CN105180978B - Optical sensor based on narrow-band light source and filtering characteristic adjustable element and its method - Google Patents
Optical sensor based on narrow-band light source and filtering characteristic adjustable element and its method Download PDFInfo
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Abstract
A kind of optical sensor and its method based on narrow-band light source and filtering characteristic adjustable element, optical sensor has narrow-band light source, the adjustable optical sensor of outgoing light connects filtering characteristic of narrow-band light source, the regulation and control input terminal of optical sensor connects controlling element, the output end of optical sensor connects optical detector, and controlling element and optical detector are also respectively connected with signal processing and control element.Method：Start all parts of optical sensor；The optical effect for changing controlling element regulates and controls parameter, and records outgoing optical signal information；Apply semaphore to be sensed；The optical effect for changing controlling element again regulates and controls parameter, and record outgoing optical signal information compares and analyzes the optical signal information measured twice before and after applying semaphore to be sensed and regulate and control the data of parameter, extracts semaphore parameter to be sensed.The present invention, using expensive spectrometer, Wavelength tunable light source and photodetector array, effectively reduces the cost and sensor-based system complexity of sensor by avoiding.
Description
Technical Field
The present invention relates to an optical sensor. In particular to an optical sensor based on a narrow-band light source and a filtering characteristic adjustable element and a method thereof.
Background
The information technology as the technology of the development support of the technology in the 21 st century is based on the related technologies of sensors, communications, computers, and the like. The sensor is an indispensable tool for information data acquisition and is also a core component in the Internet of things. Although the traditional sensor technology such as mechanical and chemical sensor technology is relatively mature, the sensor technology has the defects of low precision, easy interference and the like. The optical sensor can replace the traditional sensor in many fields by virtue of excellent performance and can expand the field of sensor use. For example, the optical sensor can be used for conventional sensing, such as monitoring current, voltage, electromagnetism and other important parameters of a power system, and can also be used for complex actual measurement places, such as underwater detection, aviation monitoring, radiation detection and the like. The optical sensor can be powered by a low-voltage power supply or even a passive system, so that the optical sensor is particularly suitable for a detection site with strict requirements on safety and explosion-proof measures. In addition, the remote multi-point real-time measurement and control based on the optical sensor can be realized by combining wireless and/or wired data transmission.
Current optical sensor systems based on optical sensor elements with spectral resonance characteristics generally comprise a wavelength tunable or broadband light source, an optical sensor element with spectral resonance characteristics and a spectrometer, such as k.devos, i.bartolozzi, e.schacht, p.bienstman, and r.bauts, "Silicon-on-insulator micro-resonator for sensing and laboratory-free biosensing," opt.express 15,7610-7615 (2007). The spectrometer can measure the change of the frequency spectrum resonance characteristic so as to extract the information quantity to be sensed. This solution requires the use of expensive and complex equipment spectrometers, the measurement accuracy and precision of which depends on the resolution, precision and stability of the light source and spectrometer. These requirements add significant complexity and cost to the sensor, reducing reliability and portability.
Another optical sensor scheme uses a broad spectrum light source, a grating demultiplexer that can distinguish (disperse) different wavelengths, and a photodetector array, such as "a cascaded optical waveguide sensor based on passive resonators and grating demultiplexers", patent nos.: 2011205416922. the grating demultiplexer and any one detector in the detector array form a band-pass filter, and the signal quantity to be sensed is extracted through the change of the optical signals detected by different detectors. The measurement accuracy of the optical sensor based on the scheme mainly depends on the resolution, accuracy and stability of the dispersion of the grating demultiplexer, and the dispersion accuracy and stability of the grating demultiplexer are easily influenced by the manufacturing process accuracy in actual preparation and are easily influenced by external environment fluctuation such as temperature change and the like in the using process. These effects reduce the utility of the solution and the reliability of the sensor. Furthermore, this solution requires a large number of photodetectors, which in turn increases the cost and power consumption of the sensor.
Disclosure of Invention
The invention aims to solve the technical problem of providing an optical sensor based on a narrow-band light source and a filter characteristic adjustable element and a method thereof, which can effectively reduce the cost of the sensor and the complexity of a sensing system by avoiding using an expensive spectrometer, a wavelength adjustable light source and a light detector array.
The technical scheme adopted by the invention is as follows: the utility model provides an optical sensor based on adjustable component of narrowband light source and filter characteristic, including the narrowband light source, the emergent light of narrowband light source connect the optical sensing element that filter characteristic is adjustable, the regulation and control input of optical sensing element is connected and is used for regulating and control optical sensing element frequency spectrum filter characteristic's regulation and control component, optical detector is connected to optical sensing element's output, regulation and control component and optical detector still connect signal processing and control element respectively.
