CN105371834A - Detection mass block and gyroscope adopting detection mass block - Google Patents
Detection mass block and gyroscope adopting detection mass block Download PDFInfo
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- CN105371834A CN105371834A CN201410412739.3A CN201410412739A CN105371834A CN 105371834 A CN105371834 A CN 105371834A CN 201410412739 A CN201410412739 A CN 201410412739A CN 105371834 A CN105371834 A CN 105371834A
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Abstract
The invention provides a detection mass block and a gyroscope adopting the detection mass block. The detection mass block comprises an anchor point, a first mass block, a second mass block and a third mass block; the anchor point is arranged in the first mass block and is fixed to an external substrate; the first mass block is arranged in the second mass block, and suspends on the anchor point through first elastic beams which are symmetric in a first direction; the second mass block is arranged in the third mass block, and suspends on the first mass block through second elastic beams which are symmetric in a second direction; the third mass block suspends on the second mass block through third elastic beams which are symmetric in the first direction, and is connected with an external driving mass block through fourth elastic beams which are symmetric in the second direction; the first direction is vertical to the second direction; and the first mass block has a first direction rotating shaft, the second mass block has a first direction rotating shaft and a second direction rotating shaft, and the third mass block has a second direction rotating shaft.
Description
Technical field
The present invention relates to micro mechanical technology field, particularly relate to a kind of Detection job block and adopt the gyroscope of this Detection job block.
Background technology
MEMS(MicroElectroMechanicalSystem, MEMS (micro electro mechanical system)) gyroscope utilizes Coriolis force (Coriolisforce is also called coriolis force) phenomenon.Coriolis force describes the one of the skew of the rectilinear motion that the particle carrying out rectilinear motion in rotating system produces relative to rotating system due to inertia.Coriolis force comes from the inertia that object of which movement has, the particle of rectilinear motion is carried out in rotating system, due to the effect of inertia, have and continue the trend of moving along original direction of motion, but due to system itself be rotate, after the motion that experienced by a period of time, in system, the position of particle can change to some extent, and the direction of its original movement tendency, if go to observe with the visual angle of rotating system, departing to a certain degree will be there is.MEMS gyro instrument volume is little, cost is low, integration good, has been able to apply more and more widely, as in the products such as mobile terminal, camera stabilization, game paddle, toy airplane, navigation.
MEMS gyro instrument comprises drive part and detecting portion, by driving and detect the measurement of coupling realization to angular velocity of satellite motion of motion; When gyro is in actuation movement mode, and when having turning rate input with driven-mode kinematic axis to vertical second direction, because coriolis effect gyroscope moves to generation sensed-mode in detection axis, by measuring the displacement of sensed-mode motion, at once measure the rotational angular velocity of object.The displacement of described measurement sensed-mode motion can be realized by the change of measuring electric capacity, such as, by determining the change of the electric capacity produced by the motion of traveling electrode at a resonant condition, detect the displacement of sensed-mode motion with capacitive method, the detection of electric capacity can be realized by interdigital electrode or plate electrode.Along with the development of microelectromechanicgyroscope gyroscope technology, the diaxon of high integration, low cost or three-axis measurement gyro meet the demand of Modern consumer electronics, become the trend of micro-electro-mechanical gyroscope development.Diaxon or three-axis gyroscope are generally be integrated on single substrate by multiple gyroscope to realize.And a kind of Detection job block in gyroscope only can detect the angular velocity in a direction, if desired detects the angular velocity of multiple directions, then need at least three Detection job blocks, this can not meet the requirement of consumption electronic product to gyroscope miniaturization.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of Detection job block and adopts the gyroscope of this Detection job block, and it can adopt a Detection job block to realize the detection of both direction angular velocity, reduces gyroscope volume.
In order to solve the problem, the invention provides a kind of Detection job block, comprise anchor point, the first mass, the second mass, the 3rd mass; Described anchor point is arranged in described first mass, and is fixed in an external substrate; Described first mass is arranged in the second mass, and by being suspended on described anchor point at the first elastic beam of first direction symmetry; Described second mass is arranged in the 3rd mass, and by being suspended on described first mass at the second elastic beam of second direction symmetry; Described 3rd mass is suspended on the second mass by the 3rd elastic beam in first direction symmetry, and by being connected with external drive mass at the 4th elastic beam of second direction symmetry; Described first direction is vertical with described second direction; Described first mass has the rotating shaft of first direction, and described second mass has the rotating shaft of first direction and second direction, and described 3rd mass has the rotating shaft of second direction.
