CN106872770B - The pattern discrimination and test device of Sheet beam klystron resonant cavity - Google Patents
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Abstract
本发明公开了一种带状注速调管谐振腔的模式判别和测试装置,包括两个腔体盖板、一个塞块、一个扰动探针、两个同轴探针和矢量网络分析仪;所述两个腔体盖板拼合形成主体结构,在主体结构中形成有谐振腔、电子注漂移通道和槽道;所述塞块插入所述槽道内;所述塞块上开有贯通的圆槽;所述扰动探针通过所述圆槽旋入塞块内部,并进入所述谐振腔,用于使谐振腔的模式频率发生偏移;所述两个同轴探针分别从两端靠近谐振腔的最外侧直波导间隙的边缘,用于激励和探测所述谐振腔内的模式场;所述矢量网络分析仪与所述同轴探针通过电缆连接,用于测试和分析所述谐振腔的频率响应特性。本发明装置能够对高频率多间隙谐振腔的模式进行有效判别和测量。
The invention discloses a mode discrimination and testing device for a resonant cavity of a belt-shaped klystron tube, comprising two cavity cover plates, a plug, a disturbance probe, two coaxial probes and a vector network analyzer; The two cavity cover plates are assembled to form a main structure, and a resonant cavity, an electron injection drift channel and a channel are formed in the main structure; the plug block is inserted into the groove; a through circle is formed on the plug block slot; the perturbation probe is screwed into the plug block through the circular slot, and enters the resonant cavity, so as to shift the mode frequency of the resonant cavity; the two coaxial probes approach from two ends respectively The edge of the outermost straight waveguide gap of the resonant cavity is used to excite and detect the mode field in the resonant cavity; the vector network analyzer is connected to the coaxial probe through a cable for testing and analyzing the resonance The frequency response characteristics of the cavity. The device of the invention can effectively discriminate and measure the mode of the high-frequency multi-gap resonant cavity.
Description
技术领域technical field
本发明涉及毫米波及亚毫米波电真空器件技术领域,适用于对几何尺寸较小的平面结构多间隙谐振腔进行工作模式判别和特性参数冷测。The invention relates to the technical field of millimeter-wave and submillimeter-wave electric vacuum devices, and is suitable for working mode discrimination and characteristic parameter cold measurement of a planar structure multi-gap resonant cavity with a smaller geometric size.
背景技术Background technique
速调管作为一种高功率、高增益和高效率的微波和毫米波放大器件,同时还具有工作稳定可靠和长寿命的特点,这使其在科学研究、国防建设和工业领域获得了广泛的应用。20世纪40年代到70年代初是高功率单注速调管发展最快的时期,具有代表性的成就是研制出了扩展互作用速调管及行波速调管,在这一阶段速调管的功率、效率和带宽都获得了显著提高。与此同时,为了进一步满足雷达和通信系统的使用要求,在降低工作电压的前提下,使速调管能够更加有效地兼顾功率、效率和频带特性,从20 世纪60年代开始,苏联科学家开始尝试研制多注速调管并首先取得了成功。目前,覆盖L至Ka波段的多注速调管已经应用于各类移动射频电子系统中。As a high-power, high-gain and high-efficiency microwave and millimeter-wave amplifier, the klystron also has the characteristics of stable and reliable operation and long life, which makes it widely used in scientific research, national defense construction and industry. application. From the 1940s to the early 1970s, the development of high-power single-injection klystrons was the fastest. The representative achievements were the development of extended interaction klystrons and traveling wave klystrons. The power, efficiency and bandwidth have been significantly improved. At the same time, in order to further meet the use requirements of radar and communication systems, under the premise of reducing the working voltage, the klystron can more effectively take into account the power, efficiency and frequency band characteristics. Since the 1960s, Soviet scientists began to try The multi-injection klystron was developed and succeeded first. At present, multi-injection klystrons covering the L to Ka band have been used in various mobile RF electronic systems.
20世纪90年代以来,随着计算机三维仿真技术和精密微细加工能力的不断发展,突破传统的轴对称圆形电子光学系统,研制基于非轴对称带状注束流的速调管成为可能。这种速调管可适用于从L波段至G波段的窄带高功率应用场合,如粒子加速器、高功率微波武器和动态核极化增强的核磁共振谱仪。带状注速调管的主要优点为:1)互作用电路的表面积较大,器件散热容易、功率容量大;2)高频电路为整体式的平面结构,易于实现高精度的精密加工和装配焊接,尤其是在毫米波和亚毫米波频段具有优势 (可使用LIGA等平面加工手段)。为提高互作用效率,带状注速调管的高频电路通常由多个串列的平面多间隙谐振腔组成,与传统速调管中的圆柱重入式谐振腔不同,前者往往工作于高次模且相邻模式的间隔较小。因此,在带状注速调管腔体冷测过程中,能否准确地对腔体中的工作模式和非工作模式进行区分,将是影响制管成功与否的关键因素。Since the 1990s, with the continuous development of computer three-dimensional simulation technology and precision microfabrication capabilities, it has become possible to break through the traditional axisymmetric circular electron optical system and develop a klystron based on non-axisymmetric ribbon beam injection. This klystron is suitable for narrow-band high-power applications from L-band to G-band, such as particle accelerators, high-power microwave weapons, and nuclear magnetic resonance spectrometers with enhanced dynamic nuclear polarization. The main advantages of the strip klystron are: 1) The surface area of the interaction circuit is large, the device is easy to dissipate heat, and the power capacity is large; 2) The high-frequency circuit is an integral plane structure, which is easy to achieve high-precision precision machining and assembly. Soldering, especially in the millimeter-wave and submillimeter-wave frequency bands, has advantages (planar processing methods such as LIGA can be used). In order to improve the interaction efficiency, the high-frequency circuit of the strip klystron is usually composed of multiple plane multi-gap resonator cavities in series. secondary mode and the interval between adjacent modes is small. Therefore, whether the working mode and non-working mode in the cavity can be accurately distinguished in the process of cold measurement of the cavity of the strip injection speed regulating tube will be a key factor affecting the success of tube making.
