CN106247971A - Interference signal measuring system - Google Patents
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- CN106247971A CN106247971A CN201510511124.0A CN201510511124A CN106247971A CN 106247971 A CN106247971 A CN 106247971A CN 201510511124 A CN201510511124 A CN 201510511124A CN 106247971 A CN106247971 A CN 106247971A
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Abstract
The embodiment of the invention provides an interference signal measuring system, which comprises a wave source, a longitudinal scanning device, a first detection device, a second detection device and a path defining module. The wave from the wave source is transmitted to the object to be detected, the longitudinal scanning device and the second detection device through the first path, the second path and the third path. The wave reflected by the object to be detected is transmitted to the first detection device through the fourth path. The wave reflected by the longitudinal scanning device is transmitted to the first and second detecting devices through the fifth and sixth paths. The path defining module comprises at least one signal delay device, and the at least one signal delay device is positioned on at least one of the third path to the sixth path so as to influence the path length of the at least one of the third path to the sixth path. The interference signal measuring system of the embodiment of the invention can accurately measure the surface appearance and the internal interface of the object to be measured on the premise of maintaining the integrity of the object to be measured.
Description
Technical field
The invention belongs to field of measuring technique, be specifically related to a kind of interference signal measurement system.
Background technology
Along with the development of science and technology, the surface topography of determinand and the measurement technology of internal interface are day by day
Come into one's own.Prior art mainly uses sweep electron microscope (Scanning Electron
Microscope, SEM) with the instrument such as atomic force microscope (Atomic Force Microscope, AFM)
Device, measures the surface topography of determinand.But, though these instruments have a high accuracy, but its
Cost is high, and is difficult to rapid measuring.If additionally, being intended to by these a little instruments to measure determinand
Internal interface, the most often must destroy the integrity of determinand.Only for biological tissue, cell or
The determinands such as archaeology historical relic, all must measure its internal interface under not destroying its integrity, and not
Destroy the prior art measuring internal interface under integrity, such as ultrasound radiography and light people having the same aspiration and interest tomography
Photographys etc., are all difficult to reach high accuracy.Accordingly, how the complete of determinand not destroyed
On the premise of property, measure surface topography and the internal interface of determinand, actually this field accurately
One of research staff's problem desiring most ardently solution.
Summary of the invention
The present invention provides a kind of interference signal measurement system, and it can maintain determinand
On the premise of integrity, measure surface topography and the internal interface of determinand accurately.
A kind of interference signal measurement system of the present invention, it includes wave source, longitudinal scanning
Device, the first detector, the second detector and be suitable to define multiple path
Module is defined in path.Path include first path, the second path, the 3rd path,
Four paths, the 5th path and the 6th path, wherein from the ripple of wave source via first
Path, the second path and the 3rd path be transferred to determinand, longitudinal scan device with
And second detector.The ripple reflected by determinand is transferred to first via the 4th path
Detector.The ripple reflected by longitudinal scan device is via the 5th path and the 6th tunnel
Footpath is transferred to the first detector and the second detector.Path is defined module and is included
At least one signal delay device, and described at least one signal delay device is positioned at the 3rd tunnel
In at least one of which in footpath, the 4th path, the 5th path and the 6th path, with
Affect the 3rd path, the 4th path, the 5th path and at least a part of which in the 6th path
The path of one, makes the first detector reception from the ripple in the 4th path with next
First interference signal produced by ripple from the 5th path, and the reception of the second detector
Ripple from the 3rd path interferes letter with from produced by the ripple in the 6th path second
Number.
In one embodiment of this invention, described ripple is sound wave, ultrasound or electromagnetic wave.
In one embodiment of this invention, described wave source is monochromatic sources, narrow frequency light source, width
Frequently light source or swept light source.
In one embodiment of this invention, described longitudinal scan device include acousto-optic light modulation,
Electro-optic modulators, piezoelectric actuators, linear translation platform, voice coil motor or above-mentioned at least both
Combination.
In one embodiment of this invention, described path is defined module and is included lens array, extremely
Few optical fiber or the two combination.
In one embodiment of this invention, described path define module include at least one light splitting dress
Put, at least one reflecting mirror, at least one lens, at least one polarising means or above-mentioned at least both group
Close.
In one embodiment of this invention, described at least one light-dividing device include the first spectroscope,
Second spectroscope, the 3rd spectroscope and the 4th spectroscope.
In one embodiment of this invention, described signal delay device includes at least one reflecting surface.
