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CN107748312A - A kind of current leakage detection system and polycrystalline silicon reducing furnace - Google Patents

A kind of current leakage detection system and polycrystalline silicon reducing furnace Download PDF

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Publication number
CN107748312A
CN107748312A CN201710948079.4A CN201710948079A CN107748312A CN 107748312 A CN107748312 A CN 107748312A CN 201710948079 A CN201710948079 A CN 201710948079A CN 107748312 A CN107748312 A CN 107748312A
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CN
China
Prior art keywords
detection system
leakage detection
current leakage
current
polycrystalline silicon
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710948079.4A
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Chinese (zh)
Inventor
宗冰
郭光伟
蒲泽军
丁小海
王生红
王体虎
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Asia Silicon Qinghai Co Ltd
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Asia Silicon Qinghai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Asia Silicon Qinghai Co Ltd filed Critical Asia Silicon Qinghai Co Ltd
Priority to CN201710948079.4A priority Critical patent/CN107748312A/en
Publication of CN107748312A publication Critical patent/CN107748312A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/02Silicon
    • C01B33/021Preparation
    • C01B33/027Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/035Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/12Measuring rate of change

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Silicon Compounds (AREA)

Abstract

The present invention relates to production of polysilicon apparatus field, discloses a kind of current leakage detection system and polycrystalline silicon reducing furnace.Current leakage detection system includes ground wire and current differential detection module, current differential detection module can detect that leakage current amplitude change rate in ground wire, therefore, according to current differential detection module testing result can determine whether out in reduction furnace ground short circuit fault type belong to dust accumulation at electrode, knot silicon caused by short circuit or silicon rod fall short circuit caused by rod.So as to decide whether blowing out processing or continue to run with, according to actual conditions, reduce because erroneous judgement blowing out and caused by huge economic loss.The polycrystalline silicon reducing furnace of the present invention is provided with the current leakage detection system, and the furnace wall of its body of heater can judge the short-circuit-type in reduction furnace by ground connection in order to technical staff.

