CN106248351A - Ghost image measuring device and ghost image measuring method for optical system - Google Patents
Ghost image measuring device and ghost image measuring method for optical system Download PDFInfo
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- 229910052736 halogen Inorganic materials 0.000 claims description 7
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- 229910052721 tungsten Inorganic materials 0.000 claims description 7
- 239000010937 tungsten Substances 0.000 claims description 7
- 229910052724 xenon Inorganic materials 0.000 claims description 7
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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Abstract
The invention provides a ghost image measuring device of an optical system, which is sequentially provided with a light source, a beam expanding collimation system, a double-path rotary type axial direction adjustable light splitting system and an optical system to be measured along a light path; the double-path rotary type axial direction adjustable light splitting system comprises a light splitting component, a rotating component, an axial telescopic component, a folding axis mirror, a direction adjusting component and a supporting component; the light splitting assembly is arranged at one end of the axial telescopic assembly, and the pointing adjusting assembly is arranged at the other end of the axial telescopic assembly; the folding axial lens is arranged on the directional adjusting component; the rotating assembly drives the axial telescopic assembly, the light splitting assembly, the folding axial lens and the pointing adjusting assembly to rotate. The characteristics of the beam splitter prism are used for dividing one beam of collimated beam expanding light beam into two paths, and the two paths of rotary type axial direction adjustable beam splitting systems can realize that a beam splitting light path rotates around a transmission light axis clamping pyramid plane to obtain the distribution of three-dimensional space ghost image positions of the optical system to be measured.
Description
Technical field
The invention belongs to field of optical detection, relate to a kind of optical system ghost image measurement apparatus and measuring method thereof.
Background technology
In order to improve Photodetection system to the detectivity of remote and weak signal target it is necessary to increase optical system mouth as far as possible
Footpath, manages to improve the optical system suppression level to veiling glare, thus improves the signal to noise ratio of whole system；In order to realize in target range
Under complex environment, objective contour and attitude are measured it is necessary to utilize the spectral characteristics of radiation of different target to realize electro-optical system
Multispectral survey, will improve electro-optical system performance by suppressing the veiling glare energy of each spectral coverage in this process.
Veiling glare refers to arrive the light energy of the non-targeted imaging of electro-optical system detector target surface, and its existence can be led
Cause the increase of the output noise of optical system, so that the reduction of image planes contrast, the target letter that system exports time serious, can be made
Number it is buried in completely in noise, has influence on EFFECTIVE RANGE and the resolution capability of optical system.
Veiling glare can be divided into by the source according to veiling glare: outside non-imaged veiling glare, imaging veiling glare and inside heat
Radiation dispersion light.When imaging veiling glare refers to optical system imaging, owing to the residual reflectivity of optical element surface causes part
Imaging light arrives image planes with improper light path inside optical system, forms the veiling glare of optical noise, mainly shows as ghost image
With cold emission phenomenon.
Cold emission phenomenon is primarily present in the infrared optical system with refrigeration mode detector, refers to the picture of detector self
It is reflected to target surface and forms the phenomenon of new noise image.And ghost image refers to owing to the residual reflectivity of optical element surface causes
Part imaging light converges the picture of formation in optical system light path.For the research and development of optical system, the test of ghost image is
The most necessary, especially to heavy caliber, multispectral, zoom photoelectricity test equipment, the test of its ghost image, analyze, position work
By the image quality of direct relation optical system, so the measurement apparatus setting up a efficient measurement optical system ghost image is very
Necessary.
Summary of the invention
The technical problem to be solved is to provide a kind of measurement that can quick and precisely measure optical system ghost image
Device and measuring method.