The optical sensing element has at least one of a band-pass filter characteristic, a band-stop filter characteristic, a high-pass filter characteristic, a low-pass filter characteristic and an all-pass filter characteristic.
The optical sensing element is at least one of an optical structure of a surface plasmon wave resonance structure, a grating structure, a finite impulse response filter, an infinite impulse response filter, an all-pass filter which only changes the phase relation of signals and a filter which changes the light transmittance or the light absorbance in a set frequency domain.
The optical detector is capable of measuring at least one of power, phase and polarization information of the optical signal.
The regulating and controlling element changes the frequency spectrum filtering characteristic of the optical sensing element through at least one optical effect of thermo-optic, acousto-optic, electro-optic, optic-optic, magneto-optic and mechanical-optic effects.
The optical sensing element comprises a bus optical waveguide for receiving narrow-band light emitted by the narrow-band light source, an annular optical waveguide resonant cavity which is positioned on one side of the bus optical waveguide and coupled with the bus optical waveguide for transmitting light, and an optical sensing medium material taking the annular optical waveguide resonant cavity as a carrier, wherein a regulating element for regulating and controlling the frequency spectrum filtering characteristic of the optical sensing element is positioned on the outer side of the annular optical waveguide resonant cavity.
The optical sensing medium material is characterized in that the optical properties of the material are correspondingly changed along with physical and biochemical effects, wherein the physical and biochemical effects comprise at least one of pressure, stress, speed, acceleration, flow speed, temperature, humidity, gas, liquid, biological reagent, sound, light, electricity, electromagnetic field and radiation effect, and the variable optical properties of the optical sensing medium material are at least one of refractive index, light absorptivity, polarization, luminous intensity and polarization-related measurement parameters.
The optical sensing element comprises an interferometer and an optical sensing medium material arranged in the interferometer, wherein the interferometer is a first optical splitter or optical combiner for receiving narrow-band light emitted by a narrow-band light source and a second optical splitter or optical combiner in butt joint with two paths of light split by the first optical splitter or optical combiner, the emergent light of the second optical splitter or optical combiner is connected with an optical detector, the optical sensing medium material is arranged on one light path in butt joint of the first optical splitter or optical combiner and the second optical splitter or optical combiner, a regulating and controlling element for regulating and controlling the spectral filtering characteristic of the optical sensing element is arranged on the other light path in butt joint of the first optical splitter or optical combiner and the second optical splitter or optical combiner, and the optical sensing medium material is formed by changing the optical property of the material along with the physical and biochemical effects on the light path, the physical and biochemical effects include at least one of pressure, stress, velocity, acceleration, flow rate, temperature, humidity, gas, liquid, biological agent, acoustic, optical, electrical, electromagnetic field, and radiation effects, and the variable optical property of the photo-sensing medium material is at least one of refractive index, light absorption, polarization, luminescence intensity, and polarization-related measurement parameters.
The narrow-band light source is a laser light source or an incoherent light source, or a narrow-band light source formed by superposing a frequency spectrum broadband light source and a frequency domain band-pass filter; or a combination of a limited number of narrow-band light sources.
A sensing method of an optical sensor based on a narrow-band light source and a filter characteristic adjustable element comprises the following steps:
1) starting various parts of the optical sensor, wherein the parts comprise a light source, an optical sensing element with spectrum filtering characteristic and adjustable filtering characteristic, a regulation and control element, a light detector and a signal processing and control element;
2) before the signal quantity to be sensed is applied, the optical effect regulation and control parameters of the regulation and control element are gradually changed within a set value range by the regulation and control element under the monitoring of the signal processing and control element, the optical detector measures emergent light signal information of the optical sensing element regulated and controlled by the regulation and control element, and the signal processing and control element records the optical effect regulation and control parameters of the regulation and control element and corresponding emergent light signal information measured by the optical detector;
3) after the signal quantity to be sensed is applied, the physical and biochemical effect caused by the signal quantity to be sensed changes the optical property of the optical sensing medium material taking the optical sensing element as a carrier, so that the optical property of the optical sensing element including the frequency spectrum filtering characteristic is changed;
4) after the sensed semaphore and the optical sensing medium material generate a physical and biochemical effect which causes the spectral filtering characteristic of the optical sensing element to change, the regulating element gradually changes the optical effect regulating and controlling parameter of the regulating and controlling element within a set value range again under the monitoring of the signal processing and controlling element, the optical detector measures the emergent light signal information of the optical sensing element regulated and controlled by the regulating and controlling element, and the signal processing and controlling element records the optical effect regulating and controlling parameter of the regulating and controlling element and the corresponding emergent light signal information measured by the optical detector;
5) and the signal processing and control element compares and analyzes the optical signal information and the data of the regulation and control parameters obtained by two times of measurement before and after the application of the semaphore to be sensed, extracts the semaphore parameter to be sensed and completes the sensing process.