Description

A kind of current leakage detection system and polycrystalline silicon reducing furnace
Technical field
The present invention relates to production of polysilicon apparatus field, in particular to a kind of current leakage detection system and polysilicon also Former stove.
Background technology
Today of energy crisis getting worse, people increasingly pay attention to photovoltaic industry, and this is greatly promoted to a certain extent The development of photovoltaic industry, and polysilicon plays an important role during photovoltaic industry develops, polysilicon is photovoltaic The basic material of industry and semicon industry, at present, the production of polysilicon in China are to use improved Siemens mostly, improvement west Men Zifa is to produce the most ripe technique of polysilicon, and trichlorosilane is whole in reduction reaction in furnace generation silicon with hydrogen in the method The committed step of individual technique, while be also most important energy consumption link.For make enterprise up to produce it is up to standard, realize it is energy-saving, strictly The operation of control reduction furnace, if once reduction furnace non-normal stop, by the Yield and quality, apparatus body, production of polysilicon Cost etc. causes serious influence, and earth fault is the common cause of reduction furnace non-normal shutdown.
It is typically grounded that rod is mainly fallen with reduction furnace bell jar inwall contact generation ground short circuit by silicon rod, or with reduction furnace The progress of interior reaction, silicon is tied on the insulating trip at chassis of reducing furnace electrode and dust causes ground short circuit, existing detection method It is by detecting the electric current in earth-return circuit, leakage current reaches the threshold value of setting, and it is single that electrical system just shows that reduction furnace occurs Mutually be grounded, therefore can not accurate judgement be which kind of mode causes ground short circuit phenomenon, so it is all to take to stop to run into such case The measure of stove reprocessing, but in actual production, ground wire is provided with protective resistance, and dust or knot silicon are deposited at electrode causes ground connection to be leaked Electricity, electrical system, reduction furnace are influenceed limited, it is not necessary to blowing out immediately;On the other hand, the silicon rod failure of falling rod, high temperature silicon rod occurs Easily by furnace wall scaling loss, blowing out safeguard measure should be taken immediately.The blowing out all taken in the case where not knowing failure cause Measure causes strong influence and economic loss to production.
The content of the invention
It is an object of the invention to provide a kind of current leakage detection system, and it can be easy to technical staff to judge polysilicon also Short-circuit-type in former stove, so as to take different measure to reduction furnace according to fault type.
Another object of the present invention is to provide a kind of polycrystalline silicon reducing furnace, that includes above-mentioned current leakage detection system, It can be easy to technical staff to judge the short-circuit-type in polycrystalline silicon reducing furnace, so as to be taken according to fault type reduction furnace Different measure.
What embodiments of the invention were realized in:
A kind of current leakage detection system, for detecting the short-circuit conditions of polycrystalline silicon reducing furnace, current leakage detection system includes being used for The current differential for connecting the ground wire of reduction furnace furnace wall and ground and upper current change rate being grounded for detecting detects mould Block.
In an embodiment of the present invention, the current differential detection module of above-mentioned current leakage detection system includes inductance and electricity Table is pressed, the positive and negative electrode of voltmeter electrically connects with the both ends of inductance respectively;The current changing rate that inductance is used on inductive grounding line, Voltmeter is used for the electrical potential difference for detecting inductance both ends.
In an embodiment of the present invention, above-mentioned current leakage detection system also includes warning device, warning device and voltage Table electrically connects.
In an embodiment of the present invention, it is provided with protective resistance on the ground wire of above-mentioned current leakage detection system.
In an embodiment of the present invention, it is provided with ammeter on the ground wire of above-mentioned current leakage detection system.
In an embodiment of the present invention, above-mentioned current leakage detection system also includes controller, and controller is more for controlling Crystal silicon reduction furnace is switched on or closed, and ammeter is electrically connected with the controller.
In an embodiment of the present invention, the current leakage detection system of above-mentioned current leakage detection system also includes controller, control Device processed is used to control being turned on and off for polycrystalline silicon reducing furnace, and voltmeter is electrically connected with the controller.
A kind of polycrystalline silicon reducing furnace provided by the invention, it includes body of heater and above-mentioned detection of electrical leakage system with cavity System, the furnace wall of body of heater is connected by the ground wire of current leakage detection system with ground.
In an embodiment of the present invention, the furnace bottom of above-mentioned polycrystalline silicon reducing furnace is provided with multipair electrode, multipair electrode For with power electric connection, be provided between electrode and power supply for coordination electrode be powered or power off switch.
In an embodiment of the present invention, it is provided with the ground wire of the current leakage detection system of above-mentioned polycrystalline silicon reducing furnace Ammeter, current leakage detection system also include controller, and ammeter is electrically connected with the controller, and controller electrically connects with switch.
The beneficial effect of the embodiment of the present invention is:
Silicon rod falls rod and contacted with furnace wall or because causing earth-return circuit to be grounded with the dust that is deposited on the electrode insulation piece of chassis During short circuit phenomenon, current leakage detection system detects the leakage current on ground wire, the current differential detection mould of current leakage detection system Block further detect ground wire on leakage current rate of change, can according to the current changing rate on ground wire come judge be because Rod and silicon rod is caused ground short circuit phenomenon with the contact of reduction furnace inwall, or because on chassis of reducing furnace electrode insulation piece with The progress of reaction and the dust that deposits causes ground short circuit.Because silicon rod falls rod and contacts to form earth-return circuit with reduction furnace furnace wall Process is transient behavior, and the leakage current amplitude in loop instantaneously increases, and is the process of a mutation;And insulated at hearth electrode The dust or knot silicon of piece surface deposition cause earth-return circuit leakage current amplitude slowly to increase, and are the processes of a gradual change, and with The lifting of deposition dust consistency, loop resistance slowly reduces, and the leakage current change in ground wire is relatively slow.Electric current is micro- Divide detection module to can detect that power current amplitude change rate in ground wire, therefore, detected and tied according to current differential detection module Fruit can determine whether out ground short circuit fault type in reduction furnace.So as to decide whether blowing out processing or continue to run with, according to actual feelings Condition, reduce because of erroneous judgement blowing out and caused by huge economic loss.