美国阿贡国家实验室(Argonne National Laboratory,ANL)的研究人员在1997年发表的论文(Microwave Cold Tests of Planar RF Cavities,J.Chen, T.Lee,and D.Yu,Proceedings of the 1997 Particle Accelerator Conference, vol.3,pp.3120-3122)中描述了一种对X波段哑铃形谐振腔进行冷测的结构方案,参考图1。按文中所述,在腔体外壁开孔伸入小的电流环E1,依靠改变电流环平面与z轴(沿电子注运动方向)的夹角可激励起不同的TM或 TE模。电流环E1通过同轴电缆E2与矢量网络分析仪5连接,经单端口扫描所得频率响应曲线上的各个尖峰即与各模式的谐振频率相对应。A paper published in 1997 by researchers at Argonne National Laboratory (ANL) in the United States (Microwave Cold Tests of Planar RF Cavities, J. Chen, T. Lee, and D. Yu, Proceedings of the 1997 Particle Accelerator Conference, vol. 3, pp. 3120-3122) describes a structural solution for cold measurement of X-band dumbbell-shaped resonators, referring to FIG. 1 . According to the text, a small current loop E1 is inserted into the outer wall of the cavity, and different TM or TE modes can be excited by changing the angle between the plane of the current loop and the z-axis (along the electron injection movement direction). The current loop E1 is connected to the vector network analyzer 5 through the coaxial cable E2, and each peak on the frequency response curve obtained by single-port scanning corresponds to the resonant frequency of each mode.
上述已有技术方案存在的缺陷主要包括下列三方面。第一,该方法仅能对谐振频率较低、中部尺寸较大的单间隙谐振腔进行测量,此时腔体中部间隙的宽度(沿z轴)和高度(沿y轴)较大,因而有足够的空间容纳位于同轴线端部的电流环,而且电流环的引入不会对间隙电场的分布和模式频率造成过大的扰动。但在毫米波和亚毫米波频段,随着工作频率的持续上升,腔体尺寸也将不断减小,如在W波段,腔体间隙宽度(沿z轴)通常小于 1mm,腔体间隙高度(沿y轴)通常小于2mm,此时,采用电流环激励的方法不具有可行性。其次,采用在谐振腔中部设置电流环激励工作模式的方法,尽管对单间隙谐振腔而言比较有效,但由于单一电流环无法同时激励二个及以上的间隙,因此对多间隙谐振腔的测试效果较差。再者,该方案仅仅考虑了对已加工成形的腔体模式频率进行测量,对工作模式与非工作模式的判别仅依靠与仿真结果的对比来实现,这在实际的高频段冷测过程中是有局限性的(伪模和错误的测量信号会对模式判别造成干扰)。The defects of the above-mentioned prior art solutions mainly include the following three aspects. First, this method can only measure single-gap resonators with low resonant frequency and large central size. There is enough space to accommodate the current loop at the end of the coaxial line, and the introduction of the current loop will not cause excessive disturbance to the distribution and mode frequency of the gap electric field. However, in the millimeter wave and submillimeter wave frequency bands, as the operating frequency continues to rise, the cavity size will also continue to decrease. For example, in the W band, the cavity gap width (along the z-axis) is usually less than 1mm, and the cavity gap height ( along the y-axis) is usually less than 2mm, at this time, the method of using the current loop excitation is not feasible. Secondly, the method of setting a current loop in the middle of the resonator to excite the working mode is effective for single-gap resonators, but because a single current loop cannot excite two or more gaps at the same time, it is necessary to test the multi-gap resonator. less effective. Furthermore, this scheme only considers the measurement of the frequency of the cavity mode that has been processed, and the discrimination between the working mode and the non-working mode is only realized by the comparison with the simulation results, which is an important factor in the actual high-frequency cold measurement process. Limited (pseudo-modes and erroneous measurement signals can interfere with mode discrimination).
发明内容SUMMARY OF THE INVENTION
(一)要解决的技术问题(1) Technical problems to be solved
基于以上问题,本发明的主要目的在于提出一种带状注速调管谐振腔的模式判别和测试装置,以解决上述技术问题中的至少之一。Based on the above problems, the main purpose of the present invention is to provide a mode discrimination and testing device for the resonant cavity of a strip klystron tube, so as to solve at least one of the above technical problems.
(二)技术方案(2) Technical solutions
本发明的技术方案如下:The technical scheme of the present invention is as follows:
本发明提供了一种带状注速调管谐振腔的模式判别和测试装置,包括两个腔体盖板、一个塞块、一个扰动探针、两个同轴探针和矢量网络分析仪;所述两个腔体盖板拼合形成主体结构,所述主体结构中形成有谐振腔、电子注漂移通道和槽道;所述谐振腔包括两侧空腔、和连接两侧空腔的至少一个直波导间隙;所述电子注漂移通道沿垂直于所述直波导间隙方向贯穿所述谐振腔,形成矩形通道;所述槽道的第一端面与所述谐振腔的两侧空腔其中之一相连通,所述槽道的第二端面延伸至所述腔体盖板的端部;所述塞块从所述槽道的第二端面插入所述槽道内,并到达所述槽道的第一端面;所述塞块开有贯通的圆槽;所述扰动探针通过所述圆槽旋入塞块内部,并进入所述谐振腔,用于使模式频率发生偏移;所述两个同轴探针分别从所述电子注漂移通道的两端伸入,靠近所述谐振腔的最外侧直波导间隙的边缘,用于激励和探测所述谐振腔内的模式场;所述同轴探针外径尺寸小于所述电子注漂移通道的窄边高度;所述矢量网络分析仪与所述同轴探针通过电缆连接,用于测试和分析所述谐振腔的频率响应特性。The invention provides a mode discrimination and testing device for the resonant cavity of a belt-shaped klystron tube, comprising two cavity cover plates, a plug, a disturbance probe, two coaxial probes and a vector network analyzer; The two cavity cover plates are assembled to form a main structure, and a resonant cavity, an electron injection drift channel and a channel are formed in the main structure; the resonant cavity includes two cavities and at least one connecting the two cavities. a straight waveguide gap; the electron injection and drift channel runs through the resonant cavity in a direction perpendicular to the straight waveguide gap to form a rectangular channel; the first end face of the channel and one of the cavities on both sides of the resonant cavity The second end surface of the channel extends to the end of the cavity cover plate; the plug block is inserted into the channel from the second end surface of the channel, and reaches the first end of the channel. one end face; the plug block has a through circular groove; the disturbance probe is screwed into the plug block through the circular groove and enters the resonant cavity for shifting the mode frequency; the two Coaxial probes respectively protrude from both ends of the electron injection drift channel, and are close to the edge of the outermost straight waveguide gap of the resonant cavity, and are used to excite and detect the mode field in the resonant cavity; the coaxial probe The outer diameter of the probe is smaller than the height of the narrow side of the electron injection drift channel; the vector network analyzer is connected with the coaxial probe through a cable for testing and analyzing the frequency response characteristics of the resonant cavity.
