CN106248351A - Ghost image measuring device and ghost image measuring method for optical system - Google Patents

Abstract

The invention provides an optical system ghost image measurement device, which is sequentially provided with a light source, a beam expander collimation system, a dual-way rotary axial pointing adjustable spectroscopic system and an optical system to be measured along the optical path; The beam adjusting and splitting system includes a beam splitting component, a rotating component, an axial telescopic component, a folding mirror, a pointing adjustment component and a supporting component; the beam splitting component is arranged at one end of the axial telescopic component, and the pointing adjustment component is set at the other end of the axial telescopic component; The folding mirror is installed on the pointing adjustment component; the rotating component drives the axial telescopic component, the beam splitting component, the folding mirror and the pointing adjusting component to rotate. Using the characteristics of the beam-splitting prism, a beam of collimated and expanded beams is divided into two paths. Through the two-way rotary axial pointing adjustable beam-splitting system, the splitting light path can be rotated around the angled cone surface included in the transmitted optical axis to obtain the optical beam to be tested. Distribution of ghost positions in 3D space of the system.

Description

An optical system ghost image measuring device and its measuring method

technical field

The invention belongs to the field of optical detection, and relates to an optical system ghost image measurement device and a measurement method thereof.

Background technique

In order to improve the detection ability of the photoelectric detection system for long-distance and weak targets, it is necessary to increase the aperture of the optical system as much as possible, and try to improve the suppression level of stray light by the optical system, thereby improving the signal-to-noise ratio of the entire system; For the measurement of the target profile and attitude, it is necessary to use the spectral radiation characteristics of different targets to realize the multi-spectral measurement of the optoelectronic system. In this process, the performance of the optoelectronic system must be improved by suppressing the stray light energy of each spectral band.

Stray light refers to the non-target imaging light energy that can reach the target surface of the photoelectric system detector. Its existence will increase the output noise of the optical system, thereby reducing the contrast of the image plane. In severe cases, the target signal output by the system will be reduced. Completely annihilated in the noise, affecting the effective distance and resolution of the optical system.

According to the source of stray light, stray light can be divided into: external non-imaging stray light, imaging stray light and internal thermal radiation stray light. Imaging stray light refers to when the optical system is imaging, due to the residual reflection on the surface of the optical element, part of the imaging light reaches the image surface through an abnormal optical path inside the optical system, forming optical noise stray light, mainly manifested as ghost image and cold reflection phenomenon .

Cold reflection mainly exists in infrared optical systems with cooled detectors, and refers to the phenomenon that the image of the detector itself is reflected to the target surface to form a new noise image. The ghost image refers to the image formed by the convergence of part of the imaging light rays in the optical path of the optical system due to the residual reflection on the surface of the optical element. For the research and development of optical systems, ghost image testing is very necessary, especially for large-aperture, multi-spectral, and zoom photoelectric test equipment. The ghost image testing, analysis, and positioning work will directly affect the imaging quality of the optical system. Therefore, it is very necessary to establish a measurement device for efficiently measuring the ghost image of the optical system.

Contents of the invention

The technical problem to be solved by the present invention is to provide a measuring device and a measuring method capable of rapidly and accurately measuring ghost images of an optical system.

The technical solution of the present invention is to provide an optical system ghost image measurement device. optical system;

The above-mentioned light source is provided with a large dynamic range luminance meter, which is used to measure in real time the light source brightness when the optical system under test is in normal imaging and the light source brightness when ghost images appear; Adjust the target mechanism to form the target beam;

The above-mentioned two-way rotary axial pointing adjustable spectroscopic system includes a spectroscopic component, a rotating component, an axial telescopic component, a folding mirror, a pointing adjustment component and a supporting component;

The above-mentioned light splitting assembly is arranged at one end of the axial telescopic assembly, and its center is located on the optical axis of the outgoing beam of the beam expander and collimation system;

The above-mentioned pointing adjustment assembly is arranged at the other end of the axial telescopic assembly;