The technical solution of the present invention is to provide a kind of optical system ghost image measurement apparatus, and it is particular in that: edge
Light path is disposed with light source, beam-expanding collimation system, two-way rotation type axial sensing adjustable light splitting system and optical system to be measured；
Larger Dynamic range brightness meter it is provided with on above-mentioned light source, when being used for measuring in real time optical system normal imaging to be measured
Light-source brightness and light-source brightness time ghost image occurs；The exit end of this light source is provided with adjustable target mechanism, and outgoing light source passes through
Adjustable target mechanism forms target beam；
Above-mentioned two-way rotation type axial point to adjustable light splitting system include spectrum groupware, rotary components, axial stretching assembly,
Folding axle mirror, sensing adjust assembly and a support component；
Above-mentioned spectrum groupware is arranged at one end of axial stretching assembly, and it is centrally located at beam-expanding collimation system outgoing beam
On optical axis；
Above-mentioned sensing adjusts assembly and is arranged at the other end of axial stretching assembly；
Above-mentioned folding axle mirror is installed on sensing and adjusts on assembly；The reflection optical axis of this folding axle mirror and the transmission optical axis of spectrum groupware
Between angle angle by point to adjust assembly adjust；Distance between folding axle mirror and spectrum groupware is by axial stretching assembly
Adjust；Photometry is treated pointing to adjust to be positioned at by the reflection light beam of distance regulating guarantee folding axle mirror during assembly angle adjusts
The entrance pupil position of system；
The side of above-mentioned rotary components and axial stretching assembly are connected, and opposite side is connected by rotating shaft and a support component；Rotation
Turn the rotating shaft of assembly and the optical axis coincidence of the outgoing beam of beam-expanding collimation system；Rotary components can drive axial stretching assembly,
Spectrum groupware, folding axle mirror and sensing adjust assembly and rotate around the optical axis of the outgoing beam of beam-expanding collimation system.
Optical system ghost image measurement apparatus of the present invention also includes master control system, above-mentioned master control system to include with light source and connects light
Source control module and adjustable target mechanism connect and rotary components connects rotary components control module and points to adjustment assembly
Pointing to of connecting adjusts component control module and the axial stretching component control module of axial stretching assembly connection；Light source control
Module is in order to control light source assembly output spoke brightness；Adjustable target mechanism controls module is in order to control adjustable target institution aim plate
Motion；Rotary components control module rotates in order to control rotary components；Point to and adjust component control module in order to control sensing
Adjustment assembly angle changes；Axial stretching component control module is in order to control axial stretching component movement.
Carrying out pose adjustment to treat photometry system and beam-expanding collimation system, optical system ghost image of the present invention measures dress
Putting and also include the first pose adjustment instrument and the second pose adjustment instrument, above-mentioned first pose adjustment instrument is positioned at beam-expanding collimation system outgoing
Outside the optical axis of light beam, above-mentioned second pose adjustment instrument carries optical system to be measured, and above-mentioned master control system also includes that the first attitude is adjusted
Whole instrument and the control module of the second pose adjustment instrument, be used for controlling the first pose adjustment instrument and the second pose adjustment instrument, can realize
Orientation, pitching, roll, beat and elevating movement.
Above-mentioned first pose adjustment instrument and the second pose adjustment instrument are multi-dimensional adjusting mechanisms, can be according to optical system to be measured
Practical situation, realizes rapid alignment in the test starting stage and adjusts.
In order to adapt to different examining systems for the treatment of, above-mentioned adjustable target mechanism include multiple target automatically replace turntable with
And it is arranged on the plurality of target plate that multiple target is replaced on turntable automatically；This plurality of target plate is star tester；Multiple star tester
Star bore dia different, the star tester of suitable star bore dia can be selected according to the actual parameter treating examining system.
In order to provide uniform light source, above-mentioned light source is integrating sphere light source, this integrating sphere light source xenon lamp and halogen tungsten lamp
Mixing light source, xenon lamp is provided with iris with the emitting light path of halogen tungsten lamp, can realize the tune of integrating sphere light source light-emitting window brightness
Joint, the dynamic range of integrating sphere light source is up to 120dB.
In order to, in alignment procedure, not introduce veiling glare as far as possible, above-mentioned beam-expanding collimation system uses the off-axis of bimirror form
Reflective optics, wherein primary mirror is coquille.
Above-mentioned spectrum groupware is Amici prism, and the surface figure accuracy of this Amici prism and folding axle mirror reaches 1/50 λ, wherein λ=
632.8nm, introduces aberration hardly after such light splitting.
