CN106841255B - A kind of adjustable clamping device for axonometry - Google Patents
A kind of adjustable clamping device for axonometry Download PDFInfo
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- CN106841255B CN106841255B CN201710187520.1A CN201710187520A CN106841255B CN 106841255 B CN106841255 B CN 106841255B CN 201710187520 A CN201710187520 A CN 201710187520A CN 106841255 B CN106841255 B CN 106841255B
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- 239000013078 crystal Substances 0.000 claims abstract description 45
- 238000005259 measurement Methods 0.000 claims abstract description 17
- 230000001681 protective effect Effects 0.000 claims description 9
- 239000010935 stainless steel Substances 0.000 claims description 7
- 229910001220 stainless steel Inorganic materials 0.000 claims description 7
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 238000009826 distribution Methods 0.000 claims description 2
- -1 polytetrafluoroethylene Polymers 0.000 claims description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 claims 1
- 229920002554 vinyl polymer Polymers 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 abstract description 6
- 239000002184 metal Substances 0.000 abstract description 6
- 238000012545 processing Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 2
- 238000012986 modification Methods 0.000 abstract description 2
- 230000004048 modification Effects 0.000 abstract description 2
- 238000005520 cutting process Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 238000012360 testing method Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
- G01N23/20025—Sample holders or supports therefor
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Abstract
本发明涉及一种用于晶体测定的可调夹持工具,包括底座、设于底座上的支柱、安装在支柱上部的L型支架、设于L型支架末端的样品盘,样品盘与L型支架旋转连接,样品盘设有多个用于夹持待测晶体的紧固件。本发明结构简单,加工便利,可以适用于任何晶体定向仪或类似装置,对定向仪本身无需做任何改动,效果突出;可调节性好,根据实际测量样品大小,安排底座与定向仪吸附金属座之间距离,可根据样品大小调节高度,转动任意角度。
The invention relates to an adjustable clamping tool for crystal measurement, comprising a base, a support column arranged on the base, an L-shaped bracket mounted on the upper part of the support column, a sample tray arranged at the end of the L-shaped support, the sample plate and the L-shaped support. The bracket is rotatably connected, and the sample tray is provided with a plurality of fasteners for holding the crystal to be tested. The invention is simple in structure and convenient in processing, and can be applied to any crystal orientation instrument or similar device, without any modification to the orientation instrument itself, and the effect is outstanding; the adjustability is good, and the base and the orientation instrument are arranged to absorb the metal seat according to the actual size of the measured sample. The distance between them can be adjusted according to the size of the sample, and can be rotated at any angle.
Description
技术领域technical field
本发明涉及一种夹持工具,具体涉及一种用于晶体测定的可调夹持工具。The invention relates to a clamping tool, in particular to an adjustable clamping tool for crystal measurement.
背景技术Background technique
晶体定向仪是对晶体材料进行定向测量的专用仪器。它的基本原理是利用X射线在晶体的周期性晶格内实现布拉格衍射而确定晶体的表面实际晶向。它可以精密快速的测定天然和人造单晶(如光学晶体,压电晶体,激光晶体,非线性光学晶体,半导体晶体等等)的切割角度,与切割机相配合使用(通常有外圆切割机,内圆切割机,金刚石线切割机等)时能够用于这些晶体的定向切割,获得指定晶向的晶体表面。晶体定向仪是精密加工制造晶体器件不可缺少的仪器,被广泛应用于晶体材料的研究、加工、制造行业。The crystal orientation instrument is a special instrument for orientation measurement of crystal materials. Its basic principle is to use X-rays to realize Bragg diffraction in the periodic lattice of the crystal to determine the actual crystal orientation of the crystal surface. It can precisely and quickly measure the cutting angle of natural and artificial single crystals (such as optical crystals, piezoelectric crystals, laser crystals, nonlinear optical crystals, semiconductor crystals, etc.) , inner circle cutting machine, diamond wire cutting machine, etc.) can be used for directional cutting of these crystals to obtain crystal surfaces with specified crystal orientations. The crystal orientation instrument is an indispensable instrument for precision processing and manufacturing of crystal devices, and is widely used in the research, processing and manufacturing of crystal materials.
