CN107883885A - A kind of High Precision Stereo curved face object measurer for thickness - Google Patents
A kind of High Precision Stereo curved face object measurer for thickness Download PDFInfo
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- CN107883885A CN107883885A CN201710948709.8A CN201710948709A CN107883885A CN 107883885 A CN107883885 A CN 107883885A CN 201710948709 A CN201710948709 A CN 201710948709A CN 107883885 A CN107883885 A CN 107883885A
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- mobile unit
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- laser
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
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- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention relates to a kind of High Precision Stereo curved face object measurer for thickness, including grating scale, laser measurement mechanism and Y-axis motion；Y-axis motion includes Y-axis substrate and the Y-axis mobile unit that can be moved back and forth in Y-axis substrate along Y direction；Laser measurement mechanism includes laser displacement sensor, and grating scale includes scale grating and grating ruler reading head, and grating ruler and laser displacement sensor are arranged in Y-axis mobile unit, and grating ruler reading head is arranged on Y-axis substrate；The moving displacement of grating scale monitoring Y-axis mobile unit in the Y-axis direction, when moving displacement reaches preset displacement, send measurement signal to laser displacement sensor, laser displacement sensor and thickness parameter collection is carried out to testee according to measurement signal.The present invention High Precision Stereo curved face object measurer for thickness realize measurement it is convenient and swift, precision is high, can meet the needs of high-volume curved face object thickness measure.
Description
Technical field
The present invention relates to thickness measurement technique field, more specifically to a kind of High Precision Stereo curved face object thickness
Measurement apparatus.
Background technology
In the process of manufacture of product, the moment will hold the precise thickness size of product, and the measurement of thickness is to weigh
The basic means of product quality, judge whether product is qualified by confirming the thickness of product.And product has plane, curved surface
Or it is irregular, the measuring method of currently used curved face object thickness is three-dimensional coordinates measurement method, this method measurement essence
Degree is high, but measuring speed is slow, can not adapt to the measurement of high-volume curved face object thickness.
The content of the invention
The technical problem to be solved in the present invention is, for the drawbacks described above of prior art, there is provided a kind of measuring speed is fast
High Precision Stereo curved face object measurer for thickness.
The technical solution adopted for the present invention to solve the technical problems is：Construct a kind of High Precision Stereo curved face object thickness
Measurement apparatus, it is characterised in that including grating scale, laser measurement mechanism and Y-axis motion；
The Y-axis that the Y-axis motion includes Y-axis substrate and can moved back and forth in the Y-axis substrate along Y direction moves
Unit；
The laser measurement mechanism includes laser displacement sensor, and the grating scale includes scale grating and grating scale reading
Head, the grating ruler and laser displacement sensor are arranged in the Y-axis mobile unit, and the grating ruler reading head is arranged on
On the Y-axis substrate；
The grating scale monitors the moving displacement of the Y-axis mobile unit in the Y-axis direction, when the moving displacement reaches
During preset displacement, send measurement signal to the laser displacement sensor, the laser displacement sensor and believed according to the measurement
Number to testee carry out thickness parameter collection.
Preferably, the Y-axis motion also includes the Y-axis line slideway of the mobile guide for the Y-axis mobile unit,
The Y-axis line slideway is arranged on the Y-axis substrate.
Preferably, the laser measurement mechanism also includes connecting plate, and the laser displacement sensor is arranged on the connection
On plate；
The connecting plate is vertically set in the Y-axis mobile unit, and is driven by the Y-axis mobile unit along Y-axis side
To moving back and forth.
Preferably, the laser measurement mechanism includes two laser displacement sensors, and two laser displacements pass
Sensor is disposed on the connecting plate, and the laser of two laser displacement sensors is oppositely arranged.
Preferably, the laser measurement mechanism also includes translation stage, and the translation stage is removably mounted on the connection
On plate, each laser displacement sensor is arranged on the different translation stages.