The above-mentioned folding mirror is installed on the pointing adjustment assembly; the included angle between the reflected optical axis of the folding mirror and the transmitted light axis of the beam splitting assembly is adjusted through the pointing adjustment assembly; the distance between the folding mirror and the beam splitting assembly is adjusted by the axis Adjust to the telescopic component; during the angle adjustment process of the pointing adjustment component, ensure that the reflected light beam of the folding mirror is located at the entrance pupil position of the optical system to be tested through distance adjustment;

One side of the above-mentioned rotating assembly is fixedly connected to the axial telescopic assembly, and the other side is connected to the support assembly through a rotating shaft; the rotating shaft of the rotating assembly coincides with the optical axis of the outgoing beam of the beam expander collimation system; the rotating assembly can drive the axial telescopic assembly , the light splitting component, the folding mirror and the pointing adjustment component rotate around the optical axis of the outgoing beam of the beam expander and collimator system.

The optical system ghost image measurement device of the present invention also includes a main control system, the above-mentioned main control system includes a light source control module connected with the light source, a control module connected with the adjustable target mechanism, a rotation component control module connected with the rotation component, and a pointing point connected with the pointing adjustment component. The adjustment component control module and the axial telescopic component control module connected with the axial telescopic component; the light source control module is used to control the output radiance of the light source component; the adjustable target mechanism control module is used to control the movement of the target plate of the adjustable target mechanism; the rotation The component control module is used to control the rotation of the rotary component; the pointing adjustment component control module is used to control the angle change of the pointing adjustment component; the axial telescopic component control module is used to control the movement of the axial telescopic component.

In order to adjust the attitude of the optical system to be tested and the beam expander collimation system, the optical system ghost image measurement device of the present invention also includes a first attitude adjuster and a second attitude adjuster, and the first attitude adjuster is located at the outlet of the beam expander collimator system. Outside the optical axis of the light beam, the above-mentioned second attitude adjuster carries the optical system to be tested, and the above-mentioned main control system also includes the control modules of the first attitude adjuster and the second attitude adjuster, which are used to control the first attitude adjuster and the second attitude adjuster. Attitude adjuster, which can realize azimuth, pitch, roll, yaw and lift movement.

The above-mentioned first attitude adjuster and second attitude adjuster are multi-dimensional adjustment mechanisms, which can realize rapid alignment adjustment at the initial stage of the test according to the actual situation of the optical system to be tested.

In order to be able to adapt to different systems to be tested, the above-mentioned adjustable target mechanism includes a multi-target automatic replacement rotary table and a variety of target boards arranged on the multi-target automatic replacement rotary table; the various target boards are star point boards; The star hole diameter of the star point board is different, and the star point plate with the appropriate star hole diameter can be selected according to the actual parameters of the system to be tested.

In order to provide a uniform light source, the above-mentioned light source is an integrating sphere light source. The integrating sphere light source is a mixed light source of xenon lamp and halogen tungsten lamp. There is a variable diaphragm on the outgoing light path of the xenon lamp and halogen tungsten lamp, which can realize the brightness of the light outlet of the integrating sphere light source. Adjustment, the dynamic range of the integrating sphere light source can reach 120dB.

In order to avoid introducing stray light as much as possible during the collimation process, the above-mentioned beam expander collimation system adopts an off-axis reflection optical system in the form of two mirrors, wherein the primary mirror is a spherical mirror.

The above-mentioned light-splitting component is a light-splitting prism, and the surface shape accuracy of the light-splitting prism and the folding mirror reaches 1/50λ, where λ=632.8nm, so that almost no aberration is introduced after light-splitting.

The present invention also provides a method for measuring an optical system ghost image, comprising the following steps:

Step 1: Turn on the light source and wait for it to stabilize;

Step 2: According to the specific parameters of the optical system to be tested, according to the diffraction formula of the optical system, the specific formula is as formula (1), calculate the diameter of the star hole to be selected during the test, and select the appropriate star hole from the adjustable target mechanism to move into the integral The light outlet of the spherical light source;

$\mathrm{<span\; class="notranslate">\; d</span>}<span\; class="notranslate">\; \&le;</span>\frac{\mathrm{<span\; class="notranslate">\; 1.22</span>}\mathrm{<span\; class="notranslate">\; \&lambda;</span>}\mathrm{<span\; class="notranslate">\; f</span>}}{\mathrm{<span\; class="notranslate">\; D.</span>}}<span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 1</span>}<span\; class="notranslate">\; )</span>$

