CN106052548A - Portable high-precision long-working-distance auto-collimation device and method - Google Patents

Abstract

The invention belongs to the field of precision measurement technology and optical engineering, and in particular relates to a portable high-precision large working distance self-collimation device and method; the device is composed of a light source, a collimating mirror, a reflector, and a feedback imaging system; the method adopts Adjust the reflector so that the reflected light beam returns to the center of the image plane of the feedback imaging system, and then use the angle deflection measurement device on the reflector to obtain the angle change of the surface of the measured object; since the present invention adds Mirror, so it can avoid the problem that the reflected light of the measured object deviates from the measurement system and cause the problem that it cannot be measured, and then has the advantage of increasing the working range of self-collimation under the same working distance, or increasing the working distance under the same working range of self-collimation; In addition, the specific design of the collimator mirror, feedback imaging system, reflector, etc. makes the present invention small and portable, with high measurement accuracy; especially high measurement accuracy at low sampling frequency; and the technical advantages of fast measurement.

Description

A portable high-precision large working distance autocollimation device and method

technical field

The invention belongs to the technical field of precision measurement and the field of optical engineering, and specifically relates to a portable high-precision large working distance self-collimation device and method.

Background technique

In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields.

In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hundreds of meters; resolution from 0.1 arcsecond to 0.001 arcsecond.

In the field of optical engineering and cutting-edge scientific experiments, the combination of laser autocollimator and two-dimensional circular gratings that are perpendicular to each other can measure the spatial angle; the position reference composed of two laser autocollimators can be used for two Measurement of the angle or parallelism between two optical axes. The angular working range is tens of arc seconds to tens of arc minutes.

In the field of cutting-edge scientific experimental devices and high-end precision equipment manufacturing, laser autocollimators can be used to measure the angular rotation accuracy of cutting-edge scientific experimental devices and high-end precision equipment rotary motion benchmarks, measure the space linear accuracy of linear motion benchmarks and pairwise motion benchmarks parallelism and perpendicularity.

Laser self-collimation technology has the advantages of non-contact, high measurement accuracy, and convenient use, and has been widely used in the above fields.

A traditional autocollimator is shown in Figure 1. The system includes a light source 1, a transmissive collimator 21, and a feedback imaging system 6; the light beam emitted by the light source 1 is collimated into a parallel beam by the transmissive collimator 21. Incident to the reflective surface of the measured object 5 ; the light beam reflected from the reflected surface of the measured object 5 is collected and imaged by the feedback imaging system 6 . Under this structure, only the light beam reflected from the surface of the measured object 5 returns to the original path, and can be collected and imaged by the feedback imaging system 6, thereby realizing effective measurement. The conditional limitation of returning to the original path makes the system have the following two disadvantages:

First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, which will lead to failure to achieve self-collimation Straight and micro angle measurement;

Second, the distance from the mirror surface of the measured object 5 to measure the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement.

The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

Contents of the invention

Aiming at the two problems existing in the traditional autocollimator, the present invention discloses a portable high-precision large working distance autocollimation device and method. Collimated working range, or the technical advantage of significantly increasing the working distance at the same autocollimated working range.

The purpose of the present invention is achieved like this:

A portable high-precision large working distance self-collimation device, including a light source, a reflective collimator, a reflector, and a feedback imaging system, the reflector is provided with an angle adjustment measurement device; the light beam emitted by the light source passes through the reflective After the collimator is collimated into a parallel beam, it is reflected by the mirror and incident on the surface of the measured object; the beam reflected from the surface of the measured object is reflected by the mirror and then imaged by the feedback imaging system;

The feedback imaging system is one of the following two forms:

First, it is set between the light source and the reflective collimator, including the first feedback beam splitter and the image sensor set at the focus of the reflective collimator; the light beam reflected from the surface of the measured object is reflected by the reflector , successively passed through the reflective collimator, reflected by the first feedback beam splitter, and imaged by the image sensor; under the condition that the surface of the measured object is perpendicular to the optical axis, the point image formed by the image sensor is at the center of the image plane;

Second, it is arranged between the reflective collimator and the reflector, including the first feedback beam splitter, the first feedback objective lens and the image sensor arranged at the focal point of the reflective collimator; the light beam reflected from the surface of the measured object, After being reflected by the mirror, it is reflected by the first feedback beam splitter, transmitted by the first feedback objective lens, and imaged by the image sensor; under the condition that the surface of the measured object is perpendicular to the optical axis, the point image formed by the image sensor is on the image surface Central location;

The angle adjustment measurement device includes an angle adjustment device arranged on the mirror, an angle deflection measurement device, and a universal shaft, the angle adjustment device includes a first driver and a second driver; the angle deflection measurement device includes a first metal sheet, a second Two metal sheets, a first capacitive sensor corresponding to the position of the first metal sheet, and a second capacitive sensor corresponding to the position of the second metal sheet; the first driver, the first metal sheet, and the cardan shaft are on a straight line, and the second driver , the second metal sheet, and the cardan shaft are on a straight line, and the connection line between the first driver and the cardan shaft is perpendicular to the connection line between the second driver and the cardan shaft.

