CN107339943A - The common light path self calibration apparatus for measuring thickness of thin film and measuring method of palarization multiplexing - Google Patents
The common light path self calibration apparatus for measuring thickness of thin film and measuring method of palarization multiplexing Download PDFInfo
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- CN107339943A CN107339943A CN201710537207.6A CN201710537207A CN107339943A CN 107339943 A CN107339943 A CN 107339943A CN 201710537207 A CN201710537207 A CN 201710537207A CN 107339943 A CN107339943 A CN 107339943A
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- 239000010409 thin film Substances 0.000 title claims abstract description 19
- 239000000523 sample Substances 0.000 claims abstract description 159
- 239000010408 film Substances 0.000 claims abstract description 104
- 230000010287 polarization Effects 0.000 claims abstract description 41
- 238000005259 measurement Methods 0.000 claims abstract description 40
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
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Abstract
The present invention is to provide the common light path self calibration apparatus for measuring thickness of thin film and measuring method of a kind of palarization multiplexing.Include light source output module, film thickness measuring probe module, demodulated interferential instrument module, polarization beam splitting module and collection and control module.The present invention uses polarization multiplexing, and two probes use orthogonal state polarised light.Measuring probe can realize the transmission and reflection of transmission ray, and two probe absolute distance H measurement can be realized during without film to be measured；Between the probe of film placement two to be measured, the measurement of two probes and the absolute distance H1 and H2 of film front and rear surfaces to be measured is realized；Film thickness d to be measured can be determined by d=H (H1+H2).The present invention, which is implemented without demarcation thing, to be measured to film thickness to be measured, the design of light path overcomes the influence brought in measurement process due to internal system mechanical instability and external environment condition change altogether, has the advantages that self calibration, the identification of feature white light interference peak is simple, dynamic range is big, measurement result can trace to the source.
Description
Technical field
The present invention relates to a kind of optical measuring device, particularly a kind of apparatus for measuring thickness of thin film.Specifically
A kind of common light path self calibration apparatus for measuring thickness of thin film of palarization multiplexing.
Background technology
With flourishing for material science and technology, to meet that the urgent of field such as microelectronics, photoelectron, new energy are essential
Ask, film is in fields such as optical engineering, mechanical engineering, Communication Engineering, bioengineering, space technology, Chemical Engineering, engineering in medicine
It is widely used.One of thin-film material core the most and crucial parameter are exactly thickness, and it plays pass not only for film preparation
The effect of key, also substantially determine the application performances such as mechanics, electromagnetism, photoelectricity and the optics of film.
1961, N.Schwartz et al. was proposed one kind and perceived using high-accuracy mechanical contact pilotage in body surface motion
Contact probe method (N.Schwartz, R.Brown, " the A Stylus Method for Evaluating of the change of surface profile
the Thickness of Thin Films and Substrate Surface Roughness,”in Transactions
of the Eighth Vacuum Symposium and Second International Congress(Pergamon,New
York, 1961), pp.836-845.) and, this method has the advantages that stability is good, and resolving power is high, and measurement range is big；But due to
The probe based on mechanical movement is included in sonde method, to needing to carry out secondary operation during measured thin film, probe is in film table in addition
The movement in face, certain infringement can be also caused to film.Therefore noncontact measuring method just quickly instead of contact measuring method pair
The thickness of film measures.
2013, Ma Xizhi of Nanjing Aero-Space University et al. disclosed a kind of ultrasonic film thickness measuring instrument and its measurement side
Method (Chinese Patent Application No.：201310198294.9), resonance occurs for the surface that oil film is incided in this method transmitting ultrasonic pulse,
The thickness of oil film is measured by measuring the correlation properties of reflected impulse again；But this method is only applicable to the survey of liquid mould
Amount, and different models need to be established for the film of different-thickness scope, demodulation difficulty is larger.
Optical measuring method has high-precision advantage, starts gradually to be widely applied in terms of measured film thickness
Come.2012, Qu Lianjie of Jingdongfang Photoelectric Science ＆ Technology Co., Ltd., Beijing et al. disclose a kind of thickness device and method (in
State's number of patent application：201210080756.2), this method passes through prism by the way of space optical path is combined with optic fibre light path
Color light source is carried out the surface that light-splitting processing is radiated at film, to enter the thickness of film by the characteristic for measuring different reflected lights
Row measurement.This method expands the spectral range of the device sample point of measured film thickness, improves resolution ratio.
As a part for optical measuring method, White Light Interferometer is surveyed due to the measurement advantage with absolute magnitude in thickness
Amount field gradually starts to grow up.The general principle of White Light Interferometer is：Scanning is connected in an arm end of white light interferometer
Mirror is fixed as pickup arm, another arm lengths and is used as reference arm, change sensing arm lengths by motion scan mirror, work as pickup arm
The light path of middle transmission light realizes that the interference peak of appearance is maximum, by identifying peak when matching with the light path of transmission light in reference arm
Realize the measurement of relevant parameter in the position of value.2008, Peter J.de Groot of Zygo companies of the U.S. et al. disclosed one
Kind is for film thickness and scanning interferometer method (the Scanning interferometry for thin film of surface measurement
Thickness and surface measurements, US Patent 7468799), this method uses white light interference theory
Measured film thickness method, two peak values are extracted from interference light intensity figure using Fourier transformation method, this method is not by thin
The influence of film thickness, it is not only suitable for measuring the film that thickness is more than the coherence length of laser, is applied to measurement thickness again and is less than light source
The film of coherence length.2014, Jia Chuanwu of Shandong University et al. disclosed a kind of wide range optical interferometry measurement film thickness
System (Chinese Patent Application No.：201410290494.1) the method cloth that, the system is formed between speculum and collimating mirror
In-POLO interferometer, measure and can obtain by measuring the Fabry-Perot chamber length placed under speculum before and after film to be measured
To the thickness of film to be measured, this method is simple in construction, and measurement accuracy is higher, but due to needing film to be measured being placed on reflection
The lower section of mirror, destruction easily is produced to the form of film surface.