Among them: d is the star hole diameter, the unit is mm;

λ is the working center wavelength, the unit is mm;

f is the focal length of the beam expander collimation system, the unit is mm;

D is the entrance pupil diameter of the optical system to be tested, in mm;

Step 3: Imaging the transmitted beam of the spectroscopic component after the optical system to be tested is turned on; in this process, the reflected beam of the folding mirror is not required to be imaged, so the output of the folding mirror can be adjusted by adjusting the pointing adjustment component and the axial telescopic component The light beam is not at the entrance pupil of the optical system to be tested; the main control system adjusts the attitudes of the first attitude regulator and the second attitude regulator so that the optical axis or visual axis of the optical system to be tested is parallel to the optical axis of the beam expander collimator system ;

Step 4: Adjust the brightness L of the light source through the main control system; while keeping the brightness of the light source unchanged, adjust the pointing adjustment component through the main control system, control the axial telescopic component, and ensure that the outgoing beam of the folding mirror covers the area of the optical system to be tested. Entrance pupil; at the same time, adjust the rotation of the rotating component through the main control system; each time the pointing adjustment component and the rotating component are adjusted, record the angle θ between the pointing of the reflected optical axis of the corresponding folding mirror and the pointing of the transmitted light axis of the splitting component and the rotating component Rotation angle ω; the optical system to be tested collects images, checks whether there are ghost images in the collected images, and filters the corresponding L, θ and ω when there are ghost images;

Step 5: Change the brightness L of the light source, repeat step 4, and record the ghost image information corresponding to different θ and different ω.

After obtaining the ghost image information, the entrance pupil illuminance when the optical system to be tested is normally imaged and the entrance pupil illuminance when the ghost image occurs can also be calculated according to formula (2) and formula (3);

Among them: d is the star hole diameter, the unit is mm;

f is the focal length of the beam expander collimation system, the unit is mm;

LNormal is the brightness of the light source when the optical system is measuring _normal imaging, the unit is W/m ² ·sr;

L _{ghost image} is the brightness of the light source when the ghost image appears in the measurement optical system, the unit is W/m ² ·sr;

_τtrans is the transmittance of the transmitted light path of the light splitting component;

τ _{is divided into} the transmittance of the splitting light path of the splitting component;

τ is the transmittance of the beam expander collimator system.

Through the obtained ghost image information and the illuminance relationship between the normal imaging of the optical system to be tested and the entrance pupil where the ghost image is formed, the structure of the optical system can be improved through theoretical calculations to avoid ghost images.

The beneficial effects of the present invention are:

1. The present invention uses the characteristics of the beam splitting prism to divide a beam of collimated and expanded beam into two paths, and the direction of the transmitted collimated beam remains unchanged. Through the two-way rotary axial pointing adjustable spectroscopic system, the splitting can be realized The optical path rotates around the angled conical surface of the transmitted optical axis. Through the ghost image test, the distribution of the three-dimensional ghost image position of the optical system to be tested can be obtained, which is essential for the analysis of the cause of ghost images in optical systems, especially high-sensitivity detection optical systems. Practical tool; in addition, it can also measure the distribution of ghost images in the optical lens design stage, and adjust the optical lens in time to avoid the appearance of ghost images in the later optical system;

2. In the two-way rotary axial pointing adjustable spectroscopic system of the present invention, a relationship is established between the pointing direction of the reflected beam of the folding mirror and the axial direction of the transmitted beam of the spectroscopic component, so that the formation of ghost images can be controlled during the ghost image measurement process. Establish a one-to-one correspondence between the incident light direction corresponding to the image and the optical axis or visual axis of the optical system;

3. The optical system ghost image measurement device of the present invention can automatically and quickly obtain the incident light position and energy of the optical system to form a ghost image through the adjustment of the main control system. The test process is stable and reliable, and the test efficiency can be greatly improved. , very suitable for application in engineering testing.