Preferably, the measurer for thickness also include with the orthogonal Z axis motion of the Y-axis motion,
The Z axis motion includes Z axis substrate and the Z axis mobile unit that can be moved back and forth in the Z axis substrate along Z-direction；
The Z axis substrate is arranged in the Y-axis mobile unit, and from the Y-axis mobile unit drive along Y direction toward
Multiple motion；
The connecting plate is arranged in the Z axis mobile unit, and from the Z axis mobile unit drive along Z-direction toward
Multiple motion.
Preferably, the Z axis motion also includes the Z axis line slideway of the mobile guide for the Z axis mobile unit,
The Z axis line slideway is arranged on the Z axis substrate.
Preferably, the Y-axis motion also includes and Z axis substrate Y-axis connecting plate connected vertically, the Y-axis
Connecting plate is arranged in the Y-axis mobile unit and driven by the Y-axis mobile unit along Y direction and moved back and forth.
Preferably, the grating ruler is arranged on the Y-axis connecting plate, is set between the Y-axis connecting plate and Z axis substrate
There is reinforcement.
Preferably, the grating scale also includes grating ruler reading head fixed seat, and the grating ruler reading head fixed seat is set
On the Y-axis substrate, the grating ruler reading head is fixed in the grating ruler reading head fixed seat.
Implement the High Precision Stereo curved face object measurer for thickness of the present invention, have the advantages that：The thickness of invention
Degree measurement apparatus is provided with mobile unit, grating scale and laser displacement sensor, and laser displacement sensor is arranged on mobile unit
On, fixed mobile unit motor program can be set according to measurement demand, meet high-volume measurement demand；It is mobile single by adjusting
Member drives laser displacement sensor to move, and grating scale can be according to the moving displacement continuous trigger of mobile unit with laser displacement
Sensor carries out thickness parameter collection to testee, and contour curve is scanned to electric terminal (such as computer), realizes measurement
It is convenient and swift, precision is high, can meet the needs of high-volume curved face object thickness measure.
Brief description of the drawings
Below in conjunction with drawings and Examples, the invention will be further described, in accompanying drawing：
Fig. 1 is the structural representation of High Precision Stereo curved face object measurer for thickness of the present invention；
Fig. 2 is the decomposing schematic representation of the measurer for thickness of High Precision Stereo curved face object shown in Fig. 1；
Fig. 3 is the front view of High Precision Stereo curved face object measurer for thickness of the present invention；
Fig. 4 is the side view of High Precision Stereo curved face object measurer for thickness of the present invention；
Component names corresponding to each label are as follows in figure：
1st, laser displacement sensor；2nd, translation stage；3rd, connecting plate；4th, Z axis mobile unit；5th, Z axis line slideway；6th, Z axis
Substrate；7th, reinforcement；8th, Y-axis connecting plate；9th, scale grating；10th, Y-axis mobile unit；11st, Y-axis line slideway；12nd, grating scale
Reading head；13rd, grating ruler reading head fixed seat；14th, Y-axis substrate.
Embodiment
In order to which technical characteristic, purpose and the effect of the present invention is more clearly understood, now compares accompanying drawing and describe in detail
The embodiment of the present invention.
The invention discloses a kind of High Precision Stereo curved face object measurer for thickness, can be applied to measure three-dimensional object
Thickness, especially measure the thickness of solid surface object.
As Figure 1-Figure 4, High Precision Stereo curved face object measurer for thickness of the invention includes grating scale, Laser Measuring
Measuring mechanism and Y-axis motion；Y-axis motion includes Y-axis substrate 14 and can be reciprocal along Y direction on Y-axis substrate 14
Mobile Y-axis mobile unit 10；Laser measurement mechanism includes laser displacement sensor 1, and grating scale includes scale grating 9 and grating
Ruler reading head 12, scale grating 9 and laser displacement sensor 1 are arranged in Y-axis mobile unit 10, and grating ruler reading head 12 is set
On Y-axis substrate 14；Grating scale monitors Y-axis 10 moving displacement in the Y-axis direction of mobile unit, when moving displacement reaches default
During displacement, measurement signal is sent to laser displacement sensor 1, laser displacement sensor 1 is according to the measurement signal to measured object
Body carries out thickness parameter collection.The frequency of collection is relevant with the precision of grating scale, such as the precision of grating scale is 0.5 μm, pre-
If in displacement, at interval of 0.5 μm, will measure a thickness, thickness parameter is gathered by electric terminal (such as computer), is formed thick
Spend contour curve.