Further, the position that described first mass is corresponding with described first elastic beam is provided with the first depression, and described first depression is for holding described first elastic beam.
Further, the position that described second mass is corresponding with described second elastic beam is provided with the second depression, and described second depression is for holding described second elastic beam.
Further, the position that described second mass is corresponding with described 3rd elastic beam is provided with the 3rd depression, and described 3rd depression is for holding described 3rd elastic beam.
Further, the position that described 3rd mass is corresponding with described 4th elastic beam is provided with the 4th depression, and described 4th depression is for holding described 4th elastic beam.
Further, described 3rd mass has a projection at described 4th depression correspondence position, and described second mass has an accommodation section in the position corresponding with described projection, and described projection stretches into described accommodation section.
Further, described anchor point, the first mass, the second mass, the 3rd mass, the first elastic beam, the second elastic beam, the 3rd elastic beam and the 4th elastic beam are one-body molded.
The present invention also provides a kind of gyroscope, and comprise substrate, Detection job block and drive mass, described Detection job block comprises anchor point, the first mass, the second mass, the 3rd mass; Described anchor point is arranged in described first mass, and fixes on the substrate; Described first mass is arranged in the second mass, and by being suspended on described anchor point at the first elastic beam of first direction symmetry; Described second mass is arranged in the 3rd mass, and by being suspended on the first mass at the second elastic beam of second direction symmetry; Described 3rd mass is suspended on the second mass by the 3rd elastic beam in first direction symmetry, and by being connected with described driving mass at the 4th elastic beam of second direction symmetry; Described first direction is vertical with described second direction; Described first mass has the rotating shaft of first direction, and described second mass has the rotating shaft of first direction and second direction, and described 3rd mass has the rotating shaft of second direction; Described gyroscope can detect the angular velocity of first direction and second direction.
Further, described substrate is symmetrically arranged with the first electrode along described first direction, described second mass correspondence position and described first electrode form the first capacitance group, for detecting electric capacity when described gyroscope has first direction angular velocity.
Further, described substrate is symmetrically arranged with the second electrode along described second direction, described second mass correspondence position and described second electrode form the second capacitance group, for detecting electric capacity when described gyroscope has second direction angular velocity.
An advantage of the present invention is, adopts a Detection job block can realize the detection of the angular velocity of both direction, decreases the quantity of Detection job block in gyroscope, reduce gyrostatic volume, realize the demand of gyroscope miniaturization.
Another advantage of the present invention is, adopts sunk structure to hold corresponding elastic beam, each mass of elastic beam and Detection job block is partly overlapped, reduces the space that described elastic beam takies, thus reduce the size of Detection job block further.
Accompanying drawing explanation
Fig. 1 is the structural representation of Detection job block first embodiment of the present invention;
Fig. 2 is the structural representation of Detection job block second embodiment of the present invention;
Fig. 3 is the structural representation of the gyrostatic embodiment of the present invention.
Embodiment
Below in conjunction with accompanying drawing to Detection job block provided by the invention and adopt the gyrostatic embodiment of this Detection job block to elaborate.
See Fig. 1, in the present invention first embodiment, Detection job block 1 comprises anchor point 10, first mass 11, second mass 12, the 3rd mass 13.
Described anchor point 10 is arranged in described first mass 11, and is fixed in an external substrate (not indicating in accompanying drawing).In this embodiment, described first mass 11 is the framework of inner hollow, and described anchor point 10 is arranged on framework inside.Described anchor point 10 is fixed in described external substrate, can not rotate and move.
Described first mass 11 is arranged in the second mass 12, and by being suspended on described anchor point 10 at the first elastic beam 14 of first direction symmetry.Described second mass 12 is the framework of inner hollow, and described first mass 11 hangs and is arranged on framework inside.
Described second mass 12 is arranged in the 3rd mass 13, and by being suspended on the first mass 11 at the second elastic beam 15 of second direction symmetry.Described 3rd mass 13 is the framework of inner hollow, and described second mass 12 hangs and is arranged on framework inside.
Described 3rd mass 13 by being suspended on the second mass 12 at the 3rd elastic beam 16 of first direction symmetry, and passes through to be connected with external drive mass (not indicating in accompanying drawing) at the 4th elastic beam 17 of second direction symmetry.
