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CN107069417A - A plasmonic random laser array device based on two-dimensional materials - Google Patents

A plasmonic random laser array device based on two-dimensional materials Download PDF

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CN107069417A
CN107069417A CN201710316601.7A CN201710316601A CN107069417A CN 107069417 A CN107069417 A CN 107069417A CN 201710316601 A CN201710316601 A CN 201710316601A CN 107069417 A CN107069417 A CN 107069417A
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CN107069417B (en
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张彤
李丰
张晓阳
熊梦
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Southeast University
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/30Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range using scattering effects, e.g. stimulated Brillouin or Raman effects
    • H01S3/307Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range using scattering effects, e.g. stimulated Brillouin or Raman effects in a liquid

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Abstract

本发明公开了一种基于二维材料的等离激元随机激光阵列器件,由阵列化的激光腔室单元所组成,所述随机激光阵列器件的整体结构位置关系由下至上依次为泵浦光源(1)、基底(2)、底电极(31)、介质层(4)、由间隔层(5)所围成的激光腔室单元(6)、顶电极(32);外围驱动电路(7)的两端分别连接底电极(31)和顶电极(32),底电极(31)、介质层(4)、激光腔室单元(6)、顶电极(32)形成闭合回路。本发明的随机激光阵列使用高光致发光效率的二维材料纳米片作为随机增益介质,并通过金属纳米颗粒的局域表面等离激元效应(LSPR)来有效增强光的散射,降低激光器的阈值。通过改变激光腔室工作电压能够实现对辐射光谱和方向性的动态调节。

The invention discloses a plasmonic random laser array device based on two-dimensional materials, which is composed of arrayed laser chamber units, and the overall structural positional relationship of the random laser array device is pumping light source in sequence from bottom to top (1), substrate (2), bottom electrode (31), dielectric layer (4), laser chamber unit (6), top electrode (32) surrounded by spacer layer (5); peripheral drive circuit (7 ) are respectively connected to the bottom electrode (31) and the top electrode (32), and the bottom electrode (31), the dielectric layer (4), the laser chamber unit (6), and the top electrode (32) form a closed loop. The random laser array of the present invention uses two-dimensional material nanosheets with high photoluminescence efficiency as a random gain medium, and effectively enhances light scattering through the localized surface plasmon effect (LSPR) of metal nanoparticles, reducing the threshold of the laser . By changing the operating voltage of the laser chamber, the dynamic adjustment of the radiation spectrum and directivity can be realized.

Description

一种基于二维材料的等离激元随机激光阵列器件A plasmonic random laser array device based on two-dimensional materials

技术领域technical field

本发明属于激光技术、二维材料、金属纳米材料及微光机电技术等领域,尤其涉及一种基于二维材料的等离激元随机激光阵列器件。The invention belongs to the fields of laser technology, two-dimensional materials, metal nanomaterials and micro-opto-electromechanical technology, and in particular relates to a plasmon random laser array device based on two-dimensional materials.

背景技术Background technique

随机激光是一种不需要谐振腔的新型原理的激光,和传统的激光器相比,它不需要谐振腔,由其所包含的随机增益介质中的多重散射效应形成激光,随机增益介质能够对光实现有效的散射及放大。对于随机激光而言,通常需要引入新的纳米光源的技术,利用各种纳米结构提升光与物质相互作用。进一步增强随机增益介质的散射特性,从而降低随机激光的阈值,提升随机激光器的能耗等各方面性能。随机激光器未来发展的趋势是阵列化,激光波长和辐射方向的快速可调谐,动态化。然而,目前已有技术远远无法满足上述需求,例如:TiO2薄膜随机激光器、ZnO薄膜随机激光器及胶体溶液中掺杂染料微粒的随机激光器等均无法实现动态的可调谐,这将极大的限制随机激光器在光电集成、光子集成等一系列方面的应用。为了充分拓展随机激光器的应用,需要引入一些新的技术来满足上述应用需求。Random laser is a new type of laser that does not require a resonant cavity. Compared with traditional lasers, it does not require a resonant cavity. The laser is formed by the multiple scattering effect in the random gain medium contained in it. The random gain medium can absorb light Achieve effective scattering and amplification. For random lasers, it is usually necessary to introduce a new nano-light source technology, using various nanostructures to enhance the interaction between light and matter. The scattering characteristics of the random gain medium are further enhanced, thereby reducing the threshold of the random laser and improving the energy consumption of the random laser and other aspects of performance. The future development trend of random lasers is arraying, fast tunable and dynamic laser wavelength and radiation direction. However, the current existing technologies are far from meeting the above requirements. For example, random lasers of TiO 2 thin films, ZnO thin films, and random lasers doped with dye particles in colloidal solutions cannot be dynamically tunable, which will greatly Limit the application of random lasers in a series of aspects such as optoelectronic integration and photon integration. In order to fully expand the application of random lasers, some new technologies need to be introduced to meet the above application requirements.

