CN105716523B - A kind of high-precision, high-speed motion measuring system being suitable for large format motion planning - Google Patents
A kind of high-precision, high-speed motion measuring system being suitable for large format motion planning Download PDFInfo
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- CN105716523B CN105716523B CN201610078903.0A CN201610078903A CN105716523B CN 105716523 B CN105716523 B CN 105716523B CN 201610078903 A CN201610078903 A CN 201610078903A CN 105716523 B CN105716523 B CN 105716523B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
- G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of high-precision, high-speed motion measuring systems being suitable for large format motion planning, the two-dimension displacement measurement accuracy that up to Subnano-class may be implemented by the system is measured particularly suitable for being fed back necessary to motion control in the high-end devices such as litho machine, optical grating graduating machine, liquid crystal display panel processing machine, precision machine tool.Specially it is laid with by the one-dimensional or two-dimensional grating dislocation lap joint of different frequency, with frequency dislocation transition to realize that large format is laid with, to realize path clustering range necessary to arbitrary large format motion planning, then coordinates and segmented with the electrical coordination of multiple pattern displacement measuring probes spot measurement is greatly reduced（Subdivision）Time, to realize arbitrary large format, high-precision（Sub-nanometer is reached as high as, and there are many measurement accuracy coordinations mutually to test）, at high speed（Single required subdivision amount of popping one's head in is reduced, and bulk velocity is better than the speed of detection popped one's head in current grating scale）Feedback needed for motion control measures.
Description
Technical field
The invention belongs to field of precision instruments, specially a kind of measuring system particularly suitable for high-end precision, is wanted at a high speed
It asks, the system and equipment of large format motion control, is provided for it and measure support necessary to motion feedback control.
Background technology
Litho machine leads always the development of chip related industry as industrial its relevant technologies of machine tool.According to current industry
Situation, Next Generation Lithographies machine will develop the relevant technologies for the wafer of 18inch diameters (450mm), to can not as motion control
Or more stringent requirements are proposed for scarce measuring technique：The motion planning range in movement portion is at least up to meter level, precision reaches nanometer
Even sub-nanometer, acceleration are not less than 10g.Under so extreme requirement, motion control and material character etc. change over time feelings
The quick real-time acquisition of condition will all be eventually converted into requirement to measurement, this to measurement propose bigger challenge and various countries,
Relevant enterprise is had a contest the core realm of contention technology commanding elevation in the dark at present.Certainly, relevant application is also very extensive, such as substantially
Face liquid crystal display panel, high precision machine tool, large format optical grating graduating machine etc. need high-acruracy survey and motion range is very big, surveys
Measure the very fast high-end equipment of rate request.
But substantially the making of concave grating is extremely difficult at present, also only has the U.S., France and China that can make in the world
Meter-sized substantially concave grating, but more than 1 metrical scale, substantially concave grating processing machine has not yet to see and has been reported that.Grating splices to constitute
The idea of the big grating of monoblock has document report and science fund is supported, research grid process regional exposure such as processed constructs large format
Grating etc..Two pieces of grating equiphases of same frequency are mainly stitched together by its purpose studied, but the process operation energy of reality
Its application of power limit.For example, for 2000 lines it is right/grating of mm will replicate or paste on substantially panel, overlap joint essence
Degree, with regard to nonsensical, is generally at least higher than 1/8 screen periods (0.0625 micron) less than 1/4 screen periods, this registration
Precision has been over the control ability of many Large Amplitude Motion control systems, and this do not consider also inclination in spatial position,
Micro- turn etc. of influence.
It is above to use large format (unifrequency) grating measuring significantly according to document, patent retrieval and consulting discussion in the industry
Movement is the thing that related field researcher still explores in effort at present, there is no reliable scheme.Patent of the present invention is then another
Path is warded off, using multiple tracks two-dimensional grating arranged side by side, array Multi probe coordinated measurement, and does statistical analysis to improve reliability, simultaneously
Point is to set up whole table top coordinate control network on the basis of being denoted as by grating road.Substantially concave grating has not only been solved perfectly
The problem of, and further having developed the new approaches for improving and measuring reliability, this is measured being up to nanometer even sub-nanometer
It is even more important, omnibus claims belong to the world initiation invention.