The content of the invention
It is an object of the invention to provide a kind of precision height, self calibration, the identification of feature white light interference peak is simple, can trace to the source,
The common light path self calibration apparatus for measuring thickness of thin film of the palarization multiplexing of dynamic range.It is a kind of thin the present invention also aims to provide
Membrane thickness measured method.
The object of the present invention is achieved like this：
Including light source output module 1, film thickness measuring probe module 6, demodulated interferential instrument module 7, polarization beam splitting module 8 and
Collection and control module 9；The output light of light source output module 1 is input in polarization-maintaining coupler 3 via 45 ° of polarizers 2；Polarization-maintaining coupling
Incident light is divided into two-way and enters the 1st of film thickness measuring probe module 6 by 0 ° of analyzer 4 and 90 ° of analyzers 5 respectively by clutch 3
The measurement of relevant parameter is carried out in the measuring probe 602 of measuring probe 601 and the 2nd；Measure and visit via the 1st measuring probe the 601 and the 2nd
First 602 return light is input in demodulated interferential instrument module 7；Pass through the position scanning means 704 in demodulated interferential instrument module 7
The matching of light path is realized in scanning；The interference signal for matching light path is input in polarization beam splitting module 8 and realizes different polarization states, no
The separation of co-wavelength interference light；Interference signal after separation carries out the calculating of relevant parameter by gathering with collection in control module 9.
The present invention can also include：
1st, the light source output module 1 is by wide spectrum light source 101, the 1st isolator 102, arrowband Frequency Stabilized Lasers light source the 103, the 2nd
The wavelength division multiplexer 105 of isolator 104 and the 1st is formed, and wide spectrum light source 101 is connected with the 1st isolator 102, arrowband frequency stabilization
LASER Light Source 103 is connected with the input of the 2nd isolator 104, the 1st isolator 102 and the output end of the 2nd isolator 104 respectively with
The input 1a of 1st wavelength division multiplexer 105 the 1st, the 2nd input 1b are connected.
2nd, the feature of each light source is in described light source output module 1：Half spectral width of wide spectrum light source 101 is more than 45nm,
Fiber power is more than 2mW；Half spectral width of arrowband Frequency Stabilized Lasers light source 103 is less than 1pm, and fiber power is more than 2mW；Wide spectrum light source
101 have different centre wavelength from arrowband Frequency Stabilized Lasers light source 103, and the frequency spectrum of the two do not have in half spectral width it is overlapping
Part.
3rd, the film thickness measuring probe 6 is made up of the 1st measuring probe 601 and the 2nd measuring probe 602；1st measurement is visited
First 601 and the 2nd measuring probe 602 can realize the transmission and reflection to transmission ray simultaneously, and the reflectivity of transmission ray exists
Between 20%~80%；1st measuring probe 601 and the 2nd measuring probe 602 can work in the fast axle and slow axis of polarization maintaining optical fibre；
The emergent ray of 1st measuring probe 601 and the 2nd measuring probe 602 mutually coincides；Device under test 603 place measurement when, respectively with
The emergent ray of 1st measuring probe 601 and the 2nd measuring probe 602 is vertical；The output of 1st measuring probe 601 and 0 ° of analyzer 4
End is connected, and the 2nd measuring probe 602 is connected with 90 ° of output ends of analyzer 5.
4th, the demodulated interferential instrument module 7 is by polarization-maintaining coupler 701, polarization-maintaining GRIN Lens 702, removable one side reflection
Mirror 703 and position scanning means 704 are formed, and polarization-maintaining GRIN Lens 702 can work in the fast axle and slow axis of polarization maintaining optical fibre
Make, reflection and transmission, the light reflectance of camera lens can be realized simultaneously between 20%~80%, by the He of the 1st measuring probe 601
The light that 2nd test probe 602 is collected is input to polarization-maintaining coupler 701 the 2nd by the 2nd output end 3b of polarization-maintaining coupler 3 respectively
In input 7b, the 3rd output end 7c of polarization-maintaining coupler 701 is connected with polarization-maintaining GRIN Lens 702, polarization-maintaining coupler 701
1st output end 7a is connected with the input of polarization splitting prism 803；Polarization-maintaining GRIN Lens 702, removable one side speculum
703 reconciliation cadre enrolled among workers's interferometer couplers 701 collectively constitute demodulated interferential instrument；The scanning range L energy of the table top of position scanning means 704
When enough meeting that film thickness measuring probe module is not inserted into film 603 to be measured, demodulated interferential instrument can be realized by inside and outside different probe lens
The light path matching of surface reflection.
