CN105203555A - Multilayer graphene stain detection device - Google Patents
Multilayer graphene stain detection device Download PDFInfo
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- CN105203555A CN105203555A CN201510691239.2A CN201510691239A CN105203555A CN 105203555 A CN105203555 A CN 105203555A CN 201510691239 A CN201510691239 A CN 201510691239A CN 105203555 A CN105203555 A CN 105203555A
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 78
- 229910021389 graphene Inorganic materials 0.000 title claims abstract description 78
- 238000001514 detection method Methods 0.000 title claims abstract description 33
- 239000000428 dust Substances 0.000 claims abstract description 39
- 230000007246 mechanism Effects 0.000 claims abstract description 38
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 56
- 238000012546 transfer Methods 0.000 claims description 45
- 230000003287 optical effect Effects 0.000 claims description 36
- 229910052757 nitrogen Inorganic materials 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 26
- 230000000740 bleeding effect Effects 0.000 claims description 21
- 239000007789 gas Substances 0.000 claims description 20
- 238000012545 processing Methods 0.000 claims description 16
- 230000009471 action Effects 0.000 claims description 13
- 230000008859 change Effects 0.000 claims description 9
- 230000008569 process Effects 0.000 claims description 9
- 238000007789 sealing Methods 0.000 claims description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 7
- 239000001307 helium Substances 0.000 claims description 7
- 229910052734 helium Inorganic materials 0.000 claims description 7
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 7
- 239000001257 hydrogen Substances 0.000 claims description 7
- 229910052739 hydrogen Inorganic materials 0.000 claims description 7
- 238000000605 extraction Methods 0.000 claims description 3
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 150000002829 nitrogen Chemical class 0.000 claims description 3
- 238000010408 sweeping Methods 0.000 claims description 3
- 238000012360 testing method Methods 0.000 abstract description 20
- 230000002776 aggregation Effects 0.000 abstract 1
- 238000004220 aggregation Methods 0.000 abstract 1
- 230000002265 prevention Effects 0.000 abstract 1
- 230000003321 amplification Effects 0.000 description 6
- 238000003199 nucleic acid amplification method Methods 0.000 description 6
- 230000000149 penetrating effect Effects 0.000 description 6
- 230000007547 defect Effects 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000003672 processing method Methods 0.000 description 3
- 239000003086 colorant Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 241000282326 Felis catus Species 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000007770 graphite material Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
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Abstract
The invention relates to a multilayer graphene stain detection device. The multilayer graphene stain detection device comprises a stander, and a scanning mechanism, a controller, an operation mechanism, a photographing mechanism, an image processor, a seal cover, an air blower and a vacuumizing device, which are arranged on the stander; a principle that the laser is refracted is used for detecting a stain on graphene, the accuracy is relatively high, the laser having better aggregation property is used for gradual scanning, the precision and error prevention performance are higher, a laser sensor is used for acquiring a laser signal, the laser signal is analyzed by a control unit, the non-transparency characteristic can be convenient for test, and an effect for preventing the interference of other light from affecting a test result is realized; the air blower can scan a closed space, and dust in the air is prevented from dropping on the graphene to be detected not to affect the detection accuracy.
Description
Technical field
The present invention relates to a kind of multi-layer graphene dust detection device.
Background technology
Graphene is the two dimensional crystal only having one deck atomic thickness being stripped out from graphite material, being made up of carbon atom.Graphene is the thinnest material, is also the most tough material, more taller than best steel 200 times of fracture strength.It has again good elasticity simultaneously, and stretch range can reach 20% of own dimensions.If make hammock with the Graphene of one piece of area 1 square metre, own shortage in weight 1 milligram can bear the cat of a kilogram.Graphene is almost completely transparent, only absorbs the light of 2.3%.On the other hand, it is very fine and close, even minimum gas atom also cannot penetrate.These features make it be suitable as very much the raw material of transparent electron product, as transparent touch display screen, luminous plaque and solar panel.
Due to the excellent performance of Graphene, Graphene becomes the main points of a breakthrough bottleneck of current development in science and technology, although China is upper at the forefront in the world in the paper studies of Graphene, but in the application and detection of Graphene, also there is many deficiencies, in the application of Graphene, whether multi-layer graphene, in coincidence process, reaches the requirement of use, needs good detection means and checkout equipment.
Summary of the invention
The object of the invention is to: for above-mentioned Problems existing, multi-layer graphene dust detection device is provided, the principle utilizing laser to be refracted detects the stain on Graphene, there is higher accuracy, adopt the better laser of polymerism to scan one by one and have stronger accuracy and mistake proofing, laser sensor gathers laser signal, has control module analysis, its lighttight characteristic can be convenient to test, has and prevents the interference of other light and affect test result; Camera is high definition camera, and can take a picture to the carrying out of amplification 500 times-1000 times, it has continuous shooting function, more photo can be taken instantaneously, image processor detects, and has better anti-error property, improves accuracy, subnormal ambient in seal closure, can reduce air flowing, on the impact of laser beam, its air blown producer can clean this confined space, the dust in air is avoided to drop on Graphene to be detected, the accuracy that impact detects.
