base (31) is arranged below the exposure machine (3), a second base beam (32) is arranged on the exposure shockproof base (31), and an air suspension platform (11) is fixed above the second base beam (32); an ultraviolet light source generator (33) is arranged at the top of the exposure machine (3), an exposure cavity (34) is arranged on the exposure machine (3) below the ultraviolet light source generator (33), and a light path through hole is arranged on the exposure machine (3) at the top of the exposure cavity (34); the ultraviolet light source generator (33) passes through the light path through hole through an optical fiber and is connected to the rotary exposure device (35);
the rotary exposure device (35) comprises a rotating shaft (351), a rotating frame (352), a light source injector (353), a focusing lens (354), a rotating base (355) and a reflector (356), wherein the upper surface of the exposure machine (3) at the bottom of the exposure cavity (34) is provided with the rotating base (355), the top of the rotating base (355) is provided with the rotating shaft (351), and the rotating frame (352) is arranged on the rotating shaft (351) above the rotating base (355); a light source incident device (353) is installed above the rotating shaft (351), and the light source incident device (353) is connected to the exposure cavity (34) through an optical fiber which penetrates through a light path through hole in the exposure machine (3) at the top of the exposure cavity (34); a reflector (356) is arranged at the edge of the rotating rack (352); a plurality of reflectors (356) are distributed on the upper surface of the rotating frame (352) in a circular matrix;
the reflector (356) comprises a reflector fixing frame, a reflector and an exposure hole, the exposure hole is formed in the rotating rack (352), the reflector fixing frame is arranged above the exposure hole, and the reflector is arranged in the reflector fixing frame; the reflector (356) is connected to the light source injector (353) by an optical fiber.
2. The production and processing technology of the light guide plate is characterized by comprising the following steps of:
step one, automatic feeding: placing the base plates (4) which are cut preliminarily on a pallet, and placing a plurality of base plates (4) on the pallet in a laminated mode; the automatic grabbing manipulator grabs the base plate (4) on the pallet and then places the base plate on the transmission track;
step two, tearing the film: when the substrate (4) on the transmission track passes through the automatic film tearing machine, the automatic film tearing machine tears off the protective film on the substrate (4); subsequently, the substrate (4) is continuously conveyed to the post-process along with the conveying crawler;
step three, cleaning: when the substrate (4) passes below the automatic cleaning machine along with the conveying crawler belt, the automatic cleaning machine adds cleaning solution to the substrate (4), and the cleaning solution washes oily stains and dust on the surface of the substrate (4);
step four, drying: the base plate (4) is conveyed to the lower part of the dryer from the automatic cleaning machine along with the conveying crawler belt; the dryer blows high-pressure hot air to the substrate (4), and the high-pressure hot air forms a hot air knife after passing through a narrow air outlet on the lower surface of the dryer; the hot air knife sweeps the cleaning solution and dust left on the surface of the substrate (4) clean;
step five, coating and exposure: the coating and exposure apparatus for manufacturing a light guide plate according to claim 1;
step six, developing: the exposed substrate is conveyed to the lower part of a developing machine, the developing machine sprays developing solution to the substrate (4), the developing solution carries out developing and washing on the ultraviolet ink which is not subjected to ultraviolet exposure on the upper surface of the substrate (4), and the unexposed ultraviolet ink is washed away;
step seven, curing: the developed substrate (4) is conveyed to the position below a UV curing lamp through a conveying crawler, the UV curing lamp emits UV light, the UV light irradiates ultraviolet ink on the substrate (4), the ultraviolet ink is cured through the UV light, and a structural pattern is formed on the upper surface of the substrate (4); then, the substrate (4) passes through the lower part of the structural pattern detection equipment, the structural pattern detection equipment detects the structural pattern after exposure and solidification on the upper surface of the substrate (4), and the substrate (4) with poor structural pattern is removed in time;
step eight, laminating a finished product: after the substrate (4) passes through the automatic film laminating machine, the automatic film laminating machine covers a protective film on the structural graph-shaped upper surface of the substrate (4); then the substrate (4) is grabbed and transferred to a finished product packaging paper box by an automatic grabbing and counting mechanical arm, and the finished product packaging paper box is positioned on a conveying track;
step nine, packaging and transferring: after the packaging paper box filled with the finished products is full, the finished product packaging paper box is conveyed backwards through the conveying crawler belt, and the packaging paper box is sealed through a box sealing adhesive tape.
CN201810680462.0A 2018-06-27 2018-06-27 Light guide plate production and processing technology and coating exposure equipment thereof Active CN108803252B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810680462.0A CN108803252B (en) 2018-06-27 2018-06-27 Light guide plate production and processing technology and coating exposure equipment thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810680462.0A CN108803252B (en) 2018-06-27 2018-06-27 Light guide plate production and processing technology and coating exposure equipment thereof

Publications (2)

Publication Number Publication Date
CN108803252A CN108803252A (en) 2018-11-13
CN108803252B true CN108803252B (en) 2020-10-16

Family

ID=64071941

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810680462.0A Active CN108803252B (en) 2018-06-27 2018-06-27 Light guide plate production and processing technology and coating exposure equipment thereof

Country Status (1)

