CN106676468A - Covering sheet, evaporation cover, evaporation covering device and evaporation process - Google Patents
Covering sheet, evaporation cover, evaporation covering device and evaporation process Download PDFInfo
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- CN106676468A CN106676468A CN201510761948.3A CN201510761948A CN106676468A CN 106676468 A CN106676468 A CN 106676468A CN 201510761948 A CN201510761948 A CN 201510761948A CN 106676468 A CN106676468 A CN 106676468A
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- 238000001704 evaporation Methods 0.000 title claims abstract description 289
- 230000008020 evaporation Effects 0.000 title claims abstract description 288
- 238000000034 method Methods 0.000 title claims abstract description 18
- 239000011521 glass Substances 0.000 claims abstract description 57
- 229920001621 AMOLED Polymers 0.000 claims abstract description 47
- 239000000758 substrate Substances 0.000 claims abstract description 40
- 239000011248 coating agent Substances 0.000 claims description 43
- 238000000576 coating method Methods 0.000 claims description 43
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 238000009834 vaporization Methods 0.000 description 12
- 230000008016 vaporization Effects 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 11
- 238000007747 plating Methods 0.000 description 11
- 239000002184 metal Substances 0.000 description 6
- 238000007740 vapor deposition Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
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- Physical Vapour Deposition (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
The invention relates to the technical field of semiconductor displaying, in particular to a covering sheet, an evaporation cover, an evaporation covering device and an evaporation process. The evaporation cover consists of at least two layers of covering sheets arrayed in sequence to completely cover a glass substrate; a second non-effective evaporation region of the first covering sheet is seamlessly connected with a first non-effective evaporation region of the second covering sheet; the second non-effective evaporation region of the first covering sheet is combined with a first non-effective evaporation region of the next covering sheet, and the covered area is matched with the area of a closed region of an evaporation sheet, so that active regions and the non-effective evaporation regions on a glass panel subjected to evaporation treatment can be uniformly distributed, and evaporation of a large-sized AMOLED (Active Matrix Organic Light Emitting Diode) is realized; and the limitation of the size of the covering sheet is prevented.
Description
Technical Field
The invention relates to the technical field of semiconductor display, in particular to a mask sheet, an evaporation mask device and an evaporation process.
Background
In the flat panel display technology, AM0 LEDs (active matrix organic light emitting diodes) are called Super display with their excellent display performance. Since the first release of a large number of small-sized AMOLED products for mobile phones and MP4 displays in 2007, the samsung SMD can find a large number of electronic digital terminal products to which AMOLEDs are applied on the market. However, these products are mostly concentrated in small size, and the market demand for applications with medium and large size, such as notebook computers, monitors, televisions, etc., is now increasing. The size of the glass substrate of the AMOLED screen with large size is at least 5.5 generations. The main reason that the large-size AMOLED screen is not completely applied at present is that the yield cannot be guaranteed, and the factors limiting the yield of the large-size AMOLED screen mainly relate to three aspects: panel, pixel pattern making and device packaging. The Low Temperature Polysilicon (LTPS) panel process is difficult to span 5.5 generation AMOLED screen production line, because the panel is manufactured by evaporating red, green and blue organic luminophors on a glass panel, because a metal mask is needed to be used during evaporation, the surface size of the metal mask determines the evaporation size of the glass substrate during the evaporation process, and because the size of the metal mask cannot be too large (the size of the metal mask is too large, and the metal mask sinks due to gravity during the evaporation process, so that the formed substrate has color mixing phenomenon), the metal mask is not suitable for realizing large screen and high resolution. In order to realize the fabrication of a large-sized AMOLED screen, in the prior art, as shown in fig. 1, a mask sheet 1 is usually used to perform an evaporation process, and the mask sheets 1 are sequentially attached to the surface of a glass substrate (not shown), and then the glass substrate is subjected to evaporation, but this method has low production efficiency and is not beneficial to industrial production.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a mask sheet, an evaporation mask device and an evaporation process which are suitable for manufacturing a large-size AMOLED screen and have high production efficiency.
A mask sheet, comprising:
the device is provided with a plurality of hollowed-out areas, a shielding area, a first ineffective evaporation area and a second ineffective evaporation area, wherein the hollowed-out areas and the shielding area are sequentially and alternately arranged between the first ineffective evaporation area and the second ineffective evaporation area, the area of a single hollowed-out area is the same as that of the single shielding area, the area of a single first ineffective evaporation area is the same as that of a single second ineffective evaporation area, and the area of a single hollowed-out area is twice the area of the single first ineffective evaporation area.
