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CN105280516B - A kind of scraper pressure control system for semiconductor packages - Google Patents

A kind of scraper pressure control system for semiconductor packages Download PDF

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Publication number
CN105280516B
CN105280516B CN201410226942.1A CN201410226942A CN105280516B CN 105280516 B CN105280516 B CN 105280516B CN 201410226942 A CN201410226942 A CN 201410226942A CN 105280516 B CN105280516 B CN 105280516B
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China
Prior art keywords
pressure
signal
scraper
receiving
accordingly
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CN105280516A (en
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郑昌荣
黄春桃
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Hitech Semiconductor Wuxi Co Ltd
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Hitech Semiconductor Wuxi Co Ltd
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Abstract

The present invention provides a kind of scraper pressure control system for semiconductor packages, comprising: scraper and web plate;The web plate is mobile by solenoid valve control;And the scraper is electrically connected with pressure-regulating device;Wherein, the pressure-regulating device includes: the pressure sensor for detecting the scraper pressure, generates simultaneously output pressure transducing signal;Pressure feedback unit, for receiving the pressure sensor signal and accordingly generation and output pressure feedback signal;Signal processing unit exports trigger signal when the actual pressure value and rated pressure value are not inconsistent for receiving the pressure feedback signal and calculating actual pressure value accordingly, and by the actual pressure value compared with preset rated pressure value;Pressure regulator, for when receiving the trigger signal, output pressure adjustment signal;And stepper motor, control is adjusted for receiving the pressure adjustment signal and carrying out pressure to the scraper accordingly, to realize the stability contorting of scraper pressure.