Wherein, " preset displacement " carries out selection setting according to the scale of scale grating 9.For example, measured zone is needed in scale
When in 115-200 μm of the scale of grating 9, preset displacement can be set to 115-200 μm, when 115 μm of moving displacement arrival, grating scale
Just trigger laser displacement sensor 1 and thickness parameter collection is carried out to testee, moving displacement reaches 200 μm, and grating scale just stops
Only trigger, be measured.
Laser measurement mechanism is used for measuring targets thickness and carries out non-contact laser measurement.Preferably, laser measuring machine
Structure also includes connecting plate 3, for fixed laser displacement transducer 1.Connecting plate 3 is vertically set in Y-axis mobile unit 10, and by
Y-axis mobile unit 10, which is driven along Y direction, to be moved back and forth.Laser displacement sensor 1 is arranged on connecting plate 3, when connecting plate 3 by
Y-axis mobile unit 10 drive along Y direction move back and forth when, laser displacement sensor 1 is past along Y direction also with connecting plate 3
It is multiple mobile, so as to adjust the distance with testee.
Further, laser measurement mechanism also includes translation stage 2, and each laser displacement sensor 1 is arranged on different put down
In moving stage 2.Translation stage 2 is removably mounted on connecting plate 3, for quickly adjusting laser displacement according to the size of measurement object
The relative position of sensor 1.Laser displacement sensor 1 is arranged on translation stage 2 during use, by adjusting translation stage 2 even
Position on fishplate bar 3, so as to change relative position of the laser displacement sensor 1 on connecting plate 3.Preferably, laser measuring machine
Structure includes two laser displacement sensors 1, and two laser displacement sensors 1 are disposed on connecting plate 3, and two laser positions
The laser of displacement sensor 1 is oppositely arranged.As shown in Figure 2 or Figure 3, two 1 layouts symmetrical above and below of laser displacement sensor, respectively
It is fixed on translation stage 2, is combined by connecting plate 3.
Y-axis motion is used to drive laser measurement mechanism to move back and forth along Y direction.The Y-axis movement of Y-axis motion
Unit 10 is arranged on Y-axis substrate 14, and can be moved back and forth in Y-axis substrate 14 along Y direction, so as to drive laser measurement mechanism
Moved back and forth along Y direction.It should be understood that Y-axis mobile unit 10 can be driven by drive device (such as servomotor) in Y
Moved back and forth on direction of principal axis, for example, can be rotated by control system according to the state modulator servomotor set, servo
Motor drag screw mandrel rotates, and screw mandrel driving Y-axis mobile unit 10 moves, so as to realize laser displacement sensor 1 in Y direction position
The accurate regulation moved.
Preferably, Y-axis motion is also including Y-axis connecting plate 8 and straight for the Y-axis of the mobile guide of Y-axis mobile unit 10
Line guide rail 11.Y-axis line slideway 11 is arranged on Y-axis substrate 14, and laser measurement mechanism is arranged on Y-axis connecting plate 8, and Y-axis
Connecting plate 8 is in turn mounted in Y-axis mobile unit 10 and driven by Y-axis mobile unit 10 along Y direction and moved back and forth, so as to drive
Whole laser measurement mechanism moves back and forth along Y direction.In the present embodiment, Y-axis line slideway 11 is parallel with Y-axis mobile unit 10
It is arranged on Y-axis substrate 14, Y-axis connecting plate 8 connects Y-axis line slideway 11, to improve the stabilization of the motion of laser displacement sensor 1
Property.It should be understood that Y-axis mobile unit 10 can also be designed to move directed along Y-axis line slideway 11.