Invention content
It is an object of the invention to propose a kind of high-precision being suitable for large format motion planning, high speed measuring system,
It is particularly suitable for litho machine, large format liquid crystal display panel process unit, precision machine tool, optical grating graduating machine etc..This system at present this
Measuring system is compared used by class equipment, has apparent technical advantage, but also and be limited to listed application simultaneously, high-precision, fast
As long as there are a needs in speed, the extreme requirement of large format motion control this three, the application of the present invention may be considered.
Specific technical solution used for the above purpose is：
A kind of high-precision, high-speed motion measuring system being suitable for large format motion planning, including high-flatness table top, movement
Block, multigroup grating measuring probe, coordinates control circuit, multiple grating roads mark at polylith grating；Wherein, grating and grating road mark are equal
It is fixed on table top, grating measuring probe and coordination control circuit are fixed on moving mass, and moving mass is coordinating control circuit
Driving under relative to moving playing surface.
The polylith grating is divided into multiple tracks along motion path and is layed in high-flatness table top；Laying method is：Difference rule
The grating neighboring trace of lattice (period) is laid with, and twice at least occurs in the grating of same specification, and grating that ought wherein together is because of grating block
When falling short of and fracture occur, the grating in other roads has enough continuous lengths to cover the fracture position in the direction of motion of moving mass
It sets.
The grating road mark is arranged in the boundary line and mesa edge of central, the adjacent turnpike of fracture in grating road.
The measuring probe includes multiple optoelectronic induction probes and integrated screen, includes braced frame in integrated screen, multiple
Refracting crystal, multiple optoelectronic induction probes and multiple refracting crystals are fixed in braced frame relatively.
Per pass grating corresponds to the position of moving mass at least there are two measuring probe, i.e. moving mass has multiple during the motion
Measuring probe carries out position sensing to arbitrary grating together, and the fore-and-aft clearance of people having a common goal's measuring probe arrangement is no more than single light
Length of the grid block in the direction of motion.
The grating arranged on the table top can select different types, different according to the type of grating, measuring probe cloth
It sets also corresponding different；
When using reflection-type grating, laser light source and measuring probe are arranged in the homonymy in grating face, are convenient for and moving mass
It integrates；When using transmission-type grating, laser light source and measuring probe are distributed in the both sides in grating face, moving mass or
It integrates with measuring probe or is integrated together with laser light source, the then array not integrated with moving mass is arranged in platform
Face.
The coordination control circuit carries out coordination control together with the measuring probe, to realize that single probe segments number
Less but the higher effect of overall measurement accuracy (the corresponding probe of thick periodic light turnpike is corresponding with thin periodic light turnpike to pop one's head in, they
Obtained signal needs the number for carrying out precision subdivision few and is easier to realize, the most termination that such thickness grating and probe obtain
Fruit can cover multiple resolution ratio and realize high-precision absolute fix)；The control method for coordinating control circuit includes peer
The larger number of deviation is rejected in the statistical analysis of the multiple measuring probe measurement results of turnpike in multiple measurement results of same precision grade
According to being averaged as output, and measurement accuracy requires higher, corresponding grating road and measuring probe number then more arrangements.
Compared with prior art, the present invention haing the following advantages：
First, present invention firstly provides multiple tracks grating, measuring probe array synchronizations to measure, coordinates the method for statistical analysis
Nanoscale accurate measurement is carried out, and gives specific implementation.Compared with previous nanometer measurement method, stability is measured
It is significantly improved.
Second, two-frequency laser interferometer is typically used for a kind of typical scenario of nanometer measurement, although its precision is high,
It must be there are one precondition：Movement must strictly be moved along a straight line.From its principle it is not difficult to find that being generally followed by movement portion together
The reflective mirror plane of movement occurs the not parallel of very little between probe plane and will all cause prodigious error, and distance is remoter
The optical path difference caused by lack of parallelisme is bigger.But problem it is crucial that with the technical merit of the world today, it is ensured that it is so stringent
Linear motion and motion process almost without any shake, it is often unpractical, it is difficult to realization.The present invention then can be same
When consider two-dimensional measurement, and in view of when movement portion is moved to some direction (direction of primary motion), its another maintenance and operation momentum is (i.e.
