CN108106771A - A kind of electric vortex force/deformation/pressure detection method based on micro-/ nano film - Google Patents
A kind of electric vortex force/deformation/pressure detection method based on micro-/ nano film Download PDFInfo
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- CN108106771A CN108106771A CN201711228380.4A CN201711228380A CN108106771A CN 108106771 A CN108106771 A CN 108106771A CN 201711228380 A CN201711228380 A CN 201711228380A CN 108106771 A CN108106771 A CN 108106771A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
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- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
A kind of electric vortex force/deformation/pressure detection method based on micro-/ nano film, it is characterised in that：The detection method includes：Micro-/film of receiving is placed in the surface of detected material or is embedded within side, for improve detection sensitivity also can it is micro-/receive film surface or internal production micro-nano structure；Detection circuit is set, the detection unit of the detection circuit is placed on the outside of the measured object, the detection unit generates alternating magnetic field；The variation of detected material stressed/deformed/pressure can cause micro-/ nano film to be deformed, it changes so as to cause electric current is sensed on micro-/ nano film, after sensing electric current changes, and then the impedance of the inductance coil in the detection unit is caused to change, power/deformation/pressure change of measured object can be sensed based on the impedance variations.The detection method realizes signal detection with wireless, passive detection mode, and in method sensor structure it is simple, stability is high, the signal measurements such as highly sensitive non-contacting strain, stress, pressure can be achieved.
Description
Technical field
Patent of the present invention belongs to detection field, and in particular to a kind of electric vortex force/deformation/pressure based on micro-/ nano film
Power detection method.
Background technology
Currently, wireless, passive sensor and wireless, passive detection system are not required to provide power supply with it, complicated without design
The advantages such as wired circuit, receive significant attention.Wirelessly, passive sensor is widely used in every field, is such as examined in industry
In survey and automatic control system, liquid level, power, the detection of strain in the processing industry such as oil, chemical industry, electric power, steel, machinery；
In automotive electronics and Rail Transit System, acceleration test and safety detection etc.；In household appliance technical field, environment is examined with device
It surveys；In robot and aerospace field, the accurate measurement of accurate device；In medical treatment and human medical field, human parameters inspection
It surveys；In field of environment protection, systematic parameter detection and instrument component detection under harsh conditions etc..
At this stage, wireless, passive detection method is roughly divided into three kinds of ways of realization：
1. by several/a large amount of electronic component integrated sensor/sensors and detection circuit, by sensor/sensor
And circuit is positioned over test point, circuit obtains electric energy by inductance coil mutual inductance, while sensor circuit is also by inductance coil
Transmit a signal to detection circuit processing.Such realization method is mainly obtained by resistance sensor or capacitance type sensor
The information such as stress, strain.The mode that several device composition LC resonances can be used in capacitance type sensor adds inductor wire in test side
Circle composition resonance circuit.Number of devices needed for resistance sensor is relatively more, it is necessary to carry out signal condition and nothing in test side
Line transmits, it is necessary to which more electronic devices form sensor and detection and wireless transmission circuit.
2. sensor dedicated test chip is made by IC techniques；Detection circuit is integrated in the special of one piece of extra small encapsulation
Chip, chip obtains energy by inductance coil mutual inductance, while chip transmits a signal to detection circuit also by inductance coil
Processing.
3. the transmission form of signal is slightly different with energy-provision way and first two, sensor detection circuit uses RFID skills
On the one hand art, generally NFC chip, chip with detection circuit wireless connection, are powered for sensor circuit；On the other hand, NFC cores
There are A/D modules inside piece, after signal sampling, detection circuit processing is transmitted a signal in a manner of fixed communication.