The polycrystalline silicon reducing furnace of the present invention is provided with above-mentioned current leakage detection system, therefore technical staff can be facilitated to judge Short-circuit-type, so as to make corresponding measure, reduce economic loss.
Brief description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below by embodiment it is required use it is attached Figure is briefly described, it will be appreciated that the following drawings illustrate only certain embodiments of the present invention, therefore be not construed as pair The restriction of scope, for those of ordinary skill in the art, on the premise of not paying creative work, can also be according to this A little accompanying drawings obtain other related accompanying drawings.
Fig. 1 is the schematic diagram of current leakage detection system in the embodiment of the present invention;
Fig. 2 is the schematic diagram of polycrystalline silicon reducing furnace in the embodiment of the present invention;
Fig. 3 is the distribution map of stove internal electrode in the embodiment of the present invention;
Fig. 4 is the controller connection diagram of polycrystalline silicon reducing furnace in the embodiment of the present invention.
Icon:100- current leakage detection systems;110- is grounded;112- ammeters;114- protective resistances;120- current differentials Detection module;122- inductance;124- voltmeters;130- warning devices;140- controllers;200- polycrystalline silicon reducing furnaces;210- stoves Body;220- electrodes;230- silicon rods;240- is switched.
Embodiment
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention In accompanying drawing, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is Part of the embodiment of the present invention, rather than whole embodiments.The present invention implementation being generally described and illustrated herein in the accompanying drawings The component of example can be configured to arrange and design with a variety of.
Therefore, below the detailed description of the embodiments of the invention to providing in the accompanying drawings be not intended to limit it is claimed The scope of the present invention, but be merely representative of the present invention selected embodiment.It is common based on the embodiment in the present invention, this area The every other embodiment that technical staff is obtained under the premise of creative work is not made, belong to the model that the present invention protects Enclose.
It should be noted that:Similar label and letter represents similar terms in following accompanying drawing, therefore, once a certain Xiang Yi It is defined, then it further need not be defined and explained in subsequent accompanying drawing in individual accompanying drawing.
In the description of the embodiment of the present invention, it is also necessary to explanation, unless otherwise clearly defined and limited, term " setting ", " connected ", " connection " should be interpreted broadly, for example, it may be fixedly connected or be detachably connected, or one Connect body;Can be mechanical connection or electrical connection;Can be joined directly together, can also be indirect by intermediary It is connected, can is the connection of two element internals.For the ordinary skill in the art, on being understood with concrete condition State the concrete meaning of term in embodiments of the present invention.
Embodiment
Fig. 1 is the schematic diagram of current leakage detection system 100 in the embodiment of the present invention.Fig. 1 is refer to, the present embodiment provides a kind of Current leakage detection system 100, for detecting the short-circuit conditions of polycrystalline silicon reducing furnace.Current leakage detection system 100 is examined including earth current Survey module and current differential detection module 120.Checking for grounded current module includes being used to connect reduction furnace furnace wall and ground Ground wire 110 and the ammeter 112 being arranged on ground wire.It can detect to be grounded by current differential detection module 120 Electric current on line 110 is changed with time rate, and technical staff can be helped to pass through the current changing rate on ground wire 110 to sentence Short-circuit-type in disconnected reduction furnace.
In general, silicon rod falls rod and contacts that to form the process of earth-return circuit be transient behavior with reduction furnace furnace wall, in loop Leakage current amplitude instantaneously increase, be one mutation process;And the dust or knot that insulating trip surface deposits at hearth electrode Silicon causes earth-return circuit leakage current amplitude slowly to increase, and is the process of a gradual change, and carrying with deposition dust consistency Rise, loop resistance slowly reduces, and the leakage current change in ground wire 110 is relatively slow.Current differential detection module 120 can be examined Measure current amplitude rate of change on ground wire 110.Therefore, be can determine whether out also according to the testing result of current differential detection module 120 Ground short circuit fault type in former stove.
In embodiment, the current differential detection module 120 of current leakage detection system 100 includes inductance 122 and voltmeter 124, the both ends of the positive and negative electrode of voltmeter 124 respectively with inductance 122 electrically connect, therefore voltmeter 124 forms one with inductance 122 Individual loop.Inductance 122 insulate close to ground wire 110 and between ground wire 110, its electric current being used on inductive grounding line 110 Rate of change.When the electric current being grounded on 110 changes, magnetic field also accordingly changes caused by its electric current, causes inductance Magnetic flux in 122 coil changes, and according to electromagnetic induction principle, when magnetic flux changes, can be produced in coil Induced electromotive force.
Voltmeter 124 is used for the electrical potential difference for detecting the both ends of inductance 122, is characterized by the voltage shown on ground wire 110 Current changing rate.Silicon rod falls rod and to be contacted when causing ground short circuit with reduction furnace furnace wall, on ground wire 110 electric current moment become Greatly, the induced electromotive force of inductance 122 will be larger;If led by the dust or knot silicon of hearth electrode insulating trip surface deposition It is a slow process of comparison because dust accumulates or tied silicon, the current potential on ground wire 110 must be when causing ground short circuit Slowly increase, therefore the induced electromotive force of inductance 122 is than relatively low.Thus the type of short circuit is judged.
Because silicon rod falls caused by rod, short circuit is relatively serious, generally requires shutdown maintenance, therefore in the present embodiment, The phenomenon of falling rod occurs in order to facilitate reminding technology personnel, current leakage detection system 100 also includes warning device 130, warning device 130 Electrically connected with voltmeter 124, when the registration of voltmeter 124 reaches a preset value, warning device 130 can signal an alert. The function can be realized by connecting single-chip microcomputer or PLC between warning device 130 and voltmeter 124, voltmeter 124 triggers The voltage threshold of alarm can according to it is actual fall rod caused by induced electromotive force be configured or adjust.In the present embodiment, should Alarm signal is voice signal or the optical signal of flicker.
