CN107084659A - A kind of high temperature follows the differential variable frequency AM electric vortex displacement sensor of grading compensation certainly - Google Patents
A kind of high temperature follows the differential variable frequency AM electric vortex displacement sensor of grading compensation certainly Download PDFInfo
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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Abstract
The invention discloses a kind of high temperature from the differential variable frequency AM electric vortex displacement sensor for following grading compensation, belong to eddy current displacement sensor field, the sensor main will be made up of probe, temperature sense stage circuit and the part of signal processing circuit three.Probe is mainly made up of coil, high-temp glue and backbone of ceramic coil, processes temperature signal circuit is mainly made up of oscillating circuit, detecting circuit, wave filter, three-level linear compensating circuit and differential circuit, and temperature sensor signal stage circuit is mainly made up of thermistor, FPGA and analog switching circuit.By the temperature drift situation for gathering the eddy current displacement sensor single channel in the case of not compensating, the fitting resistance proportioning of the multistage temperature drift compensation circuit of design, by the different grades of temperature drift compensation circuit of FPGA control selections, final signal is exported after then floating error when the opposite two-way of the measured object direction of motion makees differential elimination.Inventive sensor is mainly applied in high temperature magnetic suspension bearing.
Description
Technical field
The invention belongs to eddy current displacement sensor field, be related to a kind of high temperature eddy current displacement sensor detection circuit and
Its temperature drift compensation method, enables the temperature drift phenomenon produced according to different temperatures, the method compensated by classificationization it is automatic with
Compensated with temperature classification, then again by the secondary elimination error of the differential method of two-way, realize high precisely high temperature measurement.
Background technology
Eddy current displacement sensor is surveyed as the fast displacement of a kind of noncontact, big measurement range, high resolution, reaction speed
Amount mode is widely used.Common current vortex circuit is mainly made up of probe and signal processing circuit two parts.Wherein
Probe is mainly made up of enamel wire coil and coil rack, and processes temperature signal circuit is mainly by oscillating circuit, detection electricity
Road and filter circuit composition.
In high temperature environments, by the impedance that common eddy current displacement sensor its probe coil is carried can be with temperature
The change of degree and change, and then cause output result to change, that is, occur in that temperature drift phenomenon, as shown in Figure 6；At the same time, object
Thermal conductivity factor it is different, can produce different temperature rise results in the identical time, there is measured object temperature and environment in space
Temperature hysteresis between temperature, causes to produce measurement error under same environment temperature during measurement, phenomenon is floated when referred to as,
As shown in Figure 7.This will cause that measurement distortion can be directly resulted under measurement accuracy step-down, hot environment.Although can be by using
Two-way displacement transducer in testee opposite direction does differential method and eliminates temperature drift, but is due to that the coil of inductance is twined
Around the difference of the factors such as mode, it may appear that the different phenomenon of impedance variations under identical temperature rise environment, and then have influence on two-way inspection
The differential result of slowdown monitoring circuit, influences the accuracy value of output.
Eddy current displacement sensor is divided into three types, i.e. fixed-frequency AM, becomes frequency AM and frequency modulation type.Different sides
Formula has different amount of resonance.Mainly there are three kinds of modes for the compensation method of temperature drift.The first, by sensor probe line
Circle increase compensation tache, and then suppress influence of the temperature drift to coil impedance；Second, by adding special material outside probe,
Reduce influence of the high temperature to sensor probe electric parameter；The third, by increasing corresponding compensation in signal processing circuit
Compensation of the circuit realiration to temperature drift.
The present invention and patent CN200710077238.3, patent CN201520168073.1 are realized under hot environment
Displacement measurement, distinguishes with it and is that the present invention uses FMAM formula circuit, wherein oscillating circuit selects LC frequency-selective networks, sensing
Device inductance L produces modulated signal and carrier signal, and circuit theory is relatively more complicated, and measurement accuracy also can be higher, and patent
CN200710077238.3 inductance L only produces the displacement information of adjustment signal, and can not eliminate and cause because of thermal conductivity factor difference " when
The phenomenon of drift error "；Patent CN200710077238.3 is realized to the close loop maneuver in temperature using thermistor, is only capable of disappearing
Except the temperature drift phenomenon under stable state, but " when float error " can not be eliminated, and the present invention not only devises temperature closed loop benefit
Repay, while devising two-way measurement signal does differential mode, can eliminate " when float phenomenon ".