传统的晶体定向仪通常由X射线发生装置、样品台和探测器三大部分组成,其中样品台为一金属平面,表面开有小孔,内部中空,由小型气泵连接,可以持续的抽气使其处于负压状态,从而达到吸附样品的功能。通常情况下,由于设备造价和尺寸限制,气泵的功率并不是很高,因此测试样品不能太大,否则由于吸力有限而无法吸附固定。另外,通过吸附方式也有表面平整度的要求,测试样品表面不能起伏太大,太粗糙,否则同样无法吸附,所以测试前必须研磨到一定光滑程度,过程复杂;其次,样品在定向时通常以一定的晶向作为参考面量取相应的角度进行切割,那么切割过后的样品必然不会是规则外形,而为了定向准确,至少需要在4个方向确定其偏离角度,那么改变角度测量也需要将样品取下重新放置一定的角度,这也增加了精确定向时的困难程度。如何快速固定任意形状晶体样品,并且在不取下样品的条件下完成晶体准确定向,是从事晶体高精度加工的行业人员以及相关科研人员面临的难题之一。The traditional crystal orientation instrument usually consists of three parts: the X-ray generating device, the sample stage and the detector. The sample stage is a metal plane with small holes on the surface and hollow inside. It is in a negative pressure state, so as to achieve the function of adsorbing the sample. Usually, due to equipment cost and size constraints, the power of the air pump is not very high, so the test sample should not be too large, otherwise it cannot be adsorbed and fixed due to limited suction. In addition, the surface flatness is also required by the adsorption method. The surface of the test sample cannot be too undulating and rough, otherwise it cannot be adsorbed. Therefore, it must be ground to a certain degree of smoothness before the test, and the process is complicated; secondly, the sample is usually oriented with a certain amount. The crystallographic orientation is taken as the reference plane and the corresponding angle is taken for cutting, then the sample after cutting will not be a regular shape, but in order to orient accurately, it is necessary to determine its deviation angle in at least 4 directions, then changing the angle measurement also requires the sample Removed and repositioned at an angle, which also adds to the difficulty of precise orientation. How to quickly fix a crystal sample of any shape and achieve accurate crystal orientation without removing the sample is one of the challenges faced by industry personnel engaged in high-precision crystal processing and related scientific researchers.
发明内容SUMMARY OF THE INVENTION
本发明的目的就是为了解决上述问题而提供一种用于晶体测定的可调夹持工具。The purpose of the present invention is to provide an adjustable clamping tool for crystal measurement in order to solve the above problems.
本发明的目的通过以下技术方案实现:The object of the present invention is achieved through the following technical solutions:
一种用于晶体测定的可调夹持工具,包括底座、设于底座上的支柱、安装在支柱上部的L型支架、设于L型支架末端的样品盘,所述的样品盘与L型支架旋转连接,所述的样品盘设有多个用于夹持待测晶体的紧固件。An adjustable clamping tool for crystal measurement, comprising a base, a support column arranged on the base, an L-shaped bracket mounted on the upper part of the support column, and a sample tray arranged at the end of the L-shaped bracket, wherein the sample plate is connected to the L-shaped support. The bracket is rotatably connected, and the sample tray is provided with a plurality of fasteners for holding the crystal to be tested.
进一步地,所述的样品盘包括盘本体以及设于盘本体上的圆环壁,所述的紧固件分布于圆环壁上。Further, the sample tray includes a tray body and an annular wall disposed on the tray body, and the fasteners are distributed on the annular wall.
进一步地,所述的紧固件为螺钉,所述的样品盘的圆环壁设有供螺钉穿过的螺纹圆孔。Further, the fastener is a screw, and the annular wall of the sample plate is provided with a threaded hole for the screw to pass through.
进一步地,所述的样品盘的圆环壁上设有三个螺纹圆孔,间隔120度弧度分布,所述的螺钉安装在该螺纹圆孔内,可以锁住任意形状的晶体样品。Further, the annular wall of the sample disk is provided with three threaded circular holes, which are distributed with an arc of 120 degrees. The screws are installed in the threaded circular holes and can lock crystal samples of any shape.
进一步地,所述的螺钉头部设有保护套,该保护套为聚四氟乙烯、尤里胶或牛津胶包裹成的圆柱套。Further, the screw head is provided with a protective sleeve, and the protective sleeve is a cylindrical sleeve wrapped with polytetrafluoroethylene, Urie glue or Oxford glue.
进一步地,所述的支柱为圆柱形中空竖管,所述的支架设于支柱内并可进行360度旋转,所述的支柱的侧面开有小孔,该小孔内设有用于紧固支架的螺纹销钉。Further, the column is a cylindrical hollow vertical pipe, the bracket is arranged in the column and can be rotated 360 degrees, and the side of the column is provided with a small hole, which is used for fastening the bracket. threaded pins.