According to the optical sensor based on the narrow-band light source and the filtering characteristic adjustable element and the method thereof, the cost of the sensor and the complexity of a sensing system are effectively reduced by avoiding using an expensive spectrometer, a wavelength adjustable light source and a light detector array. In addition, the spectral filtering characteristic of the optical sensing element can be adjusted, so that the light source and the optical sensing element do not need to be accurately calibrated, the influence of the manufacturing process and the operating environment on the accuracy and the stability of the sensing element is reduced, and the reliability and the practicability of the sensor are further improved.
The optical structure of the present invention has spectral filtering characteristics or can provide the Purcell effect. This effect can enhance the optical property change of the light sensing medium material induced by the sensing substance, such as the intensity of light absorption, thereby improving the sensitivity of the sensor and/or reducing the required sample amount to be sensed or the signal intensity of the parameter.
The sensor can carry out remote measurement and control in a wireless mode such as radio frequency signal connection and/or a wired mode such as optical fiber connection, and can realize a multi-point array, multi-parameter, networking and intelligent Internet of things system comprising the optical sensor. The sensor related by the invention can further expand the application range and functions of the sensor by combining the light wavelength division multiplexing technology.
Drawings
FIG. 1 is a block diagram of the overall construction of an optical sensor of the present invention;
FIG. 2 is a schematic structural diagram of a first embodiment of the optical sensor of the present invention;
FIG. 3 is a plot of the spectral response of the ring optical waveguide resonator before a signal quantity to be sensed is applied to the optical sensor of FIG. 2;
FIG. 4 is a graph of the spectral response of the ring optical waveguide resonator after applying a signal quantity to be sensed to the optical sensor of FIG. 2;
FIG. 5 is a graph of the optical signal measured by a light detector, such as a light power meter, in the optical sensor of FIG. 2 by adjusting the tuning element parameter R with a certain degree of accuracy;
FIG. 6 is a particular example of the situation depicted in FIG. 5;
FIG. 7 is a schematic structural diagram of a second embodiment of the optical sensor of the present invention;
fig. 8 is a flow chart of the method of the present invention.
In the drawings
110: narrow-band light source 120: optical sensor element
130: regulatory element 140: light detector
150: signal processing and control element 1201: bus light waveguide
1202: optical waveguide resonant cavity 1203: light sensing medium material
1211: interferometer 1212: first optical splitter or optical combiner
1213: photo-sensing dielectric material 1214: second optical splitter or optical combiner
Detailed Description
The optical sensor based on the narrow-band light source and the filter characteristic adjustable element and the method thereof according to the present invention will be described in detail with reference to the following embodiments and the accompanying drawings. It is worth noting that the embodiments of the present invention should not be construed as being limited to the examples set forth below. Any other changes, modifications, substitutions, combinations, and alterations without departing from the spirit and principles of the invention should be construed to be equivalents and should be included within the scope of the invention.
The optical sensor based on the narrow-band light source and the filtering characteristic adjustable element effectively reduces the cost of the sensor and the complexity of a sensing system by avoiding using an expensive spectrometer, a wavelength adjustable light source and a light detector array. In addition, because the frequency spectrum filtering characteristic of the optical sensing element can be adjusted, the light source and the optical sensing element do not need to be accurately calibrated, the influence of the manufacturing process and the operating environment on the precision and the stability of the sensing element is reduced, and the reliability and the practicability of the sensor are further improved. The optical sensor based on the narrow-band light source and the filtering characteristic adjustable element can integrate signal processing, control and transmission elements, such as an analog-digital signal conversion module, a logic operation module and the like, to process and regulate signals collected by the sensor.