At present in the market, the measurement range of product does not have between -30 DEG C -175 DEG C, suitable in 350 DEG C of rings of high temperature
The displacement measurement sensor shaped article in border.
The content of the invention
, can be in height it is an object of the invention to provide a kind of design of high temperature non-contact type eddy current displacement sensor
Worked in the environment of 350 DEG C of temperature.
The technical solution adopted by the present invention is：A kind of high temperature follows the differential variable frequency AM electric vortex position of grading compensation certainly
Displacement sensor, is mainly made up of probe, temperature sense stage circuit and the part of signal processing circuit three, wherein probe mainly by
High temperature enamel wire coil, high-temp glue and backbone of ceramic coil composition, processes temperature signal circuit is mainly by oscillating circuit, detection
Circuit, wave filter, three-level linear compensating circuit and two paths of signals differential circuit composition, temperature sensor signal stage circuit are main
It is made up of thermistor, FPGA and analog switching circuit, wherein oscillating circuit is responsible for the generation of carrier signal, using frequency conversion amplitude modulation
Circuit, from LC oscillation networks, inductance L is responsible for being responsible for carrying modulated signal while energy oscillation, and modulated signal, which is included in, to be carried
In the peak signal of ripple signal；Detecting circuit is responsible for obtaining the peak signal for the carrier signal that oscillating circuit is produced, by diode
With electric capacity composition；Three-level linear compensation circuit is responsible for selecting different compensation circuits according to different temperature, by FPGA and simulation
Switch realizes temperature drift phenomenon caused by compensation probe coil；When signal after temperature-compensating passes through differential circuit to balance out
Float measurement error caused by phenomenon.
Wherein, during detection, probe inductance L can change with displacement, by oscillating circuit, peak-detector circuit, divide
Level compensation circuit, automatically select grading compensation circuit and differential circuit based on FPGA are realized.
Wherein, the design philosophy of grading compensation is employed, its specific implementation process is as follows：
First, the temperature drift situation of the eddy current displacement sensor single channel in the case of without overcompensation, i.e. sensor are collected
Displacement-voltage response；Then, control thermistor Pt100 temperature-resistance table, design temperature Acquisition Circuit, and root
According to temperature drift situation slope calculations deviation under different temperatures and amplitude change of error situation, different resistance proportionings, fitting heat are designed
Quick resistance variations situation compensation slope deviation, the situation of change of amplitude deviation, the multistage temperature drift compensation circuit of design；Finally, according to
The information that thermistor in sensor probe environment is collected, FPGA control analog switching circuit selections are different grades of
Temperature drift compensation circuit, and then realize the automatic classification compensation of sensor.
Wherein, the method that differential type eliminates error is employed, will be adopted in the measured object direction of motion in two opposite directions
The displacement information collected makes the difference, and can realize drift interference when in two sensor circuits of elimination.
Wherein, thermistor is introduced in slope adjustment and the amplitude regulation compensated in every one-level, its compensation circuit is allowed to and exists
Can be more flexible during temperature change compensation its displacement-voltage change.
Wherein, probe is formed using ceramics forging, is resistant to 1000 DEG C of high temperature；Its enamel-covered wire is used as insulation using polyimides
Material, line width 0.09mm, coil is outer by high-temp glue hydropexis, from TX500 high-temp glues, prevents polyimides in high temperature environments
Brittle phenomenon cause insulating properties to be deteriorated；Coaxial cable, as insulating materials, is used as the probe in connection hot environment from F46
With the signal processing circuit in normal temperature environment, fixed with the connection of coaxial cable by high temperature scolding tin at probe.
