CN105758318A - System and method for detecting CdS film thickness based on machine vision color difference method - Google Patents
System and method for detecting CdS film thickness based on machine vision color difference method Download PDFInfo
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- CN105758318A CN105758318A CN201610105466.7A CN201610105466A CN105758318A CN 105758318 A CN105758318 A CN 105758318A CN 201610105466 A CN201610105466 A CN 201610105466A CN 105758318 A CN105758318 A CN 105758318A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
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Abstract
The invention discloses a system for detecting the CdS film thickness based on a machine vision color difference method. The system comprises a CdS film transmission system, a computer, an optical source and a camera. The optical source and the camera are disposed above the transmission system. The computer is provided internally with an image acquisition card and has a function of converting CdS film color information into thickness information. When the transmission system transmits a CdS film to right below the camera, the camera will acquire an image of the CdS film and transmit to the computer so that the computer can obtain the corresponding thickness information. With the use of a reflective optical path, the system of the invention can reduce the influence of a bottom layer of the CdS film, can also be applied to cases in which the bottom layer of the CdS film is non-transparent, and further has the characteristics of high detection speed and detection accuracy. The invention can effectively improve production efficiency of solar cells, thereby reducing production costs.
Description
Technical field
The present invention relates to a kind of on-line checking CdS film thickness approach and device thereof, be based especially on the system and method for machine vision chromatism method on-line checking CdS film thickness.
Background technology
CdS is II-VI group compound semiconductor materials, is a kind of very important light-sensitive semiconductor material, is widely used in opto-electronics.Especially CdS polycrystal film is used to the Window layer in heterojunction solar battery, is applied to CdTe/CdS heterojunction solar battery and CIGS (CIGS) solar cell.
In solar cell technique, in order to improve the conversion efficiency of battery, it is desirable to by Window layer CdS film THICKNESS CONTROL at 50-120nm, simultaneously in order to ensure finished product rate, this makes the uniformity of CdS film thickness be particularly important in the industrial production.The method of testing of current CdS minimal thickness has the method for testings such as acid corrosion benching tunnelling method, ellipsometer, and these method of testings are all suitable only for little area measurement and measure efficiency low, and is not suitable in industrialized production and applies.Light its result of saturating intensity method is largely subject to the impact of CdS film bottom (as the nesa coating of electrode, cushion etc.), and at CIGS, CdTe/CdS be bottom configuration battery structure (substrateconfiguration) situation in CdS film bottom when being opaque, this method can not use.
Current CdS film can be prepared by methods such as chemical bath method (CBD), close spaced sublimation method (CSS), magnetron sputtering methods.Owing to adopting different preparation methoies and preparation technology, it is thus achieved that CdS polycrystal film structure and performance slightly different, but the energy gap that research finds CdS film all will change with film thickness and grain size and change, and outward manifestation is the change of color.And for same technique, the thickness of CdS polycrystal film is by its color of appreciable impact, this makes chromatism method detection CdS film thickness be feasible.
Summary of the invention
It is an object of the invention to for the deficiencies in the prior art, it is provided that a kind of system and method based on machine vision chromatism method on-line checking CdS film thickness, speed is fast, precision is high in the method detection, and can embed product line, detects in real time.
Based on the system of machine vision chromatism method on-line checking CdS film thickness, including CdS film drive system, computer and be located at the light source above above-mentioned drive system and shooting camera；It is provided with image pick-up card in described computer, and there is the function that CdS film colouring information is converted to thickness information；When CdS film is sent to immediately below shooting camera by drive system, the image of shooting collected by camera CdS film, and it is sent to computer, computer obtains respective thickness information.
Apply above-mentioned system and carry out the method based on machine vision chromatism method on-line checking CdS film thickness, comprise the following steps:
(1) CdS film color and thickness corresponding relation data base are set up:
A. the image of the CdS standard sample of a series of different-thickness is gathered；
B. computer extracts the rgb value of above-mentioned sample image, intensity value, chromatic value；
C. the ralation method between CdS film thickness and rgb value, intensity value and chromatic value is set up；
(2) image of the CdS film that described shooting camera captured in real-time grows online is started by external trigger or control signal, and by the image transmitting of shooting to computer；
(3) computer extraction step (2) gathers the rgb value of image, intensity value, chromatic value, by the algorithm of CdS film color Yu thickness corresponding relation data base, be converted to CdS film thickness information by image color information.Computer programming count CdS film thickness evenness, then with the standard comparison of technological requirement thus this sample is carried out automatic classification.