As shown in fig. 1, the optical sensor based on a narrow-band light source and an adjustable filter characteristic component of the present invention includes a narrow-band light source 110, where the narrow-band light source 110 may be a laser light source or an incoherent light source such as a light emitting diode, or may be a narrow-band light source formed by superimposing a frequency spectrum broadband light source and a frequency domain band-pass filter; but also a combination of a limited number of narrow-band light sources. The emergent light of the narrow-band light source 110 is connected with an optical sensing element 120 with adjustable filtering characteristics, and the optical sensing element 120 is an optical sensing element which contains an optical sensing medium material, has spectrum filtering characteristics and is adjustable in filtering characteristics. The regulating input end of the optical sensing element 120 is connected to a regulating element 130 for regulating the spectral filtering characteristic of the optical sensing element 120, the output end of the optical sensing element 120 is connected to a light detector 140, and the regulating element 130 and the light detector 140 are further connected to a signal processing and control element 150, respectively. Incident light emitted by the narrow-band light source passes through the optical sensing element with spectral filtering characteristics and is detected by the light detector. The optical properties of the optical sensing element can be changed by the optical effect generated by the interaction of the applied signal quantity to be sensed and the optical sensing medium material taking the optical sensing element as a carrier. Before and after the signal quantity to be sensed is applied, the spectrum filtering characteristic of the optical sensing element is changed by gradually changing the optical effect regulating and controlling parameters of the regulating and controlling element, and emergent light signals are respectively measured and recorded. And (3) extracting the signal parameter to be sensed by comparing and analyzing the data of the optical signal and the regulation parameter measured twice, and finishing the sensing process.
Spectral filtering characteristics refer to a spectral response that exhibits an amplitude or phase that is different at a particular frequency than at other frequencies. The spectrum shows the filtering characteristics of band-pass, band-stop, high-pass, low-pass, full-pass, etc. all can meet the design requirements of the invention and are included in the protection scope of the invention. Such optical elements may be, but are not limited to, surface plasmon resonance, band-pass or band-stop filters such as gratings, finite impulse response filters such as Fabry-Perot resonators, ring-shaped optical resonators, disk resonators, photonic crystal resonators, infinite impulse response filters such as Michelson-type (Michelson) interferometers, Mach-Zehnder (Mach-Zehnder) interferometers, filters that change only the phase relationship of signals, and filters that change the transmittance or absorbance in a certain frequency domain, or optical designs based on a mixture of such structures. The spectral filtering characteristic may or may not have periodicity.
The narrow-band light source 110 is a spectrum narrow-band light source, which may be a laser light source or an incoherent light source such as a light emitting diode, and the spectrum narrow-band light source may also be a narrow-band light source formed by superimposing a spectrum broadband light source and a frequency-domain band-pass filter. The narrow-band light source 110 may also be a combination of a limited number of narrow-band light sources.
The adjusting and controlling element 130 changes the spectral filtering characteristic of the optical sensing element 120 through at least one optical effect of thermo-optic, acousto-optic, electro-optic, optic-optic, magneto-optic, and mechanical-optic effects. And, the corresponding relationship between the optical effect generated by the regulating element 130 and the change of the spectral filtering characteristic of the optical sensing element 120 is determined. The regulating element changes the spectral filtering characteristic of the optical sensing element through a certain optical effect, such as shifting the resonant frequency or wavelength. The optical effect referred to herein may be, but is not limited to, thermo-optical effect, acousto-optical effect, all-optical effect, electro-optical effect, magneto-optical effect, and mechanical-optical effect.
The optical detector 140 is an optical detector capable of measuring at least one of power, phase and polarization information of an optical signal, such as a photodetector or an optical power meter based on a material such as silicon, germanium or indium phosphide. At this time, the optical signal can be converted into an electrical signal for data processing and analysis.
The optical sensing element 120 has at least one of a band-pass filter characteristic, a band-stop filter characteristic, a high-pass filter characteristic, a low-pass filter characteristic, and an all-pass filter characteristic. The optical sensing element 120 is at least one of an optical structure of a surface plasmon wave resonance structure, a grating structure, a finite impulse response filter, an infinite impulse response filter, an all-pass filter that changes only a phase relationship of a signal, and a filter that changes transmittance or absorbance in a set frequency domain.
The optical design and structure of the finite impulse response filter are at least one of Fabry-Perot (Fabry-Perot) resonant cavities, ring-shaped optical path resonant cavities, disc-shaped resonant cavities and photonic crystal resonant cavities.
The optical design and structure of the infinite impulse response filter are Michelson type (Michelson) interferometer and/or Mach-Zehnder (Mach-Zehnder) interferometer.
In the embodiment of the present invention, the signal processing and control element 150 may be an 8051 single chip microcomputer or an ARM processor chip to add a required voltage source and a required memory. If high-speed signal processing (such as 1GHz) is required, FPGA programmable logic chips of Xilinx company and AD/DA development boards of ADI company can be adopted as the elements.