In the present embodiment, in order that the electric current on ground wire 110 is unlikely to excessive and jeopardizes the person and equipment safety, connect Protective resistance 114 is provided with ground wire 110, the impedance of protective resistance 114 can be selected according to actual conditions.
In the present embodiment, ammeter 112 is provided with the ground wire 110 of current leakage detection system 100, passes through ground wire Size of current on 110 observes instant short-circuit conditions, the impedance that can also reflect indirectly in earth-return circuit, to facilitate guidance technology Personnel carry out corresponding measure.
In order to realize preferable Automated condtrol, current leakage detection system 100 also includes controller 140, and controller 140 is used for Control polycrystalline silicon reducing furnace is turned on and off and (is powered or powers off), and ammeter 112 electrically connects with controller 140.In this implementation In example, controller 140 can be single-chip microcomputer or PLC.When the electric current of the display of ammeter 112 reaches preset value, controller 140 Reduction furnace running can be stopped, avoiding leakage current from further increasing, reduce the risk to equipment and personnel's injury.
When the registration of voltmeter 124 on current differential detection module 120 is larger, it is meant that the electric leakage on ground wire 110 Current changing rate is larger, in this case, it is likely to falls and rod and is contacted with furnace wall there occurs silicon rod, now needs to stop immediately Stove overhauls.Therefore further voltmeter 124 is electrically connected with controller 140, when the registration of voltmeter 124 reaches preset value, control Device 140 processed can stop the running of reduction furnace.Such Automated condtrol can close reduction furnace in time, avoid more damaging Lose.In the present embodiment, warning device 130 is electrically connected to controller 140, it should be appreciated that in other embodiments, warning device 130 can also electrically connect with a single controller, and the controller electrically connects with voltmeter 124 again, therefore warning device 130 The controller 140 of the present embodiment can be not directly connected to.
Fig. 2 is the schematic diagram of polycrystalline silicon reducing furnace 200 in the embodiment of the present invention;Fig. 3 is body of heater 210 in the embodiment of the present invention The distribution map of interior electrode 220;Fig. 4 is the connection diagram of controller 140 of polycrystalline silicon reducing furnace 200 in the embodiment of the present invention.Please Reference picture 2 is to Fig. 4, and polycrystalline silicon reducing furnace 200 provided by the invention, it includes body of heater 210 and above-mentioned electric leakage with cavity Detecting system 100, the furnace wall of body of heater 210 are connected by the ground wire 110 of current leakage detection system 100 with ground.
In the present embodiment, the furnace bottom of polycrystalline silicon reducing furnace 200 is provided with 8 pairs of electrodes 220, each pair electrode 220 during production It is connected by silicon rod 230, multipair electrode 220 is used for and power electric connection, is provided between electrode 220 and power supply for controlling electricity The switch 240 that pole 220 is powered or powered off.In the present embodiment, controller 140 240 electrically connects with switch, and controller 140 is from electricity After flow table 112 or voltmeter 124 receive signal, switch 240 can be selectively closed off, stops powering to electrode 220.Work as electricity When one of stream or voltage exceed safe current (predeterminable) or safe voltage (predeterminable), controller 140 can closing switch 240。
The operation principle of polycrystalline silicon reducing furnace 200 with current leakage detection system 100 is:
When polycrystalline silicon reducing furnace 200 runs well, no current on ground wire 110.When silicon rod 230 occur fall rod, with stove When wall contacts, the current value moment increase on ground wire 110, the inductance 122 of current differential detection module 120 senses electric current Transient change, both ends produce induced electromotive force, and induced electromotive force is detected by voltmeter 124, and show.When the generation of falling rod When, the registration of voltmeter 124 can be higher than preset value, and now set out warning device 130, enables a technician to know short-circuit conditions, And judge that short circuit is as falling caused by rod.At the same time, the controller 140 that voltmeter 124 connects can control reduction furnace Switch 240 is closed, and is stopped powering to electrode 220 in time, has been ensured equipment safety.
When accumulation dust or knot silicon cause short circuit at electrode 220, because dust or knot silicon are slow accumulation formation, so The electric current of ground wire 110 is to be slowly increased, and the registration of voltmeter 124 of current differential detection module 120 is often very low, is not up to Preset value.And ammeter 112 slowly reduces with the impedance of earth-return circuit, its registration gradually increases, and reaches ammeter in electric current Before 112 preset value, it is not necessary that blowing out is handled, and after electric current is higher than 112 preset value of ammeter, potential safety hazard be present, this Even if when voltmeter 124 voltage it is very low, but ammeter 112 still can be to the feedback signal of controller 140, and makes controller 140 close the switch 240 of reduction furnace, stop powering to electrode 220.Pass through current differential detection module 120 and ammeter 112 Coordinate, can not only facilitate technical staff to judge the type of short circuit, Automated condtrol can also be carried out to equipment in time.
In summary, current leakage detection system of the invention falls rod in silicon rod and contacted with furnace wall or because with chassis electrode insulation piece When the dust of upper deposition causes earth-return circuit generation ground short circuit phenomenon, it can judge to be according to the current changing rate on ground wire Which kind of reason causes ground short circuit.Because silicon rod falls rod and contacts that to form the process of earth-return circuit be instantaneous row with reduction furnace furnace wall For the leakage current amplitude in loop instantaneously increases, and is the process of a mutation;And insulating trip surface deposition at hearth electrode Dust or knot silicon cause earth-return circuit leakage current amplitude slowly to increase, and are the processes of a gradual change, and as deposition dust causes The lifting of density, loop resistance slowly reduce, and the leakage current change in ground wire is relatively slow.Current differential detection module can Power current amplitude change rate in ground wire is detected, therefore, be can determine whether out also according to current differential detection module testing result Ground short circuit fault type in former stove.So as to decide whether blowing out processing or continue to run with, according to actual conditions, reduce because by mistake Judge blowing out and cause huge economic loss.The polycrystalline silicon reducing furnace of the present invention is provided with the current leakage detection system, therefore has There is above-mentioned beneficial effect.
The preferred embodiments of the present invention are the foregoing is only, are not intended to limit the invention, for the skill of this area For art personnel, the present invention can have various modifications and variations.Within the spirit and principles of the invention, that is made any repaiies Change, equivalent substitution, improvement etc., should be included in the scope of the protection.