5th, optical fiber is connected in light path to be characterized in：The output end tail optical fiber of wide spectrum light source 101, arrowband Frequency Stabilized Lasers light source 103,
105,45 ° of 1 isolator, 102 each port tail optical fiber, 104 each port tail optical fiber of the 2nd isolator, the 1st wavelength division multiplexer polarizers 2 input
It is single-mode fiber to hold each port tail optical fiber of tail optical fiber；45 ° of output end tail optical fibers of the polarizer 2, each port tail optical fiber of polarization-maintaining coupler 3,0 ° of inspection
The inclined input/output terminal tail optical fiber of device 4,90 ° of the input/output terminal tail optical fibers of analyzer 5, the tail optical fiber of the 1st measuring probe 601, the 2nd measuring probes
Each port tail optical fiber of 602 tail optical fibers, polarization-maintaining coupler 701, the tail optical fiber of polarization-maintaining GRIN Lens 702,803 each port of polarization splitting prism
Tail optical fiber, 801 each port tail optical fiber of the 2nd wavelength division multiplexer, the tail of 802 the 1st photodetector of each port tail optical fiber of the 3rd wavelength division multiplexer 903
Fibre, the tail optical fiber of the 2nd photodetector 904, the tail optical fiber of the 3rd photodetector 905, the tail optical fiber of the 6th photodetector 906 are polarization-maintaining light
It is fine.
The present invention measured film thickness method be：
1st, when being not inserted into film 603 to be measured, driving light path position scanning means 704 carries out light path scanning, makes the 1st measurement
601 internal reflected lights 611 and the outer surface reflected light 612 of the 2nd measuring probe 602 of popping one's head in carry out light path matching, the 2nd measuring probe
602 internal reflected lights 621 and the outer surface reflected light 622 of the 1st measuring probe 601 carry out light path matching；Pass through collection and control mould
Block 9 is demodulated record to relevant parameter, obtains the absolute distance H between two measuring probes；
2nd, film 603 to be measured is inserted among the 1st measuring probe 601 and the 2nd measuring probe 602, film 603 to be measured and
1 measuring probe 601 is vertical with the emergent ray of the 2nd measuring probe 602；Driving light path position scanning means 704 carries out light path and swept
Retouch, make by the internal reflected light 613 of the 1st measuring probe 601 and film front surface 603a reflected lights 614 to be measured carry out light path matching,
The internal reflected light 623 of 2nd measuring probe 602 carries out light path matching with surface 603b reflected lights 624 after film to be measured；By adopting
Collection is demodulated record to relevant parameter with control module 9, obtains 601 film front surface 603a to be measured of the 1st measuring probe respectively
Distance H1,602 film front surface 603b to be measured of the 2nd measuring probe distance H2；
3rd, film thickness d, i.e. d=H- (H1+H2) are determined by above-mentioned measured value twice.
The self-alignment apparatus for measuring thickness of thin film of common light path of palarization multiplexing provided by the invention, there is high accuracy, self-correcting
It is accurate, the identification of feature white light interference peak is simple, can trace to the source, the features such as dynamic range is big.Due to detecting the polarization characteristic of light, can be used for
High-precision measurement is carried out to transparent and opaque film thickness in film production and application.
The present invention provides a kind of self-alignment apparatus for measuring thickness of thin film of common light path of palarization multiplexing, realizes film thickness
Non-cpntact measurement.Firstly, since two measuring probes can realize the transmission and reflection of incident light simultaneously, for measuring probe it
Between absolute distance H realize direct measurement；Then film to be measured is inserted among two measuring probes, obtains two measuring probes respectively
Absolute distance H1 and H2 between film front and rear surfaces to be measured；Therefore thickness d=H- (H1+H2) of film to be measured.This hair
The bright polarised light for producing different polarization states from analyzer by the polarizer carries out parameter measurement between different probes, makes feature white
The identification at interference of light peak is simpler；Two probe return lights share same demodulated interferential device, efficiently avoid external environment
Influenceed caused by change；Light path is improved absolute measurement precision, is realized further opening up for dynamic range using double-light-source structured
Exhibition, the unstable caused error of mechanical system in measurement process is overcome, improve the stability of measurement；By being visited to measurement
The optimization design of end surface light reflectance and transmissivity, realize that realization can be achieved to transparent without calibration sample in measurement
Film and the thickness of opaque film carry out high-acruracy survey.
Compared with prior art, the beneficial effects of the present invention are：
(1) measuring probe of the present invention can realize the transmission and reflection of incident light simultaneously, can be directly realized by measuring system
Self calibration, make it when measuring, directly the thickness of film to be measured can be measured without standard sample.
(2) present invention proposes thick based on the two waveband optical fiber optical interferometry film of wide spectrum light source and arrowband Frequency Stabilized Lasers
The method of degree, on the premise of film absolute thickness high-acruracy survey is ensured, the extension of its measurement dynamic range is realized, is overcome
Error caused by mechanical instability in measurement process, the absolute precision of measurement and the stability of test are improved, and ensured
Film Optics test can be achieved to trace to the source.
(3) present invention uses polarization multiplexing, and the polarised light of different polarization states is used between different measuring probes
Simpler, demodulating algorithm can be identified to the thickness measure of transparent membrane and opaque film, white light interference characteristic peak by realizing
Further simplify.
Brief description of the drawings
Fig. 1 is a kind of common light path self calibration film thickness measurement device schematic diagram of palarization multiplexing.