The High Precision Stereo curved face object measurer for thickness of the present invention also includes and the orthogonal Z of Y-axis motion
Shaft movement mechanism, Z axis motion are used to drive laser measurement mechanism to move back and forth along Z-direction.Z axis motion includes Z
Axle substrate 6 and the Z axis mobile unit 4 that can be moved back and forth in Z axis substrate 6 along Z-direction, the connecting plate 3 of laser measurement mechanism are set
Put in Z axis mobile unit 4, and driven along Z-direction and moved back and forth by Z axis mobile unit 4.Z axis substrate 6 is arranged on Y-axis shifting
On moving cell 10, and driven along Y direction and moved back and forth by Y-axis mobile unit 10, and then drive laser measurement mechanism along Y-axis side
To moving back and forth.It should be understood that Z axis mobile unit 4 can be driven in the Z-axis direction by drive device (such as servomotor)
Moved back and forth, for example, can be rotated by control system according to the state modulator servomotor set, servomotor dragging
Screw mandrel rotates, and screw mandrel driving Z axis mobile unit 4 moves, so as to realize laser displacement sensor 1 in the accurate of Z-direction displacement
Regulation.
As shown in figure 1, the vertical connection of Y-axis connecting plate 8 of Z axis substrate 6 and Y-axis motion, Y-axis connecting plate 8 are arranged on Y
In axle mobile unit 10 and driven along Y direction and moved back and forth by Y-axis mobile unit 10, so as to drive Z axis substrate 6 along Y-axis side
To moving back and forth, and then whole laser measurement mechanism is driven to be moved back and forth along Y direction.Preferably, Y-axis connecting plate 8 and Z axis base
Reinforcement 7 is provided between plate 6, to increase the bonding strength between Y-axis connecting plate 8 and Z axis substrate 6.
Further, Z axis motion also includes the Z axis line slideway 5 of the mobile guide for Z axis mobile unit 4, Z axis
Line slideway 5 is arranged on Z axis substrate 6.In the present embodiment, Z axis line slideway 5 is set in parallel in Z axis with Z axis mobile unit 4
On substrate 6, the connecting plate 3 of laser measurement mechanism connects Z axis line slideway 5, to improve the stabilization of the motion of laser displacement sensor 1
Property.It should be understood that Z axis mobile unit 4 can also be designed to move directed along Z axis line slideway 5.
Grating scale is used to monitor the moving displacement of Y-axis mobile unit 10 in the Y-axis direction, when the moving displacement reaches pre-
If during displacement, triggering laser displacement sensor 1 carries out thickness parameter collection to testee, can be improved by using grating scale
Measurement accuracy.Grating scale includes scale grating 9 and grating ruler reading head 12.As shown in figure 4, grating ruler reading head 12 is arranged on Y
Fixed on axle substrate 14, scale grating 9 is arranged on Y-axis connecting plate 8, as Y-axis connecting plate 8 moves in the Y-axis direction.
The scale grating that resolution ratio is 0.5 micron can be selected in the scale grating 9.Preferably, grating scale is also consolidated including grating ruler reading head
Reservation 13, the grating ruler reading head fixed seat 13 are arranged on Y-axis substrate 14, and grating ruler reading head 12 is fixed on grating scale reading
In head fixed seat 13.