A portable high-precision large-working distance self-collimation method realized on the above-mentioned portable high-precision large-working self-collimation device, comprising the following steps:

Step a, turn on the light source, image the image sensor, and obtain the position Δx and Δy that the point image deviates from the center of the image plane;

Step b, using the first driver and the second driver to adjust the mirror angle, so that the point image formed by the image sensor returns to the center of the image plane;

Step c, read the capacitance change ΔC1 of the first capacitive sensor, and the capacitance change ΔC2 of the second capacitive sensor, and then convert them into the angle changes Δθ and Then get the angle changes Δα and Δβ on the surface of the measured object; where, Δθ=f1(ΔC1, ΔC2), and f1, f2, f3, and f4 represent four functions.

The above-mentioned portable high-precision large working distance self-collimation device also includes a wavefront detection system and a wavefront compensation system;

The wavefront detection system includes a wavefront detection beamsplitter, and at least one of an air disturbance wavefront detector and a mirror deformation wavefront detector; the wavefront detection beamsplitter is arranged between the mirror and the measured object , the air disturbance wavefront detector is set on the reflection light path of the wavefront detection spectroscope, and the mirror deformation wavefront detector is set on the secondary reflection light path of the reflection mirror;

The wavefront compensation system includes a compensating light source, a compensating collimating mirror, and a transmissive liquid crystal spatial light modulator; the beam emitted by the compensating light source is collimated into a parallel beam by the compensating collimating mirror, and then modulated by the transmissive liquid crystal spatial light modulated and incident on the wavefront detection beamsplitter.

A portable high-precision large-working-distance self-collimation method implemented on the above-mentioned portable high-precision large-working-distance self-collimation device requires that the wavefront detection system only include a wavefront detection spectroscope and an air disturbance wavefront detector;

Include the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source, place the reference objects selected in step a at the working position A and the near working position B respectively, and obtain two sets of data of GA and GB respectively by the air disturbance wavefront detector;

Step c, G1=GA-GB, obtain the wavefront change caused by air disturbance;

Step d, adjusting the parameters of the transmissive liquid crystal spatial light modulator according to f5 (G1), lighting up the compensation light source, and compensating for air disturbance;

Step e, imaging with the image sensor to obtain the position Δx and Δy of the point image deviating from the center of the image plane;

Step f, using the first driver and the second driver to adjust the angle of the mirror, so that the point image formed by the image sensor returns to the center of the image plane;

Step g, read the capacitance change ΔC1 of the first capacitive sensor, and the capacitance change ΔC2 of the second capacitive sensor, and then convert them into the angle changes Δθ and Then get the angle changes Δα and Δβ on the surface of the measured object; where, Δθ=f1(ΔC1, ΔC2), and f1, f2, f3, and f4 represent four functions.

A portable high-precision large-working-distance self-collimation method implemented on the above-mentioned portable high-precision large-working-distance self-collimation device requires that the wavefront detection system only include a wavefront detection beamsplitter and a mirror-deformed wavefront detector;

Include the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source, place the reference objects selected in step a at the working position A and the near working position B respectively, and obtain two sets of data of GC and GD respectively by the mirror deformable wavefront detector;

Step c, G2=GC-GD, obtain the wavefront change caused by air disturbance and mirror deformation;

Step d. Adjust the parameters of the transmissive liquid crystal spatial light modulator according to f5 (G2), turn on the compensation light source, and compensate for air disturbance and mirror deformation;

Step e, imaging with the image sensor to obtain the position Δx and Δy of the point image deviating from the center of the image plane;

Step f, using the first driver and the second driver to adjust the angle of the mirror, so that the point image formed by the image sensor returns to the center of the image plane;

Step g, read the capacitance change ΔC1 of the first capacitive sensor, and the capacitance change ΔC2 of the second capacitive sensor, and then convert them into the angle changes Δθ and Then get the angle changes Δα and Δβ on the surface of the measured object; where, Δθ=f1(ΔC1, ΔC2), and f1, f2, f3, and f4 represent four functions.