The principle of the present invention is：A kind of high temperature follows the differential variable frequency AM electric vortex displacement of grading compensation to sense certainly
Device, is mainly made up of probe, temperature sense diversity module and the part of signal processing circuit three, wherein probe is mainly by high temperature lacquer
Envelope curve coil, high-temp glue and backbone of ceramic coil composition, processes temperature signal circuit mainly by oscillating circuit, detecting circuit,
Wave filter, three-level linear compensating circuit and two paths of signals differential circuit composition, temperature sensor signal diversity module mainly have heat
Quick resistance, FPGA and analog switching circuit composition, including：
A. the design center line ring framework Ceramics material popped one's head in is made, and enamel-covered wire selects high temperature enamel-covered wire, and enamel-covered wire is adopted
With polyimides as insulating materials, line width 0.09mm, coil is outer by high-temp glue hydropexis, from TX500 high-temp glues；
B. the signal processing circuit of sensor includes three road modulation circuits, tuningout circuit and anti-phase adder circuit.With
Exemplified by one-level, modulation circuit mainly has resistance R9 and thermistor Res_Sensor1.1Composition series connection bleeder circuit, through transport and placing device
After the voltage follower that UAP3A is designed to and by R16, R20, R22, R23 and thermistor Res_Sensor1.2The tuningout circuit of composition
Anti-phase addition and generate final output signal.
C. signal diversity module include thermistor, FPGA and ISL43640IR analog switches, wherein thermistor with
FPGA is all external, is shown not in circuit diagram.By the use of thermistor as environment temperature sensor, its temperature information gathered leads to
Cross analog to digital (AD) module and send FPGA to, FPGA is obtained after temperature by controlling analog switching circuit to realize to circuit
Cut-off, and then realize the classification temperature drift compensation at different temperatures that signal is collected to sensor；
D. compensation circuit, its compensation circuit is made up of the similar circuit of three-level, again main by see-saw circuit per one-level
Tune slope circuit and tuningout the circuit composition of composition, as shown in figure 9, amplitude change decays to exponential decay, exponential type is declined
Three sections of linearisations of deduction, i.e., 30 DEG C~150 DEG C, 150 DEG C~250 DEG C, 250 DEG C~350 DEG C three sections of compensation circuits compositions, by FPGA
Compensation circuit is automatically selected according to different temperature；
E. differential method probe positions：Probe A and probe B in same level, measured object can probe A and probe B it
Between move, probe A and probe B measure the position of measured object simultaneously；
F. differential circuit：Detection circuit where probe A road and probe B road is in the case where detecting same shift length by manually marking
Fixed mode all nominal voltage scopes are [x, y] (x>Y), above-mentioned d description is passed through, it may be determined that the same object of measurement is passing through
Range of results after differential is [x-y, y-x].In experiment calibration value be [2V, 4V], two paths of signals do it is differential after result be
[- 2V ,+2V], using 5V boost module, testing result is boosted as the linear detection range of [3V, 7V].
G. the FPGA programmed logics designed：By thermal resistance collection temperature information, then FPGA is adopted according to different resistance
Take and different circuit networks is selected after different actions, realize the grading compensation of circuit.
The present invention uses change frequency AM detection circuit, compared with prior art, with following prominent characteristics and skill
Art progress：The sensor can be operated in the range of 30 DEG C -350 DEG C and realize displacement measurement, when being compensated to temperature drift phenomenon, carry
Go out a kind of brand-new method and carried out temperature drift compensation --- it is used as temperature sensor detection temperature and compensation electricity by the use of thermistor
Sense resistance in road, the linear compensation of Three Estate is designed according to different temperatures accordingly, while adding using in compensation tache
Plus thermistor realize under identical temperature grade, follow linear compensation certainly in small temperature range, finally by be detected
The two-way testing result in thing reverse motions direction does differential realization more accurately displacement measurement, reaches reduction measurement to greatest extent
The effect of error, so as to make the sensor be applied in high temperature magnetic suspension bearing.