进一步地,所述的样品盘的圆周外表面设有360度的刻槽,环绕圆周面设置,进一步地,所述的刻槽每隔10度标明数字。Further, the circumferential outer surface of the sample disk is provided with 360-degree grooves, which are arranged around the circumference. Further, the grooves are marked with numbers every 10 degrees.
进一步地,所述的L型支架上部设有刻度指针,在对晶体样品进行定向时可清楚直观的确定已经定向的方向及转过的角度,最终达到在360度范围内全面评估晶体切割表面与实际晶体晶格之间的夹角,为后续的修正切割提供准确依据。Further, the upper part of the L-shaped bracket is provided with a scale pointer, which can clearly and intuitively determine the oriented direction and the turned angle when orienting the crystal sample, and finally achieve a comprehensive evaluation of the crystal cutting surface and the 360-degree range. The included angle between the actual crystal lattices provides an accurate basis for the subsequent correction cutting.
进一步地,所述的样品盘的中心设有与L型支架连接的旋转套筒,该旋转套筒内设有旋转部件,包括滚珠轴承、滚轴轴承、无油轴承或转轮,保证旋转过程中的同轴性,避免旋转一定角度后X射线入射角在样品表面产生入射角的偏差。Further, the center of the sample plate is provided with a rotating sleeve connected with the L-shaped bracket, and the rotating sleeve is provided with rotating parts, including ball bearings, roller bearings, oil-free bearings or runners, to ensure the rotation process. In order to avoid the deviation of the incident angle of the X-ray incident angle on the sample surface after a certain angle of rotation.
进一步地,所述的底座采用不锈钢材质制得,所述的样品盘采用铝合金材质制得,底座为正方形或圆形,可根据实际需要更改。Further, the base is made of stainless steel, the sample tray is made of aluminum alloy, and the base is square or circular, which can be changed according to actual needs.
本发明在使用时,根据切割下来的样品大小以及厚度形状,确定不锈钢底座的安装位置,针对较大样品可以安装在距离X射线入射面较远处,而对尺寸较小的样品可以靠近定向仪X射线入射金属表面。确定好位置之后,底座固定在定向仪旋转样品平台上,以保证在定向测量过程中不发生位置偏移,较重的不锈钢底座可以减少震动对测量的影响;安装好底座之后,将样品待测中心与样品盘转轴中心重合并保持一致,画上标记线以方便区分,然后将样品放入旋转样品台上,将待测表面对外朝向定向仪吸附金属座一面,根据样品大小选择合适长度的螺钉将样品从相隔120度的三个方向锁住固定,在螺钉头部安装保护套,可增大与样品之间的摩檫力,也同时因为质地柔软保证材料的安全而不致损坏较为脆弱的晶体样品。合适长度的螺钉可确保固定好样品后在样品盘四周没有突出部分,以防止在360度转动过程中触碰到定向仪其他部位而导致损坏;样品安装好后,手动调节支架高度,使样品中心正好与X射线入射面中心点重合,将支架固定,开始测试。根据实际需要,每测一个角度的衍射强度后转动样品盘测量下一个角度的衍射信号,转动角度可根据转动样品盘上的刻度以及刻度指针读出确认。When the present invention is in use, the installation position of the stainless steel base is determined according to the size and thickness of the cut sample. For larger samples, it can be installed farther away from the X-ray incident surface, and for smaller samples, it can be installed close to the directional instrument. X-rays hit the metal surface. After the position is determined, the base is fixed on the rotating sample platform of the orientation instrument to ensure that no positional deviation occurs during the orientation measurement process. The heavier stainless steel base can reduce the impact of vibration on the measurement; after the base is installed, the sample is to be measured. The center is coincident and consistent with the center of the rotating shaft of the sample tray, and a mark line is drawn to facilitate the distinction. Then, put the sample on the rotating sample stage, and turn the surface to be measured outward toward the orienting instrument to absorb the metal seat, and select the appropriate length of the screw according to the size of the sample. The sample is locked and fixed from three directions separated by 120 degrees, and a protective cover is installed on the head of the screw, which can increase the friction force between the sample and the sample, and at the same time, the soft texture ensures the safety of the material without damaging the fragile crystal. sample. Screws of suitable length can ensure that there are no protruding parts around the sample pan after fixing the sample, so as to prevent damage caused by touching other parts of the orientation instrument during the 360-degree rotation; after the sample is installed, manually adjust the height of the bracket to make the center of the sample. Just coincide with the center point of the X-ray incident surface, fix the bracket, and start the test. According to actual needs, after measuring the diffraction intensity of one angle, rotate the sample disk to measure the diffraction signal of the next angle. The rotation angle can be confirmed by reading the scale on the rotating sample disk and the scale pointer.