Preferably, in the above-mentioned mask sheet, the length of the mask sheet is an integer multiple of the length of a single hollow area.
The invention also provides an evaporation mask, which at least comprises the mask sheet, wherein the evaporation mask comprises an opening area and a closed area, and the closed area comprises a first closed area and a second closed area; wherein,
the hollow area of each mask sheet forms an opening area of the evaporation mask;
the shielding area of each shielding piece forms a first closed area of the evaporation mask;
the second non-effective evaporation area of the first evaporation mask sheet and the first non-effective evaporation area of the adjacent second evaporation mask sheet form a second type of closed area of the evaporation mask.
Preferably, in the evaporation mask, the opening region of the evaporation mask sheet is used to form an active region of the AMOLED screen, and the first type of closing region is combined with the second type of closing region to form a non-effective evaporation region of the AMOLED screen.
The utility model provides an evaporation plating shade device, wherein, includes two foretell evaporation plating shades, evaporation plating shade device is including setting up in treating the first layer on evaporation plating glass substrate evaporation plating shade and set up in the first layer the second layer of evaporation plating shade upper end evaporation plating shade, wherein the second layer the opening area of evaporation plating shade matches the first layer the closed area of evaporation plating shade, the second layer the opening area of evaporation plating shade covers the active area of the regional formation AMOLED screen on the glass substrate.
Preferably, in the evaporation mask device, the second layer of the evaporation mask partially covers the first layer of the evaporation mask, and the closed region of the second layer of the evaporation mask covers the open region of the first layer of the evaporation mask to form the first inactive evaporation region of the AMOLED screen.
Preferably, in the evaporation mask device, the length of the active region of the AMOLED screen is an integer multiple of the length of the inactive evaporation region of the AMOLED screen.
Preferably, in the evaporation mask device, a second non-effective evaporation region of the AMOLED screen is formed in a region where the second layer of the evaporation mask does not cover the first layer of the evaporation mask.
The evaporation process is characterized by comprising the following steps of based on the evaporation mask device:
providing a glass substrate, wherein the glass substrate comprises an evaporation coating area and a non-evaporation coating area;
at least two evaporation masks are abutted or partially overlapped to form the evaporation mask device, so that an opening on the evaporation mask device corresponds to an evaporation area on the glass substrate; and
and carrying out an evaporation process on the glass substrate by using the evaporation mask device so as to form an evaporation film in the evaporation area on the glass substrate.
Compared with the prior art, the invention has the advantages that:
(1) at least two layers of mask pieces of the evaporation mask are arranged in sequence to completely cover the glass substrate, the second non-effective evaporation area of the first mask piece is in seamless connection with the first non-effective evaporation area of the second mask piece, the area covered by the second non-effective evaporation area of the first mask piece combined with the first non-effective evaporation area of the next mask piece is matched with the area of the evaporation piece closed area, and therefore the active area and the non-effective evaporation area on the glass panel subjected to evaporation treatment can be uniformly distributed, evaporation of a large-size AMOLED screen is achieved, and limitation of the size of the mask pieces is avoided.
(2) Adopt the glass panels of coating by vaporization cover piece coating by vaporization, glass panels's ineffective coating by vaporization district is usually formed by first class closed area and second class closed area two parts, first class closed area is the closed area of cover piece itself, second class closed area is formed by the ineffective coating by vaporization district of the adjacent junction of two cover pieces, the design of the ineffective coating by vaporization district of two cover pieces is the ineffective coating by vaporization district that can be used for forming glass panels, the technical problem that the side of cover piece can't form the ineffective coating by vaporization district completely among the prior art has been solved, according to this kind of arrangement, can not receive the restriction of cover area itself when making glass substrates, under the circumstances that increases glass substrates size, the quantity that increases the cover piece can realize the coating by vaporization.
Drawings
FIG. 1 is a schematic structural diagram of a conventional evaporation mask;
FIG. 2 is a schematic view of an embodiment of an evaporation mask sheet according to the present invention;
FIG. 3 is a diagram of an embodiment of an evaporation mask according to the present invention;
fig. 4 is a diagram showing an embodiment of a vapor deposition device according to the present invention;
FIG. 5 is a schematic view of an embodiment of a vapor deposition mask device according to the present invention;
fig. 6 is a schematic flow chart of an evaporation process in the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.
The invention is further described with reference to the following drawings and specific examples, which are not intended to be limiting.