The High Precision Stereo curved face object measurer for thickness of the present invention by laser displacement sensor 1 by being arranged on movement
On unit, fixed mobile unit motor program can be set according to measurement demand, meet mass detection demand.Specifically, root
Laser displacement sensor 1 is driven to move according to measurement demand adjustment mobile unit, to adjust laser displacement sensor 1 and testee
Distance, moved by adjusting Z axis mobile unit 4 in Z-direction, so as to adjust laser displacement sensor 1 in the Z-axis direction
Highly；Y-axis mobile unit 10 is adjusted according to measurement demand to move along Y direction, so as to drive laser displacement sensor 1 along Y-axis
Direction is moved, to adjust the relative position with testee.Grating scale is according to the moving displacement of Y-axis mobile unit 10 with scale light
The precision continuous trigger laser displacement sensor 1 of bar resolution carries out thickness parameter collection to testee, and contour curve is swept
Retouch to electric terminal (such as computer), realize that measurement is convenient and swift, precision is high, high-volume curved face object thickness measure can be met
Demand.
It should be understood that above example only expresses the preferred embodiment of the present invention, it describes more specific and detailed
Carefully, but the limitation to the scope of the claims of the present invention therefore can not be interpreted as；It should be pointed out that the common skill for this area
For art personnel, without departing from the inventive concept of the premise, independent assortment can be carried out to above-mentioned technical characterstic, can also done
Go out several modifications and improvements, these belong to protection scope of the present invention；Therefore, it is all to be done with scope of the invention as claimed
Equivalents and modification, the covering scope of the claims in the present invention all should be belonged to.
Claims (10)
- A kind of 1. High Precision Stereo curved face object measurer for thickness, it is characterised in that including grating scale, laser measurement mechanism with And Y-axis motion；The Y-axis motion includes Y-axis substrate (14) and the Y-axis that can be moved back and forth in the Y-axis substrate (14) along Y direction Mobile unit (10)；The laser measurement mechanism includes laser displacement sensor (1), and the grating scale includes scale grating (9) and grating scale is read Several (12), the scale grating (9) and laser displacement sensor (1) are arranged on the Y-axis mobile unit (10), the light Grid ruler reading head (12) is arranged on the Y-axis substrate (14)；The grating scale monitors the moving displacement of the Y-axis mobile unit (10) in the Y-axis direction, when the moving displacement reaches During preset displacement, measurement signal is sent to the laser displacement sensor (1), the laser displacement sensor (1) is according to Measurement signal carries out thickness parameter collection to testee.
- 2. measurer for thickness according to claim 1, it is characterised in that it is the Y that the Y-axis motion, which also includes, The Y-axis line slideway (11) of the mobile guide of axle mobile unit (10), the Y-axis line slideway (11) are arranged on the Y-axis base On plate (14).
- 3. measurer for thickness according to claim 1, it is characterised in that the laser measurement mechanism also includes connecting plate (3), the laser displacement sensor (1) is arranged on the connecting plate (3)；The connecting plate (3) is vertically set on the Y-axis mobile unit (10), and is driven by the Y-axis mobile unit (10) Moved back and forth along Y direction.
- 4. measurer for thickness according to claim 3, it is characterised in that the laser measurement mechanism is included described in two Laser displacement sensor (1), two laser displacement sensors (1) are disposed on the connecting plate (3), and two institutes The laser for stating laser displacement sensor (1) is oppositely arranged.
- 5. measurer for thickness according to claim 3, it is characterised in that the laser measurement mechanism also includes translation stage (2), the translation stage (2) is removably mounted on the connecting plate (3), and each laser displacement sensor (1) is set On the different translation stages (2).
- 6. according to the measurer for thickness described in claim any one of 3-5, it is characterised in that the measurer for thickness also wraps Include includes Z axis substrate (6) and can be with the orthogonal Z axis motion of the Y-axis motion, the Z axis motion The Z axis mobile unit (4) that the Z axis substrate (6) moves back and forth along Z-direction；The Z axis substrate (6) is arranged on the Y-axis mobile unit (10), and is driven by the Y-axis mobile unit (10) along Y Direction of principal axis moves back and forth；The connecting plate (3) is arranged on the Z axis mobile unit (4), and is driven by the Z axis mobile unit (4) along Z axis side To reciprocating motion.