The technical solution used in the present invention is as follows:
The invention discloses a kind of multi-layer graphene dust detection device, comprising: frame and the scanning mechanism be arranged in frame, controller, operating mechanism, mechanism of taking pictures, image processor, seal closure, air blown producer and apparatus for vacuum producing;
Scanning mechanism comprises scanning support and be fixed on laser instrument on scanning support, lifter, and laser instrument comprises the laser pick-off groove of a flat laser generator, a round end laser generator and spill, is provided with some laser sensors inside laser pick-off groove; Laser sensor, two laser generators and lifter are electrically connected with controller respectively;
Fixator, catoptron and optical screen that operating mechanism comprises transfer table and arranges on a mobile station, transfer table be provided with transverse shifting device and vertically move device, transfer table and optical screen are electrically connected with controller; Optical screen is arranged on the side of transfer table, for generation of the light of single color; The below of fixator is located at by catoptron;
Mechanism of taking pictures comprises the fixed mount be fixed in frame, the camera be arranged on fixed mount; Be provided with retractor device at the camera lens place of camera, below retractor device, be provided with moveable magnifier; This mechanism of taking pictures is connected with controller;
Image processor is arranged and machine frame inside, is connected, for image procossing with controller;
Seal closure is located at above frame, and forms lighttight confined space with frame, is provided with sealing ring in the edge of seal closure;
Apparatus for vacuum producing is arranged with in frame, comprises vacuum motor, gas outlet and bleeding point; Retaining valve is provided with between gas outlet and bleeding point;
Air blown producer with setting and frame comprises the nitrogen pot, solenoid valve and the air blast head that are connected successively; Also this nitrogen pot is connected by solenoid valve and pipeline at bleeding point place.
Further, the partially flat laser that described flat laser generator generation is wide is 1mm, thickness is 10um; It is the Column laser of 10um that described round end laser generator produces radius.
Further, high, medium and low three gears of described lifter, respectively corresponding friction speed; The translational speed of low or first gear is 5cm/min.
Further, described seal closure is opaque seal closure; Seal closure is provided with observation panel to be opened/closed.
Further, the air blast head of described air blown producer has flat nozzle.
Further, described vacuum motor adopts the three-phase alternating current stepper motor of 220v; Described gas outlet is greater than bleeding point.
Further, the nitrogen of 88%, the helium of 5% and 7% hydrogen is comprised in described nitrogen pot.
Due to said structure, the principle utilizing laser to be refracted detects the stain on Graphene, there is higher accuracy, adopt the better laser of polymerism to scan one by one and there is stronger accuracy and mistake proofing, laser sensor gathers laser signal, have control module analysis, its lighttight characteristic can be convenient to test, has and prevents the interference of other light and affect test result; Camera is high definition camera, and can take a picture to the carrying out of amplification 500 times-1000 times, it has continuous shooting function, more photo can be taken instantaneously, image processor detects, and has better anti-error property, improves accuracy, subnormal ambient in seal closure, can reduce air flowing, on the impact of laser beam, its air blown producer can clean this confined space, the dust in air is avoided to drop on Graphene to be detected, the accuracy that impact detects.
Further, the control system of multi-layer graphene dust detection device comprises:
Control module, comprises controller;
Scanning element, comprises scanning mechanism, and scanning mechanism comprises laser instrument, lifter, the laser pick-off groove that laser instrument comprises a flat laser generator, a round end laser generator and spill and the some laser sensors be located at inside laser pick-off groove; Laser instrument is elevated to assigned address, the partially flat laser that the generation of band shape laser instrument is wide is 1mm, thickness is 10um, and laser is received by the laser sensor of appointed area in laser pick-off groove after Graphene reflection; Laser sensor in non-designated region receives laser intensity change that the laser sensor in laser or appointed area receives when exceeding setting value, then opening round end laser generator generation radius is the Column laser of 10um, Column laser is along the Width scanning of band shape laser, Column laser, on Graphene and catoptron reflects laser sensor, is convenient to calculate the position with stain on Graphene;
Operating unit, comprise transfer table and upper setting fixator on a mobile station and catoptron, transfer table be provided with transverse shifting device and vertically move device, transfer table and optical screen are electrically connected with controller; Fixator is used for fixing Graphene, and catoptron is located at below Graphene, and optical screen is located at the side of fixator, for generation of monochromatic light; When transfer table moves, the Graphene be located on fixator is moved horizontally, and reflects laser is to laser sensor;
Photographing unit, comprises mechanism of taking pictures, and mechanism of taking pictures comprises camera, be located at the retractor device at camera lens place and moveable magnifier and optical screen; Magnifier is movable to retractor device front end, is convenient to take pictures; The monochromatic light that reflection optical screen produces is taken pictures by camera;
Vacuum unit, comprises seal closure, apparatus for vacuum producing and air blown producer; The retaining valve that apparatus for vacuum producing comprises vacuum motor, gas outlet, bleeding point and is arranged between gas outlet and bleeding point; Air blown producer comprises nitrogen pot, solenoid valve and air blast head, and air blast head is controlled to rotate by controller; At bleeding point, place is also connected with nitrogen pot by solenoid valve; Seal closure coordinates frame scanning element, operating unit and photographing unit to be sealed; The nitrogen of 88%, the helium of 5% and 7% hydrogen is included in nitrogen pot;
Graphics processing unit, carries out image procossing for the picture collected photographing unit;
Control module is connected with scanning element, operating unit, photographing unit and vacuum unit, graphics processing unit respectively, and for controlling each unit.
Due to said system, make unit precise match, reach better Detection results, can according to its using method, it is effectively detected, alleviates the workload of manual detection, accurately can control the unified allocation of resources work of each unit, avoid the action conflict between unit, affect its accuracy of action; Its scanning element, produces two kinds of different laser, carries out respectively, preliminary scan and accurate scan to laser, avoids the accuracy because of individualized reasons impact scanning; Operating unit, moves Graphene, can displacement less, avoid laser move mode, excessive velocities, the defect that sweep velocity should not control; Photographing unit shows after stain can being amplified intuitively, can be convenient to observe and show; Vacuum unit, reduce seal closure can air, reduce the impact of air ion on laser intensity and degree of penetrating partially; Meanwhile, its air blown producer, can discharge the gas that in air, particle is large, and the dust simultaneously reducing seal closure is avoided, and the dust in seal closure is on the impact of testing result.