In one embodiment of this invention, described signal delay device is by corner reflection the most always
Mirror is constituted.
In one embodiment of this invention, described interference signal measurement system farther includes horizontal stroke
To scanning means, and described determinand is arranged on described line time-base unit.
Based on above-mentioned, in the interference signal measurement system of the present invention, signal delay fills
The setting put can independently control optical path difference, and contributes to the formation of interference signal, thus
Wave source restriction on frequency range can be alleviated.By selecting wideband wave source, can measure to be measured
The surface topography of thing and internal interface.Additionally, utilize the second interference signal to compensate the
The error of one interference signal, can promote and interfere under the integrity not destroying determinand
The accuracy of measuring signal system.Therefore, the interference signal measurement system of the present invention can
On the premise of the integrity maintaining determinand, measure the surface shape of determinand accurately
Looks and internal interface.
For the features described above of the present invention and advantage can be become apparent, reality cited below particularly
Execute example, and coordinate institute's accompanying drawings to be described in detail below.
Accompanying drawing explanation
Fig. 1 is a kind of interference signal measurement system according to the first embodiment of the present invention
Schematic diagram；
Fig. 2 A to Fig. 2 F is a kind of enforcement of interference signal measurement system in Fig. 1 respectively
The front elevational schematic of form, schematic rear view, left side schematic diagram, right side schematic view,
Schematic top plan view, elevational schematic view；
Fig. 3 is a kind of interference signal measurement system according to the second embodiment of the present invention
Schematic diagram；
Fig. 4 A to Fig. 4 F is a kind of enforcement of interference signal measurement system in Fig. 3 respectively
The front elevational schematic of form, schematic rear view, left side schematic diagram, right side schematic view,
Schematic top plan view, elevational schematic view.
Description of reference numerals:
100,100A, 200,200A: interfere signal measurement system；
110: wave source；
120: longitudinal scan device；
130: the first detectors；
140: the second detectors；
150: module is defined in path；
151: the first spectroscopes；
152: the second spectroscopes；
153: the three spectroscopes；
154: the four spectroscopes；
155: lens；
160: line time-base unit；
DL: signal delay device；
M: reflecting mirror；
R1: first path；
R2: the second path；
R3: the three path；
R4: the four path；
R5: the five path；
R6: the six path；
SM: determinand；
W: ripple.
Detailed description of the invention
Fig. 1 is a kind of interference signal measurement system according to the first embodiment of the present invention
Schematic diagram.Refer to Fig. 1, interference signal measurement system 100 include wave source 110,
Longitudinal scan device the 120, first detector the 130, second detector 140 and
Module 150 is defined in path.
Wave source 110 is suitable to the ripple W that output measures, and the kind of its medium wave W can foundation
The difference of application category and different.For example, ripple W can be sound wave, surpass
Sound wave or electromagnetic wave etc., wherein electromagnetic wave can include light wave or megahertz (Terahertz)
Ripple.Continue explanation with light wave below, but the invention is not restricted to this.
Longitudinal scan device 120 is suitable to make ripple W produce a light phase modulation, to reach
The effect that light wave postpones, wherein produce the method for light phase modulation can be by vibration,
Move, rotate, expand, reduce or the change of the physical state such as variations in refractive index.Lift
For example, longitudinal scan device 120 can include acousto-optic light modulation, electro-optic modulators,
Piezoelectric actuators, linear translation platform, voice coil motor or above-mentioned at least a combination of both.
In the present embodiment, longitudinal scan device 120 such as includes that piezoelectric actuators (is not painted
Show) and the reflecting mirror (not illustrating) that is arranged on, will be transmitted to longitudinal scanning dress
Put the ripple W of 120 to be reflected back path and define module 150.
First detector 130 and the second detector 140 are suitable to detect ripple W's
Interfere.According to the difference of wave source 110 kind, the first detector 130 and second
The kind of detector 140 is the most different.For example, measure when interference signal
When system 100 is applied to detect multilayer film reflectance at different wavelengths, wave source 110
Can be swept light source, and the first detector 130 and the second detector 140 can
For spectrogrph, but the present invention is not limited.