A mask sheet applicable to manufacturing a large-sized AMOLED screen, the mask sheet comprising:
the device is provided with a plurality of hollowed-out areas, a shielding area, a first ineffective evaporation area and a second ineffective evaporation area, wherein the hollowed-out areas and the shielding area are sequentially and alternately arranged between the first ineffective evaporation area and the second ineffective evaporation area, the area of a single hollowed-out area is the same as that of the single shielding area, the area of a single first ineffective evaporation area is the same as that of a single second ineffective evaporation area, and the area of a single hollowed-out area is twice the area of the single first ineffective evaporation area.
As shown in FIG. 2, there is illustrated an embodiment of an evaporation mask, wherein the evaporation mask comprises a plurality of mask sheets 1, the plurality of mask sheets 1 are arranged adjacently,
the mask sheet 1 comprises a plurality of hollow-out areas 11, a mask area 12, a first inactive evaporation area 13 and a second inactive evaporation area 14,
the first non-effective evaporation area 13 and the second non-effective evaporation area 14 are respectively arranged at two ends of the mask sheet 1, the hollow-out area 11 and the mask area 12 are arranged between the first non-effective evaporation area 13 and the second non-effective evaporation area 14 at intervals,
the length of the single hollow-out region 11 matches the length of the single shielding region 12, and the lengths of the single first non-effective evaporation region 13 and the single second non-effective evaporation region 14 in the horizontal direction are 1/2 of the length of the single hollow-out region 11.
As shown in fig. 2, as a further preferred embodiment, wherein the length of the evaporation mask sheet is integer times the length of the single hollow-out area 11, the glass panel formed by evaporation using the evaporation mask sheet 1 has the same area of the active area and the non-effective evaporation area on the glass panel as shown in fig. 3, which is beneficial for the subsequent processing and manufacturing of the glass panel. The mask sheet 1 can be used for vapor deposition manufacturing of a small-sized AMOLED screen, and can also be used for vapor deposition manufacturing of a large-sized AMOLED screen.
When the AMOLED screen with the small size is manufactured, a single evaporation coating sheet is used, one evaporation coating sheet is placed on the glass substrate, the evaporation coating source carries out evaporation coating treatment on the glass substrate to form the glass panel of the AMOLED screen, the hollow-out area 11 of the evaporation coating sheet forms the active area of the glass panel, the first ineffective evaporation coating area 13 and the second ineffective evaporation coating area 14 of the evaporation coating sheet, and the ineffective evaporation coating area of the glass panel for shielding 12 to form the glass panel.
As shown in fig. 3, in the present embodiment, when manufacturing a large-sized AMOLED screen, taking two mask sheets as an example, a first evaporation mask sheet 1 and a second evaporation mask sheet 2, respectively, the size of a glass substrate corresponding to the large-sized AMOLED screen is also larger, the first evaporation mask sheet 1 and the second evaporation mask sheet 2 are arranged in sequence to completely cover the glass substrate (not shown in the figure), the second non-effective evaporation region 14 of the first evaporation mask sheet 1 is seamlessly connected with the first non-effective evaporation region 23 of the second evaporation mask sheet 2, because the lengths of the first non-effective evaporation region 13(23) and the second non-effective evaporation region 14(24) are 1/2 of the length of a single hollow region 11(21), when being arranged in sequence, the area covered by the second non-effective evaporation region 14 of the first mask sheet 1 in combination with the first non-effective evaporation region 23 of the second evaporation mask sheet 2 matches the area of the mask region 12(22), furthermore, the active area and the non-effective evaporation area on the glass panel after evaporation treatment can be uniformly distributed, so that evaporation of a large-size AMOLED screen is realized, and the size of the mask sheet is not limited.
The invention also provides an evaporation mask, which at least comprises an evaporation mask sheet, wherein the evaporation mask comprises an opening area and a closed area, and the closed area comprises a first closed area and a second closed area;
the hollow area 11 of each evaporation mask sheet 1 forms an opening area of an evaporation mask;
the shielding area 12 of each evaporation mask sheet 1 forms a first closed area of the mask;
the second inactive evaporation region 14 of the previous evaporation mask sheet 1 and the first inactive evaporation region 13 of the next evaporation mask sheet 1 form a second type of closed region of the evaporation mask.
As a further preferred embodiment, in the evaporation mask, the opening region 1 of the evaporation mask is used to form an active region of the AMOLED screen, and the first-type closed region 2 and the second-type closed region 2 are used to form a non-active evaporation region of the AMOLED screen.