By analyzing existing wireless, passive detection technology, the three classes mode including the example above all exists centainly not
Foot.The detecting system integrated with electronic component, internal component need to select minimum encapsulation, and the electronics member that power consumption is extremely low
Part.System dimension after integrated is still difficult to meet to want for particular surroundings, such as more demanding occasion of human eyeball's equidimension
It asks.Wherein, although LC resonance formula is a kind of very simple wireless and passive detection mode, but Sensor section stills need inductance coil
Resonance circuit is formed, therefore volume is difficult to further reduce, while wireless, passive detection system the sensitivity of LC resonance formula is not
It is high, it is also necessary to further improve；Extra small special chip is made with IC techniques, although dimensionally there is further promotion,
But whole cost performance is not high, and still needs chip and circuit in Sensor section.In recent years, based on electronic tag
Wireless and passive detection mode becomes more and more popular, but is difficult still thoroughly to solve sensor side system caused by RFID circuit is needed to answer
Miscellaneous, the problems such as size is big.In conclusion still there is complicated, sensor portion splits for wireless at present, passive measuring method
Product is larger, transducer sensitivity is low, system cost is high, is difficult to use in the problems such as particular surroundings such as human body.
Current vortex technology is a kind of traditional radio detection technology, with non-contact, high sensitivity, unwise to dust, greasy dirt
The characteristics such as sense, are widely used in the fields such as plate, tube ndt, metal ranging, electromagnetic heating.Existing current vortex technology due to
The problems such as being difficult to improve current vortex change rate in conductor, being influenced by distance, is also rarely used in stress, strain detecting.In recent years,
The current vortex that develops into of micro-/ nano technology provides new thinking for stress, strain detecting.The present invention is by micro-/ nano film
It is combined with current vortex, by the strain of micro-/ nano scale film, causes wherein faradic significant change, so as to cause electricity
The impedance variations of test coil of eddy current realize the highly sensitive sensing of stress, strain.It is proposed by the present invention it is this based on it is micro-/receive
The eddy current detection method of rice film is compared with other types wireless and passive detection method, and structure is very simple, and non-sensitive part is only
It is made of metallic film, not including parts such as circuit, component and leads, while has the characteristics that high sensitivity, reliability are high.
The content of the invention
It is a primary object of the present invention to：It is proposed a kind of electric vortex force/deformation/pressure detecting based on micro-/ nano film
Micro-/ nano film is combined by method with current vortex technology, and the signals such as stress, strain are realized with wireless, passive detection mode
Detection.
A kind of electric vortex force/deformation/pressure detection method based on micro-/ nano film, it is characterised in that including：By it is micro-/
Nano thin-film is placed in the surface of detected material or is embedded within side；Detection circuit is set, by the detection unit of the detection circuit
It is placed on the outside of the measured object, the detection unit generates alternating magnetic field；The alternating magnetic field is in the micro-/ nano film surface
Generation vortex shape sensing electric current, the direction of the raw new induced field of induced electricity miscarriage and the alternating magnetic field is on the contrary, described
The variation of power/deformation/pressure of detected material can cause the micro-/ nano film to be deformed, so as to cause it is described it is micro-/receive
Sensing electric current on rice film changes, and after sensing electric current changes, the raw new induced field of induced electricity miscarriage will be sent out
Changing, and then the impedance of the inductance coil in the detection unit is caused to change, it can be felt based on the impedance variations
Survey power/deformation/pressure change of the measured object.
Optionally, micro-/ nano film can be for the micro-/ nano film of no micro-structure or to there is the micro-/ nano of micro-/micro-nano structure thin
Film.Preferably, micro-/micro-nano structure of micro-/ nano film is the combination of micro-/micro-nano structure described in groove, boss, slight crack or multilayer.
Preferably, the thickness of micro-/ nano film is 1nm~3mm.
Optionally, micro-/ nano film is formed in substrate or micro-/ nano film is formed directly into measured object surface.It is optional
Ground, substrate are flexible or rigid substrate.Preferably, substrate thickness is 500nm~1mm.Preferably, micro-/ nano film passes through glutinous
Patch mode is combined with the measured object surface.
Further, micro-/ nano film is conductive film.The optional metal of material of conductive film, alloy, semiconductor, conduction
The material of polymer or two or more foregoing material mixing composition.
Further, detection method may include host computer, and the detection unit includes coil module, front end circuit module, control
Circuit module processed, wireless communication module, power circuit block, battery, the coil module include inductance coil, the preposition electricity
Road module includes filter circuit described in filter circuit and amplifying circuit and is used to filter out the radio-frequency component in signal, has to signal
The feature signal extraction of effect；Amplifying circuit is amplified to preferable A/D for amplifying the signal after filtering, conditioning, by signal and samples
Scope supplies subsequent conditioning circuit sampling processing；The control circuit module is used for the sampling of control circuit, fixed time intervals acquisition
Electric signal, and by electric signal transmission to wireless communication module, and the work with other sensors is controlled to adjust, the channel radio
Letter module is used to the electric signal after gathering being sent to the host computer；The host computer is used to receive, reprocess, show, store up
Deposit signal.