Path is defined module 150 and is suitable to define multiple path, and described path can include
One path R1, the second path R2, the 3rd path R3, the 4th path R4, the 5th tunnel
Footpath R5 and the 6th path R6, wherein from the ripple W of wave source 110 via the first via
Footpath R1, the second path R2 and the 3rd path R3 are transferred to determinand SM, longitudinally sweep
Imaging apparatus 120 and the second detector 140.The ripple W warp reflected by determinand SM
It is transferred to the first detector 130 by the 4th path R4.By longitudinal scan device 120
The ripple W of reflection is transferred to the first detecting via the 5th path R5 and the 6th path R6
Device 130 and the second detector 140.
Module 150 is defined in path can include at least one signal delay device DL, and described
At least one signal delay device DL can be located at the 3rd path R3, the 4th path R4,
In at least one of which of five path R5 and the 6th path R6, to affect the 3rd tunnel
Footpath R3, the 4th path R4, the 5th path R5 and at least a part of which of the 6th path R6
The path of one, and contribute to making the first detector 130 receive from the 4th
The ripple W of path R4 interferes letter with from produced by the ripple W of the 5th path R5 first
Number, and make the second detector 140 receive from the 3rd path R3 ripple W with from
Second interference signal produced by the ripple W of the 6th path R6.
Furthermore, it is intended to produce the first interference signal, the 4th path R4 and the 5th tunnel
The optical path difference (the hereinafter referred to as first optical path difference) in footpath need to fall in the people having the same aspiration and interest length of wave source 110
In (coherence length).Similarly, it is intended to produce the second interference signal, the 3rd
The optical path difference (the hereinafter referred to as second optical path difference) of path R3 and the 6th path R6 need to fall
In the people having the same aspiration and interest length of wave source 110.People having the same aspiration and interest length is negative correlation with the frequency range of wave source 110.
In other words, the people having the same aspiration and interest length of monochromatic sources is relatively long, and the people having the same aspiration and interest of wide frequency light source is long
Spend relatively short.
For wide frequency light source, if being intended to produce first, second interference signal, then the 4th
The light path in path R4 and the 5th path needs close, and the 3rd path R3 and the 6th path
The light path of R6 needs close.In the case of being not provided with signal delay device DL, it is intended to frame
Set out and meet that the light path of the 4th path R4 and the 5th path is close and the 3rd tunnel simultaneously
The light path design that the light path of footpath R3 and the 6th path R6 is close is extremely difficult and complicated
's.Therefore, in the case of being not provided with signal delay device DL, it will usually select same
Adjust length is relatively long and error permissible range is bigger wave source 110, so that first, the
Two optical path differences fall within the people having the same aspiration and interest length of wave source 110.In other words, it is being not provided with
In the case of signal delay device DL, the selection of wave source 110 is easily subject to the limit of frequency range
Contracting.
By the setting of at least one signal delay device DL, the present embodiment is adjustable to be faded to less
One path such that it is able to be independently adjustable at least one optical path difference (such as the first optical path difference
And second at least one of which of optical path difference), and contribute to making first, second light path
Difference falls within the people having the same aspiration and interest length of wave source 110.As it is shown in figure 1, signal delay device
DL is such as positioned on the 3rd path R3, and signal delay device DL is suitable to revise the 3rd
Path R3 and the optical path difference of the 6th path R6, but the present invention is not limited.
By the correction of above-mentioned at least one optical path difference, contribute to alleviating wave source 110 at frequency
Restriction on width, thus the range of choice of wave source 110 can be the widest.For example,
Wave source 110 is in addition to can being the relatively long monochromatic sources of people having the same aspiration and interest length, it is also possible to be
Narrow frequency light source, wide frequency light source or swept light source etc..If wave source 110 uses monochromatic sources,
Then ripple W may be used to measure the surface topography of undetected object SM.On the other hand, if wave source
110 use wide frequency light source, then ripple W is except may be used to measure the surface shape of undetected object SM
Outside looks, can also be used with to measure the internal interface of undetected object SM (such as refractive index, thickness
Deng).In other words, by selecting suitable wave source 110 and filling by signal delay
Putting DL and adjust optical path difference, interference signal measurement system 100 may be used to measure determinand
The surface topography of SM and internal interface.