Fig. 2 is measuring probe inside modules index path when not loading film to be measured.
Fig. 3 is measuring probe inside modules index path when loading film to be measured.
Fig. 4 is index path inside demodulated interferential instrument.
Fig. 5 is that laser interference signal is traced to the source principle schematic.
Fig. 6 is the distance measurement method schematic diagram based on white light interference theory when not loading film to be measured.
Embodiment
The common light path self calibration film thickness measurement device of the palarization multiplexing of the present invention, visited by light source output module 1, film thickness measuring
Head module 6, demodulated interferential instrument module 7, polarization beam splitting module 8 and collection form with five parts such as control modules 9.Each module group
Into being respectively：(1) light source output module 1 is by the isolator 102 of wide spectrum light source the 101, the 1st, arrowband Frequency Stabilized Lasers light source the 103, the 2nd
The wavelength division multiplexer 105 of isolator the 104, the 1st is formed；(2) film thickness measuring probe module 6 is by the 1st measuring probe 601 and the 2nd
Measuring probe 602 is formed；(3) demodulated interferential instrument module 7 polarization-maintaining GRIN Lens 702, may move by polarization-maintaining coupler 701
One side speculum 703 and position scanning means 704 are formed；(4) polarization beam splitting module 8 is coupled by the 2nd coupler the 801, the 3rd
Device 802 and polarization splitting prism 803 are formed；(5) collection with control module 9 by computer 901, data collecting card 902, the
The photodetector 904 of 1 photodetector the 903, the 2nd, the 3rd photodetector 905 and the 4th photodetector 906 are formed.
The output light of light source output module 1 is input in polarization-maintaining coupler 3 via 45 ° of polarizers 2；Polarization-maintaining coupler 3 will
Incident light is divided into the 1st measuring probe that two-way enters film thickness measuring probe module 6 by 0 ° of analyzer 4 and 90 ° of analyzers 5 respectively
The measurement of relevant parameter is carried out in 601 and the 2nd measuring probe 602；Via the 1st measuring probe 601 and the 2nd measuring probe 602
Return light is input in demodulated interferential instrument module 7；It is real by the scanning of the position scanning means 704 in demodulated interferential instrument module 7
The matching of existing light path.The interference signal for completing light path matching is input in polarization beam splitting module 8 and realizes different polarization states, difference
The separation of wavelength-interferometric light；Interference signal after separation carries out the calculating of relevant parameter by gathering with collection in control module 9.
Wide spectrum light source 101 in light source output module 1 is connected with the 1st isolator 102, arrowband Frequency Stabilized Lasers light source 103
It is connected with the 2nd isolator 104.1st isolator 102 and the 2nd isolator 104 respectively with the input of the 1st wavelength division multiplexer 105
1a, 1b are connected.Half spectral width of wide spectrum light source 101 is more than 45nm, and fiber power is more than 2mW；Arrowband Frequency Stabilized Lasers light source 103
Half spectral width be less than 1pm, fiber power is more than 2mW.Wide spectrum light source 101 has different from arrowband Frequency Stabilized Lasers light source 103
Centre wavelength, and the frequency spectrum of the two does not have overlapping part in half spectral width.
The 1st measuring probe 601 and the 2nd measuring probe 602 in film thickness measuring probe module 6 can be realized to transmission simultaneously
The transmission and reflection of light, the reflectivity of transmission ray is between 20%~80%.1st measuring probe 601 and the 2nd measuring probe
602 can work in the fast axle and slow axis of polarization maintaining optical fibre.The emergent ray of 1st measuring probe 601 and the 2nd measuring probe 602 is mutual
Coincide；When device under test 603 places measurement, the emergent ray with the 1st measuring probe 601 and the 2nd measuring probe 602 hangs down respectively
Directly.1st measuring probe 601 is connected with the output end of 0 ° of analyzer 4, the 2nd measuring probe 602 and 90 ° of output end phases of analyzer 5
Connection.
In demodulated interferential instrument module 7 feature of polarization-maintaining GRIN Lens 702 be that by polarization maintaining optical fibre fast axle and
Slow axis can work；Inner surface reflection and transmission can be realized simultaneously, and the light reflectance of camera lens is between 20%~80%.By
The light that 1st measuring probe 601 and the 2nd test probe 602 are collected is input to polarization-maintaining by the output end 3b of polarization-maintaining coupler 3 respectively
In the input 7b of coupler 701, the 7c output ends of polarization-maintaining coupler 701 are connected with polarization-maintaining GRIN Lens 702, polarization-maintaining coupling
The 7a output ends of device 701 are connected with the input of polarization splitting prism 803.Polarization-maintaining GRIN Lens 702, removable one side are anti-
Penetrate the reconciliation cadre enrolled among workers's interferometer of mirror 703 coupler 701 and collectively constitute demodulated interferential instrument.The scanning range of the table top of position scanning means 704
When L disclosure satisfy that film thickness measuring probe module is not inserted into film 603 to be measured, demodulated interferential instrument can be realized by different probe lens
The light path matching of outer surface reflected light.
In polarization beam splitting module 8 the output end 8e and 8f of polarization splitting prism 803 respectively with the 2nd wavelength division multiplexer 801 and
The input of 3rd wavelength division multiplexer 802 is connected.