The bias of opposite direction of primary motion) very little, the present invention is used is laid with relatively narrow raster width in offset direction, well
The arrangement space of grating and measuring probe is utilized.
Third, compared to the measurement method that is typically based on grating, grating scale is that a typical case represents.And do not talk grating
One-dimensional grating, a probe is often only utilized in ruler, and the present invention uses measuring probe array and the turnpike there are many frequency,
Coordinating the repetition stability of output accuracy will also be significantly improved.And thick, smart probe proposed by the invention coordinates subdivision
The mutual proved recipe method of technology, precision is all to have document, domestic and international patent not having.
Description of the drawings
Fig. 1 is schematic diagram of the present invention by taking two kinds of specification gratings are laid with (can have many roads when specifically used) as an example.Its
Middle number, A-a, B-b be respectively two kinds of frequency specifications grating (capitalization indicate horizontal direction, lowercase represent vertically to)
Turnpike, wherein being staggered per fracture site together and the fracture site in its same specification grid line road；C represents grating road mark, and (shape is only
Do and illustrate), it is arranged in the incision position in grid line road, it can be directly by measuring probe unique identification；Arrow line on side represents main motion
Direction.
Since the detection method of each road measuring probe is identical, array arrangement, which has no turning site, to be important to
It asks, as long as identifying corresponding position by road mark and by the detection mission of each measuring probe of coordination control circuit again coordinated allocation
It can (direct deflecting).It is of course also possible to use annular multiple tracks grating is arranged in corner location, when moving mass passes through the position from
Body also carries out certain realization that transfers certainly and turns (deflecting after rotation).
Fig. 2 is an example of the main assembly schematic diagram of the present invention, indicates the relative position relation of each composition.Wherein compile
Number, 1 is moving mass (e.g., maglev planar motor mover), and 2 are measuring probes and coordinate control circuit, 3 be array grating (i.e.
Shown in Fig. 1), 4 be table top (e.g., maglev planar motor stator).
Principle schematic in Fig. 3 present invention.It wherein numbers, 5 be that optoelectronic induction probe (separately detects both direction, here
It is limited to illustrate space, only draws two), as long as participating in the two-way diffraction intensity interfered, (such as+m and-m ,+n and-n, m, n are whole
Number) it is enough to form effective interference signal, it can arrange an optoelectronic induction to be detected；6 be that refracting crystal is (or micro-
Mirror, small sheet gration), the aggregate of light intensity attenuation piece, optical path compensation piece, be mainly used for the diffraction optical propagation direction of metrological grating
Changed with the direction that design needs；7 be laser light source, and preferably semiconductor laser minimizes in order to encapsulate；8 be metering light
Grid, it is illustrated that for two-dimentional reflecting grating.
In addition, when using transmission-type metrological grating then, laser light source 7 is placed on the back side of metrological grating, equally vertical
Grating face is incident, its diffraction light distribution is identical as the diffraction light distribution of Fig. 3 in this way.
Specific implementation mode
The invention will be further described in the following with reference to the drawings and specific embodiments：
The system include high-flatness table top, moving mass, polylith grating, grating measuring linear transducer array, coordinate control circuit,
Multiple grating roads mark.Grating and grating road mark are both secured on table top, and measuring probe and coordination control circuit can be integrated in
The lower surface of moving mass (is only not limited in this upper and lower relation for ease of statement herein, and refers between moving mass and table top
Relationship, even if table top be it is edge-on even downwards be suitable for the present invention).(moving mass can be the fortune of various motors
The syntagmatic of dynamic portion, table top and moving mass is similar to the situation of maglev planar motor, air-floatation planar motor etc.).