Claims (10)

  1. A kind of 1. current leakage detection system, for detecting the short-circuit conditions of polycrystalline silicon reducing furnace, it is characterised in that the detection of electrical leakage System includes being used for the ground wire for connecting reduction furnace furnace wall and ground and the electricity for detecting the upper current change rate of ground wire Flow differential detection module.
  2. 2. current leakage detection system according to claim 1, it is characterised in that the current differential detection module includes inductance And voltmeter, the both ends of the positive and negative electrode of the voltmeter respectively with the inductance electrically connect;The inductance is used to sense described connect Current changing rate on ground wire, the voltmeter are used for the electrical potential difference for detecting the inductance both ends.
  3. 3. current leakage detection system according to claim 2, it is characterised in that the current leakage detection system also includes alarm dress Put, the warning device electrically connects with the voltmeter.
  4. 4. current leakage detection system according to claim 1, it is characterised in that be provided with protective resistance on the ground wire.
  5. 5. current leakage detection system according to claim 1, it is characterised in that be provided with ammeter on the ground wire.
  6. 6. current leakage detection system according to claim 5, it is characterised in that the current leakage detection system also includes control Device, the controller are used to control being turned on and off for the polycrystalline silicon reducing furnace, and the ammeter is electrically connected with the controller Connect.
  7. 7. current leakage detection system according to claim 2, it is characterised in that the current leakage detection system also includes control Device, the controller are used to control the polycrystalline silicon reducing furnace to switch on or close, the voltmeter and the controller Electrical connection.
  8. 8. a kind of polycrystalline silicon reducing furnace, it is characterised in that the polycrystalline silicon reducing furnace includes body of heater and right with cavity It is required that current leakage detection system any one of 1-4 or 7, ground wire that the furnace wall of the body of heater passes through the current leakage detection system It is connected with ground.
  9. 9. polycrystalline silicon reducing furnace according to claim 8, it is characterised in that the furnace bottom of the polycrystalline silicon reducing furnace is provided with Multipair electrode, the multipair electrode is used for and power electric connection, is provided between the electrode and the power supply for controlling electricity Pole is powered or the switch of power-off.
  10. 10. polycrystalline silicon reducing furnace according to claim 9, it is characterised in that on the ground wire of the current leakage detection system Ammeter is provided with, the current leakage detection system also includes controller, and the ammeter electrically connects with the controller, the control Device processed electrically connects with the switch.
CN201710948079.4A 2017-10-12 2017-10-12 A kind of current leakage detection system and polycrystalline silicon reducing furnace Pending CN107748312A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110702968A (en) * 2019-11-15 2020-01-17 新疆东方希望新能源有限公司 Grounding current grading detection method for power supply system of polycrystalline silicon reduction furnace
CN114207456A (en) * 2019-12-11 2022-03-18 株式会社Lg新能源 Apparatus and method for diagnosing degree of deterioration of battery