所述腔体盖板和塞块由无氧铜材料制成。所述塞块到达槽道的第一端面的一端用于密封所述槽道的第一端面;所述塞块的圆槽从外到内依次包括螺纹孔、圆孔、锥形孔和探针孔,所有螺纹孔、圆孔、锥形孔和探针孔位于同一轴线上;所述扰动探针依次包括螺杆、圆杆、锥形段和微细探针;所述扰动探针的螺杆、圆杆、锥形段和微细探针依次与所述螺纹孔、圆孔、锥形孔和探针孔相配合,使所述扰动探针依次通过所述螺纹孔、圆孔、锥形孔和探针孔进入所述谐振腔。所述扰动探针的端部开有一字槽,用于旋动所述扰动探针的螺杆在所述塞块的螺纹孔内运动。所述微细探针直径不大于0.2mm。所述微细探针能够从零连续地进入到所述谐振腔内一定的位置处。所述同轴探针包括金属圆柱壳体、介质绝缘层和金属丝,所述金属丝位于中心位置,其外层依次同心地包裹介质绝缘层和金属圆柱壳体;所述金属丝的端部伸出所述介质绝缘层和所述金属圆柱壳体。所述同轴探针的金属壳体外表面覆盖绝缘材料。The cavity cover plate and the plug block are made of oxygen-free copper material. One end of the plug block reaching the first end face of the channel is used to seal the first end face of the channel; the circular groove of the plug block sequentially includes a threaded hole, a circular hole, a tapered hole and a probe from outside to inside holes, all threaded holes, round holes, tapered holes and probe holes are located on the same axis; the disturbance probe sequentially includes a screw rod, a round rod, a tapered section and a fine probe; the screw rod, circular The rod, the tapered section and the fine probe are matched with the threaded hole, the circular hole, the tapered hole and the probe hole in sequence, so that the disturbance probe passes through the threaded hole, the circular hole, the tapered hole and the probe hole in sequence. A pinhole enters the resonant cavity. A slot is formed at the end of the disturbance probe, and the screw used for rotating the disturbance probe moves in the threaded hole of the plug block. The diameter of the micro-probe is not more than 0.2 mm. The micro-probe can continuously enter from zero to a certain position within the resonant cavity. The coaxial probe includes a metal cylindrical shell, a dielectric insulating layer and a metal wire, the metal wire is located at the center position, and its outer layer concentrically wraps the dielectric insulating layer and the metal cylindrical shell in turn; the end of the metal wire is Protruding from the dielectric insulating layer and the metal cylindrical shell. The outer surface of the metal shell of the coaxial probe is covered with insulating material.
(三)有益效果(3) Beneficial effects
(1)本发明对平面单间隙或多间隙谐振腔中模式场的激励和探测由微细的半刚性同轴探针实现,该方法简单可靠,只要能保证涂覆绝缘层后的同轴探针外径小于电子注漂移通道的窄边高度(沿y向)即可。相对而言,在谐振腔间隙内放置电流环受到间隙尺寸的较大限制,在工作于毫米波及更高频段的腔体中难以应用。此外,对于多间隙腔而言,仅在中部单一间隙内放置电流环的方法可能无法有效激励起工作模式,而在漂移通道两端同时放置同轴探针的方法,则可有效地激励起具有轴向电场分量的各个腔模。(1) The excitation and detection of the mode field in the plane single-gap or multi-gap resonant cavity of the present invention is realized by a fine semi-rigid coaxial probe. The method is simple and reliable, as long as the coaxial probe after coating the insulating layer can be guaranteed The outer diameter may be smaller than the height (along the y direction) of the narrow side of the electron injection drift channel. Relatively speaking, placing the current loop in the cavity gap is greatly limited by the size of the gap, making it difficult to apply in cavities operating in millimeter-wave and higher frequency bands. In addition, for multi-gap cavities, the method of placing the current loop only in a single gap in the middle may not be able to effectively excite the working mode, while the method of placing coaxial probes at both ends of the drift channel can effectively excite the working mode. The individual cavity modes of the axial electric field component.
(2)本发明中完整的腔体结构由上、下两块结构相同的腔体盖板拼合而成,仅在谐振腔一侧将空腔与槽道连通,在冷测时插入槽内的塞块端面作为侧壁将空腔封堵起来形成环绕电子注通道的闭合结构。考虑到实际的管体高频结构中,也需要预留该位置以焊接调谐膜片,因此,与现有方案必须在腔体间隙上部开孔穿入电流环的方法相比,本方案在冷测过程中不需要额外地在腔体上开孔,这简化了工艺过程并避免了后续封堵孔洞可能引起的频率变化。(2) The complete cavity structure in the present invention is composed of two upper and lower cavity cover plates with the same structure, and the cavity is connected with the channel only on one side of the resonant cavity. The end face of the plug block acts as a side wall to seal the cavity to form a closed structure surrounding the electron injection channel. Considering that in the actual high-frequency structure of the tube body, it is also necessary to reserve this position for welding the tuning diaphragm. Therefore, compared with the existing solution, which must open holes in the upper part of the cavity gap to penetrate the current loop, this solution has a low temperature and low cost. During the measurement process, there is no need to open additional holes on the cavity, which simplifies the process and avoids frequency changes that may be caused by subsequent plugging of the holes.