Described anchor point 10 can not rotate, and described first mass 11 is by the restriction of described first elastic beam 14, and make described first mass 11 only have the rotation axis of first direction, namely described first mass 11 can rotate around described first direction.Described 3rd mass 13 is connected with external drive mass by the 4th elastic beam 17 of second direction symmetry, described 3rd mass 13 is by the restriction of described 4th elastic beam 17, make described 3rd mass 13 only have the rotation axis of second direction, namely described 3rd mass 13 can rotate around described second direction.Described second mass 12 is suspended on the first mass 11 by the second elastic beam 15 of second direction symmetry, described 3rd mass 13 is by being suspended on the second mass 12 at the 3rd elastic beam 16 of first direction symmetry, simultaneously, described first mass 11 has the rotation axis of first direction, described 3rd mass 13 has the rotation axis of second direction, so described second mass 12 has the rotation axis of first direction and second direction.
Described first direction is vertical with described second direction.In this embodiment, described first direction is Y-direction, and described second direction is X-direction.The motion principle of Detection job block of the present invention is described below in detail.
When external drive mass drives described Detection job block, described external drive mass drives the 4th elastic beam 17 of described symmetry to move respectively to the positive negative sense (+Y-direction and-Y-direction) of first direction (Y-direction), now, described first mass 11, second mass 12 and the 3rd mass 13 all do clockwise rotation.
When described Detection job block 1 is subject to one when the angular velocity of second direction (X-direction), described first mass 11, second mass 12 and the 3rd mass 13 are subject to around first direction (Y-direction) Ge Shi moment, described first mass 11 and the second mass 12 rotate around described first direction (Y-direction), and there is no rotation axis at first direction (Y-direction) due to described 3rd mass 13, so described 3rd mass 13 does not rotate around described first direction (Y-direction).
When described Detection job block 1 is subject to one when the angular velocity of first direction (Y-direction), described first mass 11, second mass 12 and the 3rd mass 13 are subject to around second direction (X-direction) Ge Shi moment, described second mass 12 and the 3rd mass 13 rotate around described second direction (X-direction), and there is no rotation axis at first direction (Y-direction) due to described first mass 11, so described first mass 11 does not rotate around described second direction (X-direction).
Detection job block 1 of the present invention because the second mass 12 had both had the rotation axis of first direction, there is again the rotation axis of second direction, so can rotate at first direction, also can rotate in second direction.Namely only utilize a Detection job block 1 just can realize detecting first direction angular velocity, the object of second direction angular velocity can be detected again.Thus greatly reduce gyrostatic volume, realize gyrostatic miniaturization.
In order to reduce the size of Detection job block 1 of the present invention further, reducing described gyrostatic volume, present invention also offers the second embodiment.
See Fig. 2, in the present invention second embodiment, the position that described first mass 11 is corresponding with described first elastic beam 14 is provided with the first depression 20, and described first depression 20 is for holding described first elastic beam 14.The position that described second mass 12 is corresponding with described second elastic beam 15 is provided with the second depression 21, and described second depression 21 is for holding described second elastic beam 15.The position that described second mass 12 is corresponding with described 3rd elastic beam 16 is provided with the 3rd and caves in 22, and described 3rd depression 22 is for holding described 3rd elastic beam 16.The position that described 3rd mass 13 is corresponding with described 4th elastic beam 17 is provided with the 4th and caves in 23, and described 4th depression 23 is for holding described 4th elastic beam 17.
Described first elastic beam 14, second elastic beam 15, 3rd elastic beam 16 and the 4th elastic beam 17 are separately positioned on the first depression 20, second depression 21, 3rd depression 22 and the 4th depression 23 in, make the first elastic beam 14, second elastic beam 15, 3rd elastic beam 16 and the 4th elastic beam 17 respectively with described first mass 11, second mass 12 and the 3rd mass 13 overlap, reduce described first elastic beam 14, second elastic beam 15, the space that 3rd elastic beam 16 and the 4th elastic beam 17 take, thus the size of described Detection job block 1 can be reduced further, reduce described gyrostatic volume, realize gyrostatic miniaturization.
Further, because the 3rd mass 13 is equivalent to housing in Detection job block 1, so may there is the situation that the 3rd mass 13 is narrower, make the 4th depression 23 more shallow, described 4th elastic beam 17 can not be held by described 4th depression 23 completely.There is the 4th elastic beam 17 of part to be exposed to outside described 4th depression 23, thus increase the size of described Detection job block 1.Given this, 3rd mass 13 described in Detection job block 1 of the present invention has a projection 24 at described 4th depression 23 correspondence positions, described second mass 12 has an accommodation section 25 with described protruding 24 corresponding positions, and described protruding 24 stretch into described accommodation section 25.Due to protruding 24 with the coordinating of accommodation section 25, increase the degree of depth of described 4th depression 23, make described 4th elastic beam 17 can all or major part by the 4th depression 23 hold, the size of the described Detection job block 1 of further reduction, reduce described gyrostatic volume, realize gyrostatic miniaturization.