二维材料,它们具有很强的平面化学键,但是层与层之间的耦合较弱,因而层状结构的体材料可以被分离成独立的原子层。范德瓦耳斯家族的材料是最常见的二维材料。其包括石墨烯、六方氮化硼h-BN、二硫化钼(MoS2)等过渡金属硫化物。对于二硫化钼而言,层与层之间通过范德华力耦合,每层上下两层为硫原子组成的六角平面,被中间的金属钼原子层隔开,从而形成了“三明治”。二硫化钼等二维材料有着许多优异的光学性质,如:禁带宽度与材料的层数有关;在外界光源照射下,层间会形成受缚激子从而产生强烈的光致发光效应。局域等离激元共振(Localized Surface Plasmon Resonance,LSPR)是金属纳米结构在亚波长范围内与光强烈相互作用引发的共振增强效应,在金属纳米表面形成强烈的光场。另外,对于二硫化钼等二维材料与金属纳米颗粒的复合结构,金属纳米颗粒LSPR效应所产生的热电子-空穴对能够实现对二维材料的掺杂,调控二维材料的带隙。Two-dimensional materials, they have strong planar chemical bonds, but the coupling between layers is weak, so the layered bulk materials can be separated into independent atomic layers. Materials of the van der Waals family are the most common 2D materials. It includes graphene, hexagonal boron nitride h-BN, molybdenum disulfide (MoS2) and other transition metal sulfides. For molybdenum disulfide, the layers are coupled by van der Waals force, and the upper and lower layers of each layer are hexagonal planes composed of sulfur atoms, which are separated by the middle metal molybdenum atom layer, thus forming a "sandwich". Two-dimensional materials such as molybdenum disulfide have many excellent optical properties, such as: the band gap is related to the number of layers of the material; under the irradiation of an external light source, bound excitons will be formed between the layers to produce a strong photoluminescence effect. Localized Surface Plasmon Resonance (LSPR) is a resonance enhancement effect caused by the strong interaction between metal nanostructures and light in the sub-wavelength range, forming a strong optical field on the surface of metal nanostructures. In addition, for the composite structure of two-dimensional materials such as molybdenum disulfide and metal nanoparticles, the hot electron-hole pairs generated by the LSPR effect of metal nanoparticles can realize the doping of two-dimensional materials and adjust the band gap of two-dimensional materials.

电润湿(Electrowetting,EW)是指通过改变液滴与绝缘基板之间电压,来改变液滴在基板上的润湿性,即改变接触角,使液滴发生形变、位移的现象。电润湿技术是一种利用油水两相界面效应在微米尺度实现液滴的动态调谐。这种技术具有响应速度快、可调范围大、面积弧度均为调节、成本低等优点。是一种新型的动态可调谐技术,并已在微透镜、电润湿显示和微流体实验室等方面有着广泛应用。本发明提出将这种技术与等离激元纳米颗粒的LSPR效应结合起来用于研制全新概念的随机激光器,将具有激光阈值低、方向性及激光光谱动态可调谐等特性。Electrowetting (Electrowetting, EW) refers to the phenomenon of changing the wettability of the droplet on the substrate by changing the voltage between the droplet and the insulating substrate, that is, changing the contact angle, so that the droplet is deformed and displaced. Electrowetting technology is a dynamic tuning of droplets at the micron scale by using the oil-water two-phase interface effect. This technology has the advantages of fast response speed, large adjustable range, adjustable area and radian, and low cost. It is a new type of dynamic tunable technology, and has been widely used in microlens, electrowetting display and microfluidic laboratory. The present invention proposes to combine this technology with the LSPR effect of plasmonic nanoparticles to develop a random laser with a new concept, which will have the characteristics of low laser threshold, directivity, and dynamic tunable laser spectrum.

本发明针对现有随机激光器阈值较高及激光波长、辐射方向无法调谐等瓶颈问题,并结合上述新原理、新技术、新材料提出了一种光谱可调谐的可见光至近红外波段的随机激光阵列,并具有低阈值、工艺简单等优点。为随机激光器在光子、光电器件方面的应用有着重要意义。The present invention aims at bottleneck problems such as high threshold value of existing random lasers and untunable laser wavelength and radiation direction, and combines the above-mentioned new principles, new technologies and new materials to propose a spectrum-tunable random laser array in the visible light to near-infrared band, And it has the advantages of low threshold value and simple process. It is of great significance for the application of random lasers in photonic and optoelectronic devices.

发明内容Contents of the invention

技术问题:本发明的目的是为了解决现有的随机激光器存在激光阈值高、辐射光谱、方向性不可调谐等瓶颈问题。提出了一种基于二维材料的等离激元随机激光阵列器件,通过使用高光致发光效应的二维材料作为随机增益介质,能够能够有效的降低激光阈值并动态的调谐激光波长和激光的方向性,制备工艺简单,并能制备成阵列化的随机激光器。Technical problem: The purpose of this invention is to solve the bottleneck problems of existing random lasers such as high laser threshold, radiation spectrum, and non-tunable directivity. A plasmonic random laser array device based on two-dimensional materials is proposed. By using a two-dimensional material with high photoluminescence effect as a random gain medium, it can effectively reduce the laser threshold and dynamically tune the laser wavelength and laser direction. properties, the preparation process is simple, and can be prepared into an array of random lasers.