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1346441A (en) * 1999-01-21 2002-04-24 Tdk株式会社 Current sensor
CN204242339U (en) * 2014-11-07 2015-04-01 新疆合晶能源科技有限公司 For electric leakage and the rebuffed protective device of polycrystalline silicon reducing furnace
CN204981164U (en) * 2015-06-30 2016-01-20 中国恩菲工程技术有限公司 Detection apparatus for electric current is revealed to polycrystalline silicon reduction furnace ground connection
CN205484644U (en) * 2016-04-06 2016-08-17 北京三义锦程电气科技有限责任公司 A grounding detection cabinet for polycrystalline silicon reduction system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1346441A (en) * 1999-01-21 2002-04-24 Tdk株式会社 Current sensor
CN204242339U (en) * 2014-11-07 2015-04-01 新疆合晶能源科技有限公司 For electric leakage and the rebuffed protective device of polycrystalline silicon reducing furnace
CN204981164U (en) * 2015-06-30 2016-01-20 中国恩菲工程技术有限公司 Detection apparatus for electric current is revealed to polycrystalline silicon reduction furnace ground connection
CN205484644U (en) * 2016-04-06 2016-08-17 北京三义锦程电气科技有限责任公司 A grounding detection cabinet for polycrystalline silicon reduction system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110702968A (en) * 2019-11-15 2020-01-17 新疆东方希望新能源有限公司 Grounding current grading detection method for power supply system of polycrystalline silicon reduction furnace
CN110702968B (en) * 2019-11-15 2022-07-19 新疆东方希望新能源有限公司 Grounding current grading detection method for power supply system of polycrystalline silicon reduction furnace
CN114207456A (en) * 2019-12-11 2022-03-18 株式会社Lg新能源 Apparatus and method for diagnosing degree of deterioration of battery
CN114207456B (en) * 2019-12-11 2024-04-12 株式会社Lg新能源 Apparatus and method for diagnosing degree of degradation of battery

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Application publication date: 20180302

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