CN106441665A - Piezoelectric-quartz-wafer's-bending-effect-based bending moment measurement method and sensor - Google Patents
Piezoelectric-quartz-wafer's-bending-effect-based bending moment measurement method and sensor Download PDFInfo
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- CN106441665A CN106441665A CN201610850041.9A CN201610850041A CN106441665A CN 106441665 A CN106441665 A CN 106441665A CN 201610850041 A CN201610850041 A CN 201610850041A CN 106441665 A CN106441665 A CN 106441665A
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- 238000005452 bending Methods 0.000 title abstract description 18
- 238000000691 measurement method Methods 0.000 title abstract description 4
- 238000005259 measurement Methods 0.000 claims abstract description 66
- 230000000694 effects Effects 0.000 claims abstract description 30
- 239000010453 quartz Substances 0.000 claims abstract description 29
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 29
- 238000000034 method Methods 0.000 claims abstract description 21
- 230000003287 optical effect Effects 0.000 claims abstract description 4
- 239000011159 matrix material Substances 0.000 claims description 26
- 239000013078 crystal Substances 0.000 claims description 24
- 235000012431 wafers Nutrition 0.000 claims description 14
- 230000005489 elastic deformation Effects 0.000 claims description 13
- 238000010008 shearing Methods 0.000 claims description 12
- 230000005611 electricity Effects 0.000 claims description 7
- 230000035945 sensitivity Effects 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 5
- 239000011888 foil Substances 0.000 description 6
- 238000001514 detection method Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 230000011218 segmentation Effects 0.000 description 2
- 208000035126 Facies Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
- G01L3/02—Rotary-transmission dynamometers
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- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The invention discloses a Piezoelectric-quartz-wafer's-bending-effect-based bending moment measurement method and sensor. According to the method, a piezoelectric quartz wafer with bending effect is utilized to form a bending moment measurement sensing element. When the wafer is subjected to the bending moment, bound charges with equal electric quantity and opposite polarities are generated on two half planes, divided by an optical axis, on the surface of the wafer. And the exerted bending moment is linearly related to the generated bound charges so as to accurately measure the bending moment value. The bending moment measurement sensing element, through a split-electrode charge combination method, forms a bending moment measurement wafer group, whose output charge is drawn out from the output terminal through a conductive wire and amplified by a charge amplifier as a voltage signal, followed by the result-recording of a digital meter or a computer. In the invention, the piezoelectric bending effect is adopted to directly measure the bending moment instead of using the traditional shear effect. The method of multiplying the shear force by the moment arm of force to calculate bending moment simplifies the intermediate procedures and increases the measurement precision and accuracy.
Description
Technical field：
The present invention designs a kind of measuring method of moment of flexure and sensor, and more particularly to a kind of bending based on piezoelectric quartz crystal plate is imitated
The moment of flexure measuring method answered and sensor.
Background technology：
Moment of flexure is one kind of the moment of resistance on primary structure member section, that is, perpendicular to the resultant couple square of the internal force system of cross section, moment of flexure
Directly affect intensity and the deformation of rod member, therefore accurate detection moment of flexure has important meaning to engineer applied.
In engineering, using modes such as foil gauge, piezoelectricity, pressure magnetic, wherein most widely used is measuring strain for moment of flexure measurement
Method.Find through the retrieval to prior art literature and patent, patent name《The detection method of anchor axial force and moment of flexure and its
Detection anchor pole》, application publication number CN 103485811 A, and article name《Strain ga(u)ge answering in moment of flexure measurement
With》, print name：Sensor technology, all using being strain measurement method, the resistance strain gage of 4 same models will press accompanying drawing 1- Fig. 3
Shown it is arranged：R1, R3 cloth is attached to the upper surface of beam, and R2, R4 cloth is attached to the lower surface of beam.During beam deformed, resistance should
The strain producing is become on piece same with the strain facies of beam generation, and on the same section of beam, upper surface produces stretching strain, and under
Surface produces compressive strain, draw, the absolute value of compressive strain equal, four foil gauge combinations can full-bridge circuit, by full-bridge circuit
The strain value of four foil gauges can be obtained, moment can be calculated by strain gauge according to theory of mechanics of materials.Additionally, passing through piezoelectricity
Effect can also measure moment of flexure, now uses " power × arm of force " method, in measurement, the arm of force is changeless, the arm of force with cut
Power is multiplied and obtains moment of flexure, if wanting to measure shearing, using there is the Y0 piezoelectric quartz crystal plate of shearing effect as dynamometry sensing element,
Measured power is multiplied by the distance between power and chip and is calculated moment, as shown in Figure 4.The type sensor can not
Direct measurement moment of flexure, but indirectly calculate moment by way of measuring power, lead to test moment of flexure precision not high.