技术方案:本发明的一种基于二维材料的可调谐随机激光阵列器件的整体结构位置关系由下至上依次为泵浦光源、基底、底电极、介质层、由间隔层所围成的激光腔室单元、顶电极;外围驱动电路的两端分别连接底电极和顶电极,底电极、介质层、激光腔室单元、顶电极形成闭合回路。Technical solution: The positional relationship of the overall structure of a tunable random laser array device based on two-dimensional materials of the present invention is pumping light source, substrate, bottom electrode, dielectric layer, and laser cavity surrounded by spacer layers from bottom to top. The chamber unit and the top electrode; the two ends of the peripheral drive circuit are respectively connected to the bottom electrode and the top electrode, and the bottom electrode, the dielectric layer, the laser chamber unit and the top electrode form a closed loop.

所述的基底为硅片、蓝宝石、云母基片或聚合物材料所形成的柔性基底。The substrate is a flexible substrate formed of silicon wafer, sapphire, mica substrate or polymer material.

所述的底电极和顶电极为透明导电薄膜电极,供选材料为氧化铟锡ITO、掺铝氧化锌AZO或石墨烯;间隔层供选材料为聚乙二醇,聚丙烯酰胺、聚酰胺等亲水性聚合物材料。The bottom electrode and the top electrode are transparent conductive film electrodes, and the optional materials are indium tin oxide ITO, aluminum-doped zinc oxide AZO or graphene; the optional materials for the spacer layer are polyethylene glycol, polyacrylamide, polyamide, etc. Hydrophilic polymer material.

所述的介质层由两层电介质组成,下层是无机绝缘介质层,供选材料为SiN、Al2O3或Si,上层是低表面应力的聚合物介质层,供选材料为含氟聚合物Cytop或Teflon;上层介质层直接旋涂在下层介质层上,厚度范围为0.7微米至0.9微米。The dielectric layer is composed of two dielectric layers, the lower layer is an inorganic insulating dielectric layer, the optional material is SiN, Al 2 O 3 or Si, the upper layer is a polymer dielectric layer with low surface stress, and the optional material is a fluoropolymer Cytop or Teflon; the upper dielectric layer is spin-coated directly on the lower dielectric layer in a thickness range of 0.7 microns to 0.9 microns.

所述的激光腔室单元包括第一溶剂、第二溶剂、由金属纳米颗粒在第一溶剂和第二溶剂的界面处自组装的金属纳米颗粒薄膜及组装在金属纳米颗粒薄膜表面的二维材料纳米片组成,金属纳米颗粒会与二维材料纳米片形成肖特基接触。金属纳米颗粒的局域表面等离激元共振效应所产生的热电子-空穴对会掺杂至二维材料纳米片并调控二维材料材料纳米片的能带;金属纳米颗粒需要经过表面配体经行修饰,二维材料纳米片需要经过表面配体经行修饰,供选材料包括四丁基溴化铵、十六烷基三甲基溴化铵、聚乙烯吡咯酮或羧甲基素纤维钠。The laser chamber unit includes a first solvent, a second solvent, a metal nanoparticle film self-assembled by metal nanoparticles at the interface of the first solvent and the second solvent, and a two-dimensional material assembled on the surface of the metal nanoparticle film The metal nanoparticles will form Schottky contacts with the two-dimensional material nanosheets. The hot electron-hole pairs generated by the local surface plasmon resonance effect of metal nanoparticles will be doped into the two-dimensional material nanosheets and regulate the energy band of the two-dimensional material nanosheets; metal nanoparticles need to undergo surface coordination. The body is modified, and the two-dimensional material nanosheet needs to be modified by the surface ligand. The optional materials include tetrabutylammonium bromide, hexadecyltrimethylammonium bromide, polyvinylpyrrolidone or carboxymethyl fiber sodium.

所述的第一溶剂供选材料为水或盐水的极性液体,表面应力范围为50~90dynes/cm;第二溶剂供选材料为烷、烃或醇,其表面应力范围为20~40dynes/cm,第二溶剂不溶于或微溶于第一溶剂。The optional material for the first solvent is polar liquid of water or brine, and the surface stress range is 50-90 dynes/cm; the optional material for the second solvent is alkanes, hydrocarbons or alcohols, and the surface stress range is 20-40 dynes/cm cm, the second solvent is insoluble or slightly soluble in the first solvent.

所述的金属纳米颗粒供选材料为金、银、铜或是所述金属的复合材料,形貌为纳米棒、纳米球、纳米锥或纳米核壳结构,尺寸范围为几十纳米至几百纳米。The optional materials of the metal nanoparticles are gold, silver, copper or composite materials of the metals, the morphology is nanorod, nanosphere, nanocone or nanocore-shell structure, and the size ranges from tens of nanometers to hundreds of nanometers. Nano.

所述的金属纳米颗粒薄膜自组装在第一溶剂和第二溶剂的界面处,金属纳米颗粒薄膜的局域表面等离激元共振峰为可见光至近红外波段;自组装前,金属纳米颗粒需经过特定的表面配体经行表面修饰。The metal nanoparticle film is self-assembled at the interface between the first solvent and the second solvent, and the local surface plasmon resonance peak of the metal nanoparticle film is in the visible light to near-infrared band; before self-assembly, the metal nanoparticle needs to pass through Specific surface ligands are surface modified.