Present invention also offers a kind of optical system ghost image measuring method, comprise the following steps:
Step one: some bright light source, treats that it is stable；
Step 2: according to the design parameter of optical system to be measured, according to optical system diffraction formula, concrete formula such as formula
(1), need the star bore dia selected when calculating test, and select suitable star hole to move into integrating sphere light from adjustable target mechanism
At the light-emitting window in source；
Wherein: d is star bore dia, unit is mm；
λ is operating central wavelength, and unit is mm；
F is the focal length of beam-expanding collimation system, and unit is mm；
D is the Entry pupil diameters of optical system to be measured, and unit is mm；
Step 3: transmitted light beam imaging to spectrum groupware after optical system to be measured start；Need not folding in this process
The reflection light beam imaging of axle mirror, therefore, it can point to adjustment assembly by adjustment and axial stretching assembly adjusts going out of folding axle mirror
Irradiating light beam is not at the entrance pupil of optical system to be measured；Master control system adjusts the first pose adjustment instrument and the appearance of the second pose adjustment instrument
State so that the optical axis of optical system to be measured or the optical axis are parallel with the optical axis of beam-expanding collimation system；
Step 4: adjust light-source brightness L by master control system；In the case of keeping light-source brightness constant, pass through master control
System call interception points to and adjusts assembly, controls axial stretching assembly, it is ensured that the outgoing beam of folding axle mirror covers optical system to be measured
Entrance pupil；Adjust rotary components by master control system to rotate simultaneously；Often adjust once to point to and adjust assembly and rotary components, record phase
The reflection optical axis of the folding axle mirror answered points to the angle theta between the sensing of spectrum groupware transmission optical axis and rotary components rotational angle
ω；Collection optical system image to be measured, checks that, with or without ghost image in gathered image, screening has L, θ and ω corresponding during ghost image；
Step 5: change light-source brightness L, repeats step 4, the different θ of record and different ghost image information corresponding for ω.
When can also calculate optical system normal imaging to be measured according to formula (2) and formula (3) after obtaining ghost image information
Pupil luminance and Pupil luminance when ghost image occurs；
Wherein: d is star bore dia, unit is mm；
F is the focal length of beam-expanding collimation system, and unit is mm；
LNormallyFor measuring light-source brightness during optical system normal imaging, unit is W/m2·sr；
LGhost imageLight-source brightness during ghost image occur for measurement optical system, unit is W/m2·sr；
τThoroughlyFor spectrum groupware transmitted light path transmitance；
τPointFor spectrum groupware light splitting optical path transmitance；
τ is the transmitance of beam-expanding collimation system.
By the ghost image information obtained and optical system normal imaging to be measured and the illumination relation formed at the entrance pupil of ghost image,
Through Theoretical Calculation, the structure of optical system can be improved, it is to avoid produce ghost image.
The invention has the beneficial effects as follows:
1, present invention uses the characteristic of Amici prism, a branch of collimator and extender light beam is divided into two-way, and transmission collimation
The sensing of light beam is constant, points to adjustable light splitting system by two-way rotation type axial, can realize light splitting optical path and press from both sides around transmission optical axis
Pyramidal plane rotates, and is tested by ghost image, and the distribution of the three dimensions ghost image position of available optical system to be measured, is optical system
The especially requisite practical tool of high sensitivity detection class optical system ghost image genetic analysis；Additionally, it is possible at optics
Ghost image distribution is measured by the lens design stage, is adjusted optical lens in time, it is to avoid later stage optical system ghost image
Occur；
2, the two-way rotation type axial of the present invention point to folding axle mirror reflection light beam pointing direction in adjustable light splitting system with
Relation is established between spectrum groupware transmitted light beam axial direction, so can be right to forming ghost image institute during ghost image is measured
One-to-one relationship is set up with system optical axis or the optical axis in the incident ray direction answered；
3, the optical system ghost image measurement apparatus of the present invention automatically, quickly can be obtained by the adjustment of master control system
Optical system forms incident light position and the energy of ghost image, and test process is stable, reliable, and can improve test effect greatly
Rate, is highly suitable in engineering test application.