Content of the invention：
The technical problem to be solved is：Overcome the deficiencies in the prior art, provide a kind of reasonable in design, simplify centre
Link, the moment of flexure measuring method based on piezoelectric quartz crystal plate curvature effect that improve certainty of measurement and the degree of accuracy and sensor.
The technical scheme is that：
A kind of moment of flexure measuring method based on piezoelectric quartz crystal plate curvature effect, using the piezoelectric quartz crystal plate with curvature effect
Composition moment of flexure measurement sensing element, when by Moment, the bound charge producing on a surface of a wafer is with optical axis for boundary
On line two half-plane, produced electricity is equal in magnitude, and symbol is contrary, and the moment of flexure being applied is become with the bound charge producing
Linear relationship, and then accurately measure moment；It is curved that described moment of flexure measurement sensing element passes through segmentation electrode charge combined method composition
The brilliant group of square measurement, the output charge that described moment of flexure measurement crystalline substance group produces is drawn external, by electric charge through wire by out splice going splice
Amplifier zooms into voltage signal, then by digital table or computer recording result.
Described brilliant group of moment of flexure measurement includes three X0 cut type quartz wafers and four detecting electrodes, and four detecting electrodes are two-by-two
One group is clamped between three bauerite chips respectively, and four detecting electrodes are labeled as electrode A, electrode B, electrode C, electrode D successively,
When only responsive to axial force, produce shearing bound charge, electrode A and electrode C in wafer surface, electrode B is produced with electrode D
Sign is identical, equal in magnitude, is output as zero after electrode A is in parallel with electrode C；When only Moment, electrode A and electrode
C, the sign that electrode B is produced with electrode D is identical, equal in magnitude, exports after electrode A is in parallel with electrode C, and output charge is single
The twice of electrode, improves the sensitivity of the brilliant group of flexural measurement.
Described brilliant group of moment of flexure measurement is arranged in the matrix of sensor by elastic deformation ring, the company of being provided with described matrix
Connect hole, be easy to and structural beams connect, described matrix is provided with out splice going splice, described out splice going splice inner by wire with described
The brilliant group of moment of flexure measurement connects.
A kind of moment of flexure measurement sensor based on piezoelectric quartz crystal plate curvature effect, including matrix, described matrix is arranged
There is connecting hole, in described matrix, be provided with two elastic deformation rings, between two described elastic deformation rings, be provided with moment of flexure measurement
Brilliant group, described matrix is provided with out splice going splice, described out splice going splice is inner to be connected by wire group brilliant with the measurement of described moment of flexure,
The outer end of described out splice going splice zooms into voltage signal by charge amplifier, then by digital table or computer recording result.
Described brilliant group of moment of flexure measurement includes three X0 cut type quartz wafers and four detecting electrodes, and four detecting electrodes are two-by-two
One group is clamped between three bauerite chips respectively, and four detecting electrodes are labeled as electrode A, electrode B, electrode C, electrode D successively,
When only responsive to axial force, produce shearing bound charge, electrode A and electrode C in wafer surface, electrode B is produced with electrode D
Sign is identical, equal in magnitude, is output as zero after electrode A is in parallel with electrode C；When only Moment, electrode A and electrode
C, the sign that electrode B is produced with electrode D is identical, equal in magnitude, exports after electrode A is in parallel with electrode C, and output charge is single
The twice of electrode, improves the sensitivity of the brilliant group of flexural measurement.
Described matrix is rectangle, is respectively arranged with described connecting hole at its corner, and described moment of flexure measurement crystalline substance group is amplexiformed
In the inner chamber boss of described elastic deformation ring in the heart, described in the surface of piezoelectric quartz crystal plate and boss plane parallel is symmetrically sticked
Detecting electrode.
The invention has the beneficial effects as follows：
1st, the present invention adopts piezoelectric bending effect direct measurement moment of flexure, rather than using traditional shearing effect, shearing force takes advantage of the arm of force
Method calculated bending moment, simplify intermediate link, improve certainty of measurement and the degree of accuracy.
2nd, the present invention sets up the brilliant group of measurement using segmentation electrode charge method, avoids electricity using charge method connecting detection electrode
With two charge amplifiers and a voltage inverter during platen press measurement, the introducing of external measuring circuit will lead to measurement by mistake
The increase of difference and the raising of cost of manufacture.Only with a charge amplifier without voltage inverter direct detection moment of flexure, there is knot
The advantage that structure is simple, charge sensitivity is double.