所述的二维材料纳米片经过表面配体处理后自组装在第一溶剂和第二溶剂的界面处;所述二维材料纳米片供选材料为石墨烯、六方氮化硼h-BN、二硫化钼、二硫化钨、二硫化铪或二硒化铪;尺寸范围为几十纳米至几十微米,厚度为一层至数十层,禁带宽度位于可见光至近红外波段。The two-dimensional material nanosheet is self-assembled at the interface between the first solvent and the second solvent after surface ligand treatment; the optional materials for the two-dimensional material nanosheet are graphene, hexagonal boron nitride h-BN, Molybdenum disulfide, tungsten disulfide, hafnium disulfide or hafnium diselenide; the size ranges from tens of nanometers to tens of microns, the thickness is one layer to tens of layers, and the band gap is in the visible to near-infrared band.

所述的外围驱动电路用于控制激光腔室单元的工作电压,进而控制第二溶剂所形成液滴的疏水角。The peripheral drive circuit is used to control the operating voltage of the laser chamber unit, and then control the hydrophobic angle of the droplet formed by the second solvent.

有益效果:本发明与现有技术相比有以下优点:Beneficial effect: compared with the prior art, the present invention has the following advantages:

1.本发明提出一种基于二维材料的可调谐随机激光阵列器件,首次利用金属纳米颗粒的LSPR共振峰与其间距的关系、金属纳米颗粒LSPR所产生热电子-空穴对对于二维材料纳米片的掺杂作用,金属纳米颗粒与二维材料纳米片所形成的肖特基接触结构、电润湿对液滴的动态调谐以及金属纳米材料与二维材料纳米纳米片的两相界面自组装效应等物理机制、机理制备动态可调谐的随机激光阵列器件。能够很好的解决现有随机激光器如:ZnO薄膜随机激光器及胶体溶液中掺杂染料微粒的随机激光器等存在阈值高、辐射光谱窄、光谱方向性无法调谐的缺点。而且能通过外围驱动电路实现可编程的激光阵列,分别控制不同激光单元的方向性实现激光合成,得到大功率和高光束质量的随机激光器。对于随机激光器的集成化应用具有重要意义。1. The present invention proposes a tunable random laser array device based on two-dimensional materials. For the first time, the relationship between the LSPR resonance peak of metal nanoparticles and its spacing, and the thermal electron-hole pairs generated by the LSPR of metal nanoparticles are used for the two-dimensional material nanometer. The doping effect of sheets, the Schottky contact structure formed by metal nanoparticles and two-dimensional material nanosheets, the dynamic tuning of liquid droplets by electrowetting, and the two-phase interface self-assembly of metal nanomaterials and two-dimensional material nanosheets Effect and other physical mechanisms and mechanisms to prepare dynamically tunable random laser array devices. It can well solve the shortcomings of existing random lasers such as ZnO thin film random lasers and random lasers doped with dye particles in colloidal solutions, such as high threshold, narrow radiation spectrum, and untunable spectral directionality. Moreover, a programmable laser array can be realized through a peripheral driving circuit, and the directivity of different laser units can be controlled separately to realize laser synthesis, and a random laser with high power and high beam quality can be obtained. It is of great significance for the integrated application of random lasers.

2.本发明提出一种基于等离激元纳米结构的可调谐随机激光阵列器件具有宽光谱调谐的优点,选用高光致发光效率的二维材料作为随机增益介质,其禁带宽度大部分位于1.0~2.0ev左右,具体工作时可以通过泵浦光源强度、激光腔室工作电压两个参数来调节金属纳米颗粒LSPR峰值,从而调谐金属纳米颗粒所产生热电子对二维材料的掺杂作用,增大所辐射随机激光的光谱范围,辐射随机激光波长范围为可见光至近红外波段。2. The present invention proposes a tunable random laser array device based on plasmonic nanostructures, which has the advantages of wide-spectrum tuning. A two-dimensional material with high photoluminescence efficiency is selected as the random gain medium, and its band gap is mostly located at 1.0 ~2.0ev or so, the LSPR peak value of the metal nanoparticles can be adjusted by the two parameters of the intensity of the pump light source and the working voltage of the laser chamber during specific work, thereby tuning the doping effect of the hot electrons generated by the metal nanoparticles on the two-dimensional material, increasing the The spectral range of the random laser radiated by the Institute, the wavelength range of the radiated random laser is from visible light to near-infrared band.

3.本发明提出一种基于等离激元纳米结构的可调谐随机激光阵列器件具有低功耗、低阈值的优点,两相界面自组装的金属纳米颗粒薄膜的LSPR效应产生的表面局域光场能够有效增强二维材料纳米片对光的吸收以及散射效率,这使得外部泵浦光源强度较低时便能激发出随机激光,是一种低功耗、低阈值的随机激光阵列器件。3. The present invention proposes a tunable random laser array device based on plasmonic nanostructures, which has the advantages of low power consumption and low threshold. The field can effectively enhance the light absorption and scattering efficiency of two-dimensional material nanosheets, which enables random lasers to be excited when the intensity of the external pump light source is low. It is a low-power, low-threshold random laser array device.

附图说明Description of drawings

图1是整个随机激光阵列的截面图,Figure 1 is a cross-sectional view of the entire random laser array,

图2是整个激光阵列的俯视图。Figure 2 is a top view of the entire laser array.