(3)本发明通过由谐振腔的空腔侧壁伸入间隙内部的金属细针,对间隙中的电场进行扰动,根据双端口传输曲线上各个尖峰的频率变化情况,结合理论和仿真分析结果可以准确地从中分辨出与工作模式相对应的尖峰,为后续有针对性地对腔体内部尺寸进行微调提供实验依据,使得实际腔体的频率满足设计要求。由于多间隙谐振腔中的模式较多,同时还存在难以避免的外部干扰,因此,实测S参数曲线上的尖峰较多,单纯将矢量网络分析仪的测量值与仿真结果相比较不足以排除非工作模式和其它干扰,而本方案使用扰动探针的方法有效地解决了这一问题。(3) The present invention perturbs the electric field in the gap through the metal thin needle extending into the gap from the cavity side wall of the resonant cavity. According to the frequency change of each peak on the dual-port transmission curve, combined with theoretical and simulation analysis results The peak corresponding to the working mode can be accurately distinguished from it, which provides an experimental basis for the subsequent fine-tuning of the internal dimensions of the cavity, so that the frequency of the actual cavity meets the design requirements. Due to the large number of modes in the multi-gap resonator and the unavoidable external interference, there are many spikes on the measured S-parameter curve, and simply comparing the measured values of the vector network analyzer with the simulation results is not enough to rule out the working mode and other disturbances, and the method of using perturbation probes in this scheme effectively solves this problem.
附图说明Description of drawings
图1为现有技术带状注速调管哑铃形单间隙谐振腔冷测装置的示意图;Fig. 1 is the schematic diagram of the prior art band-shaped klystron dumbbell-shaped single-gap resonant cavity cold measuring device;
图2为本发明一实施例的带状注速调管平面多间隙谐振腔冷测装置的示意图;FIG. 2 is a schematic diagram of a cold measurement device for a flat multi-gap resonant cavity of a strip klystron tube according to an embodiment of the present invention;
图3a为图2中所示腔体盖板的三维结构示意图;Fig. 3a is a three-dimensional structural schematic diagram of the cavity cover plate shown in Fig. 2;
图3b为图3a中所示腔体盖板的多间隙谐振腔区域的局部放大视图;Fig. 3b is a partial enlarged view of the multi-gap resonant cavity region of the cavity cover plate shown in Fig. 3a;
图4a为图2中所示塞块的三维外观及内部结构示意图;Figure 4a is a schematic diagram of the three-dimensional appearance and internal structure of the plug shown in Figure 2;
图4b为图4a中所示塞块的xy截面剖视图;Figure 4b is an xy cross-sectional view of the plug shown in Figure 4a;
图5为图2中所示扰动探针的三维结构示意图;Fig. 5 is the three-dimensional structure schematic diagram of the perturbation probe shown in Fig. 2;
图6为图2中所示同轴探针的外观及局部剖视图;Fig. 6 is the appearance and partial sectional view of the coaxial probe shown in Fig. 2;
图7为仿真得到的如图2所示平面多间隙谐振腔中插入扰动探针后的电场矢量分布;Fig. 7 is the electric field vector distribution obtained by simulation after the disturbance probe is inserted into the planar multi-gap resonator shown in Fig. 2;
图8为仿真得到的如图2中所示对平面多间隙谐振腔冷测时的双端口传输曲线。FIG. 8 is a dual-port transmission curve obtained by simulation when the planar multi-gap resonator is cold measured as shown in FIG. 2 .
具体实施方式Detailed ways
为使本发明的目的、技术方案和优点更加清楚明白,以下结合具体实施例,并参照附图,对本发明作进一步的详细说明。In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
图2是本发明一实施例的带状注速调管中平面多间隙谐振腔模式判别和测试的装置。如图2所示,一实施例的装置包括腔体盖板1(两件,图2 中另一件未绘出)、塞块2、扰动探针3、同轴探针41和42,其中同轴探针41和42为半刚性,分别通过波导同轴转换器和电缆与矢量网络分析仪 5相连。实际中,由两件内部结构完全相同的腔体盖板1拼合形成主体结构,在该主体结构中形成谐振腔、电子注漂移通道和位于谐振腔一侧的矩形槽道15。扰动探针3通过螺孔旋入塞块2内部,塞块2插入由两件腔体盖板1对合组成的被测试结构的矩形槽道15内,并在外部端面使用螺钉固定压紧。同轴探针41和42分别从谐振腔两侧的漂移通道内伸入,靠近谐振腔最外侧直波导间隙的边缘,作为激励和接收的同轴探针(二者可以互换)测量谐振腔的频率响应特性,例如S参数。为保证良好的导电性,腔体盖板1和塞块2由无氧铜材料制成。图2中所示的平面三间隙谐振腔与实际带状注速调管高频结构的谐振腔相对应。需要说明的是,实际器件的高频电路往往包含更多个谐振腔,而且各谐振腔的直波导间隙数也可能多于三个,这里为清晰起见,只绘出了一个包含三个直波导间隙的谐振腔的结构,即三间隙谐振腔。另外,谐振腔的直波导间隙数也可以是一个,此时的谐振腔就是单间隙谐振腔。对单间隙、或者具有两个及以上多个直波导间隙的谐振腔的高频结构进行冷测时,原理及装置与下文中所述相同。矩形槽道15的第一端面与谐振腔的两侧空腔其中之一相连通,矩形槽道 15的第二端面延伸至腔体盖板1的端部;电子注漂移通道沿垂直于直波导间隙方向贯穿谐振腔,形成矩形通道。其中矩形槽道15的第一端面是指矩形槽道15与谐振腔的两侧空腔其中之一相连通的交接处。FIG. 2 is an apparatus for discriminating and testing the mode of the planar multi-gap resonant cavity in the strip klystron according to an embodiment of the present invention. As shown in FIG. 2 , the device of one embodiment includes a cavity cover 1 (two pieces, the other piece is not shown in FIG. 2 ), a plug 2 , a disturbance probe 3 , and coaxial probes 41 and 42 , wherein The coaxial probes 41 and 42 are semi-rigid and are connected to the vector network analyzer 5 through waveguide coaxial converters and cables, respectively. In practice, two pieces of cavity cover plates 1 with identical internal structures are assembled to form a main structure, in which a resonant cavity, an electron injection drift channel and a rectangular channel 15 located on one side of the resonant cavity are formed. The disturbance probe 3 is screwed into the plug block 2 through the screw hole, and the plug block 2 is inserted into the rectangular channel 15 of the tested structure formed by the combination of two cavity cover plates 1, and is fixed and pressed on the external end face with screws. Coaxial probes 41 and 42 respectively protrude from the drift channels on both sides of the resonator, and are close to the edge of the outermost straight waveguide gap of the resonator. They are used as excitation and reception coaxial probes (the two can be interchanged) to measure the resonator. frequency response characteristics, such as S-parameters. In order to ensure good electrical conductivity, the cavity cover plate 1 and the plug block 2 are made of oxygen-free copper material. The planar three-gap resonator shown in Fig. 2 corresponds to the resonator of the high frequency