A portable high-precision large-working-distance self-collimation method implemented on the above-mentioned portable high-precision large-working-distance self-collimation device requires that the wavefront detection system also include a wavefront detection spectroscope, an air disturbance wavefront detector, and a mirror Deformable wavefront detectors;

Include the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source, and place the reference objects selected in step a at the working position A and the near working position B respectively. The air disturbance wavefront detector obtains two sets of data of GA and GB respectively. Get GC and GD two sets of data;

Step c, G1=GA-GB, get the wavefront change caused by air disturbance; G2=GC-GD, get the wavefront change caused by air disturbance and mirror deformation; G=G2-G1, get the wavefront change caused by mirror deformation wavefront variation;

step d.

Adjust the parameters of the transmissive liquid crystal spatial light modulator according to f5 (G1), light up the compensation light source, and compensate for air disturbance;

or

Adjust the parameters of the transmissive liquid crystal spatial light modulator according to f5 (G2), turn on the compensation light source, and compensate for air disturbance and mirror deformation;

or

Adjust the parameters of the transmissive liquid crystal spatial light modulator according to f5(G), turn on the compensation light source, and compensate the deformation of the mirror;

Step e, imaging with the image sensor to obtain the position Δx and Δy of the point image deviating from the center of the image plane;

Step f, using the first driver and the second driver to adjust the angle of the mirror, so that the point image formed by the image sensor returns to the center of the image plane;

Step g, read the capacitance change ΔC1 of the first capacitive sensor, and the capacitance change ΔC2 of the second capacitive sensor, and then convert them into the angle changes Δθ and Then get the angle changes Δα and Δβ on the surface of the measured object; where, Δθ=f1(ΔC1, ΔC2), and f1, f2, f3, and f4 represent four functions.

Beneficial effect:

Compared with the traditional autocollimator, the present invention adds a reflector and an angle adjustment measuring device arranged on the reflector. This structural arrangement can have a larger deflection angle or In the case of a large lateral displacement, adjust the attitude of the mirror by adjusting the angle of the measuring device to ensure that the reflected light returns to the original path and is received by the feedback imaging system, thereby effectively avoiding the problem that the reflected light of the measured object deviates from the measurement system and cannot be measured. Furthermore, the present invention has the technical advantage of significantly increasing the working range of self-collimation under the same working distance, or significantly increasing the working distance under the same working distance of self-collimation.

In addition, the present invention also has the following technical advantages:

First, choose a reflective collimator, although it increases the difficulty of production and increases the production cost, but this structure has the following three irreplaceable technical advantages: First, the reflective collimator is conducive to the miniaturization of instruments, making portable instruments ;Secondly, the reflective collimator has no chromatic aberration, and the wider the frequency band of the light source, the more obvious the advantage of its measurement accuracy; the third is that through the coating technology, the heat absorption of the reflective collimator can be much smaller than that of the transmissive collimator, effectively avoiding collimation The problem of thermal deformation of the mirror occurs, which not only enables the entire system to match high-power light sources, but also helps to ensure the measurement accuracy of the system;

Second, the image sensor is selected as the imaging device in the feedback imaging system, and the large area of the image sensor is used to ensure that the reflected light can still enter the incident light of the optical system when the deflection angle between the reflected light of the measured object and the incident light is large. The pupil will not exceed the receiving range, and then cooperate with the reflector to realize the rapid and real-time return compensation of the reflected light, so that the self-collimation working range or working distance of the present invention is greatly extended;

The 3rd, select capacitive sensor as angle deflection measuring device, utilize the ultra-high displacement sensitivity characteristic of capacitive sensor and the excellent characteristic that linear displacement is easy to be converted into angular displacement in tiny angle range, make the present invention can be in low sampling frequency (20Hz and below) It has very high measurement accuracy under certain conditions, and the highest angle measurement resolution can be increased from 0.005 arc seconds of traditional autocollimators to 0.0005 arc seconds, an order of magnitude improvement;

Fourth, the present invention also adopts the following technology: the first driver, the first metal sheet, and the cardan shaft are on a straight line, the second driver, the second metal sheet, and the cardan shaft are on a straight line, and the first The connection line between the driver and the cardan shaft is perpendicular to the connection line between the second driver and the cardan shaft; this two-dimensional setting of the two lines perpendicular to each other makes the data in different connection directions not interfere with each other, and no decoupling calculation is required. It can facilitate calibration, simplify the calculation process and improve the measurement speed.

Description of drawings

Fig. 1 is a schematic structural diagram of a traditional self-collimation angle measurement system.

Fig. 2 is a schematic diagram of the first structure of the first embodiment of the portable high-precision and large working distance autocollimation device of the present invention.

Fig. 3 is a structural schematic diagram of the angle adjustment measuring device.

Fig. 4 is a schematic diagram of the second structure of Embodiment 1 of the portable high-precision and large working distance autocollimation device of the present invention.