Measuring during determinand SM, the position of longitudinal scan device 120 can be with
The surface topography (such as surface undulation) of undetected object SM and change, to produce the light phase of correspondence
Position modulation, wherein the moving direction of longitudinal scan device 120 is parallel to be transferred to longitudinal direction
The direction of transfer of the ripple W of scanning means 120.But, longitudinal scan device 120
The difference of original position can produce extra phase shift to the first interference signal so that first
The phase contrast of interference signal in addition to being affected by the surface topography of undetected object SM,
Also affected by longitudinal scan device 120.In view of above-mentioned, the present embodiment is by
Two interference signals show that the different of the original position because of longitudinal scan device 120 are caused
Extra phase shift.Consequently, it is possible to the phase contrast by the first interference signal deducts second
The extra phase shift of interference signal, can obtain purely from the surface undulation institute of undetected object SM
The phase contrast caused, and the surface undulation of undetected object SM is i.e. proportional to phase contrast and wave source
The product of the wavelength of 110.In other words, the second interference signal is utilized to compensate first dry
Relate to the error of signal, can promote and interfere letter under the integrity not destroying determinand SM
The accuracy of number measurement system 100.Therefore, interference signal measurement system 100 can be
On the premise of maintaining the integrity of determinand SM, measure the table of determinand SM accurately
Face pattern and internal interface.Additionally, also can be obtained by the strength ratio of the first interference signal
Obtain the reflectivity distribution of undetected object SM.
Below with the interference signal measurement system 100 of Fig. 2 A to Fig. 2 F explanatory diagram 1
One of which embodiment.But, it should be noted that the interference signal of Fig. 1 measures
The embodiment of system 100 is not limited to Fig. 2 A to Fig. 2 F illustrated.Fig. 2 A is to figure
2F be respectively a kind of embodiment of interference signal measurement system in Fig. 1 face signal
Figure, schematic rear view, left side schematic diagram, right side schematic view, schematic top plan view, face upward
Depending on schematic diagram.In Fig. 1 and Fig. 2 A to Fig. 2 F, same or analogous element is with phase
Same label represents, repeats no more in this.
Refer to Fig. 2 A to Fig. 2 F, interference signal measurement system 100A and include wave source
110, longitudinal scan device the 120, first detector the 130, second detector 140
And path defines module 150, wherein path is defined module 150 and can be included eyeglass battle array
Row, at least one optical fiber or the two combination.As a example by lens array, path circle
Cover half group 150 can include at least one light-dividing device, at least one reflecting mirror, at least saturating
Mirror, at least one polarising means or above-mentioned at least a combination of both.As shown in Figure 2 A, originally
Module 150 is defined in the path of embodiment can include that at least one light-dividing device is (such as first point
Light microscopic the 151, second spectroscope the 152, the 3rd spectroscope 153 and the 4th spectroscope
154) and at least one lens 155, wherein first spectroscope the 151, second spectroscope
152, can connect between the 3rd spectroscope the 153, the 4th spectroscope 154 and lens 155
Touch or do not contact.
Signal delay device DL can include at least one reflecting surface.For example, signal prolongs
Device DL can be made up of at least one corner cube mirror late.In the present embodiment, such as figure
Shown in 2F, signal delay device DL is such as by the reflecting mirror M institute of two panels folder an angle of 90 degrees
Constitute.
In the present embodiment, the ripple from wave source 110 can be sequentially by the first spectroscope 151
Reflect, penetrate the 3rd spectroscope 153, converge to determinand SM via lens 155,
And this ripple can sequentially penetrate lens the 155, the 3rd spectroscope 153 after determinand SM reflection
And first spectroscope 151, and it is incident to the first detector 130.Additionally, from
The ripple of wave source 110 also can sequentially penetrate the first spectroscope 151 and the second spectroscope
152, and it is incident to longitudinal scan device 120, and this ripple is by longitudinal scan device 120
Can sequentially penetrate the second spectroscope 152 after reflection, be reflected by the first spectroscope 151,
And it is incident to the first detector 130.Furthermore, the ripple from wave source 110 also can depend on
Sequence is reflected, by signal delay device by the first spectroscope the 151, the 3rd spectroscope 153
The two panels reflecting mirror M secondary reflection of DL, penetrate the 4th spectroscope 154, and be incident to
Second detector 140.Further, the ripple reflected by longitudinal scan device 120 also can
Sequentially reflected by the second spectroscope 152 and the 4th spectroscope 154, and be incident to
Two detectors 140.
Interference signal measurement system 100A can farther include line time-base unit 160,
And determinand SM is arranged on line time-base unit 160.By line time-base unit
160 perform two-dimensional scans, such as make line time-base unit 160 be transferred to be measured
Move in the reference plane that the direction of transfer of the ripple W of thing SM is vertical, then can obtain to be measured
The surface of thing SM or the height of internal interfaces are distributed and the distribution of reflectance.