3rd, moment of flexure sensor of the present invention has compact conformation, good manufacturability, reduces cost it is easy to adjust, efficiency high, directly
Connect measurement moment of flexure, certainty of measurement is high, overcome the shortcoming and defect that conventional piezoelectric shearing effect measures moment of flexure, its scope of application
Wide it is easy to promotion and implementation, economic benefit is obvious.
Brief description：
Fig. 1 is the structure chart of foil gauge moment of flexure measurement in prior art；
Fig. 2 is the top view of the measurement of foil gauge moment of flexure shown in Fig. 1；
Fig. 3 is the circuit theory sketch of the measurement of foil gauge moment of flexure shown in Fig. 1；
Fig. 4 is prior art medium voltage electricity square measuring principle sketch；
Fig. 5 is the polarization diagram by axial force for the brilliant group of moment of flexure measurement of the present invention；
Fig. 6 is the polarization diagram of moment of flexure measurement of the present invention brilliant group bending moment；
Fig. 7 is the structure chart based on the moment of flexure measurement sensor of piezoelectric quartz crystal plate curvature effect for the present invention；
Fig. 8 is the side view of the moment of flexure measurement sensor shown in Fig. 7 based on piezoelectric quartz crystal plate curvature effect.
Specific embodiment：
Embodiment：Referring to Fig. 5 Fig. 8, in figure, 1- matrix, 2- connecting hole, 3- out splice going splice, 4- wire, 5- elastic deformation ring,
The brilliant group of 6- moment of flexure measurement.
Based on the moment of flexure measuring method of piezoelectric quartz crystal plate curvature effect, technical scheme is：Using having curvature effect
Piezoelectric quartz crystal plate composition moment of flexure measurement sensing element, when by Moment, the bound charge that produces on a surface of a wafer
Equal in magnitude for produced electricity on the half-plane of line of demarcation two with optical axis, symbol is contrary, and the moment of flexure that applied and generation
Bound charge linear, and then accurately measure moment；Moment of flexure measurement sensing element passes through to split electrode charge combination
Method composition moment of flexure measurement crystalline substance group, the output charge that the brilliant group of moment of flexure measurement produces is external by out splice going splice extraction through wire, passes through
Charge amplifier zooms into voltage signal, then by digital table or computer recording result.
The brilliant group of moment of flexure measurement includes three X0 cut type quartz wafers and four detecting electrodes, one group two-by-two of four detecting electrodes
It is clamped in respectively between three bauerite chips, four detecting electrodes are labeled as electrode A, electrode B, electrode C, electrode D, successively when only
When having responsive to axial force, produce shearing bound charge, electrode A and electrode C, the electric charge that electrode B is produced with electrode D in wafer surface
Symbol is identical, equal in magnitude, is output as zero after electrode A is in parallel with electrode C；When only Moment, electrode A and electrode C, electricity
The sign that pole B is produced with electrode D is identical, equal in magnitude, exports after electrode A is in parallel with electrode C, and output charge is single electrode
Twice, improve the sensitivity of the brilliant group of flexural measurement.
The brilliant group of moment of flexure measurement is arranged in the matrix of sensor by elastic deformation ring, matrix is provided with connecting hole, just
In connecting with structural beams, matrix is provided with out splice going splice, out splice going splice is inner to be connected by wire group brilliant with moment of flexure measurement.
Based on the moment of flexure measurement sensor of piezoelectric quartz crystal plate curvature effect, including matrix 1, matrix 1 is provided with connection
Hole 2, is provided with two elastic deformation rings 5 in matrix 1, be provided with the brilliant group 6 of moment of flexure measurement, matrix 1 between two elastic deformation rings 5
On be provided with out splice going splice 3, out splice going splice 3 is inner to be connected by wire 4 group 6 brilliant with moment of flexure measurement, and the outer end of out splice going splice 3 is logical
Cross charge amplifier and zoom into voltage signal, then by digital table or computer recording result.
Matrix 1 is rectangle, is respectively arranged with connecting hole 2 at its corner, and the brilliant group 6 of moment of flexure measurement is amplexiformed in elastic deformation ring
In 5 inner chamber boss in the heart, detecting electrode is symmetrically sticked on piezoelectric quartz crystal plate and the surface of boss plane parallel.
During use, matrix 1 is connected in structural beams by connecting hole 2 and connector, when by a Moment, folder
The piezoelectric quartz crystal plate with curvature effect between elastic deformation ring 5 is acted on by moment of flexure simultaneously, due to this kind of cut type
Crystal has curvature effect, so producing bound charge on a surface of a wafer, and the quantity of electric charge and moment of flexure direct proportionality, electricity
The electric charge that pole produces is connected with out splice going splice 3 by wire 4, and the quantity of electric charge of output is converted into voltage through charge amplifier
After signal, read or be acquired by computer by voltage digital table.