4. An optical system ghost image measurement device of the present invention, the integrating sphere light source is composed of a halogen tungsten lamp and a xenon lamp light source, the stability can reach 1%, and the brightness of the light outlet has a very large dynamic range, which can ensure that the ghost image test is accurate to the light source The need for brightness; the spectral range can reach 300nm to 2500nm, which can realize the test of ghost images of visible and near-infrared optical systems;

5. An optical system ghost image measurement device of the present invention, the adjustable target mechanism adopts a multi-target automatic replacement rotary table, which can quickly replace the target target plate, which greatly saves the test time;

6. In an optical system ghost image measurement device of the present invention, the attitude adjustment device uses a six-degree-of-freedom adjustment table, which can Greatly improve alignment efficiency.

Description of drawings

Fig. 1 is the structural representation of a kind of optical system ghost image measuring device provided by the present invention;

Fig. 2 is a structural schematic diagram of a dual-path rotary axial pointing adjustable spectroscopic system in the present invention;

Figure 3 is a schematic diagram of the angle between the incident light and the visual axis.

The reference signs in the figure are: 1-light source; 2-adjustable target mechanism; 3-beam expander collimation system; 4-two-way rotary axial pointing adjustable spectroscopic system; 5-first attitude adjustment device; 6- Main control system; 7-light splitting component; 8-rotation component; 9-axial telescopic component; 10-folding mirror; 11-pointing adjustment component; 12-supporting component;

detailed description

The present invention will be further described below in conjunction with the accompanying drawings.

As shown in Figure 1, the optical system ghost image measurement device of the present invention includes a main control system 6, an integrating sphere light source 1, a beam expander collimation system 3, and a dual-way rotary axial pointing adjustable light splitter arranged in sequence along the optical path. System 4 and the optical system to be tested located on the second attitude adjustment instrument 13 . The integrating sphere light source 1 and the beam expander collimation system 3 are placed on the table; a first attitude adjustment device 5 is arranged outside the beam expander collimation system 3 . In order to facilitate the attitude adjustment of the system under test, a six-degree-of-freedom adjustable attitude adjustment device is introduced to facilitate the rapid establishment of a relationship between the incident direction of light and the optical system under test, which can greatly improve test efficiency.

The main control system 6 of this embodiment includes various control modules, specifically controlling the work of the light source 1, the attitude adjuster and the two-way rotary axial pointing adjustable spectroscopic system 4 and completing data recording and processing.

The integrating sphere light source 1 in this embodiment is a mixed light source of a xenon lamp and a tungsten-halogen lamp, and an iris diaphragm is arranged on the outgoing light path of the xenon lamp and the tungsten-halogen lamp, and the brightness of the light outlet of the integrating sphere light source is adjusted by the iris diaphragm. , The dynamic range of the integrating sphere light source can reach 120dB. Since the response of the ghost image to the detector of the optical system under test is relatively low, the relative response of the ghost image can be improved only when the light is irradiated, and the detector can respond. Therefore, if a light source with a dynamic range of 120dB is selected, the energy ratio can reach the order of 10 ⁶ , which is enough to increase the response value of the ghost image to the corresponding range of the detector. The integrating sphere light source is also equipped with a large dynamic range luminance meter for real-time monitoring of the internal optical power of the integrating sphere, which can monitor the brightness of the integrating sphere light source in real time.

An adjustable target mechanism 2 is provided at the output end of the integrating sphere light source 1, and the adjustable target mechanism 2 is used to adjust the outgoing light of the integrating sphere light source 1 to form a target beam. The adjustable target mechanism 2 of this embodiment includes multi-target automatic replacement and rotation The platform and a variety of target boards set on it; the target boards are all star point boards; there are multiple groups of star point boards; the star hole diameters of each group of star point boards are different. The multi-target automatic replacement rotary table can quickly replace the target target board, saving test time. Through the drive circuit, the target wheel is driven to rotate to realize the replacement of the target target board. There are three photoelectric switches in the coaxial direction of each target board. It is used for encoding detection and returns the encoding information to the main control system. The light source control module in the main control system selects a star point plate with a suitable star hole diameter according to the parameters of the actual optical system to be tested.