As shown in fig. 2, the optical sensing element 120 includes a bus waveguide 1201 for receiving narrowband light emitted by the narrowband light source 110, an annular optical waveguide resonant cavity 1202 located on one side of the bus waveguide 1201 and coupled to receive the transmitted light in the bus waveguide 1201, and an optical sensing medium material 1203 using the annular optical waveguide resonant cavity 1202 as a carrier, where the optical sensing medium material 1203 can interact with a signal quantity to be sensed, and the adjusting element 130 for adjusting the spectral filtering characteristic of the optical sensing element 120 is located outside the annular optical waveguide resonant cavity 1202.
The optical sensing medium material 1203 is a material whose optical properties can be changed correspondingly according to some physical and biochemical effect, including but not limited to at least one of pressure, stress, velocity, acceleration, flow rate, temperature, humidity, gas, liquid, biological agent, sound, light, electricity, electromagnetic field and radiation effect, and the variable optical properties of the optical sensing medium material 1203 are at least one of refractive index, light absorption rate, polarization, luminous intensity and polarization related measurement parameters. For example, the light sensing medium material may be a ferromagnetic material for sensing an electromagnetic field or a bio-enzyme for sensing a specific bio-agent, depending on the sensing requirements.
The embodiment shown in fig. 2 is an optical sensing element with tunable filter characteristics based on a finite impulse response filter with a ring-shaped optical waveguide resonator 1202. After the narrow-band light emitted from the light source 110 enters the bus optical waveguide 1201, when the frequency of the light is consistent with the eigen-resonance frequency of the resonant cavity, the incident light is coupled into the ring optical waveguide resonant cavity 1202, so the optical power (I) of the output light detected by the exit-end optical detector 140 is attenuated, and the light with the frequency is partially reflected back to the input end. Under the control of the data processing and control unit 150, the control unit 130 changes the spectral filtering characteristics of the filter by certain optical effects, such as thermo-optic effect, carrier plasma dispersion effect, etc., and the optical properties of the ring optical waveguide are changed, such as the intrinsic resonant frequency or wavelength is shifted in the spectrum. For example, the tuning element 130 may employ an on-state resistor to change the spectral filtering characteristics of the ring waveguide cavity 1202 by changing the refractive index of the carrier material of the ring waveguide cavity 1202 by controllable thermal radiation generated by the injected current, such as r.amatoya, c.w.holzwarth, h.i.smith, and r.j.ram, "Precision Tunable Silicon Compatible Filters," ieee photonics Technology Letters, vol.20, No.20, pp.1739-1741 (2008). The signal quantity to be sensed can interact with the optical sensing medium material 1203 in the optical sensing element, which takes the ring optical waveguide resonant cavity 1202 as a carrier, and correspondingly change the optical properties of the ring optical waveguide, such as the intrinsic resonant frequency or wavelength.
As shown in fig. 3 and 4, are the spectral responses of the ring optical waveguide resonator before and after the application of the signal quantity to be sensed, respectively. The horizontal axis of the graph represents the wavelength λ and the vertical axis represents the corresponding outgoing optical signal information, e.g., optical power I (λ), as measured by the optical detector of the sensor, e.g., an optical power meter. Both 310 and 410 of the two figures point to the same wavelength λ of the incident light on a horizontal axis scale0. Curve 320 corresponds to the spectral response of the ring optical waveguide resonator before the signal quantity to be measured is applied. By progressively adjusting the tuning element parameter R, the spectral response of the ring waveguide resonator corresponds to curves 321, 322, 323, respectively. Curve 420 corresponds to the spectral response of the ring optical waveguide resonator after the amount of signal to be sensed is applied. Curves 320 and420 correspond to the optical effect produced by the reaction of the signal quantity to be sensed with the photo-sensing medium material and the resulting change in the spectral response of the photo-sensing element. Curves 321, 322, 323, 421, 422, 423 are spectral responses of the optical waveguide resonator corresponding to the tuning element parameter R after applying the signal quantity to be sensed. It should be noted that the curves 321, 322, 323, 421, 422, 423 are only schematic diagrams of changing the spectral response of the resonator by adjusting the parameter R of the adjusting and controlling element, and in practical applications, the parameter R of the adjusting and controlling element should be scanned by steps dense enough within a certain range of value range to obtain enough outgoing light signal information i (R) to ensure the accuracy and precision of the sensor measurement.