structure of the actual strip klystron. It should be noted that the high-frequency circuit of the actual device often contains more resonant cavities, and the number of straight waveguide gaps in each resonant cavity may also be more than three. For the sake of clarity, only one containing three straight waveguides is drawn. The structure of the resonant cavity of the gap, that is, the three-gap resonant cavity. In addition, the number of straight waveguide gaps of the resonant cavity may also be one, and the resonant cavity in this case is a single-gap resonant cavity. The principle and device are the same as those described below when cold testing is performed on a high-frequency structure of a single gap or a resonant cavity with two or more straight waveguide gaps. The first end face of the rectangular channel 15 is communicated with one of the cavities on both sides of the resonant cavity, and the second end face of the rectangular channel 15 extends to the end of the cavity cover plate 1; the electron injection drift channel is perpendicular to the straight waveguide. The direction of the gap runs through the resonant cavity, forming a rectangular channel. The first end face of the rectangular channel 15 refers to the junction where the rectangular channel 15 communicates with one of the cavities on both sides of the resonant cavity.
如图3a和图3b所示,将两块相同的腔体盖板1对合起来就构成了平面多间隙谐振腔,下面对腔体盖板1的内部结构(相当于二分之一的完整腔体)进行说明。11为沿电子注运动方向(z方向)的矩形漂移通道,它贯穿平面多间隙谐振腔。12和13为谐振腔两侧较大的空腔结构,二者的形状和尺寸完全相同,谐振腔的腔体一侧的空腔13与矩形槽道15相邻接,塞块 2插入矩形槽道15并与矩形槽道15的第一端面抵紧后,即形成封闭空腔 13的侧壁。直波导间隙14连接谐振腔中两侧空腔12和13,直波导间隙 14的宽度和相邻直波导间隙14之间的周期长度取决于速调管的工作参数。螺孔16中可旋入螺钉,用于将塞块2压紧在腔体结构上,确保塞块2 的达到矩形槽道15的第一端面的一端与矩形槽道15的第一端面相紧贴,密封矩形槽道15的第一端面,从而将谐振腔封堵起来形成环绕电子注通道的闭合结构,有效降低损耗提高腔体参数的测量精度。塞块2上除与矩形槽道15的第一端面相接的端面外,并不要求其余四个面与槽道的四个面严格地紧密接触,二者滑配即可。As shown in Figure 3a and Figure 3b, two identical cavity cover plates 1 are combined to form a planar multi-gap resonant cavity, and the internal structure of the cavity cover plate 1 (equivalent to one-half complete cavity) are described. 11 is a rectangular drift channel along the electron injection movement direction (z direction), which runs through the planar multi-gap resonator. 12 and 13 are larger cavity structures on both sides of the resonant cavity, and the shape and size of the two are exactly the same. The cavity 13 on the cavity side of the resonant cavity is adjacent to the rectangular channel 15, and the plug block 2 is inserted into the rectangular groove. After the channel 15 is pressed against the first end surface of the rectangular channel 15 , the side wall of the closed cavity 13 is formed. A straight waveguide gap 14 connects the cavities 12 and 13 on both sides of the resonator. The width of the straight waveguide gap 14 and the period length between adjacent straight waveguide gaps 14 depend on the operating parameters of the klystron. Screws can be screwed into the screw holes 16 to press the plug block 2 on the cavity structure to ensure that the end of the plug block 2 that reaches the first end face of the rectangular channel 15 is tightly connected to the first end face of the rectangular channel 15 affixed to seal the first end face of the rectangular channel 15, thereby sealing the resonant cavity to form a closed structure surrounding the electron injection channel, effectively reducing the loss and improving the measurement accuracy of the cavity parameters. Except for the end face of the plug block 2 that is in contact with the first end face of the rectangular channel 15, the other four faces are not required to be in strict and close contact with the four faces of the groove, and the two can be slidably matched.
上述哑铃形的平面多间隙谐振腔的工作原理可简述如下。如设f1为中间直波导的基模截止频率,f2为两端矩形腔(两侧的空腔结构)的基模谐振频率,则当f1>f2时,中间直波导处于截止状态,哑铃形谐振腔实际上成为两个分离的矩形谐振腔,此时腔体中电场Ez分量沿着x方向的分布为中间低、两端高的状态。但是当f1<f2时,中间直波导处于导通状态,此时哑铃形谐振腔可以近似为普通的矩形腔(相当于中间直波导的两端封闭),因此腔体中电场Ez分量沿着x方向的分布为中间高、两端低的状态。于是,可以预期对于f1≈f2的临界状态,谐振腔的直波导间隙中的Ez场量沿x方向的分布将是接近均匀的,这对应所要求的腔体工作状态。The working principle of the above-mentioned dumbbell-shaped planar multi-gap resonator can be briefly described as follows. If f 1 is the cut-off frequency of the fundamental mode of the intermediate straight waveguide, and f 2 is the fundamental mode resonance frequency of the rectangular cavity at both ends (cavity structures on both sides), then when f 1 >f 2 , the intermediate straight waveguide is in the cut-off state , the dumbbell-shaped resonator actually becomes two separated rectangular resonators. At this time, the distribution of the electric field Ez component in the cavity along the x direction is low in the middle and high at both ends. However, when f 1 <f 2 , the intermediate straight waveguide is in a conducting state, and the dumbbell-shaped resonator can be approximated as an ordinary rectangular cavity (equivalent to the two ends of the intermediate straight waveguide being closed), so the E z component of the electric field in the cavity The distribution along the x-direction is high in the middle and low at both ends. Thus, it can be expected that for the critical state of f 1 ≈ f 2 , the distribution of the E z field quantities in the straight waveguide gap of the resonator along the x direction will be nearly uniform, which corresponds to the required cavity operating state.