Collection is connected with the 1st photodetector 903 in control module 9 with the 8a output ends of the 2nd wavelength division multiplexer 801；2nd
Photodetector 904 is connected with the 8b output ends of the 2nd wavelength division multiplexer 801；3rd photodetector 905 and the 3rd wavelength division multiplexer
802 8c output ends connection；4th photodetector 906 is connected with the 8d output ends of the 3rd wavelength division multiplexer 802.Photodetector
The signal collected is conveyed to computer 901 by data collecting card 902, computer 901 is responsible for position scanning means simultaneously
704 driving is scanned with completing light path.
In light path connect optical fiber requirement be：The output end tail optical fiber of wide spectrum light source 101, arrowband Frequency Stabilized Lasers light source the 103, the 1st
Each port tail optical fiber of isolator 102,104 port tail optical fibers of the 2nd isolator, 105 each port tail optical fiber of the 1st wavelength division multiplexer are single mode
Optical fiber；45 ° of output end tail optical fibers of the polarizer 2, each port tail optical fiber of polarization-maintaining coupler 3,0 ° of input/output terminal tail optical fiber of analyzer 4,90 °
The input/output terminal tail optical fiber of analyzer 5, the tail optical fiber of the 1st measuring probe 601, the tail optical fiber of the 2nd measuring probe 602, polarization-maintaining coupler 701 are respectively held
Mouth tail optical fiber, the tail optical fiber of polarization-maintaining GRIN Lens 702, each port tail optical fiber of polarization splitting prism 803,801 each port of the 2nd wavelength division multiplexer
Tail optical fiber, the tail optical fiber of 802 the 1st photodetector of each port tail optical fiber of the 3rd wavelength division multiplexer 903, the tail optical fiber of the 2nd photodetector 904, the 3rd
The tail optical fiber of photodetector 905, the tail optical fiber of the 6th photodetector 906 are polarization maintaining optical fibre.
Optical interferometry method is current accuracy highest distance measurement method, but due to LASER Light Source coherence length
Longer, laser interference measuring method can only realize the high-acruracy survey of relative variation, can not realize the measurement of absolute magnitude.White light
Interferometric method uses the wide spectrum light source of Low coherence.It is defeated after interference because the coherence length of low-coherence light source is very small
The shape of the interference fringe gone out is the pure oscillation modulated by Gaussian envelope, and the striped has a principal maximum, and it is corresponding
The position that interferometer two-arm optical path difference is zero.Due to the rigors to interferometer two-arm optical path difference, the position of center striped
Just a high-quality reference position is provided for the measurement of physical quantity.Therefore, to physical quantity in white light interferometric system
Measurement is converted to measure the change in location of the center striped of interference signal.The present invention uses the design of double light sources, such as
Shown in Fig. 5, during position scanning means scans, while white light interference signal and laser interference signal are recorded, by right
The reading of laser interference signal striped number, high-precision calibrating can be carried out to the mobile actual range of position scanning means.
As shown in Fig. 2 during being not inserted into film 603 to be measured, the 1st measuring probe 601 returns to the spacing of popping one's head in of photo measure two and is
Example illustrates distance measurement method used in the present invention：
The internal reflected light 611 of 1st measuring probe 601 and the outer surface reflected light 612 of the 2nd measuring probe 602 are by the 1st solution cadre enrolled among workers
Interferometer coupler is divided into two-way：Enter all the way in the 1st GRIN Lens 602, produce 611 ' and 612 ' reflected lights；Enter all the way
In 1 faraday's speculum 603,611 " and 612 " reflected lights are produced.Under the control of computer 901, the band of position scanning means 704
Dynamic removable one side speculum 703 carries out light path scanning, as shown in fig. 6, process caused by white light interference signal is：
(1) when two-arm optical path difference is equal to H, light 611 ' matches with light 612 " in fixed arm in scan arm, then produces
1st secondary maximum white light interference signal 631.
(2) when two-arm optical path difference is equal to 0, in scan arm and fixed arm, light 611 ' and light 611 ", light 612 ' and light
612 " match, then produce primary maximum white light interference signal 632.
(3) when two-arm optical path difference is equal to-H, light 612 ' matches with light 612 " in fixed arm in scan arm, then produces
2nd secondary maximum white light interference signal 633.
(4) carry out Hilbert transform by dialogue optical interference signals and realize that primary maximum and the position of secondary maximum envelope carry
Take, obtain the scanning distance absolute difference between primary maximum and secondary maximum using the characteristic of tracing to the source of laser interference signal, the value is then
Represent the absolute distance between the 1st measuring probe 601 and the 2nd measuring probe 602.
Film thickness measuring method based on above white light interferometry method is：
(1) when being not inserted into film 603 to be measured, driving light path position scanning means 704 carries out light path scanning, makes the respectively
The internal reflected light 611 of 1 measuring probe 601 and the outer surface reflected light 612 of the 2nd measuring probe 602 carry out light path matching, the 2nd measurement
602 internal reflected lights 621 and the outer surface reflected light 622 of the 1st measuring probe 601 of popping one's head in carry out light path matching.Pass through collection and control
Molding block 9 is demodulated record to relevant parameter, obtains the absolute distance H between two measuring probes.