Further, described anchor point 10, first mass 11, second mass 12, the 3rd mass 13, first elastic beam 14, second elastic beam 15, the 3rd elastic beam 16 and the 4th elastic beam 17 are one-body molded, make simple.
Namely Detection job block 1 of the present invention can detect the angular velocity of first direction, also can detect the angular velocity of second direction, therefore the present invention detects gauge block 1 may be used for two axis gyroscope instrument, also can be used for three-axis gyroscope.The invention provides a kind of gyroscope, in this embodiment, only for two axis gyroscope instrument, the application of Detection job block 1 in gyroscope is described.Three-axis gyroscope increases a Z axis again and detects on the basis of two axis gyroscope instrument, is not repeated herein.
See Fig. 3, described gyroscope comprises substrate 2, Detection job block 1 and drives mass 3.The structure of described Detection job block 1 is identical with the structure of above-described Detection job block 1, is not repeated herein.Described anchor point 10 is fixed on described base 2.Described 3rd mass 13 is by being connected with described driving mass 3 at the 4th elastic beam 17 of second direction symmetry.Described substrate 2 is symmetrically arranged with in the first electrode 4(accompanying drawing along described first direction adopts dotted line to indicate), described second mass 12 correspondence position and described first electrode 4 form the first capacitance group, for detecting electric capacity when described gyroscope has first direction angular velocity.Described substrate 2 is symmetrically arranged with in the second electrode 5(accompanying drawing along described second direction adopts dotted line to indicate), described second mass 12 correspondence position and described second electrode 5 form the second capacitance group, for detecting electric capacity when described gyroscope has second direction angular velocity.In this embodiment, described first direction is Y-direction, and described second direction is X-direction.
Described driving mass 3 comprises driving mass 30 and lower driving mass 31.Under the effect of drive electrode (not indicating in accompanying drawing), described driving mass 3 vibrates, upper driving mass 30 and lower driving mass 31 vibrate respectively to the positive negative direction (+Y-direction and-Y-direction) of first direction (Y-direction), such as, upper driving mass 30 is to the vibration of+Y-direction, lower driving mass 31 is to the vibration of-Y-direction, this vibration passes to Detection job block 1 by the 4th elastic beam 17, and described first mass 11, second mass 12 and the 3rd mass 13 all turn clockwise vibration.
When gyroscope is subject to one around the angular velocity of second direction (X-direction), namely described Detection job block 1 is subject to one when the angular velocity of second direction (X-direction), described first mass 11, second mass 12 and the 3rd mass 13 are subject to around first direction (Y-direction) Ge Shi moment, described first mass 11 and the second mass 12 rotate around described first direction (Y-direction), and there is no rotation axis at first direction (Y-direction) due to described 3rd mass 13, so described 3rd mass 13 does not rotate around described first direction (Y-direction).Described second electrode 5 forms the second capacitance group with described second Detection job block 12, according to capacitance variations, thus can detect the angular velocity of gyroscope in second direction (X-direction).
When gyroscope is subject to one around the angular velocity of first direction (Y-direction), namely described Detection job block 1 is subject to one when the angular velocity of first direction (Y-direction), described first mass 11, second mass 12 and the 3rd mass 13 are subject to around second direction (X-direction) Ge Shi moment, described second mass 12 and the 3rd mass 13 rotate around described second direction (X-direction), and there is no rotation axis at first direction (Y-direction) due to described first mass 11, so described first mass 11 does not rotate around described second direction (X-direction).Described first electrode 4 forms the first capacitance group with described second Detection job block 12, according to capacitance variations, thus can detect the angular velocity of gyroscope in first direction (Y-direction).
The above is only the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (10)
1. a Detection job block, is characterized in that, comprises anchor point, the first mass, the second mass, the 3rd mass; Described anchor point is arranged in described first mass, and is fixed in an external substrate; Described first mass is arranged in the second mass, and by being suspended on described anchor point at the first elastic beam of first direction symmetry; Described second mass is arranged in the 3rd mass, and by being suspended on described first mass at the second elastic beam of second direction symmetry; Described 3rd mass is suspended on the second mass by the 3rd elastic beam in first direction symmetry, and by being connected with external drive mass at the 4th elastic beam of second direction symmetry; Described first direction is vertical with described second direction; Described first mass has the rotating shaft of first direction, and described second mass has the rotating shaft of first direction and second direction, and described 3rd mass has the rotating shaft of second direction.