The glass panel manufactured by the evaporation cover is characterized in that an ineffective evaporation area of the glass panel is generally formed by a first closed area and a second closed area, the first closed area is a shielding area 12 of an evaporation shielding sheet 1, the second closed area is formed by ineffective evaporation areas at adjacent joints of the two evaporation shielding sheets 1, the ineffective evaporation areas of the two shielding sheets 1 are designed to be ineffective evaporation areas capable of being used for forming the glass panel, the technical problem that the side surfaces of the evaporation shielding cover cannot form the ineffective evaporation areas in the prior art is solved, according to the arrangement mode, the glass panel can be free from the limitation of the area of the shielding cover when the glass substrate is manufactured, and evaporation can be realized by increasing the number of the shielding sheets 1 under the condition of increasing the size of the glass substrate.
The utility model provides an evaporation coating shade device, wherein, evaporation coating shade device is including setting up the first layer evaporation coating shade on treating evaporation coating glass substrate and setting up in the second layer evaporation coating shade of first layer evaporation coating shade upper end, wherein the second layer the opening area of evaporation coating shade matches the first layer the closed area of evaporation coating shade, the second layer the opening area of evaporation coating shade covers the active area of regional formation AMOLED screen on the glass substrate. The second layer of the evaporation mask partially covers the first layer of the evaporation mask, and the closed area of the second layer of the evaporation mask covers the opening area of the first layer of the evaporation mask to form a first non-effective evaporation area of the AMOLED screen.
An evaporation coating shade device is formed through two layers of evaporation coating shades, evaporation coating treatment is carried out on the glass substrate through the evaporation coating shade device, and the defect that the side face of a single shade piece cannot form a non-effective evaporation coating area in the prior art is overcome.
As shown in fig. 4, an evaporation mask device formed by two layers of evaporation masks is taken as an example (in order to visually express the evaporation masks, only the positional relationship of two layers of evaporation is shown in the figure), and the device includes a first layer of evaporation mask 101 and a second layer of evaporation mask 102, an opening area 1010 of the first layer of evaporation mask 101 matches with a closed area 1021 of the second layer of evaporation mask 102, and an AMOLED screen active area is formed in an area where the opening area 1010 of the first layer of evaporation mask 101 covers a glass substrate (not shown in the figure). The two layers of evaporation masks form an evaporation mask device, evaporation treatment is carried out on the glass substrate through the evaporation mask device, and the AMOLED screen manufacturing with various sizes can be matched by changing the number of the masks in the evaporation mask.
As a further preferred embodiment, in the evaporation mask device, the two layers of masks are staggered from each other in the vertical direction, so that the second layer of the evaporation mask partially covers the first layer of the evaporation mask, and the closed area of the second layer of the evaporation mask covers the area of the opening area of the first layer of the evaporation mask to form the first inactive evaporation area of the AMOLED screen. Generally, a glass substrate of an AMOLED screen is provided with inactive evaporation regions at intervals between active regions, and the inactive evaporation regions are used to provide space for subsequent wiring operations.
As shown in fig. 5, taking the two-layer evaporation mask device as an example, the two-layer evaporation mask device includes a first layer evaporation mask 101 and a second layer evaporation mask 102, wherein the first layer evaporation mask 101 and the second layer evaporation mask 102 are staggered from each other in the vertical direction, so that the first layer evaporation mask 101 partially covers the second layer evaporation mask 102, and the area where the closed area 1011 of the first layer evaporation mask 101 covers the opening area 1020 of the second layer evaporation mask 102 forms the inactive evaporation area of the AMOLED screen.
As a further preferred embodiment, in the evaporation mask device, the length of the active region of the AMOLED screen is an integral multiple of the length of the inactive evaporation region of the AMOLED screen. By adopting the design mode, the vapor plating cover is conveniently formed by arranging the shielding covers.
In a further preferred embodiment, in the evaporation mask device, the second layer of evaporation mask and the first layer of evaporation mask are staggered relatively to form the non-effective evaporation region of the AMOLED screen. Stagger the range relatively with second layer coating by vaporization shade and first layer coating by vaporization shade, set up the ineffective coating by vaporization district at the top and the bottom of vertical direction, increase the area of ineffective coating by vaporization district. The non-effective evaporation region can be set for other purposes according to time conditions besides wiring.