图3是激光腔室单元在不通电压或电压较低时的截面图,Figure 3 is a cross-sectional view of the laser chamber unit when the voltage is off or the voltage is low,

图4是激光腔室单元在高电压时的俯视图。Fig. 4 is a top view of the laser chamber unit at high voltage.

图中有:泵浦光源1、基底2、底电极31、顶电极32、介质层4、间隔层5、激光腔室单元6、及外围驱动电路7、第一溶剂61、第二溶剂62、金属纳米颗粒63及二维材料纳米片65。In the figure, there are: pump light source 1, substrate 2, bottom electrode 31, top electrode 32, dielectric layer 4, spacer layer 5, laser chamber unit 6, and peripheral drive circuit 7, first solvent 61, second solvent 62, Metal nanoparticles 63 and two-dimensional material nanosheets 65 .

具体实施方式detailed description

本发明提出的一种基于二维材料的等离激元随机激光阵列器件,所述随机激光阵列器件的整体结构由基底、底电极、顶电极、介质层、间隔层、激光腔室单元、泵浦光源及外围驱动电路构成。其位置关系由下至上依次为基底、底电极、介质层、由间隔层所围成的激光腔室单元、顶电极、泵浦光源、外围驱动电路组成。外围驱动电路通过连接底电极和顶电极形成闭合回路。The present invention proposes a plasmonic random laser array device based on two-dimensional materials. The overall structure of the random laser array device consists of a substrate, a bottom electrode, a top electrode, a dielectric layer, a spacer layer, a laser chamber unit, a pump Pu light source and peripheral drive circuit. Its positional relationship consists of substrate, bottom electrode, dielectric layer, laser chamber unit surrounded by spacer layers, top electrode, pump light source, and peripheral drive circuit from bottom to top. The peripheral driving circuit forms a closed loop by connecting the bottom electrode and the top electrode.

所述的激光腔室单元有第一溶剂、第二溶剂、由金属纳米颗粒在第一溶剂和第二溶剂的界面处自组装的金属纳米颗粒薄膜及组装在金属纳米颗粒薄膜表面的二维材料纳米片组成。金属纳米颗粒需要经过表面配体修饰。表面配体能够有效的降低金属纳米颗粒的表面活化能,降低金属纳米颗粒之间的排斥力从而能够高效的在第一溶剂与第二溶剂界面处自组装成薄膜。二维材料纳米片也需要经过表面配体经行修饰后才能与金属纳米颗粒一样有效的自组装在第一溶剂和第二溶剂表面。The laser chamber unit has a first solvent, a second solvent, a metal nanoparticle film self-assembled by metal nanoparticles at the interface of the first solvent and the second solvent, and a two-dimensional material assembled on the surface of the metal nanoparticle film composed of nanosheets. Metal nanoparticles need to be modified by surface ligands. The surface ligands can effectively reduce the surface activation energy of the metal nanoparticles, reduce the repulsion between the metal nanoparticles, and thus can efficiently self-assemble into a thin film at the interface between the first solvent and the second solvent. Two-dimensional material nanosheets also need to be modified by surface ligands to self-assemble on the surface of the first solvent and the second solvent as effectively as metal nanoparticles.

激光腔室单元的驱动方法如下:使用泵浦光源从激光腔室底部激发激光腔室中的二维材料纳米片的光致发光以及金属纳米颗粒局域表面等离激元共振时,所述激光腔室单元边能够打出低阈值随机激光。对于激光阵列的整体方向性,可通过外围驱动电路对驱动信号实现数字编程以及寻址电路进行控制。实现方向性动态可调谐的随机激光。The driving method of the laser chamber unit is as follows: when the pump light source is used to excite the photoluminescence of the two-dimensional material nanosheets in the laser chamber and the localized surface plasmon resonance of the metal nanoparticles from the bottom of the laser chamber, the laser The side of the chamber unit can emit low-threshold random laser light. For the overall directivity of the laser array, the digital programming of the driving signal and the control of the addressing circuit can be realized through the peripheral driving circuit. Achieving Directional Dynamically Tunable Random Lasers.

本发明中随机激光阵列结构及制备工艺如下:首先在Si片(或是蓝宝石、云母片等)上通过光刻、刻蚀等工艺制备出ITO电极,随后在上方制备介质层,无机绝缘介质层通过PECVD、ALD制备,低表面应力聚合物介质层通过旋涂工艺制备。随后再通过纳米压印技术制备亲水激光腔壁网格层形成阵列腔室结构,亲水性材料一般为聚乙二醇,聚丙烯酰胺等亲水性聚合物材料。将经过表面配体修饰过后的金属纳米颗粒和二维材料纳米片加入到第一溶剂与第二溶剂中,然后再分别灌装至激光腔室单元中并密封。其中表面配体能够有效保障金属纳米颗粒和二维材料纳米片在第一溶剂和第二溶剂界面处自组装成薄膜。In the present invention, the random laser array structure and preparation process are as follows: first, on the Si sheet (or sapphire, mica sheet, etc.), an ITO electrode is prepared by photolithography, etching, etc., and then a dielectric layer is prepared on the top, an inorganic insulating dielectric layer It is prepared by PECVD and ALD, and the low surface stress polymer dielectric layer is prepared by spin coating. Then, a hydrophilic laser cavity wall grid layer is prepared by nanoimprinting technology to form an array cavity structure. The hydrophilic material is generally a hydrophilic polymer material such as polyethylene glycol or polyacrylamide. The metal nanoparticles and the two-dimensional material nanosheets modified by the surface ligands are added into the first solvent and the second solvent, and then respectively filled into the laser chamber unit and sealed. The surface ligands can effectively ensure the self-assembly of metal nanoparticles and two-dimensional material nanosheets into thin films at the interface between the first solvent and the second solvent.