(2) film 603 to be measured is inserted among the 1st measuring probe 601 and the 2nd measuring probe 602, and disclosure satisfy that to be measured
Film 603 is vertical with the emergent ray of the 2nd measuring probe 602 with the 1st measuring probe 601.Drive light path position scanning means
704 carry out light path scanning, make respectively by the internal reflected light 613 of the 1st measuring probe 601 and film front surface 603a reflected lights to be measured
614 progress light path matchings, the internal reflected light 623 of the 2nd measuring probe 602 are carried out with surface 603b reflected lights 624 after film to be measured
Light path matches.Record is demodulated to relevant parameter with control module 9 by collection, obtains two measuring probes and film two respectively
Absolute distance H1 and H2 between individual surface.
(3) film thickness d can be determined by above-mentioned measured value twice, i.e. d=H- (H1+H2).
Illustrate below and the present invention is described in more detail.
The present invention is completed to film thickness high-acruracy survey and the research traced to the source using the structure of the common light path of double light sources, overall
Technical scheme is as shown in Figure 1.Light source output module 1 by centre wavelength be 1310nm wide spectrum light source 101, wavelength 1550nm it is narrow
With the 1st isolator 102 that Frequency Stabilized Lasers light source 103, operation wavelength are 1310nm, the 2nd isolator that operation wavelength is 1550nm
104 and operation wavelength be that 1310nm and the wavelength division multiplexers 105 of 1550nm the 1st collectively constitute.Wherein, centre wavelength 1310nm
Wide spectrum light source 101 be used as measuring beam, be mainly used in realizing the absolute measurement of film thickness；Wavelength is that 1550nm arrowband is steady
Frequency laser light source 103 is mainly used in realizing tracing to the source for measured film thickness as light path correction light beam.1st isolator 102 and
2 isolators 104 enter the 1st wavelength division multiplexer 105 and synthesize a branch of guarantor after 45 ° of polarizers 2 into splitting ratio for 3dB
In inclined coupler 3, they are divided into two-way and enter film thickness measuring probe mould by 0 ° of analyzer 4 and 90 ° of analyzers 5 respectively
In block 6；1st measuring probe 601 and the lensed endface reflectivity of the 2nd measuring probe 602 and the ratio of transmissivity are 50:50；From the 1st
The measurement light that the measuring probe 602 of measuring probe 601 and the 2nd returns, then inputted respectively by 0 ° of analyzer 4 and 90 ° of analyzers 5
To splitting ratio be 3dB polarization-maintaining coupler 3 in, then by splitting ratio be 3dB polarization-maintaining coupler 3 be transported to demodulated interferential instrument module
In 7.Realize that light path matches by the scanning of the position scanning means 704 in demodulated interferential instrument module 7, the return light difference of two probes
It is to be interfered at 3dB polarization-maintaining couplers 701 in splitting ratio.Polarization-maintaining coupler 701 of the light by splitting ratio for 3dB after interference
In being transported to 803 in polarization splitting prism, the different polarization states light beam separation that different probe collections arrive is realized.By polarization spectro rib
It is 1310nm's that the output end of mirror 803 is connected with the 2nd wavelength division multiplexer 801 and the 3rd wavelength division multiplexer 802 by centre wavelength respectively
White light measuring beam and wavelength are that 1550nm laser-adjustings light beam is separated with by the 1st photodetector 903, the 2nd photodetector
904th, the 3rd photodetector 905, acquired in the 4th photodetector 906.The signal being collected into is passed through data by photodetector
Capture card 902, which is transferred in computer 901, is demodulated processing, and computer 901 is responsible for carrying out position scanning means 704 simultaneously
Driving.
When film 603 to be measured is not inserted into, the output light of light source output module 1 is split than the polarization-maintaining coupling for 3dB
The beam splitting of device 3, light enter the 1st measuring probe 601 and the 2nd measuring probe by 0 ° of analyzer 4 and 90 ° of analyzers 5 respectively
In 602.As shown in Fig. 2, by the 1st measuring probe 601 itself inner lens surfaces the reflected beams 611, the lens of the 2nd measuring probe 602
Outer surface the reflected beams 612 pass through 0 ° of analyzer 4；Surveyed by the 2nd measuring probe 402 itself intralens reflection light beam the 621, the 1st
The outer surface the reflected beams 622 of amount 601 lens of probe pass through 90 ° of analyzers 5.Above-mentioned light beam is transported to the guarantor that splitting ratio is 3dB
In inclined coupler 3, then it is transported in demodulated interferential instrument module 7 by the polarization-maintaining coupler 3 that splitting ratio is 3dB.Interferometric demodulation instrument mould
The light transmission of polarization-maintaining GRIN Lens 702 in block 7 and the ratio of light reflectivity are 50:50.Light beam is in demodulated interferential instrument module 7
Middle transmission means is：The return light of film thickness measuring probe module 4 is input to polarization-maintaining certainly by the polarization-maintaining coupler 7 that splitting ratio is 3dB
In condenser lens 702, light beam is respectively in the inner surface of polarization-maintaining GRIN Lens 702 and the removable surface of one side speculum 703 point
Do not reflect；Drive removable one side speculum 703 to move when position scanning means 704 carries out light path scanning, make
The complete matching of light path occurs respectively for the reflected light of two film thickness measuringes probe.Light after interference is transported to polarization splitting prism 803
The middle different polarization states light beam separation for arriving different probe collections, the interference light after polarization state separation is by the 2nd wavelength division multiplexer 801
It is by white light measuring beam and wavelength that the centre wavelength of two-way interference signal is 1310nm respectively with the 3rd wavelength division multiplexer 802
1550nm laser-adjustings light beam separates.White light interference will be formed on the 1st photodetector 903 and the 3rd photodetector 905
Striped, laser interferencefringes will be formed on the 2nd photodetector 904 and the 4th photodetector 906, by believing white light interference
Number demodulation can obtain absolute distance H between two measuring probes.