Fig. 5 is a schematic structural view of Embodiment 2 of the portable high-precision and large-working-distance self-collimation device of the present invention.

Fig. 6 is a schematic structural view of Embodiment 3 of the portable high-precision and large-working-distance autocollimation device of the present invention.

Fig. 7 is a schematic structural view of Embodiment 4 of the portable high-precision and large-working-distance autocollimation device of the present invention.

In the figure: 1 light source, 22 reflective collimating mirror, 3 reflecting mirror, 4 angle adjustment measuring device, 411 first driver, 412 second driver, 421 first metal sheet, 422 second metal sheet, 423 first capacitive sensor , 424 second capacitive sensor, 43 cardan shaft, 5 measured object, 6 feedback imaging system, 61 first feedback beam splitter, 63 first feedback objective lens, 65 image sensor, 7 wavefront detection system, 71 wavefront detection spectroscopic mirror, 72 air disturbance wavefront detector, 73 mirror deformation wavefront detector, 8 wavefront compensation system, 81 compensation light source, 82 compensation collimation mirror, 83 transmissive liquid crystal spatial light modulator.

specific embodiment

The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.

Specific embodiment one

This embodiment is an embodiment of a portable high-precision and large working distance autocollimation device.

The structure schematic diagram of the portable high-precision large working distance autocollimation device of this embodiment is shown in FIG. 2 . The self-collimation device includes a light source 1, a reflective collimator 22, a reflector 3, and a feedback imaging system 6. The reflector 3 is provided with an angle adjustment measuring device 4; the light beam emitted by the light source 1 passes through a reflective collimator After the straight mirror 22 is collimated into a parallel light beam, it is reflected by the mirror 3 and incident on the surface of the measured object 5; the light beam reflected from the surface of the measured object 5 is then reflected by the mirror 3 and collected by the feedback imaging system 6 imaging;

The feedback imaging system 6 is arranged between the light source 1 and the reflective collimator 22, and includes a first feedback beamsplitter 61 and an image sensor 65 arranged at the focal point of the reflective collimator 22; After being reflected by the reflector 3, the light beam is transmitted through the reflective collimator 22, reflected by the first feedback beam splitter 61, and imaged by the image sensor 65; under the condition that the surface of the measured object 5 is perpendicular to the optical axis, The point image formed by the image sensor 65 is at the center of the image plane;

Described angle adjustment measurement device 4 comprises the angle adjustment device that is arranged on the reflection mirror 3, angle deflection measurement device, and cardan shaft 43, and angle adjustment device comprises first driver 411 and second driver 412; Angle deflection measurement device comprises the first A metal sheet 421, a second metal sheet 422, a first capacitance sensor 423 corresponding to the position of the first metal sheet 421, and a second capacitance sensor 424 corresponding to the position of the second metal sheet 422; the first driver 411, the first metal sheet 421 , and the cardan shaft 43 are on a straight line, the second driver 412, the second metal sheet 422, and the cardan shaft 43 are on a straight line, and the line connecting the first driver 411 and the cardan shaft 43 is perpendicular to the second driver 412 With the connecting line of cardan shaft 43; As shown in Figure 3.

It should be noted that, in this embodiment, the feedback imaging system 6 can also choose the following structure: it is arranged between the reflective collimator mirror 22 and the mirror 3, including a first feedback beam splitter 61, a first feedback objective lens 63 and The image sensor 65 arranged at the focal point of the reflective collimating mirror 22; the light beam reflected from the surface of the measured object 5 is reflected by the reflector 3, reflected by the first feedback beam splitter 61, transmitted by the first feedback objective lens 63, The imaging is collected by the image sensor 65; under the condition that the surface of the measured object 5 is perpendicular to the optical axis, the point image formed by the image sensor 65 is at the center of the image plane; as shown in FIG. 4 .

Specific embodiment two

This embodiment is an embodiment of a portable high-precision and large working distance autocollimation device.

The structure schematic diagram of the portable high-precision large working distance autocollimation device of this embodiment is shown in FIG. 5 . On the basis of the specific embodiment 1, the portable high-precision large working distance autocollimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

The wavefront detection system 7 includes a wavefront detection spectroscope 71 and an air disturbance wavefront detector 72; the wavefront detection spectroscope 71 is arranged between the reflector 3 and the measured object 5, and the air disturbance wavefront detector 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflected optical path of the reflector 3;

The wavefront compensation system 8 includes a compensating light source 81, a compensating collimating mirror 82, and a transmissive liquid crystal spatial light modulator 83; the beam emitted by the compensating light source 81 is collimated into a parallel beam by the compensating collimating mirror 82, and then The transmissive liquid crystal spatial light modulator 83 modulates and incident on the wavefront detection beam splitter 71 .