The present invention adopts piezoelectric bending effect direct measurement moment of flexure, rather than using traditional shearing effect, shearing force takes advantage of power
The method calculated bending moment of arm, simplifies intermediate link, improves certainty of measurement and the degree of accuracy.
The above, be only presently preferred embodiments of the present invention, and not the present invention is made with any pro forma restriction, all
It is any simple modification, equivalent variations and modification above example made according to the technical spirit of the present invention, all still fall within
In the range of technical solution of the present invention.
Claims (6)
1. a kind of moment of flexure measuring method based on piezoelectric quartz crystal plate curvature effect, is characterized in that：Using having curvature effect
Piezoelectric quartz crystal plate composition moment of flexure measurement sensing element, when by Moment, the bound charge that produces on a surface of a wafer
Equal in magnitude for produced electricity on the half-plane of line of demarcation two with optical axis, symbol is contrary, and the moment of flexure that applied and generation
Bound charge linear, and then accurately measure moment；Described moment of flexure measurement sensing element passes through to split electrode charge
The brilliant group of combined method composition moment of flexure measurement, the output charge that described moment of flexure measurement crystalline substance group produces is through wire by out splice going splice lead body
Outward, voltage signal is zoomed into by charge amplifier, then by digital table or computer recording result.
2. the moment of flexure measuring method based on piezoelectric quartz crystal plate curvature effect according to claim 1, is characterized in that：Described
The brilliant group of moment of flexure measurement includes three X0 cut type quartz wafers and four detecting electrodes, and four detecting electrodes clamp for one group two-by-two respectively
Between three bauerite chips, four detecting electrodes are labeled as electrode A, electrode B, electrode C, electrode D successively, when only axial force
During effect, produce shearing bound charge, electrode A and electrode C, the sign phase that electrode B is produced with electrode D in wafer surface
With, equal in magnitude, it is output as zero after electrode A is in parallel with electrode C；When only Moment, electrode A and electrode C, electrode B with
The sign that electrode D produces is identical, equal in magnitude, exports after electrode A is in parallel with electrode C, and output charge is unipolar two
Times, improve the sensitivity of the brilliant group of flexural measurement.
3. the moment of flexure measuring method based on piezoelectric quartz crystal plate curvature effect according to claim 1 and 2, is characterized in that：
Described brilliant group of moment of flexure measurement is arranged in the matrix of sensor by elastic deformation ring, described matrix is provided with connecting hole, just
In connecting with structural beams, described matrix is provided with out splice going splice, described out splice going splice is inner to be surveyed with described moment of flexure by wire
The brilliant group of amount connects.
4. a kind of moment of flexure measurement sensor based on piezoelectric quartz crystal plate curvature effect, including matrix, described matrix is provided with
Connecting hole, is characterized in that：It is provided with two elastic deformation rings in described matrix, be provided with curved between two described elastic deformation rings
The brilliant group of square measurement, described matrix is provided with out splice going splice, and described out splice going splice is inner brilliant with described moment of flexure measurement by wire
Group connects, and the outer end of described out splice going splice zooms into voltage signal by charge amplifier, then by digital table or computer recording
Result.
5. the moment of flexure measurement sensor based on piezoelectric quartz crystal plate curvature effect according to claim 4, is characterized in that：Institute
State the brilliant group of moment of flexure measurement and include three X0 cut type quartz wafers and four detecting electrodes, four detecting electrodes press from both sides for one group two-by-two respectively
Hold between three bauerite chips, four detecting electrodes are labeled as electrode A, electrode B, electrode C, electrode D successively, when only axially
The masterpiece used time, produce shearing bound charge, electrode A and electrode C, the sign phase that electrode B is produced with electrode D in wafer surface
With, equal in magnitude, it is output as zero after electrode A is in parallel with electrode C；When only Moment, electrode A and electrode C, electrode B with
The sign that electrode D produces is identical, equal in magnitude, exports after electrode A is in parallel with electrode C, and output charge is unipolar two
Times, improve the sensitivity of the brilliant group of flexural measurement.
6. the moment of flexure measurement sensor based on piezoelectric quartz crystal plate curvature effect according to claim 4, is characterized in that：Institute
Stating matrix is rectangle, is respectively arranged with described connecting hole at its corner, and described moment of flexure measurement crystalline substance group is amplexiformed and become in described elasticity
In the inner chamber boss of shape ring in the heart, described detecting electrode is symmetrically sticked on piezoelectric quartz crystal plate and the surface of boss plane parallel.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113237578A (en) * | 2021-05-08 | 2021-08-10 | 大连理工大学 | Multi-dimensional force/moment measuring method based on full-shear effect quartz wafer |
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Application publication date: 20170222 |