Further, the control method of control system:
(1), close seal closure, and detect the sealing condition at seal closure gap place;
(2), control module makes it with the rotating speed action of 180-200r/min and the air extracted out in seal closure to the electric current of vacuum motor 5-5.5A, makes the absolute pressure in seal closure be 80-88kpa;
(3), control module controls air blown producer and opens, and controls air blast head to nitrogen injection stream in seal closure, to blow afloat the dust in annular seal space;
(4), the electric current of control module increasing supply vacuum motor makes its rotating speed be increased to 230-240r/min; Make absolute pressure in seal closure not higher than 80kpa simultaneously;
(5), after 5-8min, close air blown producer, and be depressurized to absolute pressure 30-35kpa further in seal closure;
(6), open scanning element, control laser instrument lifting high to distance transfer table 20cm-22cm, control flat laser generator and produce the band shape laser that width is 1mm, thickness is 10um;
(7), control module control transfer table move with the speed transverse horizontal of 60cm/min, make reflective mirror move to band shape laser place, reflective mirror will be with shape laser reflection to laser sensor place;
(8), the position of adjustment transfer table, band shape laser, with the velocity sweeping catoptron of 2.5cm/min, scans reflective mirror, and laser sensor receives band shape laser; The position of control module record move platform, and the position and the laser intensity that record the laser sensor of receiving belt shape laser simultaneously;
(9), by the fixator above Graphene horizontal positioned to reflective mirror, adjustment transfer table utilizes band shape laser to carry out transversal scanning with the speed of 2.5cm/min to Graphene, and control module again detects and records the position of the laser sensor of receiving belt shape laser and the position of laser intensity and transfer table; The data of record before and after control module contrast, when the position of the laser sensor of receiving belt shape laser deflects or laser intensity change is greater than 2.75%, stop transfer table moving and close flat laser generator; Record current flat laser-scanning position;
(10), open Column laser, the scanning position of Column laser to laser flat before Graphene carries out longitudinal scanning with the speed of 0.2cm/min; When the position of the laser sensor receiving Column laser deflects or laser intensity variable quantity is greater than 6%, close laser instrument; The scanning position of control module mark Column laser on Graphene is stain position;
(11), control module mark stain position after, open optical screen and camera; Adjustment optical screen and position of camera, make camera to aim at the stain position of Graphene, and with the optical screen through mirror reflection for background;
(12), adjustment retractor device control the movement of magnifier, camera is focused to stain position;
(13), by optical screen be adjusted to white screen, camera carries out taking pictures continuously of 0.1ms interval to stain position; Obtain 20-30 and open photo;
(14), the photo of acquisition is transferred in control module by photographing unit, has control module to carry out judgement process;
(15), the color more than three times of adjustment optical screen, at every turn all to stain position continuous take pictures and obtain 20-30 open photo, then repeat step (14);
(16), control module controls photographing unit tenth skill, and controls laser continuation scanning;
(17), a Target Photo unloading is cut into the square sub-pictures that some length of sides are L1 by control module to graphics processing unit and by Target Photo, by the mid point of Target Photo be initial point, length in units of the length of side L1 of sub-pictures, set up rectangular coordinate system; The background average RGB value of background extraction Target Photo record; In Target Photo, take initial point as the center of circle, 2L1 is that radius draws spacing circle;
(18), contrast picture unloading identical or close with Target Photo background cut this picture to graphics processing unit by control module, adjusts the average RGB value of this contrast picture, makes it identical with the average RGB value of Target Photo; Dislocation is covered on Target Photo, the central point of this picture is limited in spacing circle and does not overlap with initial point, then delete Target Photo and contrast the sub-pictures that in picture, rgb value is identical;
(19) step (18), is repeated until the picture of same color background all covers on Target Photo;
(20), to residue sub-pictures draw circumscribed circle, the center of circle recording circumscribed circle is (m, n) coordinate and marks this coordinate;
(21), change the Target Photo of another background, repeat step (17)-(20); Obtain another mark coordinate;
(22), step (21) is repeated until all uses of having powerful connections; Extract and be allly labeled (m, n) coordinate; If all (m, n) coordinates are all positioned at the region of specifying size, and the coordinate mark number of times in this region is greater than designated value, then mark in this region and have stain;
(23), again obtain Target Photo, mid point is initial point, the length of side L2 of sub-pictures is unit length, set up rectangular coordinate system, L2=5L1; Target Photo is cut into the sub-pictures that some length of sides are L2;
(24) region, being labeled as stain in step (22) corresponds in coordinate system; If multiple region is close and have continuity, then this region determines whether stain again; If multiple region is not close or do not have continuity, then process further;
(25), again obtain a Target Photo, mid point is initial point, the length of side L2 of sub-pictures is unit length, set up rectangular coordinate system, L3=0.3L1; This Target Photo is cut into the sub-pictures that some length of sides are L3;
(26), the region being labeled as stain in step (22) is corresponded in coordinate system; The difference retaining rgb value and background rgb value in this region is greater than the part of setting value; And determine that this reserve area has stain.