Preferably, the coil module includes one or more inductance coils, wherein one or more inductance coils are used for
Detect the air line distance of the micro-/ nano film and the inductance coil, with exclude or compensate the micro-/ nano film with it is described
The variation of the coil impedance caused by distance change between coil, other inductance coils are used to detect the micro-/ nano film
Impedance variations.Optionally, the straight line of the micro-/ nano film and the inductance coil is detected using the sensor of other species
Distance, to exclude or compensate due to the coil impedance caused by distance change between the micro-/ nano film and the coil
Variation.
The technique effect of the present invention essentially consists in：
1. it is very simple to detect end structure, only it is made of micro-/ nano film, is not required to other components and auxiliary circuit just
Realize the detection of the signals such as high-precision wireless and passive stress, strain；Meanwhile there are the feelings of micro-nano structure in micro-/ nano film
Under condition, structure is also relatively easy, low manufacture cost, it is easy to accomplish.
2. improve sensitivity of the EDDY CURRENT to stress, strain using the micro-nano effect of micro-/ nano film.Due to film
Size is ultra-thin, it is therein sensing electric current corresponds to power, strain it is more sensitive.Therefore the new induced field for causing induced electricity miscarriage raw
Significant change will occur, and then cause the impedance of inductance coil that significant change occurs.
3. by making micro-nano structure on micro-/ nano film, the impedance variations degree of coil, therefore this base are increased
It is more preferable in eddy current detection method sensitivity higher, the stability of micro-/ nano film.
Description of the drawings
Fig. 1 is thin in micro-/ nano in electric vortex force/deformation/pressure detection method based on micro-/ nano film of the invention
Testing principle schematic diagram under the non-stressing conditions of film；
Fig. 2 is thin in micro-/ nano in electric vortex force/deformation/pressure detection method based on micro-/ nano film of the invention
Testing principle schematic diagram under film stressing conditions；
Fig. 3 is the micro-/ nano membrane structure schematic diagram of the present invention；
Fig. 4 is the multilayer micro-/ nano membrane structure schematic diagram of the present invention；
Fig. 5 is the detection of eyeball tension structure diagram of the embodiment of the present invention one；
Fig. 6 is the detection circuit principle framework figure in the detection of eyeball tension system of the embodiment of the present invention one；
Fig. 7 is the breathing detection structure diagram of the embodiment of the present invention two.
Specific embodiment
With reference to the accompanying drawings and examples, the specific embodiment of the present invention is described in further detail.
The present invention relates to a kind of electric vortex force/deformation/pressure detection methods based on micro-/ nano film, and this method is with nothing
Line, passive detection mode realize signal detection, and the structure of sensor is simple, stability is high, sensitivity is good.
The theoretical model of the present invention is the impedance detection model based on current vortex.Conductor is positioned in alternating electric field, such as Fig. 1
Shown in 2, using micro-/ nano film as conductor.Due to electromagnetic field H0Effect, conductive surface can generate induced electromotive force, so as to
Generation sensing electric current, and electric current is sensed into vortex shape.Meanwhile according to Lenz's law, the sensing electric current that is generated in conductor can generate
New induced field Hr, HrDirection and H0Direction is on the contrary, try hard to weaken H0, change so as to cause the equiva lent impedance of coil.
The present invention is on the basis of above-mentioned theory model, using micro-/ nano film as sensing unit, compared with traditional electricity
EDDY CURRENT, test side can make the sensing generated in film electric current correspond to power/strain variation cleverer due to " micro-nano effect "
It is quick.Micro-/micro-nano structure, such as slight crack, boss can also be made on micro-/ nano film, as shown in Figure 3, is handed over when film is in
When in varying magnetic field, micro-/micro-nano structure is with force-extension or compresses (as depicted in figs. 1 and 2), can make the line in alternating magnetic field accordingly
It encloses impedance and more sensitive variation occurs, so as to more delicately tell the situation of film stress and size.