Description

A kind of scraper pressure control system for semiconductor packages
Technical field
The present invention relates to technical field of semiconductor encapsulation, more particularly to a kind of scraper pressure control for semiconductor packages System processed.
Background technique
Since the scraper device structure of current field of semiconductor package is single, it is unstable that there are scraper pressures, often occurs Pressure is excessive or too small phenomenon, the non-uniform phenomenon of resin thickness occurs;And cause buildup of resin to flow back after equipment downtime, then Secondary scrape is that unstable phenomenon occur;Lead to FM phenomenon, influences subsequent process operation.
Summary of the invention
In view of the foregoing deficiencies of prior art, the purpose of the present invention is to provide a kind of scraping for semiconductor packages Knife control pressurer system solves the problems, such as that existing scraper pressure is unstable.
In order to achieve the above objects and other related objects, the present invention provides a kind of scraper pressure control for semiconductor packages System processed, comprising: scraper and web plate;Wherein, the web plate is mobile by solenoid valve control;And the scraper is electrically connected with Pressure-regulating device;Wherein, the pressure-regulating device includes: the pressure sensor for detecting the scraper pressure, is generated And output pressure transducing signal;Pressure feedback unit, for receiving the pressure sensor signal and accordingly generation and output pressure Feedback signal;Signal processing unit, for receiving the pressure feedback signal and calculating actual pressure value accordingly, and by the reality Border pressure value is compared with preset rated pressure value, the output triggering letter when the actual pressure value and rated pressure value are not inconsistent Number;Pressure regulator, for when receiving the trigger signal, output pressure adjustment signal;And stepper motor, for connecing It receives the pressure adjustment signal and pressure is carried out to the scraper accordingly and adjust control.
Preferably, the pressure-regulating device further include:
Sample-and-hold circuit is believed for receiving the pressure adjustment signal of the pressure regulator output and generating sampling accordingly Number;
ADC quantization encoding circuit, connects the sample-and-hold circuit, generates pressure on the number for converting the sampled signal Show signal;
Digital display connects the ADC quantization encoding circuit, for showing that the pressure on the number shows signal.
Preferably, the sampling of the sample-and-hold circuit, the conversion of the ADC quantization encoding circuit and the number The display of display is real-time perfoming.
Preferably, the pressure sensor signal, pressure feedback signal and pressure adjustment signal are voltage.
Preferably, web plate described in the solenoid valve absorption and control is displaced.
Preferably, the pressure regulator is also used to be arranged the rated pressure value.
Preferably, the pressure regulator is also used to be arranged the retardation switching output time.
Preferably, the pressure regulator has multiple, is equidistantly positioned above the scraper.
Preferably, the pressure regulator is 3.
As described above, the present invention provides a kind of scraper pressure control system for semiconductor packages, comprising: scraper and net Plate;The web plate is mobile by solenoid valve control;And the scraper is electrically connected with pressure-regulating device;Wherein, the pressure Apparatus for adjusting force includes: the pressure sensor for detecting the scraper pressure, generates simultaneously output pressure transducing signal;Pressure is returned Unit is presented, for receiving the pressure sensor signal and accordingly generation and output pressure feedback signal;Signal processing unit is used for It receives the pressure feedback signal and calculates actual pressure value accordingly, and by the actual pressure value and preset rated pressure value Compare, exports trigger signal when the actual pressure value and rated pressure value are not inconsistent;Pressure regulator, for receiving When stating trigger signal, output pressure adjustment signal;And stepper motor, for receiving the pressure adjustment signal and accordingly to institute It states scraper and carries out pressure adjusting control, to realize the stability contorting of scraper pressure.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of scraper in the present invention.
Fig. 2 is an embodiment of pressure-regulating device in the scraper pressure control system for semiconductor packages of the invention Structural schematic diagram.
Fig. 3 is an embodiment of pressure-regulating device in the scraper pressure control system for semiconductor packages of the invention Structural schematic diagram.
Specific embodiment
Illustrate embodiments of the present invention below by way of specific specific example, those skilled in the art can be by this specification Other advantages and efficacy of the present invention can be easily understood for disclosed content.The present invention can also pass through in addition different specific realities The mode of applying is embodied or practiced, the various details in this specification can also based on different viewpoints and application, without departing from Various modifications or alterations are carried out under spirit of the invention.
Referring to Fig. 1, the present invention is the scraper 1 applied to semiconductor packaging device, the shape of the scraper 1 is for example as schemed Shown in 1.
The present invention provides a kind of scraper pressure control system for semiconductor packages, comprising: scraper 1, web plate (are not schemed Show);Wherein, the web plate is mobile by solenoid valve absorption and control, instead of mechanical movable before, improves merging precision; Since the use of scraper and web plate is common for a person skilled in the art, therefore do not go to live in the household of one's in-laws on getting married again to the two position herein It states.
As shown in Fig. 2, scraper pressure control system of the invention further includes pressure-regulating device 3, the pressure adjusts dress Setting 3 includes: the pressure sensor 31 for detecting 1 pressure of scraper, generates simultaneously output pressure transducing signal;Pressure feedback list Member 32, for receiving the pressure sensor signal and accordingly generation and output pressure feedback signal;Signal processing unit 33, is used for It receives the pressure feedback signal and calculates actual pressure value accordingly, and by the actual pressure value and preset rated pressure value Compare, exports trigger signal when the actual pressure value and rated pressure value are not inconsistent;Pressure regulator 34, for receiving When the trigger signal, output pressure adjustment signal;And stepper motor 35, for receiving the pressure adjustment signal and accordingly Pressure is carried out to the scraper 1 and adjusts control;It should be noted that in the present embodiment, the pressure sensor signal, pressure feedback Signal and pressure adjustment signal are voltage signal, such as pressure sensor signal is expressed as Vi, and pressure feedback signal is expressed as V0, pressure adjustment signal are expressed as Vf.
It should be noted that mainly automatic pressure regulation herein, but also can be in other embodiments manually adjust, or Pressure regulator 34 described in person, which has, triggers interface manually for triggering adjusting manually.
As shown in figure 3, the pressure-regulating device 3 can also include: sample-and-hold circuit 36, for receiving the pressure The pressure adjustment signal of the output of adjuster 34 simultaneously generates sampled signal accordingly;ADC quantization encoding circuit 37 connects the sampling and protects Circuit 35 is held, generates pressure on the number display signal for converting the sampled signal;Digital display 38 connects the ADC amount Change coding circuit 36, for showing that the pressure on the number shows signal;Wherein, the digital display 38 can be 4 LED numbers Code tube display.
Preferably, the sampling of the sample-and-hold circuit 35, the conversion of the ADC quantization encoding circuit 37 and described The display of digital display 37 is real-time perfoming.
Preferably, the pressure regulator 34 is also used to be arranged the rated pressure value;Also, the pressure regulator 34, it is also used to be arranged the retardation switching output time, to the output regulation signal that is delayed.
Preferably, the pressure regulator 34 has multiple, is equidistantly positioned above the scraper 1;Further preferably , the pressure regulator 34 is 3.
As described above, the present invention provides a kind of scraper pressure control system for semiconductor packages, comprising: scraper and net Plate;The web plate is mobile by solenoid valve control;And the scraper is electrically connected with pressure-regulating device;Wherein, the pressure Apparatus for adjusting force includes: the pressure sensor for detecting the scraper pressure, generates simultaneously output pressure transducing signal;Pressure is returned Unit is presented, for receiving the pressure sensor signal and accordingly generation and output pressure feedback signal;Signal processing unit is used for It receives the pressure feedback signal and calculates actual pressure value accordingly, and by the actual pressure value and preset rated pressure value Compare, exports trigger signal when the actual pressure value and rated pressure value are not inconsistent;Pressure regulator, for receiving When stating trigger signal, output pressure adjustment signal;And stepper motor, for receiving the pressure adjustment signal and accordingly to institute It states scraper and carries out pressure adjusting control, to realize the stability contorting of scraper pressure.
The above-described embodiments merely illustrate the principles and effects of the present invention, and is not intended to limit the present invention.It is any ripe The personage for knowing this technology all without departing from the spirit and scope of the present invention, carries out modifications and changes to above-described embodiment.Cause This, institute is complete without departing from the spirit and technical ideas disclosed in the present invention by those of ordinary skill in the art such as At all equivalent modifications or change, should be covered by the claims of the present invention.