Due to above-mentioned control method, unit precise match, reach better Detection results, can according to its using method, it is effectively detected, alleviates the workload of manual detection, accurately can control the unified allocation of resources work of each unit, avoid the action conflict between unit, affect its accuracy of action; Its scanning element, produces two kinds of different laser, carries out respectively, preliminary scan and accurate scan to laser, avoids the accuracy because of individualized reasons impact scanning; Operating unit, moves Graphene, can displacement less, avoid laser move mode, excessive velocities, the defect that sweep velocity should not control; Photographing unit shows after stain can being amplified intuitively, can be convenient to observe and show; Vacuum unit, reduce seal closure can air, reduce the impact of air ion on laser intensity and degree of penetrating partially; Meanwhile, its air blown producer, can discharge the gas that in air, particle is large, and the dust simultaneously reducing seal closure is avoided, and the dust in seal closure is on the impact of testing result.Due to said method, sealing environment can be cleaned efficiently, can reduce seal closure can air, reduce the impact of air ion on laser intensity and degree of penetrating partially; The dust reducing seal closure is avoided, and the dust in seal closure is on the impact of testing result; Improve the accuracy of result and accuracy rate, for test provides an excellent environment.Photographic method, can will detect to scanning element to take pictures in the position that may there is stain, adopts high definition camera, carry out amplification focusing, there is stronger specific aim, can realize the position shape of stain, represented by mode more intuitively, by the mode of many photos, reduce error, get rid of one by one, be background by different colors simultaneously, reduce uniform background and make the ND situation of stain, improve accuracy; Image processing method, can process multiple picture that collects, and obtains the sub-pictures that may there is stain; Getting rid of other can not flecked sub-pictures, thus reduce the calculated amount of control module, and then make the processing speed of picture processing unit faster, more convenient, reduce the resources occupation amount of hardware, determined in the region that there is stain of sub-pictures, workload can be reduced in the region after determining; Then the region of its doubtful stain is observed on the whole, that this region can, if this region has linear continuity relation or other continuity relation, can judge that this region is because dealing with improperly of causing of hardware, because, this stain with continuity relation, is easy to be visually noticeable, and judges without the need to adopting this method again; After excluding this kind of stain, refinement is carried out in remaining stain region, the region delimited before limiting further, ensures that the photo collected has more accuracy; Adopting different light sources, is reduce light source to the impact of result.
In sum, owing to have employed technique scheme, the invention has the beneficial effects as follows:
1, the principle utilizing laser to be refracted detects the stain on Graphene, there is higher accuracy, adopt the better laser of polymerism to scan one by one and there is stronger accuracy and mistake proofing, laser sensor gathers laser signal, there is control module analysis, its lighttight characteristic can be convenient to test, has and prevents the interference of other light and affect test result;
2, camera is high definition camera, and can take a picture to the carrying out of amplification 500 times-1000 times, it has continuous shooting function, more photo can be taken instantaneously, image processor detects, and has better anti-error property, improves accuracy, subnormal ambient in seal closure, can reduce air flowing, on the impact of laser beam, its air blown producer can clean this confined space, the dust in air is avoided to drop on Graphene to be detected, the accuracy that impact detects;
3, unit precise match, reach better Detection results, can according to its using method, it is effectively detected, alleviate the workload of manual detection, accurately can control the unified allocation of resources work of each unit, avoid the action conflict between unit, affect its accuracy of action;
4, operating unit, moves Graphene, can displacement less, avoid laser move mode, excessive velocities, the defect that sweep velocity should not control; The dust reducing seal closure is avoided, and the dust in seal closure is on the impact of testing result; Improve the accuracy of result and accuracy rate, for test provides an excellent environment.
Accompanying drawing explanation
Fig. 1 is image processing method front view in the present invention.
Mark in figure: 1-frame, 2-transfer table, 3-takes pictures mechanism, 4-air blast head, 5-scanning mechanism, 6-optical screen, 7-seal closure, 8-nitrogen pot, 9-vacuum motor.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in detail.
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
specific embodiment 1:
As shown in Figure 1, a kind of multi-layer graphene dust detection device of the present invention, comprising: frame 1 and be arranged on scanning mechanism 5, controller, the operating mechanism in frame 1, mechanism 3 of taking pictures, image processor, seal closure 7, air blown producer and apparatus for vacuum producing;
Scanning mechanism 5 comprises scanning support and be fixed on laser instrument on scanning support, lifter, and laser instrument comprises the laser pick-off groove of a flat laser generator, a round end laser generator and spill, is provided with some laser sensors inside laser pick-off groove; Laser sensor, two laser generators and lifter are electrically connected with controller respectively;
Fixator, catoptron and the optical screen 6 that operating mechanism comprises transfer table 2 and is arranged on transfer table 2, transfer table 2 be provided with transverse shifting device and vertically move device, transfer table 2 and optical screen 6 are electrically connected with controller; Optical screen 6 is arranged on the side of transfer table 2, for generation of the light of single color; The below of fixator is located at by catoptron;
Mechanism 3 of taking pictures comprises the fixed mount be fixed in frame 1, the camera be arranged on fixed mount; Be provided with retractor device at the camera lens place of camera, below retractor device, be provided with moveable magnifier; This mechanism 3 of taking pictures is connected with controller;
Image processor arranges with frame 1 inner, is connected, for image procossing with controller;
Seal closure 7 is located at above frame 1, and forms lighttight confined space with frame 1, is provided with sealing ring in the edge of seal closure 7;
Apparatus for vacuum producing is arranged with in frame 1, comprises vacuum motor 9, gas outlet and bleeding point; Retaining valve is provided with between gas outlet and bleeding point;
Air blown producer with arrange with frame 1 comprises be connected successively nitrogen pot 8, solenoid valve and air blast 4; Also this nitrogen pot 8 is connected by solenoid valve and pipeline at bleeding point place.
The partially flat laser that flat laser generator generation is wide is 1mm, thickness is 10um; It is the Column laser of 10um that round end laser generator produces radius.
High, medium and low three gears of lifter, respectively corresponding friction speed; The translational speed of low or first gear is 5cm/min.