本发明中使用二硫化钼等二维材料作为随机增益介质,二硫化钼等二维材料结构与石墨烯类似,都是层间结构,层与层之间通过弱范德华力耦合。相比于其它光致发光的随机增益介质而言,多层二硫化钼在吸收光子之后在层间会形成强束缚激子,这些束缚激子的存在使得二硫化钼有更强光致发光效应,因此使用二硫化钼等二维材料所制作的随机激光器有着更低的激光阈值。In the present invention, a two-dimensional material such as molybdenum disulfide is used as a random gain medium. The structure of the two-dimensional material such as molybdenum disulfide is similar to that of graphene, which is an interlayer structure, and the layers are coupled by weak van der Waals force. Compared with other photoluminescent random gain media, multilayer molybdenum disulfide will form strong bound excitons between layers after absorbing photons, and the existence of these bound excitons makes molybdenum disulfide have a stronger photoluminescence effect , so random lasers made of two-dimensional materials such as molybdenum disulfide have a lower lasing threshold.

本发明中组装在两种互不相溶的溶剂界面处的金属纳米颗粒薄膜能够进一步的降低随机激光器的阈值,并能够有效的调谐所辐射激光的波长。首先金属纳米颗粒在泵浦光源的照射下会产生局域表面等离激元效应(Localized Surface Plasmon Resonance,LSPR),能将光局域在深度亚波长的范围内,在共振峰附近形成强烈的局域光场,此局域的光场能更有效的增强二维材料纳米片的光致发光效率,从而进一步降低激光器阈值。本发明中金属纳米颗粒和二维材料纳米片共同自组装在两相界面处,因此金属纳米颗粒与二维材料纳米片间距非常小,金属纳米颗粒受光照产生LSPR效应时,会极大的增强对光的吸收,吸收足够的光子能量后便会产生热电子-空穴对。产生的热电子能够起到对二维材料纳米片的掺杂作用实现对二维材料光吸收及光致发光谱的调控。本发明的激光阵列具体工作时,通过改变激光腔室的工作电压,由于电润湿效应能够实现对第二溶剂所形成液滴的收缩与舒张,进而改变金属纳米颗粒薄膜的颗粒间距。颗粒间距的变化会改变金属纳米颗粒薄膜的LSPR峰,从而调控金属纳米颗粒所产生的热电子对二维纳米材料的掺杂,实现光致发光谱的改变,即实现对本发明随机激光辐射光谱的调节。In the present invention, the metal nanoparticle film assembled at the interface of two immiscible solvents can further reduce the threshold value of the random laser, and can effectively tune the wavelength of the radiated laser. First of all, metal nanoparticles will produce localized surface plasmon effect (Localized Surface Plasmon Resonance, LSPR) under the irradiation of pump light source, which can localize the light in the deep sub-wavelength range and form a strong resonance near the resonance peak. Local light field, this local light field can more effectively enhance the photoluminescence efficiency of two-dimensional material nanosheets, thereby further reducing the laser threshold. In the present invention, the metal nanoparticles and the two-dimensional material nanosheets are self-assembled at the two-phase interface, so the distance between the metal nanoparticles and the two-dimensional material nanosheets is very small, and when the metal nanoparticles are illuminated to produce the LSPR effect, it will be greatly enhanced. For light absorption, hot electron-hole pairs are generated after absorbing enough photon energy. The generated thermal electrons can play a role in doping the two-dimensional material nanosheets to realize the regulation of the light absorption and photoluminescence spectrum of the two-dimensional material. When the laser array of the present invention is working, by changing the working voltage of the laser chamber, the electrowetting effect can realize the contraction and relaxation of the droplet formed by the second solvent, and then change the particle distance of the metal nanoparticle film. The change of particle spacing will change the LSPR peak of the metal nanoparticle film, thereby regulating the doping of the thermal electrons generated by the metal nanoparticles to the two-dimensional nanomaterial, and realizing the change of the photoluminescence spectrum, that is, realizing the improvement of the random laser radiation spectrum of the present invention. adjust.

实例:Example:

1.如图1所示制备出M×N的激光阵列结构,在基底上通过光刻、刻蚀等工艺制备出透明电极,随后在上方通过ALD制备制备介质层,低表面应力聚合物介质层通过旋涂工艺制备。随后再通过纳米压印技术制备M×N网格层形成阵列腔室结构,亲水性材料一般为聚乙二醇,聚丙烯酰胺等亲水性聚合物材料。器件整体结构制备好后将金属纳米颗粒和二维材料纳米片加入到第一溶剂或第二溶剂中,随后将第一溶剂和第二溶剂灌装到激光腔室中并通过光刻胶经行密封。1. Prepare an M×N laser array structure as shown in Figure 1, prepare transparent electrodes on the substrate by photolithography, etching and other processes, and then prepare a dielectric layer and a low surface stress polymer dielectric layer by ALD on the top Prepared by spin-coating process. Then, an M×N grid layer is prepared by nanoimprinting technology to form an array chamber structure, and the hydrophilic material is generally a hydrophilic polymer material such as polyethylene glycol or polyacrylamide. After the overall structure of the device is prepared, metal nanoparticles and two-dimensional material nanosheets are added to the first solvent or the second solvent, and then the first solvent and the second solvent are filled into the laser chamber and passed through the photoresist. seal.