Brief description of the drawings
Fig. 1 is the sonde configuration figure of inventive sensor, wherein, the 1 probe bobbin being made for ceramics, 2 be high temperature
Enamel-covered wire, 3 be probe nut bearing；
Fig. 2 is the structured flowchart of inventive sensor；
Fig. 3 is the circuit diagram of inventive sensor；
Fig. 4 is structural representation of the present invention using differential method, wherein, 4 be sensor probe A, and 5 be sensor probe B,
6 be testee；
Fig. 5 is FPGA programming Control logic charts of the invention；
Fig. 6 is the temperature drift phenomenon figure before inventive sensor is not compensated；
Fig. 7 is the when drift phenomenon figure before inventive sensor is not compensated；
Fig. 8 is the temperature drift change of slope of inventive sensor；
Fig. 9 is the temperature drift changes in amplitude rate of inventive sensor.
Embodiment
Refer to shown in accompanying drawing, by taking A roads as an example (wherein A roads are identical with B roads circuit implementation), to present invention work
Further description.
The invention provides a kind of high temperature, oneself follows the differential variable frequency AM electric vortex displacement sensor of grading compensation, its
Probe segment is as shown in figure 1, mainly include bobbin, high temperature enamel-covered wire.Wherein high temperature enamel-covered wire uses polyimides conduct
Insulating materials, can tolerate 350 DEG C, coil is outer by high-temp glue hydropexis, from TX500 high-temp glues.Coaxial cable selects F46 conducts
Outer layer insulation material, is fixed and probe coil junction by high temperature scolding tin.
Working sensor process as shown in Figures 2 and 3, is shaken by producing sine wave by oscillating circuit (part (1) in Fig. 3)
Signal is swung, its frequency is relevant with the inductance L of sensor probe with amplitude.By adjusting slide rheostat RAdj1 in circuit diagram, shake
Swing sinusoidal wave function amplitude for 12V, frequency of oscillation is 1.4MHz, after pass through envelope detection circuit in Fig. 3 in part (2), it is real
Existing sinusoidal wave function peak detection, realizes the extraction of position signalling.
The present invention realizes automatic to circuit hierarchy benefit by using thermistor, FPGA controller, analog circuit selector
Repay.As shown in part (3) in Fig. 3, using high sensitivity potentiometer, thermistor Pt100 output voltage is adjusted to FPGA
Analog-to-digital conversion module it is acceptable within the scope of, be then connected to FPGA by JT mouthfuls, FPGA according to gained temperature, via
Electricity in the suitable compensation circuit of procedure selection of logic control flow process figure shown in Fig. 5, control analog switch ISL43640IR
Road is cut-off, and realizes the selection according to different circuits to compensation circuit.
Compensation circuit provided by the present invention must know that not compensated lower sensor is caused in high temperature environments
After experimental bias data, corresponding three-level compensation circuit can be just configured.
According to substantial amounts of experimental result, to data analysis, after temperature influences on measurement result, part (4) institute in figure 3
Corresponding circuit is configured in the circuit shown.By taking compensation circuit a as an example (compensation circuit a, b, c, d is similar), compensation electricity of the invention
Road formula is：
Wherein, Res_Sensor1.1And Res_Sensor1.2For thermistor, R9, R20, R22, R23 are all slide rheostat, above formula
In, x is the magnitude of voltage after peak detection, and the compensation after above formula can realize that the compensation to magnitude of voltage, i.e. V are output electricity
Pressure.
Because the probe of sensor can have differences in wound around coil, the temperature drift of different coils is different under hot environment,
There is certain deviation after the two-way testing result in the case of not compensating is differential.Therefore, in A, B two-way after above-mentioned compensation
Testing result carries out differentialization again, can offset and go the middle when drift error and identical disturbance factor, i.e. V existedA-VBResult
Error can be smaller.
The circuit diagram of differential circuit as shown in part (5) in Fig. 3, it is defeated that wherein two-way LM117T changes are pressed in the port of transport and placing device 5
Pull-up 5V voltages before entering, realize that voltage is drawn just, differential circuit result of the present invention are mentioned in content of the invention f and is set to -2V~2V,
Pull up after 5V, voltage is using 3V~7V voltages as output.