Seal closure 7 is opaque seal closure 7; Seal closure 7 is provided with observation panel to be opened/closed.
The air blast of air blown producer 4 has flat nozzle.
Vacuum motor 9 adopts the three-phase alternating current stepper motor of 220v; Gas outlet is greater than bleeding point.
The nitrogen of 88%, the helium of 5% and 7% hydrogen is comprised in nitrogen pot 8.
Due to said structure, the principle utilizing laser to be refracted detects the stain on Graphene, there is higher accuracy, adopt the better laser of polymerism to scan one by one and there is stronger accuracy and mistake proofing, laser sensor gathers laser signal, have control module analysis, its lighttight characteristic can be convenient to test, has and prevents the interference of other light and affect test result; Camera is high definition camera, and can take a picture to the carrying out of amplification 500 times-1000 times, it has continuous shooting function, more photo can be taken instantaneously, image processor detects, and has better anti-error property, improves accuracy, subnormal ambient in seal closure 7, can reduce air flowing, on the impact of laser beam, its air blown producer can clean this confined space, the dust in air is avoided to drop on Graphene to be detected, the accuracy that impact detects.
specific embodiment 2:
According to the control system of the multi-layer graphene dust detection device of embodiment 1, comprising:
Control module, comprises controller;
Scanning element, comprises scanning mechanism 5, and scanning mechanism 5 comprises laser instrument, lifter, the laser pick-off groove that laser instrument comprises a flat laser generator, a round end laser generator and spill and the some laser sensors be located at inside laser pick-off groove; Laser instrument is elevated to assigned address, the partially flat laser that the generation of band shape laser instrument is wide is 1mm, thickness is 10um, and laser is received by the laser sensor of appointed area in laser pick-off groove after Graphene reflection; Laser sensor in non-designated region receives laser intensity change that the laser sensor in laser or appointed area receives when exceeding setting value, then opening round end laser generator generation radius is the Column laser of 10um, Column laser is along the Width scanning of band shape laser, Column laser, on Graphene and catoptron reflects laser sensor, is convenient to calculate the position with stain on Graphene;
Operating unit, comprises transfer table 2 and the fixator be above arranged on transfer table 2 and catoptron, and transfer table 2 be provided with transverse shifting device and vertically move device, transfer table 2 and optical screen 6 are electrically connected with controller; Fixator is used for fixing Graphene, and catoptron is located at below Graphene, and optical screen 6 is located at the side of fixator, for generation of monochromatic light; When transfer table 2 moves, the Graphene be located on fixator is moved horizontally, and reflects laser is to laser sensor;
Photographing unit, comprises mechanism 3 of taking pictures, and mechanism 3 of taking pictures comprises camera, be located at the retractor device at camera lens place and moveable magnifier and optical screen 6; Magnifier is movable to retractor device front end, is convenient to take pictures; The monochromatic light that reflection optical screen 6 produces is taken pictures by camera;
Vacuum unit, comprises seal closure 7, apparatus for vacuum producing and air blown producer; The retaining valve that apparatus for vacuum producing comprises vacuum motor 9, gas outlet, bleeding point and is arranged between gas outlet and bleeding point; Air blown producer comprises nitrogen pot 8, solenoid valve and air blast 4, and air blast 4 is controlled to rotate by controller; Also nitrogen pot 8 is connected with by solenoid valve at bleeding point place; Seal closure 7 coordinates frame 1 scanning element, operating unit and photographing unit to be sealed; The nitrogen of 88%, the helium of 5% and 7% hydrogen is included in nitrogen pot 8;
Graphics processing unit, carries out image procossing for the picture collected photographing unit;
Control module is connected with scanning element, operating unit, photographing unit and vacuum unit, graphics processing unit respectively, and for controlling each unit.
Due to said system, make unit precise match, reach better Detection results, can according to its using method, it is effectively detected, alleviates the workload of manual detection, accurately can control the unified allocation of resources work of each unit, avoid the action conflict between unit, affect its accuracy of action; Its scanning element, produces two kinds of different laser, carries out respectively, preliminary scan and accurate scan to laser, avoids the accuracy because of individualized reasons impact scanning; Operating unit, moves Graphene, can displacement less, avoid laser move mode, excessive velocities, the defect that sweep velocity should not control; Photographing unit shows after stain can being amplified intuitively, can be convenient to observe and show; Vacuum unit, reduce seal closure 7 can air, reduce the impact of air ion on laser intensity and degree of penetrating partially; Meanwhile, its air blown producer, can discharge the gas that in air, particle is large, and the dust simultaneously reducing seal closure 7 is avoided, and the dust in seal closure 7 is on the impact of testing result.