2.将所制备的随机激光阵列通过底电极与顶连电极连接至外围的驱动电路,通过驱动电路的数字信号来控制激光腔室单元。2. Connect the prepared random laser array to the peripheral drive circuit through the bottom electrode and the top electrode, and control the laser chamber unit through the digital signal of the drive circuit.

3.打开泵浦光源从底部照射激光腔室打出激光,整个激光阵列的辐射光谱及方向性能够外围电路的数字信号加以控制,数字信号用于控制激光腔室的单元工作电压。当工作电压从低电压变化到高电压时,辐射光谱会发生红移。3. Turn on the pump light source to irradiate the laser chamber from the bottom to emit laser light. The radiation spectrum and directionality of the entire laser array can be controlled by the digital signal of the peripheral circuit. The digital signal is used to control the unit working voltage of the laser chamber. When the operating voltage is changed from low voltage to high voltage, the radiation spectrum will be red-shifted.

Claims (10)

1.一种基于二维材料的可调谐随机激光阵列器件,其特征在于:所述随机激光阵列器件的整体结构位置关系由下至上依次为泵浦光源(1)、基底(2)、底电极(31)、介质层(4)、由间隔层(5)所围成的激光腔室单元(6)、顶电极(32);外围驱动电路(7)的两端分别连接底电极(31)和顶电极(32),底电极(31)、介质层(4)、激光腔室单元(6)、顶电极(32)形成闭合回路。1. A tunable random laser array device based on two-dimensional materials, characterized in that: the overall structural positional relationship of the random laser array device is sequentially pumping light source (1), substrate (2), and bottom electrode from bottom to top (31), dielectric layer (4), laser chamber unit (6) surrounded by spacer layer (5), top electrode (32); the two ends of peripheral driving circuit (7) are respectively connected to bottom electrode (31) It forms a closed loop with the top electrode (32), the bottom electrode (31), the dielectric layer (4), the laser chamber unit (6) and the top electrode (32). 2.如权利要求书1所述的一种基于二维材料的可调谐随机激光阵列器件,其特征在于:所述的基底(2)为硅片、蓝宝石、云母基片或聚合物材料所形成的柔性基底。2. A kind of tunable random laser array device based on two-dimensional material as claimed in claim 1, characterized in that: said substrate (2) is formed by silicon wafer, sapphire, mica substrate or polymer material flexible base. 3.如权利要求书1所述的一种基于二维材料的可调谐随机激光阵列器件,其特征在于:所述的底电极(31)和顶电极(32)为透明导电薄膜电极,供选材料为氧化铟锡ITO、掺铝氧化锌AZO或石墨烯;间隔层(5)供选材料为聚乙二醇,聚丙烯酰胺、聚酰胺等亲水性聚合物材料。3. a kind of tunable random laser array device based on two-dimensional material as claimed in claim 1, is characterized in that: described bottom electrode (31) and top electrode (32) are transparent conductive film electrodes, optional The material is indium tin oxide ITO, aluminum-doped zinc oxide AZO or graphene; the optional material for the spacer layer (5) is polyethylene glycol, polyacrylamide, polyamide and other hydrophilic polymer materials. 4.如权利要求书1所述的一种基于二维材料的可调谐随机激光阵列器件,其特征在于:所述的介质层(4)由两层电介质组成,下层是无机绝缘介质层,供选材料为SiN、Al2O3或Si,上层是低表面应力的聚合物介质层,供选材料为含氟聚合物Cytop或Teflon;上层介质层直接旋涂在下层介质层上,厚度范围为0.7微米至0.9微米。4. A kind of tunable random laser array device based on two-dimensional material as claimed in claim 1, it is characterized in that: described dielectric layer (4) is made up of two layers of dielectric materials, and the lower layer is an inorganic insulating dielectric layer, for The selected material is SiN, Al 2 O 3 or Si, the upper layer is a polymer dielectric layer with low surface stress, and the optional material is fluoropolymer Cytop or Teflon; the upper dielectric layer is directly spin-coated on the lower dielectric layer, and the thickness range is 0.7 microns to 0.9 microns. 5.如权利要求书1所述的一种基于二维材料的可调谐随机激光阵列器件,其特征在于:所述的激光腔室单元(6)包括第一溶剂(61)、第二溶剂(62)、由金属纳米颗粒(63)在第一溶剂(61)和第二溶剂(62)的界面处自组装的金属纳米颗粒薄膜(64)及组装在金属纳米颗粒薄膜表面的二维材料纳米片(65)组成,金属纳米颗粒(63)会与二维材料纳米片(65)形成肖特基接触。金属纳米颗粒(63)的局域表面等离激元共振效应所产生的热电子-空穴对会掺杂至二维材料纳米片(65)并调控二维材料材料纳米片的能带;金属纳米颗粒(63)需要经过表面配体(8)修饰,二维材料纳米片(65)需要经过表面配体(9)修饰,供选材料包括四丁基溴化铵、十六烷基三甲基溴化铵、聚乙烯吡咯酮或羧甲基素纤维钠。