如图4a和图4b所示,塞块2为内部开孔的′T′形结构,矩形块21 插入腔体盖板1的矩形槽道15中,二者的尺寸紧密配合;在塞块2的端部22上对称地开有两个通孔24,在将塞块2的矩形块21滑配插入腔体盖板1的矩形槽道15中之后,通孔24能够与腔体盖板1上的螺孔16对正,这时可使用一定长度的螺钉穿过通孔24旋入螺孔16内,除了起到将塞块2固定在腔体盖板1上的作用外,更重要的是保证矩形块21的端部与矩形槽道15的底面贴紧,以确保二者实现良好的表面接触;此外,塞块2的中部开有贯通的圆槽23与扰动探针3相配合。As shown in Figures 4a and 4b, the plug block 2 is a 'T'-shaped structure with an internal opening, the rectangular block 21 is inserted into the rectangular channel 15 of the cavity cover 1, and the dimensions of the two closely match; Two through holes 24 are symmetrically opened on the end 22 of the cavity cover 1. After the rectangular block 21 of the plug block 2 is slidably inserted into the rectangular channel 15 of the cavity cover plate 1, the through holes 24 can be connected with the cavity cover plate 1. The screw holes 16 are aligned, and a certain length of screws can be used to pass through the through holes 24 and screw them into the screw holes 16. In addition to the function of fixing the plug block 2 on the cavity cover 1, more important It is to ensure that the end of the rectangular block 21 is in close contact with the bottom surface of the rectangular channel 15 to ensure good surface contact between the two;
如图4b和图5所示,在塞块2内部贯通的圆槽23依次包括螺纹孔231、圆孔232、锥形孔233和探针孔234,所有这些结构必须严格位于同一轴线上,并且要求轴线与矩形块21的端面垂直;相应地,扰动探针3依次包含螺杆31、圆杆32、锥形段33和微细探针34,依次与塞块2内部231-234 的特征相配合,此外,在扰动探针3的端部开有一字槽35,用于旋动扰动探针3在螺纹孔231内运动。在结构方面,扰动探针3上圆杆32的外径应小于塞块2中的螺纹孔231的内径,同时要略小于圆孔232的内径;扰动探针3上锥形段33的锥角略小于塞块2中锥形孔233的锥角,同时微细探针34的外径略小于探针孔234的内径。考虑到微细探针34的直径通常不大于0.2mm,因此,塞块2中的锥形孔233起到引导微细探针34顺利穿入探针孔234中的作用,这样可以避免突变结构造成微细探针34折断的问题。塞块2中的探针孔234应具有一定的长度,起到对微细探针34 进行限位和导向的作用,确保其沿着垂直于矩形块21端面的方向进入腔体内。合理设置扰动探针3所包含螺杆31、圆杆32、锥形段33和微细探针34的长度,保证在螺杆31的有效行程内,微细探针34能够从矩形块 21的端面开始从零连续地进入到腔体内一定的位置处。As shown in Figures 4b and 5, the circular groove 23 passing through the inside of the plug block 2 sequentially includes a threaded hole 231, a circular hole 232, a tapered hole 233 and a probe hole 234, all of which must be strictly located on the same axis, and The axis is required to be perpendicular to the end face of the rectangular block 21; accordingly, the disturbance probe 3 sequentially includes a screw 31, a round rod 32, a tapered section 33 and a fine probe 34, which are in turn matched with the features 231-234 inside the plug block 2, In addition, a slot 35 is opened at the end of the disturbance probe 3 for rotating the disturbance probe 3 to move in the threaded hole 231 . In terms of structure, the outer diameter of the round rod 32 on the disturbance probe 3 should be smaller than the inner diameter of the threaded hole 231 in the plug block 2, and at the same time slightly smaller than the inner diameter of the round hole 232; the taper angle of the tapered section 33 on the disturbance probe 3 is slightly It is smaller than the taper angle of the tapered hole 233 in the plug block 2 , and the outer diameter of the fine probe 34 is slightly smaller than the inner diameter of the probe hole 234 . Considering that the diameter of the fine probe 34 is usually not greater than 0.2 mm, the tapered hole 233 in the plug block 2 plays a role in guiding the fine probe 34 to smoothly penetrate into the probe hole 234, so as to avoid the mutation of the structure causing the The problem of broken probe 34. The probe hole 234 in the plug block 2 should have a certain length to limit and guide the fine probe 34 to ensure that it enters the cavity along the direction perpendicular to the end face of the rectangular block 21 . Reasonably set the lengths of the screw 31 , the round rod 32 , the conical section 33 and the fine probe 34 included in the disturbance probe 3 to ensure that within the effective stroke of the screw 31 , the fine probe 34 can start from the end face of the rectangular block 21 from zero Continuously enter a certain position in the cavity.