Fig. 3 is a kind of interference signal measurement system according to the second embodiment of the present invention
Schematic diagram.Refer to Fig. 3, the interference of interference signal measurement system 200 and Fig. 1
Measuring signal system 100 is similar to, and same or analogous element is with identical label table
Show, repeat no more in this.Interference signal measurement system 200 measures system with interference signal
System 100 Main Differences be, signal delay device DL be positioned at first path R1 with
And the 4th on the R4 of path.In other words, signal delay device DL is suitable to revise the 4th
Path R4 and the optical path difference in the 5th path.
By the correction of above-mentioned at least one optical path difference, the choosing of the wave source 110 of the present embodiment
The scope of selecting can be the widest.Therefore, by selecting suitable wave source 110 (such as wideband ripple
Source) and adjust optical path difference, interference signal measurement system by signal delay device DL
200 may be used to measure surface topography and the internal interface of determinand SM.Additionally, it is sharp
Compensate the error of the first interference signal with the second interference signal, determinand can not destroyed
Under the integrity of SM, promote the accuracy of interference signal measurement system 200.Therefore,
Interference signal measurement system 200 can maintain determinand SM integrity on the premise of,
Measure surface topography and the internal interface of determinand SM accurately.
Below with the interference signal measurement system 200 of Fig. 4 A to Fig. 4 F explanatory diagram 3
One of which embodiment.But, it should be noted that the interference signal of Fig. 3 measures
The embodiment of system 200 is not limited to Fig. 4 A to Fig. 4 F illustrated.Fig. 4 A is to figure
4F be respectively a kind of embodiment of interference signal measurement system in Fig. 3 face signal
Figure, schematic rear view, left side schematic diagram, right side schematic view, schematic top plan view, face upward
Depending on schematic diagram.In Fig. 3 and Fig. 4 A to Fig. 4 F, same or analogous element is with phase
Same label represents, repeats no more in this.
Refer to Fig. 4 A to Fig. 4 F, interference signal measurement system 200A and include wave source
110, longitudinal scan device the 120, first detector the 130, second detector 140
And path defines module 150, wherein composition and Fig. 2 A of module 150 is defined in path
To Fig. 2 F, path is defined module 150 and is similar to, and difference is the difference of set-up mode.
Additionally, the signal delay device DL of the present embodiment is such as made up of a piece of reflecting mirror M.
In the present embodiment, the ripple from wave source 110 can sequentially penetrate the first spectroscope
151 and the 3rd spectroscope 153, by the reflecting mirror M reflection of signal delay device DL,
Converge to determinand SM via lens 155 again, and this ripple is by after determinand SM reflection
Can sequentially penetrate lens 155, by the reflecting mirror M reflection of signal delay device DL, wear
Saturating 3rd spectroscope 153, reflected by the first spectroscope 151, and be incident to first and detect
Survey device 130.Additionally, the ripple from wave source 110 also can be sequentially by the first spectroscope
151 reflections, penetrate the second spectroscope 152, and be incident to longitudinal scan device 120,
And this ripple can sequentially penetrate the second spectroscope 152 after being reflected by longitudinal scan device 120
And first spectroscope 151, and it is incident to the first detector 130.Furthermore, from
The ripple of wave source 110 also can sequentially penetrate the first spectroscope 151, by the 3rd spectroscope 153
And the 4th spectroscope 154 reflect, penetrate the second spectroscope 152, and be incident to
Two detectors 140.Further, the ripple reflected by longitudinal scan device 120 also can be by
Second spectroscope 152 reflects, and is incident to the second detector 140.
It addition, interference signal measurement system 200A also can farther include transversal scanning dress
Put 160, and determinand SM is arranged on line time-base unit 160.By laterally sweeping
Imaging apparatus 160 performs two-dimensional scan, such as make line time-base unit 160 with transmission
Move to the reference plane that the direction of transfer of ripple W of determinand SM is vertical, then can obtain
Obtain the surface of determinand SM or the height distribution of internal interfaces and the distribution of reflectance.
It should be noted that in Fig. 2 A to Fig. 2 F and Fig. 4 A to Fig. 4 F embodiment
Spectroscope all can replace with fiber optic component.So, can avoid external environment interference,
Reduce noise and promote the accuracy of measurement.In other embodiments, it is possible to by increasing
Add other wave guiding elements such as light guide, endoscope, to increase interference signal measurement system
Application category.