Claims (8)

1. a kind of scraper pressure control system for semiconductor packages characterized by comprising
Scraper and web plate;Wherein, the web plate is mobile by solenoid valve control;And
The scraper is electrically connected with pressure-regulating device;
Wherein, the pressure-regulating device includes:
For detecting the pressure sensor of the scraper pressure, simultaneously output pressure transducing signal is generated;
Pressure feedback unit, for receiving the pressure sensor signal and accordingly generation and output pressure feedback signal;
Signal processing unit practical is pressed for receiving the pressure feedback signal and calculating actual pressure value accordingly, and by described Force value exports trigger signal when the actual pressure value and rated pressure value are not inconsistent compared with preset rated pressure value;
Pressure regulator, for when receiving the trigger signal, output pressure adjustment signal;And stepper motor, it is used for It receives the pressure adjustment signal and pressure is carried out to the scraper accordingly and adjust control;
The pressure-regulating device further include:
Sample-and-hold circuit, for receiving the pressure adjustment signal of pressure regulator output and generating sampled signal accordingly;
ADC quantization encoding circuit, connects the sample-and-hold circuit, shows for converting the sampled signal generation pressure on the number Signal;
Digital display connects the ADC quantization encoding circuit, for showing that the pressure on the number shows signal;
The pressure-regulating device includes: the pressure sensor for detecting the scraper pressure, generates and output pressure senses Signal;Pressure feedback unit, for receiving the pressure sensor signal and accordingly generation and output pressure feedback signal;At signal Unit is managed, for receiving the pressure feedback signal and calculating actual pressure value accordingly, and by the actual pressure value and default Rated pressure value compare, export trigger signal when the actual pressure value and rated pressure value are not inconsistent;Pressure regulator is used In when receiving the trigger signal, output pressure adjustment signal;And stepper motor, letter is adjusted for receiving the pressure Number and accordingly to the scraper carry out pressure adjust control;
The pressure-regulating device further include: sample-and-hold circuit, the pressure for receiving the pressure regulator output are adjusted Signal simultaneously generates sampled signal accordingly;ADC quantization encoding circuit, connects the sample-and-hold circuit, for converting the sampling Signal generates pressure on the number and shows signal;Digital display connects the ADC quantization encoding circuit, for showing the pressure Digital displaying signal;Wherein, the digital display is 4 LED charactrons displays.
2. scraper pressure control system according to claim 1, which is characterized in that the sampling of the sample-and-hold circuit, The conversion of the ADC quantization encoding circuit and the display of the digital display are real-time perfoming.
3. scraper pressure control system according to claim 1, which is characterized in that the pressure sensor signal, pressure are returned Feedback signal and pressure adjustment signal are voltage.
4. scraper pressure control system according to claim 1, which is characterized in that net described in the solenoid valve absorption and control Plate displacement.
5. scraper pressure control system according to claim 1, which is characterized in that the pressure regulator is also used to set Set the rated pressure value.
6. scraper pressure control system according to claim 1, which is characterized in that the pressure regulator is also used to set Set the retardation switching output time.
7. scraper pressure control system according to claim 1, which is characterized in that the pressure regulator have it is multiple, It is equidistantly positioned above the scraper.
8. scraper pressure control system according to claim 7, which is characterized in that the pressure regulator is 3.
CN201410226942.1A 2014-05-27 2014-05-27 A kind of scraper pressure control system for semiconductor packages Active CN105280516B (en)

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CN201410226942.1A CN105280516B (en) 2014-05-27 2014-05-27 A kind of scraper pressure control system for semiconductor packages

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Application Number Priority Date Filing Date Title
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CN105280516B true CN105280516B (en) 2019-01-22

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108506261B (en) * 2018-04-11 2020-09-11 上海舜诺机械有限公司 Pressure regulating method based on valve device
CN111739816A (en) * 2019-03-25 2020-10-02 奇景光电股份有限公司 Spreading machine

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201438270U (en) * 2009-07-14 2010-04-14 深圳才纳半导体设备有限公司 Electronic tag packaging pressure control device
CN202965451U (en) * 2012-12-17 2013-06-05 沈丽琼 Screen printer accurately controlling pressure of scraper

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1883959A1 (en) * 2005-05-26 2008-02-06 Lpe Spa Vacuum system for wafer handling

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201438270U (en) * 2009-07-14 2010-04-14 深圳才纳半导体设备有限公司 Electronic tag packaging pressure control device
CN202965451U (en) * 2012-12-17 2013-06-05 沈丽琼 Screen printer accurately controlling pressure of scraper

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