如图6所示,同轴探针41和42二者的结构完全相同且可以互换,分别用于激励和探测所述谐振腔内的模式场,下面以同轴探针41为例进行说明。同轴探针41由位于外部的金属圆柱壳体411、介质绝缘层412和位于中心的金属丝413组成,金属丝413的端部超出金属圆柱壳体411和介质绝缘层412一定距离,以便更好地激励和接收轴向电场(沿z向,对应工作模式和相邻的轴模)的信号。实际使用中,最好在同轴探针41的金属圆柱壳体411外表面覆盖绝缘材料,此时,同轴探针总的外径尺寸应小于电子注漂移通道的窄边高度(沿y向,参考图2和图3a)。因为电子注漂移通道沿宽边(x向)和窄边(y向)的尺寸不相等,且宽边尺寸远大于窄边,因此当圆形的探针插入漂移通道时,与之冲突的尺寸是窄边高度。同轴探针41和42在工作频段内的驻波比、阻抗和信号衰减应满足使用要求。As shown in FIG. 6 , the coaxial probes 41 and 42 have the same structure and can be interchanged, and are respectively used to excite and detect the mode field in the resonant cavity. The coaxial probe 41 is used as an example for description below. . The coaxial probe 41 is composed of a metal cylindrical shell 411 located outside, a dielectric insulating layer 412 and a metal wire 413 located in the center. The signal of the axial electric field (along the z direction, corresponding to the working mode and the adjacent axial mode) is well excited and received. In actual use, it is better to cover the outer surface of the metal cylindrical shell 411 of the coaxial probe 41 with insulating material. At this time, the total outer diameter of the coaxial probe should be smaller than the narrow side height of the electron injection drift channel (along the y direction). , refer to Figure 2 and Figure 3a). Because the dimensions of the electron injection drift channel along the broad side (x direction) and the narrow side (y direction) are not equal, and the size of the broad side is much larger than the narrow side, when a circular probe is inserted into the drift channel, the conflicting dimensions is the narrow side height. The standing wave ratio, impedance and signal attenuation of the coaxial probes 41 and 42 in the working frequency band should meet the usage requirements.
对谐振腔中的模式进行判别和测量时,所依据的物理原理为:微小金属体将引起局部区域电场和磁场分布的改变,对电场的扰动使得谐振频率降低,对磁场的扰动使得谐振频率升高,实际频率的变化趋势取决于电磁场各分量的强弱、分布以及金属体的形状和大小。如图7所示的仿真结果表明,由平面三间隙腔侧壁伸入中部直波导间隙的扰动探针扰动了其附近的电场分布,但整体而言各直波导间隙中的电场方向仍然保持一致,腔体 2π模式未发生变化。如图8所示,仿真计算给出了冷测装置中由同轴探针测得的S参数曲线,图中的三个尖峰从左至右依次对应2π模、π/2模和π模,其中2π模为所需的工作模式(根据不同的腔体设计,也可选择π模为工作模式)。When discriminating and measuring the modes in the resonant cavity, the physical principle is based on: tiny metal bodies will cause changes in the distribution of electric and magnetic fields in the local area, the disturbance of the electric field will reduce the resonant frequency, and the disturbance of the magnetic field will increase the resonant frequency. If the frequency is high, the variation trend of the actual frequency depends on the strength and distribution of each component of the electromagnetic field, as well as the shape and size of the metal body. The simulation results shown in Fig. 7 show that the perturbation probe that protrudes from the sidewall of the planar three-gap cavity into the central straight waveguide gap disturbs the electric field distribution near it, but the electric field direction in each straight waveguide gap remains consistent as a whole. , the cavity 2π mode does not change. As shown in Figure 8, the simulation calculation gives the S-parameter curve measured by the coaxial probe in the cold test device. The three peaks in the figure correspond to the 2π mode, the π/2 mode and the π mode from left to right. Among them, the 2π mode is the required working mode (according to different cavity designs, the π mode can also be selected as the working mode).
参考图7,理论分析时可认为处于谐振腔直波导间隙中的是近似均匀的平行电场分布(沿z方向),此时金属细针引起腔体谐振频率的变化量δf 与插入深度l(指进入中间直波导间隙的长度)之间有如下的近似关系:Referring to Fig. 7, it can be considered that the parallel electric field distribution (along the z direction) is approximately uniform in the gap between the straight waveguides of the resonant cavity in the theoretical analysis. There is an approximate relationship between the length of the gap into the intermediate straight waveguide) as follows:
式中,f0为未对腔体进行扰动前的谐振频率,形状因子s=d/l,d和l 分别为金属细针的直径和长度,E0为未扰动时腔体中的归一化电场值,满足关系式其中ε0为真空中的介电常数,对电场的积分区域为整个腔体。In the formula, f 0 is the resonant frequency before the cavity is disturbed, the shape factor s=d/l, d and l are the diameter and length of the thin metal needle, respectively, and E 0 is the normalization in the cavity when the cavity is not disturbed The electric field value satisfies the relation where ε 0 is the dielectric constant in vacuum, and the integral region of the electric field is the entire cavity.
在对腔体进行测试的过程中,首先如图2所示,安装好整个测试装置,此时应注意使得扰动探针3恰好位于塞块内部,即只要稍加旋动就会使扰动探针3的微细探针34部分进入谐振腔两侧空腔的其中之一内。之后,移动同轴探针41和42使之从两侧逐渐接近谐振腔最外侧直波导间隙的边缘(可以通过精密移动装置实现),此时通过矢量网络分析仪5可以观察到具有多个尖峰的S12曲线,这些尖峰可能来自于谐振腔腔体内的多个谐振模式或者其它干扰,反复调节同轴探针41或42相对于谐振腔直波导间隙边缘的位置,尽可能地排除掉时有时无且不稳定的干扰信号,找到能够激励和检测到形状和分布稳定的传输曲线时(尖峰所在位置基本固定不变)的同轴探针41或42位置并固定下来。接下来,借助工具旋动扰动探针3的尾部使得其微细探针34进入谐振腔腔体内,根据分析可知微细探针34的扰动仅会引起谐振腔腔体工作模式(2π模或π模)的频率呈现出近似线性降低的变化,于是可据此区分出与工作模式对应的尖峰,在这一过程中,仔细记录扰动探针3旋转的圈数以确定微细探针34进入谐振腔腔体内的长度(如M2螺纹的螺距为0.4mm/圈)。在此基础上,可以指导后续加工时通过局部微调谐振腔腔体的某些尺寸,使得与工作模式对应的尖峰频率满足设计要求。In the process of testing the cavity, first, as shown in Figure 2, install the entire testing device. At this time, care should be taken to make the disturbance probe 3 just inside the plug, that is, as long as the disturbance probe is slightly rotated, the disturbance probe Part 3 of the fine probe 34 enters one of the cavities on both sides of the resonator. After that, move the coaxial probes 41 and 42 to gradually approach the edge of the outermost straight waveguide gap of the resonator from both sides (which can be achieved by a precise moving device), at this time, it can be observed through the vector network analyzer 5 that there are multiple peaks The S12 curve of these peaks may come from multiple resonance modes or other interferences in the cavity of the resonant cavity. Repeatedly adjust the position of the coaxial probe 41 or 42 relative to the edge of the gap between the straight waveguide of the resonator cavity and eliminate it as much as possible. And unstable interference signal, find and fix the position of coaxial probe 41 or 42 when the transmission curve with stable shape and distribution can be excited and detected (the position of the peak is basically fixed). Next, rotate the tail of the probe 3 with the help of a tool to make the fine probe 34 enter the resonator cavity. According to the analysis, the disturbance of the fine probe 34 can only cause the working mode of the resonator cavity (2π mode or π mode). The frequency shows an approximately linearly decreasing change, so the peak corresponding to the working mode can be distinguished accordingly. During this process, the number of revolutions of the perturbation probe 3 is carefully recorded to determine the entry of the fine probe 34 into the cavity of the resonant cavity. Length (for example, the pitch of M2 thread is 0.4mm/circle). On this basis, certain dimensions of the resonator cavity can be fine-tuned locally during subsequent processing, so that the peak frequency corresponding to the working mode can meet the design requirements.