- 7. measurer for thickness according to claim 6, it is characterised in that it is the Z that the Z axis motion, which also includes, The Z axis line slideway (5) of the mobile guide of axle mobile unit (4), the Z axis line slideway (5) are arranged on the Z axis substrate (6) on.
- 8. measurer for thickness according to claim 6, it is characterised in that the Y-axis motion also includes and the Z Axle substrate (6) Y-axis connecting plate (8) connected vertically, the Y-axis connecting plate (8) are arranged on the Y-axis mobile unit (10) simultaneously Driven along Y direction and moved back and forth by the Y-axis mobile unit (10).
- 9. measurer for thickness according to claim 8, it is characterised in that the scale grating (9) is arranged on the Y-axis On connecting plate (8), reinforcement (7) is provided between the Y-axis connecting plate (8) and Z axis substrate (6).
- 10. measurer for thickness according to claim 1, it is characterised in that the grating scale also includes grating scale reading Head fixed seat (13), the grating ruler reading head fixed seat (13) are arranged on the Y-axis substrate (14), the grating scale reading Head (12) is fixed on the grating ruler reading head fixed seat (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710948709.8A CN107883885A (en) | 2017-10-12 | 2017-10-12 | A kind of High Precision Stereo curved face object measurer for thickness |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710948709.8A CN107883885A (en) | 2017-10-12 | 2017-10-12 | A kind of High Precision Stereo curved face object measurer for thickness |
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| Publication Number | Publication Date |
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| CN107883885A true CN107883885A (en) | 2018-04-06 |
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| CN201710948709.8A Pending CN107883885A (en) | 2017-10-12 | 2017-10-12 | A kind of High Precision Stereo curved face object measurer for thickness |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109341586A (en) * | 2018-11-22 | 2019-02-15 | 深圳市智信精密仪器有限公司 | Non-contact 3-D measuring device and measuring method |
| CN109568810A (en) * | 2018-11-23 | 2019-04-05 | 中国计量科学研究院 | Automatically scanning Water ball system positioning performance measuring device |
| CN112345554A (en) * | 2020-10-30 | 2021-02-09 | 凌云光技术股份有限公司 | Grating scale reference imaging device and method |
| CN114485402A (en) * | 2022-01-26 | 2022-05-13 | 衷博瑞佳生物技术(上海)有限公司 | Laser following type position detection system and method |
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| CN105091802A (en) * | 2015-09-09 | 2015-11-25 | 华中科技大学 | Portable two-dimensional following laser measurement device based on laser distance measuring sensor |
| CN206311086U (en) * | 2016-11-15 | 2017-07-07 | 江苏方天电力技术有限公司 | A kind of great-scale displacement sensor calibrating installation |
| CN106979756A (en) * | 2017-04-24 | 2017-07-25 | 华南理工大学 | A kind of ball-screw gap and the measurement apparatus and method of rigidity |
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| CN203216461U (en) * | 2013-04-18 | 2013-09-25 | 福建达宇重型数控机床有限公司 | Milling roll diameter measuring device |
| CN105091802A (en) * | 2015-09-09 | 2015-11-25 | 华中科技大学 | Portable two-dimensional following laser measurement device based on laser distance measuring sensor |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109341586A (en) * | 2018-11-22 | 2019-02-15 | 深圳市智信精密仪器有限公司 | Non-contact 3-D measuring device and measuring method |
| CN109568810A (en) * | 2018-11-23 | 2019-04-05 | 中国计量科学研究院 | Automatically scanning Water ball system positioning performance measuring device |
| CN112345554A (en) * | 2020-10-30 | 2021-02-09 | 凌云光技术股份有限公司 | Grating scale reference imaging device and method |
| CN114485402A (en) * | 2022-01-26 | 2022-05-13 | 衷博瑞佳生物技术(上海)有限公司 | Laser following type position detection system and method |
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Application publication date: 20180406 |