As shown in figure 4, shown in the detection structure chart of differential method, A, B probe are in same level position, A, B probe winding side
Formula is identical, it is desirable to which A roads B roads two-way is under same detection range, and output voltage is identical after being compensated under 30 DEG C~350 DEG C environment.
It may be noted that because A alignment detection circuits are consistent with B alignment detection circuits, Fig. 3 circuit diagrams have only drawn A roads
Circuit diagram and differential circuit figure are detected, but the scheme of its B circuit all should be in technical solution of the present invention protection domain.
Claims (6)
1. a kind of high temperature follows the differential variable frequency AM electric vortex displacement sensor of grading compensation certainly, it is characterised in that：Mainly
It is made up of probe, temperature sense stage circuit and the part of signal processing circuit three, wherein probe is mainly by high temperature enamel-covered wire line
Circle, high-temp glue and backbone of ceramic coil composition, processes temperature signal circuit mainly by oscillating circuit, detecting circuit, wave filter,
Three-level linear compensating circuit and two paths of signals differential circuit composition, temperature sensor signal stage circuit mainly have thermistor,
FPGA and analog switching circuit composition, wherein oscillating circuit is responsible for the generation of carrier signal, and from LC oscillation networks, inductance L is born
It is responsible for carrying modulated signal while duty energy oscillation, modulated signal is included in the peak signal of carrier signal；Detecting circuit
It is responsible for obtaining the peak signal for the carrier signal that oscillating circuit is produced, is made up of diode and electric capacity；Three-level linear compensation circuit
It is responsible for selecting different compensation circuits according to different temperature, the temperature as caused by FPGA and analog switch realize compensation probe coil
Float phenomenon；Measurement error caused by drift phenomenon when signal after temperature-compensating passes through differential circuit to balance out.
2. high temperature according to claim 1 is from the differential variable frequency AM electric vortex displacement sensor for following grading compensation,
It is characterized in that：During detection, probe inductance L can change with displacement, pass through oscillating circuit, peak-detector circuit, classification
Compensation circuit, automatically select grading compensation circuit and differential circuit based on FPGA are realized.
3. high temperature according to claim 2 is from the differential variable frequency AM electric vortex displacement sensor for following grading compensation,
It is characterized in that：The design philosophy of grading compensation is employed, its specific implementation process is as follows：
First, the position of the temperature drift situation, i.e. sensor of the eddy current displacement sensor single channel in the case of without overcompensation is collected
Shifting-voltage response；Then, control thermistor Pt100 temperature-resistance table, design temperature Acquisition Circuit, and according to not
Synthermal lower temperature drift situation slope calculations deviation and amplitude change of error situation, design different resistance proportionings, fitting temperature-sensitive electricity
Hinder situation of change compensation slope deviation, the situation of change of amplitude deviation, the multistage temperature drift compensation circuit of design；Finally, according in biography
The information that thermistor in sensor probe environment is collected, FPGA control analog switching circuits select different grades of temperature drift
Compensation circuit, and then realize the automatic classification compensation of sensor.
4. high temperature according to claim 2 is from the differential variable frequency AM electric vortex displacement sensor for following grading compensation,
It is characterized in that：The method that differential type eliminates error is employed, will be gathered in the measured object direction of motion in two opposite directions
To displacement information make the difference, can realize elimination two sensor circuits in identical when float error.
5. high temperature according to claim 3 is from the differential variable frequency AM electric vortex displacement sensor for following grading compensation,
It is characterized in that：Thermistor is introduced in the compensation of every one-level in slope adjustment and amplitude regulation, its compensation circuit is allowed to and exists
The slope and amplitude that compensate its displacement-voltage that can be more flexible during temperature change change.
6. high temperature according to claim 1 is from the differential variable frequency AM electric vortex displacement sensor for following grading compensation,
It is characterized in that：It, which is popped one's head in, uses 99 formula Al2O3Ceramics forging is formed, and is resistant to 1000 DEG C of high temperature；Its enamel-covered wire uses polyimides
As insulating materials, line width 0.09mm, coil is outer by high-temp glue hydropexis, from TX500 high-temp glues, prevents polyimides in height
Brittle phenomenon under warm environment causes insulating properties to be deteriorated；Coaxial cable, as insulating materials, is used as connection hot environment from F46
In probe and normal temperature environment in signal processing circuit, fixed with the connection of coaxial cable by high temperature scolding tin at probe.