Based on above-mentioned principle, the present invention proposes a kind of electric vortex force/deformation/pressure detecting side based on micro-/ nano film
Micro-/ nano film is placed in the surface of detected material or is embedded within side by method, is provided with detection circuit, the detection of detection circuit
Unit is placed on the outside of the measured object, and generates alternating magnetic field.Due to the variation of stress, micro-/ nano film will be with the change puted forth effort
Change is deformed, and is changed so as to cause electric current is sensed on micro-/ nano film.After sensing electric current changes, induced electricity
The raw new induced field of miscarriage will change, and then the impedance of the inductance coil in external detection unit is caused to become
Change, the impedance variations based on inductance coil can sense the power variation of measured object.
In the present invention, micro-/ nano film can be for the micro-/ nano film without micro-/micro-nano structure or with micro-/micro-nano structure
Micro-/ nano film.As shown in Figures 3 and 4, micro-/micro-nano structure of micro-/ nano film is chosen as groove, boss, slight crack or multilayer
The modes such as the combination of micro-/micro-nano structure.
The current vortex sensor of micro-/ nano film is mechanical quantity sensor, is preferably pressure sensor, stress (change) sensing
Device, acceleration transducer, flow sensor etc. can be used for the fields such as industry, medical treatment, aerospace, building, preferably according to purposes
Include for medical treatment transducer：Implanted intraocular pressure sensor, implanted blood pressure sensor, implanted intracranial pressure sensor, plant
Enter formula bladder pressure sensor, implanted intestinal tube pressure sensor, implanted wall of the chest pressure sensor, implanted artificial tooth pressure sensing
Device, wearable sensors etc..
The micro-/ nano film device of selection can be micron grade film or nano-scale film, micro-/ nano are thin
The thickness of film is preferably 1nm-3mm, more preferably 10nm-500 μm, more preferably 30nm-50 μm, more preferably 50nm-5 μm.
Film can be attached at measurand surface, can also carry out implanted detection.Due to film be micro-/ nano scale, by
" micro-nano effect " can be shown in the case of power, i.e., the resistivity of film, magnetic conductivity can have a greater change, therefore, sensor
Sensitivity will be substantially improved.
The inductance coil of generation alternating magnetic field can be one or multiple.Due to distance between film and coil
Variation also result in coil impedance and change, in order to accurately detect coil impedance caused by stress variation suffered by film
Variation, measurement need to be excluded coil impedance variation caused by the air line distance between film and coil.So if only
Using an inductance coil, it is necessary to ensure that coil and the distance between tested film are constant as far as possible.In addition, multiple lines can also be used
Circle, using impedance variations caused by the air line distance of wherein one or more Coil Detector films and coil, other coils are used for
The impedance variations of film are detected, then can draw the coil only as caused by stress (strain) by signal processing algorithms such as difference
Impedance variations.The air line distance between micro-/ nano film and coil can also be measured using other sensors, then passed through
Certain computational methods exclude influence of the distance to coil impedance.
Micro-/ nano film is conductive film.The optional metal of material of conductive film, alloy, semiconductor, conducting polymer or
The material of foregoing two or more material mixing composition.
As needed, conductive material the suitable mode such as can sputter, evaporate, spraying, depositing and being formed in substrate, also may be used
It is formed directly into measured object surface.Substrate can be the types such as rigid, flexible.
Substrate thickness scope is between 500nm~1mm, preferably 1 μm -500 μm, more preferably 10 μm -50 μm.
The too thin sensor cost of substrate is too high, the too thick influence transducer sensitivity of substrate.
For the encapsulation process of film, depending on specifically used environment and specifically used environmental requirement.
Optionally, detection method may include host computer, and detection unit may include：Coil module, front end circuit module, control
Circuit module, wireless communication module, power circuit block, battery, coil module include inductance coil, and front end circuit module includes
Filter circuit described in filter circuit and amplifying circuit is used to filter out the radio-frequency component in signal, and effective feature letter is carried out to signal
Number extraction；Signal is amplified to preferable A/D sample ranges, after supply by amplifying circuit for amplifying the signal after filtering, conditioning
Continuous circuit sampling processing；Control circuit module is used for the sampling of control circuit, fixed time intervals acquisition electric signal, and by telecommunications
Wireless communication module number is transmitted to, and the work with other sensors is controlled to adjust, after wireless communication module will be for that will gather
Electric signal be sent to the host computer；The host computer is for receiving, reprocessing, showing, storage assembly.