As shown in fig. 5, by adjusting the tuning element parameter R with a certain accuracy, the light detector in the sensor, e.g. an optical power meter, measures and obtains i (R) curves 510 and 520. Curves 510 and 520 correspond to data before and after the application of the semaphore to be sensed, respectively. By analyzing the parameter R of the regulating element and the emergent light signal information I (R) recorded by the two times of data, and combining the known corresponding relation between the optical effect generated by the regulating element and the change of the frequency spectrum filtering characteristic of the optical sensing element, the pre-calibrated measurement data, the relevant theoretical model and the numerical simulation data are compared, and the information of the semaphore to be sensed can be extracted.
Fig. 6 shows a special case of the situation described in fig. 5. This particular example may occur when, after applying a signal quantity to be sensed, the sensing element exhibits a significantly stronger change in light absorption properties than in light refraction properties, e.g. the spectral filtering characteristics of the optical sensing element do not change spectrally with a significant shift in the intrinsic resonance frequency or wavelength, and only certain properties of the emerging light signal, e.g. the optical powers 610 and 620, change. This does not affect the proper functioning of the sensor. By comparing the difference of the emergent light signals and the pre-calibrated measurement data, the relevant theoretical model and the numerical simulation data, the information of the semaphore to be sensed can still be accurately extracted.
As shown in fig. 7, the optical sensing element 120 may also be a device that includes an interferometer and an optical sensing medium material 1213 disposed within the interferometer, wherein, the interferometer is a first optical splitter or optical combiner 1211 for receiving the narrow-band light emitted from the narrow-band light source 110, and a second optical splitter or optical combiner 1212 for interfacing with the two paths of light split by the first optical splitter or optical combiner 1211, the outgoing light of the second optical splitter or combiner 1212 is connected to the photodetector 140, the light sensing medium material 1213 is disposed on one optical path where the first optical splitter or optical combiner 1211 and the second optical splitter or optical combiner 1212 are butted, the light sensing medium material 1213 can interact with a signal quantity to be sensed, the adjusting element 130 for adjusting the spectral filtering characteristic of the optical sensing element 120 is disposed on another optical path where the first optical splitter or optical combiner 1211 and the second optical splitter or optical combiner 1212 are butted.
The optical sensing medium material 1213 is a material whose optical properties can be changed correspondingly according to a physical and biochemical effect, including at least one of pressure, stress, velocity, acceleration, flow rate, temperature, humidity, gas, liquid, bio-agent, acoustic, optical, electrical, electromagnetic field and radiation effect, and the variable optical properties of the optical sensing medium material 1213 are at least one of refractive index, light absorption, polarization, luminescence intensity and polarization related measurement parameters.
The embodiment shown in fig. 7 is an optical sensing element with tunable filter characteristics comprising an infinite impulse response filter based on Mach-Zehnder (Mach-Zehnder) interferometers 1211, 1212. The narrow-band light generated by the light source 110 is split into two paths by a first optical splitter or optical combiner 1212: one of the optical paths contains a conditioning element 130; another light will pass through the photo-sensing medium material 1213. The adjusting and controlling element 130 changes the phase of the optical signal through optical effects such as thermo-optic effect, carrier plasma dispersion effect, etc., so as to cause optical transmission delay. For a Mach-Zehnder (Mach-Zehnder) interferometer with an asymmetric optical path, two paths of light are coherently superposed to form the spectral response of a band-elimination type filter with adjustable filter characteristics. In this case, the spectral response of the interferometer is similar to that of the ring waveguide cavity shown in FIG. 3. The semaphore to be sensed changes the spectral position of the optical properties of the interferometer, such as the bandstop characteristic, by interacting with the photo-sensing media material 1213. Before and after the signal quantity to be sensed is applied, the signal processing and control element 150 changes the frequency spectrum filtering characteristic of the interferometer by gradually changing the optical effect regulating and controlling parameter of the regulating and controlling element 130, and the light detectors 140 at the output ends respectively measure and record emergent light signals. The signal parameters to be sensed can be extracted by comparing and analyzing the data of the optical signals and the regulation and control parameters measured twice. As a variation of this embodiment, the conditioning element 130 and the light sensing medium material 1213 can also be in the same optical path of the interferometer.