The beam expander and collimation system 3 in this embodiment is an off-axis reflective optical system, and the existing off-axis reflective optical systems include single-mirror and double-mirror systems. No matter in the single-mirror or double-mirror system, the primary mirror is the primary scattering surface of the system, and the stray light mainly comes from the primary mirror. The roughness requirements are very strict, usually in the order of nm. Compared with the aspherical surface, the processing technology of the spherical surface is mature, and it is easier to obtain a high-quality reflective surface. Therefore, the primary mirror of this embodiment adopts a spherical mirror. Since a single spherical mirror system cannot meet the requirements of parallelism better than 10″ and system wave aberration better than 2λrms Requirements, so this embodiment uses a dual-mirror system.

As shown in FIG. 2 , the dual-path rotary axial pointing adjustable spectroscopic system 4 of this embodiment includes a rotating component 8 , an axially telescopic component 9 , a spectroscopic component 7 , a pointing adjustment component 11 , a folding mirror 10 and a support component 12 , The beam-splitting assembly 7 is a beam-splitting prism, and the beam-splitting prism is arranged at one end of the axial telescopic assembly 9, and its center is located on the optical axis of the outgoing beam of the beam expander collimation system 3; the pointing adjustment assembly 11 is arranged at the other end of the axial telescopic assembly 9, The folding axis mirror 10 is arranged on the pointing adjustment assembly 11; the reflected light axis of the folding axis mirror 10 and the transmitted light axis of the light splitting assembly 7 can realize the change of the included angle through the angle adjustment of the pointing adjustment assembly 11; the axial telescopic assembly 9 The extension distance is adjustable, which is used to realize the distance adjustment between the folding mirror 10 and the beam splitting assembly 7. During the angle adjustment process of the pointing adjustment assembly 11, the distance adjustment ensures that the reflected light beam of the folding mirror 10 is located at the entrance pupil position of the optical system; One side of the rotating assembly 8 is fixedly connected to the axial telescopic assembly 9, and the other side is connected to the support assembly 12 through a rotating shaft. The optical axis of the outgoing light beam of the beam expander collimation system 3 rotates; in the present embodiment, the surface shape accuracy of the light splitting assembly 7 and the folding mirror 10 reaches 1/50λ, where λ=632.8nm, so that the image will hardly be introduced after the light splitting Difference.

The specific test process is as follows:

The light source control module in the main control system 6 controls the integrating sphere to light up; according to the F number of the optical system to be measured, the entrance pupil diameter D and the focal length f of the beam expander collimation system 3, calculate the star hole that can make the optical system to be measured diffractive Diameter d, the main control system controls the adjustable target mechanism 2 to rotate to a suitable star hole; the integrating sphere illuminates the selected star hole target, forms a parallel beam through the beam expander collimation system 3, and simulates an infinite point target; the parallel beam passes through the double The transmission light path of the light splitting component 7 in the optical splitting system 4 of the rotary axial pointing adjustable, the optical system to be tested images the target of this light path; the light source control module of the main control system adjusts the output brightness of the integrating sphere, so that the optical system to be measured The image reaches 80% of quantized digits; the main control system attitude adjuster module controls the first attitude adjuster and the second attitude adjuster to adjust the attitude, so that the image formed by the optical system to be tested on the transmitted light path is located at the center of the photoelectric imaging device; The main control system reads the attitude information of the attitude adjustment instrument at this time and records it as process data; due to the transmitted light axis of the light splitting assembly 7 in the dual-way rotary axial pointing adjustable light splitting system 4 and the reflected light of the folding axis mirror 10 There is a corresponding angle relationship between the axes, which is stored in the main control system; the pointing adjustment assembly control module in the main control system adjusts the angle of the pointing adjustment assembly, and adjusts the angle between the transmitted optical axis of the light splitting assembly 7 and the folding mirror 10 accordingly. The angle θ of the reflected optical axis, and at the same time, according to the needs of the actual test, control the movement of the axial telescopic component 9, so that the reflected beam of the folding mirror 10 covers the entrance pupil of the optical system to be tested; the main control system rotation component control module controls the rotation The component is rotated, and the rotation angle ω at this time is recorded at the same time, and the optical system to be tested collects images; the light source control module of the main control system controls the output brightness L of the integrating sphere to increase, and repeats the above steps to establish the corresponding [L,θ ,ω] matrix relationship, and stored in the main control system record, and finally output to the result interface.