Specific embodiment three

This embodiment is an embodiment of a portable high-precision and large working distance autocollimation device.

The structure schematic diagram of the portable high-precision large working distance autocollimation device of this embodiment is shown in FIG. 6 . On the basis of the specific embodiment 1, the portable high-precision large working distance autocollimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

The wavefront detection system 7 includes a wavefront detection beamsplitter 71 and a mirror deformation wavefront detector 73; the wavefront detection beamsplitter 71 is arranged between the mirror 3 and the measured object 5, and the air disturbance wavefront detection The device 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflected optical path of the reflector 3;

The wavefront compensation system 8 includes a compensating light source 81, a compensating collimating mirror 82, and a transmissive liquid crystal spatial light modulator 83; the beam emitted by the compensating light source 81 is collimated into a parallel beam by the compensating collimating mirror 82, and then The transmissive liquid crystal spatial light modulator 83 modulates and incident on the wavefront detection beam splitter 71 .

Specific embodiment four

This embodiment is an embodiment of a portable high-precision and large working distance autocollimation device.

The structure schematic diagram of the portable high-precision large working distance autocollimation device of this embodiment is shown in FIG. 7 . On the basis of the specific embodiment 1, the portable high-precision large working distance autocollimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

The wavefront detection system 7 includes a wavefront detection beamsplitter 71, an air disturbance wavefront detector 72 and a mirror deformation wavefront detector 73; the wavefront detection beamsplitter 71 is arranged between the mirror 3 and the measured object 5 Between, the air disturbance wavefront detector 72 is arranged on the reflection light path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflection light path of the mirror 3;

The wavefront compensation system 8 includes a compensating light source 81, a compensating collimating mirror 82, and a transmissive liquid crystal spatial light modulator 83; the beam emitted by the compensating light source 81 is collimated into a parallel beam by the compensating collimating mirror 82, and then The transmissive liquid crystal spatial light modulator 83 modulates and incident on the wavefront detection beam splitter 71 .

For the above embodiment of the self-collimation device, there are two more points to be explained:

First, the first driver 411 and the second driver 412 in the angle adjustment device can choose a stepper motor or a servo motor driver with a faster driving speed, or a piezoelectric ceramic driver with higher driving precision, or A stepper motor or a servo motor driver can be mixed with a piezoelectric ceramic driver; those skilled in the art can make a reasonable choice according to actual needs.

Second, in all the above embodiments of the self-collimation device, the angle deflection measurement device only includes a combination of two pairs of metal sheets and a capacitive sensor. This design is made because the reflector 3 does not translate during work by default. If it is considered that reflector 3 produces translation during work and affects measurement accuracy, the combination of the third pair of metal sheets and capacitive sensors can be placed at the cardan shaft 43 positions to offset the same translation produced by the three capacitive sensors to ensure measurement precision.

Specific embodiment five

This embodiment is an embodiment of a portable high-precision and large-working-distance auto-collimation method implemented on the portable high-precision and large-working-distance auto-collimation device described in Embodiment 1.

The portable high-precision large working distance self-collimation method of this embodiment includes the following steps:

Step a, turn on the light source 1, image the image sensor 65, and obtain the position Δx and Δy that the point image deviates from the center of the image plane;

Step b, using the first driver 411 and the second driver 412 to adjust the angle of the mirror 3, so that the point image formed by the image sensor 65 returns to the center of the image plane;

Step c, read the capacitance change ΔC1 of the first capacitive sensor 423 and the capacitance change ΔC2 of the second capacitive sensor 424, and then convert them into the angle changes Δθ and Then obtain the angular changes Δα and Δβ on the surface of the measured object 5; wherein, Δθ=f1(ΔC1, ΔC2), and f1, f2, f3, and f4 represent four functions.

The main innovation point of the present invention is to increase the reflector 3 and the angle adjustment measuring device 4 arranged on the reflector 3. This structure can have a larger deflection angle or a relatively large angle between the incident light and the reflected light of the measured object 5. In the case of large lateral displacement, the attitude of the reflector is adjusted by the angle adjustment measurement device, so that the reflected light returns to the original path and is received by the feedback imaging system 6, effectively avoiding the problem that the reflected light of the measured object deviates from the measurement system and cannot be measured.

However, with the introduction of the reflector 3, the surface error will be transmitted to the final result, reducing the measurement accuracy of the system; at the same time, the increase of the working distance makes the air disturbance between the reflector 3 and the measured object 5 not negligible, and also It will reduce the measurement accuracy of the system. It can be seen that in order to achieve high-precision measurement, it is necessary to take into account the influence of the surface shape error of the mirror 3 and the air disturbance between the mirror 3 and the measured object 5 on the measurement results. For this reason, specific embodiments are designed. Example seven, and specific embodiment eight.