As shown in fig. 8, the sensing method of the optical sensor based on the narrow-band light source and the filter characteristic adjustable element of the present invention includes the following steps:
1) starting various components of the optical sensor, including a light source 110, an optical sensing element 120 with spectral filtering characteristics and adjustable filtering characteristics, a conditioning element 130, a light detector 140 and a signal processing and control element 150;
2) before the signal quantity to be sensed is applied, the regulating and controlling element 130 gradually changes the optical effect regulating and controlling parameter of the regulating and controlling element 130 within the range of the set value range by a sufficiently dense stepping quantity under the monitoring of the signal processing and controlling element 150, the optical detector 140 measures the emergent light signal information of the optical sensing element 120 regulated and controlled by the regulating and controlling element 130, and the signal processing and controlling element 150 records the optical effect regulating and controlling parameter of the regulating and controlling element 130 and the corresponding emergent light signal information measured and obtained by the optical detector 140;
3) after the signal quantity to be sensed is applied, the physical and biochemical effects caused by the signal quantity to be sensed change the optical properties of the optical sensing medium material 1203/1213 taking the optical sensing element 120 as a carrier, so that the optical properties of the optical sensing element 120 including the spectrum filtering characteristics are changed;
4) after the physical and biochemical effects causing the spectral filtering characteristics of the optical sensing element 120 to change occur between the sensed signal quantity and the optical sensing medium material 1203/1213, the regulating element 130 gradually changes the optical effect regulating and controlling parameters of the regulating element 130 within a set value range again by sufficiently dense stepping quantity under the monitoring of the signal processing and controlling element 150, the optical detector 140 measures the emergent light signal information of the optical sensing element 120 regulated by the regulating element 130, and the signal processing and controlling element 150 records the optical effect regulating and controlling parameters of the regulating element 130 and the corresponding emergent light signal information measured by the optical detector 140;
5) the signal processing and control element 150 compares and analyzes the optical signal information and the data of the control parameter obtained by two measurements before and after the application of the semaphore to be sensed, extracts the semaphore parameter to be sensed, and completes the sensing process.
Claims (8)
1. An optical sensor based on a narrow-band light source and a filtering characteristic adjustable element is characterized by comprising a narrow-band light source (110), wherein emergent light of the narrow-band light source (110) is connected with an optical sensing element (120) with adjustable filtering characteristic, the regulation input end of the optical sensing element (120) is connected with a regulation element (130) for regulating and controlling the frequency spectrum filtering characteristic of the optical sensing element (120), the output end of the optical sensing element (120) is connected with an optical detector (140), and the regulation element (130) and the optical detector (140) are also respectively connected with a signal processing and control element (150); wherein,
the narrow-band light source (110) is a laser light source with nonadjustable wavelength, an incoherent light source with nonadjustable wavelength, or a narrow-band light source with nonadjustable wavelength formed by superposing a frequency spectrum broadband light source and a frequency domain band-pass filter; or a combination of a limited number of narrow-band light sources whose wavelengths are not tunable;
the optical detector (140) is capable of measuring at least one of power, phase and polarization information of the optical signal;
the optical effect generated by the interaction of the applied signal quantity to be sensed and the optical sensing medium material (1203) taking the optical sensing element (120) as a carrier changes the optical property of the optical sensing element (120); before and after the signal quantity to be sensed is applied, the spectrum filtering characteristic of the optical sensing element (120) is changed by gradually changing the optical effect regulating and controlling parameter of the regulating and controlling element (130), and emergent light signals are respectively measured and recorded; and (3) extracting the signal parameter to be sensed by comparing and analyzing the data of the optical signal and the regulation parameter measured twice, and finishing the sensing process.
2. The optical sensor based on a narrowband optical source and an element with adjustable filter characteristics of claim 1, wherein the optical sensing element (120) has at least one of a bandpass filter characteristic, a bandstop filter characteristic, a highpass filter characteristic, a lowpass filter characteristic and an all-pass filter characteristic.
3. The optical sensor based on a narrowband optical source and a tunable filter characteristic element according to claim 1, wherein the optical sensing element (120) is at least one of an optical structure of a surface plasmon wave resonant structure, a grating structure, a finite impulse response filter, an infinite impulse response filter, an all-pass filter that changes only a phase relationship of a signal, and a filter that changes transmittance or absorbance in a set frequency domain.
4. The optical sensor according to claim 1, wherein the adjusting element (130) is adapted to change the spectral filter characteristic of the optical sensing element (120) by at least one of thermo-optic, acousto-optic, electro-optic, photo-optic, magneto-optic and mechanical-optic effects.