2. Detection job block according to claim 1, is characterized in that, the position that described first mass is corresponding with described first elastic beam is provided with the first depression, and described first depression is for holding described first elastic beam.
3. Detection job block according to claim 1, is characterized in that, the position that described second mass is corresponding with described second elastic beam is provided with the second depression, and described second depression is for holding described second elastic beam.
4. Detection job block according to claim 1, is characterized in that, the position that described second mass is corresponding with described 3rd elastic beam is provided with the 3rd depression, and described 3rd depression is for holding described 3rd elastic beam.
5. Detection job block according to claim 1, is characterized in that, the position that described 3rd mass is corresponding with described 4th elastic beam is provided with the 4th depression, and described 4th depression is for holding described 4th elastic beam.
6. Detection job block according to claim 5, it is characterized in that, described 3rd mass has a projection at described 4th depression correspondence position, and described second mass has an accommodation section in the position corresponding with described projection, and described projection stretches into described accommodation section.
7. Detection job block according to claim 1, is characterized in that, described anchor point, the first mass, the second mass, the 3rd mass, the first elastic beam, the second elastic beam, the 3rd elastic beam and the 4th elastic beam are one-body molded.
8. a gyroscope, is characterized in that, comprise substrate, Detection job block and drive mass, described Detection job block comprises anchor point, the first mass, the second mass, the 3rd mass; Described anchor point is arranged in described first mass, and fixes on the substrate; Described first mass is arranged in the second mass, and by being suspended on described anchor point at the first elastic beam of first direction symmetry; Described second mass is arranged in the 3rd mass, and by being suspended on the first mass at the second elastic beam of second direction symmetry; Described 3rd mass is suspended on the second mass by the 3rd elastic beam in first direction symmetry, and by being connected with described driving mass at the 4th elastic beam of second direction symmetry; Described first direction is vertical with described second direction; Described first mass has the rotating shaft of first direction, and described second mass has the rotating shaft of first direction and second direction, and described 3rd mass has the rotating shaft of second direction; Described gyroscope can detect the angular velocity of first direction and second direction.
9. gyroscope according to claim 8, it is characterized in that, described substrate is symmetrically arranged with the first electrode along described first direction, and described second mass correspondence position and described first electrode form the first capacitance group, for detecting electric capacity when described gyroscope has first direction angular velocity.
10. gyroscope according to claim 8, it is characterized in that, described substrate is symmetrically arranged with the second electrode along described second direction, described second mass correspondence position and described second electrode form the second capacitance group, for detecting electric capacity when described gyroscope has second direction angular velocity.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410412739.3A CN105371834B (en) | 2014-08-21 | 2014-08-21 | Detect mass block and the gyroscope using the detection mass block |
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| CN201410412739.3A CN105371834B (en) | 2014-08-21 | 2014-08-21 | Detect mass block and the gyroscope using the detection mass block |
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| CN105371834A true CN105371834A (en) | 2016-03-02 |
| CN105371834B CN105371834B (en) | 2018-08-31 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107192384A (en) * | 2017-07-24 | 2017-09-22 | 深迪半导体(上海)有限公司 | A kind of MEMS three-axis gyroscopes |
| CN107782299A (en) * | 2016-08-27 | 2018-03-09 | 深迪半导体(上海)有限公司 | A kind of two axle MEMS gyroscopes |
| CN111174772A (en) * | 2020-01-13 | 2020-05-19 | 无锡莱斯能特科技有限公司 | Three-axis MEMS gyroscope |
| CN112097751A (en) * | 2020-09-02 | 2020-12-18 | 美新半导体(天津)有限公司 | Decoupling type double-frame micro gyroscope |
| CN114646309A (en) * | 2022-05-18 | 2022-06-21 | 绍兴圆方半导体有限公司 | Three-axis gyroscope |
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| CN112097751A (en) * | 2020-09-02 | 2020-12-18 | 美新半导体(天津)有限公司 | Decoupling type double-frame micro gyroscope |
| CN114646309A (en) * | 2022-05-18 | 2022-06-21 | 绍兴圆方半导体有限公司 | Three-axis gyroscope |
| CN114646309B (en) * | 2022-05-18 | 2022-08-23 | 绍兴圆方半导体有限公司 | Three-axis gyroscope |
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