By constantly changing the angle θ between the transmitted optical axis of the spectroscopic component and the reflected optical axis of the folding mirror, the measurement relationship between different luminances in the spherical coordinate system corresponding to the angle θ between the incident light and the visual axis of the optical system to be tested is established (such as Figure 3). At the same time, according to the illuminance formula at the light outlet of the beam expander collimation system, as shown below, the illuminance E at the entrance pupil when the optical system is _normal imaging and the illuminance E ghost at the entrance pupil when ghost _images appear (beam expander collimation system The illuminance at the light exit multiplied by the transmittance of each channel of the light splitting component is the illuminance formula reaching the entrance pupil of the optical system). In this way, through the rapid measurement of the entire measuring device, the proportional relationship between the entrance pupil illuminance when the optical system forms a normal image and the entrance pupil illuminance when a ghost image occurs can be established.

Among them: d is the star hole diameter, the unit is: mm;

f is the focal length of the beam expander collimation system, the unit is mm;

LNormal is the brightness of the light source of the integrating sphere when the optical system is _normally imaging, the unit is W/m ² ·sr;

L _{ghost image} is the brightness of the light source of the integrating sphere when ghost images appear in the measurement optical system, the unit is W/m ² ·sr;

τ_通is the transmittance of the transmitted light path of the light splitting component;

τ _{is divided into} the transmittance of the splitting light path of the splitting component;

τ is the transmittance of the beam expander collimator system.

The optical system ghost image measurement device of the present invention can establish the corresponding spatial pointing relationship for forming the ghost image through the measurement of the optical system ghost image, and can also establish the relationship between the illuminance at the entrance pupil when the ghost image is formed and the normal imaging through the measurement. relation. Through the acquisition of the above two kinds of information, theoretical calculations and software simulations can be used to find means to eliminate or reduce the formation of ghost images, and make corresponding changes to the structure of the optical system in order to develop a better optical system.

The optical system ghost image measurement device of the present invention is very suitable for application in optical systems such as detection cameras and star sensors, and can also be applied to high-power laser optical system testing through changes in light sources, and is worthy of vigorous promotion.

Claims (9)

1. an optical system ghost image measurement apparatus, it is characterised in that: along light path be disposed with light source, beam-expanding collimation system, Two-way rotation type axial points to adjustable light splitting system and optical system to be measured；

Being provided with Larger Dynamic range brightness meter on described light source, the exit end of described light source is provided with adjustable target mechanism；

Described two-way rotation type axial points to adjustable light splitting system and includes spectrum groupware, rotary components, axial stretching assembly, folding axle Mirror, sensing adjust assembly and a support component；

Described spectrum groupware is arranged at one end of axial stretching assembly, and spectrum groupware is centrally located at beam-expanding collimation system emergent light On the optical axis of bundle；

The described adjustment assembly that points to is arranged at the other end of axial stretching assembly；

Described folding axle mirror is installed on sensing and adjusts on assembly；Between reflection optical axis and the transmission optical axis of spectrum groupware of this folding axle mirror Angle angle by point to adjust assembly adjust；Distance between folding axle mirror and spectrum groupware is adjusted by axial stretching assembly Whole；

Described rotary components side and axial stretching assembly are connected, and rotary components opposite side is connected by rotating shaft and a support component； The rotating shaft of rotary components and the optical axis coincidence of the outgoing beam of beam-expanding collimation system；Rotary components drives axial stretching assembly, divides Optical assembly, folding axle mirror and sensing adjust assembly and rotate.

Optical system ghost image measurement apparatus the most according to claim 1, it is characterised in that: also include master control system, described Master control system includes light source control module, adjustable target mechanism controls module, rotary components control module, points to adjustment assembly control Molding block and axial stretching component control module；

The outfan of described light source control module is connected with light source；The outfan of described adjustable target mechanism controls module is with adjustable Target mechanism connects；The outfan of described rotary components control module is connected with rotary components；Described sensing adjusts assembly control The outfan of module is connected with pointing to adjustment assembly；The outfan of described axial stretching component control module and axial stretching assembly Connect.