本发明的优点具体为:The advantages of the present invention are specifically:
1、设备结构简单,加工便利,可以适用于任何晶体定向仪或类似装置,对定向仪本身无需做任何改动,效果突出。1. The equipment is simple in structure and convenient in processing, and can be applied to any crystal orientation instrument or similar device without any modification to the orientation instrument itself, and the effect is outstanding.
2、可调节性好,可将夹具放置于定向仪转动盘上任意位置,根据实际测量样品大小,安排底座与定向仪吸附金属座之间距离。2. Good adjustability, the fixture can be placed at any position on the rotating plate of the orientation meter, and the distance between the base and the adsorption metal seat of the orientation meter is arranged according to the actual size of the sample measured.
3、可根据样品大小调节高度,也可以在360度范围内转动任意角度,适应性极强,样品盘上刻有刻度,在L型支架上设有刻度指针,方便直接读取转动刻度。3. The height can be adjusted according to the size of the sample, and it can also be rotated at any angle within the range of 360 degrees. It has strong adaptability. The sample plate is engraved with a scale, and the L-shaped bracket is provided with a scale pointer, which is convenient to read the rotation scale directly.
4、样品盘间隔120度角设置紧固件,头部设有保护套,可根据不同样品更换,由于样品盘和旋转套筒一体设计,保证在转动过程中的同轴性和平稳性,此外遇到超大样品,样品盘也可以进行更换。4. Fasteners are set at an angle of 120 degrees on the sample tray, and the head is provided with a protective cover, which can be replaced according to different samples. Due to the integrated design of the sample tray and the rotating sleeve, the coaxiality and stability during the rotation process are guaranteed. In addition, In the case of oversized samples, the sample tray can also be replaced.
附图说明Description of drawings
图1为本发明的立体结构示意图;Fig. 1 is the three-dimensional structure schematic diagram of the present invention;
图2为本发明的侧视结构示意图;Fig. 2 is the side view structure schematic diagram of the present invention;
图3为本发明样品盘的结构示意图;Fig. 3 is the structural representation of the sample tray of the present invention;
图中:1-底座;2-支柱;3-螺纹销钉;4-L型支架;5-刻度指针;6-样品盘;7-保护套;8-紧固件;9-刻槽;10-旋转套筒。In the picture: 1-base; 2-pillar; 3-threaded pin; 4-L-shaped bracket; 5-scale pointer; 6-sample plate; 7-protective sleeve; 8-fastener; 9-notch; 10- Rotate the sleeve.
具体实施方式Detailed ways
下面结合附图和具体实施例对本发明进行详细说明。The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
实施例1Example 1
一种用于晶体测定的可调夹持工具,如图1、2所示,包括底座1、设于底座1上的支柱2、安装在支柱2上部的L型支架4、设于L型支架4末端的样品盘6,样品盘6与L型支架4旋转连接,样品盘6设有多个用于夹持待测晶体的紧固件8,如图3所示,样品盘6为圆形,样品盘6包括盘本体以及设于盘本体上的圆环壁,紧固件8为螺钉,设于样品盘6的圆环壁上,样品盘6圆环壁设有三个螺纹圆孔,间隔120度弧度分布,螺钉安装在该螺纹圆孔内,螺钉头部设有保护套7,该保护套7为聚四氟乙烯裹成的圆柱套,支柱2为圆柱形中空竖管,支架设于支柱2内并可进行360度旋转,支柱2的侧面开有小孔,该小孔内设有用于紧固支架的螺纹销钉3,样品盘6的圆周外表面设有360度的刻槽9,环绕圆环壁外表面设置,刻槽9每隔10度标明数字,L型支架4上部设有刻度指针5,样品盘6设有与样品盘6呈一体的旋转套筒10,该旋转套筒10内设有旋转部件,采用滚珠轴承,底座1采用不锈钢材质制得,样品盘6采用铝合金材质制得。An adjustable clamping tool for crystal measurement, as shown in Figures 1 and 2, includes a base 1, a pillar 2 arranged on the base 1, an L-shaped bracket 4 installed on the upper part of the pillar 2, and an L-shaped bracket arranged on the L-shaped bracket. The sample plate 6 at the end of the 4, the sample plate 6 is rotatably connected with the L-shaped bracket 4, and the sample plate 6 is provided with a plurality of fasteners 8 for holding the crystal to be measured. As shown in FIG. 3, the sample plate 6 is circular , the sample plate 6 includes a plate body and an annular wall arranged on the plate body, the fastener 8 is a screw, and is arranged on the annular wall of the sample plate 6, and the annular wall of the sample plate 6 is provided with three threaded holes, spaced at intervals 120 degree arc distribution, the screw is installed in the