此外,该实施例对各零件和方法的定义并不仅限于本实施例中提到的各种具体结构、形状或方式,本领域普通技术人员可对其进行一定的更改或替换,具体叙述如下。In addition, the definition of each part and method in this embodiment is not limited to various specific structures, shapes or methods mentioned in this embodiment, and those of ordinary skill in the art can make certain changes or substitutions, which are specifically described below.
(1)本发明的装置中仅涉及了速调管中间腔的结构。在速调管的应用中,还需要使用输入、输出腔。一般输入、输出腔是在谐振腔上与槽道15 相对的另一侧上开设耦合口,通过该偶合口与外接波导相连,就形成了具有波导的输入、输出腔。对具有波导的输入、输出腔的测试可使用单端口法,此时可以省去同轴探针41和42,直接通过波导端口连接矢量网络分析仪5,由群时延曲线确定工作模式的频率和外部品质因数。对于外部品质因数较大的非工作模式,由于其能量主要集中在腔体内,因此群时延曲线上的尖峰较少,但仍然会出现由寄生模式或干扰引起的尖峰,这同样需要借助使用前述扰动探针3的扰动法进行判别和排除。(1) Only the structure of the middle cavity of the klystron is involved in the device of the present invention. In klystron applications, input and output cavities are also required. Generally, the input and output cavities are provided with coupling ports on the other side of the resonant cavity opposite to the channel 15, and the coupling ports are connected to the external waveguide to form input and output cavities with waveguides. The single-port method can be used for the test of the input and output cavities with waveguides. At this time, the coaxial probes 41 and 42 can be omitted, and the vector network analyzer 5 can be directly connected through the waveguide ports, and the frequency of the working mode can be determined by the group delay curve. and external quality factor. For the non-operating mode with a large external quality factor, since its energy is mainly concentrated in the cavity, there are fewer spikes on the group delay curve, but there will still be spikes caused by spurious modes or interference, which also requires the use of the aforementioned The perturbation method of perturbation probe 3 is used to discriminate and eliminate.
(2)如图4b所示,塞块2内的圆槽的结构复杂,一次成形的加工难度较大,为了降低难度节约成本,也可将塞块2做成两体结构拼装,将包含锥形孔233和探针孔234的端部作为一部分,剩余的结构作为另一部分,之后将两个分别加工好的零件通过紧配合的插隼结构连接起来,通常不需要额外焊接。(2) As shown in Figure 4b, the structure of the circular groove in the plug block 2 is complex, and the processing of one-time forming is difficult. The ends of the shaped hole 233 and the probe hole 234 are used as a part, and the remaining structure is used as another part, and then the two separately processed parts are connected by a tight fitting structure, usually without additional welding.
(3)如图5所示,扰动探针3中的微细探针34与其余结构尺寸相差悬殊,直径比可达10倍以上,一体加工成形难度较大,因此,也可将扰动探针3分为两体加工,微细探针34作为单独的一部分,其余尺寸相近的螺杆31、圆杆32和锥形段33作为另一部分,在锥形段33的前端加工出具有一定深度的沉孔,之后将单独加工的微细探针34插入锥形段33的沉孔内拼装出完整的扰动探针3,为保证可靠连接,二者之间应进行锡焊。可采用高强度的工具钢作为扰动探针3(尤其是微细探针34)的材料,以保证整体结构不易变形弯曲,从而提高测量结果的准确度。(3) As shown in FIG. 5 , the size of the fine probe 34 in the disturbance probe 3 is very different from that of the rest of the structure, and the diameter ratio can reach more than 10 times. It is divided into two parts for processing, the micro probe 34 is used as a separate part, and the other screw 31, round rod 32 and tapered section 33 with similar dimensions are used as another part, and a counterbore with a certain depth is machined at the front end of the tapered section 33. After that, insert the separately processed micro probe 34 into the countersunk hole of the tapered section 33 to assemble the complete disturbance probe 3. In order to ensure reliable connection, soldering should be performed between the two. High-strength tool steel can be used as the material of the disturbance probe 3 (especially the fine probe 34 ) to ensure that the overall structure is not easily deformed and bent, thereby improving the accuracy of the measurement results.
以上所述的具体实施例,对本发明的目的、技术方案和有益效果进行了进一步详细说明,应理解的是,以上所述仅为本发明的具体实施例而已,并不用于限制本发明,凡在本发明的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The specific embodiments described above further describe the purpose, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above-mentioned specific embodiments are only specific embodiments of the present invention, and are not intended to limit the present invention. Within the spirit and principle of the present invention, any modifications, equivalent replacements, improvements, etc. made should be included within the protection scope of the present invention.
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