In sum, in the interference signal measurement system of the present invention, signal delay fills
The setting put can independently control optical path difference, and contributes to the formation of interference signal, thus
Wave source restriction on frequency range can be alleviated.By selecting wideband wave source, can measure to be measured
The surface topography of thing and internal interface.Additionally, utilize the second interference signal to compensate the
The error of one interference signal, can promote and interfere under the integrity not destroying determinand
The accuracy of measuring signal system.Therefore, the interference signal measurement system of the present invention can
On the premise of the integrity maintaining determinand, measure the surface shape of determinand accurately
Looks and internal interface.
It is last it is noted that various embodiments above is only in order to illustrate the technology of the present invention
Scheme, is not intended to limit；Although invention having been carried out in detail with reference to foregoing embodiments
Thin explanation, it will be understood by those within the art that: it still can be to front
State the technical scheme described in each embodiment to modify, or to wherein part or
All technical characteristic carries out equivalent；And these amendments or replacement, do not make phase
The essence answering technical scheme departs from the scope of various embodiments of the present invention technical scheme.
Claims (10)
1. an interference signal measurement system, it is characterised in that including: wave source；Longitudinal scanning
Device；First detector；Second detector；And path defines module, mould is defined in path
Group is suitable to define multiple path, described path include first path, the second path, the 3rd path,
4th path, the 5th path and the 6th path, wherein from the ripple of described wave source via described
One path, described second path and described 3rd path are transferred to determinand, described longitudinal scanning
Device and described second detector, the described ripple reflected by described determinand is via the described 4th
Path is transferred to described first detector, the described ripple reflected by described longitudinal scan device via
Described 5th path and described 6th path are transferred to described first detector and described
Two detectors, described path defines module and includes at least one signal delay device, and described at least
One signal delay device be positioned at described 3rd path, described 4th path, described 5th path and
In at least one of which in described 6th path, with affect described 3rd path, described 4th path,
The path of at least one of which in described 5th path and described 6th path, makes described
One detector receives the described ripple from described 4th path and the institute from described 5th path
State the first interference signal produced by ripple, and described second detector receives from described 3rd tunnel
The described ripple in footpath with from the second interference signal produced by the described ripple in described 6th path.
Interference signal measurement system the most according to claim 1, it is characterised in that described
Ripple is sound wave, ultrasound or electromagnetic wave.
Interference signal measurement system the most according to claim 1, it is characterised in that described
Wave source is monochromatic sources, narrow frequency light source, wide frequency light source or swept light source.
Interference signal measurement system the most according to claim 1, it is characterised in that described
Longitudinal scan device includes acousto-optic light modulation, electro-optic modulators, piezoelectric actuators, linear translation
Platform, voice coil motor or above-mentioned at least a combination of both.
Interference signal measurement system the most according to claim 1, it is characterised in that described
Path is defined module and is included lens array, at least one optical fiber or the two combination.
Interference signal measurement system the most according to claim 5, it is characterised in that described
Path is defined module and is included at least one light-dividing device, at least one reflecting mirror, at least one lens, at least
One polarising means or above-mentioned at least a combination of both.
Interference signal measurement system the most according to claim 6, it is characterised in that described
At least one light-dividing device includes the first spectroscope, the second spectroscope, the 3rd spectroscope and the 4th point
Light microscopic.
Interference signal measurement system the most according to claim 1, it is characterised in that described
Signal delay device includes at least one reflecting surface.
Interference signal measurement system the most according to claim 8, it is characterised in that described
Signal delay device is made up of at least one corner cube mirror.
Interference signal measurement system the most according to claim 1, it is characterised in that enter one
Step includes: line time-base unit, and described determinand is arranged on described line time-base unit.
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| TW104209465 | 2015-06-12 | ||
| TW104209465U TWM519232U (en) | 2015-06-12 | 2015-06-12 | Interference signal measurement system |
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| CN106247971A true CN106247971A (en) | 2016-12-21 |
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| TWI595769B (en) * | 2016-04-27 | 2017-08-11 | 鶴立精工股份有限公司 | Method and module for wide range and high definition line scanning |
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- 2015-06-12 TW TW104209465U patent/TWM519232U/en unknown
- 2015-08-19 CN CN201510511124.0A patent/CN106247971A/en active Pending
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| CN103322926A (en) * | 2013-06-09 | 2013-09-25 | 中国科学院长春光学精密机械与物理研究所 | Method for eliminating periodic non-linear error or interference in signal transmission process |
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