The high-flatness table top refers to, smooth necessary to the moire interference high-acruracy survey based on grating in order to coordinate
Table top is spent, as the carrier of grating, to be laid with grating on its surface.Material requires should antifriction, thermal stability be good, thermally expand
Coefficient is low, is unlikely to deform；It can be with right and wrong translucent material when for using reflecting grating；It is answered when for using transmission grating
This uses the preferable material of light transmission, such as quartz glass.
Further, when using transmission grating, grating is layed in the surface of table top, and laser will be also arranged under surface
Array of source or linear transducer array or the two have concurrently.Purpose is that, when light source irradiates upwards from below, irradiation light is upward through grating
It is received afterwards by the probe of top arrangement；Similarly, when light source irradiates down from above, irradiation light is passed down through after grating by lower section
The probe of arrangement receives.Then there was only a kind of situation when using reflecting grating, light source is irradiated to grating from top, anti-by grating
It is received by probe after penetrating.
Further, the measuring probe includes optoelectronic induction probe (or other optoelectronic induction devices, such as CCD, COMS
Deng) and integrate screen, the present invention refers to gathering them to be packaged as a whole and be known as measuring probe.Wherein integrated screen is again including support
Frame, special refracting crystal (or micro mirror, small sheet gration), light intensity attenuation piece, optical path difference compensating plate etc.；Multiple optoelectronic induction probes
It is fixed in braced frame relatively with multiple refracting crystals；Integrated screen is placed in parallel with grating planar；It is realized by integrated screen
The phototiming interferometry of multiple diffraction times, different diffraction times correspond to different resolution ratio, to realize multiple degrees of freedom,
Multiresolution measures.Braced frame is that the optoelectronic induction that accommodates opened up in the integrated package (solid) of light-permeable is popped one's head in and rolled over
The space of crystal is penetrated, optoelectronic induction probe and refracting crystal, which integrate, to be embedded in the space.For the relativeness in application,
Measuring probe and moving mass are (i.e.：The moving portion of motor) it is relatively fixed together, fixed part of the table top as motor.
The polylith grating, to commonly use plane grating.According to investigation, high-precision large-area planar grating in the world at present
Making ability is extremely limited, and the process equipment of 1 meter of length of side grade can be reached by having a few countries reluctantly, and product is mostly military project customization, still
Without product on sale.Which has limited many applications, and the researcher of many different industries has been attracted to make great efforts for it.For this purpose, this hair
It is bright that big previous space required grating is realized by the method for the laying of multiple tracks dislocation lap joint, Multi probe array detection using common grating
Just achievable large format motion planning measuring system.
Specific laying method is that twice at least occurs in the grating of same specification, and grating that ought wherein together is because of grating block
When falling short of and fracture occur, the grating in other roads has enough continuous lengths moving to the covering fracture site.Wherein light
Grid can be two-dimensional grating, one-dimensional grating, dual-frequency grating, multiple frequency grating (can have different frequencies per dimension), amplitude
Type grating, phase-type grating, transmission-type grating, reflection-type grating.At least twice measuring probe arranged side by side in this way may be implemented to survey
The complementary verification of amount, especially tides over grating fracture site.Moreover, for most of motion plannings, motion path is certain
, the direction of motion is it has been determined that the movement in vertical direction offset in the direction of motion is also required to measure, but offset very little, in this way
The width in grating road itself does not need prodigious size yet.
Specific make realize, can be that existing female grid replicate deck plate to (it is multiple that deck plate smears grating in advance
Glue), it can also be by the grating copied by female grid directly paste in deck plate.Since process of deployment only needs one-dimensional control
(direction of motion) can perfectly calibrate process of deployment very much by two-frequency laser interferometer etc..