As shown in fig. 6, the present invention also provides an evaporation process, wherein the evaporation process includes:
providing a glass substrate, wherein the glass substrate comprises an evaporation coating area and a non-evaporation coating area;
at least two evaporation masks are abutted or partially overlapped to form the evaporation mask device, so that an opening on the evaporation mask device corresponds to an evaporation area on the glass substrate; and
and carrying out an evaporation process on the glass substrate by using the evaporation mask device so as to form an evaporation film in the evaporation area on the glass substrate.
The working principle of the present invention has been described in detail, and is not described in detail herein.
The shade or the evaporation cover in this application both can be applied to horizontal evaporation coating, also can be applied to vertical evaporation coating. Meanwhile, the length in the present application indicates the distance in the horizontal direction.
The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and it should be understood that those skilled in the art should be able to recognize that the invention includes all equivalent and obvious modifications made from the description and drawings of the present invention.
Claims (9)
1. A mask sheet, comprising:
the device is provided with a plurality of hollowed-out areas, a shielding area, a first ineffective evaporation area and a second ineffective evaporation area, wherein the hollowed-out areas and the shielding area are sequentially and alternately arranged between the first ineffective evaporation area and the second ineffective evaporation area, the area of a single hollowed-out area is the same as that of the single shielding area, the area of a single first ineffective evaporation area is the same as that of a single second ineffective evaporation area, and the area of a single hollowed-out area is twice the area of the single first ineffective evaporation area.
2. The mask sheet according to claim 1, wherein the length of the mask sheet is an integer multiple of the length of a single hollowed-out area.
3. An evaporation mask comprising at least two mask sheets according to claims 1-2, said evaporation mask comprising open areas, closed areas, said closed areas comprising a first type of closed areas and a second type of closed areas; wherein,
the hollow area of each mask sheet forms an opening area of the evaporation mask;
the shielding area of each shielding piece forms a first closed area of the evaporation mask;
the second non-effective evaporation area of the first evaporation mask sheet and the first non-effective evaporation area of the adjacent second evaporation mask sheet form a second type of closed area of the evaporation mask.
4. The evaporation mask of claim 3, wherein the opening region of the evaporation mask sheet is configured to form an active region of an AMOLED screen, and the first type of closed region is configured to form a non-active evaporation region of the AMOLED screen in combination with the second type of closed region.
5. An evaporation mask device, comprising two evaporation masks according to claims 3-4, wherein the evaporation mask device comprises a first layer of evaporation mask arranged on a glass substrate to be evaporated and a second layer of evaporation mask arranged on the upper end of the evaporation mask of the first layer, wherein an opening area of the evaporation mask of the second layer matches a closed area of the evaporation mask of the first layer, and an area on the glass substrate covered by the opening area of the evaporation mask of the second layer forms an active area of an AMOLED screen.
6. The evaporation mask device of claim 5, wherein a second layer of the evaporation mask partially covers a first layer of the evaporation mask, and a closed region of the second layer of the evaporation mask covers an open region of the first layer of the evaporation mask to form a first inactive evaporation region of the AMOLED screen.
7. The evaporation mask apparatus according to claim 6, wherein the length of the AMOLED screen active area is an integer multiple of the length of the AMOLED screen inactive evaporation area.
8. The evaporation mask apparatus of claim 6, wherein a region of the second layer of the evaporation mask not covering the first layer of the evaporation mask forms a second non-active evaporation region of the AMOLED screen.
9. An evaporation process based on the evaporation mask device as claimed in claims 5-8, the evaporation process comprising:
providing a glass substrate, wherein the glass substrate comprises an evaporation coating area and a non-evaporation coating area;
at least two evaporation masks are abutted or partially overlapped to form the evaporation mask device, so that an opening on the evaporation mask device corresponds to an evaporation area on the glass substrate; and
and carrying out an evaporation process on the glass substrate by using the evaporation mask device so as to form an evaporation film in the evaporation area on the glass substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510761948.3A CN106676468A (en) | 2015-11-10 | 2015-11-10 | Covering sheet, evaporation cover, evaporation covering device and evaporation process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510761948.3A CN106676468A (en) | 2015-11-10 | 2015-11-10 | Covering sheet, evaporation cover, evaporation covering device and evaporation process |
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| Publication Number | Publication Date |
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| CN106676468A true CN106676468A (en) | 2017-05-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510761948.3A Pending CN106676468A (en) | 2015-11-10 | 2015-11-10 | Covering sheet, evaporation cover, evaporation covering device and evaporation process |
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| CN109468593A (en) * | 2018-12-04 | 2019-03-15 | 京东方科技集团股份有限公司 | A preparation method of a display panel, a display panel and an evaporation device |
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