specific embodiment 3:
Control method according to the control system of specific embodiment 2:
(1), close seal closure 7, and detect the sealing condition at seal closure 7 gap place;
(2), control module makes it with the rotating speed action of 180-200r/min and the air extracted out in seal closure 7 to the electric current of vacuum motor 95-5.5A, makes the absolute pressure in seal closure 7 be 80-88kpa;
(3), control module controls air blown producer and opens, and controls air blast 4 to nitrogen injection stream in seal closure 7, to blow afloat the dust in annular seal space;
(4), the electric current of control module increasing supply vacuum motor 9 makes its rotating speed be increased to 230-240r/min; Make absolute pressure in seal closure 7 not higher than 80kpa simultaneously;
(5), after 5-8min, close air blown producer, and be depressurized to absolute pressure 30-35kpa further in seal closure 7;
(6), open scanning element, control laser instrument lifting high to distance transfer table 220cm-22cm, control flat laser generator and produce the band shape laser that width is 1mm, thickness is 10um;
(7), control module control transfer table 2 move with the speed transverse horizontal of 60cm/min, make reflective mirror move to band shape laser place, reflective mirror will be with shape laser reflection to laser sensor place;
(8), the position of adjustment transfer table 2, band shape laser, with the velocity sweeping catoptron of 2.5cm/min, scans reflective mirror, and laser sensor receives band shape laser; The position of control module record move platform 2, and the position and the laser intensity that record the laser sensor of receiving belt shape laser simultaneously;
(9), by the fixator above Graphene horizontal positioned to reflective mirror, adjustment transfer table 2 utilizes band shape laser to carry out transversal scanning with the speed of 2.5cm/min to Graphene, and control module again detects and records the position of the laser sensor of receiving belt shape laser and the position of laser intensity and transfer table 2; The data of record before and after control module contrast, when the position of the laser sensor of receiving belt shape laser deflects or laser intensity change is greater than 2.75%, stop transfer table 2 move and close flat laser generator; Record current flat laser-scanning position;
(10), open Column laser, the scanning position of Column laser to laser flat before Graphene carries out longitudinal scanning with the speed of 0.2cm/min; When the position of the laser sensor receiving Column laser deflects or laser intensity variable quantity is greater than 6%, close laser instrument; The scanning position of control module mark Column laser on Graphene is stain position;
(11), control module mark stain position after, open optical screen 6 and camera; Adjustment optical screen 6 and position of camera, make camera to aim at the stain position of Graphene, and with the optical screen 6 through mirror reflection for background;
(12), adjustment retractor device control the movement of magnifier, camera is focused to stain position;
(13), by optical screen 6 be adjusted to white screen, camera carries out taking pictures continuously of 0.1ms interval to stain position; Obtain 20-30 and open photo;
(14), the photo of acquisition is transferred in control module by photographing unit, has control module to carry out judgement process;
(15), the color more than three times of adjustment optical screen 6, at every turn all to stain position continuous take pictures and obtain 20-30 open photo, then repeat step (14);
(16), control module controls photographing unit tenth skill, and controls laser continuation scanning;
(17), a Target Photo unloading is cut into the square sub-pictures that some length of sides are L1 by control module to graphics processing unit and by Target Photo, by the mid point of Target Photo be initial point, length in units of the length of side L1 of sub-pictures, set up rectangular coordinate system; The background average RGB value of background extraction Target Photo record; In Target Photo, take initial point as the center of circle, 2L1 is that radius draws spacing circle;
(18), contrast picture unloading identical or close with Target Photo background cut this picture to graphics processing unit by control module, adjusts the average RGB value of this contrast picture, makes it identical with the average RGB value of Target Photo; Dislocation is covered on Target Photo, the central point of this picture is limited in spacing circle and does not overlap with initial point, then delete Target Photo and contrast the sub-pictures that in picture, rgb value is identical;
(19) step (18), is repeated until the picture of same color background all covers on Target Photo;
(20), to residue sub-pictures draw circumscribed circle, the center of circle recording circumscribed circle is (m, n) coordinate and marks this coordinate;
(21), change the Target Photo of another background, repeat step (17)-(20); Obtain another mark coordinate;
(22), step (21) is repeated until all uses of having powerful connections; Extract and be allly labeled (m, n) coordinate; If all (m, n) coordinates are all positioned at the region of specifying size, and the coordinate mark number of times in this region is greater than designated value, then mark in this region and have stain;
(23), again obtain Target Photo, mid point is initial point, the length of side L2 of sub-pictures is unit length, set up rectangular coordinate system, L2=5L1; Target Photo is cut into the sub-pictures that some length of sides are L2;
(24) region, being labeled as stain in step (22) corresponds in coordinate system; If multiple region is close and have continuity, then this region determines whether stain again; If multiple region is not close or do not have continuity, then process further;
(25), again obtain a Target Photo, mid point is initial point, the length of side L2 of sub-pictures is unit length, set up rectangular coordinate system, L3=0.3L1; This Target Photo is cut into the sub-pictures that some length of sides are L3;
(26), the region being labeled as stain in step (22) is corresponded in coordinate system; The difference retaining rgb value and background rgb value in this region is greater than the part of setting value; And determine that this reserve area has stain.