Described its arrangement of measuring probe (array) needs to meet：Per pass grating road at least there are two measuring probe and its
Spacing is necessarily less than the laying length of monolithic grating, i.e., has multiple measuring probes to arbitrary one during the motion in moving mass
Grating carry out position sensing, and people having a common goal's measuring probe arrangement fore-and-aft clearance be no more than single grating block movement to length
Degree.Then there is it front and back more when some measuring probe can not be detected by grating fracture (being just provided with grating road mark) in this way
A measuring probe still can be detected uninterruptedly.It is equipped at least two turnpikes again and is accomplished that same precision measure, has so very much
A measuring probe carries out coordinating to count an output for obtaining the measurement accuracy grade.This point closes nanometer measurement very much
Key, because often stability is bad for nano level measurement, most apparent feature is exactly that resolution ratio is very high but precision low one arrives
Two orders of magnitude.And need setting for large-size motion block carrier for the 450mm diameter wafers of Next Generation Lithographies eedle pair are this kind of
Standby, the size of moving mass is enough to arrange a large amount of probe.
The grating arranged on table top can be different type, and also corresponding according to the type difference Probe arrangement of grating
It is different.Such as：Then using reflection-type grating, measuring probe both faces towards grating and is fixed together with moving mass, is such as arranged in movement
Below block；When using transmission grating then, the table top that grating is arranged is translucent material, when light source (array) is arranged in deck plate
Lower section when measuring probe arrangement it is identical as reflecting grating, but can also array of source and linear transducer array location swap or
Have and mixes slotting (thering is measuring probe and light source, the amount of the big arrangement of deck plate to require more up and down).In addition, in addition to using grating scale
With conventional transducer (can only realize one-dimensional measurement), other kinds of measuring probe can also be utilized to realize that three-dimensional motion measures.
Grating road mark is arranged in the edge at the port joint position in grating road, the edge in the roads Dao Yu, table top, and each
A road mark label is unique and its relative coordinate position relationship is demarcated to establish the seat of entire table top by equipment such as interferometers in advance
Mark net, raster probe or additional probes can unique identification and the calibration for probe measurement displacement, reduce error propagation.Grating road
Target functions as the scaling point (calibration point) of entire table top coordinate grid, and the relative coordinate relationship between each grating road mark is by swashing
The equipment such as optical interferometer are demarcated in advance, and are inputted and coordinated control circuit system.As long as its form is convenient for probe unique identification
(each grating road mark is different), such as the bright spot of special speckle point, different colours, special line, zero locatino grating, effect are similar
In the milestone of road, play the role of measuring verification.
Further, coordinate control circuit by the relative position relation between road mark data, measuring probe (through other means
Precision calibration) data, measuring probe actual measurement data be for statistical analysis to obtain final displacement, speed data.Coordinate
Control circuit carry out coordinating together with measuring probe control may be implemented single probe segment that number is few but overall measurement accuracy more
(final measurement accuracy depends on the fidelity of original signal to high effect, and segments chip at present and realize high power subdivision luck
Calculation speed declines to a great extent slow so as to cause whole measuring speed).Type is different according to the type of grating, and construction is different, but all
There is identical electrical (chip) subdivision function, but existing patent, product, document are the grating result of detection to single-frequency
It is finely divided, for example, the subdivision of Germany's sea moral grating scale product has reached 4096 times.This item claim is illustrated below,
The subdivision 1000 times if first chip is had the ability, then use 1000 lines it is right/grating of mm measures, initial precision is 1
Micron, the precision after subdivision is 1 nanometer；Second chip, which only has, segments 100 abilities, using 100 lines it is right/grating of mm surveys
Amount, initial precision is 10 microns, and the precision after subdivision is 100 nanometers, but simultaneously again it is synchronous using 1000 lines it is right/grating of mm
It is measured, initial precision is also 1 micron, according to the precision that normally segments its this measurement and can only obtain 10 nanometers.But
Its this subdivision need not be finely divided with 1 micron for section, and should be right for section (first time measurement accuracy) with 100 nanometers
1000 lines are right/and the result that is finely divided of mm grating signals is also 1 nanometer of precision.Accordingly, different gratings are reasonably arranged
Its grating frequency of road can reach the measurement purpose of high-speed, high precision by the algorithm.