4, a kind of optical system ghost image measurement apparatus of the present invention, integrating sphere light source is made up of halogen tungsten lamp and xenon source,
Stability is up to 1%, and light-emitting window brightness has the biggest dynamic range, it is ensured that the ghost image test needs to light-source brightness；
Spectral region, up to 300nm～2500nm, can realize visible, the test of near-infrared optical system ghost image；
5, a kind of optical system ghost image measurement apparatus of the present invention, adjustable target mechanism selects multiple target automatically to replace rotation
Platform, quickly can be replaced target target plate, be greatly saved the testing time；
6, a kind of optical system ghost image measurement apparatus of the present invention, pose adjustment instrument uses the adjustment of six degree of freedom
Platform, in carrying out spectrum groupware transmission optical axis and system optical axis to be measured or optical axis alignment procedures, can greatly improve alignment
Efficiency.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of optical system ghost image measurement apparatus provided by the present invention；
Fig. 2 is the structural representation that in the present invention, two-way rotation type axial points to adjustable light splitting system；
Fig. 3 is incident ray and optical axis angle schematic diagram.
In figure, reference is: 1-light source；2-adjustable target mechanism；3-beam-expanding collimation system；4-two-way rotation type axial
Point to adjustable light splitting system；5-the first pose adjustment instrument；6-master control system；7-spectrum groupware；8-rotary components；9-axial stretching
Assembly；10-rolls over axle mirror；11-points to and adjusts assembly；12-props up support component；13-the second pose adjustment instrument.
Detailed description of the invention
Below in conjunction with accompanying drawing, the present invention will be further described.
As it is shown in figure 1, optical system ghost image measurement apparatus of the present invention, including master control system 6, also include setting successively along light path
The integrating sphere light source 1 put, beam-expanding collimation system 3, two-way rotation type axial point to adjustable light splitting system 4 and are positioned at the second attitude and adjust
Optical system to be measured on whole instrument 13.Integrating sphere light source 1 and beam-expanding collimation system 3 are placed on table top；At beam-expanding collimation system 3
Outside be provided with the first pose adjustment instrument 5.For the ease for the treatment of the attitude regulation of examining system, introduce six degree of freedom adjustable attitude
Adjust instrument, facilitate quick foundation between the incident direction of light and optical system to be measured to contact, testing efficiency can be greatly improved.
The present embodiment master control system 6 includes various control module, and concrete light source 1, pose adjustment instrument and the two-way of controlling rotates
Formula is axially directed to the work of each parts in adjustable light splitting system 4 and completes data record and process.
The mixing light source that integrating sphere light source 1 is xenon lamp and halogen tungsten lamp in the present embodiment, in the outgoing of xenon lamp Yu halogen tungsten lamp
Light path is provided with iris, by the light-emitting window brightness of this iris regulation integrating sphere light source, integrating sphere light source dynamic
Scope is up to 120dB.Owing to ghost image is relatively low in the response ratio of optical system detector to be measured, only during strong illumination, ghost image
Relative response could improve, and detector just can respond.So, select dynamic range 120dB light source, energy ratio up to
106Magnitude, it is sufficient to the response value of ghost image brings up to detector can scope accordingly.Integrating sphere light source is also equipped with monitoring in real time
The Larger Dynamic range brightness meter of integrating sphere interior lights power, can monitor integrating sphere light-source brightness in real time.
Exit end at integrating sphere light source 1 is provided with adjustable target mechanism 2, and adjustable target mechanism 2 is used for adjusting integrating sphere
The emergent light of light source 1 forms target beam, the adjustable target mechanism 2 of the present embodiment include multiple target automatically replace turntable and
The plurality of target plate being disposed thereon；Target Board is star tester；Star tester has many groups；Often organize the star bore dia of star tester not
With.Multiple target replaces what target target plate can be quickly replaced by turntable automatically, saves the testing time, by drive circuit,
Drive target wheel rotates, it is achieved the replacing of target target plate, has three photoswitches in each target target plate coaxial direction, is used for compiling
Code detection, and coding information is returned master control system.Light source control module in master control system is according to actual optical system to be measured
Parameter select suitable star bore dia star tester.