Due to above-mentioned control method, unit precise match, reach better Detection results, can according to its using method, it is effectively detected, alleviates the workload of manual detection, accurately can control the unified allocation of resources work of each unit, avoid the action conflict between unit, affect its accuracy of action; Its scanning element, produces two kinds of different laser, carries out respectively, preliminary scan and accurate scan to laser, avoids the accuracy because of individualized reasons impact scanning; Operating unit, moves Graphene, can displacement less, avoid laser move mode, excessive velocities, the defect that sweep velocity should not control; Photographing unit shows after stain can being amplified intuitively, can be convenient to observe and show; Vacuum unit, reduce seal closure 7 can air, reduce the impact of air ion on laser intensity and degree of penetrating partially; Meanwhile, its air blown producer, can discharge the gas that in air, particle is large, and the dust simultaneously reducing seal closure 7 is avoided, and the dust in seal closure 7 is on the impact of testing result.Due to said method, sealing environment can be cleaned efficiently, can reduce seal closure 7 can air, reduce the impact of air ion on laser intensity and degree of penetrating partially; The dust reducing seal closure 7 is avoided, and the dust in seal closure 7 is on the impact of testing result; Improve the accuracy of result and accuracy rate, for test provides an excellent environment.Photographic method, can will detect to scanning element to take pictures in the position that may there is stain, adopts high definition camera, carry out amplification focusing, there is stronger specific aim, can realize the position shape of stain, represented by mode more intuitively, by the mode of many photos, reduce error, get rid of one by one, be background by different colors simultaneously, reduce uniform background and make the ND situation of stain, improve accuracy; Image processing method, can process multiple picture that collects, and obtains the sub-pictures that may there is stain; Getting rid of other can not flecked sub-pictures, thus reduce the calculated amount of control module, and then make the processing speed of picture processing unit faster, more convenient, reduce the resources occupation amount of hardware, determined in the region that there is stain of sub-pictures, workload can be reduced in the region after determining; Then the region of its doubtful stain is observed on the whole, that this region can, if this region has linear continuity relation or other continuity relation, can judge that this region is because dealing with improperly of causing of hardware, because, this stain with continuity relation, is easy to be visually noticeable, and judges without the need to adopting this method again; After excluding this kind of stain, refinement is carried out in remaining stain region, the region delimited before limiting further, ensures that the photo collected has more accuracy; Adopting different light sources, is reduce light source to the impact of result.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (9)
1. a multi-layer graphene dust detection device, is characterized in that, comprising: frame and the scanning mechanism be arranged in frame, controller, operating mechanism, mechanism of taking pictures, image processor, seal closure, air blown producer and apparatus for vacuum producing;
Scanning mechanism comprises scanning support and be fixed on laser instrument on scanning support, lifter, and laser instrument comprises the laser pick-off groove of a flat laser generator, a round end laser generator and spill, is provided with some laser sensors inside laser pick-off groove; Laser sensor, two laser generators and lifter are electrically connected with controller respectively;
Fixator, catoptron and optical screen that operating mechanism comprises transfer table and arranges on a mobile station, transfer table be provided with transverse shifting device and vertically move device, transfer table and optical screen are electrically connected with controller; Optical screen is arranged on the side of transfer table, for generation of the light of single color; The below of fixator is located at by catoptron;
Mechanism of taking pictures comprises the fixed mount be fixed in frame, the camera be arranged on fixed mount; Be provided with retractor device at the camera lens place of camera, below retractor device, be provided with moveable magnifier; This mechanism of taking pictures is connected with controller;
Image processor is arranged and machine frame inside, is connected, for image procossing with controller;
Seal closure is located at above frame, and forms lighttight confined space with frame, is provided with sealing ring in the edge of seal closure;
Apparatus for vacuum producing is arranged with in frame, comprises vacuum motor, gas outlet and bleeding point; Retaining valve is provided with between gas outlet and bleeding point;
Air blown producer with setting and frame comprises the nitrogen pot, solenoid valve and the air blast head that are connected successively; Also this nitrogen pot is connected by solenoid valve and pipeline at bleeding point place.
2. multi-layer graphene dust detection device according to claim 1, is characterized in that, the partially flat laser that described flat laser generator generation is wide is 1mm, thickness is 10um; It is the Column laser of 10um that described round end laser generator produces radius.
3. multi-layer graphene dust detection device according to claim 2, is characterized in that, high, medium and low three gears of described lifter, respectively corresponding friction speed; The translational speed of low or first gear is 5cm/min.
4. multi-layer graphene dust detection device according to claim 3, is characterized in that, described seal closure is opaque seal closure; Seal closure is provided with observation panel to be opened/closed.
5. multi-layer graphene dust detection device according to claim 4, is characterized in that, the air blast head of described air blown producer has flat nozzle.
6. multi-layer graphene dust detection device according to claim 5, is characterized in that, described vacuum motor adopts the three-phase alternating current stepper motor of 220v; Described gas outlet is greater than bleeding point.
7. multi-layer graphene dust detection device according to claim 6, is characterized in that, comprises the nitrogen of 88%, the helium of 5% and 7% hydrogen in described nitrogen pot.
8. the multi-layer graphene dust detection device according to any one of claim 1-7, is characterized in that, the control system of multi-layer graphene dust detection device comprises:
Control module, comprises controller;
Scanning element, comprises scanning mechanism, and scanning mechanism comprises laser instrument, lifter, the laser pick-off groove that laser instrument comprises a flat laser generator, a round end laser generator and spill and the some laser sensors be located at inside laser pick-off groove; Laser instrument is elevated to assigned address, the partially flat laser that the generation of band shape laser instrument is wide is 1mm, thickness is 10um, and laser is received by the laser sensor of appointed area in laser pick-off groove after Graphene reflection; Laser sensor in non-designated region receives laser intensity change that the laser sensor in laser or appointed area receives when exceeding setting value, then opening round end laser generator generation radius is the Column laser of 10um, Column laser is along the Width scanning of band shape laser, Column laser, on Graphene and catoptron reflects laser sensor, is convenient to calculate the position with stain on Graphene;
Operating unit, comprise transfer table and upper setting fixator on a mobile station and catoptron, transfer table be provided with transverse shifting device and vertically move device, transfer table and optical screen are electrically connected with controller; Fixator is used for fixing Graphene, and catoptron is located at below Graphene, and optical screen is located at the side of fixator, for generation of monochromatic light; When transfer table moves, the Graphene be located on fixator is moved horizontally, and reflects laser is to laser sensor;
Photographing unit, comprises mechanism of taking pictures, and mechanism of taking pictures comprises camera, be located at the retractor device at camera lens place and moveable magnifier and optical screen; Magnifier is movable to retractor device front end, is convenient to take pictures; The monochromatic light that reflection optical screen produces is taken pictures by camera;
Vacuum unit, comprises seal closure, apparatus for vacuum producing and air blown producer; The retaining valve that apparatus for vacuum producing comprises vacuum motor, gas outlet, bleeding point and is arranged between gas outlet and bleeding point; Air blown producer comprises nitrogen pot, solenoid valve and air blast head, and air blast head is controlled to rotate by controller; At bleeding point, place is also connected with nitrogen pot by solenoid valve; Seal closure coordinates frame scanning element, operating unit and photographing unit to be sealed; The nitrogen of 88%, the helium of 5% and 7% hydrogen is included in nitrogen pot; The nitrogen of 88%, the helium of 5% and 7% hydrogen is included in nitrogen pot;
Graphics processing unit, carries out image procossing for the picture collected photographing unit;
Control module is connected with scanning element, operating unit, photographing unit and vacuum unit, graphics processing unit respectively, and for controlling each unit.