It further includes that the multiple measuring probes of turnpike at the same level measure to coordinate the algorithm in control circuit (main to be realized using chip)
As a result statistical analysis, as same precision grade multiple measurement results in reject deviation it is larger (as cross the grating fracture moment should
The measurement result of probe) take it is average as output etc., this for high-precision, especially nanometer even sub-nanometer measurement particularly close
Key.And the equipment such as two-frequency laser interferometer, Metrological Atomic Force Microscope, X-ray interferometer are made a general survey of, most intuitively, apparent special
Sign is exactly that resolution ratio is very high but low one to two orders of magnitude of precision are even more, and reason of searching to the bottom is repeatedly to stablize
Property it is not good enough, the present invention using array Multi probe, multiple location coordinate synchronization measure do statistical analysis again method then provide one
A very novel effective solution thinking and scheme.In addition, measurement accuracy requirement is higher, corresponding grating road and probe number should
More arrangements.
It should be understood that the part that this specification does not elaborate belongs to the prior art.
Claims (5)
1. a kind of high-precision, high-speed motion measuring system being suitable for large format motion planning, it is characterised in that：Including high-flatness
Table top, polylith grating, multigroup grating measuring probe, coordinates control circuit, multiple grating roads mark at moving mass；Wherein, grating and light
Turnpike mark is both secured on table top, and grating measuring probe and coordination control circuit are fixed on moving mass, and moving mass is being coordinated
Relative to moving playing surface under the driving of control circuit；
The polylith grating is divided into multiple tracks along motion path and is layed in high-flatness table top；Laying method is：Different size
Grating neighboring trace is laid with, and twice at least occurs in the grating of same specification, and grating that ought wherein together falls short of because of grating block
When existing fracture, the grating in other roads has enough continuous lengths to cover the fracture site in the direction of motion of moving mass；
The grating road mark is arranged in the boundary line and mesa edge of central, the adjacent turnpike of fracture in grating road, and each
A road mark label is unique and its relative coordinate position relationship is demarcated to establish the coordinate net of entire table top by interferometer in advance.
2. a kind of high-precision, high-speed motion measuring system being suitable for large format motion planning according to claim 1, special
Sign is：The measuring probe includes multiple optoelectronic induction probes and integrated screen, and it includes braced frame, multiple foldings to integrate in screen
Crystal is penetrated, multiple optoelectronic induction probes and multiple refracting crystals are fixed in braced frame relatively.
3. a kind of high-precision, high-speed motion measuring system being suitable for large format motion planning according to claim 2, special
Sign is：Per pass grating corresponds to the position of moving mass at least there are two measuring probe, i.e. moving mass has multiple during the motion
Measuring probe carries out position sensing to arbitrary grating together, and the fore-and-aft clearance of people having a common goal's measuring probe arrangement is no more than single light
Length of the grid block in the direction of motion.
4. a kind of high-precision, high-speed motion measuring system being suitable for large format motion planning according to claim 2, special
Sign is：The grating arranged on the table top can select different types, different according to the type of grating, measuring probe arrangement
Also corresponding different；
When using reflection-type grating, laser light source is arranged in the homonymy in grating face with measuring probe, convenient for integrated with moving mass
Together；When using transmission-type grating, laser light source and measuring probe are distributed in the both sides in grating face, moving mass or with survey
Amount probe is integrated or is integrated together with laser light source, and the then array not integrated with moving mass is arranged in table top.
5. a kind of high-precision, high-speed motion measuring system being suitable for large format motion planning according to claim 2, special
Sign is：The coordination control circuit carries out coordination control together with the measuring probe, to realize that single probe segments number
Less but the higher effect of overall measurement accuracy；The control method for coordinating control circuit includes the multiple measuring probes of turnpike at the same level
The statistical analysis of measurement result rejects the larger data of deviation in multiple measurement results of same precision grade, is averaged conduct
Output, and measurement accuracy requires higher, corresponding grating road and measuring probe number then more arrangements.
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| CN112171069B (en) * | 2020-09-28 | 2022-07-12 | 广州翔声智能科技有限公司 | Laser marking system |
| CN112171070B (en) * | 2020-09-28 | 2022-05-31 | 广州翔声智能科技有限公司 | Laser marking motion system |
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