The beam-expanding collimation system 3 of the present embodiment is off-axis reflection optical system, and existing off-axis reflection optical system has list
Mirror and two kinds of systems of bimirror.No matter in single mirror or bimirror system, primary mirror is the primary scattering surface of system, and veiling glare is main
From primary mirror, the reason producing primary scattering is that mirror surface roughness causes, therefore to primary mirror in Stray Light Test system
The roughness requirements on surface is harsh, the most all in nm magnitude.Relative to aspheric surface, the processing technique of sphere is ripe, is more easy to obtain
High-quality reflecting surface, therefore the present embodiment primary mirror uses coquille, and due to single coquille system, can not to meet the depth of parallelism excellent
In 10 " and system wave aberration is better than the use requirement of 2 λ rms, therefore the present embodiment uses bimirror system.
Include rotary components 8 as in figure 2 it is shown, the present embodiment two-way rotation type axial points to adjustable light splitting system 4, axially stretch
Contracting assembly 9, spectrum groupware 7, sensing adjust assembly 11, folding axle mirror 10 and a support component 12, and spectrum groupware 7 is Amici prism, point
Light prism is arranged at one end of axial stretching assembly 9, and it is centrally located on the optical axis of beam-expanding collimation system 3 outgoing beam；Point to
Adjusting assembly 11 and be arranged at the other end of axial stretching assembly 9, folding axle mirror 10 is arranged at sensing and adjusts on assembly 11；Folding axle mirror 10
The transmission optical axis of reflection optical axis and spectrum groupware 7 can be realized the change of angle angle by the angle adjustment pointing to adjustment assembly 11
Change；The extended distance of axial stretching assembly 9 is adjustable, is used for the distance regulation realizing rolling between axle mirror 10 and spectrum groupware 7, is referring to
It is positioned at entering of optical system by the reflection light beam of distance regulating guarantee folding axle mirror 10 during adjusting assembly 11 angle adjustment
Pupil position；Side and the axial stretching assembly 9 of rotary components 8 are connected, and opposite side is connected by rotating shaft and a support component 12, rotates
Assembly 8 drives spectrum groupware 7, axial stretching assembly 9, points to adjustment assembly 11 and folding axle mirror 10 going out around beam-expanding collimation system 3
The optical axis of irradiating light beam rotates；Spectrum groupware 7, the surface figure accuracy of folding axle mirror 10 reach 1/50 λ in the present embodiment, wherein λ=
632.8nm, introduces aberration hardly after such light splitting.
Concrete test process is as follows:
Light source control module in master control system 6 controls integrating sphere and lights；F number according to optical system to be measured, entrance pupil are straight
Footpath D and the focal distance f of beam-expanding collimation system 3, calculate the star bore dia d that can make optical system diffraction to be measured, and master control system controls
Adjustable target mechanism 2 rotates to suitable star hole；Integrating sphere illuminates selected star hole target, is formed by beam-expanding collimation system 3
Collimated light beam, simulates infinite point target；Collimated light beam points to light splitting group in adjustable light splitting system 4 by two-way rotation type axial
The transmitted light path of part 7, optical system to be measured carries out imaging to this light path target；Master control system light source control module adjusts integrating sphere
Output brightness, makes image formed by optical system to be measured reach 80% quantization digit；Master control system pose adjustment instrument module controls
First pose adjustment instrument and the second pose adjustment instrument carry out pose adjustment, make optical system to be measured figure become to transmitted light path image position
Center in photoelectronic imaging device；Master control system reads the attitude information of now pose adjustment instrument, enters as process data
Row record；Owing to two-way rotation type axial points to transmission optical axis and the folding axle mirror 10 of the spectrum groupware 7 in adjustable light splitting system 4
There is between reflection optical axis the angled relationships of correspondence, and be stored among master control system；Sensing in master control system adjusts assembly
Control module adjusts points to the angle adjusting assembly, the corresponding reflection optical axis adjusting spectrum groupware 7 transmission optical axis and folding axle mirror 10
Angle theta, and simultaneously according to the needs of reality test, control axial stretching assembly 9 and move so that the reflection light beam of folding axle mirror 10
Cover the entrance pupil of optical system to be measured；Master control system rotary components control module controls rotary components and rotates, and records now simultaneously
Rotational angle ω, collection optical system image to be measured；Master control system light source control module controls integrating sphere output brightness L and increases
Adding, repeat the above steps is set up to gather in image there is [L, θ, ω] matrix relationship corresponding during ghost image, and is stored in master control system
In system record, and finally export to result interface.