Specific embodiment six

This embodiment is an embodiment of a portable high-precision and large-working-distance self-collimation method implemented on the portable high-precision and large-working-distance self-collimation device described in the second embodiment.

The portable high-precision large working distance self-collimation method of this embodiment includes the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source 1, place the reference objects selected in step a at the working position A and the near working position B respectively, and the air disturbance wavefront detector 72 obtains two sets of data of GA and GB respectively;

Step c, G1=GA-GB, obtain the wavefront change caused by air disturbance;

Step d, adjusting the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5 (G1), lighting the compensation light source 81, and compensating for air disturbance;

Step e, imaging with the image sensor 65 to obtain the position Δx and Δy of the point image deviating from the center of the image plane;

Step f, using the first driver 411 and the second driver 412 to adjust the angle of the mirror 3, so that the point image formed by the image sensor 65 returns to the center of the image plane;

Step g, read the capacitance change ΔC1 of the first capacitive sensor 423 and the capacitance change ΔC2 of the second capacitive sensor 424, and convert them into the angle changes Δθ and Then obtain the angular changes Δα and Δβ on the surface of the measured object 5; wherein, Δθ=f1(ΔC1, ΔC2), and f1, f2, f3, and f4 represent four functions.

The method of this embodiment is implemented on the device of the specific embodiment 2, the air disturbance can be separated by the air disturbance wavefront detector 72, and then the air disturbance can be compensated by the wavefront compensation system 8, finally realizing the effect of no air disturbance High precision measurement.

Specific embodiment seven

This embodiment is an embodiment of a portable high-precision and large-working-distance self-collimation method implemented on the portable high-precision and large-working-distance self-collimation device described in the third embodiment.

The portable high-precision large working distance self-collimation method of this embodiment includes the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source 1, place the reference objects selected in step a at the working position A and the near working position B respectively, and the mirror deformable wavefront detector 73 obtains two sets of data of GC and GD respectively;

Step c, G2=GC-GD, obtain the wavefront change caused by air disturbance and mirror deformation;

Step d, adjust the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5 (G2), turn on the compensation light source 81, and compensate for air disturbance and mirror deformation;

Step e, imaging with the image sensor 65 to obtain the position Δx and Δy of the point image deviating from the center of the image plane;

Step f, using the first driver 411 and the second driver 412 to adjust the angle of the mirror 3, so that the point image formed by the image sensor 65 returns to the center of the image plane;

Step g, read the capacitance change ΔC1 of the first capacitive sensor 423 and the capacitance change ΔC2 of the second capacitive sensor 424, and convert them into the angle changes Δθ and Then obtain the angular changes Δα and Δβ on the surface of the measured object 5; wherein, Δθ=f1(ΔC1, ΔC2), and f1, f2, f3, and f4 represent four functions.

The method of this embodiment is implemented on the device of the specific embodiment 3, and the air disturbance and the mirror deformation can be separated as a whole by using the mirror deformation wavefront detector 73, and then the air disturbance and the mirror deformation can be completely separated by using the wavefront compensation system 8. Carry out overall compensation, and finally realize high-precision measurement without the influence of air disturbance and mirror deformation.

Embodiment 8

This embodiment is an embodiment of a portable high-precision and large-working-distance auto-collimation method implemented on the portable high-precision and large-working-distance auto-collimation device described in Embodiment 4.

The portable high-precision large working distance self-collimation method of this embodiment includes the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b: Turn on the light source 1, place the reference objects selected in step a at the working position A and the near working position B respectively, the air disturbance wavefront detector 72 obtains two sets of data of GA and GB respectively, and the mirror deformation wavefront detection Device 73 respectively obtains GC and GD two groups of data;

Step c, G1=GA-GB, get the wavefront change caused by air disturbance; G2=GC-GD, get the wavefront change caused by air disturbance and mirror deformation; G=G2-G1, get the wavefront change caused by mirror deformation wavefront variation;

step d.

Adjust the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5 (G1), turn on the compensation light source 81, and compensate for the air disturbance;

or

Adjust the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5 (G2), turn on the compensation light source 81, and compensate for air disturbance and mirror deformation;

or

Adjust the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5(G), turn on the compensation light source 81, and compensate the deformation of the mirror;

Step e, imaging with the image sensor 65 to obtain the position Δx and Δy of the point image deviating from the center of the image plane;

Step f, using the first driver 411 and the second driver 412 to adjust the angle of the mirror 3, so that the point image formed by the image sensor 65 returns to the center of the image plane;

Step g, read the capacitance change ΔC1 of the first capacitive sensor 423 and the capacitance change ΔC2 of the second capacitive sensor 424, and convert them into the angle changes Δθ and Then obtain the angular changes Δα and Δβ on the surface of the measured object 5; wherein, Δθ=f1(ΔC1, ΔC2), and f1, f2, f3, and f4 represent four functions.