Below will be using specific embodiment as example, come the technical solution illustrated the present invention, but only example
Property, it is not intended to limit the invention in the range of the embodiment.
Embodiment one
Using detection of eyeball tension as embodiment one, illustrate the detection method of the present invention, but the example can also be used for other needs
Field.This method can according to the impedance magnitude of the current vortex sensor of micro-/ nano film, to determine intraocular pressure size,
And method in real time can effectively detect measured body.
The present invention constructs wireless, a passive measuring method based on eddy current detection technology, including it is micro-/receive film and
Detection circuit.The principle framework of detection circuit is as shown in fig. 6, detection circuit mainly includes：The outer detection unit 01 of eye and host computer
10.The outer detection unit of eye includes coil module 02, front end circuit module 03, control circuit module 06, wireless communication module 07, electricity
Source circuit module 08, battery 09, upper 10 etc.；Coil mould 02 is the inductance coil that can generate alternating magnetic field.Front end circuit mould
Block 03 includes：Filter circuit 04 and 05 two large divisions of amplifying circuit.Wherein, filter circuit 04 be used to filtering out high frequency in signal into
Point, effective feature signal extraction is carried out to signal；Amplifying circuit 05 puts signal for amplifying the signal after filtering, conditioning
Greatly to preferable A/D sample ranges, subsequent conditioning circuit sampling processing is supplied.Control circuit module 06 for control circuit sampling with
The work of other sensors is adjusted.Wireless communication module 07 is used to the electric signal after gathering being sent to host computer 10.Host computer
The functions such as 10 for receiving, reprocessing, showing, storage assembly.Power circuit block 08 is used for as in the outer detection unit 01 of eye
Each module provides different voltage；Battery 09 is mainly used for powering for detection unit outside eye.
This method applies that it is preferable to use the wearable device in contact lenses, glasses or goggle type and the dresses that implant
It puts and equipment, is applied equally to：Liquid parameter measurement, tire pressure measurement, severe ring in food quality monitoring, closed container
Border parameter detecting etc., radio-circuit detection unit can be integrated in one piece of PCB, can also be integrated in one piece of small chip；It can wear
It wears and can be used with the wireless transmission method of implantable devices：The RFID techniques such as BLE, ZigBee, wifi.
The present embodiment for detection body intrinsic parameter, it is necessary to higher detection sensitivity, therefore test side use have it is micro-/receive
The micro-/ nano film 1 of slight crack structure or boss structure may be selected in the micro-/ nano form of film of structure.As shown in figure 5, need by
Film is attached at body surface or implants, therefore the base material of film need to select and the preferable material of human body compatibility.This
Embodiment is by taking contact lenses formula intraocular pressure wearable device as an example, selection and the polymer material PU of human body good compatibility.In PU bases
One layer of Au film for carrying micro-/micro-nano structure is sputtered on bottom, film is attached to or is directly produced on contact lens surface, contact lenses
2 surface of eyeball is attached to, coil impedance is initial state at this time；When intraocular pressure changes, eyeball curvature can generate small change
Change, at this point, with eyeball Curvature varying strain variation can occur for Au films, such as select slight crack structure, slight crack can be increased or reduced；
Boss structure is such as selected, boss diameter can be increased or reduced；In this way, the alternating magnetic field being placed in extrabulbar electromagnetic coil 3 exists
The sensing electric current generated in Au films can with Au films and its surface it is micro-/deformation of micro-nano structure and change, so as to cause coil impedance
Variation.By the variation for monitoring coil impedance, you can learn the variation size of intraocular pressure.It is small due to micro-/ nano film,
Only micro-/ nano size can be excellently attached on the wearable product such as contact lenses, and the structure of test side is simple, completely suitable
It should be detected in intraocular for the small requirement of the size of device architecture, since the micro-nano effect of micro-nano structure thereon exists so that eye
The minor variations of pressure can significantly variation measures relatively by impedance, improves the sensitivity of measurement.