By constantly changing the angle theta of spectrum groupware transmission optical axis and the reflection optical axis of folding axle mirror, set up optical system to be measured
Measurement relation (as shown in Figure 3) between different brightness under the spheric coordinate system that the different incident ray of system is corresponding from optical axis angle theta.
Meanwhile, according to beam-expanding collimation system light-emitting window illumination formula, as follows, can calculating optical system normal imaging time entrance pupil at
Illumination ENormallyWith illumination E at entrance pupil when ghost image occursGhost image(beam-expanding collimation system light-emitting window illumination is multiplied by spectrum groupware each Reuter mistake
Rate is the illumination formula arrived at optical system entrance pupil).So through the quick measurement of whole measurement apparatus, light can be set up
Pupil luminance during system normal imaging and Pupil luminance proportionate relationship when ghost image occurs.
Wherein: d is star bore dia, unit is: mm；
F is the focal length of beam-expanding collimation system, and unit is mm；
LNormallyFor measuring integrating sphere light-source brightness during optical system normal imaging, unit is W/m2·sr；
LGhost imageIntegrating sphere light-source brightness during ghost image occur for measurement optical system, unit is W/m2·sr；
τThoroughlyFor spectrum groupware transmitted light path transmitance；
τPointFor spectrum groupware light splitting optical path transmitance；
τ is the transmitance of beam-expanding collimation system.
The optical system ghost image measurement apparatus of the present invention, can be set up formed ghost by the measurement to optical system ghost image
As corresponding space points relationship, and also can set up illumination at entrance pupil when forming ghost image and normal imaging by measuring
Relation.By the acquisition of above two information, can be looked for by Theoretical Calculation, software emulation and eliminate or reduce what ghost image was formed
Means, change accordingly to the structure of optical system, in the hope of developing more excellent optical system.
The optical system ghost image measurement apparatus of the present invention is highly suitable for detecting in the optical systems such as class camera, star sensor
Application, by the change of light source, applies also for, in the test of high power laser optical system, being worth being widelyd popularize.
Claims (9)
1. an optical system ghost image measurement apparatus, it is characterised in that: along light path be disposed with light source, beam-expanding collimation system,
Two-way rotation type axial points to adjustable light splitting system and optical system to be measured；
Being provided with Larger Dynamic range brightness meter on described light source, the exit end of described light source is provided with adjustable target mechanism；
Described two-way rotation type axial points to adjustable light splitting system and includes spectrum groupware, rotary components, axial stretching assembly, folding axle
Mirror, sensing adjust assembly and a support component；
Described spectrum groupware is arranged at one end of axial stretching assembly, and spectrum groupware is centrally located at beam-expanding collimation system emergent light
On the optical axis of bundle；
The described adjustment assembly that points to is arranged at the other end of axial stretching assembly；
Described folding axle mirror is installed on sensing and adjusts on assembly；Between reflection optical axis and the transmission optical axis of spectrum groupware of this folding axle mirror
Angle angle by point to adjust assembly adjust；Distance between folding axle mirror and spectrum groupware is adjusted by axial stretching assembly
Whole；
Described rotary components side and axial stretching assembly are connected, and rotary components opposite side is connected by rotating shaft and a support component；
The rotating shaft of rotary components and the optical axis coincidence of the outgoing beam of beam-expanding collimation system；Rotary components drives axial stretching assembly, divides
Optical assembly, folding axle mirror and sensing adjust assembly and rotate.
Optical system ghost image measurement apparatus the most according to claim 1, it is characterised in that: also include master control system, described
Master control system includes light source control module, adjustable target mechanism controls module, rotary components control module, points to adjustment assembly control
Molding block and axial stretching component control module；
The outfan of described light source control module is connected with light source；The outfan of described adjustable target mechanism controls module is with adjustable
Target mechanism connects；The outfan of described rotary components control module is connected with rotary components；Described sensing adjusts assembly control
The outfan of module is connected with pointing to adjustment assembly；The outfan of described axial stretching component control module and axial stretching assembly
Connect.