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108489371A (en) * | 2018-03-15 | 2018-09-04 | 北京航空航天大学 | A kind of high temperature magnetic suspension bearing axially uses eddy current displacement sensor |
| CN109470130A (en) * | 2018-12-29 | 2019-03-15 | 长沙市开启时代电子有限公司 | It is a kind of to send a reception differential type current vortex displacement detection device |
| CN109916285A (en) * | 2018-07-04 | 2019-06-21 | 珠海格力电器股份有限公司 | Wide-range eddy current displacement sensor |
| CN111023957A (en) * | 2019-12-20 | 2020-04-17 | 北京航空航天大学 | High-temperature-resistant radial displacement sensor device |
| CN111056025A (en) * | 2019-12-30 | 2020-04-24 | 中航电测仪器(西安)有限公司 | Detection sensor and method for detecting release of release pull rod |
| CN113465767A (en) * | 2020-03-31 | 2021-10-01 | Tdk株式会社 | Temperature detection circuit, gas detection device and temperature detection method |
| CN113483650A (en) * | 2021-06-26 | 2021-10-08 | 山东航天电子技术研究所 | Novel eddy current sensor measuring method |
| CN114483635A (en) * | 2022-01-26 | 2022-05-13 | 广东美的暖通设备有限公司 | Magnetic bearing system, compressor and air conditioner |
| CN114659438A (en) * | 2022-05-20 | 2022-06-24 | 山东华东风机有限公司 | Detection device and detection method for differential displacement sensor |
| CN115173009A (en) * | 2022-07-15 | 2022-10-11 | 西南应用磁学研究所(中国电子科技集团公司第九研究所) | Temperature compensation method for gyromagnetic filter assembly |
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| CN108489371A (en) * | 2018-03-15 | 2018-09-04 | 北京航空航天大学 | A kind of high temperature magnetic suspension bearing axially uses eddy current displacement sensor |
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| CN111023957A (en) * | 2019-12-20 | 2020-04-17 | 北京航空航天大学 | High-temperature-resistant radial displacement sensor device |
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| CN111056025A (en) * | 2019-12-30 | 2020-04-24 | 中航电测仪器(西安)有限公司 | Detection sensor and method for detecting release of release pull rod |
| CN113465767A (en) * | 2020-03-31 | 2021-10-01 | Tdk株式会社 | Temperature detection circuit, gas detection device and temperature detection method |
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| CN113483650A (en) * | 2021-06-26 | 2021-10-08 | 山东航天电子技术研究所 | Novel eddy current sensor measuring method |
| CN114483635A (en) * | 2022-01-26 | 2022-05-13 | 广东美的暖通设备有限公司 | Magnetic bearing system, compressor and air conditioner |
| CN114659438A (en) * | 2022-05-20 | 2022-06-24 | 山东华东风机有限公司 | Detection device and detection method for differential displacement sensor |
| CN114659438B (en) * | 2022-05-20 | 2022-08-05 | 山东华东风机有限公司 | Detection device and detection method for differential displacement sensor |
| CN115173009A (en) * | 2022-07-15 | 2022-10-11 | 西南应用磁学研究所(中国电子科技集团公司第九研究所) | Temperature compensation method for gyromagnetic filter assembly |
| CN115173009B (en) * | 2022-07-15 | 2024-03-22 | 西南应用磁学研究所(中国电子科技集团公司第九研究所) | Temperature compensation method for gyromagnetic filter assembly |
| CN118603236A (en) * | 2024-08-08 | 2024-09-06 | 洛阳明峰新材料有限公司 | Detection system and method for controlling molten metal level through eddy current induction tracking |
| CN118603236B (en) * | 2024-08-08 | 2024-10-15 | 洛阳明峰新材料有限公司 | Detection system and method for controlling molten metal level through eddy current induction tracking |
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