In technique scheme, within the scope of captured in real-time except CdS standard sample or CdS film sample to be measured, it is additionally provided with a fixing CdS film reference sample；Using reference sample gradation of image meansigma methods when shooting first as standard value, after shooting, the gradation of image meansigma methods of reference sample and this standard value are compared correction every time, obtain luminosity compensation coefficient, the gradation of image meansigma methods of sample is multiplied by luminosity compensation coefficient automatically.As: after the CdS sample image of step (2) captured in real-time, the CdS reference sample image together taken is compared with standard value, if gradation of image meansigma methods there occurs change, then the gradation of image meansigma methods of this sample is multiplied by luminosity compensation coefficient automatically, carries out light intensity and automatically compensate；Carry out described step (3) again；If gradation of image meansigma methods does not change, then it is made directly described step (3).
In technique scheme, described shooting camera and light source, it is possible to arrange a set of, and both can synchronize to move back and forth, to detect the CdS film thickness of laterally multiple positions；Many set photographic head and light source can also be set, be separately fixed at diverse location, independent detection laterally-distinct position CdS film thickness.
In the present invention, described light source can adopt artificial seven-colour-light source, it would however also be possible to employ yellow color light source, wavelength 550～610nm.
The beneficial effects of the present invention is:
What due to the fact that employing is reflected light path, this will reduce the impact of CdS film bottom, thus also can operate with CdS film bottom is opaque situation, as in the situation that CIGS, CdTe/CdS are bottom configuration battery structure (substrateconfiguration), CdS film bottom is opaque.The present invention has the detection feature that speed is fast, accuracy of detection is high based on machine vision；The production efficiency of solar cell can be effectively improved, thus reducing production cost.
Accompanying drawing explanation
Fig. 1 is the structural representation of present system.
Detailed description of the invention
Embodiments of the present invention are described in detail below in conjunction with accompanying drawing:
With reference to Fig. 1, include with lower part based on machine vision chromatism method on-line checking CdS film thickness system: CdS sample drive system 2；Light source 4；Shooting camera 3；It is provided with the computer 5 of image pick-up card, CdS film color and thickness correspondence database and ralation method software；CdS sample classification controls and performs system 7.
First the foundation of CdS film color and thickness correspondence database:
A. the image of the CdS film of different-thickness is gathered；
The system of application drawing 1 signal, shoots the image of the CdS standard sample of a series of different-thickness, and specific implementation process is:
On the post-depositional streamline 2 of CdS film, when standard CdS sample 1 enters below mask 8, under the environment of light source 4, shooting camera 3 carries out captured in real-time, and the image information of shooting will be conveyed to computer 5.
B. computer extracts the rgb value of above-mentioned color sample, intensity value, chromatic value；
C. the algorithm between CdS film thickness and the rgb value of color, intensity value, chromatic value is set up.
The present invention concrete on-line checking workflow is: on the post-depositional streamline 2 of CdS film, when sample 1 enters below mask 8, under the environment of light source 4, shooting camera 3 carries out captured in real-time, the image information of shooting will be conveyed to computer 5, computer will extract the rgb value of the image gathered, intensity value, chromatic value, algorithm by CdS film color Yu thickness correspondence database, image colour difference information is converted to CdS film thickness information, then computer programming count CdS film thickness evenness, again with the standard comparison of technological requirement thus this sample is carried out automatic classification, provide control signal to control and execution system 7 to CdS sample classification simultaneously.Last CdS sample classification controls to carry out corresponding actions with execution system and carries out classification.
Its further technical scheme is:
In order to reduce the impact of environment as far as possible, mask 8 inwall adopts Lycoperdon polymorphum Vitt (neutralgrey) in extinction.
The image of captured in real-time carries out the automatic compensation of light intensity in the steps below:
Within the scope of captured in real-time except tested CdS sample, also has a fixing reference CdS film sample.After shooting, the gradation of image meansigma methods of the gradation of image meansigma methods of reference sample with corresponding standard picture template is compared every time, if gradation of image meansigma methods there occurs change, then the gradation of image meansigma methods of this sample is multiplied by luminosity compensation coefficient automatically, carry out the algorithm by CdS film color Yu thickness correspondence database again, image colour difference information is converted to CdS film thickness information；If gradation of image meansigma methods does not change, then it is made directly the algorithm by CdS film color Yu thickness correspondence database, image colour difference information is converted to CdS film thickness information.