Country Link
CN (1) CN108803252B (en)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4023126A (en) * 1975-06-26 1977-05-10 Gte Laboratories Incorporated Scanning photographic printer for integrated circuits
TW200403537A (en) * 2002-03-28 2004-03-01 Dainippon Screen Mfg Substrate treatment device
CN101057315A (en) * 2004-11-08 2007-10-17 富士胶片株式会社 Exposure equipment
CN101431008A (en) * 2007-11-06 2009-05-13 东京毅力科创株式会社 Substrate treatment device, coating device and coating method
CN102362226A (en) * 2008-12-05 2012-02-22 麦克罗尼克迈达塔有限责任公司 Rotating arm for writing or reading an image on a workpiece
CN101738676B (en) * 2008-11-05 2012-08-29 鸿富锦精密工业(深圳)有限公司 Manufacturing method of light guide plate
CN102713759A (en) * 2009-09-01 2012-10-03 麦克罗尼克迈达塔有限责任公司 Pattern generation system
CN206139987U (en) * 2016-07-29 2017-05-03 合肥泰沃达智能装备有限公司 Carry out accurate glyptic equipment with laser to light guide plate
CN106735920A (en) * 2016-12-21 2017-05-31 合肥泰沃达智能装备有限公司 The laser equipment of the multiple points of multiple planes can simultaneously be processed

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4023126A (en) * 1975-06-26 1977-05-10 Gte Laboratories Incorporated Scanning photographic printer for integrated circuits
TW200403537A (en) * 2002-03-28 2004-03-01 Dainippon Screen Mfg Substrate treatment device
CN101057315A (en) * 2004-11-08 2007-10-17 富士胶片株式会社 Exposure equipment
CN101431008A (en) * 2007-11-06 2009-05-13 东京毅力科创株式会社 Substrate treatment device, coating device and coating method
CN101738676B (en) * 2008-11-05 2012-08-29 鸿富锦精密工业(深圳)有限公司 Manufacturing method of light guide plate
CN102362226A (en) * 2008-12-05 2012-02-22 麦克罗尼克迈达塔有限责任公司 Rotating arm for writing or reading an image on a workpiece
CN102713759A (en) * 2009-09-01 2012-10-03 麦克罗尼克迈达塔有限责任公司 Pattern generation system
CN206139987U (en) * 2016-07-29 2017-05-03 合肥泰沃达智能装备有限公司 Carry out accurate glyptic equipment with laser to light guide plate
CN106735920A (en) * 2016-12-21 2017-05-31 合肥泰沃达智能装备有限公司 The laser equipment of the multiple points of multiple planes can simultaneously be processed

Also Published As

Publication number Publication date
CN108803252A (en) 2018-11-13

Similar Documents

Publication Publication Date Title
CN1840279A (en) Wafer laser processing method and laser processing device
CN108033691B (en) Glass lens laminating machine and automatic glass lens laminating method
JPS6332379B2 (en)
US20140196845A1 (en) Bonding Method of Resin Mold and Roll-to-Roll Continuous Mold Composition Produced by Using the Bonding Method
CN204586046U (en) Full-automatic optical glue laminating equipment
US12076974B2 (en) Method for identifying a relief precursor for producing a relief structure
CA2201747A1 (en) Actinic activation article shaping system and method
CN101617264B (en) Methods and systems for laser processing continuously moving sheet material
CN102064087A (en) Dyestripping method, dyestripping device and dyestripping equipment
CN211123336U (en) Paster equipment
CN112060422A (en) Manufacturing process of attaching type film mold
CN108803252B (en) Light guide plate production and processing technology and coating exposure equipment thereof
KR20060047768A (en) Exposure apparatus
CN110161808A (en) Grating scale cleaning device and method, litho machine
WO2015010413A1 (en) Frame sealing glue solidifying device
CN108490745B (en) Rotary ultraviolet exposure machine
CN101036909B (en) Automatic coating and the transmission system and method
JPH07164534A (en) Method and device for optical molding
CN208270946U (en) A kind of rotation ultraviolet exposure machine
CN105619819A (en) Three-dimensional forming device and method
EP0096861B1 (en) Process and apparatus for automatic repetitive registration and imagewise exposure of sheet substrates
JP6032036B2 (en) Imprint method and imprint apparatus
JPH0499618A (en) Formation of object having three-dimensional configuration
KR101023794B1 (en) In order for the hardening part and not hardening part to be divided in the original tempered glass, about under pattern coating scratch occurrence processes the without eyelets with UV ultraviolet rays and method and the system which cut
CN101439333B (en) Colloid curing device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
PE01 Entry into force of the registration of the contract for pledge of patent right

Denomination of invention: A light guide plate production process and its coating exposure equipment

Effective date of registration: 20210615

Granted publication date: 20201016

Pledgee: Jiujiang Bank Co.,Ltd. Hefei Dangtu Road sub branch

Pledgor: HEFEI TAIWO INTELLIGENT EQUIPMENT Co.,Ltd.

Registration number: Y2021980004726

PE01 Entry into force of the registration of the contract for pledge of patent right
PC01 Cancellation of the registration of the contract for pledge of patent right

Date of cancellation: 20220808

Granted publication date: 20201016

Pledgee: Jiujiang Bank Co.,Ltd. Hefei Dangtu Road sub branch

Pledgor: HEFEI TAIWO INTELLIGENT EQUIPMENT Co.,Ltd.

Registration number: Y2021980004726

PC01 Cancellation of the registration of the contract for pledge of patent right
PE01 Entry into force of the registration of the contract for pledge of patent right

Denomination of invention: A manufacturing process of light guide plate and its coating and exposure equipment

Effective date of registration: 20230216

Granted publication date: 20201016

Pledgee: Jiujiang Bank Co.,Ltd. Hefei Dangtu Road sub branch

Pledgor: HEFEI TAIWO INTELLIGENT EQUIPMENT Co.,Ltd.

Registration number: Y2023980032715

PE01 Entry into force of the registration of the contract for pledge of patent right