9. multi-layer graphene dust detection device according to claim 8, is characterized in that, the control method of control system:
(1), close seal closure, and detect the sealing condition at seal closure gap place;
(2), control module makes it with the rotating speed action of 180-200r/min and the air extracted out in seal closure to the electric current of vacuum motor 5-5.5A, makes the absolute pressure in seal closure be 80-88kpa;
(3), control module controls air blown producer and opens, and controls air blast head to nitrogen injection stream in seal closure, to blow afloat the dust in annular seal space;
(4), the electric current of control module increasing supply vacuum motor makes its rotating speed be increased to 230-240r/min; Make absolute pressure in seal closure not higher than 80kpa simultaneously;
(5), after 5-8min, close air blown producer, and be depressurized to absolute pressure 30-35kpa further in seal closure;
(6), open scanning element, control laser instrument lifting high to distance transfer table 20cm-22cm, control flat laser generator and produce the band shape laser that width is 1mm, thickness is 10um;
(7), control module control transfer table move with the speed transverse horizontal of 60cm/min, make reflective mirror move to band shape laser place, reflective mirror will be with shape laser reflection to laser sensor place;
(8), the position of adjustment transfer table, band shape laser, with the velocity sweeping catoptron of 2.5cm/min, scans reflective mirror, and laser sensor receives band shape laser; The position of control module record move platform, and the position and the laser intensity that record the laser sensor of receiving belt shape laser simultaneously;
(9), by the fixator above Graphene horizontal positioned to reflective mirror, adjustment transfer table utilizes band shape laser to carry out transversal scanning with the speed of 2.5cm/min to Graphene, and control module again detects and records the position of the laser sensor of receiving belt shape laser and the position of laser intensity and transfer table; The data of record before and after control module contrast, when the position of the laser sensor of receiving belt shape laser deflects or laser intensity change is greater than 2.75%, stop transfer table moving and close flat laser generator; Record current flat laser-scanning position;
(10), open Column laser, the scanning position of Column laser to laser flat before Graphene carries out longitudinal scanning with the speed of 0.2cm/min; When the position of the laser sensor receiving Column laser deflects or laser intensity variable quantity is greater than 6%, close laser instrument; The scanning position of control module mark Column laser on Graphene is stain position;
(11), control module mark stain position after, open optical screen and camera; Adjustment optical screen and position of camera, make camera to aim at the stain position of Graphene, and with the optical screen through mirror reflection for background;
(12), adjustment retractor device control the movement of magnifier, camera is focused to stain position;
(13), by optical screen be adjusted to white screen, camera carries out taking pictures continuously of 0.1ms interval to stain position; Obtain 20-30 and open photo;
(14), the photo of acquisition is transferred in control module by photographing unit, has control module to carry out judgement process;
(15), the color more than three times of adjustment optical screen, at every turn all to stain position continuous take pictures and obtain 20-30 open photo, then repeat step (14);
(16), control module controls photographing unit tenth skill, and controls laser continuation scanning;
(17), a Target Photo unloading is cut into the square sub-pictures that some length of sides are L1 by control module to graphics processing unit and by Target Photo, by the mid point of Target Photo be initial point, length in units of the length of side L1 of sub-pictures, set up rectangular coordinate system; The background average RGB value of background extraction Target Photo record; In Target Photo, take initial point as the center of circle, 2L1 is that radius draws spacing circle;
(18), contrast picture unloading identical or close with Target Photo background cut this picture to graphics processing unit by control module, adjusts the average RGB value of this contrast picture, makes it identical with the average RGB value of Target Photo; Dislocation is covered on Target Photo, the central point of this picture is limited in spacing circle and does not overlap with initial point, then delete Target Photo and contrast the sub-pictures that in picture, rgb value is identical;
(19) step (18), is repeated until the picture of same color background all covers on Target Photo;
(20), to residue sub-pictures draw circumscribed circle, the center of circle recording circumscribed circle is (m, n) coordinate and marks this coordinate;
(21), change the Target Photo of another background, repeat step (17)-(20); Obtain another mark coordinate;
(22), step (21) is repeated until all uses of having powerful connections; Extract and be allly labeled (m, n) coordinate; If all (m, n) coordinates are all positioned at the region of specifying size, and the coordinate mark number of times in this region is greater than designated value, then mark in this region and have stain;
(23), again obtain Target Photo, mid point is initial point, the length of side L2 of sub-pictures is unit length, set up rectangular coordinate system, L2=5L1; Target Photo is cut into the sub-pictures that some length of sides are L2;
(24) region, being labeled as stain in step (22) corresponds in coordinate system; If multiple region is close and have continuity, then this region determines whether stain again; If multiple region is not close or do not have continuity, then process further;
(25), again obtain a Target Photo, mid point is initial point, the length of side L2 of sub-pictures is unit length, set up rectangular coordinate system, L3=0.3L1; This Target Photo is cut into the sub-pictures that some length of sides are L3;
(26), the region being labeled as stain in step (22) is corresponded in coordinate system; The difference retaining rgb value and background rgb value in this region is greater than the part of setting value; And determine that this reserve area has stain.
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