Optical system ghost image measurement apparatus the most according to claim 1, it is characterised in that: also include the first pose adjustment instrument With the second pose adjustment instrument, described first pose adjustment instrument is positioned at outside the optical axis of beam-expanding collimation system outgoing beam, and described second Pose adjustment instrument carries optical system to be measured；

Described master control system also includes the first pose adjustment instrument and the second pose adjustment instrument control module, described first pose adjustment Instrument and the outfan of the second pose adjustment instrument control module and the first pose adjustment instrument and the second pose adjustment instrument connect.

Optical system ghost image measurement apparatus the most according to claim 1, it is characterised in that: described adjustable target mechanism includes Multiple target is automatically replaced turntable and is arranged on the plurality of target plate that multiple target is replaced on turntable automatically；Described plurality of target Plate is star tester；The star bore dia of described star tester is different.

5. according to the arbitrary described optical system ghost image measurement apparatus of Claims 1-4, it is characterised in that: described light source is long-pending Bulb separation light source, described integrating sphere light source is xenon lamp and halogen tungsten lamp mixing light source, and the emitting light path of xenon lamp and halogen tungsten lamp is provided with can Darkening door screen.

6. according to the arbitrary described optical system ghost image measurement apparatus of Claims 1-4, it is characterised in that: described beam-expanding collimation System is off-axis reflection optical system, and described off-axis reflection optical system uses bimirror form, and wherein primary mirror is coquille.

7. according to the arbitrary described optical system ghost image measurement apparatus of Claims 1-4, it is characterised in that: described spectrum groupware For Amici prism, the surface figure accuracy of described Amici prism and described folding axle mirror reaches 1/50 λ, wherein λ=632.8nm.

8. an optical system ghost image measuring method, it is characterised in that: comprise the following steps:

Step one: some bright light source, treats that it is stable；

Step 2: according to the parameter of optical system to be measured, utilizes formula (1) to calculate star bore dia, and from adjustable target mechanism Star hole is selected to move at the light-emitting window of integrating sphere light source；

$d\&le;\frac{1.22\mathrm{\&lambda;}f}{D}---\left(1\right)$

Wherein: d is star bore dia, unit is mm；

λ is operating central wavelength, and unit is mm；

F is the focal length of beam-expanding collimation system, and unit is mm；

D is the Entry pupil diameters of optical system to be measured, and unit is mm；

Step 3: start optical system to be measured, the transmitted light beam imaging to spectrum groupware；Adjust the first pose adjustment instrument and second The attitude of pose adjustment instrument so that the optical axis of optical system to be measured or the optical axis are parallel with the optical axis of beam-expanding collimation system；

Step 4: adjust light-source brightness L；Keep this brightness, adjust and point to adjustment assembly, control axial stretching assembly, make folding axle The outgoing beam of mirror is positioned at the entrance pupil of optical system to be measured；Adjust rotary components to rotate simultaneously；Often adjust and once point to adjustment Assembly and rotary components, the reflection optical axis of record folding axle mirror points to the angle theta between the sensing of spectrum groupware transmission optical axis and rotation Turn assembly rotational angle ω；Collection optical system image to be measured, checks with or without ghost image in gathered image, when screening has ghost image Corresponding L, θ and ω；

Step 5: change light-source brightness L, repeats step 4.

Optical system ghost image measuring method the most according to claim 8, it is characterised in that: also include

Step 6: Pupil luminance when calculating optical system normal imaging to be measured by formula (2) and formula (3) with ghost image occurs Time Pupil luminance；

Wherein: d is star bore dia, unit is mm；

F is the focal length of beam-expanding collimation system, and unit is mm；

L_NormallyFor measuring light-source brightness during optical system normal imaging, unit is W/m²·sr；

L_{Ghost image}Light-source brightness during ghost image occur for measurement optical system, unit is W/m²·sr；

τ_ThoroughlyFor spectrum groupware transmitted light path transmitance；

τ_PointFor spectrum groupware light splitting optical path transmitance；

τ is the transmitance of beam-expanding collimation system.