threaded round hole, the head of the screw is provided with a protective sleeve 7, the protective sleeve 7 is a cylindrical sleeve wrapped in teflon, the pillar 2 is a cylindrical hollow vertical pipe, and the bracket is located in the The pillar 2 can be rotated 360 degrees, the side of the pillar 2 is provided with a small hole, the small hole is provided with a threaded pin 3 for fastening the bracket, and the outer surface of the sample plate 6 is provided with a 360-degree groove 9, It is arranged around the outer surface of the ring wall, the grooves 9 are marked with numbers every 10 degrees, the upper part of the L-shaped bracket 4 is provided with a scale pointer 5, and the sample plate 6 is provided with a rotating sleeve 10 integral with the sample plate 6. The rotating sleeve 10 is provided with rotating parts, using ball bearings, the base 1 is made of stainless steel, and the sample plate 6 is made of aluminum alloy.
具体使用时,根据切割下来的样品大小以及厚度形状,确定不锈钢底座的安装位置,确定好位置后,底座固定在定向仪旋转样品平台上,以保证在定向测量过程中不发生位置偏移,较重的不锈钢底座可以减少震动对测量的影响;安装好底座之后,将样品待测中心与样品盘转轴中心重合并保持一致,画上标记线以方便区分,然后将样品放入旋转样品台上,将待测表面对外朝向定向仪吸附金属座一面,将样品从相隔120度的三个方向锁住固定,在螺钉头部安装保护套,增大与样品之间的摩檫力,也同时因为质地柔软保证材料的安全而不致损坏较为脆弱的晶体样品。样品安装好后,手动调节支架高度,使样品中心正好与X射线入射面中心点重合,将支架固定,开始测试。根据实际需要,每测一个角度的衍射强度后转动样品盘测量下一个角度的衍射信号,转动角度可根据转动样品盘上的刻度以及刻度指针读出确认。该夹持工具的结构简单,稳定可靠,具有很好的适应性,适合目前国内任意一种晶体定向仪使用。In specific use, the installation position of the stainless steel base is determined according to the size and thickness of the cut sample. After the position is determined, the base is fixed on the rotating sample platform of the orientation instrument to ensure that no positional deviation occurs during the orientation measurement process. The heavy stainless steel base can reduce the impact of vibration on the measurement; after installing the base, align the center of the sample to be measured and the center of the sample tray rotation axis and keep it consistent, draw a mark line for easy distinction, and then put the sample on the rotating sample stage, Turn the surface to be tested outwards towards the orientator to absorb the metal seat, lock and fix the sample from three directions 120 degrees apart, and install a protective cover on the head of the screw to increase the frictional force between the sample and the sample. The softness keeps the material safe without damaging the more fragile crystal samples. After the sample is installed, manually adjust the height of the bracket so that the center of the sample coincides with the center of the X-ray incident surface, fix the bracket, and start the test. According to actual needs, after measuring the diffraction intensity of one angle, rotate the sample disk to measure the diffraction signal of the next angle. The rotation angle can be confirmed by reading the scale on the rotating sample disk and the scale pointer. The clamping tool has a simple structure, is stable and reliable, has good adaptability, and is suitable for use in any domestic crystal orientation instrument.
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CN109633499A (en) * | 2019-02-27 | 2019-04-16 | 桂林理工大学 | A kind of magnetic susceptibility tester and magnetic susceptibility measurement method |
EP4155720B1 (en) * | 2021-09-28 | 2024-11-13 | Netzsch-Gerätebau GmbH | Device for determining temperature parameters with adjustable sample holder |
CN114311350B (en) * | 2022-03-15 | 2022-06-28 | 天通控股股份有限公司 | Head and tail cutting method for lithium tantalate crystal |
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