The method of this embodiment is implemented on the device of Embodiment 4, and the air disturbance and mirror deformation can be separated separately by using the air disturbance wavefront detector 72 and the mirror deformation wavefront detector 73, and then the air disturbance can be selectively analyzed. Individual compensation for disturbance, independent compensation for mirror deformation, or overall compensation for air disturbance and mirror deformation, and finally achieve high-precision measurement without air disturbance, or without mirror deformation, or without air disturbance and mirror deformation .

Another advantage of this embodiment is that after the air turbulence and mirror deformation are separated separately, the influence of each part on the result can be independently evaluated, not only can it be found out who is affecting the measurement in the air turbulence and mirror deformation The main contradiction of precision, and can independently evaluate the deformation of the mirror, and effectively evaluate the processing quality of the mirror at the same time.

Claims (6)

1. a portable high-accuracy big working distance autocollimation, it is characterised in that include light source (1), reflective collimating mirror (22), reflecting mirror (3) and feedback imaging system (6), described reflecting mirror (3) is provided with angle adjustment measurement apparatus (4)； The light beam of light source (1) outgoing, after reflective collimating mirror (22) is collimated into collimated light beam, then is reflected by reflecting mirror (3), incident Surface to measured object (5)；From the light beam of measured object (5) surface reflection, then after reflecting mirror (3) reflects, by feedback imaging System (6) gathers imaging；

Described feedback imaging system (6) is the one in following two form:

The first, it is arranged between light source (1) and reflective collimating mirror (22), including the first feedback spectroscope (61) be arranged on anti- Penetrate the imageing sensor (65) of formula collimating mirror (22) focal point；From the light beam of measured object (5) surface reflection, then through reflecting mirror (3), after reflection, successively reflect, by imageing sensor through reflective collimating mirror (22) transmission, the first feedback spectroscope (61) (65) imaging is gathered；Under conditions of measured object (5) surface is vertical with optical axis, imageing sensor (65) is become a little as in image planes Heart position；

The second, it is arranged between reflective collimating mirror (22) and reflecting mirror (3), including the first feedback spectroscope (61), first anti- Present object lens (63) and be arranged on the imageing sensor (65) of reflective collimating mirror (22) focal point；Reflect from measured object (5) surface Light beam, then through reflecting mirror (3) reflect after, successively through first feedback spectroscope (61) reflection, first feedback object lens (63) Transmission, by imageing sensor (65) gather imaging；Under conditions of measured object (5) surface is vertical with optical axis, imageing sensor (65) become a little as in image plane center position；

Described angle adjustment measurement apparatus (4) includes that dress is measured in the angular adjustment apparatus being arranged on reflecting mirror (3), angular deflection Putting and universal drive shaft (43), angular adjustment apparatus includes the first driver (411) and the second driver (412)；Angular deflection is surveyed Amount device includes that the first sheet metal (421), the second sheet metal (422), the first electric capacity of corresponding first sheet metal (421) position pass Second capacitance sensor (424) of sensor (423) and corresponding second sheet metal (422) position；First driver (411), One sheet metal (421) and universal drive shaft (43) point-blank, the second driver (412), the second sheet metal (422) and Universal drive shaft (43) point-blank, and the first driver (411) second driver vertical with the line of universal drive shaft (43) (412) with the line of universal drive shaft (43).

Portable high-accuracy the most according to claim 1 big working distance autocollimation, it is characterised in that also include wavefront Detection system (7) and wavefront compensation system (8)；

Described Wavefront detecting system (7) includes Wavefront detecting spectroscope (71) and air agitation wave front detector (72) and anti- Penetrate at least one in mirror deformation wave front detector (73)；Described Wavefront detecting spectroscope (71) is arranged on reflecting mirror (3) and quilt Surveying between thing (5), air agitation wave front detector (72) is arranged on the reflected light path of Wavefront detecting spectroscope (71), reflecting mirror Deformation wave front detector (73) is arranged in the secondary reflection light path of reflecting mirror (3)；

Described wavefront compensation system (8) includes compensatory light (81), compensates collimating mirror (82) and transmission liquid crystal spatial light tune Device processed (83)；The light beam of compensatory light (81) outgoing, after overcompensation collimating mirror (82) is collimated into collimated light beam, then by transmission-type LCD space light modulator (83) is modulated, and incides on Wavefront detecting spectroscope (71).