When film 603 to be measured inserts, the output light of light source output module 1 is split than dividing for 3dB polarization-maintaining coupler 3
Beam, light are entered in the 1st measuring probe 601 and the 2nd measuring probe 602 by 0 ° of analyzer 4 and 90 ° of analyzers 5 respectively.Such as
Shown in Fig. 3, the inner lens surfaces the reflected beams 613 of the 1st measuring probe 601, film front surface 603a the reflected beams 614 to be measured are passed through
0 ° of analyzer 4；By surface 603b the reflected beams 624 after the 2nd measuring probe 602 itself intralens reflection light beam 623, film to be measured
By 90 ° of analyzers 5.Above-mentioned light beam is transported in the polarization-maintaining coupler 3 that splitting ratio is 3dB, then the polarization-maintaining by splitting ratio for 3dB
Coupler 3 is transported in demodulated interferential instrument module 7.Light beam transmission means in demodulated interferential instrument module 7 is：It is by splitting ratio
The return light of film thickness measuring probe module 4 is input in polarization-maintaining GRIN Lens 702 by 3dB polarization-maintaining coupler 7, light beam difference
Reflected respectively in the inner surface of polarization-maintaining GRIN Lens 702 and the removable surface of one side speculum 703；When position is scanned
Removable one side speculum 703 is driven to move when device 704 carries out light path scanning, the reflected light for making two film thickness measuringes pop one's head in
The complete matching of light path occurs respectively.Light after interference is transported in polarization splitting prism 803 and arrives different probe collections not
Separated with polarizing beam, the interference light after polarization state separation is distinguished by the 2nd wavelength division multiplexer 801 and the 3rd wavelength division multiplexer 802
The white light measuring beam and wavelength that centre wavelength by two-way interference signal is 1310nm are 1550nm laser-adjustings light beam point
From.White-light fringe will be formed on the 1st photodetector 903 and the 3rd photodetector 905；2nd photodetector 904
Laser interferencefringes will be formed with the 4th photodetector 906, by the demodulation of dialogue optical interference signals, the 1st is obtained respectively and surveys
601 film front surface 603a to be measured of amount probe distance H1,602 film front surface 603b to be measured of the 2nd measuring probe distance
H2。
Therefore, film thickness is just determined by above-mentioned measured value twice, i.e. H- (H1+H2).
Claims (7)
1. a kind of common light path self calibration apparatus for measuring thickness of thin film of palarization multiplexing, including light source output module (1), film thickness measuring
Probe module (6), demodulated interferential instrument module (7), polarization beam splitting module (8) and collection and control module (9)；It is characterized in that：
The output light of light source output module (1) is input in polarization-maintaining coupler (3) via 45 ° of polarizers (2)；Polarization-maintaining coupler (3) will
Incident light is divided into the 1st survey that two-way enters film thickness measuring probe module (6) by 0 ° of analyzer (4) and 90 ° of analyzers (5) respectively
Measured in amount probe (601) and the 2nd measuring probe (602)；Via the 1st measuring probe (601) and the 2nd measuring probe
(602) return light is input in demodulated interferential instrument module (7)；Pass through the position scanning means in demodulated interferential instrument module (7)
(704) matching of light path is realized in scanning；The interference signal for matching light path is input in polarization beam splitting module (8) and realizes difference
The separation of polarization state, different wave length interference light；Interference signal after separation is related to collection progress in control module (9) by collection
The calculating of parameter.
2. the common light path self calibration apparatus for measuring thickness of thin film of palarization multiplexing according to claim 1, it is characterized in that：It is described
Light source output module (1) is by wide spectrum light source (101), the 1st isolator (102), arrowband Frequency Stabilized Lasers light source (103), the 2nd isolator
(104) and the 1st wavelength division multiplexer (105) is formed, and wide spectrum light source (101) is connected with the 1st isolator (102), and arrowband is steady
Frequency laser light source (103) is connected with the 2nd isolator (104) input, and the 1st isolator (102) and the 2nd isolator (104) are defeated
Go out end respectively with the input (1a) of the 1st wavelength division multiplexer (105) the 1st, the 2nd input (1b) to be connected.
3. the common light path self calibration apparatus for measuring thickness of thin film of palarization multiplexing according to claim 2, it is characterized in that：It is described
Light source output module (1) in the feature of each light source be：Half spectral width of wide spectrum light source (101) is more than 45nm, and fiber power is big
In 2mW；Half spectral width of arrowband Frequency Stabilized Lasers light source (103) is less than 1pm, and fiber power is more than 2mW；Wide spectrum light source (101) with
Arrowband Frequency Stabilized Lasers light source (103) has different centre wavelength, and the frequency spectrum of the two does not have overlapping portion in half spectral width
Point.