5. a kind of tunable random laser array device based on two-dimensional material as claimed in claim 1, is characterized in that: described laser chamber unit (6) comprises the first solvent (61), the second solvent ( 62), the metal nanoparticle film (64) self-assembled by the metal nanoparticle (63) at the interface of the first solvent (61) and the second solvent (62), and the two-dimensional material nanoparticle assembled on the surface of the metal nanoparticle film sheet (65), the metal nanoparticle (63) will form a Schottky contact with the two-dimensional material nanosheet (65). The hot electron-hole pairs generated by the localized surface plasmon resonance effect of metal nanoparticles (63) will be doped into two-dimensional material nanosheets (65) and regulate the energy band of two-dimensional material material nanosheets; metal Nanoparticles (63) need to be modified by surface ligands (8), and two-dimensional material nanosheets (65) need to be modified by surface ligands (9). Optional materials include tetrabutylammonium bromide, hexadecyltrimethyl ammonium bromide, polyvinylpyrrolidone, or sodium carboxymethylcellulose. 6.如权利要求书5所述的一种基于二维材料的可调谐随机激光阵列器件,其特征在于:所述的所述的第一溶剂(61)供选材料为水或盐水的极性液体,表面应力范围为50~90dynes/cm;第二溶剂(62)供选材料为烷、烃或醇,其表面应力范围为20~40dynes/cm,第二溶剂(62)不溶于或微溶于第一溶剂(61)。6. A kind of tunable random laser array device based on two-dimensional material as claimed in claim 5, characterized in that: said first solvent (61) can be selected from the polarity of water or saline liquid, the surface stress range is 50-90 dynes/cm; the second solvent (62) can be selected from alkanes, hydrocarbons or alcohols, and the surface stress range is 20-40 dynes/cm, and the second solvent (62) is insoluble or slightly soluble in the first solvent (61). 7.如权利要求书5所述的一种基于二维材料的可调谐随机激光阵列器件,其特征在于:所述的金属纳米颗粒(63)供选材料为金、银、铜或是所述金属的复合材料,形貌为纳米棒、纳米球、纳米锥或纳米核壳结构,尺寸范围为几十纳米至几百纳米。7. A kind of tunable random laser array device based on two-dimensional materials as claimed in claim 5, characterized in that: the metal nanoparticle (63) optional material is gold, silver, copper or the The metal composite material has the shape of nanorod, nanosphere, nanocone or nanocore-shell structure, and the size ranges from tens of nanometers to hundreds of nanometers. 8.如权利要求书5所述的一种基于二维材料的可调谐随机激光阵列器件,其特征在于:所述的金属纳米颗粒薄膜(64)自组装在第一溶剂(61)和第二溶剂(62)的界面处,金属纳米颗粒薄膜(64)的局域表面等离激元共振峰为可见光至近红外波段;自组装前,金属纳米颗粒(63)需经过特定的表面配体(8)进行表面修饰。8. A kind of tunable random laser array device based on two-dimensional materials as claimed in claim 5, characterized in that: the metal nanoparticle film (64) self-assembles in the first solvent (61) and the second At the interface of the solvent (62), the localized surface plasmon resonance peak of the metal nanoparticle film (64) is in the visible to near-infrared band; before self-assembly, the metal nanoparticle (63) needs to pass through a specific surface ligand (8 ) for surface modification. 9.如权利要求书5所述的一种基于二维材料的可调谐随机激光阵列器件,其特征在于:所述的二维材料纳米片(65)经过表面配体(9)进行修饰后自组装在第一溶剂(61)和第二溶剂(62)的界面处;所述二维材料纳米片(65)供选材料为石墨烯、六方氮化硼h-BN、二硫化钼、二硫化钨、二硫化铪或二硒化铪;尺寸范围为几十纳米至几十微米,厚度为一层至数十层,禁带宽度位于可见光至近红外波段。9. A kind of tunable random laser array device based on two-dimensional material as claimed in claim 5, characterized in that: said two-dimensional material nanosheet (65) is modified by surface ligands (9) to automatically Assembled at the interface of the first solvent (61) and the second solvent (62); the optional material of the two-dimensional material nanosheet (65) is graphene, hexagonal boron nitride h-BN, molybdenum disulfide, disulfide Tungsten, hafnium disulfide or hafnium diselenide; the size ranges from tens of nanometers to tens of microns, the thickness is from one layer to dozens of layers, and the band gap is in the visible to near-infrared band. 10.如权利要求书1所述的一种基于二维材料的可调谐随机激光阵列器件,其特征在于:所述的外围驱动电路(7)用于控制激光腔室单元的工作电压,进而控制第二溶剂(62)所形成液滴的疏水角。10. A kind of tunable random laser array device based on two-dimensional materials as claimed in claim 1, characterized in that: the peripheral drive circuit (7) is used to control the operating voltage of the laser chamber unit, and then control The hydrophobic angle of the droplet formed by the second solvent (62).
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