3. the portable high-accuracy realized on the big working distance autocollimation of portable high-accuracy described in claim 1 is big Working distance auto-collimation method, it is characterised in that comprise the following steps:

Step a, some bright light source (1), imageing sensor (65) imaging, obtain a picture deviation image plane center position Δ x and Δ y；

Step b, utilize the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, make imageing sensor (65) become a little as returning to image plane center position；

Step c, read the capacitance change, Δ C1 of the first capacitance sensor (423), and the electric capacity of the second capacitance sensor (424) Changes delta C2, be reconverted into reflecting mirror (3) angle changes delta θ andAnd then obtain the angle changes delta on measured object (5) surface α and Δ β；Wherein, Δ θ=f1 (Δ C1, Δ C2),Withf1、 F2, f3, f4 represent 4 functions.

4. the portable high-accuracy realized on the big working distance autocollimation of portable high-accuracy described in claim 2 is big Working distance auto-collimation method, it is desirable to Wavefront detecting system (7) only includes that Wavefront detecting spectroscope (71) and air agitation wavefront are visited Survey device (72)；

It is characterized in that, comprise the following steps:

Step a, choose surface and be perpendicular to the reference substance of optical axis direction；

Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB；

Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；

Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator (83) parameter, light compensatory light (81), compensate Air agitation；

Step e, imageing sensor (65) imaging, obtain a picture deviation image plane center position Δ x and Δ y；

Step f, utilize the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, make imageing sensor (65) become a little as returning to image plane center position；

Step g, read the capacitance change, Δ C1 of the first capacitance sensor (423), and the electric capacity of the second capacitance sensor (424) Changes delta C2, be reconverted into reflecting mirror (3) angle changes delta θ andAnd then obtain the angle changes delta on measured object (5) surface α and Δ β；Wherein, Δ θ=f1 (Δ C1, Δ C2),Withf1、 F2, f3, f4 represent 4 functions.

5. the portable high-accuracy realized on the big working distance autocollimation of portable high-accuracy described in claim 2 is big Working distance auto-collimation method, it is desirable to before Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and reflecting mirror deformation waves Detector (73)；

It is characterized in that, comprise the following steps:

Step a, choose surface and be perpendicular to the reference substance of optical axis direction；

Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Reflecting mirror deformation wave front detector (73) respectively obtains two groups of data of GC and GD；

Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly；

Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator (83) parameter, light compensatory light (81), compensate Air agitation and reflecting mirror deformation；

Step e, imageing sensor (65) imaging, obtain a picture deviation image plane center position Δ x and Δ y；

Step f, utilize the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, make imageing sensor (65) become a little as returning to image plane center position；

Step g, read the capacitance change, Δ C1 of the first capacitance sensor (423), and the electric capacity of the second capacitance sensor (424) Changes delta C2, be reconverted into reflecting mirror (3) angle changes delta θ andAnd then obtain the angle change on measured object (5) surface Δ α and Δ β；Wherein, Δ θ=f1 (Δ C1, Δ C2),With F1, f2, f3, f4 represent 4 functions.

6. the portable high-accuracy realized on the big working distance autocollimation of portable high-accuracy described in claim 2 is big Working distance auto-collimation method, it is desirable to Wavefront detecting system (7) includes that Wavefront detecting spectroscope (71), air agitation wavefront are visited simultaneously Survey device (72) and reflecting mirror deformation wave front detector (73)；

It is characterized in that, comprise the following steps:

Step a, choose surface and be perpendicular to the reference substance of optical axis direction；

Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector (73) respectively obtains Two groups of data of GC and GD；

Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；G2=GC-GD, obtains air agitation and reflecting mirror The wavefront variation that deformation causes jointly；G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes；

Step d,

Adjusting transmission liquid crystal spatial light modulator (83) parameter according to f5 (G1), light compensatory light (81), make-up air is disturbed Dynamic；

Or

Adjusting transmission liquid crystal spatial light modulator (83) parameter according to f5 (G2), light compensatory light (81), make-up air is disturbed Move and reflecting mirror deformation；

Or

Adjust transmission liquid crystal spatial light modulator (83) parameter according to f5 (G), light compensatory light (81), compensatory reflex mirror shape Become；

Step e, imageing sensor (65) imaging, obtain a picture deviation image plane center position Δ x and Δ y；

Step f, utilize the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, make imageing sensor (65) become a little as returning to image plane center position；

Step g, read the capacitance change, Δ C1 of the first capacitance sensor (423), and the electric capacity of the second capacitance sensor (424) Changes delta C2, be reconverted into reflecting mirror (3) angle changes delta θ andAnd then obtain the angle changes delta on measured object (5) surface α and Δ β；Wherein, Δ θ=f1 (Δ C1, Δ C2),Withf1、 F2, f3, f4 represent 4 functions.