Claims (7)
1. based on the system of machine vision chromatism method on-line checking CdS film thickness, it is characterised in that include CdS film drive system, computer and be located at the light source above above-mentioned drive system and shooting camera；It is provided with image pick-up card in described computer, and there is the function that CdS film colouring information is converted to thickness information；When CdS film is sent to immediately below shooting camera by drive system, the image of shooting collected by camera CdS film, and it is sent to computer, computer obtains respective thickness information.
2. application the system as claimed in claim 1 carries out the method based on machine vision chromatism method on-line checking CdS film thickness, it is characterised in that comprise the following steps:
(1) CdS film color and thickness corresponding relation data base are set up:
A. the image of the CdS standard sample of a series of different-thickness is gathered；
B. computer extracts the rgb value of above-mentioned sample image, intensity value, chromatic value；
C. the ralation method between CdS film thickness and rgb value, intensity value and chromatic value is set up；
(2) image of the CdS film that captured in real-time grows online, and by the image transmitting of shooting to computer；
(3) computer extraction step (2) gathers the rgb value of image, intensity value, chromatic value, by the algorithm of CdS film color Yu thickness corresponding relation data base, be converted to CdS film thickness information by image color information.
3. the method based on machine vision chromatism method on-line checking CdS film thickness as claimed in claim 2, it is characterised in that within the scope of captured in real-time except CdS standard sample or CdS film sample to be measured, is additionally provided with a fixing CdS film reference sample；Using reference sample gradation of image meansigma methods when shooting first as standard value, after shooting, the gradation of image meansigma methods of reference sample and this standard value are compared correction every time, obtain luminosity compensation coefficient, the gradation of image meansigma methods of sample is multiplied by luminosity compensation coefficient automatically.
4. the system based on machine vision chromatism method on-line checking CdS film thickness as claimed in claim 1, it is characterised in that a set of shooting camera and light source are set, both can synchronizing moving, to detect the CdS film thickness of multiple position.
5. the system based on machine vision chromatism method on-line checking CdS film thickness as claimed in claim 1, it is characterised in that many set cameras and light source are set, are separately fixed at diverse location, the CdS film thickness of independent detection diverse location.
6. the system based on machine vision chromatism method on-line checking CdS film thickness as claimed in claim 1, it is characterised in that described light source adopts artificial seven-colour-light source.
7. the system based on machine vision chromatism method on-line checking CdS film thickness as claimed in claim 1, it is characterised in that described light source adopts monochromater, wavelength 550～610nm.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107240134A (en) * | 2017-05-27 | 2017-10-10 | 江苏理工学院 | A kind of industrial products rapid classification method and device based on online colour recognition |
| CN107315017A (en) * | 2017-08-02 | 2017-11-03 | 苏州市朗电机器人有限公司 | Optical film Visual intelligent detection device |
| CN109358041A (en) * | 2018-09-19 | 2019-02-19 | 信阳师范学院 | A kind of cadmium sulphide membrane colorimetric device and the method for preparing cadmium sulphide membrane |
| CN109373918A (en) * | 2018-12-18 | 2019-02-22 | 哈尔滨工业大学 | A kind of high effective optical measurement method for two-dimensional material measured film thickness |
| CN111077165A (en) * | 2018-10-20 | 2020-04-28 | 杭州纤纳光电科技有限公司 | Perovskite thin film quality online detection device and method based on machine vision |
| CN114739300A (en) * | 2022-03-29 | 2022-07-12 | 上海优睿谱半导体设备有限公司 | Method for measuring epitaxial layer thickness of epitaxial wafer |
| CN117268270A (en) * | 2023-11-23 | 2023-12-22 | 中国航发北京航空材料研究院 | Real-time monitoring device and method for continuous chemical vapor deposition interface layer thickness |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109373918A (en) * | 2018-12-18 | 2019-02-22 | 哈尔滨工业大学 | A kind of high effective optical measurement method for two-dimensional material measured film thickness |
| CN114739300A (en) * | 2022-03-29 | 2022-07-12 | 上海优睿谱半导体设备有限公司 | Method for measuring epitaxial layer thickness of epitaxial wafer |
| CN117268270A (en) * | 2023-11-23 | 2023-12-22 | 中国航发北京航空材料研究院 | Real-time monitoring device and method for continuous chemical vapor deposition interface layer thickness |
| CN117268270B (en) * | 2023-11-23 | 2024-02-06 | 中国航发北京航空材料研究院 | Real-time monitoring device and method for continuous chemical vapor deposition interface layer thickness |
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Application publication date: 20160713 |