Optical system ghost image measurement apparatus the most according to claim 1, it is characterised in that: also include the first pose adjustment instrument
With the second pose adjustment instrument, described first pose adjustment instrument is positioned at outside the optical axis of beam-expanding collimation system outgoing beam, and described second
Pose adjustment instrument carries optical system to be measured；
Described master control system also includes the first pose adjustment instrument and the second pose adjustment instrument control module, described first pose adjustment
Instrument and the outfan of the second pose adjustment instrument control module and the first pose adjustment instrument and the second pose adjustment instrument connect.
Optical system ghost image measurement apparatus the most according to claim 1, it is characterised in that: described adjustable target mechanism includes
Multiple target is automatically replaced turntable and is arranged on the plurality of target plate that multiple target is replaced on turntable automatically；Described plurality of target
Plate is star tester；The star bore dia of described star tester is different.
5. according to the arbitrary described optical system ghost image measurement apparatus of Claims 1-4, it is characterised in that: described light source is long-pending
Bulb separation light source, described integrating sphere light source is xenon lamp and halogen tungsten lamp mixing light source, and the emitting light path of xenon lamp and halogen tungsten lamp is provided with can
Darkening door screen.
6. according to the arbitrary described optical system ghost image measurement apparatus of Claims 1-4, it is characterised in that: described beam-expanding collimation
System is off-axis reflection optical system, and described off-axis reflection optical system uses bimirror form, and wherein primary mirror is coquille.
7. according to the arbitrary described optical system ghost image measurement apparatus of Claims 1-4, it is characterised in that: described spectrum groupware
For Amici prism, the surface figure accuracy of described Amici prism and described folding axle mirror reaches 1/50 λ, wherein λ=632.8nm.
8. an optical system ghost image measuring method, it is characterised in that: comprise the following steps:
Step one: some bright light source, treats that it is stable；
Step 2: according to the parameter of optical system to be measured, utilizes formula (1) to calculate star bore dia, and from adjustable target mechanism
Star hole is selected to move at the light-emitting window of integrating sphere light source；
Wherein: d is star bore dia, unit is mm；
λ is operating central wavelength, and unit is mm；
F is the focal length of beam-expanding collimation system, and unit is mm；
D is the Entry pupil diameters of optical system to be measured, and unit is mm；
Step 3: start optical system to be measured, the transmitted light beam imaging to spectrum groupware；Adjust the first pose adjustment instrument and second
The attitude of pose adjustment instrument so that the optical axis of optical system to be measured or the optical axis are parallel with the optical axis of beam-expanding collimation system；
Step 4: adjust light-source brightness L；Keep this brightness, adjust and point to adjustment assembly, control axial stretching assembly, make folding axle
The outgoing beam of mirror is positioned at the entrance pupil of optical system to be measured；Adjust rotary components to rotate simultaneously；Often adjust and once point to adjustment
Assembly and rotary components, the reflection optical axis of record folding axle mirror points to the angle theta between the sensing of spectrum groupware transmission optical axis and rotation
Turn assembly rotational angle ω；Collection optical system image to be measured, checks with or without ghost image in gathered image, when screening has ghost image
Corresponding L, θ and ω；
Step 5: change light-source brightness L, repeats step 4.
Optical system ghost image measuring method the most according to claim 8, it is characterised in that: also include
Step 6: Pupil luminance when calculating optical system normal imaging to be measured by formula (2) and formula (3) with ghost image occurs
Time Pupil luminance；
Wherein: d is star bore dia, unit is mm；
F is the focal length of beam-expanding collimation system, and unit is mm；
LNormallyFor measuring light-source brightness during optical system normal imaging, unit is W/m2·sr；
LGhost imageLight-source brightness during ghost image occur for measurement optical system, unit is W/m2·sr；
τThoroughlyFor spectrum groupware transmitted light path transmitance；
τPointFor spectrum groupware light splitting optical path transmitance；
τ is the transmitance of beam-expanding collimation system.
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