The operation of the method for the present embodiment is as follows：
1. opening host computer 10, host computer and the connection relation of the outer detection unit 01 of eye are established；
2. host computer 10 sends control instruction, the outer detection unit 01 of eye prepares to start sampling operation；
3. 06 controlling power circuit module 08 of control circuit module works, power circuit block 08 is the outer detection unit 01 of eye
Interior other module sections power supply；
4. 06 fixed time intervals of control circuit module gather intraocular pressure signal, and transmit a signal to wireless communication module
07；
5. wireless communication module 07 sends intraocular pressure signal to host computer 10, judge whether to need to shut down；
6. if wireless communication module 07 judges to shut down, stop gathering signal, after sending halt instruction to host computer 10, control
06 controlling power circuit of molding block powers off；If 07 piece of radio communication mold judges continuous collecting information, at interval of the set time, then
Be acquired with send etc. instructions.
Above by taking the wearable detection method of contact lenses formula intraocular pressure as an example, in fact it can be also based on proposed by the present invention
The detection method of power/deformation/pressure of micro-/ nano film current vortex is used in implantable detection of eyeball tension equipment and system.
Embodiment two
Below using breathing detection as an alternative embodiment of the invention, illustrate technical scheme.
As shown in fig. 7, show the schematic diagram of the breathing of the eddy current detection method measurement people using micro-/ nano film.
Micro-/ nano film can be placed in human body corresponding site.As intraocular pressure embodiment, detection circuit is may also set up, including external
Detection unit, host computer etc. (identical with embodiment one).It is relatively large for the amplitude of human body respiration and the strain of generation, for
The power that film is applied is also relatively apparent, and micro-structure need not be set on the micro-/ nano film in the present embodiment.Film pastes
Body surface is invested, therefore the base material of film need to select and the preferable material of human body compatibility, selection and human body good compatibility
Polymer material PU.One layer of conductive polymer membrane is deposited in PU substrates, film is attached to human body surface.Or in the present embodiment
Micro-/ nano film need not have substrate, but directly paste conducting polymer thin film on human body.Film is placed in human body to treat
After the corresponding site of detection, coil impedance is initial state at this time；When breathing is when changing, the amplitude such as exhaled or inhaled becomes
Change, conducting polymer thin film can be deformed upon with the variation of the amplitude of respiration.In this way, it is placed in the electromagnetic coil outside human body
In the sensing electric current that is generated in conducting polymer thin film of alternating magnetic field can change as conducting polymer thin film deforms, from
And cause the variation of coil impedance.The variation of this impedance can be caught in and read by detection circuit electric signal.So as to real
Wireless, the passive detection of breath signal are showed.The behaviour with detection of eyeball tension method of the operating method of the detection method of the embodiment
It is identical to make method.The use of conducting polymer thin film in the present embodiment has many advantages, such as that light, size is ultra-thin, is not influencing people
The detection of the signals such as breathing is completed in the case of body is comfortable.
To sum up, compared to conventional wireless, passive sensor, detection method proposed by the present invention is very simple, is not required to other
Component and auxiliary circuit be achieved that the detections of the signals such as the ess-strain of high-precision wireless and passive.As a result of
Micro-/ nano membrane structure, thickness is very small, is with a wide range of applications in fields such as medical treatment, industry, aerospaces.
The above is only the preferable specific embodiment of the present invention, but protection scope of the present invention is not limited thereto, and is appointed
What those familiar with the art in the technical scope disclosed by the present invention, the change or replacement that can be readily occurred in, all
It is covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be with the scope of the claims
Subject to.
Claims (15)
1. a kind of electric vortex force/deformation/pressure detection method based on micro-/ nano film, it is characterised in that including：By it is micro-/receive
Rice film is placed in the surface of detected material or is embedded within side；Detection circuit is set, the detection unit of the detection circuit is put
On the outside of the measured object or side is embedded within, the detection unit generates alternating magnetic field；The alternating magnetic field it is described it is micro-/receive
Rice film surface generation vortex shape sensing electric current, the direction of the raw new induced field of induced electricity miscarriage and the alternating magnetic field
On the contrary, the variation of power/deformation/pressure of the detected material can cause the micro-/ nano film to be deformed, so as to cause
Sense electric current on the micro-/ nano film to change, after sensing electric current changes, the raw new sensing magnetic of induced electricity miscarriage
Field will change, and then the impedance of the inductance coil in the detection unit is caused to change, and monitor the impedance variations
Power/deformation/pressure change of the measured object can be sensed.