5. The optical sensor based on the narrowband light source and the element with tunable filter characteristic as claimed in claim 1, 2, 3 or 4, wherein the optical sensing element (120) comprises a bus waveguide (1201) for receiving narrowband light emitted from the narrowband light source (110), a ring waveguide resonant cavity (1202) located at one side of the bus waveguide (1201) and coupled to receive the bus waveguide (1201) for transmitting light, and an optical sensing medium material (1203) using the ring waveguide resonant cavity (1202) as a carrier, and the adjusting element (130) for adjusting the spectral filter characteristic of the optical sensing element (120) is located outside the ring waveguide resonant cavity (1202).
6. The optical sensor based on the narrowband light source and the filter characteristic tunable element according to claim 1, wherein the optical sensing medium material (1203) is formed by changing optical properties of the material per se according to physical and biochemical effects, the physical and biochemical effects include at least one of pressure, stress, velocity, acceleration, flow speed, temperature, humidity, gas, liquid, biological reagent, sound, light, electricity, electromagnetic field and radiation effect, and the variable optical property of the optical sensing medium material (1203) is at least one of refractive index, light absorption rate, polarization, luminous intensity and polarization-related measurement parameters.
7. The optical sensor according to claim 1, 2, 3 or 4, wherein the optical sensing element (120) comprises an interferometer and an optical sensing medium material (1213) disposed in the interferometer, wherein the interferometer is a first optical splitter or optical combiner (1211) for receiving the narrow-band light emitted from the narrow-band light source (110), and a second optical splitter or optical combiner (1212) for interfacing with the two lights split out by the first optical splitter or optical combiner (1211), the emergent light of the second optical splitter or optical combiner (1212) is connected to the optical detector (140), the optical sensing medium material (1213) is disposed on an optical path where the first optical splitter or optical combiner (1211) and the second optical splitter or optical combiner (1212) are interfaced, and the adjusting element (130) for adjusting the spectral filtering characteristic of the optical sensing element (120) is disposed on the first optical splitter or optical combiner (1211) And the optical path between the optical combiner or optical combiner 1211 and the second optical splitter or optical combiner 1212 is connected, the optical sensing medium 1213 is a material whose optical property changes correspondingly with the physical and biochemical effect, the physical and biochemical effect includes at least one of pressure, stress, speed, acceleration, flow speed, temperature, humidity, gas, liquid, biological agent, sound, light, electricity, electromagnetic field and radiation effect, the variable optical property of the optical sensing medium 1213 is at least one of refractive index, light absorptivity, polarization, luminous intensity and polarization related measurement parameters.
8. A sensing method of the optical sensor based on the narrow-band light source and the filtering characteristic adjustable element according to any one of claims 1 to 7, characterized by comprising the following steps:
1) starting various components of the optical sensor, including a light source (110), an optical sensing element (120) with spectral filtering characteristics and adjustable filtering characteristics, a regulating element (130), a light detector (140) and a signal processing and control element (150);
2) before a signal quantity to be sensed is applied, an optical effect regulation and control parameter of a regulation and control element (130) is gradually changed in a set value range by the regulation and control element (130) under the monitoring of a signal processing and control element (150), an optical detector (140) measures emergent light signal information of an optical sensing element (120) regulated and controlled by the regulation and control element (130), and the signal processing and control element (150) records the optical effect regulation and control parameter of the regulation and control element (130) and corresponding emergent light signal information measured by the optical detector (140);
3) after the signal quantity to be sensed is applied, the physical and biochemical effects caused by the signal quantity to be sensed change the optical properties of the optical sensing medium material (1203/1213) taking the optical sensing element (120) as a carrier, and further change the optical properties of the optical sensing element (120) including the frequency spectrum filtering characteristic;
4) after the physical and biochemical effects which cause the spectral filtering characteristic of the optical sensing element (120) to change occur between the sensed semaphore and the optical sensing medium material (1203/1213), the optical effect regulation and control parameter of the regulation and control element (130) is gradually changed again within the range of a set value range under the monitoring of the signal processing and control element (150), the optical detector (140) measures the emergent light signal information of the optical sensing element (120) regulated and controlled by the regulation and control element (130), and the signal processing and control element (150) records the optical effect regulation and control parameter of the regulation and control element (130) and the corresponding emergent light signal information measured by the optical detector (140);
5) the signal processing and control element (150) compares and analyzes the data of the optical signal information and the regulation and control parameters obtained by two times of measurement before and after the application of the semaphore to be sensed, extracts the semaphore parameter to be sensed and completes the sensing process.
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| CN113686822B (en) * | 2021-03-17 | 2024-04-16 | 广东工业大学 | Sensing device, sensing system and regulation and control method based on surface plasma resonance |
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