4. a kind of common light path self calibration apparatus for measuring thickness of thin film of palarization multiplexing according to claim 1, it is characterized in that：
The film thickness measuring probe (6) is made up of the 1st measuring probe (601) and the 2nd measuring probe (602)；1st measuring probe
(601) transmission and reflection to transmission ray can be realized simultaneously with the 2nd measuring probe (602)；1st measuring probe (601) with
2nd measuring probe (602) can work in the fast axle and slow axis of polarization maintaining optical fibre；1st measuring probe (601) and the 2nd measuring probe
(602) emergent ray mutually coincides；When device under test (603) places measurement, surveyed respectively with the 1st measuring probe (601) and the 2nd
The emergent ray of amount probe (602) is vertical；1st measuring probe (601) is connected with the output end of 0 ° of analyzer (4), the 2nd measurement
Probe (602) is connected with 90 ° of analyzer (5) output ends.
5. the common light path self calibration apparatus for measuring thickness of thin film of palarization multiplexing according to claim 1, it is characterized in that：It is described
Demodulated interferential instrument module (7) is by polarization-maintaining coupler (701), polarization-maintaining GRIN Lens (702), removable one side speculum (703)
And position scanning means (704) is formed, polarization-maintaining GRIN Lens (702) can work in the fast axle and slow axis of polarization maintaining optical fibre
Make, reflection and transmission, the light reflectance of camera lens can be realized simultaneously between 20%~80%, by the 1st measuring probe (601)
The light collected with the 2nd test probe (602) is input to polarization-maintaining by the 2nd output end (3b) of polarization-maintaining coupler (3) respectively and coupled
In the input (7b) of device (701) the 2nd, the 3rd output end (7c) and the polarization-maintaining GRIN Lens (702) of polarization-maintaining coupler (701) connect
Connect, the 1st output end (7a) of polarization-maintaining coupler (701) is connected with the input of polarization splitting prism (803)；Polarization-maintaining self-focusing is saturating
Mirror (702), removable one side speculum (703) conciliate cadre enrolled among workers's interferometer coupler (701) and collectively constitute demodulated interferential instrument.
6. the common light path self calibration apparatus for measuring thickness of thin film of the palarization multiplexing according to claim 1-5 any one, its
It is characterized in that optical fiber is connected in light path to be characterized in：Wide spectrum light source (101) output end tail optical fiber, arrowband Frequency Stabilized Lasers light source (103),
Each port tail optical fiber of 1 isolator (102), each port tail optical fiber of the 2nd isolator (104), the 1st wavelength division multiplexer (105), 45 ° of polarizers
(2) each port tail optical fiber of input tail optical fiber is single-mode fiber；The 45 ° of polarizer (2) output end tail optical fibers, polarization-maintaining coupler (3) are respectively held
Mouth tail optical fiber, 0 ° of analyzer (4) input/output terminal tail optical fiber, 90 ° of analyzer (5) input/output terminal tail optical fibers, the 1st measuring probes (601)
Tail optical fiber, the 2nd measuring probe (602) tail optical fiber, each port tail optical fiber of polarization-maintaining coupler (701), polarization-maintaining GRIN Lens (702) tail optical fiber,
Each port tail optical fiber of polarization splitting prism (803), each port tail optical fiber of the 2nd wavelength division multiplexer (801), the 3rd wavelength division multiplexer (802) are each
Port tail optical fiber the 1st photodetector (903) tail optical fiber, the 2nd photodetector (904) tail optical fiber, the 3rd photodetector (905) tail optical fiber,
6th photodetector (906) tail optical fiber is polarization maintaining optical fibre.
A kind of 7. film of the common light path self calibration apparatus for measuring thickness of thin film based on palarization multiplexing according to claim 1
Method for measuring thickness, it is characterized in that：
(1), when being not inserted into film to be measured (603), driving light path position scanning means (704) carries out light path scanning, makes the 1st survey
Amount probe (601) internal reflected light (611) carries out light path matching, the 2nd with the 2nd measuring probe (602) outer surface reflected light (612)
Measuring probe (602) internal reflected light (621) carries out light path matching with the 1st measuring probe (601) outer surface reflected light (622)；
Absolute distance H between two measuring probes is obtained to being demodulated record with control module (9) by collection；
(2), film to be measured (603) is inserted among the 1st measuring probe (601) and the 2nd measuring probe (602), film to be measured
(603) it is vertical with the emergent ray of the 2nd measuring probe (602) with the 1st measuring probe (601)；Drive light path position scanning means
(704) light path scanning is carried out, is made anti-by the 1st measuring probe (601) internal reflected light (613) and film front surface to be measured (603a)
It is anti-to penetrate the matching of light (614) progress light path, the 2nd measuring probe (602) internal reflected light (623) and surface (603b) after film to be measured
Penetrate light (624) and carry out light path matching；Record is demodulated to relevant parameter with control module (9) by collection, obtains the 1st respectively
The distance H1 of measuring probe (601) film front surface to be measured (603a), the 2nd measuring probe (602) film front surface to be measured
The distance H2 of (603b)；
(3) film thickness d, i.e. d=H- (H1+H2), are determined by above-mentioned measured value twice.
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| CN111964580A (en) * | 2020-07-30 | 2020-11-20 | 广东工业大学 | Device and method for detecting position and angle of film based on optical lever |
| CN111854654A (en) * | 2020-08-19 | 2020-10-30 | 长安大学 | Method for monitoring lake ice thickness based on satellite height measurement echo waveform |
| CN112082492A (en) * | 2020-09-04 | 2020-12-15 | 哈尔滨工程大学 | Device and method for simultaneously measuring thickness and refractive index of film with angle monitoring function |
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