2. a kind of electric vortex force/deformation/pressure detection method based on micro-/ nano film according to claim 1, special
Sign is：The micro-/ nano film can be the micro-/ nano film without micro-/micro-nano structure.
3. a kind of electric vortex force/deformation/pressure detection method based on micro-/ nano film according to claim 1, special
Sign is：The micro-/ nano film is the micro-/ nano film for having micro-/micro-nano structure.
4. a kind of electric vortex force/deformation/pressure detection method based on micro-/ nano film according to claim 3, special
Sign is：Micro-/micro-nano structure of micro-/ nano film is the combination of micro-/micro-nano structure described in groove, boss, slight crack or multilayer.
5. a kind of electric vortex force/deformation/pressure detection method based on micro-/ nano film according to claim 1, special
Sign is：The thickness of the micro-/ nano film is 1nm~3mm.
6. a kind of electric vortex force/deformation/pressure detection method based on micro-/ nano film according to claim 1, special
Sign is：The micro-/ nano film is formed in substrate.
7. a kind of electric vortex force/deformation/pressure detection method based on micro-/ nano film according to claim 6, special
Sign is：The substrate is flexible or rigid substrate.
8. a kind of electric vortex force/deformation/pressure detection method based on micro-/ nano film according to claim 6, special
Sign is：The substrate thickness is 500nm~1mm.
9. it is according to claim 1 it is a kind of based on it is micro-/receive electric vortex force/deformation/pressure detection method of film, feature
It is：The micro-/ nano film is formed directly into measured object surface.
10. a kind of electric vortex force/deformation/pressure detection method based on micro-/ nano film according to claim 9,
It is characterized in that the micro-/ nano film is combined by pasting mode with the measured object surface.
11. a kind of electric vortex force/deformation/pressure detection method based on micro-/ nano film according to claim 1,
It is characterized in that：The micro-/ nano film is conductive film.
12. a kind of electric vortex force/deformation/pressure detection method based on micro-/ nano film according to claim 9,
It is characterized in that：The optional metal of material of the conductive film, alloy, semiconductor, conducting polymer or it is foregoing two kinds or two kinds with
The material of upper material mixing composition.
13. a kind of electric vortex force/deformation/pressure detection method based on micro-/ nano film according to claim 1,
It is characterized in that：It may include host computer in the detection method, the detection unit includes coil module, front end circuit module, control
Circuit module processed, wireless communication module, power circuit block, battery, the coil module include inductance coil, the preposition electricity
Road module includes filter circuit described in filter circuit and amplifying circuit and is used to filter out the radio-frequency component in signal, has to signal
The feature signal extraction of effect；Amplifying circuit is amplified to preferable A/D for amplifying the signal after filtering, conditioning, by signal and samples
Scope supplies subsequent conditioning circuit sampling processing；The control circuit module is used for the sampling of control circuit, fixed time intervals acquisition
Electric signal, and by electric signal transmission to wireless communication module, and the work with other sensors is controlled to adjust, the channel radio
Letter module is used to the electric signal after gathering being sent to the host computer；The host computer is used to receive, reprocess, show, store up
Deposit signal.
14. a kind of electric vortex force/deformation/pressure detection method based on micro-/ nano film according to claim 13,
It is characterized in that：The coil module includes one or more inductance coils, wherein one or more inductance coils are used to detect institute
State the air line distance of micro-/ nano film and the inductance coil, with exclude or compensate the micro-/ nano film and the coil it
Between the coil impedance caused by distance change variation, other inductance coils are used to detect the impedance of the micro-/ nano film
Variation.
15. a kind of electric vortex force/deformation/pressure detection method based on micro-/ nano film according to claim 14,
It is characterized in that：The air line distance of the micro-/ nano film and the inductance coil is detected using the sensor of other species, with row
It removes or compensates due to the variation of the coil impedance caused by distance change between the micro-/ nano film and the coil.
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